US3697789A - Mechanical oscillator - Google Patents

Mechanical oscillator Download PDF

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Publication number
US3697789A
US3697789A US155195A US3697789DA US3697789A US 3697789 A US3697789 A US 3697789A US 155195 A US155195 A US 155195A US 3697789D A US3697789D A US 3697789DA US 3697789 A US3697789 A US 3697789A
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United States
Prior art keywords
vibrating element
slit
enclosure
prongs
tuning fork
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US155195A
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English (en)
Inventor
Yoshiaki Kato
Hideki Ohuye
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
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Citizen Watch Co Ltd
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Filing date
Publication date
Priority claimed from JP6192170U external-priority patent/JPS4923498Y1/ja
Priority claimed from JP7909370A external-priority patent/JPS5326100B1/ja
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Application granted granted Critical
Publication of US3697789A publication Critical patent/US3697789A/en
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
    • G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
    • G04F5/063—Constructional details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

Definitions

  • PRIOR ART PRIOR ART INVENTOR /0 h/a/ ⁇ I /m 1 may 0/, g, z
  • the present invention relates to a mechanical oscillator comprising a mechanical vibrating element of the type whose vibrating part is divided into at least two prongs with a slit therebetween.
  • the present invention also relates to the construction of oscillator units of the type having hermetically sealed containers holding the improved vibrating elements therein.
  • a tuning fork type mechanical vibrating element having a plurality of prongs which are separated from one another by at least one slit, with the width of the slit being uniform over the greater extent of said slit from the open end of said vibrating element, and with said width then gradually decreasing at a constant rate toward the closed end of said slit.
  • FIGS. Ia and 1b are plan views showing the shapes of the conventional tuning forks.
  • FIG. 2 is a plan view showing the shape of a tuning fork used with the oscillator unit according to the present invention.
  • FIG. 3 is a perspective view showing the structure of a tool employed for processing the tuning fork of FIG.
  • FIGS. 40 and 4b are perspective views showing the arrangement of exciting electrodes for a crystal tuning fork.
  • FIG. 5 is a longitudinal sectional view of an embodiment of the oscillator unit of the invention having the tuning fork of FIG. 2 rigidly supported within a hermetically sealed container.
  • FIG. 6 is a cross-sectional view of the oscillator unit of FIG. 5.
  • FIGS. 7a and 7b illustrate by way of example different methods of supporting the outer can of the oscillator unit shown in FIG. 5.
  • FIGS. 8a and 8b respectively illustrate a longitudinal sectional view and a cross-sectional view of another embodiment of the present invention in which the tuning fork of FIG. 2 is mounted within a sealed container and hermetically secured at the open end of the container.
  • FIG. 9 is a longitudinal sectional view of a further embodiment of the present invention in which the tuning fork of FIG. 2 is resiliently supported within a hermetically sealed container with rubber material being filled around the surface of the node of vibration.
  • FIG. 10 is a perspective of a further embodiment of the present invention in which the node portion of the tuning fork of FIG. 2 is resiliently supported by a pin of a hermetic terminal;
  • FIGS. 11a, 11b, 11c and 11d are plan views showing still further embodiments of the present invention in which the principle of FIG. 2 is applied to certain vibrating elements other than tuning forks.
  • tuning forks cut and finished from such hard and brittle materials as rock crystal have been limited to only two kinds of geometric shapes, that is, the shape of FIG. 1a in which the shape of a closed end portion 3 of a slit 2 separating the two prongs of a tuning fork member l is rectangular, and the shape of FIG. lb in which the shape of the closed end portion 3 is semicircular. While these conventional tuning forks have'been generally satisfactory when the tuning forks are suspended with fine supporting wires and used as the frequency standards for stationary oscillators, it has been recently discovered by the inventors that, when used as the source oscillators for wrist watches, these conventional crystal tuning forks are not generally satisfactory in every respect.
  • the oscillation should not be interrupted even for a moment by such a degree of shock as may be caused when a watch fitted around the wrist is inadvertently struck directly against a desk or the like.
  • the vibrating element should not be caused to be broken even when a watch is inadvertently dropped onto the floor from a height of not less than one half of ones stature.
