US5051803A - Diode and producing method thereof and contact image sensor device comprising the same - Google Patents

Diode and producing method thereof and contact image sensor device comprising the same Download PDF

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Publication number
US5051803A
US5051803A US07/543,108 US54310890A US5051803A US 5051803 A US5051803 A US 5051803A US 54310890 A US54310890 A US 54310890A US 5051803 A US5051803 A US 5051803A
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type semiconductor
semiconductor layer
layer
diode
amorphous silicon
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US07/543,108
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Inventor
Koichi Kitamura
Hidenori Mimura
Kazuo Yamamoto
Yasumitsu Ohta
Kazuyoshi Sai
Kazuhiko Kawamura
Noboru Otani
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Nippon Steel Corp
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Nippon Steel Corp
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Assigned to NIPPON STEEL CORPORATION reassignment NIPPON STEEL CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: KAWAMURA, KAZUHIKO, KITAMURA, KOICHI, MIMURA, HIDENORI, OHTA, YASUMITSU, OTANI, NOBORU, SAI, KAZUYOSHI, YAMAMOTO, KAZUO
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0376—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including amorphous semiconductors
    • H01L31/03762—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including amorphous semiconductors including only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
    • H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
    • H01L31/1055—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type the devices comprising amorphous materials of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/548—Amorphous silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • This invention relates to a diode, more particularly, a pin diode for transducing incident rays to an electrical signal, a producing method thereof, and a contact image sensor device comprising the same for sensing an image of objects.
  • n layer In a pin diode, if a part of an incident layer, e.g., an n layer, is microcrystallized, the n layer would have a higher optical transparency and improved light sensitivity, and would have a higher electrical conductivity due to a lower electrical resistance of a microcrystalline silicon than that of a hydrogenated amorphous silicon, and therefore the diode characteristics of the pin diode would be improved (Y. Uchida, et al., "Microcrystalline Si-H Film and Its Application to Solar Cells", Japanese Journal of Applied Physics, vol. 21, No. 9, 1982, pp 586-588).
  • the aforementioned pin diode and a contact image sensor device comprising this pin diode could have improved conversion efficiency in a photoelectric conversion.
  • a method for microcrystallizing the incident side of a pin diode, e.g., the n layer, wherein a temperature of a deposited substrate Ts is kept between 500° C. and 600° C. during deposition of each layer is described in "F. Morin, et al., Polycrystalline silicon by glow discharge technique, Applied Physics Letters, vol. 35, No. 9, 1979, pp. 686-687". According to this method, the n layer does not become hydrogenated amorphous silicon, but becomes a microcrystallized amorphous silicon.
  • a deposition method in order to microcrystallize a whole layer at a low deposition substrate temperature Ts of about 250° C. which is a usual deposition temperature of hydrogenated amorphous silicon, is described in "Y. Osaka, et al., Microcrystalline Silicon ( ⁇ c-Si) Prepared by Plasma-Chemical Techniques, JARECT vol. 16, Amorphous Semiconductor Technologies & Devices, 1984, pp 80-91".
  • high power e.g., more than about 0.2 W/cm 2
  • a diode having an incident layer which includes 1 to 10% of microcrystallized silicon.
  • a contact image sensor device comprising a plurality of diodes each having an incident layer which includes 1 to 10% of microcrystallized silicon.
  • a method for producing a diode comprising the step of forming an incident layer in a condition where a molar ratio of hydrogen to monosilane as raw gases is 5:1 to 100:1 and an applied power between an anode and a cathode is 0.001 to 0.05 W/cm 2 .
  • FIG. 1 is a schematic diagram of an amorphous silicon growing apparatus for forming a pin diode according to the present invention
  • FIG. 2 is a cross-sectional view of an example of a pin diode according to the present invention.
  • FIG. 3 is a diagram showing spectral sensitivity characteristics of the pin diode according to the present invention.
