US20220152888A1 - Resin supply apparatus, resin sealing apparatus, and method for manufacturing resin-sealed product - Google Patents
Resin supply apparatus, resin sealing apparatus, and method for manufacturing resin-sealed product Download PDFInfo
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- US20220152888A1 US20220152888A1 US17/492,663 US202117492663A US2022152888A1 US 20220152888 A1 US20220152888 A1 US 20220152888A1 US 202117492663 A US202117492663 A US 202117492663A US 2022152888 A1 US2022152888 A1 US 2022152888A1
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- 239000011347 resin Substances 0.000 title claims abstract description 338
- 229920005989 resin Polymers 0.000 title claims abstract description 338
- 238000007789 sealing Methods 0.000 title claims abstract description 88
- 238000000034 method Methods 0.000 title claims description 26
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 238000007599 discharging Methods 0.000 claims description 14
- 238000013459 approach Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 description 32
- 230000007547 defect Effects 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000007480 spreading Effects 0.000 description 4
- 238000003892 spreading Methods 0.000 description 4
- 238000005303 weighing Methods 0.000 description 4
- 238000000748 compression moulding Methods 0.000 description 3
- 230000001154 acute effect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/10—Moulds or cores; Details thereof or accessories therefor with incorporated venting means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/58—Applying the releasing agents
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/68—Release sheets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
- B29C2043/181—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
- B29C2043/182—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated completely
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C43/32—Component parts, details or accessories; Auxiliary operations
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- B29C2043/3438—Feeding the material to the mould or the compression means using dispensing heads, e.g. extruders, placed over or apart from the moulds moving during dispensing over the moulds, e.g. laying up
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/027—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles having an axis of symmetry
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/561—Batch processing
Definitions
- the present invention relates to a resin supply apparatus, a resin sealing apparatus, and a method for manufacturing a resin-sealed product.
- a resin sealing apparatus using the compression molding generally includes a resin supply apparatus for supplying a resin onto a workpiece or a release film, and a resin sealing mold that spreads the resin on the workpiece and heats and pressurizes the resin.
- Patent literature 1 discloses that a resin supply pattern supplied by a resin supply apparatus is formed in a spiral shape or a lattice shape in a vacuum chamber.
- Patent literature 1 Japanese Patent Laid-Open No. 2018-134846
- the present invention provides a resin supply apparatus, a resin sealing apparatus, and a method for manufacturing a resin-sealed product, which can suppress occurrence of defects.
- a resin supply apparatus is a resin supply apparatus for supplying a resin onto an object to be coated which is arranged in a lower mold of a resin sealing mold.
- the resin supply apparatus includes: a calculation unit for calculating a resin supply pattern based on the shape of a cavity of the resin sealing mold; and a supply unit for supplying a resin to the object to be coated along the resin supply pattern.
- the resin supply pattern has a plurality of linear paths. One of mutually adjacent linear paths in the plurality of linear paths is inclined with respect to an axis of symmetry that divides the cavity in line symmetry, and the other one of the mutually adjacent linear paths in the plurality of linear paths is inclined with respect to the one linear path. A region between the mutually adjacent linear paths in the plurality of linear paths is opened to the outside of the object to be coated, at least on a side on which the other linear path is separated from the one linear path.
- a resin sealing apparatus includes the resin supply apparatus according to any one of the above aspects, and a resin sealing mold for sealing elements on a workpiece with a resin.
- the resin sealing mold has a cavity in which a resin is filled and a plurality of air vents for discharging air from the cavity.
- the object to be coated is arranged in the resin sealing mold so that at least one of the plurality of air vents is located on an extension line of a region between mutually adjacent linear paths in the plurality of linear paths.
- a method for manufacturing a resin-sealed product includes supplying a resin onto an object to be coated which is arranged in a lower mold of a resin sealing mold.
- the method for manufacturing a resin-sealed product includes: calculating a resin supply pattern based on the shape of a cavity of the resin sealing mold; and supplying a resin to the object to be coated along the resin supply pattern.
- the resin supply pattern has a plurality of linear paths.
- One of the mutually adjacent linear paths in the plurality of linear paths is inclined with respect to an axis of symmetry that divides the cavity in line symmetry, and the other one of the mutually adjacent linear paths in the plurality of linear paths is inclined with respect to the one linear path.
- a region between the mutually adjacent linear paths in the plurality of linear paths is opened to the outside of the object to be coated, at least on a side on which the other linear path is separated from the one linear path
- FIG. 1 is a diagram schematically showing a configuration of a resin sealing apparatus according to a first embodiment.
- FIG. 2 is a plan view schematically showing a workpiece and a resin supply pattern in a resin sealing mold.
- FIG. 3 is a flowchart showing a method for manufacturing a resin-sealed product using the resin sealing apparatus according to the first embodiment.
- FIG. 4 is a cross-sectional view schematically showing a resin on a workpiece immediately after being set inside the resin sealing mold.
- FIG. 5 is a cross-sectional view schematically showing a resin being spread by the resin sealing mold.
- FIG. 6 is a cross-sectional view schematically showing a resin filled in a cavity by heating and pressurizing.
- FIG. 7 is a plan view schematically showing a resin supply pattern according to a variation example.
- FIG. 8 is a plan view schematically showing a resin supply pattern according to another variation example.
- FIG. 9 is a plan view schematically showing a resin supply pattern according to another variation example.
- FIG. 10 is a plan view schematically showing a resin supply pattern according to another variation example.
- FIG. 11 is a plan view schematically showing a resin supply pattern according to another variation example.
- FIG. 12 is a plan view schematically showing a resin supply pattern according to another variation example.
- FIG. 13 is a plan view schematically showing a resin supply pattern according to another variation example.
- FIG. 14 is a diagram schematically showing a configuration of a resin sealing apparatus according to a second embodiment.
- FIG. 15 is a flowchart showing a method for manufacturing a resin-sealed product using the resin sealing apparatus according to the second embodiment.
- FIG. 1 is a diagram schematically showing a configuration of a resin sealing apparatus according to a first embodiment.
- FIG. 2 is a plan view schematically showing a workpiece and a resin supply pattern in a resin sealing mold.
- Each drawing may be assigned with a Cartesian coordinate system including X-axis, Y-axis and Z-axis for convenience to clarify the relationship between the drawings and to help understand the positional relationship between members.
- the direction of the Z-axis arrow is an upward direction, and the direction opposite to the direction of the Z-axis arrow is a downward direction.
- the resin sealing apparatus 1 is an apparatus used for resin-sealing (molding) a workpiece 10 with a resin 13 .
- the resin sealing apparatus 1 includes a resin supply apparatus 100 that applies (supplies) the resin 13 for resin sealing onto an object to be coated (for example, the workpiece 10 or a release film RF), and a resin sealing mold 200 that heats and pressurizes the resin for curing.
- the workpiece 10 includes, for example, a substrate 11 and elements 12 arranged on the substrate 11 , and the elements 12 are arranged in a first direction X and a second direction Y, respectively.
- the configurations of the substrate 11 and the element 12 are not limited.
- the substrate 11 may be a semiconductor wafer
- the element 12 may be a semiconductor chip flip-chip mounted on the substrate 11 .
- a gap is present between the substrate 11 and the element 12 when the resin 13 is supplied, but the resin is filled in this gap by heating and pressurizing.
- the present invention is not limited to this aspect, and may also be applied when, for example, the element 12 is simply mounted on the substrate 11 without a gap therebetween, or when an underfill resin is filled between the substrate 11 and the element 12 .
- the element 12 may be a multilayer body in which a plurality of semiconductor chips are laminated at intervals in the third direction Z, or may be an element other than a semiconductor element (MEMS device, electronic device, or the like).
- the arrangement of the element 12 on the substrate 11 is not limited.
- the element 12 may be wire-bonded to the substrate 11 , or may be detachably fixed to the substrate 11 .
- the substrate 11 may be a resin substrate or a glass substrate, or may be an interposer substrate, a lead frame, a carrier plate with an adhesive sheet, or the like.
- planar shape of the substrate 11 is circular and the planar shape of the element 12 is rectangular, but the planar shapes of the substrate 11 and the element 12 are not limited thereto.
- the planar shape of the substrate may be rectangular, and the planar shape of the element may be polygonal or circular. Two or more types of elements having different shapes may be arranged on the workpiece.
- the resin supply apparatus 100 includes an acquisition unit 110 , a supply unit 120 , a calculation unit 130 , a drive unit 140 , and a stage 150 .
- the acquisition unit 110 acquires structural information (for example, information about the shape, size, and the like of a cavity 201 ) of the cavity 201 constituting an internal space of the resin sealing mold 200 that is filled with the resin 13 .
- the acquisition unit 110 acquires the structural information by input from, for example, an external terminal or the like.
- the method for acquiring the structural information of the cavity 201 is not limited to the above method.
- the acquisition unit 110 may read a code or the like assigned to the resin sealing mold 200 , and thereby acquire structural information corresponding to the code or the like from a database recorded in advance.
- the acquisition unit 110 acquires arrangement information (for example, information about the shape, size, arrangement direction, number, interval, and the like of the elements 12 ) of the elements 12 on the workpiece 10 (more specifically, the substrate 11 ) in addition to the structural information of the cavity 201 .
- the acquisition unit 110 acquires the arrangement information of the elements 12 by imaging the workpiece 10 and analyzing the image of the workpiece 10 .
- the acquisition unit 110 may acquire the arrangement information for each workpiece, or may acquire the arrangement information for each lot having a plurality of workpieces. Note that, the method for acquiring the arrangement information of the elements 12 is not limited to the above method.
- the acquisition unit 110 may read a code or the like assigned to the workpiece 10 , and thereby acquire arrangement information corresponding to the code or the like from a database recorded in advance.
- the acquisition unit 110 may acquire the arrangement information by inputting from the external terminal or the like.
