US3770870A - Turret device for positioning crucibles in ion sources - Google Patents

Turret device for positioning crucibles in ion sources Download PDF

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Publication number
US3770870A
US3770870A US00317790A US3770870DA US3770870A US 3770870 A US3770870 A US 3770870A US 00317790 A US00317790 A US 00317790A US 3770870D A US3770870D A US 3770870DA US 3770870 A US3770870 A US 3770870A
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US
United States
Prior art keywords
turret device
ionization chamber
translating
crucibles
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00317790A
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English (en)
Inventor
J Kervizic
R Masic
R Warnecke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Cooper Industries LLC
Original Assignee
Thomson CSF SA
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Filing date
Publication date
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Publication of US3770870A publication Critical patent/US3770870A/en
Assigned to COOPER INDUSTRIES, INC, A CORP.OF OHIO reassignment COOPER INDUSTRIES, INC, A CORP.OF OHIO ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: CROUSE-HINDS COMPANY
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers

Definitions

  • ABSTRACT Turret device making it possible to successively introduce, in the ionization chamber of an ion source, crucibles containing different kinds of elements, without any need/to interrupt the operation of the source.
  • This device comprises a detachable rotatable barrel associated with cylindrical support-members 8 carrying the crucibles 1, means being provided for rotating the barrel and for translating any one of the crucibles toward the ionization chamber C.
  • This turret device is suitable for an ion source successively producion ions of arsenic, phosphorus, aluminium, silicium, for example.
  • the invention relates to ion sources being able to produce beams of ions of different kinds (phosphorus, arsenic, boron) without having to interrupt the opertion of the source and more particularly to a turret device for positioning crucibles in these ion sources.
  • the ion sources used hitherto require, for producing ion beams of different kinds halting of operation of these sources as well as a lengthy period of manipulation to change the type of ions (introduction of air, extraction of the crucible, replacement with another crucible containing the new element to be vaporised, pumping the sealed envelope of the ion source).
  • the object of the present invention is a turret device for successively positioning crucibles on the path of an ion beamcrossing an ionization chamber of an ion source, said turret device comprising: a vacuum tight enclosure coupled to said ionization chamber, a rotatable barrel located within said vacuum tight enclosure and having a plurality of compartments for respectively received support-members, said support-members supporting said crucibles and being located at a constant distance of the rotation axis of said rotatable barrel, said support members being slidably mounted within said compartments; means being provided for translating anyone of said support-members along a direction parallel to said rotation axis; means being provided for bringing anyone of said support-members in register with an aperture of said ionization chamber; means being provided for heating one of said crucibles upon introduction thereof within said ionization chamber.
  • FIG. 1 illustrates, in longitudinal section, the turret device in accordance with the invention
  • FIG. 2 illustrates, in transverse section, the turret device in accordance with the invention
  • FIG. 3 shows an arrangement for heating the crucibles.
  • the turret device in accordance with the invention makes it possible to rapidly introduce, through an aperture 2, one of the crucibles 1 containing the selected element, into the second ionization chamber C of a source having two ionization chambers.
  • the turret device comprises a vacuum tight enclosure 3 fixed to the wall 4 of the ionization chamber C through a sliding valve 5 having two apertures 2 and 30 facing one another. The vac-,
  • the arm 14 translates the crucible 1 parallel to the axis 18 of the turret device, this axis 18 corresponding to the axis of the shafts 20 and 21, a slot 19, formed in each of the cylindrical compartments 7, enabling said arm 14 (FIG. 1) to freely pass.
  • the rotation of the barrel 6, makes it possible to bring the selected crucible l in register with the apertures 30 and 2 of the sliding valve 5, and the rotation of the threaded rod 13 allows to translate the crucible 1 toward the second ionization chamber C adjacent a first ionization chamber A of the ion source.
  • Vacuum tight joints are used to seal off the control shafts l3 and 20 of the device.
  • the selected crucible 1 When the selected crucible 1 has been introduced into the ionization chamber C, it is raised to the suitable temperature by means of a furnace constituted for example by the heating resistor 22.
  • a heating system 32 is coupled to this heating resistor 22 and is controlled by a control circuit 33 for regulating and controlling the temperature of this selected crucible 1. These parts are associated with the motor drive 31, for enabling the selected crucible l to be raised to the temperature corresponding to its content. Thus, the element contained in the crucible l and introduced into the second ionization chamber C, is automatically raised to its vaporization temperature.
  • the vacuum tight enclosure 3 can be detached from the ionization chamber C for allowing the loading of elements in the crucibles l.
  • a pumping system 34 is coupled to this vacuum tight enclosure 3 to permit a rapid restarting of the ion source, the ionization chamber C being isolated from the vacuum tight enclosure 3 by means of the sliding valve 5 during this loading operation.
  • silicium gold or arsenic ions (this by no means being a limitative list), under highly satisfactory conditions.
  • a turret device for successively positioning crucibles on the path of an ion beam crossing an ionization chamber of an ion source, said turret device comprising a vacuum tight enclosure coupled to said ionization chamber, a rotatable barrel located within said vacuum tight enclosure and having a plurality of compartments for respectively received support-members, said support-members supporting said crucibles and being located at a constant distance of the rotation axis of said rotatable barrel, said support-members being slidably mounted, within said compartments; means being provided for translating anyone of said support-members along a direction parallel to said rotation axis; means being provided for bringing anyone of said supportmembers in register with an aperture of said ionization chamber; means being provided for heating one of said crucibles upon introduction thereof within said ionization chamber.
  • a turret device as claimed in claim 1 further comprising a sliding valve located between said ionization chamber and said vacuum tight enclosure for isolating said enclosure from said ionization chamber, thereby allowing the opening of said enclosure.
  • a turret device as claimed in claim 3, wherein means for rotating and translating said supportmembers comprise a motor drive associated to said control circuit, for obtaining the suitable temperature of said selected crucible, this temperature depending from the element contained within said selected crucible.
  • a turret device as claimed in claim 1, wherein means for rotating and translating said supportmembers comprise a motor drive associated to said control circuit, for obtaining the suitable temperature of said selected crucible, this temperature depending from the element contained within said selected crucible.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
US00317790A 1971-12-23 1972-12-22 Turret device for positioning crucibles in ion sources Expired - Lifetime US3770870A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7146394A FR2165265A5 (enrdf_load_stackoverflow) 1971-12-23 1971-12-23

