US3928160A - Colour pickup tubes and method of manufacturing the same - Google Patents

Colour pickup tubes and method of manufacturing the same Download PDF

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Publication number
US3928160A
US3928160A US503329A US50332974A US3928160A US 3928160 A US3928160 A US 3928160A US 503329 A US503329 A US 503329A US 50332974 A US50332974 A US 50332974A US 3928160 A US3928160 A US 3928160A
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United States
Prior art keywords
layer
inorganic substance
filter
oxygen
transparent inorganic
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Expired - Lifetime
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US503329A
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English (en)
Inventor
Saburo Nobutoki
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Hitachi Ltd
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Hitachi Ltd
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Publication date
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/86—Vessels; Containers; Vacuum locks
    • H01J29/89—Optical or photographic arrangements structurally combined or co-operating with the vessel

Definitions

  • ABSTRACT In a colour pickup tube of the class comprising a substrate, an optical colour analyzing filter formed on the substrate, a layer of transparent inorganic substance formed on the filter, and a photoelectric converting element formed on the layer of transparent inorganic substance, the last mentioned layer includes two successive layers of different degree of oxygen deficiency.
  • This invention relates to a colour pickup tubes for use in a colour television transmitter, and more particularly to a colour pickup tube capable of preventing discolouration of the optical colour analyzing filter (hereinafter merely called a stripe filter) utilized in the colour pickup tube and a method of manufacturing the same.
  • a colour pickup tube capable of preventing discolouration of the optical colour analyzing filter (hereinafter merely called a stripe filter) utilized in the colour pickup tube and a method of manufacturing the same.
  • a colour pickup tube includes a stripe filter disposed at its photoelectric converting member and a transparent electroconductive film is closely deposited on the stripe filter. Further a photoconductive film is deposited on the transparent electroconductive film, thus completing the photoelectric converting element.
  • this construction is disadvantageous in that where an interference filter film is used as the stripe filter, the thickness of the stripe filter deposited on a substrate causes irregularities of the transparent electroconductive film and the photoconductive film which are deposited on the stripe filter. As a consequence, there are such defects that the signal generated by the photoelectric converting element varies in accordance with the configurationof the stripe filter and that the projections of the filter are damaged by friction during the course of manufacturing.
  • the resulting film of the silicon dioxide shows a condition of oxygen deficiency of the order of SiO, to SiO
  • the stripe filter is formed on the substrate by photoetching technique the resulting stripe filter contains absorbed or adhered photoresist, photoresist removing liquid or other organics, which cannot be removed completely from the substrate. Accordingly, while these foreign substances still remaining if the transparent inorganic film were deposited on the stripe filter, reducing action would occur on the surface of the stripe filter due to said deficient oxygen condition of the transparent inorganic substance and to the energy which is generated.
  • a novel colour pickup tube including a layer of transparent inorganic substance capable of preventing 0 the discolouration of the stripe filter and an improved method of manufacturing such improved colour pickup tube capable of depositing the layer of the transparent inorganic substance in a relatively short sputtering time.
  • a colour pickup tube of the class comprising a substrate, an optical colour analyzing filter formed on the substrate, a layer of transparent inorganic substance formed on the optical colour analyzing filter, and a photoelectric converting element including a transparent electroconductive film and a photoconductive film which are successively applied onto the layer of the transparent inorganic substance, characterized in that the layer of the transparent inorganic substance includes two successive layers of different degree of oxygen deficiency and that one layer has a larger thickness than the filter.
  • a method of manufacturing a colour picture tube of the class wherein an optical colour analyzing filter is formed on a substrate, a layer of transparent inorganic substance is formed on the optical colour analyzing filter, and then a photoelectric converting element is formed by successively applying a transparent electroconductive film and a photoconductive layer upon the ,layer of transparent inorganic substance, characteriied in that a first layer of the transparent inorganic substance is applied upon the filter in a mixed atmosphere of an inert gas and oxygen, and then a second layer of the transparent inorganic substance is applied on the first layer in atmosphere containing a smaller quantity of oxygen than the mixed atmosphere.
  • the method just described is modified such that the layer of the transparent inorganic substance is formed upon the filter in a mixed atmosphere of an inert gas and oxygen, and that the oxygen content of the mixed atmosphere is reduced gradually thereby gradually varying the degree of oxygen deficiency of the layer from the filter toward the photoelectric converting element.
  • the layer of the transparent inorganic substance does not contain any interfere between layers of different degree of oxygen deficiency, the layer as a whole functions in the same manner as the two layers prepared by the first mentioned method and having different degree of oxygen deficiency.