- the acquisition unit 110 may detect a position of a V notch or the like in the workpiece 10 such as a wafer to acquire the orientation of the workpiece 10 .
- the resin supply apparatus 100 can also supply the resin 13 described later after adjusting the orientation of the workpiece 10 based on the orientation of the workpiece 10 acquired by the acquisition unit 110 .
- the supply unit 120 supplies the resin 13 onto the object to be coated (the workpiece 10 or the release film RF).
- the supply unit 120 is, for example, a dispenser for discharging the liquid resin 13 .
- the supply unit 120 includes a syringe 121 in which the resin 13 is stored, a pusher (piston) 122 that is inserted inside the syringe 121 and can push out the resin 13 , and a pinch valve 123 that opens or closes a nozzle at the front end of the syringe 121 .
- the supply unit 120 is provided with a configuration in which the used syringe 121 can be replaced with a new syringe 121 when the resin 13 stored in the syringe 121 is used up.
- the supply unit 120 is not limited to the above configuration, and may include a switching valve instead of the pinch valve 123 .
- the supply unit 120 may be configured to prepare two liquids separately and mix and supply them on site.
- the supply unit 120 may be a feeder for discharging powdery and granular resin.
- the calculation unit 130 calculates the resin supply pattern (the shape of the resin 13 applied on the object to be coated) based on the shape of the cavity 201 of the resin sealing mold 200 obtained from the acquisition unit 110 .
- the resin supply pattern calculated by the calculation unit 130 has a plurality of linear paths 14 extending along the first direction X and arranged in the second direction Y.
- the plurality of linear paths 14 are inclined with respect to an axis of symmetry SM that divides the cavity 201 in line symmetry. Because the axis of symmetry SM of the cavity 201 is parallel to the first direction X, the plurality of linear paths 14 are inclined from the first direction X toward the second direction Y, and an angle of inclination of the linear path 14 from the first direction X is an acute angle.
- Each of the mutually adjacent linear paths 14 is inclined in a direction opposite to the first direction X, and one of the mutually adjacent linear paths 14 is inclined with respect to the other linear path. That is, one of the mutually adjacent linear paths 14 approaches the other linear path as the one linear path is directed to a positive direction side or a negative direction side of the first direction X.
- the end portions of the mutually adjacent linear paths 14 overlap. That is, the mutually adjacent linear paths 14 are connected to each other on the element 12 at the outermost edge of the workpiece 10 , and are formed as one continuous linear line.
- the resin supply pattern is one continuous linear line as a whole, and the resin 13 can be supplied with one stroke in the entire resin supply pattern.
- the resin supply pattern is formed as one linear pattern by repeatedly folding back the inclined linear paths so as to make the inclined linear paths to be connected at the end portions.
- an angle formed by the mutually adjacent linear paths 14 is constant regardless of the position of the workpiece 10 .
- the mutually adjacent linear paths 14 extend to the element 12 at the outermost edge of the workpiece 10 . Therefore, the resin 13 can be supplied to the entire workpiece 10 .
- a region 19 between the mutually adjacent linear paths 14 in the plurality of linear paths 14 is opened to the outside of the workpiece 10 , on a side on which one of the mutually adjacent linear paths 14 is separated from the other linear path.
- the region 19 between the mutually adjacent linear paths 14 is blocked by the linear paths 14 that are connected to each other.
- a corner portion of the resin supply pattern may have a sharp shape or an R shape.
- the resin supply pattern is described more specifically by taking a first linear path 14 A, a second linear path 14 B adjacent to the first linear path 14 A, and a third linear path 14 C adjacent to the second linear path 14 B as examples.
- the first linear path 14 A and the third linear path 14 C are inclined at an acute angle in a clockwise direction from the first direction X
- the second linear path 14 B is inclined counter clockwise from the first direction X.
- the second linear path 14 B approaches the first linear path 14 A on the negative direction side of the first direction and approaches the third linear path 14 C on the positive direction side of the first direction X.
- the end portions of the first linear path 14 A and the second linear path 14 B on the negative direction side of the first direction X are overlapped on the element 12 at the outermost edge, and the end portions of the second linear path 14 B and the third linear path 14 C on the positive direction side of the first direction X are overlapped on the element 12 at the outermost edge.
- the second linear path 14 B is connected to the first linear path 14 A at an end portion on a side approaching the first linear path 14 A (the negative direction side of the first direction X), and is connected to the third linear path 14 C at an end portion on a side approaching the third linear path 14 C (the positive direction side of the first direction X).
- the resin 13 can be supplied with one stroke along the first linear path 14 A, the second linear path 14 B, and the third linear path 14 C.
- An angle formed by the first linear path 14 A and the second linear path 14 B is substantially the same as an angle formed by the second linear path 14 B and the third linear path 14 C.
- a region 19 A between the first linear path 14 A and the second linear path 14 B is blocked on the negative direction side of the first direction X (the side on which the first linear path 14 A approaches the second linear path 14 B), and is opened to the outside of the workpiece 10 on the positive direction side of the first direction X (the side on which the first linear path 14 A is separated from the second linear path 14 B).
- a region 19 B between the second linear path 14 B and the third linear path 14 C is blocked on the positive direction side of the first direction X (the side on which the third linear path 14 C approaches the second linear path 14 B), and is opened to the outside of the workpiece 10 on the negative direction side of the first direction X (the side on which the third linear path 14 C is separated from the second linear path 14 B).
- the region 19 A between the first linear path 14 A and the second linear path 14 B is continuous in the first direction X, rather than being partitioned by other portions of the resin supply pattern.
- the region 19 B between the second linear path 14 B and the third linear path 14 C is also continuous in the first direction X.
- the drive unit 140 moves the supply unit 120 with respect to the fixed workpiece 10 along the resin supply pattern.
- the drive unit 140 includes an upper base portion 141 , a first motor 142 M, a first moving portion 142 , a second motor 143 M, a second moving portion 143 , a third motor 144 M, a third moving portion 144 and a fourth motor 122 M.
- the first moving portion 142 is configured to be movable in the first direction X relative to the upper base portion 141
- the second moving portion 143 is configured to be movable in the second direction Y relative to the first moving portion 142
- the third moving portion 144 is configured to be movable in the third direction Z relative to the second moving portion 143
- the upper base portion 141 has a rail
- the first moving portion 142 has a slider that slides on the rail of the upper base portion 141 by being driven by the first motor 142 M
- the first moving portion 142 has a rail
- the second moving portion 143 has a slider that slides on the rail of the first moving portion 142 by being driven by the second motor 143 M.
- the second moving portion 143 has a rail
- the third moving portion 144 has a slider that slides on the rail of the second moving portion 143 by being driven by the third motor 144 M.
- the syringe 121 of the supply unit 120 is fixed to the third moving portion 144 .
- the third moving portion 144 has a rail
- a pusher 122 of the supply unit 120 has a slider that slides on the rail of the third moving portion 144 by being driven by the fourth motor 122 M.
- the first motor 142 M controls the moving amount and moving speed of the supply unit 120 in the first direction X
- the second motor 143 M controls the moving amount and moving speed of the supply unit 120 in the second direction Y
- the third motor 144 M controls the moving amount and moving speed of the supply unit 120 in the third direction Z
- the fourth motor 122 M controls the discharge amount and discharge speed of the resin 13 from the supply unit 120 by controlling the moving amount and moving speed of the pusher 122 .
- the drive unit 140 is not limited to the above, and at least one of the workpiece 10 and the supply unit 120 may be moved relative to the other along the resin supply pattern.
- the drive unit 140 may fix the supply unit 120 and move the stage 150 on which the workpiece 10 is placed relative to the supply unit 120 , or may move both the workpiece 10 and the supply unit 120 .
- the workpiece 10 is placed on the stage 150 .
- the stage 150 includes, for example, a weighing scale.
- the resin supply apparatus 100 adjusts the amount of supply of the resin 13 while measuring, by the weighing scale of the stage 150 , the weight of the resin 13 supplied onto the workpiece 10 .
- the drive of the first motor 142 M to the fourth motor 122 M of the drive unit 140 is changed based on the weighing result of the weighing scale.
- the resin 13 can be supplied onto the workpiece 10 in an arbitrary shape and in an arbitrary amount by moving the syringe 121 at an arbitrary moving speed while supplying the resin 13 at an arbitrary discharge speed.
- the amount of supply within a predetermined length can be reduced even at the same discharge speed, and if the moving speed in the first direction X and the second direction Y is decreased, the amount of supply within a predetermined length can be increased even at the same discharge speed.
- the resin sealing mold 200 includes a pair of molds (a lower mold 210 and an upper mold 220 ) for sealing the workpiece 10 with a resin by using compression molding technique.
- the resin sealing mold 200 has an upper mold cavity structure in which the cavity 201 is arranged inside the upper mold 220 .
- the resin sealing mold 200 includes a sealing ring 203 (for example, an O-ring) for sealing the inside of the resin sealing mold 200 (the space between the lower mold 210 and the upper mold 220 ).
- the resin sealing apparatus 1 includes a pressure adjusting portion (for example, a vacuum pump) for adjusting the internal pressure of the resin sealing mold 200 , and a temperature adjusting portion (for example, a heater) for adjusting the internal temperature (molding temperature).
- a pressure adjusting portion for example, a vacuum pump
- a temperature adjusting portion for example, a heater
- the upper mold 220 includes a chase 221 , a cavity piece 223 , a clamper 225 surrounding the cavity piece 223 , and a chamber block 227 surrounding the clamper 225 at an interval.
- the cavity piece 223 is fixed to the chase 221 .
- the clamper 225 protrudes from the cavity piece 223 toward the lower mold 210 and constitutes the cavity 201 together with the cavity piece 223 .
- the clamper 225 is connected to the chase 221 via a spring and is configured to be slidable with respect to the cavity piece 223 . When the mold is clamped, the external region 10 A of the workpiece 10 is sandwiched between the clamper 225 and the lower mold 210 .
