US2266082A - Electron microscope - Google Patents

Electron microscope Download PDF

Info

Publication number
US2266082A
US2266082A US271420A US27142039A US2266082A US 2266082 A US2266082 A US 2266082A US 271420 A US271420 A US 271420A US 27142039 A US27142039 A US 27142039A US 2266082 A US2266082 A US 2266082A
Authority
US
United States
Prior art keywords
electron
vessel
chamber
electron microscope
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US271420A
Other languages
English (en)
Inventor
Ruska Ernst
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Original Assignee
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH filed Critical Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Application granted granted Critical
Publication of US2266082A publication Critical patent/US2266082A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Definitions

  • This invention relates to a method of investigating chemical reactions by means of a microscope.
  • An object of the present invention is to provide means for making observations of the aforementioned kind, i. e. for effecting chemical reactions of substances within an electron microscope be foreand/or while producing a magnified image of the substancesby subjecting a beam of electron rays modified by the reacting substances to the action of electron-optical lenses and observing or photographically fixing the image.
  • the single figure shows a vertical sectional View of the sluicing device of an electron microscope.
  • the electron ray passes through the sluicing device in the directionas indicated by the arrow 1.
  • 2 denotes the pole shoes of a magnetic lens (objective lens)
  • the sluicing device consists of a rotatable sluicing plug 3 having aconical shape and fitting into a correspondingly shaped bore of the stationary part 4. of the electron microscope. In the plug.
  • the object cartridge 5 which is provided at its lower end with an interchangeable object carrier 6.
  • the aperture of this carrier 6 is covered by a foil 28 which is provided .with the substance or object proper to be tested.
  • Themicroscope according to the invention is;
  • a chamber 1 in which vapors may be developed from a liquid reagentby the application of heat.
  • the lower part of the chamber is provided with a suitable lining 8 consisting, for instance, of a ceramic material.
  • 9 is a supply conduit of glass. It! is a cock and H a con-' tainer for the liquid reagent. By opening the cock ID, the liquid reagent may be supplied to the lower part 8 of the chamber 1.
  • an electric heating coil I2 is provided and supplied with current by the conductors 13.
  • the conductors l3 extend outwardly through a pressure-tight stuffing box 2!).
  • Solid reagents may be introduced into the vacuum chamber according to the invention by providing in the upper portion of the object cartridge 5 an annular channel l5 which is closed by a screen It, for instance, by a platinum netting.
  • l1 denotes a filling hole provided in the upper end of the cartridge and through which solid reagents may be introduced into the chamber l5. Also in this case an electric heating coil I8 is provided in order to develop, after the cartridge has been inserted, chemical reagents by the application of heat when the electron microscope is in operation. l9 denotes th leads for supplying current to the heating coil, and 20 is the stufiing box for the leads.
  • , 22 are provided in the sluicing plug 3.
  • is connected by means of a cock 23 and a flexible conduit 24 to a gas container 25, whereas the conduit 22 is connected by means of a flexible conduit 26 to a pump '21.
  • the reagents flow along the surface of the object to be tested. If the contain ers for the reagents are connected to a vessel under variable pressure, it is possible to vary the speed withrwhich the reagents issue from the supply containers and therefore the reaction velocity.
  • the wall material of the chambers and channels mustbe adapted to the chemical nature of the reagents. In many cases glass will be sufficient.
  • the operation of the vacuum pump 21 sufiices in many cases to cause the reagents to flow to the object to be tested at a given moment and at the desired speed. It is, therefore, favorable to arrange the opening of the exhaust conduit 22 in the immediate neighborhood of the object.
  • such capillaries in which a liquid reagent is preferably supplied to the object. extend to the outer surface of the vacuum wall in order to come into contact with the outside atmosphere so that the liquid columns of the capillaries separate the vacuum. from the outside atmosphere.
  • an adjustable intermediate pressure may be maintained within the reaction chambers.
  • the object carrier foil 28 mayeither be provided with a thermo-couple or microscopically small bodies in the form of Seeger cones and melting at predetermined temperatures may be arranged on the object carrier 6 so as to measure the temperature of the foil. Finely divided wood, metal, tin or the like may, for instance, be employed for this purpose.
  • An electron microscope comprising, in combination, an hermetically-closed vessel, means in said vessel for producing-a beamof electron rays, a sluicing devicefor introducing an object into said vessel, an electron-optical lens system for ef fecting-a magnified imageof said object, means for-continuously evacuating said vessel, ,and means for supplying a reactive 'fiuidfrom the outside of said vessel to said sluicing deviceto effect a chemical reaction with said'object during the operation of said lens system, said supply means comprising an outside container for-liquid and a capillary conduit connecting said container with the interior of said sluicing device being capable of holding a liquid column sufficient to seal-the interior of said evacuatedvessel, said fluid supply means and said evacuating means being arranged to communicate with said sluicing device at substantially opposite sides of the object so as to cause the reactive fluid to meet the object when passing from said supply means to said evacuating means.