  • the interruption of oscillation as mentioned in (1) above is attributable to the fact that the vibrating element is moved to hit against the inner wall of the hermetically sealed oscillator container or the supporting structure of the vibrator when the watch is struck against the desk, and thus this difficultycan be solved by reinforcing the supports of the vibrating element to improve its rigidity so that the vibrating element may not easily come into contact with the surrounding structure.
  • this permits the impact acceleration to directly act on the vibrating prongs so that the prongs may be easily broken when subjected to the impact mentioned in (2) above.
  • This type of breaking occurs only at or near the base of vibrator prongs as indicated by marks in FIGS. 1a and 1b, and it is attributable to the fact that in these portions the maximum bending moment acts on the prongs and hence the maximum stresses are produced, and there is the effect of stress concentration caused by a sudden change in section, at the slit end.
  • the closed end portion 3 of the slit is V-shaped as shown in FIG. 2.
  • the resulting bending stress will be much smaller due to a slight and gradual increase in the sectional areas of the prongs, although the bending moment acting on the prongs at the base thereof will be much the same as in the conventional shapes.
  • the rate of decrease of stress differs depending on the direction of accelerations, but even in the worst case (i.e., when the direction of acceleration is perpendicular to the prongs and the plane of the U-portion of a tuning fork) the decreasing rate of stress will be equal to the rate of increase in the width of the prongs at the base thereof.
  • the rigidity of the prongs at the root thereof will also be increased with the resulting tendency toward somewhat increasing the natural frequency of the tuning fork, though this deficiency can be overcome by slightly increasing the length of the prongs.
  • FIG. 3 illustrates by way of example the construction of a tool which is believed to be best suited for use with the present invention.
  • the tool comprises a laminated structure of sheets in which plates 4 are provided for cutting both sides of a tuning fork, a plate 5 is provided for cutting a central slit, and these plates are assembled by means of screws 7 with intervening spacers 6 spacing the plates away from one another by a distance equal to the prong width.
  • the bottom face of this assembly is soldered to the top of an amplitude amplifying horn of an ultrasonic machine.
  • the upper surface of the assembly constitutes a cutting surface by which three parallel open groves in the form of a Ill are cut in a blank.
  • the upper and lower sides may be cut crosswise by means of a thin diamond cutter to cut out a finished tuning fork.
  • a large number of the plates 4 and 5 may be alternately arranged so that a plurality of tuning forks are cut and finished simultaneously.
  • the V-shaped slit end portion according to the present invention may be readily formed by providing the plate 5 with a knifeedge as shown in FIG. 3.
  • the thickness of the plates 4 and 5 and of the spacers 6 may be advantageously finished preliminarily to extremely accurate dimensions by means of a lapping process, for example, to thereby improve the accuracy of natural frequency of a finished tuning fork and of the balance in the vibrations of the two prongs.
  • FIGS. 40, 4b and 4c in which numeral 1 designates a crystal tuning fork whose contours are indicated with thin lines and dotted portions 8 outlined with thick full lines indicate an electrode pattern deposited by means of evaporation. Hatched portions 9 represent silver coated surfaces formed by applying a silver paste to those portions and then firing them prior to the evaporation process. These silver coated surfaces and the evaporation deposited surfaces are partially superimposed to provide electrical connections therebetween.
  • FIGS. 4a and 4b illustrate the two different external appearances of the crystal tuning fork before and after it has been turned through degrees about its vertical axis.
  • the larger surface portions designated as a, B, 'y and 8 are provided with deposits of solder to which lead wires are connected.
  • the external lead wires may be connected to terminals C, S and D.
  • the surfaces )8 and 8 are interconnected by an internal conductor S.
  • FIG. 40 illustrates the tuning fork as seen from the side of the upper ends of its prongs so as to show the ultimate interconnections among the deposited electrode coatings around the prongs and the respective terminals.
  • the terminals C, S and D are respectively connected to the common terminal, input terminal and output terminal of an oscillating circuit so that the tuning fork is excited to develop bending vibrations.