- a plurality of recessed air vents 226 that connect the space on the chamber block 227 side and the cavity 201 are arranged.
- the plurality of air vents 226 extend radially around the cavity 201 .
- the air in the cavity 201 is discharged through the air vents 226 between the clamped upper mold 220 and lower mold 210 .
- the air vent 226 is illustrated as having a deep depth for the sake of understanding, but in fact, the air vent 226 is formed to have a depth (for example, about several micrometres) at which the air or gas in the mold is discharged but the resin 13 does not flow out.
- Exhaust holes 228 connected to a pump to discharge air in the cavity 201 are arranged in a portion of the chamber block 227 .
- the exhaust holes 228 of the chamber block 227 extend radially around the cavity 201 .
- the sealing ring 203 is sandwiched between the chamber block 227 and the lower mold 210 .
- At least one of the plurality of air vents 226 may be arranged on an extension line of the region 19 between the mutually adjacent linear paths 14 in the plurality of linear paths 14 .
- the air vents 226 are arranged on an extension line of the region 19 A between the first linear path 14 A and the second linear path 14 B.
- FIG. 3 is a flowchart showing a method for manufacturing a resin-sealed product using the resin sealing apparatus according to the first embodiment.
- FIG. 4 is a cross-sectional view schematically showing a resin on the workpiece immediately after being set inside the resin sealing mold.
- FIG. 5 is a cross-sectional view schematically showing a resin being spread by the resin sealing mold.
- FIG. 6 is a cross-sectional view schematically showing a resin filled in the cavity by heating and pressurizing. Note that, for simplicity of explanation, the chamber block 227 is not shown in FIGS. 4 to 6 .
- the structural information of the cavity 201 is acquired (S 11 ).
- the model number of the resin sealing mold 200 used is input to the acquisition unit 110 from the external terminal, and the structural information of the cavity 201 corresponding to the model number is acquired from the database.
- the arrangement information of the elements 12 on the workpiece 10 can also be acquired from the acquisition unit 110 .
- the acquisition unit 110 acquires the arrangement information of the elements 12 arranged in the first direction X and the second direction Y by imaging the workpiece 10 and analyzing the image of the workpiece 10 .
- the resin supply pattern is calculated based on the structural information of the cavity 201 (S 12 ).
- the calculation unit 130 calculates, based on the structural information of the cavity 201 registered by the acquisition unit 110 , the resin supply pattern according to pre-registered rules (for example, the angle of inclination of the linear path 14 with respect to the axis of symmetry SM of the cavity 201 , the thickness and length of the linear path 14 , and the like), and determines desirable moving route, moving speed, and the like of the supply unit 120 .
- the structural information of the cavity 201 includes the inner peripheral dimension of the cavity, the depth of the cavity at the time of final molding, and the like.
- the resin 13 is supplied onto the workpiece 10 along the resin supply pattern (S 13 ).
- the supply unit 120 is moved relative to workpiece 10 by driving the drive unit 140 based on the resin supply pattern in a state that the workpiece 10 is positioned in the first direction X, the second direction Y, and the rotation direction centered on the Z axis.
- the supply unit 120 moves to a supply start position (one end of the resin supply pattern)
- the pinch valve 123 is opened while pushing the pusher 122 against the syringe 121 , and the supply of the resin 13 is started.
- the pinch valve 123 is closed while the pushing of the pusher 122 against the syringe 121 is stopped, and the supply of the resin 13 is ended.
- the release film RF is set in the upper mold 220 , and the workpiece 10 is set in the lower mold 210 .
- the release film RF is carried into the opened resin sealing mold 200 so as to cover the cavity 201 .
- the release film RF may be supplied, for example, by being fed out from a roll of unused film arranged in front of the mold and wound by a roll of used film arranged at the rear of the mold.
- the release film RF is adsorbed to the upper mold 220 .
- the workpiece 10 to which the resin 13 is supplied is carried into the opened resin sealing mold 200 .
- the air is discharged from the intake hole in the upper mold 220 (not shown), the workpiece 10 is adsorbed to the lower mold 210 .
- the external region 10 A of the workpiece 10 having the flip-chip mounted elements 12 and the substrate 11 is sandwiched between the clamper 225 and the lower mold 210 .
- the sealing ring 203 is sandwiched between the chamber block 227 and the lower mold 210 .
- a shallow dug portion arranged on the lower surface of the clamper 225 forms the air vent 226 between the lower mold 210 and the clamper 225 (between the workpiece 10 and the clamper 225 ), and the space (the cavity 201 ) inside the clamper 225 and the space outside the clamper 225 are connected through the air vent 226 . Accordingly, the air in the mold shown in FIG. 4 is discharged to the outside of the chamber block 227 .
- the resin 13 is spread by the cavity piece 223 in the depressurized mold. At this time, the resin 13 can enter the gap between the element 12 and the release film RF as well as the gap between the workpiece 10 and the flip-chip mounted element 12 to perform underfill. In the process of spreading the resin 13 , the resin 13 is filled in the region 19 between the mutually adjacent linear paths 14 from the side on which one linear path approaches the other linear path. On the workpiece 10 , the region 19 between the mutually adjacent linear paths 14 is not divided until the filling of the resin 13 is completed, so that air can be discharged from the air vent 226 .
- the cavity piece 223 is relatively lowered by performing mold clamping, and as shown in FIG. 6 , the resin 13 spreads to the whole part the cavity 201 , and fine spaces such as the gap between the element 12 and the substrate 11 or the like are also filled with the resin 13 . Accordingly, the resin 13 is filled up to the front of the air vent 226 .
- the resin 13 is filled (molded) in the cavity, and at the same time, the gap between the workpiece 10 and the flip-chip mounted element 12 is underfilled with the resin 13 .
- the resin 13 is cured by continuing heating and pressurizing (curing) for a predetermined time (S 16 ). In this way, the sealing of the workpiece 10 with a resin is completed.
- the resin supply pattern calculated by the calculation unit 130 based on the shape of the cavity 201 has a plurality of the linear paths 14 , and one of the mutually adjacent linear paths 14 is inclined with respect to the axis of symmetry SM of the cavity 201 , and the other linear path is inclined with respect to the one linear path.
- the region 19 between the mutually adjacent linear paths 14 is opened to the outside of the workpiece 10 at least on the side on which one of the adjacent linear paths 14 is separated from the other linear path. Accordingly, when the resin 13 is spread in the resin sealing mold 200 so as to seal the workpiece 10 with a resin, the air remaining inside the resin sealing mold 200 and the gas generated from the resin 13 can be discharged through the region 19 .
- the second linear path 14 B located between the first linear path 14 A and the third linear path 14 C is connected to an end portion of the first linear path 14 A on one end portion and is connected to an end portion of the third linear path 14 C on the other end portion.
- the resin supply pattern is one continuous linear line. Accordingly, by having a shape in which adjacent linear paths are not connected to each other at least on either end portion side, the resin 13 can be supplied with one stroke while discharging air. Therefore, the resin 13 can be efficiently supplied onto the workpiece 10 by continuously discharging the resin 13 without the need for stopping the discharge of the resin 13 during the supply.
- the resin supply apparatus 100 may include the acquisition unit 110 for acquiring the shape of the workpiece 10 , the arrangement information of the elements 12 , and the like.
- the calculation unit 130 may calculate the resin supply pattern in consideration of the shape of the workpiece 10 and the arrangement information of the elements 12 . Accordingly, the resin 13 can efficiently enter the fine space such as a gap between the substrate 11 and the element 12 , or the like, and the occurrence of sealing failure can be suppressed.
- the amount of supply of the resin 13 may be adjusted by taking into account the arrangement information of the elements 12 .
- the resin supply pattern may be calculated so that the amount of supply of the resin 13 in a region having a small ratio of the occupied area per unit area (hereinafter referred to as “area ratio”) of the elements 12 on the workpiece 10 is greater than the amount of supply of the resin 13 in a region having a large area ratio of the elements 12 . Accordingly, it is possible to suppress occurrence of defects caused by a shortage of the resin 13 when the resin 13 is heated and pressurized.
- the mutually adjacent linear paths 14 extend to the element 12 at the outermost edge of the workpiece 10 and are connected to each other on the element 12 at the outermost edge. Accordingly, as compared with a resin supply pattern in which the mutually adjacent linear paths 14 are connected to each other on an element 12 which is on the inner side of the element 12 at the outermost edge, it is possible to suppress occurrence of defects caused by the shortage of the resin 13 in a space over the external region 10 B of the workpiece 10 in which the required amount of the resin 13 is large due to the absence of the elements 12 .
- the air vent 226 is arranged on the extension line of the region 19 between the mutually adjacent linear paths 14 . Accordingly, the air vent is not blocked until the region 19 between the mutually adjacent linear paths 14 is completely filled with the resin 13 , and air can be discharged from the inside of the resin sealing mold 200 .
- the acquisition unit 110 acquires the arrangement information of the elements 12 and the structural information of the cavity 201 .
- the acquisition unit 110 may acquire only the structural information of the cavity 201 without acquiring the arrangement information of the elements 12 .
- the acquisition unit for acquiring the arrangement information of the elements 12 and the acquisition unit for acquiring the structural information of the cavity 201 may be arranged separately.
- the resin supply pattern is not limited to the above. It is sufficient that at least one of the mutually adjacent linear paths 14 is inclined with respect to the axis of symmetry SM of the cavity 201 , and one of the mutually adjacent linear paths 14 is inclined with respect to the other linear path.
- the mutually adjacent linear paths 14 may be connected to each other on the external region 10 B of the workpiece 10 .