  • said sluicing device having a stationary body and movable sluice member associated with said body for opening and closing the device, said "sta' tionary body having a chamber communicating with said vessel and disposed for receiving re-' active substance, a supply conduit disposed insaid body, said conduit opening into said cha n ber and extending outside of said vacuum vessel for supplying reactive substance to said chamber, and heating means associatedwith said'body forevaporating said substance in said chamber, whereby a chemical reaction is effected atfsaid' obiect while producing said magnified imag'eI 4.
  • An electronic microscope comprising avacg uum vessel, a source of electron rays in saidfvs sel, a sluicing device for inserting an object to'b'e examined into said. vessel while maintaining -said vessel evacuated, an object holder in said's'luicing device for holding the object in the path of said electron rays, electron-optical lens means for producing a magnified image of said object, means for supplying a chemically reactive substance to said object while producing said image,
  • a said supply means being associated with said sluicing device and arranged between said source of electron rays and said object, heating means associated with said sluicing device, and exhaust means for continuously evacuating said vessel during the operation of said lens means and said simply means, said exhaust meanshaving an ex.- haust duct opening into said sluicing device, L
  • a sluicing device for electron-opticalmicroiscopes comprising a stationary body having .an axial bore for the passage of an electron beam and a transversal bore, .a .revolvable cock body arranged insaid transversal bore and having. a sluice chamber extending in the direction of said axial bore when in proper position, a removable, object holder in said chamber, means for supply.- ing chemically reactive substance to the. object, saidsupply means having a duct in one of said bodies connecting said chamber with the outside,, and evacuating means comprising a suction duct, in said cock body opening into said chamber and.
  • a device for electron-optically observing chemical reactions by means of electron rays in an electron-optical microscope comprising in combination a stationary body having an axial bore forming a passage for said rays, a movable sluicing member associated with said body and having a sluice chamber forming when in proper position an intermediate section of said bore,
  • said stationary body forming a receptacle for the reception of another substance, said receptacle being arranged concentrically to said passage and in open communication with said axial bore, conduit means in said stationary body for supplying said other substance to said receptacle, and an exhaust conduit opening into said axial bore whereby said other substance is caused to contact said first substance when passing from said receptacle to said exhaust conduit.
  • an electron microscope having a vacuum vessel which comprises a vessel portion enclosing th electron beam to be passed through the object to be studied, a second vessel portion for causing the beam modified by the object to produce a magnified image, and a third vessel portion disposed intermediate said first and second vessel portions, said third vessel portion forming a sluicing device and comprising a sluice chamber,,a removable apertured object cartridge in said chamber, means for selectively connecting said sluice chamber either with the interior of said first and second vessel portions for passing said electron beam through the aperture of said object cartridge or with the outside atmosphere for inserting and removing said cartridge, means disposed outside of the microscope for controlling the gas and pressure conditions in said chamber, and fluid-conduit means opening directly into said sluice chamber and connecting it with said outside means.
  • an electron microscope having a vacuum vessel which comprises a vessel portion enclosing the electron to be passed through the object to be studied, a second vessel portion for causing the beam modified by the object to produce a magnified image, and a third vessel portion disposed intermediate said first and second vessel portions, said third vessel portion forming a sluicing device and comprising a sluice chamber, a removable apertured object cartridge in said chamber, means for selectively connecting said sluice chamber either with the interior of said first and second vessel portions for passing said electron beam through the aperture of said object cartridge or with the outside atmosphere for inserting and removing said cartridge, evacuating means, and conduit means communicating directly with said sluice chamber and connecting it with said evacuating means.
  • an electron microscope having a vacuum vessel which comprises a vessel portion enclosing the electron beam to be passed through the object to be studied, a second vessel portion for causing the beam modified by the object to produce a magnified image, and a third vessel portion disposed intermediate said first and second vessel portions, said third vessel portion forming a sluicing device and comprising a sluice chamber, and means for selectively connecting said sluice chamber either with the interior of said first and second vessel portions for passing said electron beam through the aperture of said object cartridge or with the outside atmosphere for inserting and removing said cartridge, an object holder removably arranged in said sluice chamber for holding the object in the path of said beam, a container for reactive substance, and conduit means connecting said container with said sluice device for supplying reactive substance to said sluice chamber during the operation of the microscope.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
US271420A 1938-05-02 1939-05-02 Electron microscope Expired - Lifetime US2266082A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2266082X 1938-05-02

