US3854827A - Metal-to-ceramic leadthrough - Google Patents
Metal-to-ceramic leadthrough Download PDFInfo
- Publication number
- US3854827A US3854827A US00308685A US30868572A US3854827A US 3854827 A US3854827 A US 3854827A US 00308685 A US00308685 A US 00308685A US 30868572 A US30868572 A US 30868572A US 3854827 A US3854827 A US 3854827A
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- Prior art keywords
- aperture
- conductor
- ceramic
- wall
- metal
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
- C04B37/025—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of glass or ceramic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/32—Seals for leading-in conductors
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/10—Glass interlayers, e.g. frit or flux
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/403—Refractory metals
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/64—Forming laminates or joined articles comprising grooves or cuts
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/84—Joining of a first substrate with a second substrate at least partially inside the first substrate, where the bonding area is at the inside of the first substrate, e.g. one tube inside another tube
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/88—Joining of two substrates, where a substantial part of the joining material is present outside of the joint, leading to an outside joining of the joint
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T403/00—Joints and connections
- Y10T403/21—Utilizing thermal characteristic, e.g., expansion or contraction, etc.
- Y10T403/213—Interposed material of intermediate coefficient of expansion
Definitions
- ABSTRACT U A metal-to-ceramic leadthrough with the use of glasslike material and an aperture having a narrow portion 1 which changes in a stepwise manner into a widened portion, the gap between the conductor and the wall of the narrow portion being filled entirely-with glass-.
- the glass-like material preferably composition: r
- the glasslike material softens in such manner as to adhere to the conductor andto'the inner wall-.ofthe widened portion of the'ap'erture but without amenisc us being formed against themetal surface and without the gap between the conductor and the inner wallof the narrow portion of the aperture being filled.
- the glass-like material may thus not becomethin-liquid.
- the said difficulty can be avoided entirely in a metal-to-ceramic leadthroughin which a metalconductor is. secured inan aperture of a ceramic wall having a thickness of more than 2 mm by means of glass-like material, which aperture consists of a narrow portion which changes step-wise into a wider portion, it, according totheinvention, the quantity 'of glass-like material is chosenand provided in such manher and is heated to such a high temperature that the 37 percent by weight MnO, 50 percent by weight SiOz 13 percent by weight M 0 7 3 Melting is carried out at l,300C for 10 minutes.
- the conductor may consist of molybdenum sary for certainv applications.
- the widened portion of the aperture serves to be able to metallize the whole surface and to be able to remove said metal layer afterwards from the upper surface, the metal layer on the bottom of the widened portion of the aperture being maintained which is necessary to cause the metal solder to flow.
- the widened aperture is provided so as to obtain an insulation path between the metallized surface of the ceramic part and the lead through conductor.
- the widened portion of the'aperture is provided so as to be able to connect any contact members tothe leadthrough glass-like material has entirely filled'the gap between the'conductor and the inner-wall of thenarrow portion of the aperture, but has formed a' comparatively thin layeron the bottom-of the wide portion of the aperture, said thin layer forming ameni'scus both against the conductor and against the'inner wall of the wide portion of the aperture.
- the length of the narrow portion of the aperture may preferably be equalto that of the wide portion but must at least be so large that the desired seal is obtained but may atmost not exceed approxi-' mately 2 mm so as to avoid'cracking of the-glass-like layer during cooling after melting thereof or afterwards during operation. Since the thin glass-like layer forms a meniscus on the bottom of the wide portion of theaperture. against the metal surfaceand against the inner wall of said portion of the aperture, it has-been found that in this case also no cracks are formed while asufficient mechanical rigidity is obtained.
- the thickness of the glass-like layer on the bottom of the wide portion of the aperture is from lOO to 1,000 s, which layer I forms a meniscustowards the edge of the conductor and towards the inner wall of the aperture.
- the diameter of thewide portion of the aperture is preferably three to four times as large as the diameter. of the narrow portion 7 g has thefollowing conductor.
- FIGURE shows a metal-to-ceramic leadthrough ac-- cording to the invention.
- Reference numeral l in the FIGURE denotes a ceramic wall of 4 mm thicknessthrough which a molybdenum conductor 2:having'a diameter of 1.5 mm is passed.