Publications (1)

Publication Number Publication Date
US3770870A true US3770870A (en) 1973-11-06

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Family Applications (1)

Application Number Title Priority Date Filing Date
US00317790A Expired - Lifetime US3770870A (en) 1971-12-23 1972-12-22 Turret device for positioning crucibles in ion sources

Country Status (3)

Country Link
US (1) US3770870A (enrdf_load_stackoverflow)
JP (1) JPS4874194A (enrdf_load_stackoverflow)
FR (1) FR2165265A5 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4330698A (en) * 1979-04-21 1982-05-18 Doryokuro Kakunenryo Kaihatsu Jigyodan Microwave melter
US4424104A (en) 1983-05-12 1984-01-03 International Business Machines Corporation Single axis combined ion and vapor source
US4940865A (en) * 1988-10-25 1990-07-10 The United States Of America As Represented By The Department Of Energy Microwave heating apparatus and method
WO1992006486A1 (en) * 1990-10-04 1992-04-16 Superion Limited Apparatus for and method of producing ion beams
US5861599A (en) * 1996-01-19 1999-01-19 The Boc Group, Inc. Rod-fed electron beam evaporation system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114980474B (zh) * 2022-07-01 2025-04-25 同方威视技术股份有限公司 用于无损检测加速器的外准直器及控制方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3190949A (en) * 1959-12-24 1965-06-22 Heraeus Gmbh W C Vacuum arc melting furnace with crucible changing apparatus
US3629888A (en) * 1969-09-09 1971-12-28 Dow Chemical Co Furnace assembly for thermal analysis use
US3634591A (en) * 1969-07-09 1972-01-11 Dow Chemical Co Furnace assembly for thermal analysis use

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3190949A (en) * 1959-12-24 1965-06-22 Heraeus Gmbh W C Vacuum arc melting furnace with crucible changing apparatus
US3634591A (en) * 1969-07-09 1972-01-11 Dow Chemical Co Furnace assembly for thermal analysis use
US3629888A (en) * 1969-09-09 1971-12-28 Dow Chemical Co Furnace assembly for thermal analysis use

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4330698A (en) * 1979-04-21 1982-05-18 Doryokuro Kakunenryo Kaihatsu Jigyodan Microwave melter
US4424104A (en) 1983-05-12 1984-01-03 International Business Machines Corporation Single axis combined ion and vapor source
US4940865A (en) * 1988-10-25 1990-07-10 The United States Of America As Represented By The Department Of Energy Microwave heating apparatus and method
WO1992006486A1 (en) * 1990-10-04 1992-04-16 Superion Limited Apparatus for and method of producing ion beams
US5300785A (en) * 1990-10-04 1994-04-05 Superion Limited Apparatus for and method of producing ion beams
US5861599A (en) * 1996-01-19 1999-01-19 The Boc Group, Inc. Rod-fed electron beam evaporation system

Also Published As

Publication number Publication date
FR2165265A5 (enrdf_load_stackoverflow) 1973-08-03
JPS4874194A (enrdf_load_stackoverflow) 1973-10-05

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Date Code Title Description
AS Assignment

Owner name: COOPER INDUSTRIES, INC, 1001 FANNIN, HOUSTON, TEXA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:CROUSE-HINDS COMPANY;REEL/FRAME:004103/0954

Effective date: 19830223