US3601569A - Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod - Google Patents
Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rodInfo
- Publication number
- US3601569A US3601569A US864360A US3601569DA US3601569A US 3601569 A US3601569 A US 3601569A US 864360 A US864360 A US 864360A US 3601569D A US3601569D A US 3601569DA US 3601569 A US3601569 A US 3601569A
- Authority
- US
- United States
- Prior art keywords
- flat
- hollow member
- coil
- wound
- wound coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004857 zone melting Methods 0.000 title claims abstract 6
- 239000004065 semiconductor Substances 0.000 title 1
- 238000010438 heat treatment Methods 0.000 claims abstract 7
- 230000004323 axial length Effects 0.000 claims abstract 5
- 239000004020 conductor Substances 0.000 claims abstract 5
- 230000006698 induction Effects 0.000 claims abstract 5
- 230000008878 coupling Effects 0.000 claims abstract 4
- 238000010168 coupling process Methods 0.000 claims abstract 4
- 238000005859 coupling reaction Methods 0.000 claims abstract 4
- 238000004804 winding Methods 0.000 claims 5
- 239000011796 hollow space material Substances 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 239000002826 coolant Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- General Induction Heating (AREA)
- Furnace Details (AREA)
Abstract
Device for floating-zone melting a crystalline rod includes a flat-wound induction heating coil adapted to encircle a crystalline rod so as to maintain a molten zone therein, and a slotted hollow member of electrically conductive material disposed coaxially to the flat-wound coil in close coupling therewith, the hollow member having an axial length many times greater than that of the flat-wound coil.
Claims (9)
1. In a device for floating-zone melting a crystalline rod, a flat-wound induction heating coil adapted to encircle a crystalline rod so as to maintain a molten zone therein, and a slotted hollow member of electrically conductive material disposed coaxially to said flat-wound coil, said flat-wound coil having an outer edge directly connected to said hollow member, said hollow member having an axial length considerably greater than that of said flat-wound coil.
2. Device according to claim 1 wherein said flat-wound coil is located substantially at the axial center of said hollow member.
3. Device according to claim 1 wherein said hollow member has a substantially cylindrical shape.
4. Device according to claim 1 wherein said hollow member is frustoconical and flares outwardly from said flat-wound coil in the axial direction thereof.
5. In a device for floating-zone melting a crystalline rod, a flat-wound induction heating coil adapted to encircle a crystalline rod so as to maintain a molten zone therein, and a slotted hollow member of electrically conductive material disposed coaxially to said flat-wound coil in close coupling therewith, said hollow member having an axial length considerably greater than that of said flat-wound coil and comprising a pair of frustoconical portions respectively flaring outwardly from opposite sides of said flat-wound coil.
6. Device according to claim 1 wherein said heating coil is formed with a single flat winding having a width in the radial direction of said coil that is greater than the thicknesses of said winding at the inner and outer peripheries thereof.
7. In a device for floating-zone melting a crystalline rod, a flat-wound induction heating coil adapted to encircle a crystalline rod so as to maintain a molten zone therein, and a slotted hollow member of electrically conductive material disposed coaxially to said flat-wound coil in close coupling therewith, said hollow member having an axial length considerably greater than that of said flat-wound coil, said heating coil being formed with a single flat winding having a width in the radial direction of said coil that is greater than the thicknesses of said winding at the inner and outer peripheries thereof, the thickness of said winding at said outer periphery thereof being greater than at said inner periphery thereof.
8. In a device for floating-zone melting a crystalline rod, a flat-wound induction heating coil adapted to encircle a crystalline rod so as to maintain a molten zone therein, and a slotted hollow member of electrically conductive material disposed coaxially to said flat-wound coil in close coupling therewith, said hollow member having an axial length considerably greater than that of said flat-wound coil, said flat-wound coil and said hollow member forming an integral double-walled structure having a hollow space between the respective double walls thereof, and including circulating means communicating with said hollow space for circulating cooling medium therethrough.
