GB1337130A - Deflection of radiant beams - Google Patents

Deflection of radiant beams

Info

Publication number
GB1337130A
GB1337130A GB5980270A GB5980270A GB1337130A GB 1337130 A GB1337130 A GB 1337130A GB 5980270 A GB5980270 A GB 5980270A GB 5980270 A GB5980270 A GB 5980270A GB 1337130 A GB1337130 A GB 1337130A
Authority
GB
United Kingdom
Prior art keywords
circuit
generator
waves
amplifier
ramp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5980270A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universitaet Stuttgart
Original Assignee
Universitaet Stuttgart
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universitaet Stuttgart filed Critical Universitaet Stuttgart
Publication of GB1337130A publication Critical patent/GB1337130A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Amplifiers (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1337130 Transistor oscillators UNIVERSITAT STUTTGART 16 Dec 1970 [18 Dec 1969] 59802/70 Heading H3T [Also in Division G4] Apparatus for controllably deflecting a beam of charged particles comprises a circuit which includes a generator of sine and cosine waves, Fig. 2, and a generator of triangular and rectangular waves, Fig. 3. The generator in Fig. 2 comprises two integrators including amplifiers 30, 31 and inverting amplifier 32, the output of amplifier 31 being fed back to the input of 32 to cause the circuit to oscillate and provide sine waves at 3 and cosine waves at 4. In order to start the oscillations, an RC circuit 51, 52 and transistor 53 act to close a relay 54 for a short time after switching on thereby charging the feedback capacitor of amplifier 30. The circuit of Fig. 3 includes a ramp generator 60 in which a constant voltage is integrated and when a certain level of the ramp is reached transistors 67, 68 in a switching circuit 62 reverse states. The pulses so formed are shaped at 63, 64 and amplified at 65 and the output which consists of alternate positive and negative pulses fed back to the ramp generator 60. A triangular wave is available at 66 and a square wave at 69.
GB5980270A 1969-12-18 1970-12-16 Deflection of radiant beams Expired GB1337130A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1963454A DE1963454C3 (en) 1969-12-18 1969-12-18 Generator for the control of deflection devices in the electron beam

Publications (1)

Publication Number Publication Date
GB1337130A true GB1337130A (en) 1973-11-14

Family

ID=5754251

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5980270A Expired GB1337130A (en) 1969-12-18 1970-12-16 Deflection of radiant beams

Country Status (4)

Country Link
US (1) US3674977A (en)
DE (1) DE1963454C3 (en)
FR (1) FR2075018A5 (en)
GB (1) GB1337130A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347776A (en) * 1976-10-14 1978-04-28 Nippon Telegr & Teleph Corp <Ntt> Control system of charged particle beam deflection
EP1275750B1 (en) * 2001-07-11 2009-07-01 Carl Zeiss Vision GmbH Vapor deposition apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3393370A (en) * 1965-08-04 1968-07-16 Gen Electric Multi-geometric pattern electric generator
US3390222A (en) * 1965-08-17 1968-06-25 Air Reduction Electron beam apparatus with variable orientation of transverse deflecting field
US3491236A (en) * 1967-09-28 1970-01-20 Gen Electric Electron beam fabrication of microelectronic circuit patterns
US3543286A (en) * 1969-04-25 1970-11-24 Atomic Energy Commission Multi-geometric pattern electric generator

Also Published As

Publication number Publication date
FR2075018A5 (en) 1971-10-08
DE1963454C3 (en) 1973-12-06
DE1963454A1 (en) 1971-09-16
US3674977A (en) 1972-07-04
DE1963454B2 (en) 1973-05-03

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee