US20230166368A1 - Base-integrated blade manufacturing method - Google Patents
Base-integrated blade manufacturing method Download PDFInfo
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- US20230166368A1 US20230166368A1 US18/055,508 US202218055508A US2023166368A1 US 20230166368 A1 US20230166368 A1 US 20230166368A1 US 202218055508 A US202218055508 A US 202218055508A US 2023166368 A1 US2023166368 A1 US 2023166368A1
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- base
- cutting blade
- blade
- cutting
- projection
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0683—Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P11/00—Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for
- B23P11/02—Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for by first expanding and then shrinking or vice versa, e.g. by using pressure fluids; by making force fits
- B23P11/025—Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for by first expanding and then shrinking or vice versa, e.g. by using pressure fluids; by making force fits by using heat or cold
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/28—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
- B24D5/12—Cut-off wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
- B24D5/16—Bushings; Mountings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/16—Bushings; Mountings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D65/00—Making tools for sawing machines or sawing devices for use in cutting any kind of material
Definitions
- the present invention relates to a base-integrated blade manufacturing method for manufacturing a base-integrated blade by fixing a cutting blade to a base.
- a plurality of device chips including respective devices are manufactured.
- a sealing material including resin (molding resin) By covering a plurality of device chips mounted on a mounting substrate with a sealing material including resin (molding resin), a package substrate is formed. By dividing this package substrate into individual pieces, a plurality of package devices including respective packaged device chips are manufactured.
- the device chips and the package devices are assembled into various electronic appliances such as mobile phones and personal computers.
- a cutting apparatus is used for dividing a workpiece such as a wafer and a package substrate.
- the cutting apparatus includes a chuck table that holds the workpiece, and a cutting unit that cuts the workpiece.
- the cutting unit incorporates a spindle, and a blade mount that supports an annular cutting blade is fixed to a tip part of the spindle.
- the cutting blade mounted to the blade mount is rotated and caused to cut into the workpiece, and the workpiece is thus cut and divided.
- a hub-type cutting blade hub blade
- a washer-type cutting blade washer-type cutting blade
- the hub blade has a structure in which an annular base and an annular cutting edge formed along an outer circumferential edge of the base are integrated with each other.
- the cutting edge of the hub blade includes electroformed grindstones that contain abrasive grains and a bonding material such as a nickel plating layer for fixing the abrasive grains.
- the washer blade includes only an annular cutting edge that contains abrasive grains and a bonding material including metal, ceramics, resin, or the like for fixing the abrasive grains.
- a suitable cutting blade is selected according to the material of the workpiece, the purpose of processing, and the like and is mounted to the cutting unit.
- the method for mounting the cutting blade to the blade mount varies depending on whether the cutting blade is a hub blade or a washer blade, and the shape, size, and the like of the blade mount also vary depending on the kind of the cutting blade. Therefore, for example, at the time of replacing a hub blade mounted to the cutting unit with a washer blade, a work for replacing a blade mount for the hub blade, which blade mount is fixed to the spindle, with a blade mount for the washer blade is also required. This makes a cutting blade replacing work troublesome.
- the base-integrated blade is manufactured by integrating an annular base and an annular cutting blade, which are individually formed, with each other by use of an adhesive. Specifically, a sufficient amount of adhesive for securely fixing the cutting blade to the base is applied to the whole part of a region of the base that makes contact with the cutting blade. Thereafter, the base and the cutting blade are pasted to each other through the adhesive. However, if a considerable amount of adhesive is applied to the base, at the time of pasting, the adhesive is sandwiched between the base and the cutting blade and spreads, and the adhesive may protrude from the pasted region of the base and the cutting blade. In this case, the adhesive may adhere to an outer circumferential part of the cutting blade and adversely affect the processing, or the appearance of the cutting blade may be worsened, so that the quality of the base-integrated blade may be lowered.
- the present invention has been made in consideration of such problems. It is an object of the present invention to provide a base-integrated blade manufacturing method which enables omission or reduction of an adhesive for integrating the base and the cutting blade with each other.
- a base-integrated blade manufacturing method for manufacturing a base-integrated blade by fixing a cutting blade having a circular opening to a base having an annular projection.
- the method includes a first step of preparing the base having the projection that has an outside diameter greater than a diameter of the opening of the cutting blade, and the cutting blade, a second step of lowering a temperature of the base and thus shrinking the base to have the outside diameter of the projection smaller than the diameter of the opening of the cutting blade, a third step of inserting the projection into the opening of the cutting blade, and a fourth step of raising the temperature of the base and thus expanding the base in such a manner that the cutting blade is fixed to the base.
- a difference between the outside diameter of the projection and the diameter of the opening of the cutting blade is less than 20 ⁇ m.
- the base-integrated blade manufacturing method In the base-integrated blade manufacturing method according to one aspect of the present invention, after the base is shrunk to have the outside diameter of the projection smaller than the diameter of the opening of the cutting blade, the projection is inserted into the opening of the cutting blade, and the base is expanded. As a result, it becomes possible to integrate the base and the cutting blade with each other, without using an adhesive or by using only a trace amount of adhesive. As a result, lowering in quality of the base-integrated blade due to protruding of the adhesive is avoided.
- FIG. 1 is an exploded perspective view depicting a base-integrated blade
- FIG. 2 is a flow chart depicting a base-integrated blade manufacturing method
- FIG. 3 is a sectional view depicting a base and a cutting blade in a first step
- FIG. 4 is a sectional view depicting the base and the cutting blade in a second step
- FIG. 5 is a sectional view depicting the base and the cutting blade in a third step
- FIG. 6 is a sectional view depicting the base and the cutting blade in a fourth step
- FIG. 7 is a perspective view depicting a cutting apparatus
- FIG. 8 is an exploded perspective view depicting a cutting unit.
- FIG. 1 is an exploded perspective view depicting a base-integrated blade 2 .
- the base-integrated blade 2 includes an annular base 4 and an annular cutting blade 6 .
- the base 4 is a disk-shaped member formed of metal such as aluminum and an aluminum alloy and includes a first surface 4 a and a second surface 4 b, which are substantially parallel to each other, and an outer circumferential edge (side surface) 4 c connected to the first surface 4 a.
- the base 4 is provided at a central part thereof with a circular opening 4 d extending from the first surface 4 a to the second surface 4 b while penetrating the base 4 in its thickness direction.