- the mutually adjacent linear paths 14 may also extend to the element 12 which is on the inner side of the element 12 at the outermost edge of the workpiece 10 except for extending to the element 12 at the outermost edge, and the mutually adjacent linear paths 14 may be connected to each other on the element 12 which is on the inner side of the element 12 at the outermost edge.
- the mutually adjacent linear paths 14 may be separated from each other, and the region 19 between the mutually adjacent linear paths 14 may be opened to the outside of the workpiece 10 on both the positive direction side and the negative direction side of the first direction X.
- An angle formed by the mutually adjacent linear paths 14 at the center of the workpiece 10 in the second direction Y may be different from an angle formed by the mutually adjacent linear paths 14 at an end portion of the workpiece 10 in the second direction Y.
- FIGS. 7 to 12 show schematic plan views of resin supply patterns according to different variation examples.
- external regions 20 A, 30 A, 40 A, 50 A, 60 A, 70 A are respectively referred to a region sandwiched by the resin sealing mold;
- external regions 20 B, 30 B, 40 B, 50 B, 60 B, 70 B are respectively referred to a region closer to the element 22 , 32 , 42 , 52 , 62 , 72 side than the external regions 20 A, 30 A, 40 A, 50 A, 60 A, 70 A;
- reference numerals 21 , 31 , 41 , 51 , 61 , 71 represent a substrate;
- reference numerals 23 , 33 , 43 , 53 , 63 , 73 represent a resin; and
- reference numerals 29 , 39 , 49 , 59 , 69 , 79 represent region between the linear paths.
- one of the mutually adjacent linear paths 24 in the plurality of linear paths 24 is inclined with respect to the axis of symmetry SM of the cavity, and the other linear path is inclined with respect to the one linear path and parallel to the axis of symmetry SM of the cavity.
- the relay path 35 has, for example, an arc shape.
- the relay path 35 is not limited to the above as long as the relay path 35 does not form a constriction in the region 39 between the mutually adjacent linear paths 34 and does not partition the region 39 .
- the relay path 35 is linear and may form a sharp shape at a connection portion with the linear path 34 .
- the mutually adjacent linear paths 44 are separated from each other.
- a region 49 between the mutually adjacent linear paths 44 is opened to the outside of the workpiece 40 on a side on which the other linear path approaches one of the mutually adjacent linear paths 44 . That is, the region 49 between the mutually adjacent linear paths 44 is opened to the outside of the workpiece 40 on both the positive direction side and negative direction side of the first direction X that is parallel to the axis of symmetry SM of the cavity.
- elements 52 A and elements 52 B larger than the elements 52 A are arranged on a workpiece 50 .
- the elements 52 A are shorter than the elements 52 B, and the area ratio of the elements 52 A is smaller than the area ratio of the elements 52 B.
- a region where the elements 52 A are arranged requires more resin 53 than a region where the elements 52 B are arranged. Therefore, by making a linear path 54 extending over the region where the elements 52 A are arranged thicker than a linear path 54 extending over the region where the elements 52 B are arranged, occurrence of defects caused by poor filling can be suppressed.
- an angle formed by mutually adjacent linear paths 64 at the center of the workpiece 60 in the second direction Y is larger than an angle formed by the mutually adjacent linear paths 64 at an end portion of the workpiece 60 in the second direction Y. Accordingly, by making the amount of supply of the resin 63 at the end portion of the workpiece 60 that has a large external region 60 B larger than the amount of supply of the resin 63 at the center of the workpiece 60 that has a small external region 60 B, occurrence of defects caused by poor filling can be suppressed.
- an angle formed by the mutually adjacent linear paths 74 at the center of the workpiece 70 in the second direction Y is smaller than an angle formed by the mutually adjacent linear paths 74 at an end portion of the workpiece 70 in the second direction Y. Accordingly, the width of the open end of the region 79 between the mutually adjacent linear paths 74 at the center of the workpiece 70 is substantially the same as the width of the open end of the region 79 between the mutually adjacent linear paths 74 at the end portion of the workpiece 70 .
- the occurrence of defects caused by poor filling can be suppressed by appropriately adjusting the width of the region 79 between the mutually adjacent linear paths 74 .
- FIG. 13 is a variation example of a workpiece, and shows a rectangular workpiece 10 for use in panel level packaging (PLP).
- a substrate 81 (workpiece 80 ) has a rectangular shape having a pair of short sides and a pair of long sides.
- a linear path 84 extends along the short side of the substrate 81 , and more specifically, the linear path 84 is inclined with respect to the short side of the substrate 81 and is arranged along the long side of the substrate 81 .
- the length of a region 89 between the mutually adjacent linear paths 84 is shortened, and the region 89 is blocked due to the contact between the resins 13 in the linear path 84 during the process of spreading a resin 83 , and thus air can be suppressed from being caught in the resin 83 .
- the variation example shown in FIG. 13 can be appropriately applied to each of the above resin supply patterns.
- external regions 80 A is referred to a region sandwiched by the resin sealing mold; external regions 80 B is referred to a region closer to the element 82 side than the external region 80 A.
- FIG. 14 is a diagram schematically showing a configuration of a resin sealing apparatus according to the second embodiment.
- the object to be coated is a release film RF that delivers the supplied resin 13 to the workpiece 10 .
- the release film RF is placed on the stage 150 , and the drive unit 140 moves the supply unit 120 based on the information about the shape of a cavity 901 acquired by the acquisition unit 110 , and the resin 13 is supplied onto the release film RF.
- a resin sealing mold 900 has a lower mold cavity structure which includes a lower mold 910 that has the cavity 901 and an upper mold 920 .
- the release film RF is set in the lower mold 910 , and the workpiece 10 is set in the upper mold 920 .
- the lower mold 910 has a cavity piece 913 and a clamper 915 that constitutes the cavity 901 , and an air vent 916 is arranged on the upper surface of the clamper 915 (the surface facing the upper mold 920 ) when the mold is clamped.
- FIG. 15 is a flowchart showing a method for manufacturing a resin-sealed product using the resin sealing apparatus according to the second embodiment.
- the structural information of the cavity 901 is acquired (S 91 ).
- the resin supply pattern is calculated based on the structural information of the cavity 901 (S 92 ).
- the resin 13 is supplied onto the release film RF along the resin supply pattern (S 93 ).
- the release film RF is set in the lower mold 910 , and the workpiece 10 is set in the upper mold 920 (S 94 ).
- the release film RF and the workpiece 10 are positioned in the rotation directions centered on the first direction X, the second direction Y, and the Z axis, which can obtain effects similar to those obtained by supplying the resin 13 applied on the release film RF to a position corresponding to the elements 12 on the workpiece 10 .
- the resin 13 is brought into contact with the elements 12 and the substrate 11 while the air is discharged from the chamber of the mold, and the resin 13 is spread by mold clamping (S 95 ).
- the resin 13 on the release film RF set in the lower mold 910 is pressed against the workpiece 10 set in the upper mold 920 , and the resin 13 is spread while being sandwiched between the workpiece 10 and the release film RF.
- any one or an appropriate combination of a plurality of the resin supply patterns described in the first embodiment can be applied.
- a resin supply apparatus is a resin supply apparatus for supplying a resin onto an object to be coated which is arranged in a lower mold of a resin sealing mold.
- the resin supply apparatus includes: a calculation unit for calculating a resin supply pattern based on the shape of a cavity of the resin sealing mold; and a supply unit for supplying a resin to the object to be coated along the resin supply pattern.
- the resin supply pattern has a plurality of linear paths. One of mutually adjacent linear paths in the plurality of linear paths is inclined with respect to an axis of symmetry that divides the cavity in line symmetry, and the other one of the mutually adjacent linear paths in the plurality of linear paths is inclined with respect to the one linear path. A region between the mutually adjacent linear paths in the plurality of linear paths is opened to the outside of the object to be coated, at least on a side on which the other linear path is separated from the one linear path.
- the region between the adjacent linear paths functions as a flow passage for discharging air.
- the resin when the resin is spread on the object to be coated, the resin is gradually filled in the region between the mutually adjacent linear paths from a side on which the other linear path approaches one linear path toward a side on which the other linear path is separated from the one linear path.
- a region surrounded by the resin in all directions is not generated, and the region between the adjacent linear paths functions as a flow passage for discharging air. Therefore, air remaining in the region between the adjacent linear paths and gas generated from the resin can be suppressed from being caught in the resin, and occurrence of defects caused by poor filling can be suppressed.
- the plurality of linear paths have a first linear path, a second linear path adjacent to the first linear path, and a third linear path adjacent to the second linear path.
- the second linear path may be connected to the first linear path at an end portion on a side approaching the first linear path, and may be connected to the third linear path at an end portion on a side approaching the third linear path.
- the resin supply pattern may be one continuous linear line.
- a corner portion of the resin supply pattern may have an R shape.
- the region between the mutually adjacent linear paths in the plurality of linear paths may be opened to the outside of the object to be coated on a side on which the other linear path approaches the one linear path.
- the object to be coated may be a workpiece to be sealed using a supplied resin.
- the object to be coated may be a release film that delivers supplied resin to a workpiece.
- the resin supply apparatus may further include an acquisition unit for acquiring the shape of the cavity of the resin sealing mold and providing the acquired information to the calculation unit.
- the calculation unit may calculate the resin supply pattern in consideration of the shape of a workpiece sealed by the resin supplied to the object to be coated.
- the calculation unit may calculate the resin supply pattern in consideration of arrangement information of elements on the workpiece sealed by the supplied resin.
- the axis of symmetry may extend in a direction in which the elements are aligned.
- the resin supply pattern may be calculated so that the amount of supply of a resin in a region in the workpiece having a small area ratio of the elements is larger than the amount of supply of a resin in a region having a large area ratio of the elements.
- the plurality of linear paths include a set of linear paths adjacent to each other at the center of the workpiece and another set of linear paths adjacent to each other at an end portion of the workpiece, and an angle formed by the set of linear paths may be larger than an angle formed by the other set of linear paths.