  • FIG. 4 is a circuit diagram of an example of a contact image sensor device employing the pin diode as a photodiode.
  • FIG. 1 to FIG. 3 An embodiment of the present invention is described referring to FIG. 1 to FIG. 3.
  • FIG. 1 is a schematic diagram of an amorphous silicon growing apparatus forforming a pin diode according to the present invention.
  • a thin layer of an amorphous silicon is deposited by dissociating mono-silane (SiH 4 ) gas with a glow discharge.
  • the reference numeral 1 denotes a reaction vessel.
  • An anode 2 and a cathode 3 are provided within the reaction vessel and theanode is provided with a heater 4.
  • the reference numeral 5 denotes a high frequency power source for supplying electric power between the anode 2 and the cathode 3 to generate a discharge having a high frequency.
  • Mono-silane (SiH 4 ) gas is supplied through a flow controller 6 into the reaction vessel 1.
  • the reaction vessel 1 is evacuated through a throttle valve 7 by a diffuser pump 8 and a rotary pump 9.
  • a pin diode was formed placing a substrate B on the anode 2 under conditions that the molar ratio of hydrogen to monosilane was 20:1, power supplied between the anode 2 and the cathode 3 was 0.01 W/cm 2 , and a pressure inside the reaction vessel 1 was 0.3 Torr.
  • the substrate temperature was about 250° C. which is a usual temperature in depositing hydrogenated amorphous silicon.
  • the molar ratio of the raw gases Concerning the molar ratio of the raw gases, as the content of hydrogen is increased, the content of microcrystalline structure increases. However, if the molar ratio of hydrogen to monosilane is more than 100:1, the deposition rate is remarkably reduced, so that the process is not practical. Conversely, if the molar ratio of hydrogen to monosilane is less than 5:1, high power is required. If the applied power is less than 0.01 W/cm 2 , the deposition rate is reduced, so that the process is not practical. Conversely, if the the applied power is more than 0.05 W/cm 2 , the lower layer is damaged.
  • a pin diode according to the present invention formed under the aforementioned conditions comprises an n layer as an incident layer havinga thickness of 300 ⁇ , a p layer having a thickness of 300 ⁇ , an i layer having a thickness of 6000 ⁇ , and an ITO layer having a thickness of 650 ⁇ .
  • the content of microcrystalline structure in the nlayer becomes about 10% of the amorphous silicon. The value has been confirmed from X-ray diffraction or reflection electron beam diffraction.
  • ITO is a transparent metal membrane and Cr is a chrome membrane(2000 ⁇ ) formed on the substrate B.
  • FIG. 3 shows spectral sensitivity characteristics of the pin diode.
  • the pin diode according to the present invention has higher blue sensitivity. This means that the n layer has higher optical transparency.
  • FIG. 4 is a circuit diagram of a contact image sensor device according to the present invention, employing the pin diode having aforementioned characteristics, as a photodiode.
  • PD is a photodiode
  • BD is a blocking diode
  • 10 is a control and driving part
  • 20 is an amplifying part
  • 30 is a reading part.
  • the control and driving part 10 provides the blocking diodes BD with a -5 V pulse information stored in the photodiode PD and maintains the potential of the cathode of the blocking diodes BD when storing the information.
  • the reading part 30 reads the information sent from the photodiodes PD through the amplifying part 20.
  • the contact image sensor device shown in FIG. 4 has 640 pixels connected in a matrix.
  • Driving and reading the pixels are successively performed by 40 input channels in the control and driving part 10 and by 16 output blocks in thereading part 30.
  • the inventors measured characteristics of the contact image sensor device by providing 40 shift registers on the input side and 16 OP-amps on the output side and by rapidly driving for 1.0 msec per 1 line an 80 mm length sensor (width of an input pulse is about 24 ⁇ sec). The measured S/N ratio was more than 30 dB, which is a satisfactory result.
  • a pin diode while an incident layer of a pin diode is deposited by dissociating monosilane gas with a glow discharge technique, the deposition rate is not so remarkably reduced and other layers are not damaged by supplying power. Therefore, a pin diode wherein photoelectric transfer efficiency can be improved without degrading diode characteristics, and a contact image sensor devicecomprising the same, can be provided.

