US3674977A - Electron beam deflection apparatus - Google Patents

Electron beam deflection apparatus Download PDF

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Publication number
US3674977A
US3674977A US97095A US3674977DA US3674977A US 3674977 A US3674977 A US 3674977A US 97095 A US97095 A US 97095A US 3674977D A US3674977D A US 3674977DA US 3674977 A US3674977 A US 3674977A
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Prior art keywords
output
input
generator
operational amplifier
integrator
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Expired - Lifetime
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US97095A
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English (en)
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Rolf Mayer
Johann Reitinger
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UNI STUTTGART AS REPRESENTED B
UNIVERSITAT STUTTGART AS REPRESENTED BY INST fur KERNENERGETIK
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UNI STUTTGART AS REPRESENTED B
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Definitions

  • ABSTRACT Apparatus for deflecting the beam of an electron beam welding device, or similar source of a beam of radiant energy.
  • the apparatus comprises a sine/cosine wave generator and a trian- Dec. 18, 1969 Germany ..P 19 63 454.9 gular/rectangular wave generator selectively connectable to the inputs of a bi-channel amplifier whose output is con- US. Cl.
  • this invention relates to deflection generators. More particularly, in a preferred embodiment, this invention relates to a deflection generator for deflecting a beam of radiant energy along a plurality of predetermined trajectories. The invention is particularly suited for deflecting the beam of an electron beam welding apparatus with respect to the workpiece to be welded.
  • the problem is to find a deflection generator for an electron beam apparatus, or other radiant energy source, which will generate deflection currents (or voltages) to cause the electron beam to traverse circular or elliptical trajectories or any combination thereof, with minimal error and distorfion.
  • the generator should also be capable of wobbling the beam either along, or transverse to, the trajectory and should be capable of operating over an extremely wide frequency band, without sacrificing the low distortion qualities of the deflection current, or voltage.
  • the instant invention which, in a preferred embodiment comprises at least one generator for generating at least one output signal of a predetermined and stabilized amplitude, frequency and phase; a stabilized, bi-channel output amplifier; deflection apparatus, connected to the output of the stabilized output amplifier; and circuitry, connecting the output signal or signals to the input of the bi-channel amplifier, so that an amplified replica of the output signal or signals is impressed across the deflection apparatus to controllably deflect the radiant energy beam.
  • FIG. 1 is a block diagram of an generator according to this invention.
  • FIG. 2 is a schematic drawing of an illustrative sine/cosine generator for use with the deflection generator of FIG. 1;
  • FIG. 3 is a schematic drawing of an illustrative triangular/rectangular wave generator for use with the deflection generator of FIG. 1;
  • FIG. 4 is a schematic drawing of an illustrative frequency modulating circuit for use with the sine/cosine generator of FIG. 2;
  • FIG. 5 is a schematic drawing of an illustrative amplitude modulating circuit for use with the sine/cosine generator of FIG. 2.
  • FIG. 1 is a block diagram of an illustrative deflection generator, according to the invention.
  • the deflection generator comprises two individual generators; a sine/cosine generator 1 and a triangular/rectangular wave generator 5.
  • the Sine/cosine generator I is connected to an amplitude controller 2 and has two output connections 3 and 4 on which the sine wave and cosine wave signals appear, respectively.
  • triagular/rectangular wave generator 5 has two output connections 6 and 7 on which the triangular wave and rectangular wave signals appear, respectively.
  • the outputs of generators l and 5 are connected to a function selector 8 which selects the desired waveform, under control of an operator, and passes it to one input 9, 10 of a pair of output amplifiers l1 and 12, respectively.
  • the current stabilized outputs of output amplifiers l1 and 12 are connected, in turn, to a pair of deflection coils l3 and 14, respectively, which are associated with the electron beam apparatus (not shown since it is conventional).
  • One side of deflection coil 13 and 14 is connected to ground, via a shunt resistor 15 and 16, respectively.