  • the electrode pattern as well as the terminals described above are illustrative only and the form of the electrode pattern and the number of the terminals may differ depending on the kinds of piezo-electric material used, the orientation of cut of the tuning fork, the types of oscillating circuit and so on.
  • the low frequency crystal oscillators which have hitherto been used comprise either a crystal rod or tuning fork suspended within a vacuum container by means of supporting wires. With this type of construction, there have been frequent troubles where the crystal was broken by hitting against the wall of the container, or the supporting wires were detached when subjected to a large mechanical shock.
  • an oscillator unit of a novel construction is incorporated with the resultant remarkable improvement in the strength of the oscillator unit.
  • numeral 1 designates a crystal tuning fork
  • 9 designates silver coated surfaces as shown in FIGS. 4a and 4b, but the corresponding deposited electrode pattern is not shown.
  • Numeral I designates a cylindrical outer frame of a material such as Kovar alloy; 5 is a glass material filled into the frame and C, S and D are insulated pins of Kovar or the like which extend through the glass layer. These components together constitute a hermetic terminal. The other ends of the leads C, S and D and an internal conductor S are so]- dered to the corresponding silver coated surfaces 9 in a similar manner as explained in connection with FIGS. 4a and 4b.
  • the tuning fork can be externally excited through the hermetic terminal and at the same time the node portion of vibration of the tuning fork, i.e., a portion 11 connecting the two vibrating prongs, has its end firmly secured to the hermetic terminal in a manner as if mechanically it were almost integrally formed with the hermetic terminal by means of the sufficiently thick lead wires. If necessary, this portion of the unit may be further reinforced by applying an adhesive material 12 therearound.
  • Numeral l3 designates a hermetically sealed case of a material such as metal, glass or ceramic which is fitted on the hermetic terminal and completely sealed by joining its open end and the outer frame 10 together with a solder, adhesive or the like.
  • This process may be carried out in a vacuum, or alternatively a small hole 13a may be preliminarily provided so that when a recessed portion 13b has been sealed with a solder, indium alloy or the like in a vacuum, the tuning fork is placed in a vacuum and is thus enabled to always oscillate in an ideal manner.
  • the tuning fork of this embodiment is characterized by the fact that the tuning fork is rigidly secured to the outer can, whereas the tuning fork is resiliently supported in the conventional unit. For this reason, even when the prongs of the tuning fork or the hermetically sealed case is more or less caused to bend under external force, a sufficient gap exists between the tuning fork and the case and prevents them from contacting against each other so that no breaking of the prongs occurs. It is to be noted here, however, that such external force acts directly on the prongs and therefore in some cases, in addition to the fact that a closed end portion 3 of the slit is formed into a V shape, the following countermeasure may preferably be taken to prevent the prongs from being broken. That is, instead of being rigidly secured to the base plate, the hermetically sealed case may be supported through the intermediary a resilient member 14 such as silicon rubber, for example, so that such external force is transmitted to the vibrating element only in a damped form.
  • a resilient member 14 such as silicon rubber
  • the distance between the soldered portions and the lower end of the slit i.e., the height of the base portion 1 l constituting the node of vibration, becomes sufficiently larger than the total width of the tuning fork, for example, thereby preventing any damping substance, such as a solder and an adhesive from being deposited on those portions where vibration strains are present.
  • FIG. 6 there is illustrated a sectional view of the oscillator unit of FIG. 5 and in this figure the identical reference numerals designate the corresponding parts.
  • the resistance of the prongs to breakage is weak in the directions normal to the plane of the U portion of the tuning fork and this the members 14 are made somewhat thicker in these directions.
  • FIGS. 7a and 7b show two types of resilient supporting structures for the vibrating element in which leaf springs are employed in place of the rubber members 14.
  • numeral 13 designates a case
  • 15 designates a leaf spring or a wire spring which is corrugated in FIG. 7a and cylindrical in FIG. 7b
  • 16 designates a foundation such as a base plate
  • 17 designates a joint connecting the spring and the case.
  • the hermetic lead wires need not always be soldered directly onto the surfaces of the tuning fork, and relatively short intermediary members may be used.
  • the tuning fork may be secured within the hermetic container by separate means so that fine lead wires can be connected to the tuning fork later. (In other words, the lead wires have nothing to do with the mechanical support of the crystals.)
