US3826588A - Turbomolecular vacuum pump - Google Patents

Turbomolecular vacuum pump Download PDF

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Publication number
US3826588A
US3826588A US00371372A US37137273A US3826588A US 3826588 A US3826588 A US 3826588A US 00371372 A US00371372 A US 00371372A US 37137273 A US37137273 A US 37137273A US 3826588 A US3826588 A US 3826588A
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US
United States
Prior art keywords
blade
pump
stator
blades
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00371372A
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English (en)
Inventor
R Frank
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Application granted granted Critical
Publication of US3826588A publication Critical patent/US3826588A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes

Definitions

  • This invention relates to a turbomolecular vacuum pump of the type that has a stator to which there are affixed stator blade wheels and a rotor carrying rotor blade wheels arid in which the stator blade wheels are in an interleavingrelationship with the rotor blade wheels.
  • the pitch angle of the blades defined by their inclination with respect to the plane of the blade wheels, changes in the radial direction.
  • the blade wheels of the rotor which may be driven with a high rpm, cooperate as runner wheels in a turbine-like manner with the stationary blade wheels of the stator which is affixed to the pump housing.
  • the pitch angle of the blades in at leastone stage formed of a rotor blade wheel and a stator blade wheel increases radially outwardly from the attached end of the blades in such a manner that the compression ratio of that pump stage remains at least approximately constant at radially different locations.
  • FIG. 1 of three circumferentially successive blades belonging to the same rotor blade wheel.
  • FIGS. 5a and 5b illustrate plan views of parts of rotor blades with different blade distances.
  • FIGS. 6, 7 and 8 illustrate developed sections as in FIGS. 2, 3, and 4, wherein the blade widths are radially constant.
  • FIG. 1 there is illustrated a stator 1 which is rigidly affixed to the pump housing and which surrounds a rotor 2'supported for rotation about a vertical axis 6. To the stator 1 there are affixed stator blade wheels 3 whereas the rotor 2 is provided with rotor blade wheels 4. To the housing, 1, at the high vacuum side of the pump, there is attached a coupling flange 5. Further technical details of this pump with regard to drive means, seals and rotor supports are considered conventional and are described, for example, in Garnier et al., US. Pat. No. 3,168,977.
  • FIGS. 2, 3, and 4 it is seen that along the cylinder surface I (FIG. 2) the blades have, at their foot zones (that is, in the vicinity of their attachment) the small pitch angle a, of approximately 20; along the cylinder surface II (FIG. 3) the same blades have, approximately in their mid zone, an increased pitch angle a of approximately 35; and along the cylinder surface III (FIG. 4) the same blades have, in their peripheral end zones a maximum pitch angle a, of approximately 45.
  • a degree of overlap (which is expressed by the ratio s:b, that is, the ratio of the distance s between two adjacent blades of the same blade wheel to the blade width b) which is approximately constant in the radial direction, the blade width b is increased radially outwardly (that is, b b b because of the radially outward increase of the blade distance s (that is, s s s
  • the blades may have other shapes wherein the blade widths are radially constant.
  • At least the blades of a high vacuum stage are, at least in their peripheral zone, not in an optical overlap, that is, s/b 1.
  • the change of the blade pitch angle may expediently be continuous at least along subsequent length portions in the radial direction.
  • FIG. A illustrates a part of a rotor blade having continuously changing blade distances s s and s and blade widths b b and b
  • the dimensions s and b that have identical index numbers are measured along the same circle concentric with the blade wheel.
  • the blades may be advantageously made in such a manner that the change of the pitch angle is periodically discontinued. This may be accomplished, for example, by twisting the blade in different pitch angle zones.
  • Such a rotor blade is shown in FIG. 512. Between the lines A, B, C, and D are zones with different in each zone constant pitch angle. The number of zones can be changed.
  • both the stator and v the rotor blade wheels have radially outwardly increasing pitch angles.
  • the blade wheels may be made of circular, radially slotted stamped sheet metal according to known manufacturing methods.
  • the invention is not limited to the single-flow turbomolecular vacuum pump with vertically arranged rotors in accordance with the described embodiment, but it may also find application in known two-flow structures in which the rotor in general is arranged to be rotated about a horizontal axis.
  • each stator blade wheel being formed of a plurality of circumferentially spaced stator blades each having one end attached to said stator and each extending in a radial direction with respect to said axis, a rotor arranged axially coextensive with said stator, a plurality of axially spaced rotor blade wheels carried by said rotor, each rotor blade wheel being formed of a plurality of circumferentially spaced rotor blades each having one end attached to said rotor and each extending in a radial direction, each blade having a pitch angle defined by the inclination of the blade to the plane of the blade wheel, said stator blade wheels being in an interleaving relationship with said rotor blade wheels, each stator blade wheel forming a pump stage with an adjacent, cooperating rotor blade

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
US00371372A 1972-06-19 1973-06-19 Turbomolecular vacuum pump Expired - Lifetime US3826588A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2229724A DE2229724B2 (de) 1972-06-19 1972-06-19 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
US3826588A true US3826588A (en) 1974-07-30

Family

ID=5848074

Family Applications (1)

Application Number Title Priority Date Filing Date
US00371372A Expired - Lifetime US3826588A (en) 1972-06-19 1973-06-19 Turbomolecular vacuum pump

Country Status (5)