- an annular projection 4 e projecting from the first surface 4 a in the thickness direction of the base 4 is provided on the first surface 4 a side of the base 4 .
- the projection 4 e is formed with a predetermined width along an outline of the opening 4 d and includes an annular outer circumferential surface (side surface) 4 f substantially perpendicular to the first surface 4 a.
- the cutting blade 6 is a disk-shaped member that includes abrasive grains formed of diamond, cubic boron nitride (cBN), or the like and a bonding material (binder) formed of metal, ceramics, resin, or the like for fixing the abrasive grains.
- the material of the abrasive grains, the grain diameter of the abrasive grains, the material of the bonding material, and the like are appropriately selected according to the specifications of the base-integrated blade 2 .
- the cutting blade 6 includes a first surface 6 a and a second surface 6 b which are substantially parallel to each other, and an outer circumferential edge (side surface) 6 c connected to the first surface 6 a and the second surface 6 b.
- the cutting blade 6 is provided at a central part thereof with a circular opening 6 d which extends from the first surface 6 a to the second surface 6 b while penetrating the cutting blade 6 in its thickness direction. Further, the cutting blade 6 includes an annular inner circumferential surface (side surface) 6 e. The inner circumferential surface 6 e is defined by the opening 6 d and is exposed on an inside of the opening 6 d.
- FIG. 2 is a flow chart depicting the base-integrated blade manufacturing method.
- the base-integrated blade manufacturing method according to the present embodiment includes a first step (preparing step) S 1 , a second step (shrinking step) S 2 , a third step (inserting step) S 3 , and a fourth step (expanding step) S 4 .
- FIG. 3 is a sectional view depicting the base 4 and the cutting blade 6 in the first step S 1 .
- ⁇ 1 represents an outside diameter of the projection 4 e of the base 4 (diameter of the outer circumferential surface 4 f ), and ⁇ 2 represents a diameter of the opening 6 d of the cutting blade 6 (inside diameter of the cutting blade 6 , or diameter of the inner circumferential surface 6 e ).
- the base 4 having the projection 4 e having an outside diameter greater than the diameter of the opening 6 d of the cutting blade 6 , and the cutting blade 6 are prepared.
- the base 4 is designed in such a manner as to satisfy ⁇ 1 > ⁇ 2 at a predetermined temperature (hereinafter referred to as a reference temperature; for example, 20° C. or 25° C.) in a range of normal temperature (5° C. to 35° C.)
- a difference between ⁇ 1 and ⁇ 2 in the first step S 1 is set to a value in such a range that ⁇ 1 can be made smaller than ⁇ 2 by cooling of the base 4 .
- the difference between ⁇ 1 and ⁇ 2 in the first step S 1 is set to be less than 20 ⁇ m, preferably less than 10 ⁇ m, or more preferably less than 5 ⁇ m, ⁇ 1 can easily be made smaller than ⁇ 2 in the second step S 2 described later.
- FIG. 4 is a sectional view depicting the base 4 and the cutting blade 6 in the second step S 2 .
- the base 4 is cooled and the temperature of the base 4 is lowered, for example, by storing the base 4 in a refrigerator or a freezer for a predetermined period of time. As a result, the whole part of the base 4 is shrunk, and the outside diameter ⁇ 1 of the projection 4 e is reduced. The base 4 is cooled until the outside diameter ⁇ 1 of the projection 4 e becomes smaller than the diameter ⁇ 2 of the opening 6 d of the cutting blade 6 . Consequently, the projection 4 e can be inserted into the opening 6 d of the cutting blade 6 .
- the method for cooling the base 4 is not limited.
- the base 4 may be placed on a metallic support plate which is cooled, or may be exposed to a cool airflow or cold water.
- the cooling conditions (cooling temperature, cooling period of time, and the like) of the base 4 are set according to the material and size of the base 4 .
- the material of the base 4 is A5052 (refer to the Japanese Industrial Standards; linear expansion coefficient 23.8 ⁇ 10 ⁇ 6 /° C.) which is a kind of an aluminum alloy that contains magnesium (Al-Mg alloy) and where the outside diameter ⁇ 1 of the projection 4 e is 40 mm.
- the outside diameter ⁇ 1 of the projection 4 e can be reduced by approximately 20 ⁇ m. Therefore, if the difference between ⁇ 1 and ⁇ 2 in the first step S 1 is less than 20 ⁇ m, it is possible to insert the projection 4 e into the opening 6 d of the cutting blade 6 .
- FIG. 5 is a sectional view depicting the base 4 and the cutting blade 6 in the third step S 3 .
- the base 4 and the cutting blade 6 are disposed in such a manner that the center of the base 4 and the center of the cutting blade 6 overlap, and the first surface 4 a of the base 4 and the first surface 6 a of the cutting blade 6 are brought into contact with each other. As a result, the projection 4 e of the base 4 is inserted into the opening 6 d of the cutting blade 6 .
- the outside diameter ⁇ 1 of the projection 4 e is smaller than the diameter ⁇ 2 of the opening 6 d of the cutting blade 6 , and a slight gap is present between the outer circumferential surface 4 f of the projection 4 e and the inner circumferential surface 6 e of the cutting blade 6 . Therefore, although the cutting blade 6 makes contact with the base 4 , it is not fixed to the base 4 .
- FIG. 6 is a sectional view depicting the base 4 and the cutting blade 6 in the fourth step S 4 .
- the base 4 and the cutting blade 6 are stored on a support plate set in a room of the reference temperature for a predetermined period of time. This gradually raises the temperature of the base 4 and expands the whole part of the base 4 , and the outside diameter ⁇ 1 of the projection 4 e increases.
- the base 4 is expanded until the outside diameter ⁇ 1 of the projection 4 e reaches the diameter ⁇ 2 of the opening 6 d of the cutting blade 6 , the outer circumferential surface 4 f of the projection 4 e comes into contact with the inner circumferential surface 6 e of the cutting blade 6 , so that the projection 4 e is fixed inside the opening 6 d of the cutting blade 6 .
- the cutting blade 6 is fixed to the base 4 , and the base 4 and the cutting blade 6 are integrated with each other. In this way, the base-integrated blade 2 including the base 4 and the cutting blade 6 is formed.
- the base 4 may be expanded by being subjected to a heat treatment.
- the base 4 and the cutting blade 6 are placed on a heated metallic support plate to heat the base 4 .