- the aperture in" the wall 1 has a narrow portion 3 having a diameter of l'.6 mm and a widened portion 4 having adiameter of 6 mm.
- the gap between the'conductor 2 and the inner wall of the-portion 3 of the aperture is entirely filled with glass-like material 5 of the above-described composition.
- the bottom of the por-' tion 4 ofthe aperture is covered with a layer "6' of the glass-like-material 5.
- the thickness .of the layer 6' may be from 100 to l,000 t.
- the layer 6 forms a meniscus 7 both on the metalsurface of the leadthrough conductor 2 and on the inner wall 8 of the portion 4 of the aperture.
- the suspension is provided on the bottom of the wide v portion '4. Melting occurs in a reducing atmosphere at a temperature of l, 300C for 10 minutes, the layer 6 with the meniscus7 being formed and the gap between the conductor 2 and the inner wall of the aperture 3' being filled. Since the way of heating is not critical, a ceramic wall having a large number of leadthrough conductors may be heated in a furnace in which all the conduetorsare sealed simultaneously.
- Metal-to ceramic' leadthroughs according to the invention have proved particularly suitable; for use in .digital light deflection systems whichare provided in a eeramic vessel, said vessel being filled with-liquid and the leadthrough conductors consisting'of molybdenum. What'is claimed is: v
- a metal-to-ceramic leadthrough comprising: a ceramic wall portion that has athickness of more than 2 which is neces-,
- said body forming a relatively thin layer on the bottom of the wide portion of the aperture and said thin layer forming a meniscus both against the conductor and 3 against the inner wall of the wide portion of the aperture, said conductor consisting of a material having a coefficient of thermal expansion which is lower than that of the ceramic portion.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
- Insulators (AREA)
- Connections Arranged To Contact A Plurality Of Conductors (AREA)
- Glass Compositions (AREA)
- Insulated Conductors (AREA)
- Joining Of Glass To Other Materials (AREA)
Abstract
A metal-to-ceramic leadthrough with the use of glass-like material and an aperture having a narrow portion which changes in a step-wise manner into a widened portion, the gap between the conductor and the wall of the narrow portion being filled entirely with glass-like material and the bottom of the wide portion of the aperture being covered with a thin layer of glasslike material which forms a meniscus against the conductor and the inner wall of the wide portion of the aperture.
Description
United States-Patent 11 17 Me'rz etal.
[5 METAL-TO-CERAMIC LEADTHROUGH, [75] lnventors: Josef Me rz, Hamburg, Germany;
- Johannes Van Esdo'nk; Joannes Francis cus Maria Janssen, both of Emmasingel, Eindhoven,
, Netherlands v [73] Assignee: U.S. Philips Corporation, New York, NY.
[22] Filed: Nov. 22, 1972 21 Appl. No.2 308,685
[30] v Foreign Application Priority Data 5 v Dec. 1, 1971 Germany, 215 953 {52 U.S. c1. 403/29 [51] Int. Cl F16!) 11/00, C03C 27/02 [58] Field of Search 403/28, 29, 179, 270, 27 1; 52/759 65/36, v59; 29/180 NM [56] References Cited 1 UNITED STATES PATliNTS 1451" Dec. 17, 1974 3,219,753 11/1965 I Vassos 403/28 x 3,278,211 10/1966 Baas etal. 403/29 3,370,874' 2/1968- Scherer et al I 403 /28 3,385,618 5/1968 ,Hargis 403/271 3,436,109 4/1969 Loose 52/759 3,545,950 12/1970 Earl 65/59 3,600,017 8/1971 Scherer- 52/759 Primary Examiner werner H. Schroeder Attorney, Agent, or Firm-Frank R. Trifari [57] ABSTRACT U A metal-to-ceramic leadthrough with the use of glasslike material and an aperture having a narrow portion 1 which changes in a stepwise manner into a widened portion, the gap between the conductor and the wall of the narrow portion being filled entirely-with glass-.
like material and the bottom of the wide portion of the aperture being covered with a thin layer of glass-like material which formsa meniscus against'the conductor and the inner wall of the wide portion of the aperture.