Country Link
US (1) US3826588A (en:Method)
CH (1) CH564692A5 (en:Method)
DE (1) DE2229724B2 (en:Method)
FR (1) FR2190184A5 (en:Method)
GB (1) GB1397179A (en:Method)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4108620A (en) * 1975-04-24 1978-08-22 Battelle-Institut E.V. Device for the separation of gaseous mixtures into components of different molecular mass
US4422822A (en) * 1980-08-11 1983-12-27 Norman Milleron Rotating fiber array molecular driver and molecular momentum transfer device constructed therewith
US5033936A (en) * 1988-08-24 1991-07-23 Seiko Seiki Kabushiki Kaisha Rotor blades of turbomolecular pump
US5052887A (en) * 1988-02-26 1991-10-01 Novikov Nikolai M Turbomolecular vacuum pump
US5158426A (en) * 1990-02-16 1992-10-27 Varian Associates, Inc. Stator assembly for a turbomolecular pump
US5188514A (en) * 1989-11-03 1993-02-23 Varian Associates, Inc. Process for manufacturing an impeller by electrical discharge machining and articles so obtained
US5528618A (en) * 1992-09-23 1996-06-18 The United States Of America As Represented By The Secretary Of The Air Force Photolytic iodine laser system with turbo-molecular blower
EP0829645A3 (en) * 1996-09-12 1998-11-11 Seiko Seiki Kabushiki Kaisha Turbomolecular pump
EP1041287A3 (en) * 1999-03-31 2002-01-16 Seiko Seiki Kabushiki Kaisha Vacuum pump
US6474940B1 (en) * 1998-06-17 2002-11-05 Seiko Instruments Inc. Turbo molecular pump
US20040091351A1 (en) * 2000-09-20 2004-05-13 Ralf Adamietz Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades
US20110064562A1 (en) * 2008-02-15 2011-03-17 Shimadzu Corporation Turbomolecular Pump
US20140205432A1 (en) * 2013-01-22 2014-07-24 Agilent Technologies, Inc. Rotary vacuum pump
CN104047871A (zh) * 2013-03-13 2014-09-17 株式会社岛津制作所 真空泵
EP2341251B1 (en) 2008-10-03 2018-12-26 Shimadzu Corporation Turbo-molecular pump
JP2020505546A (ja) * 2017-01-20 2020-02-20 エドワーズ リミテッド 段間入口を有する多段ターボ分子ポンプ
CN111503021A (zh) * 2019-01-30 2020-08-07 株式会社岛津制作所 涡轮分子泵

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2128687B (en) * 1982-10-13 1986-10-29 Rolls Royce Rotor or stator blade for an axial flow compressor
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748055A (en) * 1970-07-15 1973-07-24 W Becker Rotor and stator wheel construction for a turbo molecular pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748055A (en) * 1970-07-15 1973-07-24 W Becker Rotor and stator wheel construction for a turbo molecular pump

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4108620A (en) * 1975-04-24 1978-08-22 Battelle-Institut E.V. Device for the separation of gaseous mixtures into components of different molecular mass
US4422822A (en) * 1980-08-11 1983-12-27 Norman Milleron Rotating fiber array molecular driver and molecular momentum transfer device constructed therewith
US5052887A (en) * 1988-02-26 1991-10-01 Novikov Nikolai M Turbomolecular vacuum pump
US5033936A (en) * 1988-08-24 1991-07-23 Seiko Seiki Kabushiki Kaisha Rotor blades of turbomolecular pump
US5188514A (en) * 1989-11-03 1993-02-23 Varian Associates, Inc. Process for manufacturing an impeller by electrical discharge machining and articles so obtained
US5158426A (en) * 1990-02-16 1992-10-27 Varian Associates, Inc. Stator assembly for a turbomolecular pump
US5528618A (en) * 1992-09-23 1996-06-18 The United States Of America As Represented By The Secretary Of The Air Force Photolytic iodine laser system with turbo-molecular blower
EP0829645A3 (en) * 1996-09-12 1998-11-11 Seiko Seiki Kabushiki Kaisha Turbomolecular pump
US6474940B1 (en) * 1998-06-17 2002-11-05 Seiko Instruments Inc. Turbo molecular pump
EP1041287A3 (en) * 1999-03-31 2002-01-16 Seiko Seiki Kabushiki Kaisha Vacuum pump
US20040091351A1 (en) * 2000-09-20 2004-05-13 Ralf Adamietz Turbomolecular vacuum pump with rows of rotor blades and rows of stator blades
US20110064562A1 (en) * 2008-02-15 2011-03-17 Shimadzu Corporation Turbomolecular Pump
US8668436B2 (en) * 2008-02-15 2014-03-11 Shimadzu Corporation Turbomolecular pump
EP2341251B1 (en) 2008-10-03 2018-12-26 Shimadzu Corporation Turbo-molecular pump
US20140205432A1 (en) * 2013-01-22 2014-07-24 Agilent Technologies, Inc. Rotary vacuum pump
US9670931B2 (en) * 2013-01-22 2017-06-06 Agilent Technologies Inc. Rotary vacuum pump
CN104047871A (zh) * 2013-03-13 2014-09-17 株式会社岛津制作所 真空泵
JP2020505546A (ja) * 2017-01-20 2020-02-20 エドワーズ リミテッド 段間入口を有する多段ターボ分子ポンプ
CN111503021A (zh) * 2019-01-30 2020-08-07 株式会社岛津制作所 涡轮分子泵
US11293447B2 (en) * 2019-01-30 2022-04-05 Shimadzu Corporation Turbo-molecular pump blade design

Also Published As

Publication number Publication date
DE2229724B2 (de) 1980-06-04
FR2190184A5 (en:Method) 1974-01-25
DE2229724A1 (de) 1974-01-10
GB1397179A (en) 1975-06-11
CH564692A5 (en:Method) 1975-07-31

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