- the plurality of linear paths includes a set of linear paths adjacent to each other at the center of the workpiece and another set of linear paths adjacent to each other at an end portion of the workpiece, and an angle formed by the set of linear paths may be smaller than an angle formed by the other set of linear paths.
- a resin sealing apparatus includes the resin supply apparatus according to any one of the above aspects, and a resin sealing mold for sealing elements on a workpiece with a resin.
- the resin sealing mold has a cavity in which a resin is filled and a plurality of air vents for discharging air from the cavity.
- the object to be coated is arranged in the resin sealing mold so that at least one of the plurality of air vents is located on an extension line of a region between mutually adjacent linear paths in the plurality of linear paths.
- the air vents arranged on the extension line of the region between the linear paths are not blocked until the region between the mutually adjacent linear paths is completely filled with a resin. Therefore, in the resin sealing mold, the air remaining in the region between the adjacent linear paths and the gas generated from the resin can be suppressed from being caught in the resin, and the occurrence of defects caused by poor filling can be suppressed.
- a method for manufacturing a resin-sealed product includes supplying a resin onto an object to be coated which is arranged in a lower mold of a resin sealing mold.
- the method for manufacturing a resin-sealed product includes: calculating a resin supply pattern based on the shape of a cavity of the resin sealing mold; and supplying a resin to the object to be coated along the resin supply pattern.
- the resin supply pattern has a plurality of linear paths.
- One of the mutually adjacent linear paths in the plurality of linear paths is inclined with respect to an axis of symmetry that divides the cavity in line symmetry, and the other one of the mutually adjacent linear paths in the plurality of linear paths is inclined with respect to the one linear path.
- a region between the mutually adjacent linear paths in the plurality of linear paths is opened to the outside of the object to be coated, at least on a side on which the other linear path is separated from the one linear path
- the region between the adjacent linear paths functions as a flow passage for discharging air.
- the resin when the resin is spread on the object to be coated, the resin is gradually filled in the region between the mutually adjacent linear paths from a side on which the other linear path approaches one linear path toward a side on which the other linear path is separated from the one linear path.
- a region surrounded by the resin in all directions is not generated, and the region between the adjacent linear paths functions as a flow passage for discharging air. Therefore, the air remaining in the region between the adjacent linear paths and the gas generated from the resin can be suppressed from being caught in the resin, and occurrence of defects caused by poor filling can be suppressed.
- the object to be coated may be a workpiece to be sealed using a supplied resin.
- the object to be coated may be a release film that delivers supplied resin to a workpiece.
- the present invention it is possible to provide a resin supply apparatus, a resin sealing apparatus, and a method for manufacturing a resin-sealed product, which can suppress occurrence of defects.
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Abstract
Description
- This application claims the priority benefit of Japanese Patent Application No. 2020-191055, filed on Nov. 17, 2020. The entirety of the above-mentioned patent application is hereby incorporated by reference herein and made a part of this specification.
- The present invention relates to a resin supply apparatus, a resin sealing apparatus, and a method for manufacturing a resin-sealed product.
- It is known that a workpiece is resin-sealed by compression molding. A resin sealing apparatus using the compression molding generally includes a resin supply apparatus for supplying a resin onto a workpiece or a release film, and a resin sealing mold that spreads the resin on the workpiece and heats and pressurizes the resin.
- Here,
Patent literature 1 discloses that a resin supply pattern supplied by a resin supply apparatus is formed in a spiral shape or a lattice shape in a vacuum chamber. - Patent literature 1: Japanese Patent Laid-Open No. 2018-134846
- However, even when the resin is supplied in the vacuum chamber as in the resin supply apparatus described in
Patent literature 1, if air or gas generated from the resin is present in a mold for molding, the air or gas may be caught in the resin, which may cause defects such as air traps or voids caused by poor filling. - The present invention provides a resin supply apparatus, a resin sealing apparatus, and a method for manufacturing a resin-sealed product, which can suppress occurrence of defects.
- A resin supply apparatus according to one aspect of the present invention is a resin supply apparatus for supplying a resin onto an object to be coated which is arranged in a lower mold of a resin sealing mold. The resin supply apparatus includes: a calculation unit for calculating a resin supply pattern based on the shape of a cavity of the resin sealing mold; and a supply unit for supplying a resin to the object to be coated along the resin supply pattern. The resin supply pattern has a plurality of linear paths. One of mutually adjacent linear paths in the plurality of linear paths is inclined with respect to an axis of symmetry that divides the cavity in line symmetry, and the other one of the mutually adjacent linear paths in the plurality of linear paths is inclined with respect to the one linear path. A region between the mutually adjacent linear paths in the plurality of linear paths is opened to the outside of the object to be coated, at least on a side on which the other linear path is separated from the one linear path.
- A resin sealing apparatus according to one aspect of the present invention includes the resin supply apparatus according to any one of the above aspects, and a resin sealing mold for sealing elements on a workpiece with a resin. The resin sealing mold has a cavity in which a resin is filled and a plurality of air vents for discharging air from the cavity. The object to be coated is arranged in the resin sealing mold so that at least one of the plurality of air vents is located on an extension line of a region between mutually adjacent linear paths in the plurality of linear paths.
- A method for manufacturing a resin-sealed product according to one aspect of the present invention includes supplying a resin onto an object to be coated which is arranged in a lower mold of a resin sealing mold. The method for manufacturing a resin-sealed product includes: calculating a resin supply pattern based on the shape of a cavity of the resin sealing mold; and supplying a resin to the object to be coated along the resin supply pattern. The resin supply pattern has a plurality of linear paths. One of the mutually adjacent linear paths in the plurality of linear paths is inclined with respect to an axis of symmetry that divides the cavity in line symmetry, and the other one of the mutually adjacent linear paths in the plurality of linear paths is inclined with respect to the one linear path. A region between the mutually adjacent linear paths in the plurality of linear paths is opened to the outside of the object to be coated, at least on a side on which the other linear path is separated from the one linear path
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FIG. 1 is a diagram schematically showing a configuration of a resin sealing apparatus according to a first embodiment. -
FIG. 2 is a plan view schematically showing a workpiece and a resin supply pattern in a resin sealing mold. -
FIG. 3 is a flowchart showing a method for manufacturing a resin-sealed product using the resin sealing apparatus according to the first embodiment. -
FIG. 4 is a cross-sectional view schematically showing a resin on a workpiece immediately after being set inside the resin sealing mold. -
FIG. 5 is a cross-sectional view schematically showing a resin being spread by the resin sealing mold. -
FIG. 6 is a cross-sectional view schematically showing a resin filled in a cavity by heating and pressurizing. -
FIG. 7 is a plan view schematically showing a resin supply pattern according to a variation example. -
FIG. 8 is a plan view schematically showing a resin supply pattern according to another variation example. -
FIG. 9 is a plan view schematically showing a resin supply pattern according to another variation example. -
FIG. 10 is a plan view schematically showing a resin supply pattern according to another variation example. -
FIG. 11 is a plan view schematically showing a resin supply pattern according to another variation example. -
FIG. 12 is a plan view schematically showing a resin supply pattern according to another variation example. -
FIG. 13 is a plan view schematically showing a resin supply pattern according to another variation example. -
FIG. 14 is a diagram schematically showing a configuration of a resin sealing apparatus according to a second embodiment. -
FIG. 15 is a flowchart showing a method for manufacturing a resin-sealed product using the resin sealing apparatus according to the second embodiment. - Hereinafter, embodiments of the present invention are described with reference to the drawings. The drawings of each embodiment are for purposes of illustration, the dimensions and shape of each part are schematically shown, and the technical scope of the present invention should not be interpreted as being limited to the embodiments.
- A configuration of a
resin sealing apparatus 1 according to an embodiment of the present invention is described with reference toFIGS. 1 and 2 .FIG. 1 is a diagram schematically showing a configuration of a resin sealing apparatus according to a first embodiment.FIG. 2 is a plan view schematically showing a workpiece and a resin supply pattern in a resin sealing mold. - Each drawing may be assigned with a Cartesian coordinate system including X-axis, Y-axis and Z-axis for convenience to clarify the relationship between the drawings and to help understand the positional relationship between members. The direction of the Z-axis arrow is an upward direction, and the direction opposite to the direction of the Z-axis arrow is a downward direction.