  • FIGURE shows a crosssectional view of a portion of the photoelectric converting element of a colour pickup tube embodying the invention.
  • the photoelectric converting element shown in the accompanying drawing comprises a substrate of an insulator l, a stripe filter 2 deposited on one surface of the substrate, and a layer 3 of transparent inorganic substance made of an oxide, for example silicon dioxide SiO or glass, having a thickness of about from 1 to 5 microns and formed on the upper surface of the stripe filter 2 and an oxygen deficient layer 4 of transparent inorganic substance SiO to Slo having a thickness of from 3 to 50 microns and formed on the surface of the layer of the transparent inorganic substance 3.
  • an oxide for example silicon dioxide SiO or glass
  • the first layer 3 is formed by carrying out the low speed sputtering process for a short time so as to avoid the formation of the oxygen deficient condition, or even if such condition is resulted, to make such oxygen deficient condition to be negligibly small, thereby preventing as far as possible the reducing action that might occur between the stripe filter and the transparent inorganic substance, whereas the thicker layer 4 is formed in a short time by high speed sputtering process at the sacrifice of the oxygen deficient condition.
  • a transparent electroconductive film 5 is deposited on the surface of the layer 4 of the inorganic substance by a conventional process and then a photoconductive film 6 is deposited on the transparent conductive film 5.
  • the method of manufacturing the colour pickup tube of this invention is as follows. More particularly, the interference (dichroic) stripe filter 2 is formed on the substrate 1 by photoetching technique according to the conventional practice. Then a high frequency two electrode type sputtering apparatus filled with a mixture of an inert gas, for example argon, and oxygen is used. in such atmosphere, the layer 3 of the transparent inorganic substance is deposited on the surface of the stripe filter 2 by sputtering for an interval sufficient to grow up the layer 3 to a thickness larger than the thickness of the stripe filter, for example I to 5 microns.
  • an inert gas for example argon
  • the same transparent inorganic material is deposited on the layer 3 to a thickness of 3 to 50 microns, thereby forming the layer 4.
  • the total thickness of the two layers of the transparent inorganic substance is made to be from 3 to 50 microns.
  • the layer 4 of the transparent inorganic substance may be polished or ground down to a level indicated by a dotted line and then the transparent conductive film and the photoconductive film may be deposited thereon.
  • the thickness of the layers of the transparent inorganic substance is determined depending upon such factors as the configuration of the interference (dichroic) stripe filter, the type of the photoelectric converting element, the desired picture quality, and the design requirement. For example, to obtain a high quality pickup tube having a stripe filter that reflects red and blue lights, it is advantageous to form the layer of the transparent inorganic substance having a thickness of about 40 microns, then polish the surface of the layer to remove the surface irregularity there for reducing the thickness of the layer to about 30 microns.
  • a second transparent substance layer of silicon dioxide was deposited to the thickness of about 8 microns thereby the total thickness of said first and second layers becoming about 10 microns.
  • the time required for the completion of said layer thickness was about 19 hours. Further the stripe filter made through theabove-mentioned process did not show discolouration anymore.
  • any other suitable transparent inorganic substance such as oxide glass including borosilicate glass and quartz glass may be used.
  • the composition of the atmosphere mixture instead of quickly decreasing the oxygen content of the mixture of an inert gas and oxygen, it is also possible to gradually change the composition of the atmosphere mixture by gradually closing the value provided for a pipe for supplying oxygen thereby gradually varying the composition of the transparent inorganic substance.
  • the resulting layer of the inorganic substance does not contain any discrete interface but actually the player functions as if it were composed of two discrete "Mayers of different compositions. Also it may be available that the atmosphere does not contain any of oxygen gas when the second transparent inorganic substance layer is deposited.
  • the two layers of the transparent inorganic substance can be formed in the same apparatus, it is possible to prevent deposition of dust or forming of scratches.
  • said first layer of said transparent inorganic substance is formed in the mixed atmosphere of an inert gas and oxygen wherein 6 the fractional pressure of oxygen is more than l0 torr.
  • said second layer of said transparent inorganic substance is formed under the atmosphere wherein the fractional pressure of oxygen is less than 10' torr.
  • a colour pickup tube of the class wherein an optical colour analyzing filter is formed on a substrate, a layer of transparent inorganic substance is formed on said optical colour analyzing filter, and then a photoelectric coverting element is formed by successively applying a transparent electroconductive film and a photoconductive film upon said layer of transparent inorganic substance, the improvement where said layer of transparent inorganic substance is sputtered upon said filter in a mixed atmosphere of an inert gas and oxygen. and the oxygen content of said mixed atmosphere is gradually reduced thereby gradually varying the degree of oxygen deficiency of said layer from said filter toward said photoelectric converting element.