- the base 4 may be exposed to a warm airflow or warm water. By such an operation, the temperature rise of the base 4 can be accelerated, and the period of time required for the expansion of the base 4 can be shortened.
- an outside diameter of the cutting blade 6 (diameter of the outer circumferential edge 6 c ) is greater than an outside diameter of the base 4 (diameter of the outer circumferential edge 4 c ).
- the base 4 and the cutting blade 6 are disposed concentrically, and the base 4 and the cutting blade 6 are aligned with each other.
- obtained is a state in which an outer circumferential part of the cutting blade 6 projects toward a radially outer side of the base 4 from the outer circumferential edge 4 c of the base 4 .
- a height (projection amount from the first surface 4 a ) of the projection 4 e is preferably equal to or less than a thickness of the cutting blade 6 .
- the projection 4 e does not project from the second surface 6 b side of the cutting blade 6 .
- a trace amount of adhesive may be applied to the base 4 or the cutting blade 6 .
- a trace amount of adhesive may be applied to a partial region of the first surface 4 a of the base 4 , the partial region being located on the inner side of the outer circumferential edge 4 c.
- an adhesive force of the adhesive also contributes to the fixation of the cutting blade 6 , so that the base 4 and the cutting blade 6 are firmly integrated with each other.
- the amount of adhesive is significantly reduced as compared with the conventional method for integrating the base 4 and the cutting blade 6 with each other by only the action of the adhesive, protruding of the adhesive is not liable to occur.
- the base-integrated blade manufacturing method As described above, in the base-integrated blade manufacturing method according to the present embodiment, after the base 4 is shrunk to have the outside diameter of the projection 4 e smaller than the diameter of the opening 6 d of the cutting blade 6 , the projection 4 e is inserted into the opening 6 d of the cutting blade 6 , and the base 4 is expanded.
- the base 4 and the cutting blade 6 can be integrated with each other without using an adhesive or by using only a trace amount of adhesive. Accordingly, lowering in quality of the base-integrated blade 2 due to protruding of the adhesive is avoided.
- FIG. 7 is a perspective view depicting a cutting apparatus 10 that cuts a workpiece 11 .
- an X-axis direction (a processing-feed direction, a left-right direction, or a first horizontal direction) and a Y-axis direction (an indexing-feed direction, a forward-backward direction, or a second horizontal direction) are directions which are perpendicular to each other.
- a Z-axis direction (a vertical direction, an upward-downward direction, or a height direction) is a direction which is perpendicular to the X-axis direction and the Y-axis direction.
- the workpiece 11 is, for example, a disk-shaped wafer formed of a semiconductor material such as silicon.
- the workpiece 11 is partitioned into a plurality of rectangular regions by a plurality of streets (planned division lines) that are arranged in a grid pattern in such a manner as to intersect each other.
- streets planned division lines
- devices such as an integrated circuit (IC), a large scale integration (LSI) circuit, and a micro electromechanical systems (MEMS) device are formed.
- IC integrated circuit
- LSI large scale integration
- MEMS micro electromechanical systems
- the material, shape, structure, size, and the like of the workpiece 11 are not limited.
- the workpiece 11 may be a substrate formed of a semiconductor other than silicon (GaAs, InP, GaN, SiC, or the like), glass, ceramics, resin, metal, or the like.
- the kind, number, shape, structure, size, layout, and the like of the devices are not limited either, and the workpiece 11 may not be formed with any device.
- the workpiece 11 may be a package substrate such as a chip size package (CSP) substrate or a quad flat non-leaded package (QFN) substrate.
- the package substrate is formed, for example, by sealing with a resin layer (molding resin) a plurality of device chips mounted on a mounting substrate. By dividing the package substrate into individual pieces, a plurality of package devices including the respective packaged device chips are manufactured.
- the cutting apparatus 10 includes a base 12 for supporting or accommodating each constituent element constituting the cutting apparatus 10 .
- a cover 14 which covers an upper surface side of the base 12 is provided.
- a space (processing chamber) in which processing of the workpiece 11 is conducted is defined.
- a cutting unit 16 to which the base-integrated blade 2 is to be mounted is provided in the processing chamber inside the cover 14 .
- a ball-screw-type moving mechanism (not illustrated) for moving the cutting unit 16 in the Y-axis direction and the Z-axis direction is connected to the cutting unit 16 .
- a chuck table (holding table) 18 that holds the workpiece 11 is provided on the lower side of the cutting unit 16 .
- An upper surface of the chuck table 18 is a flat surface substantially parallel to a horizontal plane (XY plane) and constitutes a holding surface 18 a to hold the workpiece 11 thereon.
- the holding surface 18 a is connected to a suction source (not illustrated) such as an ejector through a flow line (not illustrated), a valve (not illustrated), or the like formed inside the chuck table 18 .
- a suction force (negative pressure) of the suction source is made to act on the holding surface 18 a, the workpiece 11 is held under suction by the chuck table 18 .
- a ball-screw-type moving mechanism (not illustrated) for moving the chuck table 18 in the X-axis direction is connected to the chuck table 18 .
- a rotational drive source (not illustrated) such as a motor for rotating the chuck table 18 around a rotational axis that extends in substantially parallel with the Z-axis direction is connected to the chuck table 18 .
- a cassette elevator 20 is disposed. On the cassette elevator 20 , there is disposed a cassette 22 that is capable of accommodating the workpiece 11 .
- the cassette elevator 20 adjusts a height of the cassette 22 in such a manner that conveying-out of the workpiece 11 from the cassette 22 and conveying-in of the workpiece 11 into the cassette 22 are conducted suitably.
- a display unit 24 for displaying various kinds of information concerning the cutting apparatus 10 .
- a touch-panel-type display is used as the display unit 24 .
- the display unit 24 functions also as an input section (input unit or input device) for inputting various kinds of information to the cutting apparatus 10 , and an operator can input information such as processing conditions to the cutting apparatus 10 by performing touch operations on the display unit 24 .
- the display unit 24 functions as a user interface.
- Each of the constituent elements (the cutting unit 16 , the chuck table 18 , the cassette elevator 20 , the display unit 24 , and the like) constituting the cutting apparatus 10 is connected to a control unit (control section or controller) 26 .
- the control unit 26 outputs a control signal to each constituent element of the cutting apparatus 10 , thereby controlling operation of the cutting apparatus 10 .