  • the present invention can also be applied to other oscillator units having a relatively large node of vibration (e.g. a unit employing a cantilever rod crystal which is wider at its base and a thickness-shear unit).
  • a tuning fork l is first connected with a metal ring 18, and is hermetically sealed thereto with a filler material 19, such as a glass sealing material and an adhesive.
  • a filler material 19 such as a glass sealing material and an adhesive.
  • the upper ends or lower ends of the prong portions are adjusted to balance the vibrations of the two prongs (i.e., to adjust the two prongs so that the two prongs oscillate at the identical natural frequency and thus the reactions of the vibrations are cancelled to thereby prevent the vibrations from leaking out) and to adjust the unit to the desired frequency.
  • Exciting electrodes may be deposited in a pattern similar to that shown in FIGS.
  • Numeral 21 designates a cylindrical container of a metal or glass which is hermetically joined with the metal ring 18 with a solder, a soft metal such as indium or an adhesive. The joining is accomplished in a vacuum or alternately the unit is evacuated after the completion of the joining to finish the oscillator unit in the form of a semi-permanent vacuum tube.
  • Tuning forks were cut from crystal blanks 0.8 mm thick and were finished to specified dimensions so that they had the total width of 1.9 mm.
  • the prong length was 7 mm, and the ratio of the prong width to the slit width was almost 1 l excepting the closed end portion 3 of the slit.
  • Some of the tuning forks had their slit bottoms formed to be semicircular as shown in FIG. 1b and the remaining tuning forks had their slit bottoms formed as shown in FIG. 2.
  • the latter had a V-shaped bottom and the width of each of the prongs thereat was greater by one third of the maximum slit width, with the slit bottom being formed into the shape of a semicircle with a diameter of about one third of the maximum slit width taking into consideration the danger of stress concentration and the wear of the processing tool.
  • the height of the V portion was about two times the prong width.
  • the inclined sides of the V portion were actually not plane surfaces, but they happened to somewhat bulge outwardly, and the bottom portion was approximately in the form of a semiellipse.
  • the two types of the tuning forks were subjected to loads applied to the tops of the prongs and acting towards the tops of the mating prongs, even in an example in which the least difference was recorded, the conventional tuning fork failed at the load of 270 g, whereas the breaking load of the novel tuning fork was 350 g.
  • the strength of the tuning fork according to the present invention is greater than that of the conventional type by more than 30 percent.
  • the prongs were broken at the portions near the upper end of the V as indicated by marks in FIG. 2 and not at the base of the prongs as with the conventional tuning forks.
  • the stresses produced in the base of the prongs were satisfactorily small in the tuning fork of the present invention.
  • oscillator units constructed as shown in FIG. 84 were assembled employing the same two types of tuning forks. These units were housed in cases similar to wrist watches and were subjected to drop tests. When the units employing the conventional tuning forks were dropped on to stone flooring, they were frequently broken even when the height of the fall was only 50 cm, whereas the units with the novel tuning forks were found to be in good order even after they had been dropped from a height of cm. When an oscillator tubular member 21 which was enclosed by a layer of rubber 22 and covered by a cylinder 23 was housed within the case, the unit did not break even when it was dropped from a height of cm. Moreover, when units of this type were allowed to drop while they were oscillating, the recorded fluctuations of the vibration caused by the shock were such that there was no substantial inconvenience which would prevent their practical use.
  • the unit employing the tuning fork of the present invention was also rather superior to the unit with the conventional tuning fork in terms of the value of O which was a quality factor of the oscillator units, and it was assumed that this could be attributed to the improved distribution of strains caused by the vibrations. Furthermore, as compared with the conventional oscillator units, a larger percentage of the oscillator units according to the present invention could oscillate at a desired frequency without any subsequent adjustment after their assemblage. When it is desired to slightly reduce the oscillation frequency without destroying the equilibrium of the vibrations of the two prongs which have been balanced, the sides of the slit at the center thereof are slightly ground by means of a tool, such as a diamond file.