9. Device according to claim 1 wherein the flat-wound coil and the hollow member are formed of an electrically conductive metal selected from the group consisting of copper and silver.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19681802524 DE1802524B1 (en) | 1968-10-11 | 1968-10-11 | Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US3601569A true US3601569A (en) | 1971-08-24 |
Family
ID=5710285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US864360A Expired - Lifetime US3601569A (en) | 1968-10-11 | 1969-10-07 | Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3601569A (en) |
| JP (1) | JPS4817561B1 (en) |
| AT (1) | AT299129B (en) |
| CH (1) | CH520524A (en) |
| DE (1) | DE1802524B1 (en) |
| FR (1) | FR2020390A1 (en) |
| GB (1) | GB1240074A (en) |
| NL (1) | NL6913795A (en) |
| SE (1) | SE360277B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3898413A (en) * | 1973-06-18 | 1975-08-05 | Siemens Ag | Induction heat coil arrangement |
| US4761528A (en) * | 1986-06-03 | 1988-08-02 | Commissariat A L'energie Atomique | High frequency induction melting furnace |
| US4851628A (en) * | 1988-02-18 | 1989-07-25 | Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh | Method for the crucible-free floating zone pulling of semiconductor rods and an induction heating coil therefor |
| US4942279A (en) * | 1987-05-25 | 1990-07-17 | Shin-Etsu Handotai Co., Ltd. | RF induction heating apparatus for floating-zone melting |
| EP1968355A1 (en) * | 2007-03-08 | 2008-09-10 | HÜTTINGER Elektronik GmbH + Co. KG | Induction coil and device for inductive heating of workpieces |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3625669A1 (en) * | 1986-07-29 | 1988-02-04 | Siemens Ag | INDUCTION HEATER FOR POT-FREE ZONE MELTING |
| GB2478275A (en) * | 2010-02-24 | 2011-09-07 | Tubefuse Applic V O F | Induction heating apparatus and method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2408229A (en) * | 1943-04-30 | 1946-09-24 | Rca Corp | Electrical heating apparatus |
| US2459971A (en) * | 1945-08-30 | 1949-01-25 | Induction Heating Corp | Inductor for high-frequency induction heating apparatus |
| US2814707A (en) * | 1954-11-12 | 1957-11-26 | Rca Corp | Induction heating device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1152269B (en) * | 1959-04-28 | 1963-08-01 | Siemens Ag | Device for crucible-free zone melting of a semiconductor rod in a vacuum chamber |
| NL302045A (en) * | 1963-01-08 | |||
| DE1188043B (en) * | 1962-12-24 | 1965-03-04 | Siemens Ag | Device for crucible-free zone melting of semiconductor material |
-
1968
- 1968-10-11 DE DE19681802524 patent/DE1802524B1/en not_active Withdrawn
-
1969
- 1969-09-10 NL NL6913795A patent/NL6913795A/xx unknown
- 1969-09-18 JP JP44074331A patent/JPS4817561B1/ja active Pending
- 1969-10-06 SE SE13720/69A patent/SE360277B/xx unknown
- 1969-10-07 US US864360A patent/US3601569A/en not_active Expired - Lifetime
- 1969-10-08 FR FR6934448A patent/FR2020390A1/fr not_active Withdrawn
- 1969-10-09 AT AT951569A patent/AT299129B/en not_active IP Right Cessation
- 1969-10-09 CH CH1514969A patent/CH520524A/en not_active IP Right Cessation
- 1969-10-10 GB GB49860/69A patent/GB1240074A/en not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2408229A (en) * | 1943-04-30 | 1946-09-24 | Rca Corp | Electrical heating apparatus |
| US2459971A (en) * | 1945-08-30 | 1949-01-25 | Induction Heating Corp | Inductor for high-frequency induction heating apparatus |
| US2814707A (en) * | 1954-11-12 | 1957-11-26 | Rca Corp | Induction heating device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3898413A (en) * | 1973-06-18 | 1975-08-05 | Siemens Ag | Induction heat coil arrangement |
| US4761528A (en) * | 1986-06-03 | 1988-08-02 | Commissariat A L'energie Atomique | High frequency induction melting furnace |
| US4942279A (en) * | 1987-05-25 | 1990-07-17 | Shin-Etsu Handotai Co., Ltd. | RF induction heating apparatus for floating-zone melting |
| US4851628A (en) * | 1988-02-18 | 1989-07-25 | Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh | Method for the crucible-free floating zone pulling of semiconductor rods and an induction heating coil therefor |
| EP1968355A1 (en) * | 2007-03-08 | 2008-09-10 | HÜTTINGER Elektronik GmbH + Co. KG | Induction coil and device for inductive heating of workpieces |
Also Published As
| Publication number | Publication date |
|---|---|
| SE360277B (en) | 1973-09-24 |
| FR2020390A1 (en) | 1970-07-10 |
| GB1240074A (en) | 1971-07-21 |
| DE1802524B1 (en) | 1970-06-04 |
| AT299129B (en) | 1972-06-12 |
| CH520524A (en) | 1972-03-31 |
| JPS4817561B1 (en) | 1973-05-30 |
| NL6913795A (en) | 1970-04-14 |
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