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
US07/543,108 1989-06-30 1990-06-25 Diode and producing method thereof and contact image sensor device comprising the same Expired - Fee Related US5051803A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1-169049 1989-06-30
JP1169049A JPH0334456A (ja) 1989-06-30 1989-06-30 ｐｉｎダイオードとその製造方法及び密着型イメージセンサ

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5157538A (en) * 1990-06-29 1992-10-20 The United States Of America As Represented By The Secretary Of The Air Force Silicon spatial light modulator
US5210766A (en) * 1990-12-27 1993-05-11 Xerox Corporation Laser crystallized cladding layers for improved amorphous silicon light-emitting diodes and radiation sensors
US5262654A (en) * 1990-11-30 1993-11-16 Semiconductor Energy Laboratory Co., Ltd. Device for reading an image having a common semiconductor layer
US5627404A (en) * 1992-02-21 1997-05-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device provided on an organic resin substrate
US20070205478A1 (en) * 2006-03-02 2007-09-06 Icemos Technology Corporation Photodiode having increased proportion of light-sensitive area to light-insensitive area
US20070284688A1 (en) * 2006-06-13 2007-12-13 Wisconsin Alumni Research Foundation Pin diodes for photodetection and high-speed, high-resolution image sensing
US20100078722A1 (en) * 2006-09-08 2010-04-01 Zhenqiang Ma Method for fabricating high-speed thin-film transistors
US20110189809A1 (en) * 2007-01-24 2011-08-04 Salman Akram Elevated pocket pixels, imaging devices and systems including the same and method of forming the same

Citations (6)

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US4409605A (en) * 1978-03-16 1983-10-11 Energy Conversion Devices, Inc. Amorphous semiconductors equivalent to crystalline semiconductors
US4678731A (en) * 1985-06-25 1987-07-07 Kabushiki Kaisha Toshiba Electrophotographic photosensitive member having barrier layer comprising microcrystalline silicon containing hydrogen
US4713308A (en) * 1985-06-25 1987-12-15 Kabushiki Kaisha Toshiba Electrophotographic photosensitive member using microcrystalline silicon
US4775425A (en) * 1987-07-27 1988-10-04 Energy Conversion Devices, Inc. P and n-type microcrystalline semiconductor alloy material including band gap widening elements, devices utilizing same
US4785186A (en) * 1986-10-21 1988-11-15 Xerox Corporation Amorphous silicon ionizing particle detectors
US4799094A (en) * 1984-12-27 1989-01-17 Thomson-Csf Large-format photosensitive device and a method of utilization

Patent Citations (6)

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US4409605A (en) * 1978-03-16 1983-10-11 Energy Conversion Devices, Inc. Amorphous semiconductors equivalent to crystalline semiconductors
US4799094A (en) * 1984-12-27 1989-01-17 Thomson-Csf Large-format photosensitive device and a method of utilization
US4678731A (en) * 1985-06-25 1987-07-07 Kabushiki Kaisha Toshiba Electrophotographic photosensitive member having barrier layer comprising microcrystalline silicon containing hydrogen
US4713308A (en) * 1985-06-25 1987-12-15 Kabushiki Kaisha Toshiba Electrophotographic photosensitive member using microcrystalline silicon
US4785186A (en) * 1986-10-21 1988-11-15 Xerox Corporation Amorphous silicon ionizing particle detectors
US4775425A (en) * 1987-07-27 1988-10-04 Energy Conversion Devices, Inc. P and n-type microcrystalline semiconductor alloy material including band gap widening elements, devices utilizing same