- The
resin sealing apparatus 1 is an apparatus used for resin-sealing (molding) aworkpiece 10 with aresin 13. Theresin sealing apparatus 1 includes aresin supply apparatus 100 that applies (supplies) theresin 13 for resin sealing onto an object to be coated (for example, theworkpiece 10 or a release film RF), and aresin sealing mold 200 that heats and pressurizes the resin for curing. Theworkpiece 10 includes, for example, asubstrate 11 andelements 12 arranged on thesubstrate 11, and theelements 12 are arranged in a first direction X and a second direction Y, respectively. In the following description, in a plan view of theworkpiece 10 from a positive direction (hereinafter referred to as “upward direction”) side of a third direction Z, a region from an edge of thesubstrate 11 to anelement 12 at the outermost edge is referred to as “external region of theworkpiece 10”. In the external region of theworkpiece 10, a region sandwiched by theresin sealing mold 200 is referred to as “external region 10A”, and a region closer to theelement 12 side than theexternal region 10A is referred to as “external region 10B”. - The configurations of the
substrate 11 and theelement 12 are not limited. As an example, thesubstrate 11 may be a semiconductor wafer, and theelement 12 may be a semiconductor chip flip-chip mounted on thesubstrate 11. In this case, a gap is present between thesubstrate 11 and theelement 12 when theresin 13 is supplied, but the resin is filled in this gap by heating and pressurizing. The present invention is not limited to this aspect, and may also be applied when, for example, theelement 12 is simply mounted on thesubstrate 11 without a gap therebetween, or when an underfill resin is filled between thesubstrate 11 and theelement 12. In addition, theelement 12 may be a multilayer body in which a plurality of semiconductor chips are laminated at intervals in the third direction Z, or may be an element other than a semiconductor element (MEMS device, electronic device, or the like). The arrangement of theelement 12 on thesubstrate 11 is not limited. For example, theelement 12 may be wire-bonded to thesubstrate 11, or may be detachably fixed to thesubstrate 11. Thesubstrate 11 may be a resin substrate or a glass substrate, or may be an interposer substrate, a lead frame, a carrier plate with an adhesive sheet, or the like. In a plan view of the workpiece 10 from above, for example, the planar shape of thesubstrate 11 is circular and the planar shape of theelement 12 is rectangular, but the planar shapes of thesubstrate 11 and theelement 12 are not limited thereto. For example, the planar shape of the substrate may be rectangular, and the planar shape of the element may be polygonal or circular. Two or more types of elements having different shapes may be arranged on the workpiece. - The
resin supply apparatus 100 includes anacquisition unit 110, asupply unit 120, acalculation unit 130, adrive unit 140, and astage 150. - The
acquisition unit 110 acquires structural information (for example, information about the shape, size, and the like of a cavity 201) of thecavity 201 constituting an internal space of theresin sealing mold 200 that is filled with theresin 13. Theacquisition unit 110 acquires the structural information by input from, for example, an external terminal or the like. The method for acquiring the structural information of thecavity 201 is not limited to the above method. For example, theacquisition unit 110 may read a code or the like assigned to theresin sealing mold 200, and thereby acquire structural information corresponding to the code or the like from a database recorded in advance. - The
acquisition unit 110 acquires arrangement information (for example, information about the shape, size, arrangement direction, number, interval, and the like of the elements 12) of theelements 12 on the workpiece 10 (more specifically, the substrate 11) in addition to the structural information of thecavity 201. For example, theacquisition unit 110 acquires the arrangement information of theelements 12 by imaging theworkpiece 10 and analyzing the image of theworkpiece 10. Theacquisition unit 110 may acquire the arrangement information for each workpiece, or may acquire the arrangement information for each lot having a plurality of workpieces. Note that, the method for acquiring the arrangement information of theelements 12 is not limited to the above method. For example, theacquisition unit 110 may read a code or the like assigned to theworkpiece 10, and thereby acquire arrangement information corresponding to the code or the like from a database recorded in advance. In addition, theacquisition unit 110 may acquire the arrangement information by inputting from the external terminal or the like. Additionally, theacquisition unit 110 may detect a position of a V notch or the like in theworkpiece 10 such as a wafer to acquire the orientation of theworkpiece 10. Theresin supply apparatus 100 can also supply theresin 13 described later after adjusting the orientation of theworkpiece 10 based on the orientation of theworkpiece 10 acquired by theacquisition unit 110. - The
supply unit 120 supplies theresin 13 onto the object to be coated (theworkpiece 10 or the release film RF). Thesupply unit 120 is, for example, a dispenser for discharging theliquid resin 13. Thesupply unit 120 includes asyringe 121 in which theresin 13 is stored, a pusher (piston) 122 that is inserted inside thesyringe 121 and can push out theresin 13, and apinch valve 123 that opens or closes a nozzle at the front end of thesyringe 121. Thesupply unit 120 is provided with a configuration in which the usedsyringe 121 can be replaced with anew syringe 121 when theresin 13 stored in thesyringe 121 is used up. Note that, thesupply unit 120 is not limited to the above configuration, and may include a switching valve instead of thepinch valve 123. In addition, thesupply unit 120 may be configured to prepare two liquids separately and mix and supply them on site. For example, thesupply unit 120 may be a feeder for discharging powdery and granular resin. - The
calculation unit 130 calculates the resin supply pattern (the shape of theresin 13 applied on the object to be coated) based on the shape of thecavity 201 of theresin sealing mold 200 obtained from theacquisition unit 110. The resin supply pattern calculated by thecalculation unit 130 has a plurality oflinear paths 14 extending along the first direction X and arranged in the second direction Y. - As shown in
FIG. 2 , in a plan view of the workpiece 10 from above (hereinafter, simply referred to as “in a plan view”), the plurality oflinear paths 14 are inclined with respect to an axis of symmetry SM that divides thecavity 201 in line symmetry. Because the axis of symmetry SM of thecavity 201 is parallel to the first direction X, the plurality oflinear paths 14 are inclined from the first direction X toward the second direction Y, and an angle of inclination of thelinear path 14 from the first direction X is an acute angle. Each of the mutually adjacentlinear paths 14 is inclined in a direction opposite to the first direction X, and one of the mutually adjacentlinear paths 14 is inclined with respect to the other linear path. That is, one of the mutually adjacentlinear paths 14 approaches the other linear path as the one linear path is directed to a positive direction side or a negative direction side of the first direction X. - For example, on the side on which one of the mutually adjacent
linear paths 14 approaches the other linear path, the end portions of the mutually adjacentlinear paths 14 overlap. That is, the mutually adjacentlinear paths 14 are connected to each other on theelement 12 at the outermost edge of theworkpiece 10, and are formed as one continuous linear line. The resin supply pattern is one continuous linear line as a whole, and theresin 13 can be supplied with one stroke in the entire resin supply pattern. In other words, the resin supply pattern is formed as one linear pattern by repeatedly folding back the inclined linear paths so as to make the inclined linear paths to be connected at the end portions. In addition, an angle formed by the mutually adjacentlinear paths 14 is constant regardless of the position of theworkpiece 10. Additionally, the mutually adjacentlinear paths 14 extend to theelement 12 at the outermost edge of theworkpiece 10. Therefore, theresin 13 can be supplied to theentire workpiece 10. - In a plan view of the
workpiece 10, aregion 19 between the mutually adjacentlinear paths 14 in the plurality oflinear paths 14 is opened to the outside of theworkpiece 10, on a side on which one of the mutually adjacentlinear paths 14 is separated from the other linear path. On a side opposite to the side on which theregion 19 is opened to the outside ofworkpiece 10, theregion 19 between the mutually adjacentlinear paths 14 is blocked by thelinear paths 14 that are connected to each other. - A corner portion of the resin supply pattern may have a sharp shape or an R shape.
- The resin supply pattern is described more specifically by taking a first
linear path 14A, a secondlinear path 14B adjacent to the firstlinear path 14A, and a thirdlinear path 14C adjacent to the secondlinear path 14B as examples. In a plan view of theworkpiece 10, the firstlinear path 14A and the thirdlinear path 14C are inclined at an acute angle in a clockwise direction from the first direction X, and the secondlinear path 14B is inclined counter clockwise from the first direction X. The secondlinear path 14B approaches the firstlinear path 14A on the negative direction side of the first direction and approaches the thirdlinear path 14C on the positive direction side of the first direction X. The end portions of the firstlinear path 14A and the secondlinear path 14B on the negative direction side of the first direction X are overlapped on theelement 12 at the outermost edge, and the end portions of the secondlinear path 14 B and the thirdlinear path 14C on the positive direction side of the first direction X are overlapped on theelement 12 at the outermost edge. In other words, the secondlinear path 14B is connected to the firstlinear path 14A at an end portion on a side approaching the firstlinear path 14A (the negative direction side of the first direction X), and is connected to the thirdlinear path 14C at an end portion on a side approaching the thirdlinear path 14C (the positive direction side of the first direction X). Theresin 13 can be supplied with one stroke along the firstlinear path 14A, the secondlinear path 14B, and the thirdlinear path 14C. An angle formed by the firstlinear path 14A and the secondlinear path 14B is substantially the same as an angle formed by the secondlinear path 14B and the thirdlinear path 14C. - In a plan view of the
workpiece 10, aregion 19A between the firstlinear path 14A and the secondlinear path 14B is blocked on the negative direction side of the first direction X (the side on which the firstlinear path 14A approaches the secondlinear path 14B), and is opened to the outside of theworkpiece 10 on the positive direction side of the first direction X (the side on which the firstlinear path 14A is separated from the secondlinear path 14B). In contrast, aregion 19B between the secondlinear path 14B and the thirdlinear path 14C is blocked on the positive direction side of the first direction X (the side on which the thirdlinear path 14C approaches the secondlinear path 14B), and is opened to the outside of theworkpiece 10 on the negative direction side of the first direction X (the side on which the thirdlinear path 14C is separated from the secondlinear path 14B). Theregion 19A between the firstlinear path 14A and the secondlinear path 14B is continuous in the first direction X, rather than being partitioned by other portions of the resin supply pattern. Theregion 19B between the secondlinear path 14B and the thirdlinear path 14C is also continuous in the first direction X. - The