- the control unit 26 includes a computer, and includes a calculation section for performing calculations necessary for the operation of the cutting apparatus 10 and a storage section for storing various kinds of information (data, program, and the like) used for the operation of the cutting apparatus 10 .
- the calculation section includes a processor such as a central processing unit (CPU).
- the storage section includes a memory such as a read only memory (ROM) and a random access memory (RAM).
- FIG. 8 is an exploded perspective view depicting the cutting unit 16 .
- the cutting unit 16 includes a tubular housing 30 , and a cylindrical spindle 32 disposed along the Y-axis direction is accommodated in the housing 30 .
- a tip part (one end part) of the spindle 32 is exposed to the exterior of the housing 30 , and a rotational drive source (not illustrated) such as a motor is connected to a base end part (the other end part) of the spindle 32 .
- the blade mount 34 is fixed to the tip part of the spindle 32 .
- the blade mount 34 includes a disk-shaped flange section 36 and a cylindrical boss section (support shaft) 38 projecting from a central part of a front surface 36 a of the flange section 36 .
- On the front surface 36 a side of an outer circumferential part of the flange section 36 there is provided an annular projection 36 b projecting from the front surface 36 a.
- a tip surface of the projection 36 b is a flat surface substantially parallel to the front surface 36 a and constitutes a support surface 36 c that supports the base-integrated blade 2 .
- an outer circumferential surface of a tip part of the boss section 38 is formed with a male screw section (screw groove) 38 a.
- An annular fixing nut 40 is fastened to the male screw section 38 a of the boss section 38 .
- the fixing nut 40 is provided at a central part thereof with a circular opening 40 a that penetrates the fixing nut 40 in its thickness direction.
- the opening 40 a is formed to be substantially the same in diameter as the boss section 38 .
- a female screw section (screw groove) corresponding to the male screw section 38 a of the boss section 38 is provided on an inner circumferential surface of the fixing nut 40 , the inner circumferential surface being exposed to the opening 40 a.
- the base-integrated blade 2 When the base-integrated blade 2 is positioned in such a manner that the boss section 38 is inserted into the opening 4 d of the base 4 and the opening 6 d of the cutting blade 6 (refer to FIG. 1 and the like), the base-integrated blade 2 is mounted to the blade mount 34 . With the fixing nut 40 fastened to the male screw section 38 a of the boss section 38 in this state, the base-integrated blade 2 is clamped between the support surface 36 c of the flange section 36 and the fixing nut 40 . In this way, the base-integrated blade 2 is fixed to the tip part of the spindle 32 .
- the base-integrated blade 2 is rotated around a rotational axis that extends in substantially parallel with the Y-axis direction, by a motive power transmitted from the rotational drive source through the spindle 32 and the blade mount 34 . While rotating the base-integrated blade 2 , a tip part of the cutting blade 6 is caused to cut into the workpiece 11 held by the chuck table 18 (refer to FIG. 7 ), thereby cutting the workpiece 11 .
Abstract
There is provided a base-integrated blade manufacturing method for manufacturing a base-integrated blade by fixing a cutting blade having a circular opening to a base having an annular projection. The method includes a first step of preparing the base having the projection that has an outside diameter greater than a diameter of the opening of the cutting blade, and the cutting blade, a second step of lowering a temperature of the base and thus shrinking the base to have the outside diameter of the projection smaller than the diameter of the opening of the cutting blade, a third step of inserting the projection into the opening of the cutting blade, and a fourth step of raising the temperature of the base and thus expanding the base in such a manner that the cutting blade is fixed to the base.
Description
- The present invention relates to a base-integrated blade manufacturing method for manufacturing a base-integrated blade by fixing a cutting blade to a base.
- By dividing a wafer formed with a plurality of devices into individual pieces, a plurality of device chips including respective devices are manufactured. In addition, by covering a plurality of device chips mounted on a mounting substrate with a sealing material including resin (molding resin), a package substrate is formed. By dividing this package substrate into individual pieces, a plurality of package devices including respective packaged device chips are manufactured. The device chips and the package devices are assembled into various electronic appliances such as mobile phones and personal computers.
- A cutting apparatus is used for dividing a workpiece such as a wafer and a package substrate. The cutting apparatus includes a chuck table that holds the workpiece, and a cutting unit that cuts the workpiece. The cutting unit incorporates a spindle, and a blade mount that supports an annular cutting blade is fixed to a tip part of the spindle. The cutting blade mounted to the blade mount is rotated and caused to cut into the workpiece, and the workpiece is thus cut and divided. As the cutting blade used for cutting a workpiece, a hub-type cutting blade (hub blade) or a washer-type cutting blade (washer blade or hubless blade) is used. The hub blade has a structure in which an annular base and an annular cutting edge formed along an outer circumferential edge of the base are integrated with each other. In addition, the cutting edge of the hub blade includes electroformed grindstones that contain abrasive grains and a bonding material such as a nickel plating layer for fixing the abrasive grains. On the other hand, the washer blade includes only an annular cutting edge that contains abrasive grains and a bonding material including metal, ceramics, resin, or the like for fixing the abrasive grains.
- At the time of cutting a workpiece by the cutting apparatus, a suitable cutting blade is selected according to the material of the workpiece, the purpose of processing, and the like and is mounted to the cutting unit. It is to be noted that the method for mounting the cutting blade to the blade mount varies depending on whether the cutting blade is a hub blade or a washer blade, and the shape, size, and the like of the blade mount also vary depending on the kind of the cutting blade. Therefore, for example, at the time of replacing a hub blade mounted to the cutting unit with a washer blade, a work for replacing a blade mount for the hub blade, which blade mount is fixed to the spindle, with a blade mount for the washer blade is also required. This makes a cutting blade replacing work troublesome. In view of this, a technique of fixing a washer blade to an annular base to form a base-integrated blade has been proposed (see Japanese Patent Laid-open No. 2012-135833). When the base-integrated blade is used, it becomes possible to mount a washer blade to the blade mount for a hub blade, and the cutting blade replacing work is facilitated.
- The base-integrated blade is manufactured by integrating an annular base and an annular cutting blade, which are individually formed, with each other by use of an adhesive. Specifically, a sufficient amount of adhesive for securely fixing the cutting blade to the base is applied to the whole part of a region of the base that makes contact with the cutting blade. Thereafter, the base and the cutting blade are pasted to each other through the adhesive. However, if a considerable amount of adhesive is applied to the base, at the time of pasting, the adhesive is sandwiched between the base and the cutting blade and spreads, and the adhesive may protrude from the pasted region of the base and the cutting blade. In this case, the adhesive may adhere to an outer circumferential part of the cutting blade and adversely affect the processing, or the appearance of the cutting blade may be worsened, so that the quality of the base-integrated blade may be lowered.