  • the device of the present invention has proved to be advantageous since its V-shaped slit bottom easily guided the file to to the central portion of the slit.
  • the conventional units were often unbalanced since one of the two prongs tended to be ground to a greater extent cut than the other.
  • the device of the present invention is advantageous in that an improved oscillator unit is provided without increasing the dimensions of the vibrating element, and this improved unit is rather superior to conventional units in terms of machinability and vibration characteristic and, more specifically, it has an improved mechanical strength.
  • numeral 1 designates a crystal tuning fork
  • 10 designates a hermetic terminal as shown in FIG. C, S and D are pins
  • 24 designates relatively resilient lead wires interconnecting the pins and conductive film electrodes 9 deposited on the surface of the vibrating element
  • 25 is a mass of rubber into which the base portion of the tuning fork is embedded
  • 26 and 27 provide a vacuum container when assembled with the hermetic terminal by so]- dering, for example.
  • numeral 28 designates silver in paste form preliminarily applied to the upper ends of the prongs and then fired.
  • the removing methods may include removing by mechnical abraison, removing by a soldering iron and the use of heat ray or a laser beam focused to melt and volatilize the solder.
  • the last-mentioned method may be advantageously employed to externally effect the required fine frequency adjustment of a vibrating element which has been previously housed within the vacuum chamber.
  • numeral 1 designates a crystal tuning fork
  • 9 designates a conductive film deposited on the surface of the tuning fork
  • 29 designates a C- shaped metal mounting securely soldered onto a portion of the conductive film
  • 10 designates a hermetic terminal
  • C, S and D pins One of the three pins is extended and is secured to the metal mounting 29 by welding so that the pin resiliently supports the tuning fork and also serves as one of the exciting electrodes.
  • the remaining short pins and the remaining conductive film portions are interconnected by long lead wires 30.
  • the vacuum container is not shown in this figure, since it is identical with the one shown in FIG. 9.
  • FIGS. 110 through 11d illustrate various forms of vibrating elements each of which is cut from a single blank and then slitted to specified dimensions.
  • the slit in each of these elements can also be adjusted to gradually reduce the width of the slit towards its closed end to thereby increase the resistance to breakage.
  • the illustrated vibrating elements are; (a) a triple prong reed, (b) an H-shaped vibrating element, (0) a vortex vibrating element whose free end is located in the central portion, and (d) a disk type vibrating element integrally formed with a supporting ring and designed to oscillate in the thickness-shear mode of vibration.
  • the hatched portions indicate the positions at which the vibrating elements are mounted on the holders, and the arrows indicate the directions of displacement of the free end at specified moments.
  • a mechanical oscillator comprising a tuning fork type mechanical vibrating element having a plurality of prongs which are separated by at least one elongated slit, said slit being open at one end of its ends and closed at its other end, the width of said slit being uniform for more than half the length of said slit from the open end thereof and then gradually decreases in width at substantially a constant rate toward the closed end of said slit.
  • a mechanical oscillator according to claim 1 in which the width of the gradually decreasing portion of said slit at the closed end of said slit is about one-third the width of the uniform portion of said slit.
  • a mechanical oscillator according to claim 2 in which the apex of said gradually decreasing portion, at the closed end of said slit, is semicircular.
  • a mechanical oscillator according to claim 1 in which said prongs merge into a base portion of the vibrating element, constituting the node of vibration, the height of said base portion being greater than the total width of two adjacent prongs of the tuning fork.
  • a mechanical oscillator comprising a hermetic enclosure for hermetically housing said vibrating element, and means for resiliently supporting said enclosure.
  • a mechanical oscillator according to claim 3, comprising a hermetic enclosure for hermetically housing said vibrating element, and means for resiliently supporting said enclosure.
  • a mechanical oscillator comprising a hermetic enclosure for hermetically housing said vibrating element, said prongs merging into a base portion of said vibrating element, means for making electrical connections to said base portion for exciting said vibrating element, the base portion of said vibrating element protruding from said enclosure into the space exterior of said enclosure to render said portion for electrical connection accessible from outside said enclosure.