  • a limit indicating circuit 18 is connected to the outputs of the two output amplifiers, l1 and 12, and to a warning indicator bulb I9 so that when the output voltage of either amplifier reaches some predeten'nined value, the limit indicating circuit lights the warning lamp.
  • a pair of adjustable d. c. voltage sources 22 and 23 are connected to output amplifiers l l and 12, respectively, to permit the operator to adjust the position of the electron beam on the workpiece, in the same way that the trace of an oscilloscope can be centered on the scope screen.
  • sine/cosine generator 1 comprises a pair of serially connected operational amplifiers 30 and 31, which function as integrating circuits.
  • a third operational amplifier 32 acu'ng as an inverting stage, is connected in the feedback path which interconnects the output of operational amplifier 31 and the input of operational amplifier 30.
  • This configuration represents a self-oscillating system with the result that a sinewave signal appears at the output 3 of operational amplifier 30 while a signal delayed by IT/2, or a cosine wave, appears at the output 4 of operational amplifier 31.
  • the frequency at which the system oscillates is determined by the parameters of a pair of load resistors 33 and 34, the value of a plurality of capacitors 35-43 and 36-44 and by a pair of voltage dividers 45 and 46 in the feedback paths associated with operational amplifiers 30 and 31, respectively.
  • Capacitors 35, 37, 39, 41 and 43 and capacitors 36, 38, 40, 42 and 44 are of paired, equal values and are, advantageously, arranged in decade increments.
  • a ganged stepping switch 47 can connect a corresponding pair of capacitors to the respective feedback loop.
  • the two voltage dividers 45 and 46 are of equal value and are advantageously fonned from a ganged pair of potentiometers. Voltage dividers 45 and 46 serve to provide a continuous frequency adjustment, within any given decade.
  • illustrative deflection Oscillations are initiated in the system by temporarily connecting the output 56 of operational amplifier 32 to the input 48 of operational amplifier 31.
  • a well defined feedback coefficient is required, which is, of course, provided by the amplitude controller 2 (FIG. 1). 1
  • Rapid build-up of the amplitude of the oscillations in the circuit may be obtained if, shortly after the apparatus is turned on, and, therefore, shortly after the supply voltage is applied to power supply terminal 49, capacitor 37, for example, associated with one of the feedback loops is charged to a voltage which is determined by a third voltage divider 50 which is connected to the power supply terminal 49.
  • the circuit further comprises a transistor 53 whose emitter is connected to ground and whose base is connected to the midpoint of a capacitor 51 and a resistor 52 serially connected between ground and the power source.
  • capacitor 51 charges through resistor 52.
  • the base of transistor 53 becomes positive for a time period determined primarily by the time-constant of resistor 52 and capacitor 51.
  • Relay 54 operated, provides the desired path between voltage divider 50 and capacitor 37, say, for fast warm-up.
  • transistor 53 turns off, releasing relay 54 and breaking the path from voltage divider50 to capacitor 37.
  • FIG. 3 depicts the schematic of an illustrative triangular/rectangular wave generator 5.
  • the generator comprises the serial connection of an inverting, integrating stage 60, a hysteresis switching stage 62, a pulse-shaping stage 63, a wave-shaping stage 64, and a symmetrical output stage 65.
  • the inverting, integrating stage 60 includes an operational amplifier 61 which serves to integrate any d. c. voltage applied thereto (e.g., a negative d.c. potential) and thus produces at its output terminal 66 a steadily increasing ramp potential of opposite polarity.
  • the ramp voltage appearing on terminal 66 is also fed to the input of the hysteresis switch stage 62.
  • This latter stage includes a pair of interconnected transistors 67 and 68 which interchange their normally conducting and non-conducting states when the input voltage (from output 66 of stage 60) reaches some predetermined level.
  • the signal which is produced when hysteresis switch 62 changes state is shaped by pulse-shaping stage 63, rendered symmetrical by wave-shaping stage 64 and amplified by output stage 65.