- The present invention has been made in consideration of such problems. It is an object of the present invention to provide a base-integrated blade manufacturing method which enables omission or reduction of an adhesive for integrating the base and the cutting blade with each other.
- In accordance with an aspect of the present invention, there is provided a base-integrated blade manufacturing method for manufacturing a base-integrated blade by fixing a cutting blade having a circular opening to a base having an annular projection. The method includes a first step of preparing the base having the projection that has an outside diameter greater than a diameter of the opening of the cutting blade, and the cutting blade, a second step of lowering a temperature of the base and thus shrinking the base to have the outside diameter of the projection smaller than the diameter of the opening of the cutting blade, a third step of inserting the projection into the opening of the cutting blade, and a fourth step of raising the temperature of the base and thus expanding the base in such a manner that the cutting blade is fixed to the base.
- It is to be noted that, preferably, in the first step, a difference between the outside diameter of the projection and the diameter of the opening of the cutting blade is less than 20 μm.
- In the base-integrated blade manufacturing method according to one aspect of the present invention, after the base is shrunk to have the outside diameter of the projection smaller than the diameter of the opening of the cutting blade, the projection is inserted into the opening of the cutting blade, and the base is expanded. As a result, it becomes possible to integrate the base and the cutting blade with each other, without using an adhesive or by using only a trace amount of adhesive. As a result, lowering in quality of the base-integrated blade due to protruding of the adhesive is avoided.
- The above and other objects, features and advantages of the present invention and the manner of realizing them will become more apparent, and the invention itself will best be understood from a study of the following description and appended claims with reference to the attached drawings showing a preferred embodiment of the invention.
-
FIG. 1 is an exploded perspective view depicting a base-integrated blade; -
FIG. 2 is a flow chart depicting a base-integrated blade manufacturing method; -
FIG. 3 is a sectional view depicting a base and a cutting blade in a first step; -
FIG. 4 is a sectional view depicting the base and the cutting blade in a second step; -
FIG. 5 is a sectional view depicting the base and the cutting blade in a third step; -
FIG. 6 is a sectional view depicting the base and the cutting blade in a fourth step; -
FIG. 7 is a perspective view depicting a cutting apparatus; and -
FIG. 8 is an exploded perspective view depicting a cutting unit. - An embodiment of the present invention will be described below with reference to the attached drawings. First, a configuration example of a base-integrated blade according to the present embodiment will be described.
FIG. 1 is an exploded perspective view depicting a base-integratedblade 2. The base-integratedblade 2 includes anannular base 4 and anannular cutting blade 6. - The
base 4 is a disk-shaped member formed of metal such as aluminum and an aluminum alloy and includes afirst surface 4 a and asecond surface 4 b, which are substantially parallel to each other, and an outer circumferential edge (side surface) 4 c connected to thefirst surface 4 a. In addition, thebase 4 is provided at a central part thereof with acircular opening 4 d extending from thefirst surface 4 a to thesecond surface 4 b while penetrating thebase 4 in its thickness direction. On thefirst surface 4 a side of thebase 4, anannular projection 4 e projecting from thefirst surface 4 a in the thickness direction of thebase 4 is provided. Theprojection 4 e is formed with a predetermined width along an outline of the opening 4 d and includes an annular outer circumferential surface (side surface) 4 f substantially perpendicular to thefirst surface 4 a. - The
cutting blade 6 is a disk-shaped member that includes abrasive grains formed of diamond, cubic boron nitride (cBN), or the like and a bonding material (binder) formed of metal, ceramics, resin, or the like for fixing the abrasive grains. The material of the abrasive grains, the grain diameter of the abrasive grains, the material of the bonding material, and the like are appropriately selected according to the specifications of the base-integratedblade 2. Thecutting blade 6 includes afirst surface 6 a and asecond surface 6 b which are substantially parallel to each other, and an outer circumferential edge (side surface) 6 c connected to thefirst surface 6 a and thesecond surface 6 b. In addition, thecutting blade 6 is provided at a central part thereof with acircular opening 6 d which extends from thefirst surface 6 a to thesecond surface 6 b while penetrating thecutting blade 6 in its thickness direction. Further, thecutting blade 6 includes an annular inner circumferential surface (side surface) 6 e. The innercircumferential surface 6 e is defined by theopening 6 d and is exposed on an inside of the opening 6 d. - By fixing the
cutting blade 6 to thebase 4, the base-integratedblade 2 is manufactured. A specific example of the base-integrated blade manufacturing method will be described below.FIG. 2 is a flow chart depicting the base-integrated blade manufacturing method. The base-integrated blade manufacturing method according to the present embodiment includes a first step (preparing step) S1, a second step (shrinking step) S2, a third step (inserting step) S3, and a fourth step (expanding step) S4. - At the time of manufacturing the base-integrated
blade 2, first, thebase 4 and thecutting blade 6 are prepared (first step S1).FIG. 3 is a sectional view depicting thebase 4 and thecutting blade 6 in the first step S1. - In
FIG. 3 , ϕ1 represents an outside diameter of theprojection 4 e of the base 4 (diameter of the outercircumferential surface 4 f), and ϕ2 represents a diameter of theopening 6 d of the cutting blade 6 (inside diameter of thecutting blade 6, or diameter of the innercircumferential surface 6 e). In the first step S1, thebase 4 having theprojection 4 e having an outside diameter greater than the diameter of theopening 6 d of thecutting blade 6, and thecutting blade 6 are prepared. Specifically, thebase 4 is designed in such a manner as to satisfy ϕ1>ϕ2 at a predetermined temperature (hereinafter referred to as a reference temperature; for example, 20° C. or 25° C.) in a range of normal temperature (5° C. to 35° C.) - It is to be noted that, in the second step S2 described later (refer to
FIG. 4 ), thebase 4 is cooled and thus shrunk to have ϕ1 smaller than ϕ2. For this purpose, a difference between ϕ1 and ϕ2 in the first step S1 is set to a value in such a range that ϕ1 can be made smaller than ϕ2 by cooling of thebase 4. For example, when the difference between ϕ1 and ϕ2 in the first step S1 is set to be less than 20 μm, preferably less than 10 μm, or more preferably less than 5 μm, ϕ1 can easily be made smaller than ϕ2 in the second step S2 described later. - Next, the