drive unit 140 moves thesupply unit 120 with respect to the fixedworkpiece 10 along the resin supply pattern. Specifically, thedrive unit 140 includes anupper base portion 141, afirst motor 142M, a first movingportion 142, asecond motor 143M, a second movingportion 143, athird motor 144M, a third movingportion 144 and afourth motor 122M. - The first moving
portion 142 is configured to be movable in the first direction X relative to theupper base portion 141, the second movingportion 143 is configured to be movable in the second direction Y relative to the first movingportion 142, and the third movingportion 144 is configured to be movable in the third direction Z relative to the second movingportion 143. Specifically, theupper base portion 141 has a rail, and the first movingportion 142 has a slider that slides on the rail of theupper base portion 141 by being driven by thefirst motor 142M. The first movingportion 142 has a rail, and the second movingportion 143 has a slider that slides on the rail of the first movingportion 142 by being driven by thesecond motor 143M. The second movingportion 143 has a rail, and the third movingportion 144 has a slider that slides on the rail of the second movingportion 143 by being driven by thethird motor 144M. Thesyringe 121 of thesupply unit 120 is fixed to the third movingportion 144. The third movingportion 144 has a rail, and apusher 122 of thesupply unit 120 has a slider that slides on the rail of the third movingportion 144 by being driven by thefourth motor 122M. That is, thefirst motor 142M controls the moving amount and moving speed of thesupply unit 120 in the first direction X, thesecond motor 143M controls the moving amount and moving speed of thesupply unit 120 in the second direction Y, and thethird motor 144M controls the moving amount and moving speed of thesupply unit 120 in the third direction Z. Besides, thefourth motor 122M controls the discharge amount and discharge speed of theresin 13 from thesupply unit 120 by controlling the moving amount and moving speed of thepusher 122. - Moreover, the
drive unit 140 is not limited to the above, and at least one of theworkpiece 10 and thesupply unit 120 may be moved relative to the other along the resin supply pattern. For example, thedrive unit 140 may fix thesupply unit 120 and move thestage 150 on which theworkpiece 10 is placed relative to thesupply unit 120, or may move both theworkpiece 10 and thesupply unit 120. - The
workpiece 10 is placed on thestage 150. Thestage 150 includes, for example, a weighing scale. Theresin supply apparatus 100 adjusts the amount of supply of theresin 13 while measuring, by the weighing scale of thestage 150, the weight of theresin 13 supplied onto theworkpiece 10. Specifically, the drive of thefirst motor 142M to thefourth motor 122M of thedrive unit 140 is changed based on the weighing result of the weighing scale. With the above configuration, theresin 13 can be supplied onto theworkpiece 10 in an arbitrary shape and in an arbitrary amount by moving thesyringe 121 at an arbitrary moving speed while supplying theresin 13 at an arbitrary discharge speed. For example, if the moving speed in the first direction X and the second direction Y is increased, the amount of supply within a predetermined length can be reduced even at the same discharge speed, and if the moving speed in the first direction X and the second direction Y is decreased, the amount of supply within a predetermined length can be increased even at the same discharge speed. - The
resin sealing mold 200 includes a pair of molds (alower mold 210 and an upper mold 220) for sealing theworkpiece 10 with a resin by using compression molding technique. In the present embodiment, theresin sealing mold 200 has an upper mold cavity structure in which thecavity 201 is arranged inside theupper mold 220. In addition, theresin sealing mold 200 includes a sealing ring 203 (for example, an O-ring) for sealing the inside of the resin sealing mold 200 (the space between thelower mold 210 and the upper mold 220). Moreover, although not shown, theresin sealing apparatus 1 includes a pressure adjusting portion (for example, a vacuum pump) for adjusting the internal pressure of theresin sealing mold 200, and a temperature adjusting portion (for example, a heater) for adjusting the internal temperature (molding temperature). - The
upper mold 220 includes achase 221, acavity piece 223, aclamper 225 surrounding thecavity piece 223, and achamber block 227 surrounding theclamper 225 at an interval. Thecavity piece 223 is fixed to thechase 221. Theclamper 225 protrudes from thecavity piece 223 toward thelower mold 210 and constitutes thecavity 201 together with thecavity piece 223. Theclamper 225 is connected to thechase 221 via a spring and is configured to be slidable with respect to thecavity piece 223. When the mold is clamped, theexternal region 10A of theworkpiece 10 is sandwiched between theclamper 225 and thelower mold 210. On the lower surface of the clamper 225 (the surface facing the lower mold 210), a plurality of recessedair vents 226 that connect the space on thechamber block 227 side and thecavity 201 are arranged. The plurality ofair vents 226 extend radially around thecavity 201. The air in thecavity 201 is discharged through theair vents 226 between the clampedupper mold 220 andlower mold 210. Note that, in each drawing, theair vent 226 is illustrated as having a deep depth for the sake of understanding, but in fact, theair vent 226 is formed to have a depth (for example, about several micrometres) at which the air or gas in the mold is discharged but theresin 13 does not flow out. Exhaust holes 228 connected to a pump to discharge air in thecavity 201 are arranged in a portion of thechamber block 227. The exhaust holes 228 of thechamber block 227 extend radially around thecavity 201. The sealingring 203 is sandwiched between thechamber block 227 and thelower mold 210. - In the clamped
resin sealing mold 200, at least one of the plurality ofair vents 226 may be arranged on an extension line of theregion 19 between the mutually adjacentlinear paths 14 in the plurality oflinear paths 14. For example, as shown inFIG. 2 , the air vents 226 are arranged on an extension line of theregion 19A between the firstlinear path 14A and the secondlinear path 14B. - Next, a method for manufacturing a resin-sealed product using the
resin sealing apparatus 1 according to the present embodiment is described with reference toFIGS. 3 to 6 .FIG. 3 is a flowchart showing a method for manufacturing a resin-sealed product using the resin sealing apparatus according to the first embodiment.FIG. 4 is a cross-sectional view schematically showing a resin on the workpiece immediately after being set inside the resin sealing mold.FIG. 5 is a cross-sectional view schematically showing a resin being spread by the resin sealing mold.FIG. 6 is a cross-sectional view schematically showing a resin filled in the cavity by heating and pressurizing. Note that, for simplicity of explanation, thechamber block 227 is not shown inFIGS. 4 to 6 . - First, the structural information of the
cavity 201 is acquired (S11). For example, the model number of theresin sealing mold 200 used is input to theacquisition unit 110 from the external terminal, and the structural information of thecavity 201 corresponding to the model number is acquired from the database. At this time, the arrangement information of theelements 12 on theworkpiece 10 can also be acquired from theacquisition unit 110. For example, theacquisition unit 110 acquires the arrangement information of theelements 12 arranged in the first direction X and the second direction Y by imaging theworkpiece 10 and analyzing the image of theworkpiece 10. - Next, the resin supply pattern is calculated based on the structural information of the cavity 201 (S12). For example, the
calculation unit 130 calculates, based on the structural information of thecavity 201 registered by theacquisition unit 110, the resin supply pattern according to pre-registered rules (for example, the angle of inclination of thelinear path 14 with respect to the axis of symmetry SM of thecavity 201, the thickness and length of thelinear path 14, and the like), and determines desirable moving route, moving speed, and the like of thesupply unit 120. Moreover, the structural information of thecavity 201 includes the inner peripheral dimension of the cavity, the depth of the cavity at the time of final molding, and the like. - Then, the
resin 13 is supplied onto theworkpiece 10 along the resin supply pattern (S13). Here, thesupply unit 120 is moved relative to workpiece 10 by driving thedrive unit 140 based on the resin supply pattern in a state that theworkpiece 10 is positioned in the first direction X, the second direction Y, and the rotation direction centered on the Z axis. When thesupply unit 120 moves to a supply start position (one end of the resin supply pattern), thepinch valve 123 is opened while pushing thepusher 122 against thesyringe 121, and the supply of theresin 13 is started. When thesupply unit 120 that continues to supply theresin 13 is moved to a supply end position (the other end of the resin supply pattern) along the resin supply pattern, thepinch valve 123 is closed while the pushing of thepusher 122 against thesyringe 121 is stopped, and the supply of theresin 13 is ended. - Subsequently, the release film RF is set in the
upper mold 220, and theworkpiece 10 is set in thelower mold 210. The release film RF is carried into the openedresin sealing mold 200 so as to cover thecavity 201. The release film RF may be supplied, for example, by being fed out from a roll of unused film arranged in front of the mold and wound by a roll of used film arranged at the rear of the mold. After discharging air from a gap between thecavity piece 223 and theclamper 225 and an intake hole in the upper mold 220 (not shown), the release film RF is adsorbed to theupper mold 220. In addition, theworkpiece 10 to which theresin 13 is supplied is carried into the openedresin sealing mold 200. The air is discharged from the intake hole in the upper mold 220 (not shown), theworkpiece 10 is adsorbed to thelower mold 210. - Next, the
resin 13 is spread by mold clamping (S15). - First, as shown in
FIG. 4 , for example, theexternal region 10A of theworkpiece 10 having the flip-chip mountedelements 12 and thesubstrate 11 is sandwiched between theclamper 225 and thelower mold 210. At this time, although not shown, the sealingring 203 is sandwiched between thechamber block 227 and thelower mold 210. A shallow dug portion arranged on the lower surface of theclamper 225 forms theair vent 226 between thelower mold 210 and the clamper 225 (between the workpiece 10 and the clamper 225), and the space (the cavity 201) inside theclamper 225 and the space outside theclamper 225 are connected through theair vent 226. Accordingly, the air in the mold shown inFIG. 4 is discharged to the outside of thechamber block 227. - Next, as shown in
FIG. 5 , theresin 13 is spread by thecavity piece 223 in the depressurized mold. At this time, theresin 13 can enter the gap between theelement 12 and the release film RF as well as the gap between the workpiece 10 and the flip-chip mountedelement 12 to perform underfill. In the process of spreading theresin 13, theresin 13 is filled in theregion 19 between the mutually adjacentlinear paths 14 from the side on which one linear path approaches the other linear path. On theworkpiece 10, theregion 19 between the mutually adjacentlinear paths 14 is not divided until the filling of theresin 13 is completed, so that air can be discharged from theair vent 226. - Then, the
cavity piece 223 is relatively lowered by performing mold clamping, and as shown inFIG. 6 , theresin 13 spreads to the whole part thecavity 201, and fine spaces such as the gap between theelement 12 and thesubstrate 11 or the like are also filled with theresin 13. Accordingly, theresin 13 is filled up to the front of theair vent 226. Here, by softening theresin 13 while heating it with a heater (not shown) and pressurizing theresin 13 with thecavity piece 223, theresin 13 is filled (molded) in the cavity, and at the same time, the gap between the workpiece 10 and the flip-chip mountedelement 12 is underfilled with theresin 13. - Finally, the
