US2128581A - Fine beam electron gun - Google Patents

Fine beam electron gun Download PDF

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Publication number
US2128581A
US2128581A US80338A US8033836A US2128581A US 2128581 A US2128581 A US 2128581A US 80338 A US80338 A US 80338A US 8033836 A US8033836 A US 8033836A US 2128581 A US2128581 A US 2128581A
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United States
Prior art keywords
anode
electrons
aperture
diaphragm
electron gun
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US80338A
Inventor
Bernard C Gardner
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Farnsworth Television Inc
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Farnsworth Television Inc
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Filing date
Publication date
Application filed by Farnsworth Television Inc filed Critical Farnsworth Television Inc
Priority to US80338A priority Critical patent/US2128581A/en
Priority to GB12385/37A priority patent/GB477874A/en
Priority to FR821969D priority patent/FR821969A/en
Application granted granted Critical
Publication of US2128581A publication Critical patent/US2128581A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/31Electron-beam or ion-beam tubes for localised treatment of objects for cutting or drilling

Definitions

  • This invention relates to a method and appa-- ratus'ior the production of electron beams o very small cross secronarea. and particularly to -an inherently accurate method whereby the electron beams produced maybe made 'as small as 4 desired. n
  • Prment methods of producingr a restricted elec'- tron beamA employe diaphragmvprovidedwith an apertureof asze'suicient to pass. the desired beam. Th'e apertures are drilled. in the diaphragm but it is found that the aperture so formed is frequently imperfect. Slight imperfections in the apertures have more pronounced effeci: in small beams than in large. It is also true th'at'assmailer beams are required proper alinement o the parts o apparatus become practically impossible, and-the difhculty of constr'mxting-apu paratus by presenty methods for very small beam. production is prohibitive from a practical standpoint.
  • a further object of my invention is to provide a new and novel method of constructing an electron beam producing apparatus.
  • Another object of my invention is to provide improved apparatus for the production of electron beams o very small cross section and of high quality.
  • the single ligure illustrates a cathode ray tube con.- structed in accordance vwith the principles oi my invention Y
  • the drawing illustrates a tube I provided with a. fluorescent screen' 2 upon which an electron beam is projected by an electron gun or the like.
  • Such guns- are well known in the art and may comprise a. cathode 3. an anode d, and a gridvB.
  • the cathode may in turn comprise a lm 6 of an electron emitting substance. such as anoxide of barium or strontium.
  • a cup l' carried on the concave surface of a cup l', which cup is ln turn positioned ln heat-receiving relation to a filament B.
  • Any suitable source of current may be provided for energizing filament 8,' which. when heated, frees electrons from the emitting substance.
  • the anode i may be o the well known beam canal type, providing entry port as at 2.
  • ptli-l A sitioned to receive electrons from the concave surface. of cup l. to the hollow cylindrical canal ill.
  • a diaphragm H is secured over the exit end of the 'anode and serves todeflne the cross sectional area oi -afbean'iv .passing therethrough toward the screen! ⁇
  • the grid 5 ⁇ may be ringsh-aped'and s mounted with itsaxis-ias.nearlyas possible in coincidence -with the axis 'of the anode andln line with the cathode.:
  • electrons freed iron the emitter S
  • the grid 5 may be maintained at a. slightly negative potential with respect to the cathode and serves to direct the electrons toward port 9 of the anode.
  • the eld through which the electrons pass into the canal of the cylindrical anode tends to focus the electron beam at the azls o the diaphragm end o1' the anode. the electrons passing through the canal in. straight. slightly converging lines along the axis o the cylinder.
  • the aperture i2 of the diaphragm should have its center at the focal center of the beam -so that the most effective portion o the bearn may be milked, the portions of the diaphragm surrounding the aperture serving to catch the fringe electrons d' the beam, and permitting only e sharply defined beam to pass ⁇ oe3'o1'ui'the diaphragm.
  • the beam. 3o. 'so produced' may be utilized to produce a curve.
  • the aperture i2 has been drilled orl otherwise etected in the diaphragm prior to fixing the cathode. anode, and grid 'in operative relation in the tube.
  • the result has been that accurate alinement of the aperture with the cen. trai axis of the electron beam required considerable adjustment and precision in assembly, and even so, an absolute alinement was most often impossible. very slight misallnernent may resuit in the beam being partially, if not entirely. directed upon the diaphragm rather than through its aperture.
  • the aperture l2 l5 formed in the diaphragm il after, not before, the cathode and anode are placed in assembled relation.
  • a thin metallic diaphragm il, of some such material as molybdenum or nickel. having no aperture thereln is welded or otherwise fastened over the exit end of the beam canal l0.
  • the assembled tube ls then evacuated.
  • the cathode is then heated and a. voltage applied to the anode i with the 2 f ,amaai result that s, beam o! electrons is on the diaphragm i! at the spot at whim an aperture should be mede.
  • the roiage on the anode is increased, the spot by the electrons is correspondingly heated and, with suiiicient. heatingA of this character. the eiaphragm is punctured. Since the maximum heating occurs at the point. of greatest electron carb' eentra'tlon. the resuitant vpuncture is propery located, and, if the .anode voltage is reduced mmedately after the puncture occurs, the apemu'e remains smai.
  • the sue of the aperture may be increased as desired by simply continuing the process so as to further melt the edges of the aperture until an aperture of the desired size is produced.
  • the Yotages used to puncture the diaphragm are large compared to, normal operating voltages.
  • Forming the diaphragmpaperture in this manner insures precision in aiinernent with' comparatively iittie e'ortand it 'also permits lha making oi ⁇ very minute apertures, for itis evident that the rst passage of electrons. through the diaphragm during the piercingstepoecm's at the-,centerof 'the beam.
  • the fact of the pas ⁇ sage is immediateb' evident on the .screen ⁇ and vthe size of the-spot on the screen serves 's an. indication of the size of the aperture.
  • While-.I have disclosed my invention in oo ncomprises forming said anode without an aperture therein, focusing a beam o' electrons on l. predetermined spot on said anode, acceierating said electrons until ⁇ the anode is' pierced at the area of electron impact, and thereafter projecting electrons through said aperture and utilizing l said latter electrons.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Particle Accelerators (AREA)