base 4 is lowered in temperature and thus shrunk to have the outside diameter of theprojection 4 e smaller than the diameter of theopening 6 dof the cutting blade 6 (second step S2).FIG. 4 is a sectional view depicting thebase 4 and thecutting blade 6 in the second step S2. - In the second step S2, the
base 4 is cooled and the temperature of thebase 4 is lowered, for example, by storing thebase 4 in a refrigerator or a freezer for a predetermined period of time. As a result, the whole part of thebase 4 is shrunk, and the outside diameter ϕ1 of theprojection 4 e is reduced. Thebase 4 is cooled until the outside diameter ϕ1 of theprojection 4 e becomes smaller than the diameter ϕ2 of theopening 6 d of thecutting blade 6. Consequently, theprojection 4 e can be inserted into theopening 6 d of thecutting blade 6. It is to be noted that the method for cooling thebase 4 is not limited. For example, thebase 4 may be placed on a metallic support plate which is cooled, or may be exposed to a cool airflow or cold water. - The cooling conditions (cooling temperature, cooling period of time, and the like) of the
base 4 are set according to the material and size of thebase 4. For example, assumed is a case where the material of thebase 4 is A5052 (refer to the Japanese Industrial Standards; linear expansion coefficient 23.8×10−6/° C.) which is a kind of an aluminum alloy that contains magnesium (Al-Mg alloy) and where the outside diameter ϕ1 of theprojection 4 e is 40 mm. In this case, by cooling thebase 4 to lower the temperature of thebase 4 by approximately 20° C. from the reference temperature, the outside diameter ϕ1 of theprojection 4 e can be reduced by approximately 20 μm. Therefore, if the difference between ϕ1 and ϕ2 in the first step S1 is less than 20 μm, it is possible to insert theprojection 4 e into theopening 6 d of thecutting blade 6. - Subsequently, the
projection 4 e of thebase 4 is inserted into theopening 6 d of the cutting blade 6 (third step S3).FIG. 5 is a sectional view depicting thebase 4 and thecutting blade 6 in the third step S3. - In the third step S3, the
base 4 and thecutting blade 6 are disposed in such a manner that the center of thebase 4 and the center of thecutting blade 6 overlap, and thefirst surface 4 a of thebase 4 and thefirst surface 6 a of thecutting blade 6 are brought into contact with each other. As a result, theprojection 4 e of thebase 4 is inserted into theopening 6 d of thecutting blade 6. It is to be noted that, at a stage immediately after theprojection 4 e of thebase 4 is inserted into theopening 6 d of thecutting blade 6, the outside diameter ϕ1 of theprojection 4 e is smaller than the diameter ϕ2 of theopening 6 d of thecutting blade 6, and a slight gap is present between the outercircumferential surface 4 f of theprojection 4 e and the innercircumferential surface 6 e of thecutting blade 6. Therefore, although thecutting blade 6 makes contact with thebase 4, it is not fixed to thebase 4. - Next, the
base 4 is raised in temperature and thus expanded in such a manner that thecutting blade 6 is fixed to the base 4 (fourth step S4).FIG. 6 is a sectional view depicting thebase 4 and thecutting blade 6 in the fourth step S4. - For example, in the fourth step S4, the
base 4 and thecutting blade 6 are stored on a support plate set in a room of the reference temperature for a predetermined period of time. This gradually raises the temperature of thebase 4 and expands the whole part of thebase 4, and the outside diameter ϕ1 of theprojection 4 e increases. When thebase 4 is expanded until the outside diameter ϕ1 of theprojection 4 e reaches the diameter ϕ2 of theopening 6 d of thecutting blade 6, the outercircumferential surface 4 f of theprojection 4 e comes into contact with the innercircumferential surface 6 e of thecutting blade 6, so that theprojection 4 e is fixed inside theopening 6 d of thecutting blade 6. As a result, thecutting blade 6 is fixed to thebase 4, and thebase 4 and thecutting blade 6 are integrated with each other. In this way, the base-integratedblade 2 including thebase 4 and thecutting blade 6 is formed. - It is to be noted that, in the fourth step S4, the
base 4 may be expanded by being subjected to a heat treatment. For example, thebase 4 and thecutting blade 6 are placed on a heated metallic support plate to heat thebase 4. Alternatively, thebase 4 may be exposed to a warm airflow or warm water. By such an operation, the temperature rise of thebase 4 can be accelerated, and the period of time required for the expansion of thebase 4 can be shortened. - After the fourth step S4 is carried out, an outside diameter of the cutting blade 6 (diameter of the outer
circumferential edge 6 c) is greater than an outside diameter of the base 4 (diameter of the outercircumferential edge 4 c). In addition, when thecutting blade 6 is fixed to thebase 4 by the expansion of thebase 4, thebase 4 and thecutting blade 6 are disposed concentrically, and thebase 4 and thecutting blade 6 are aligned with each other. As a result, obtained is a state in which an outer circumferential part of thecutting blade 6 projects toward a radially outer side of thebase 4 from the outercircumferential edge 4 c of thebase 4. - In addition, after the fourth step S4 is carried out, a height (projection amount from the
first surface 4 a) of theprojection 4 e is preferably equal to or less than a thickness of thecutting blade 6. In this case, theprojection 4 e does not project from thesecond surface 6 b side of thecutting blade 6. As a result, at the time of mounting the base-integratedblade 2 to a blade mount 34 (refer toFIG. 8 ), hampering of the mounting of the base-integratedblade 2 due to contact of theprojection 4 e with theblade mount 34 can be avoided. - As has been described above, the
base 4 and thecutting blade 6 are integrated with each other by utilizing the shrinking and expansion of thebase 4, so that thecutting blade 6 can be fixed to thebase 4 without using an adhesive. As a result, lowering in quality of the base-integratedblade 2 due to protruding of the adhesive is avoided. It is to be noted that, for assisting the fixation of thecutting blade 6 to thebase 4, a trace amount of adhesive may be applied to thebase 4 or thecutting blade 6. For example, a trace amount of adhesive may be applied to a partial region of thefirst surface 4 a of thebase 4, the partial region being located on the inner side of the outercircumferential edge 4 c. In this case, in addition to the contact between the outercircumferential surface 4 f of theprojection 4 e and the innercircumferential surface 6 e of thecutting blade 6, an adhesive force of the adhesive also contributes to the fixation of thecutting blade 6, so that thebase 4 and thecutting blade 6 are firmly integrated with each other. In addition, since the amount of adhesive is significantly reduced as compared with the conventional method for integrating thebase 4 and thecutting blade 6 with each other by only the action of the adhesive, protruding of the adhesive is not liable to occur. - As described above, in the base-integrated blade manufacturing method according to the present embodiment, after the