  • the amplified signal is fed back over a feed-back loop to the input of integrating stage 60 as a positive signal. This, in turn, generates a steadily decreasing ramp voltage at output terminal 66, starting with the final value reached at the instant that hysteresis switch 62 changes state.
  • the decreasing ramp voltage at terminal 66 is fed, as before, to the hysteresis switch 62 and when a predetermined negative limit is reached, the transistors 67 and 68 again change state, and the process repeats ad inf'mitum.
  • the output voltage which appears across terminal 66 will assume a triangular waveform.
  • the waveform which will appear across the output 69, of the symmetrical output stage 65 will reflect the state of the hysteresis switch and will, thus, be a rectangular wave of the same frequency as the triangular wave.
  • integrating stage 60 produces a triangular wave at output 66 which is also symmetrical with respect to ground. Furthermore, both waves are extremely stable in frequency as the rise time of the triangular wave depends directly on the amplitude of the rectangular wave.
  • the frequency at which generator 5 oscillates is determined by the values of capacitors 72 to 76 in the feedback loop of operational amplifier 61, as well as on a charging resistor 77 and a pair of potentiometers 78 and 79 which are connected to the input and output, respectively, of operational amplifier 61.
  • capacitors 72 to 76 advantageously increase in value in decade fashion and are inserted into the feedback loop by a stepping switch 80.
  • rotation of switch 80 will change the frequency of oscillation by powers of 10.
  • potentiometer 78 may be used to adjust the frequency within any given decade, while potentiometer 79 may be used to provide a continuous adjustment of the amplitude of the triangular and rectangular output waves.
  • D.C. supply potentials of equal but opposite polarity, with respect to ground, are connected to power supply terminals 81 81 (+ve) and 82 82 (-ve).
  • FIG. 4 illustrates an additional embodiment of the invention which may be used when it is desired to superimpose some frequency modulation on the sine and cosine waves produced by generator 1 (FIG. 2).
  • potentiometers 45 and 46 of FIG. 2 are replaced by a pair of analog multiplying stages and 91, respectively.
  • one input to analog multiplying stage 90 comprises the output 56 of the immediately preceeding operational amplifier and the corresponding output of multiplying stage 90 is connected to load resistor 33.
  • multiplying stage 91 interconnects output 57 and load resistor 34.
  • both amplifying stages 90 and 91 is connected, in common, to the output of an additional operational amplifier 92, which functions as an adder stage.
  • One input to operational amplifier 92 is connected through a potentiometer 93 to a dc. source, while at least one other input 94 is connected to the source of the modulating signal.
  • Potentiometer 93 is used to select the basic frequency of the sine/cosine generator (FIG. 2), preferably within one of the decades.
  • this modulation can reverse the motion of the beam along the trajectory.
  • Such a wobble in the beam path along the welding interface can considerably improve the strength and quality of the weldment.
  • the apparatus of FIG. 4 may, of course, be associated with the triangular/rectangular wave generator of FIG. 3 by replacing, for example, potentiometer 78 therein.
  • FIG. 5 depicts yet another embodiment of the invention which may be used if amplitude rather than frequency modulation is desired. Amplitude modulation of the output signals from the sine/cosine generator will result in a corresponding modulation in the radius of the circle traced by the electron beam on the workpiece, for example.
  • the sine and cosine outputs from generator 1 (FIG. 2) on terminals 3 and 4 are applied to input temiinals 9 and 10 of output amplifiers l1 and 12 (FIG. 1), respectively.
  • the signals on terminals 3 and 4 are applied to amplifiers 11 and 12 through a pair of equal value resistors and 101, respectively, and also to one input of a pair of analog multiplying stages 102 and 103, respectively.
  • the outputs of multiplying stages 102 and 103 are connected by a second pair of equal value resistors 104 and 105, to the inputs 9 and 10 of amplifiers l1 and 12, respectively.
  • the outer inputs 106 and 107 to multiplying stages 102 and 103, respectively, are connected, in common, to the source of modulating voltage, advantageously a completely seperate generator.