Description

rag. EQ, 35333 Bernard c. Genauer, rhnmerphia, ra.; :serena to Farnsworth Television incorporated. San
Francisco, Calif., a corporation of California application may is, 193s. ser-nx No. 30,33: 2 Gianna (C1. 25o-21.5)
This invention relates to a method and appa-- ratus'ior the production of electron beams o very small cross secronarea. and particularly to -an inherently accurate method whereby the electron beams produced maybe made 'as small as 4 desired. n
Prment methods of producingr a restricted elec'- tron beamA employe diaphragmvprovidedwith an apertureof asze'suicient to pass. the desired beam. Th'e apertures are drilled. in the diaphragm but it is found that the aperture so formed is frequently imperfect. Slight imperfections in the apertures have more pronounced effeci: in small beams than in large. It is also true th'at'assmailer beams are required proper alinement o the parts o apparatus become practically impossible, and-the difhculty of constr'mxting-apu paratus by presenty methods for very small beam. production is prohibitive from a practical standpoint.
It is the principal object of my invention to provide a practical and economical method of producing electron beams of very small cross section. Another object of my invention is to provide an efcientA and electve method ol providing an electron beam diaphragm with an aperture o any desired degree of minuteriess.
A further object of my invention is to provide a new and novel method of constructing an electron beam producing apparatus.
Another object of my invention is to provide improved apparatus for the production of electron beams o very small cross section and of high quality.
Other objects and advantages will-become apparent as the description proceeds in connection with the accompanying ldrawing; in which the single ligure illustrates a cathode ray tube con.- structed in accordance vwith the principles oi my invention Y The drawing illustrates a tube I provided with a. fluorescent screen' 2 upon which an electron beam is projected by an electron gun or the like. Such guns-are well known in the art and may comprise a. cathode 3. an anode d, and a gridvB. The cathode may in turn comprise a lm 6 of an electron emitting substance. such as anoxide of barium or strontium. carried on the concave surface of a cup l', which cup is ln turn positioned ln heat-receiving relation to a filament B. Any suitable source of current may be provided for energizing filament 8,' which. when heated, frees electrons from the emitting substance.
The anode i may be o the well known beam canal type, providing entry port as at 2. ptli-l A sitioned to receive electrons from the concave surface. of cup l. to the hollow cylindrical canal ill. A diaphragm H is secured over the exit end of the 'anode and serves todeflne the cross sectional area oi -afbean'iv .passing therethrough toward the screen!` The grid 5` may be ringsh-aped'and s mounted with itsaxis-ias.nearlyas possible in coincidence -with the axis 'of the anode andln line with the cathode.:
in operation, electrons freed iron: the emitter S, areshot through the anode by applying sufcent voltage between the anode and the cathode, The grid 5 may be maintained at a. slightly negative potential with respect to the cathode and serves to direct the electrons toward port 9 of the anode. The eld through which the electrons pass into the canal of the cylindrical anode tends to focus the electron beam at the azls o the diaphragm end o1' the anode. the electrons passing through the canal in. straight. slightly converging lines along the axis o the cylinder. The aperture i2 of the diaphragm should have its center at the focal center of the beam -so that the most effective portion o the bearn may be milked, the portions of the diaphragm surrounding the aperture serving to catch the fringe electrons d' the beam, and permitting only e sharply defined beam to pass `oe3'o1'ui'the diaphragm. The beam. 3o. 'so produced' may be utilized to produce a curve.
