US3854827A - Metal-to-ceramic leadthrough - Google Patents

Metal-to-ceramic leadthrough Download PDF

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Publication number
US3854827A
US3854827A US00308685A US30868572A US3854827A US 3854827 A US3854827 A US 3854827A US 00308685 A US00308685 A US 00308685A US 30868572 A US30868572 A US 30868572A US 3854827 A US3854827 A US 3854827A
Authority
US
United States
Prior art keywords
aperture
conductor
ceramic
wall
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00308685A
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English (en)
Inventor
J Merz
Esdonk J Van
J Janssen
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US Philips Corp
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US Philips Corp
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Filing date
Publication date
Application filed by US Philips Corp filed Critical US Philips Corp
Application granted granted Critical
Publication of US3854827A publication Critical patent/US3854827A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/025—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of glass or ceramic material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/32—Seals for leading-in conductors
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/10—Glass interlayers, e.g. frit or flux
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/403—Refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/64—Forming laminates or joined articles comprising grooves or cuts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/84—Joining of a first substrate with a second substrate at least partially inside the first substrate, where the bonding area is at the inside of the first substrate, e.g. one tube inside another tube
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/88—Joining of two substrates, where a substantial part of the joining material is present outside of the joint, leading to an outside joining of the joint
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T403/00—Joints and connections
    • Y10T403/21—Utilizing thermal characteristic, e.g., expansion or contraction, etc.
    • Y10T403/213—Interposed material of intermediate coefficient of expansion

Definitions

  • ABSTRACT U A metal-to-ceramic leadthrough with the use of glasslike material and an aperture having a narrow portion 1 which changes in a stepwise manner into a widened portion, the gap between the conductor and the wall of the narrow portion being filled entirely-with glass-.
  • the glass-like material preferably composition: r
  • the glasslike material softens in such manner as to adhere to the conductor andto'the inner wall-.ofthe widened portion of the'ap'erture but without amenisc us being formed against themetal surface and without the gap between the conductor and the inner wallof the narrow portion of the aperture being filled.
  • the glass-like material may thus not becomethin-liquid.
  • the said difficulty can be avoided entirely in a metal-to-ceramic leadthroughin which a metalconductor is. secured inan aperture of a ceramic wall having a thickness of more than 2 mm by means of glass-like material, which aperture consists of a narrow portion which changes step-wise into a wider portion, it, according totheinvention, the quantity 'of glass-like material is chosenand provided in such manher and is heated to such a high temperature that the 37 percent by weight MnO, 50 percent by weight SiOz 13 percent by weight M 0 7 3 Melting is carried out at l,300C for 10 minutes.
  • the conductor may consist of molybdenum sary for certainv applications.
  • the widened portion of the aperture serves to be able to metallize the whole surface and to be able to remove said metal layer afterwards from the upper surface, the metal layer on the bottom of the widened portion of the aperture being maintained which is necessary to cause the metal solder to flow.
  • the widened aperture is provided so as to obtain an insulation path between the metallized surface of the ceramic part and the lead through conductor.
  • the widened portion of the'aperture is provided so as to be able to connect any contact members tothe leadthrough glass-like material has entirely filled'the gap between the'conductor and the inner-wall of thenarrow portion of the aperture, but has formed a' comparatively thin layeron the bottom-of the wide portion of the aperture, said thin layer forming ameni'scus both against the conductor and against the'inner wall of the wide portion of the aperture.
  • the length of the narrow portion of the aperture may preferably be equalto that of the wide portion but must at least be so large that the desired seal is obtained but may atmost not exceed approxi-' mately 2 mm so as to avoid'cracking of the-glass-like layer during cooling after melting thereof or afterwards during operation. Since the thin glass-like layer forms a meniscus on the bottom of the wide portion of theaperture. against the metal surfaceand against the inner wall of said portion of the aperture, it has-been found that in this case also no cracks are formed while asufficient mechanical rigidity is obtained.
  • the thickness of the glass-like layer on the bottom of the wide portion of the aperture is from lOO to 1,000 s, which layer I forms a meniscustowards the edge of the conductor and towards the inner wall of the aperture.
  • the diameter of thewide portion of the aperture is preferably three to four times as large as the diameter. of the narrow portion 7 g has thefollowing conductor.
  • FIGURE shows a metal-to-ceramic leadthrough ac-- cording to the invention.
  • Reference numeral l in the FIGURE denotes a ceramic wall of 4 mm thicknessthrough which a molybdenum conductor 2:having'a diameter of 1.5 mm is passed.
  • the aperture in" the wall 1 has a narrow portion 3 having a diameter of l'.6 mm and a widened portion 4 having adiameter of 6 mm.
  • the gap between the'conductor 2 and the inner wall of the-portion 3 of the aperture is entirely filled with glass-like material 5 of the above-described composition.
  • the bottom of the por-' tion 4 ofthe aperture is covered with a layer "6' of the glass-like-material 5.
  • the thickness .of the layer 6' may be from 100 to l,000 t.
  • the layer 6 forms a meniscus 7 both on the metalsurface of the leadthrough conductor 2 and on the inner wall 8 of the portion 4 of the aperture.
  • the suspension is provided on the bottom of the wide v portion '4. Melting occurs in a reducing atmosphere at a temperature of l, 300C for 10 minutes, the layer 6 with the meniscus7 being formed and the gap between the conductor 2 and the inner wall of the aperture 3' being filled. Since the way of heating is not critical, a ceramic wall having a large number of leadthrough conductors may be heated in a furnace in which all the conduetorsare sealed simultaneously.
  • Metal-to ceramic' leadthroughs according to the invention have proved particularly suitable; for use in .digital light deflection systems whichare provided in a eeramic vessel, said vessel being filled with-liquid and the leadthrough conductors consisting'of molybdenum. What'is claimed is: v
  • a metal-to-ceramic leadthrough comprising: a ceramic wall portion that has athickness of more than 2 which is neces-,
  • said body forming a relatively thin layer on the bottom of the wide portion of the aperture and said thin layer forming a meniscus both against the conductor and 3 against the inner wall of the wide portion of the aperture, said conductor consisting of a material having a coefficient of thermal expansion which is lower than that of the ceramic portion.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Insulators (AREA)
  • Connections Arranged To Contact A Plurality Of Conductors (AREA)
  • Glass Compositions (AREA)
  • Insulated Conductors (AREA)
  • Joining Of Glass To Other Materials (AREA)
US00308685A 1971-12-01 1972-11-22 Metal-to-ceramic leadthrough Expired - Lifetime US3854827A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2159531A DE2159531C3 (de) 1971-12-01 1971-12-01 Metall-Keramik-Durchführung

