FR2075018A5 - - Google Patents

Info

Publication number
FR2075018A5
FR2075018A5 FR7045126A FR7045126A FR2075018A5 FR 2075018 A5 FR2075018 A5 FR 2075018A5 FR 7045126 A FR7045126 A FR 7045126A FR 7045126 A FR7045126 A FR 7045126A FR 2075018 A5 FR2075018 A5 FR 2075018A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7045126A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universitaet Stuttgart
Original Assignee
Universitaet Stuttgart
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universitaet Stuttgart filed Critical Universitaet Stuttgart
Application granted granted Critical
Publication of FR2075018A5 publication Critical patent/FR2075018A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Amplifiers (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7045126A 1969-12-18 1970-12-15 Expired FR2075018A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1963454A DE1963454C3 (de) 1969-12-18 1969-12-18 Generator für die Ansteuerung von Ablenkvorrichtungen in Elektronenstrahl geraten

Publications (1)

Publication Number Publication Date
FR2075018A5 true FR2075018A5 (de) 1971-10-08

Family

ID=5754251

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7045126A Expired FR2075018A5 (de) 1969-12-18 1970-12-15

Country Status (4)

Country Link
US (1) US3674977A (de)
DE (1) DE1963454C3 (de)
FR (1) FR2075018A5 (de)
GB (1) GB1337130A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347776A (en) * 1976-10-14 1978-04-28 Nippon Telegr & Teleph Corp <Ntt> Control system of charged particle beam deflection
EP1275750B1 (de) * 2001-07-11 2009-07-01 Carl Zeiss Vision GmbH Bedampfungsanlage

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3393370A (en) * 1965-08-04 1968-07-16 Gen Electric Multi-geometric pattern electric generator
US3390222A (en) * 1965-08-17 1968-06-25 Air Reduction Electron beam apparatus with variable orientation of transverse deflecting field
US3491236A (en) * 1967-09-28 1970-01-20 Gen Electric Electron beam fabrication of microelectronic circuit patterns
US3543286A (en) * 1969-04-25 1970-11-24 Atomic Energy Commission Multi-geometric pattern electric generator

Also Published As

Publication number Publication date
DE1963454C3 (de) 1973-12-06
DE1963454A1 (de) 1971-09-16
US3674977A (en) 1972-07-04
GB1337130A (en) 1973-11-14
DE1963454B2 (de) 1973-05-03

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Legal Events

Date Code Title Description
ST Notification of lapse