2 Claims, 1 Drawing Figure- The glass-like material preferably composition: r
' 3,545,950. ln this patent the wide portion of the aperture is filled by means of a member consisting of a glass-like materialwhich has a cavity on its upper side.
By accurately controlled heating it.is achieved that the glasslike material softens in such manner as to adhere to the conductor andto'the inner wall-.ofthe widened portion of the'ap'erture but without amenisc us being formed against themetal surface and without the gap between the conductor and the inner wallof the narrow portion of the aperture being filled. The glass-like material may thus not becomethin-liquid.
It has been found, however, that as-a result of such a large accumulation of glass-like material in the wide portionof the'aperture, cracks can occur in the glasslike material during cooling after softening said materialQThis is the case also if a conductor is secured in a wall having a thickness of more than 2 mm by means of a glass-like material while using a narrow aperture having a constant diameter. 1 7
It has been found that the said difficulty can be avoided entirely in a metal-to-ceramic leadthroughin which a metalconductor is. secured inan aperture of a ceramic wall having a thickness of more than 2 mm by means of glass-like material, which aperture consists of a narrow portion which changes step-wise into a wider portion, it, according totheinvention, the quantity 'of glass-like material is chosenand provided in such manher and is heated to such a high temperature that the 37 percent by weight MnO, 50 percent by weight SiOz 13 percent by weight M 0 7 3 Melting is carried out at l,300C for 10 minutes. The conductor may consist of molybdenum sary for certainv applications.
ln metal-to-ceramic joints it is known to use apertures which are widened in a step-wise manner, forexample, from the US. Pat No. 3,385,6l8 in which a metal solder-is used which forms a meniscus against the conductor and a thin layer on the bottom of the wide portion. in this case, however, the gap between the conductor'and the inner wallof the narrow portion of the aperture must remain free from soldering material so as to be able to compensate for the differencein coefficients in thermal expansion between metal and eeramic. The widened portion of the aperture serves to be able to metallize the whole surface and to be able to remove said metal layer afterwards from the upper surface, the metal layer on the bottom of the widened portion of the aperture being maintained which is necessary to cause the metal solder to flow.
in the US. Pat. No. 2,731,578 the widened aperture is provided so as to obtain an insulation path between the metallized surface of the ceramic part and the lead through conductor.- In British Pat. No. 522,217 the widened portion of the'aperture is provided so as to be able to connect any contact members tothe leadthrough glass-like material has entirely filled'the gap between the'conductor and the inner-wall of thenarrow portion of the aperture, but has formed a' comparatively thin layeron the bottom-of the wide portion of the aperture, said thin layer forming ameni'scus both against the conductor and against the'inner wall of the wide portion of the aperture. The length of the narrow portion of the aperture may preferably be equalto that of the wide portion but must at least be so large that the desired seal is obtained but may atmost not exceed approxi-' mately 2 mm so as to avoid'cracking of the-glass-like layer during cooling after melting thereof or afterwards during operation. Since the thin glass-like layer forms a meniscus on the bottom of the wide portion of theaperture. against the metal surfaceand against the inner wall of said portion of the aperture, it has-been found that in this case also no cracks are formed while asufficient mechanical rigidity is obtained. The thickness of the glass-like layer on the bottom of the wide portion of the aperture is from lOO to 1,000 s, which layer I forms a meniscustowards the edge of the conductor and towards the inner wall of the aperture. The diameter of thewide portion of the aperture is preferably three to four times as large as the diameter. of the narrow portion 7 g has thefollowing conductor. When using metallic soldering material,
however, the circumstances are quite differentfrom.