Publications (1)

Publication Number Publication Date
US3854827A true US3854827A (en) 1974-12-17

Family

ID=5826684

Family Applications (1)

Application Number Title Priority Date Filing Date
US00308685A Expired - Lifetime US3854827A (en) 1971-12-01 1972-11-22 Metal-to-ceramic leadthrough

Country Status (7)

Country Link
US (1) US3854827A (enrdf_load_stackoverflow)
JP (1) JPS5433247B2 (enrdf_load_stackoverflow)
CA (1) CA966567A (enrdf_load_stackoverflow)
DE (1) DE2159531C3 (enrdf_load_stackoverflow)
FR (1) FR2162094A1 (enrdf_load_stackoverflow)
GB (1) GB1358365A (enrdf_load_stackoverflow)
NL (1) NL7216023A (enrdf_load_stackoverflow)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4137423A (en) * 1977-12-16 1979-01-30 The United States Of America As Represented By The United States Department Of Energy Nuclear instrumentation cable end seal
US4438184A (en) 1981-07-21 1984-03-20 Gipelec Sealed passage for a negative terminal through a metal wall, and electric cell using said sealed passage
EP0139406A1 (en) * 1983-08-31 1985-05-02 Ngk Insulators, Ltd. Metal-ceramics composite article and a method of producing the same
US4661424A (en) * 1985-10-04 1987-04-28 Yuasa Battery Co. Sodium-sulfur storage battery
US4704557A (en) * 1986-03-11 1987-11-03 The United States Of America As Represented By The United States Department Of Energy Cermet insert high voltage holdoff for ceramic/metal vacuum devices
US4935583A (en) * 1980-05-30 1990-06-19 Kyle James C Insulated conductor with ceramic-connected elements
US5177806A (en) * 1986-12-05 1993-01-05 E. I. Du Pont De Nemours And Company Optical fiber feedthrough
US5557074A (en) * 1991-11-27 1996-09-17 Fujitsu Limited Coaxial line assembly of a package for a high frequency element
US20070187934A1 (en) * 2006-01-27 2007-08-16 Thomas Fink Metal-sealing material-feedthrough and utilization of the metal-sealing material feedthrough with an airbag, a belt tensioning device, and an ignition device
US8733250B2 (en) 2006-01-27 2014-05-27 Schott Ag Metal-sealing material-feedthrough and utilization of the metal-sealing material feedthrough with an airbag, a belt tensioning device, and an ignition device
US9423218B2 (en) 2010-09-17 2016-08-23 Schott Ag Method for producing a ring-shaped or plate-like element
US10684102B2 (en) 2010-09-17 2020-06-16 Schott Ag Method for producing a ring-shaped or plate-like element

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL185482C (nl) * 1980-09-05 1991-01-16 Philips Nv Hogedrukontladingslamp.
JPH0435359U (enrdf_load_stackoverflow) * 1990-07-20 1992-03-24
JPH0435361U (enrdf_load_stackoverflow) * 1990-07-20 1992-03-24
KR102219337B1 (ko) * 2019-04-11 2021-02-23 사회복지법인 삼성생명공익재단 방사선을 이용한 진단 및 치료 장치의 방사선 중심점의 품질 보증 시스템 및 방법
WO2025070217A1 (ja) * 2023-09-25 2025-04-03 京セラ株式会社 接合体、給電端子および気密端子