Landscapes

  • Optical Filters (AREA)
  • Color Television Image Signal Generators (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
US503329A 1973-10-05 1974-09-05 Colour pickup tubes and method of manufacturing the same Expired - Lifetime US3928160A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11144573A JPS5639020B2 (de) 1973-10-05 1973-10-05

Publications (1)

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US3928160A true US3928160A (en) 1975-12-23

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Family Applications (1)

Application Number Title Priority Date Filing Date
US503329A Expired - Lifetime US3928160A (en) 1973-10-05 1974-09-05 Colour pickup tubes and method of manufacturing the same

Country Status (4)

Country Link
US (1) US3928160A (de)
JP (1) JPS5639020B2 (de)
DE (1) DE2442694C3 (de)
GB (1) GB1450504A (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3986069A (en) * 1974-04-24 1976-10-12 Tokyo Shibaura Electric Co., Ltd. Color stripe filter with two protective layers
US4107568A (en) * 1973-12-03 1978-08-15 Hitachi, Ltd. Face plate for color pick-up tube
US4405938A (en) * 1980-06-16 1983-09-20 Hitachi, Ltd. Image pickup tube faceplate structure
US4853098A (en) * 1984-09-27 1989-08-01 Itt Electro Optical Products, A Division Of Itt Corporation Method of making image intensifier tube

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8105071A (nl) * 1981-11-10 1983-06-01 Philips Nv Kleurenbeeldopneeminrichting.

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2901649A (en) * 1953-06-15 1959-08-25 Itt Image storage screens and method of making same
US2908835A (en) * 1954-10-04 1959-10-13 Rca Corp Pickup tube and target therefor
US2917574A (en) * 1955-04-07 1959-12-15 Westinghouse Electric Corp Color television pickup system
US3547786A (en) * 1967-08-11 1970-12-15 Comp Generale Electricite Mixed protective coating of semiconductive bodies
US3607384A (en) * 1968-07-11 1971-09-21 Western Electric Co Thin-film resistors having positive resistivity profiles
US3647663A (en) * 1968-01-19 1972-03-07 Texas Instruments Inc Method of forming a composite insulating layer
US3761375A (en) * 1972-01-19 1973-09-25 Texas Instruments Inc Process for fabricating vidicon tube target having a high resistance sputtered semi insulating film
US3804738A (en) * 1973-06-29 1974-04-16 Ibm Partial planarization of electrically insulative films by resputtering
US3830717A (en) * 1972-10-16 1974-08-20 Philips Corp Semiconductor camera tube target

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2901649A (en) * 1953-06-15 1959-08-25 Itt Image storage screens and method of making same
US2908835A (en) * 1954-10-04 1959-10-13 Rca Corp Pickup tube and target therefor
US2917574A (en) * 1955-04-07 1959-12-15 Westinghouse Electric Corp Color television pickup system
US3547786A (en) * 1967-08-11 1970-12-15 Comp Generale Electricite Mixed protective coating of semiconductive bodies
US3647663A (en) * 1968-01-19 1972-03-07 Texas Instruments Inc Method of forming a composite insulating layer
US3607384A (en) * 1968-07-11 1971-09-21 Western Electric Co Thin-film resistors having positive resistivity profiles
US3761375A (en) * 1972-01-19 1973-09-25 Texas Instruments Inc Process for fabricating vidicon tube target having a high resistance sputtered semi insulating film
US3830717A (en) * 1972-10-16 1974-08-20 Philips Corp Semiconductor camera tube target
US3804738A (en) * 1973-06-29 1974-04-16 Ibm Partial planarization of electrically insulative films by resputtering

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4107568A (en) * 1973-12-03 1978-08-15 Hitachi, Ltd. Face plate for color pick-up tube
US3986069A (en) * 1974-04-24 1976-10-12 Tokyo Shibaura Electric Co., Ltd. Color stripe filter with two protective layers
US4405938A (en) * 1980-06-16 1983-09-20 Hitachi, Ltd. Image pickup tube faceplate structure
US4853098A (en) * 1984-09-27 1989-08-01 Itt Electro Optical Products, A Division Of Itt Corporation Method of making image intensifier tube

Also Published As

Publication number Publication date
DE2442694C3 (de) 1979-02-15
JPS5062726A (de) 1975-05-28
DE2442694A1 (de) 1975-04-17
GB1450504A (en) 1976-09-22
DE2442694B2 (de) 1978-06-08
JPS5639020B2 (de) 1981-09-10

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