those occuring when a glass-like material is used.' 7 The invention will be described in greater detail with reference to the accompanying drawing, the FIGURE of which shows a metal-to-ceramic leadthrough ac-- cording to the invention. i
Reference numeral l in the FIGURE denotes a ceramic wall of 4 mm thicknessthrough which a molybdenum conductor 2:having'a diameter of 1.5 mm is passed. The aperture in" the wall 1 has a narrow portion 3 having a diameter of l'.6 mm and a widened portion 4 having adiameter of 6 mm. The gap between the'conductor 2 and the inner wall of the-portion 3 of the aperture is entirely filled with glass-like material 5 of the above-described composition. the bottom of the por-' tion 4 ofthe aperture is covered with a layer "6' of the glass-like-material 5. The thickness .of the layer 6' may be from 100 to l,000 t. The layer 6 forms a meniscus 7 both on the metalsurface of the leadthrough conductor 2 and on the inner wall 8 of the portion 4 of the aperture. After placing the conductor 2 in the aperture, the suspension is provided on the bottom of the wide v portion '4. Melting occurs in a reducing atmosphere at a temperature of l, 300C for 10 minutes, the layer 6 with the meniscus7 being formed and the gap between the conductor 2 and the inner wall of the aperture 3' being filled. Since the way of heating is not critical, a ceramic wall having a large number of leadthrough conductors may be heated in a furnace in which all the conduetorsare sealed simultaneously.
Metal-to ceramic' leadthroughs according to the invention have proved particularly suitable; for use in .digital light deflection systems whichare provided in a eeramic vessel, said vessel being filled with-liquid and the leadthrough conductors consisting'of molybdenum. What'is claimed is: v
l. A metal-to-ceramic leadthrough, comprising: a ceramic wall portion that has athickness of more than 2 which is neces-,
entirely filling the gap between the conductor and the inner wall of the narrow portion of the aperture, said body forming a relatively thin layer on the bottom of the wide portion of the aperture and said thin layer forming a meniscus both against the conductor and 3 against the inner wall of the wide portion of the aperture, said conductor consisting of a material having a coefficient of thermal expansion which is lower than that of the ceramic portion. I
2. A metal-to-ceramic leadthrough as in claim 1, wherein said conductor material consists essentially of molybdenum.
CERTIFICATE? OF- CORRECTION 8 1 Dated December 17, 1974 7 It is certifiz lg'd that rror appears in the aboveddjehtified pat'nc and that said Letters Pate nt are hereby corrected as shown below:
[on the 7 title a e; Section [30] change "215931" sigheqf and sealed this 18th day of February 1975.;
(sEALf \Attest:
c. MARSHALL DANN C. Comissioner of; Patents Arresting Officer I and Trademarks- ,32 3 UNETED STATES RWENT @FFKQE fiERTWICATE OF QGRRECTION Pai e: No. 3,854,827 Dated December 17, 1974 ln tofls) JOSEF MERZ ET AL It is certified that error appears in the ahc ve-icintifiez3 and that said Letters Patent are hereby ccar'recfced as shown below:
On the titlepage, Section [30] change "215931" to -P.2l593l 3.
Signed and sealed this 18th day of February 1975.
(SEAL) Attest:
C. MARSHALL DANN RUTH C. MASON Commissioner of Patents Arresting Officer and Trademarks
Claims (2)
1. A metal-to-ceramic leadthrough, comprising: a ceramic wall portion that has a thickness of more than 2 mm and that includes an aperture comprising a narrow portion which changes in a stepwise manner into a wider portion, said narrow portion having a length that is at most about 2 mm; a metal conductor disposed in said aperture and spaced by a gap from the aperture wall; and a body of glass-like material disposed at and entirely filling the gap between the conductor and the inner wall of the narrow portion of the aperture, said body forming a relatively thin layer on the bottom of the wide portion of the aperture and said thin layer forming a meniscus both against the conductor and against the inner wall of the wide portion of the aperture, said conductor consisting of a material having a coefficient of thermal expansion which is lower than that of the ceramic portion.