base 4 is shrunk to have the outside diameter of theprojection 4 e smaller than the diameter of theopening 6 d of thecutting blade 6, theprojection 4 e is inserted into theopening 6 d of thecutting blade 6, and thebase 4 is expanded. As a result, thebase 4 and thecutting blade 6 can be integrated with each other without using an adhesive or by using only a trace amount of adhesive. Accordingly, lowering in quality of the base-integratedblade 2 due to protruding of the adhesive is avoided. - The base-integrated
blade 2 obtained by the base-integrated blade manufacturing method described above is mounted to a cutting apparatus and used for cutting of a workpiece.FIG. 7 is a perspective view depicting a cuttingapparatus 10 that cuts aworkpiece 11. It is to be noted that, inFIG. 7 , an X-axis direction (a processing-feed direction, a left-right direction, or a first horizontal direction) and a Y-axis direction (an indexing-feed direction, a forward-backward direction, or a second horizontal direction) are directions which are perpendicular to each other. In addition, a Z-axis direction (a vertical direction, an upward-downward direction, or a height direction) is a direction which is perpendicular to the X-axis direction and the Y-axis direction. - The
workpiece 11 is, for example, a disk-shaped wafer formed of a semiconductor material such as silicon. Theworkpiece 11 is partitioned into a plurality of rectangular regions by a plurality of streets (planned division lines) that are arranged in a grid pattern in such a manner as to intersect each other. In addition, in the plurality of regions partitioned by the streets, devices such as an integrated circuit (IC), a large scale integration (LSI) circuit, and a micro electromechanical systems (MEMS) device are formed. By cutting and dividing theworkpiece 11 along the streets by the cuttingapparatus 10, a plurality of device chips including the respective devices are manufactured. - It is to be noted that the material, shape, structure, size, and the like of the
workpiece 11 are not limited. For example, theworkpiece 11 may be a substrate formed of a semiconductor other than silicon (GaAs, InP, GaN, SiC, or the like), glass, ceramics, resin, metal, or the like. In addition, the kind, number, shape, structure, size, layout, and the like of the devices are not limited either, and theworkpiece 11 may not be formed with any device. Further, theworkpiece 11 may be a package substrate such as a chip size package (CSP) substrate or a quad flat non-leaded package (QFN) substrate. The package substrate is formed, for example, by sealing with a resin layer (molding resin) a plurality of device chips mounted on a mounting substrate. By dividing the package substrate into individual pieces, a plurality of package devices including the respective packaged device chips are manufactured. - The cutting
apparatus 10 includes abase 12 for supporting or accommodating each constituent element constituting the cuttingapparatus 10. On the upper side of thebase 12, acover 14 which covers an upper surface side of thebase 12 is provided. Inside thecover 14, a space (processing chamber) in which processing of theworkpiece 11 is conducted is defined. In the processing chamber inside thecover 14, a cuttingunit 16 to which the base-integratedblade 2 is to be mounted is provided. A ball-screw-type moving mechanism (not illustrated) for moving the cuttingunit 16 in the Y-axis direction and the Z-axis direction is connected to the cuttingunit 16. - On the lower side of the cutting
unit 16, a chuck table (holding table) 18 that holds theworkpiece 11 is provided. An upper surface of the chuck table 18 is a flat surface substantially parallel to a horizontal plane (XY plane) and constitutes a holdingsurface 18 a to hold theworkpiece 11 thereon. The holdingsurface 18 a is connected to a suction source (not illustrated) such as an ejector through a flow line (not illustrated), a valve (not illustrated), or the like formed inside the chuck table 18. When theworkpiece 11 is placed on the holdingsurface 18 a and a suction force (negative pressure) of the suction source is made to act on the holdingsurface 18 a, theworkpiece 11 is held under suction by the chuck table 18. A ball-screw-type moving mechanism (not illustrated) for moving the chuck table 18 in the X-axis direction is connected to the chuck table 18. In addition, a rotational drive source (not illustrated) such as a motor for rotating the chuck table 18 around a rotational axis that extends in substantially parallel with the Z-axis direction is connected to the chuck table 18. - At a corner part on the front side of the
base 12, acassette elevator 20 is disposed. On thecassette elevator 20, there is disposed acassette 22 that is capable of accommodating theworkpiece 11. Thecassette elevator 20 adjusts a height of thecassette 22 in such a manner that conveying-out of the workpiece 11 from thecassette 22 and conveying-in of theworkpiece 11 into thecassette 22 are conducted suitably. - On a
front surface 14 a side of thecover 14, there is provided a display unit (display section or display device) 24 for displaying various kinds of information concerning the cuttingapparatus 10. For example, a touch-panel-type display is used as thedisplay unit 24. In this case, thedisplay unit 24 functions also as an input section (input unit or input device) for inputting various kinds of information to the cuttingapparatus 10, and an operator can input information such as processing conditions to the cuttingapparatus 10 by performing touch operations on thedisplay unit 24. In other words, thedisplay unit 24 functions as a user interface. - Each of the constituent elements (the cutting
unit 16, the chuck table 18, thecassette elevator 20, thedisplay unit 24, and the like) constituting the cuttingapparatus 10 is connected to a control unit (control section or controller) 26. Thecontrol unit 26 outputs a control signal to each constituent element of the cuttingapparatus 10, thereby controlling operation of the cuttingapparatus 10. For example, thecontrol unit 26 includes a computer, and includes a calculation section for performing calculations necessary for the operation of the cuttingapparatus 10 and a storage section for storing various kinds of information (data, program, and the like) used for the operation of the cuttingapparatus 10. The calculation section includes a processor such as a central processing unit (CPU). In addition, the storage section includes a memory such as a read only memory (ROM) and a random access memory (RAM). -