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
US155195A 1970-06-23 1971-06-21 Mechanical oscillator Expired - Lifetime US3697789A (en)

Applications Claiming Priority (3)

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JP6192170 1970-06-23
JP6192170U JPS4923498Y1 (enrdf_load_stackoverflow) 1970-06-23 1970-06-23
JP7909370A JPS5326100B1 (enrdf_load_stackoverflow) 1970-09-09 1970-09-09

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CH (2) CH909171A4 (enrdf_load_stackoverflow)
DE (1) DE2131002C3 (enrdf_load_stackoverflow)

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2434682A1 (de) * 1973-07-20 1975-02-06 Matsushita Electric Ind Co Ltd Elektromechanisches zungenfilter
JPS5085168U (enrdf_load_stackoverflow) * 1973-12-10 1975-07-21
US3909640A (en) * 1973-03-27 1975-09-30 Suwa Seikosha Kk Crystal vibrator mounting
US3946257A (en) * 1973-09-17 1976-03-23 Kabushiki Kaisha Daini Seikosha Quartz crystal vibrator with partial electrodes for harmonic suppression
US3969640A (en) * 1972-03-22 1976-07-13 Statek Corporation Microresonator packaging and tuning
US4004166A (en) * 1975-03-12 1977-01-18 Nihon Dempa Kogyo Co., Ltd. Method for stabilizing the vibration frequency of a tuning fork-type quartz crystal oscillator
JPS5253690A (en) * 1975-10-28 1977-04-30 Seiko Instr & Electronics Ltd Thickness sliding crystal vibrator
US4054807A (en) * 1973-03-29 1977-10-18 Kabushiki Kaisha Daini Seikosha Quartz oscillator mountings
US4103482A (en) * 1975-03-07 1978-08-01 Mitsuaki Maruyama Wristwatch having a liquid crystal display
JPS544589A (en) * 1977-06-13 1979-01-13 Seiko Epson Corp Holding system of crystal vibrators
US4178526A (en) * 1977-05-09 1979-12-11 Murata Manufacturing Co., Ltd. Piezoelectrically driven tuning fork resonator and mounting structure
US4349763A (en) * 1978-06-27 1982-09-14 Kabushiki Kaisha Daini Seikosha Tuning fork type quartz resonator
JPS588220U (ja) * 1982-05-17 1983-01-19 セイコーエプソン株式会社 水晶ユニツト
US4480384A (en) * 1981-02-23 1984-11-06 Fabriques D'horlogerie De Fontainemelon S.A. Method of attaching a resonator casing to a printed circuit
US4578612A (en) * 1984-09-14 1986-03-25 Motorola, Inc. Shock absorber and spacer for quartz crystals
US5396144A (en) * 1993-08-02 1995-03-07 New S.D., Inc. Rotation rate sensor with center mounted tuning fork
US5434547A (en) * 1991-09-13 1995-07-18 Murata Manufacturing Co., Ltd. Tuning fork type piezoelectric resonator having steps formed in arms of the tuning fork
US5585561A (en) * 1994-08-11 1996-12-17 New S.D., Inc. Rotation rate sensor with closed ended tuning fork
US5773914A (en) * 1995-12-28 1998-06-30 Eta Sa Fabriques D'ebauches Piezoelectric resonator
US5821672A (en) * 1993-12-15 1998-10-13 Murata Manufacturing Co., Ltd. Surface mounting type electronic device
US7009326B1 (en) * 1999-10-28 2006-03-07 Murata Manufacturing Co., Ltd. Ultrasonic vibration apparatus use as a sensor having a piezoelectric element mounted in a cylindrical casing and grooves filled with flexible filler
US20070011861A1 (en) * 2004-03-26 2007-01-18 Yasuhisa Kosuge Cutting method and apparatus and rib electrode for electric discharge machining
US20080053227A1 (en) * 2006-08-30 2008-03-06 Fujitsu Media Devices Limited Vibration sensor
US20080105051A1 (en) * 2006-10-13 2008-05-08 Fujitsu Media Devices Limited Vibration sensor and method for manufacturing the same
US20090009037A1 (en) * 2007-07-02 2009-01-08 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating pieces and piezoelectric devices
US20090127983A1 (en) * 2007-11-20 2009-05-21 Epson Toyocom Corporation Tuning fork type piezoelectric resonator element and tuning fork type piezoelectric resonator
US20100096953A1 (en) * 2008-10-16 2010-04-22 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating pieces and piezoelectric devices comprising same