2. A metal-to-ceramic leadthrough as in claim 1, wherein said conductor material consists essentially of molybdenum.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2159531A DE2159531C3 (en) | 1971-12-01 | 1971-12-01 | Metal-ceramic implementation |
Publications (1)
Publication Number | Publication Date |
---|---|
US3854827A true US3854827A (en) | 1974-12-17 |
Family
ID=5826684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US00308685A Expired - Lifetime US3854827A (en) | 1971-12-01 | 1972-11-22 | Metal-to-ceramic leadthrough |
Country Status (7)
Country | Link |
---|---|
US (1) | US3854827A (en) |
JP (1) | JPS5433247B2 (en) |
CA (1) | CA966567A (en) |
DE (1) | DE2159531C3 (en) |
FR (1) | FR2162094A1 (en) |
GB (1) | GB1358365A (en) |
NL (1) | NL7216023A (en) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4137423A (en) * | 1977-12-16 | 1979-01-30 | The United States Of America As Represented By The United States Department Of Energy | Nuclear instrumentation cable end seal |
EP0139406A1 (en) * | 1983-08-31 | 1985-05-02 | Ngk Insulators, Ltd. | Metal-ceramics composite article and a method of producing the same |
US4661424A (en) * | 1985-10-04 | 1987-04-28 | Yuasa Battery Co. | Sodium-sulfur storage battery |
US4704557A (en) * | 1986-03-11 | 1987-11-03 | The United States Of America As Represented By The United States Department Of Energy | Cermet insert high voltage holdoff for ceramic/metal vacuum devices |
US4935583A (en) * | 1980-05-30 | 1990-06-19 | Kyle James C | Insulated conductor with ceramic-connected elements |
US5177806A (en) * | 1986-12-05 | 1993-01-05 | E. I. Du Pont De Nemours And Company | Optical fiber feedthrough |
US5557074A (en) * | 1991-11-27 | 1996-09-17 | Fujitsu Limited | Coaxial line assembly of a package for a high frequency element |
US20070187934A1 (en) * | 2006-01-27 | 2007-08-16 | Thomas Fink | Metal-sealing material-feedthrough and utilization of the metal-sealing material feedthrough with an airbag, a belt tensioning device, and an ignition device |
US8733250B2 (en) | 2006-01-27 | 2014-05-27 | Schott Ag | Metal-sealing material-feedthrough and utilization of the metal-sealing material feedthrough with an airbag, a belt tensioning device, and an ignition device |
US9423218B2 (en) | 2010-09-17 | 2016-08-23 | Schott Ag | Method for producing a ring-shaped or plate-like element |
US10684102B2 (en) | 2010-09-17 | 2020-06-16 | Schott Ag | Method for producing a ring-shaped or plate-like element |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL185482C (en) * | 1980-09-05 | 1991-01-16 | Philips Nv | HIGH PRESSURE DISCHARGE LAMP. |
JPH0435361U (en) * | 1990-07-20 | 1992-03-24 | ||
JPH0435359U (en) * | 1990-07-20 | 1992-03-24 | ||
KR102219337B1 (en) * | 2019-04-11 | 2021-02-23 | 사회복지법인 삼성생명공익재단 | System and method for quality assurance of radiation isocenter of radiation diagnosis and therapy device |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2200694A (en) * | 1937-09-21 | 1940-05-14 | Pintsch Julius Kg | Annular fusion joint |
US3219753A (en) * | 1963-05-15 | 1965-11-23 | Univ Illinois | Gas-impervious electrical feedthrough for use between two zones of differing pressures |
US3278211A (en) * | 1963-09-02 | 1966-10-11 | Philips Corp | Current lead-through member |
US3370874A (en) * | 1966-07-21 | 1968-02-27 | Isotronics Inc | Hermetic metal-to-glass seal and application thereof |
US3385618A (en) * | 1965-05-26 | 1968-05-28 | American Lava Corp | Ceramic-to-metal seal |
US3436109A (en) * | 1965-12-15 | 1969-04-01 | Corning Glass Works | Stressed hermetic seal and method of making said seal |
US3545950A (en) * | 1967-06-28 | 1970-12-08 | Physical Sciences Corp | Method of making a glass-to-metal seal |
US3600017A (en) * | 1968-02-26 | 1971-08-17 | Isotronics Inc | Hermetic metal-to-glass seals |
-
1971