on the screen 2 under control of dellector plates i3 in a well known manner.
Heretofore the aperture i2 has been drilled orl otherwise etected in the diaphragm prior to fixing the cathode. anode, and grid 'in operative relation in the tube. The result has been that accurate alinement of the aperture with the cen. trai axis of the electron beam required considerable adjustment and precision in assembly, and even so, an absolute alinement was most often impossible. very slight misallnernent may resuit in the beam being partially, if not entirely. directed upon the diaphragm rather than through its aperture.
In accordance with my invention. the aperture l2 l5 formed in the diaphragm il after, not before, the cathode and anode are placed in assembled relation. During assembly a thin metallic diaphragm il, of some such material as molybdenum or nickel. having no aperture thereln, is welded or otherwise fastened over the exit end of the beam canal l0. .The assembled tube ls then evacuated. The cathode is then heated and a. voltage applied to the anode i with the 2 f ,amaai result that s, beam o! electrons is on the diaphragm i! at the spot at whim an aperture should be mede. .es the roiage on the anode is increased, the spot by the electrons is correspondingly heated and, with suiiicient. heatingA of this character. the eiaphragm is punctured. Since the maximum heating occurs at the point. of greatest electron carb' eentra'tlon. the resuitant vpuncture is propery located, and, if the .anode voltage is reduced mmedately after the puncture occurs, the apemu'e remains smai. The sue of the aperture may be increased as desired by simply continuing the process so as to further melt the edges of the aperture until an aperture of the desired size is produced.
The Yotages used to puncture the diaphragm are large compared to, normal operating voltages.
Accordingly no change in aperture size oc'curs in normal operation.
Forming the diaphragmpaperture in this manner insures precision in aiinernent with' comparatively iittie e'ortand it 'also permits lha making oi`very minute apertures, for itis evident that the rst passage of electrons. through the diaphragm during the piercingstepoecm's at the-,centerof 'the beam. The fact of the pas` sage is immediateb' evident on the .screen` and vthe size of the-spot on the screen serves 's an. indication of the size of the aperture.
While-.I have disclosed my invention in oo ncomprises forming said anode without an aperture therein, focusing a beam o' electrons on l. predetermined spot on said anode, acceierating said electrons until `the anode is' pierced at the area of electron impact, and thereafter projecting electrons through said aperture and utilizing l said latter electrons.
2. In a cathode ray tube wherein abeam of electrons is projected .through an'apertured anode. the method of forming said apertura which comprises orzning a beam canal 'in -said mode closing one'lenri of said beam directingeiectrons into the open end of said' beam canal; accelerating said electrons to npact the' ciosed'endwith sufcent velocity to reopeniiie beam canal by meltingandY vaporizatori,v and thereafter passing electrons through said opening to obtain an indication.
BERNARD C. GARDNER
US80338A 1936-05-18 1936-05-18 Fine beam electron gun Expired - Lifetime US2128581A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US80338A US2128581A (en) 1936-05-18 1936-05-18 Fine beam electron gun
GB12385/37A GB477874A (en) 1936-05-18 1937-04-30 Improvements in anodes for cathode ray tubes
FR821969D FR821969A (en) 1936-05-18 1937-05-18 Process for producing a diaphragm opening for cathode ray tubes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US80338A US2128581A (en) 1936-05-18 1936-05-18 Fine beam electron gun