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5334875B2 (enrdf_load_stackoverflow) * 1973-07-10 1978-09-22
JPS5333399B2 (enrdf_load_stackoverflow) * 1974-01-09 1978-09-13
DE2520985C3 (de) * 1975-05-12 1981-07-30 Kievskij politechničeskeskij institut 50-letija Velikoj Oktjabrskoj Sozialističeskoj Revoljuzii, Kiev Piezoelektrischer Spannungs- und Stromtransformator
JPS6048926B2 (ja) * 1983-06-27 1985-10-30 セイコーエプソン株式会社 音叉型圧電振動子の支持構造

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US299956A (en) * 1884-06-10 Tuning-fork
US1937583A (en) * 1932-04-23 1933-12-05 Rca Corp Oscillation generator
US2247960A (en) * 1939-07-07 1941-07-01 Bell Telephone Labor Inc Tuning fork
US2323719A (en) * 1941-05-21 1943-07-06 Bell Telephone Labor Inc Alternating current generator
US2376131A (en) * 1942-09-26 1945-05-15 Bell Telephone Labor Inc Alternating current generator
US2666196A (en) * 1949-06-07 1954-01-12 Bell Telephone Labor Inc Frequency station calling system using bifurcated piezoelectric elements
US2838698A (en) * 1955-08-08 1958-06-10 Varo Mfg Co Inc Tuning fork assembly
US2971104A (en) * 1957-04-22 1961-02-07 Varo Mfg Co Inc Tuning fork assembly including driving and pick-up coils

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US299956A (en) * 1884-06-10 Tuning-fork
US1937583A (en) * 1932-04-23 1933-12-05 Rca Corp Oscillation generator
US2247960A (en) * 1939-07-07 1941-07-01 Bell Telephone Labor Inc Tuning fork
US2323719A (en) * 1941-05-21 1943-07-06 Bell Telephone Labor Inc Alternating current generator
US2376131A (en) * 1942-09-26 1945-05-15 Bell Telephone Labor Inc Alternating current generator
US2666196A (en) * 1949-06-07 1954-01-12 Bell Telephone Labor Inc Frequency station calling system using bifurcated piezoelectric elements
US2838698A (en) * 1955-08-08 1958-06-10 Varo Mfg Co Inc Tuning fork assembly
US2971104A (en) * 1957-04-22 1961-02-07 Varo Mfg Co Inc Tuning fork assembly including driving and pick-up coils