FIG. 8 is an exploded perspective view depicting the cuttingunit 16. The cuttingunit 16 includes atubular housing 30, and acylindrical spindle 32 disposed along the Y-axis direction is accommodated in thehousing 30. A tip part (one end part) of thespindle 32 is exposed to the exterior of thehousing 30, and a rotational drive source (not illustrated) such as a motor is connected to a base end part (the other end part) of thespindle 32. - The
blade mount 34 is fixed to the tip part of thespindle 32. Theblade mount 34 includes a disk-shapedflange section 36 and a cylindrical boss section (support shaft) 38 projecting from a central part of afront surface 36 a of theflange section 36. On thefront surface 36 a side of an outer circumferential part of theflange section 36, there is provided anannular projection 36 b projecting from thefront surface 36 a. A tip surface of theprojection 36 b is a flat surface substantially parallel to thefront surface 36 a and constitutes asupport surface 36 c that supports the base-integratedblade 2. In addition, an outer circumferential surface of a tip part of theboss section 38 is formed with a male screw section (screw groove) 38 a. - An
annular fixing nut 40 is fastened to themale screw section 38 a of theboss section 38. The fixingnut 40 is provided at a central part thereof with acircular opening 40 a that penetrates the fixingnut 40 in its thickness direction. The opening 40 a is formed to be substantially the same in diameter as theboss section 38. In addition, a female screw section (screw groove) corresponding to themale screw section 38 a of theboss section 38 is provided on an inner circumferential surface of the fixingnut 40, the inner circumferential surface being exposed to theopening 40 a. - When the base-integrated
blade 2 is positioned in such a manner that theboss section 38 is inserted into theopening 4 d of thebase 4 and theopening 6 d of the cutting blade 6 (refer toFIG. 1 and the like), the base-integratedblade 2 is mounted to theblade mount 34. With the fixingnut 40 fastened to themale screw section 38 a of theboss section 38 in this state, the base-integratedblade 2 is clamped between thesupport surface 36 c of theflange section 36 and the fixingnut 40. In this way, the base-integratedblade 2 is fixed to the tip part of thespindle 32. - The base-integrated
blade 2 is rotated around a rotational axis that extends in substantially parallel with the Y-axis direction, by a motive power transmitted from the rotational drive source through thespindle 32 and theblade mount 34. While rotating the base-integratedblade 2, a tip part of thecutting blade 6 is caused to cut into theworkpiece 11 held by the chuck table 18 (refer toFIG. 7 ), thereby cutting theworkpiece 11. - It is to be noted that the structure, method, and the like according to the present embodiment can appropriately be modified in carrying out the present invention unless departing from the scope of the object of the present invention.
- The present invention is not limited to the details of the above described preferred embodiment. The scope of the invention is defined by the appended claims and all changes and modifications as fall within the equivalence of the scope of the claims are therefore to be embraced by the invention.
Claims (2)
1. A base-integrated blade manufacturing method for manufacturing a base-integrated blade by fixing a cutting blade having a circular opening to a base having an annular projection, the method comprising:
a first step of preparing the base having the projection that has an outside diameter greater than a diameter of the opening of the cutting blade, and the cutting blade;
a second step of lowering a temperature of the base and thus shrinking the base to have the outside diameter of the projection smaller than the diameter of the opening of the cutting blade;
a third step of inserting the projection into the opening of the cutting blade; and
a fourth step of raising the temperature of the base and thus expanding the base in such a manner that the cutting blade is fixed to the base.
2. The base-integrated blade manufacturing method according to claim 1 , wherein, in the first step, a difference between the outside diameter of the projection and the diameter of the opening of the cutting blade is less than 20 μm.
Applications Claiming Priority (3)
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JP2021195294A JP2023081526A (en) | 2021-12-01 | 2021-12-01 | Manufacturing method of blade with base |
JP2021-195294 | 2021-12-01 | ||
JPJP2021-195294 | 2021-12-01 |
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US20230166368A1 true US20230166368A1 (en) | 2023-06-01 |
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US18/055,508 Active US11679455B1 (en) | 2021-12-01 | 2022-11-15 | Base-integrated blade manufacturing method |
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US (1) | US11679455B1 (en) |
JP (1) | JP2023081526A (en) |
KR (1) | KR20230082567A (en) |
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TW (1) | TW202322980A (en) |
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US20200114432A1 (en) * | 2017-04-24 | 2020-04-16 | Guehring Kg | Method for assembling a tool system module, and tool system module produced accordingly |
US20220203463A1 (en) * | 2019-04-26 | 2022-06-30 | Makino Milling Machine Co., Ltd. | T-shaped tool, and method for manufacturing t-shaped tool |
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JP5690581B2 (en) | 2010-12-27 | 2015-03-25 | 株式会社ディスコ | Cutting blade |
-
2021
- 2021-12-01 JP JP2021195294A patent/JP2023081526A/en active Pending
-
2022
- 2022-11-15 US US18/055,508 patent/US11679455B1/en active Active
- 2022-11-16 TW TW111143768A patent/TW202322980A/en unknown
- 2022-11-21 KR KR1020220156200A patent/KR20230082567A/en unknown
- 2022-11-24 CN CN202211479896.7A patent/CN116197802A/en active Pending
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US4152816A (en) * | 1977-06-06 | 1979-05-08 | General Motors Corporation | Method of manufacturing a hybrid turbine rotor |
US4509900A (en) * | 1982-10-14 | 1985-04-09 | Tokyo Shibaura Denki Kabushiki Kaisha | Turbine rotor |
US4915589A (en) * | 1988-05-17 | 1990-04-10 | Elektroschmelzwerk Kempten Gmbh | Runner with mechanical coupling |
US20080085659A1 (en) * | 2004-07-19 | 2008-04-10 | Troy Stratti | Drive For A Cutting Or Grinding Machine |
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US20200114432A1 (en) * | 2017-04-24 | 2020-04-16 | Guehring Kg | Method for assembling a tool system module, and tool system module produced accordingly |
US20220203463A1 (en) * | 2019-04-26 | 2022-06-30 | Makino Milling Machine Co., Ltd. | T-shaped tool, and method for manufacturing t-shaped tool |
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Also Published As
Publication number | Publication date |
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JP2023081526A (en) | 2023-06-13 |
CN116197802A (en) | 2023-06-02 |
US11679455B1 (en) | 2023-06-20 |
KR20230082567A (en) | 2023-06-08 |
TW202322980A (en) | 2023-06-16 |
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