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FR (1) FR821969A (en)
GB (1) GB477874A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2529134A (en) * 1947-10-02 1950-11-07 Rauland Corp Support for electron guns
US2741719A (en) * 1950-09-27 1956-04-10 Rauland Corp Method and apparatus for inscribing a pattern in a target electrode structure
US2778926A (en) * 1951-09-08 1957-01-22 Licentia Gmbh Method for welding and soldering by electron bombardment
US2793281A (en) * 1951-01-31 1957-05-21 Zeiss Carl Drilling by electrons
US2844706A (en) * 1953-04-15 1958-07-22 Engelhard Ind Inc Method of producing minute perforations in solid bodies by thermal impact exerted byconcentrated corpuscular rays
US2858199A (en) * 1954-10-15 1958-10-28 Itt Crystal production
US2932720A (en) * 1964-04-15 1960-04-12 Commissariat Energie Atomique Metal welding methods
US3049608A (en) * 1959-08-24 1962-08-14 Air Reduction Electron beam welding
US3183391A (en) * 1960-12-16 1965-05-11 Rca Corp Shielding of electron gun from vaporized getter by decomposable foil over electrode aperture
US5159240A (en) * 1991-12-09 1992-10-27 Chunghwa Picture Tubes, Ltd. Low voltage limiting aperture electron gun
US5182492A (en) * 1992-05-20 1993-01-26 Chunghwa Picture Tubes, Ltd. Electron beam shaping aperture in low voltage, field-free region of electron gun
US5220239A (en) * 1991-12-09 1993-06-15 Chunghwa Picture Tubes, Ltd. High density electron beam generated by low voltage limiting aperture gun
US5223764A (en) * 1991-12-09 1993-06-29 Chunghwa Picture Tubes, Ltd. Electron gun with low voltage limiting aperture main lens

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD225625A1 (en) * 1983-12-20 1985-08-07 Medizin Labortechnik Veb K METHOD FOR PRODUCING A SEPARATOR

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2529134A (en) * 1947-10-02 1950-11-07 Rauland Corp Support for electron guns
US2741719A (en) * 1950-09-27 1956-04-10 Rauland Corp Method and apparatus for inscribing a pattern in a target electrode structure
US2793281A (en) * 1951-01-31 1957-05-21 Zeiss Carl Drilling by electrons
US2793282A (en) * 1951-01-31 1957-05-21 Zeiss Carl Forming spherical bodies by electrons
US2778926A (en) * 1951-09-08 1957-01-22 Licentia Gmbh Method for welding and soldering by electron bombardment
US2844706A (en) * 1953-04-15 1958-07-22 Engelhard Ind Inc Method of producing minute perforations in solid bodies by thermal impact exerted byconcentrated corpuscular rays
US2858199A (en) * 1954-10-15 1958-10-28 Itt Crystal production
US3049608A (en) * 1959-08-24 1962-08-14 Air Reduction Electron beam welding
US3183391A (en) * 1960-12-16 1965-05-11 Rca Corp Shielding of electron gun from vaporized getter by decomposable foil over electrode aperture
US2932720A (en) * 1964-04-15 1960-04-12 Commissariat Energie Atomique Metal welding methods
US5159240A (en) * 1991-12-09 1992-10-27 Chunghwa Picture Tubes, Ltd. Low voltage limiting aperture electron gun
US5220239A (en) * 1991-12-09 1993-06-15 Chunghwa Picture Tubes, Ltd. High density electron beam generated by low voltage limiting aperture gun
US5223764A (en) * 1991-12-09 1993-06-29 Chunghwa Picture Tubes, Ltd. Electron gun with low voltage limiting aperture main lens
US5182492A (en) * 1992-05-20 1993-01-26 Chunghwa Picture Tubes, Ltd. Electron beam shaping aperture in low voltage, field-free region of electron gun

Also Published As

Publication number Publication date
GB477874A (en) 1938-01-07
FR821969A (en) 1937-12-17

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