  • Resistors 100 and 104 and 101 and sum whatever inputs are connected thereto.
  • the output of amplifier 11 is the sum of the sine wave on terminal 3 together with the product of the sine wave on terminal 3 and the modulating voltage. The net effect is to vary the amplitude of the sine wave output from amplifier 11 by the modulating voltage.
  • the apparatus of FIG. 5 may also be utilized with the triangular/rectangular wave generator of FIG. 3 by connecting terminals 6 and 7 thereto, rather than terminals 3 and 4 shown in FIG. 5.
  • Apparatus for controllably deflecting a radiant energy beam which comprises:
  • At least one generator having its output terminal connected to the input terminal of said bi-channel amplifier, said at least one generator including:
  • a first integrator comprising a second operational amplifier, a first plurality of capacitors and first switching means for selectively connecting one of said first plurality of capacitors as a feedback connection from the output of said second operational amplifier to the input thereof;
  • a second integrator comprising a third operational amplifier, a second plurality of capacitors and second switching means, ganged mechanically to said first switching means, for selectively connecting one of said second plurality of capacitors as a feedback connection from the output of said third operational amplifier to the input thereof;
  • a second voltage divider mechanically ganged to said first voltage divider, connected between the output of said first integrator and ground, the center tap of said second voltage divider being connected to the input of said second integrator;
  • Apparatus for controllably deflecting a radiant energy beam which comprises:
  • At least one generator having is output terminal connected to the input ten'ninal of said bi-channel amplifier, said at least one generator including:
  • a first integrator comprising a second operational amplifier, a first plurality of capacitors and first switching means for selectively connecting one of said first plurality of capacitors as a feedback connection from the output of said second operational amplifier to the input thereof;
  • a second integrator comprising a third operational amplifier, a second plurality of capacitors and second switching means, ganged mechanically to said first switching means, for selectively connecting one of said second plurality of capacitors as a feedback connection from the output of said third operational amplifier to the input thereof;
  • a second analog multiplier having two inputs and an output, the last-mentioned output being connected to the input of said second integrator, and one input of said second analog multiplier being connected to the output of said first integrator;
  • an adder circuit having an output and two inputs, the output of said adder circuit being connected to the other inputs of both said first and said second analog multipliers, one input of said adder circuit being connected to ground, the other input of said adder circuit being connected to the center tap of said fourth voltage divider;
  • third and fourth analog multipliers each having an output and two inputs, the outputs of said first and second integrators being connected, via equal second and third resistors, to the first and second inputs, respectively, of said bi-channel amplifier and to one input of each of said third and fourth analog multipliers, the outputs of said third and fourth analog multipliers being connected, via fourth and fifth identical resistors, to the first and second inputs, respectively, of said bi-channel amplifier;
  • Apparatus for controllably deflecting a radiant energy beam which comprises:
  • At least one generator having its output temiinal connected to the input terminal of said bi-channel amplifier, said at least one generator including:
  • an inverting, integrating stage including a fourth operational amplifier, a plurality of capacitors, and third switching means for selectively connecting one of said plurality of capacitors as a feedback connection between the output and the input of said fourth operational amplifier;
  • a hysteresis switching circuit connected to the output of said integrating stage
  • a fifth voltage divider connected between ground and the amplified output of said pulse shaping circuit, the center tap of said fifth voltage divider being connected to an input of said integrating stage, the connection completing a closed oscillatory loop, the frequency of oscillation being coarsely determined by said third switching means and finely by said fifth voltage divider, the output signal of said at least one generator having a triangular wave form and deriving from the output of said integrating stage, the amplified output of said pulse shaping circuit yielding a second output signal, rectangular in wave fonn.