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
F. Morin et al., "Polycrystalline Silicon by Glow Discharge Technique" 686-687 Appl. Phys. Letters, 35 No. 9, Nov. 1979.
F. Morin et al., Polycrystalline Silicon by Glow Discharge Technique 686 687 Appl. Phys. Letters, 35 No. 9, Nov. 1979. *
Y. Osaka et al., "Microcrystalline Silicon (μc-Si) Prepared by Plasma-Chemical Techniques" 80-91 JARECT vol. 16, Amorphous Semiconductor Technologies & Devices 1984.
Y. Osaka et al., Microcrystalline Silicon ( c Si) Prepared by Plasma Chemical Techniques 80 91 JARECT vol. 16, Amorphous Semiconductor Technologies & Devices 1984. *
Y. Uchida et al., "Microcrystalline Si: H Film and Its Application to Solar Cells" 586-588 Japanese Journal of Applied Physics, vol. 21, No. 9, Sep. 1982.
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Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5157538A (en) * 1990-06-29 1992-10-20 The United States Of America As Represented By The Secretary Of The Air Force Silicon spatial light modulator
US5262654A (en) * 1990-11-30 1993-11-16 Semiconductor Energy Laboratory Co., Ltd. Device for reading an image having a common semiconductor layer
USRE39393E1 (en) * 1990-11-30 2006-11-14 Semiconductor Energy Laboratory Co., Ltd. Device for reading an image having a common semiconductor layer
US5210766A (en) * 1990-12-27 1993-05-11 Xerox Corporation Laser crystallized cladding layers for improved amorphous silicon light-emitting diodes and radiation sensors
US5627404A (en) * 1992-02-21 1997-05-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device provided on an organic resin substrate
US9437762B2 (en) 2005-12-15 2016-09-06 Micron Technology, Inc. Elevated pocket pixels, imaging devices and systems including the same and method of forming the same
US9911769B2 (en) 2005-12-15 2018-03-06 Micron Technology, Inc. Elevated pocket pixels, imaging devices and systems including the same and method of forming the same
US20070205478A1 (en) * 2006-03-02 2007-09-06 Icemos Technology Corporation Photodiode having increased proportion of light-sensitive area to light-insensitive area
US7528458B2 (en) * 2006-03-02 2009-05-05 Icemos Technology Ltd. Photodiode having increased proportion of light-sensitive area to light-insensitive area
US7741141B2 (en) * 2006-03-02 2010-06-22 Icemos Technology Ltd. Photodiode having increased proportion of light-sensitive area to light-insensitive area
US20090176330A1 (en) * 2006-03-02 2009-07-09 Icemos Technology Ltd. Photodiode Having Increased Proportion of Light-Sensitive Area to Light-Insensitive Area
US7777290B2 (en) 2006-06-13 2010-08-17 Wisconsin Alumni Research Foundation PIN diodes for photodetection and high-speed, high-resolution image sensing
US20070284688A1 (en) * 2006-06-13 2007-12-13 Wisconsin Alumni Research Foundation Pin diodes for photodetection and high-speed, high-resolution image sensing
US20100078722A1 (en) * 2006-09-08 2010-04-01 Zhenqiang Ma Method for fabricating high-speed thin-film transistors
US7960218B2 (en) 2006-09-08 2011-06-14 Wisconsin Alumni Research Foundation Method for fabricating high-speed thin-film transistors
US8816405B2 (en) * 2007-01-24 2014-08-26 Micron Technology, Inc. Elevated pocket pixels, imaging devices and systems including the same and method of forming the same
US20110189809A1 (en) * 2007-01-24 2011-08-04 Salman Akram Elevated pocket pixels, imaging devices and systems including the same and method of forming the same
US10181486B2 (en) 2007-01-24 2019-01-15 Micron Technology, Inc. Elevated pocket pixels, imaging devices and systems including the same and method of forming the same
US10504948B2 (en) 2007-01-24 2019-12-10 Micron Technology, Inc. Elevated pocket pixels, imaging devices and systems including the same and method of forming the same
US11127769B2 (en) 2007-01-24 2021-09-21 Micron Technology, Inc. Elevated pocket pixels, imaging devices and systems including the same and method of forming the same
US11664396B2 (en) 2007-01-24 2023-05-30 Micron Technology, Inc. Elevated pocket pixels, imaging devices and systems including the same and method of forming the same

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