Publications (1)

Publication Number Publication Date
US2266082A true US2266082A (en) 1941-12-16

Family

ID=7993005

Family Applications (1)

Application Number Title Priority Date Filing Date
US271420A Expired - Lifetime US2266082A (en) 1938-05-02 1939-05-02 Electron microscope

Country Status (2)

Country Link
US (1) US2266082A (en))
BE (1) BE434135A (en))

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2753458A (en) * 1954-04-12 1956-07-03 Kazato Kenji Electron microscope
US2849619A (en) * 1948-10-01 1958-08-26 Siemens Ag Electron microscope having a multiplespecimen carrier
US3151241A (en) * 1961-02-07 1964-09-29 Siemens Ag Heatable specimen carrier for electron radiation apparatus
US3171958A (en) * 1962-03-30 1965-03-02 Rca Corp Heated specimen holder for the electron microscope
US3257554A (en) * 1962-08-28 1966-06-21 Ass Elect Ind Electron microscope specimen holder having means for heating the specimen
US20080179518A1 (en) * 2004-09-13 2008-07-31 Jan Fredrik Creemer Microreactor for a Transmission Electron Microscope and Heating Element and Method of Manufacture Thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2849619A (en) * 1948-10-01 1958-08-26 Siemens Ag Electron microscope having a multiplespecimen carrier
US2753458A (en) * 1954-04-12 1956-07-03 Kazato Kenji Electron microscope
US3151241A (en) * 1961-02-07 1964-09-29 Siemens Ag Heatable specimen carrier for electron radiation apparatus
US3171958A (en) * 1962-03-30 1965-03-02 Rca Corp Heated specimen holder for the electron microscope
US3257554A (en) * 1962-08-28 1966-06-21 Ass Elect Ind Electron microscope specimen holder having means for heating the specimen
US20080179518A1 (en) * 2004-09-13 2008-07-31 Jan Fredrik Creemer Microreactor for a Transmission Electron Microscope and Heating Element and Method of Manufacture Thereof
US9548184B2 (en) * 2004-09-13 2017-01-17 Technische Universiteit Delft Microreactor for a transmission electron microscope and heating element and method of manufacture thereof

Also Published As

Publication number Publication date
BE434135A (en))

Similar Documents

Publication Publication Date Title
US9679741B2 (en) Environmental cell for charged particle beam system
JP5634030B2 (ja) 粒子光学装置用環境セル
US9658246B2 (en) Method of studying a sample in an ETEM
KR101840232B1 (ko) 주사 전자 현미경 및 화상 생성 방법
WO2013051357A1 (ja) 検査又は観察装置及び試料の検査又は観察方法
US2266082A (en) Electron microscope
GB576003A (en) Improvements in and relating to electron microscopes
WO2014041882A1 (ja) 荷電粒子線装置及び試料観察方法
JP6522133B2 (ja) 観察支援ユニットおよびこれを用いた試料観察方法、荷電粒子線装置
CN105612597A (zh) 带电粒子束装置以及带电粒子束装置用样本保持装置
US2264210A (en) Means for mounting objects in electron microscopes
US2543825A (en) X-ray diffraction apparatus
US3124680A (en) Agent
US3418513A (en) Mass spectrometer ion source with cooling means
CN113287002B (zh) 单晶x射线结构解析装置以及试样保持架
US11668720B2 (en) Method of preparing a biological sample for study in a charged particle device
JP6916074B2 (ja) 電子放出管、電子照射装置及び電子放出管の製造方法
US2618750A (en) Apparatus for supplying charge material to mass spectrometers
US3505521A (en) Electron emission microscope object manipulator
US3446960A (en) Device for measuring electron-beam intensities and for subjecting materials to electron irradiation in an electron microscope
US3135855A (en) Electron beam heating devices
US3418465A (en) Radiation source for reducing specimen contamination in electron microscopes
JP2014072110A (ja) 荷電粒子線装置
JP7407689B2 (ja) 試料ホルダ及びそれを備える荷電粒子線装置
US2420561A (en) Electron microscope structure