  • Apparatus for controllably deflecting a radiant energy beam which comprises:
  • At least one generator having its output terminal connected to the input terminal of said bi-channel amplifier, said at least one generator including:
  • an inverting, integrating stage including a fourth operational amplifier, a plurality of capacitors, and third switching means for selectively connecting one of said plurality of capacitors as a feedback connection between the output and the input of said fourth operational amplifier;
  • a hysteresis switching circuit connected to the output of said integrating stage
  • a pulse shaping circuit connected to the output of said hysteresis switching circuit
  • a third analog multiplier stage having two inputs and an output, the output being connected to the input of said inverting, integrating circuit, sand one input thereof being connected to the amplified output of said pulse shaping circuit;
  • an adder circuit having an output and two inputs, the output thereof being connected to the other input of said third analog multiplier, one input of said adder circuit being connected to ground, the other input of said adder circuit being connected to the center tap of said sixth voltage divider;
  • said adder circuit and third analog multiplier stage completing a closed, oscillatory loop, the coarse adjustment of the frequent; of oscillation thereof being effected b said d swr c g means and fine ad ustment being e ected by said sixth voltage divider, the output signal of said at least one generator being triangular in wave form, modulated by said modulating signal, the output of said pulse shaping circuit yielding a second output signal in modulated, rectangular form.
  • fifth and sixth analog multipliers each having an output and two inputs, the outputs of said integrating stage and said pulse shaping stage being connected, via equal sixth and seventh resistors, to the first and second inputs, respectively, of said bi-channel amplifier and to one input of said fifth and sixth analog multipliers, respectively, the output of said fifth and sixth analog multipliers being connected by eighth and ninth identical resistors, to the first and second inputs, respectively, of said bi-channel amplifier;

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Amplifiers (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
US97095A 1969-12-18 1970-12-11 Electron beam deflection apparatus Expired - Lifetime US3674977A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1963454A DE1963454C3 (de) 1969-12-18 1969-12-18 Generator für die Ansteuerung von Ablenkvorrichtungen in Elektronenstrahl geraten

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US3674977A true US3674977A (en) 1972-07-04

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DE (1) DE1963454C3 (de)
FR (1) FR2075018A5 (de)
GB (1) GB1337130A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2368141A1 (fr) * 1976-10-14 1978-05-12 Hitachi Ltd Dispositif de commande de deviation d'un faisceau d'electrons
US20070054063A1 (en) * 2001-07-11 2007-03-08 Carl-Zeiss-Stiftung Vapor deposition system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3390222A (en) * 1965-08-17 1968-06-25 Air Reduction Electron beam apparatus with variable orientation of transverse deflecting field
US3393370A (en) * 1965-08-04 1968-07-16 Gen Electric Multi-geometric pattern electric generator
US3491236A (en) * 1967-09-28 1970-01-20 Gen Electric Electron beam fabrication of microelectronic circuit patterns
US3543286A (en) * 1969-04-25 1970-11-24 Atomic Energy Commission Multi-geometric pattern electric generator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3393370A (en) * 1965-08-04 1968-07-16 Gen Electric Multi-geometric pattern electric generator
US3390222A (en) * 1965-08-17 1968-06-25 Air Reduction Electron beam apparatus with variable orientation of transverse deflecting field
US3491236A (en) * 1967-09-28 1970-01-20 Gen Electric Electron beam fabrication of microelectronic circuit patterns
US3543286A (en) * 1969-04-25 1970-11-24 Atomic Energy Commission Multi-geometric pattern electric generator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2368141A1 (fr) * 1976-10-14 1978-05-12 Hitachi Ltd Dispositif de commande de deviation d'un faisceau d'electrons
US20070054063A1 (en) * 2001-07-11 2007-03-08 Carl-Zeiss-Stiftung Vapor deposition system
US7544399B2 (en) * 2001-07-11 2009-06-09 Carl Zeiss Vision Gmbh Method for vapor depositing a material utilizing an electron beam

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Publication number Publication date
FR2075018A5 (de) 1971-10-08
DE1963454C3 (de) 1973-12-06
DE1963454A1 (de) 1971-09-16
GB1337130A (en) 1973-11-14
DE1963454B2 (de) 1973-05-03

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