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2200694A (en) * 1937-09-21 1940-05-14 Pintsch Julius Kg Annular fusion joint
US3219753A (en) * 1963-05-15 1965-11-23 Univ Illinois Gas-impervious electrical feedthrough for use between two zones of differing pressures
US3278211A (en) * 1963-09-02 1966-10-11 Philips Corp Current lead-through member
US3370874A (en) * 1966-07-21 1968-02-27 Isotronics Inc Hermetic metal-to-glass seal and application thereof
US3385618A (en) * 1965-05-26 1968-05-28 American Lava Corp Ceramic-to-metal seal
US3436109A (en) * 1965-12-15 1969-04-01 Corning Glass Works Stressed hermetic seal and method of making said seal
US3545950A (en) * 1967-06-28 1970-12-08 Physical Sciences Corp Method of making a glass-to-metal seal
US3600017A (en) * 1968-02-26 1971-08-17 Isotronics Inc Hermetic metal-to-glass seals

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2200694A (en) * 1937-09-21 1940-05-14 Pintsch Julius Kg Annular fusion joint
US3219753A (en) * 1963-05-15 1965-11-23 Univ Illinois Gas-impervious electrical feedthrough for use between two zones of differing pressures
US3278211A (en) * 1963-09-02 1966-10-11 Philips Corp Current lead-through member
US3385618A (en) * 1965-05-26 1968-05-28 American Lava Corp Ceramic-to-metal seal
US3436109A (en) * 1965-12-15 1969-04-01 Corning Glass Works Stressed hermetic seal and method of making said seal
US3370874A (en) * 1966-07-21 1968-02-27 Isotronics Inc Hermetic metal-to-glass seal and application thereof
US3545950A (en) * 1967-06-28 1970-12-08 Physical Sciences Corp Method of making a glass-to-metal seal
US3600017A (en) * 1968-02-26 1971-08-17 Isotronics Inc Hermetic metal-to-glass seals

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4137423A (en) * 1977-12-16 1979-01-30 The United States Of America As Represented By The United States Department Of Energy Nuclear instrumentation cable end seal
US4935583A (en) * 1980-05-30 1990-06-19 Kyle James C Insulated conductor with ceramic-connected elements
US4438184A (en) 1981-07-21 1984-03-20 Gipelec Sealed passage for a negative terminal through a metal wall, and electric cell using said sealed passage
EP0139406A1 (en) * 1983-08-31 1985-05-02 Ngk Insulators, Ltd. Metal-ceramics composite article and a method of producing the same
US4661424A (en) * 1985-10-04 1987-04-28 Yuasa Battery Co. Sodium-sulfur storage battery
US4704557A (en) * 1986-03-11 1987-11-03 The United States Of America As Represented By The United States Department Of Energy Cermet insert high voltage holdoff for ceramic/metal vacuum devices
US5177806A (en) * 1986-12-05 1993-01-05 E. I. Du Pont De Nemours And Company Optical fiber feedthrough
US5557074A (en) * 1991-11-27 1996-09-17 Fujitsu Limited Coaxial line assembly of a package for a high frequency element
US20070187934A1 (en) * 2006-01-27 2007-08-16 Thomas Fink Metal-sealing material-feedthrough and utilization of the metal-sealing material feedthrough with an airbag, a belt tensioning device, and an ignition device
US8127681B2 (en) * 2006-01-27 2012-03-06 Schott Ag Metal-sealing material-feedthrough and utilization of the metal-sealing material feedthrough with an airbag, a belt tensioning device, and an ignition device
US8733250B2 (en) 2006-01-27 2014-05-27 Schott Ag Metal-sealing material-feedthrough and utilization of the metal-sealing material feedthrough with an airbag, a belt tensioning device, and an ignition device
US9423218B2 (en) 2010-09-17 2016-08-23 Schott Ag Method for producing a ring-shaped or plate-like element
US9651345B2 (en) 2010-09-17 2017-05-16 Schott Ag Method for producing a ring-shaped or plate-like element
US10684102B2 (en) 2010-09-17 2020-06-16 Schott Ag Method for producing a ring-shaped or plate-like element

Also Published As

Publication number Publication date
DE2159531A1 (de) 1973-06-07
CA966567A (en) 1975-04-22
FR2162094A1 (enrdf_load_stackoverflow) 1973-07-13
GB1358365A (en) 1974-07-03
DE2159531B2 (de) 1980-03-20
JPS4865144A (enrdf_load_stackoverflow) 1973-09-08
DE2159531C3 (de) 1980-11-13
JPS5433247B2 (enrdf_load_stackoverflow) 1979-10-19
NL7216023A (enrdf_load_stackoverflow) 1973-06-05

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