- 1971-12-01 DE DE2159531A patent/DE2159531C3/en not_active Expired
-
1972
- 1972-11-22 US US00308685A patent/US3854827A/en not_active Expired - Lifetime
- 1972-11-25 NL NL7216023A patent/NL7216023A/xx unknown
- 1972-11-29 CA CA157,740A patent/CA966567A/en not_active Expired
- 1972-11-29 GB GB5513772A patent/GB1358365A/en not_active Expired
- 1972-11-29 JP JP11909572A patent/JPS5433247B2/ja not_active Expired
- 1972-11-30 FR FR7242582A patent/FR2162094A1/fr not_active Withdrawn
Patent Citations (8)
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US2200694A (en) * | 1937-09-21 | 1940-05-14 | Pintsch Julius Kg | Annular fusion joint |
US3219753A (en) * | 1963-05-15 | 1965-11-23 | Univ Illinois | Gas-impervious electrical feedthrough for use between two zones of differing pressures |
US3278211A (en) * | 1963-09-02 | 1966-10-11 | Philips Corp | Current lead-through member |
US3385618A (en) * | 1965-05-26 | 1968-05-28 | American Lava Corp | Ceramic-to-metal seal |
US3436109A (en) * | 1965-12-15 | 1969-04-01 | Corning Glass Works | Stressed hermetic seal and method of making said seal |
US3370874A (en) * | 1966-07-21 | 1968-02-27 | Isotronics Inc | Hermetic metal-to-glass seal and application thereof |
US3545950A (en) * | 1967-06-28 | 1970-12-08 | Physical Sciences Corp | Method of making a glass-to-metal seal |
US3600017A (en) * | 1968-02-26 | 1971-08-17 | Isotronics Inc | Hermetic metal-to-glass seals |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4137423A (en) * | 1977-12-16 | 1979-01-30 | The United States Of America As Represented By The United States Department Of Energy | Nuclear instrumentation cable end seal |
US4935583A (en) * | 1980-05-30 | 1990-06-19 | Kyle James C | Insulated conductor with ceramic-connected elements |
EP0139406A1 (en) * | 1983-08-31 | 1985-05-02 | Ngk Insulators, Ltd. | Metal-ceramics composite article and a method of producing the same |
US4661424A (en) * | 1985-10-04 | 1987-04-28 | Yuasa Battery Co. | Sodium-sulfur storage battery |
US4704557A (en) * | 1986-03-11 | 1987-11-03 | The United States Of America As Represented By The United States Department Of Energy | Cermet insert high voltage holdoff for ceramic/metal vacuum devices |
US5177806A (en) * | 1986-12-05 | 1993-01-05 | E. I. Du Pont De Nemours And Company | Optical fiber feedthrough |
US5557074A (en) * | 1991-11-27 | 1996-09-17 | Fujitsu Limited | Coaxial line assembly of a package for a high frequency element |
US20070187934A1 (en) * | 2006-01-27 | 2007-08-16 | Thomas Fink | Metal-sealing material-feedthrough and utilization of the metal-sealing material feedthrough with an airbag, a belt tensioning device, and an ignition device |
US8127681B2 (en) * | 2006-01-27 | 2012-03-06 | Schott Ag | Metal-sealing material-feedthrough and utilization of the metal-sealing material feedthrough with an airbag, a belt tensioning device, and an ignition device |
US8733250B2 (en) | 2006-01-27 | 2014-05-27 | Schott Ag | Metal-sealing material-feedthrough and utilization of the metal-sealing material feedthrough with an airbag, a belt tensioning device, and an ignition device |
US9423218B2 (en) | 2010-09-17 | 2016-08-23 | Schott Ag | Method for producing a ring-shaped or plate-like element |
US9651345B2 (en) | 2010-09-17 | 2017-05-16 | Schott Ag | Method for producing a ring-shaped or plate-like element |
US10684102B2 (en) | 2010-09-17 | 2020-06-16 | Schott Ag | Method for producing a ring-shaped or plate-like element |
Also Published As
Publication number | Publication date |
---|---|
NL7216023A (en) | 1973-06-05 |
DE2159531C3 (en) | 1980-11-13 |
CA966567A (en) | 1975-04-22 |
JPS5433247B2 (en) | 1979-10-19 |
JPS4865144A (en) | 1973-09-08 |
FR2162094A1 (en) | 1973-07-13 |
DE2159531B2 (en) | 1980-03-20 |
DE2159531A1 (en) | 1973-06-07 |
GB1358365A (en) | 1974-07-03 |
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