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969640A (en) * 1972-03-22 1976-07-13 Statek Corporation Microresonator packaging and tuning
USRE29429E (en) * 1973-03-27 1977-10-04 Kabushiki Kaisha Suwa Seikosha Oscillator for a timepiece
US3909640A (en) * 1973-03-27 1975-09-30 Suwa Seikosha Kk Crystal vibrator mounting
US3909639A (en) * 1973-03-27 1975-09-30 Suwa Seikosha Kk Oscillator for a timepiece
USRE29763E (en) * 1973-03-27 1978-09-12 Kabushiki Kaisha Suwa Seikosha Crystal vibrator mounting
US4054807A (en) * 1973-03-29 1977-10-18 Kabushiki Kaisha Daini Seikosha Quartz oscillator mountings
DE2434682A1 (de) * 1973-07-20 1975-02-06 Matsushita Electric Ind Co Ltd Elektromechanisches zungenfilter
US3946257A (en) * 1973-09-17 1976-03-23 Kabushiki Kaisha Daini Seikosha Quartz crystal vibrator with partial electrodes for harmonic suppression
JPS5085168U (enrdf_load_stackoverflow) * 1973-12-10 1975-07-21
US4103482A (en) * 1975-03-07 1978-08-01 Mitsuaki Maruyama Wristwatch having a liquid crystal display
US4004166A (en) * 1975-03-12 1977-01-18 Nihon Dempa Kogyo Co., Ltd. Method for stabilizing the vibration frequency of a tuning fork-type quartz crystal oscillator
USRE30506E (en) * 1975-03-12 1981-02-03 Nihon Dempa Kogyo Co., Ltd. Tuning fork-type quartz crystal oscillator and method for stabilizing the vibration frequency thereof
JPS5253690A (en) * 1975-10-28 1977-04-30 Seiko Instr & Electronics Ltd Thickness sliding crystal vibrator
US4178526A (en) * 1977-05-09 1979-12-11 Murata Manufacturing Co., Ltd. Piezoelectrically driven tuning fork resonator and mounting structure
JPS544589A (en) * 1977-06-13 1979-01-13 Seiko Epson Corp Holding system of crystal vibrators
US4349763A (en) * 1978-06-27 1982-09-14 Kabushiki Kaisha Daini Seikosha Tuning fork type quartz resonator
US4480384A (en) * 1981-02-23 1984-11-06 Fabriques D'horlogerie De Fontainemelon S.A. Method of attaching a resonator casing to a printed circuit
JPS588220U (ja) * 1982-05-17 1983-01-19 セイコーエプソン株式会社 水晶ユニツト
US4578612A (en) * 1984-09-14 1986-03-25 Motorola, Inc. Shock absorber and spacer for quartz crystals
US5434547A (en) * 1991-09-13 1995-07-18 Murata Manufacturing Co., Ltd. Tuning fork type piezoelectric resonator having steps formed in arms of the tuning fork
US5396144A (en) * 1993-08-02 1995-03-07 New S.D., Inc. Rotation rate sensor with center mounted tuning fork
US5821672A (en) * 1993-12-15 1998-10-13 Murata Manufacturing Co., Ltd. Surface mounting type electronic device
US5585561A (en) * 1994-08-11 1996-12-17 New S.D., Inc. Rotation rate sensor with closed ended tuning fork
US5773914A (en) * 1995-12-28 1998-06-30 Eta Sa Fabriques D'ebauches Piezoelectric resonator
US7009326B1 (en) * 1999-10-28 2006-03-07 Murata Manufacturing Co., Ltd. Ultrasonic vibration apparatus use as a sensor having a piezoelectric element mounted in a cylindrical casing and grooves filled with flexible filler
US20070011861A1 (en) * 2004-03-26 2007-01-18 Yasuhisa Kosuge Cutting method and apparatus and rib electrode for electric discharge machining
US20080053227A1 (en) * 2006-08-30 2008-03-06 Fujitsu Media Devices Limited Vibration sensor
US20080105051A1 (en) * 2006-10-13 2008-05-08 Fujitsu Media Devices Limited Vibration sensor and method for manufacturing the same
US20090009037A1 (en) * 2007-07-02 2009-01-08 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating pieces and piezoelectric devices
US7902729B2 (en) * 2007-07-02 2011-03-08 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating pieces and piezoelectric devices
US20090127983A1 (en) * 2007-11-20 2009-05-21 Epson Toyocom Corporation Tuning fork type piezoelectric resonator element and tuning fork type piezoelectric resonator
US7759848B2 (en) * 2007-11-20 2010-07-20 Epson Toyocom Corporation Tuning fork type piezoelectric resonator having a node of common mode vibration in constructed part of base
US20100096953A1 (en) * 2008-10-16 2010-04-22 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating pieces and piezoelectric devices comprising same
US7973458B2 (en) * 2008-10-16 2011-07-05 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating pieces having progressively narrowed vibrating arms

Also Published As

Publication number Publication date
CH556049A (enrdf_load_stackoverflow) 1974-11-15
CH909171A4 (enrdf_load_stackoverflow) 1974-05-31
DE2131002B2 (de) 1974-03-28
DE2131002A1 (de) 1971-12-30
DE2131002C3 (de) 1974-10-24

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