resin 13 is cured by continuing heating and pressurizing (curing) for a predetermined time (S16). In this way, the sealing of theworkpiece 10 with a resin is completed. - According to the configuration described in the above embodiment, the resin supply pattern calculated by the
calculation unit 130 based on the shape of thecavity 201 has a plurality of thelinear paths 14, and one of the mutually adjacentlinear paths 14 is inclined with respect to the axis of symmetry SM of thecavity 201, and the other linear path is inclined with respect to the one linear path. Theregion 19 between the mutually adjacentlinear paths 14 is opened to the outside of theworkpiece 10 at least on the side on which one of the adjacentlinear paths 14 is separated from the other linear path. Accordingly, when theresin 13 is spread in theresin sealing mold 200 so as to seal theworkpiece 10 with a resin, the air remaining inside theresin sealing mold 200 and the gas generated from theresin 13 can be discharged through theregion 19. Therefore, it is possible to suppress the occurrence of defects (for example, air traps or non-filling) due to the containment of air or the like caused by theresin 13. Accordingly, when it is difficult for theresin 13 to enter a fine portion of theworkpiece 10 due to the presence of air or the like, for example, the filling of theresin 13 into the gap between the flip-chip mountedelement 12 and thesubstrate 11 is promoted and the occurrence of poor filling can be suppressed. - The second
linear path 14B located between the firstlinear path 14A and the thirdlinear path 14C is connected to an end portion of the firstlinear path 14A on one end portion and is connected to an end portion of the thirdlinear path 14C on the other end portion. In addition, the resin supply pattern is one continuous linear line. Accordingly, by having a shape in which adjacent linear paths are not connected to each other at least on either end portion side, theresin 13 can be supplied with one stroke while discharging air. Therefore, theresin 13 can be efficiently supplied onto theworkpiece 10 by continuously discharging theresin 13 without the need for stopping the discharge of theresin 13 during the supply. - The
resin supply apparatus 100 may include theacquisition unit 110 for acquiring the shape of theworkpiece 10, the arrangement information of theelements 12, and the like. Thecalculation unit 130 may calculate the resin supply pattern in consideration of the shape of theworkpiece 10 and the arrangement information of theelements 12. Accordingly, theresin 13 can efficiently enter the fine space such as a gap between thesubstrate 11 and theelement 12, or the like, and the occurrence of sealing failure can be suppressed. - The amount of supply of the
resin 13 may be adjusted by taking into account the arrangement information of theelements 12. For example, the resin supply pattern may be calculated so that the amount of supply of theresin 13 in a region having a small ratio of the occupied area per unit area (hereinafter referred to as “area ratio”) of theelements 12 on theworkpiece 10 is greater than the amount of supply of theresin 13 in a region having a large area ratio of theelements 12. Accordingly, it is possible to suppress occurrence of defects caused by a shortage of theresin 13 when theresin 13 is heated and pressurized. - The mutually adjacent
linear paths 14 extend to theelement 12 at the outermost edge of theworkpiece 10 and are connected to each other on theelement 12 at the outermost edge. Accordingly, as compared with a resin supply pattern in which the mutually adjacentlinear paths 14 are connected to each other on anelement 12 which is on the inner side of theelement 12 at the outermost edge, it is possible to suppress occurrence of defects caused by the shortage of theresin 13 in a space over theexternal region 10B of theworkpiece 10 in which the required amount of theresin 13 is large due to the absence of theelements 12. - The
air vent 226 is arranged on the extension line of theregion 19 between the mutually adjacentlinear paths 14. Accordingly, the air vent is not blocked until theregion 19 between the mutually adjacentlinear paths 14 is completely filled with theresin 13, and air can be discharged from the inside of theresin sealing mold 200. - In the present embodiment, the
acquisition unit 110 acquires the arrangement information of theelements 12 and the structural information of thecavity 201. However, theacquisition unit 110 may acquire only the structural information of thecavity 201 without acquiring the arrangement information of theelements 12. In addition, the acquisition unit for acquiring the arrangement information of theelements 12 and the acquisition unit for acquiring the structural information of thecavity 201 may be arranged separately. - In addition, the resin supply pattern is not limited to the above. It is sufficient that at least one of the mutually adjacent
linear paths 14 is inclined with respect to the axis of symmetry SM of thecavity 201, and one of the mutually adjacentlinear paths 14 is inclined with respect to the other linear path. The mutually adjacentlinear paths 14 may be connected to each other on theexternal region 10B of theworkpiece 10. The mutually adjacentlinear paths 14 may also extend to theelement 12 which is on the inner side of theelement 12 at the outermost edge of theworkpiece 10 except for extending to theelement 12 at the outermost edge, and the mutually adjacentlinear paths 14 may be connected to each other on theelement 12 which is on the inner side of theelement 12 at the outermost edge. The mutually adjacentlinear paths 14 may be separated from each other, and theregion 19 between the mutually adjacentlinear paths 14 may be opened to the outside of theworkpiece 10 on both the positive direction side and the negative direction side of the first direction X. An angle formed by the mutually adjacentlinear paths 14 at the center of theworkpiece 10 in the second direction Y may be different from an angle formed by the mutually adjacentlinear paths 14 at an end portion of theworkpiece 10 in the second direction Y. - Hereinafter, a variation example of the resin supply pattern and a configuration of a resin sealing apparatus according to another embodiment of the present invention are described. It should be noted that the matters common to the first embodiment can also be applied to each of the following aspects, the description thereof is omitted, and only the differences are described. In particular, the same configurations are designated by the same reference signs, and the same configurations and the same actions and effects are not mentioned sequentially.
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FIGS. 7 to 12 show schematic plan views of resin supply patterns according to different variation examples. As shown inFIGS. 7 to 12 ,external regions external regions element external regions reference numerals reference numerals reference numerals - As shown in
FIG. 7 , in a plan view of aworkpiece 20, one of the mutually adjacentlinear paths 24 in the plurality oflinear paths 24 is inclined with respect to the axis of symmetry SM of the cavity, and the other linear path is inclined with respect to the one linear path and parallel to the axis of symmetry SM of the cavity. - As shown in
FIG. 8 , in a plan view of aworkpiece 30, mutually adjacentlinear paths 34 are connected by arelay path 35 extending in the second direction Y. Therelay path 35 has, for example, an arc shape. By connecting the mutually adjacentlinear paths 34 via therelay path 35, the degree of freedom in design regarding an interval between the mutually adjacentlinear paths 34 and an angle formed by the mutually adjacentlinear paths 34 is improved. Moreover, therelay path 35 is not limited to the above as long as therelay path 35 does not form a constriction in theregion 39 between the mutually adjacentlinear paths 34 and does not partition theregion 39. For example, therelay path 35 is linear and may form a sharp shape at a connection portion with thelinear path 34. - As shown in
FIG. 9 , in a plan view of aworkpiece 40, the mutually adjacentlinear paths 44 are separated from each other. Aregion 49 between the mutually adjacentlinear paths 44 is opened to the outside of theworkpiece 40 on a side on which the other linear path approaches one of the mutually adjacentlinear paths 44. That is, theregion 49 between the mutually adjacentlinear paths 44 is opened to the outside of theworkpiece 40 on both the positive direction side and negative direction side of the first direction X that is parallel to the axis of symmetry SM of the cavity. - As shown in
FIG. 10 ,elements 52A andelements 52B larger than theelements 52A are arranged on aworkpiece 50. Theelements 52A are shorter than theelements 52B, and the area ratio of theelements 52A is smaller than the area ratio of theelements 52B. Thus, a region where theelements 52A are arranged requiresmore resin 53 than a region where theelements 52B are arranged. Therefore, by making alinear path 54 extending over the region where theelements 52A are arranged thicker than alinear path 54 extending over the region where theelements 52B are arranged, occurrence of defects caused by poor filling can be suppressed. - As shown in
FIG. 11 , in a plan view of aworkpiece 60, an angle formed by mutually adjacentlinear paths 64 at the center of theworkpiece 60 in the second direction Y is larger than an angle formed by the mutually adjacentlinear paths 64 at an end portion of theworkpiece 60 in the second direction Y. Accordingly, by making the amount of supply of theresin 63 at the end portion of theworkpiece 60 that has a largeexternal region 60B larger than the amount of supply of theresin 63 at the center of theworkpiece 60 that has a smallexternal region 60B, occurrence of defects caused by poor filling can be suppressed. - As shown in
FIG. 12 , in a plan view of aworkpiece 70, an angle formed by the mutually adjacentlinear paths 74 at the center of theworkpiece 70 in the second direction Y is smaller than an angle formed by the mutually adjacentlinear paths 74 at an end portion of theworkpiece 70 in the second direction Y. Accordingly, the width of the open end of theregion 79 between the mutually adjacentlinear paths 74 at the center of theworkpiece 70 is substantially the same as the width of the open end of theregion 79 between the mutually adjacentlinear paths 74 at the end portion of theworkpiece 70. Thus, the occurrence of defects caused by poor filling can be suppressed by appropriately adjusting the width of theregion 79 between the mutually adjacentlinear paths 74. - Even in the variation examples of the first embodiment shown in
FIGS. 7 to 12 , the occurrence of defects caused by poor filling can be suppressed as in the first embodiment shown inFIG. 2 . Moreover, the resin supply patterns ofFIGS. 2 and 7 to 12 described above can be appropriately combined and applied to one workpiece. -
FIG. 13 is a variation example of a workpiece, and shows arectangular workpiece 10 for use in panel level packaging (PLP). As shown inFIG. 13 , in a plan view of aworkpiece 80, a substrate 81 (workpiece 80) has a rectangular shape having a pair of short sides and a pair of long sides. Alinear path 84 extends along the short side of thesubstrate 81, and more specifically, thelinear path 84 is inclined with respect to the short side of thesubstrate 81 and is arranged along the long side of thesubstrate 81. Accordingly, as compared with a configuration in which thelinear path 84 extends along the long side of thesubstrate 81, the length of aregion 89 between the mutually adjacentlinear paths 84 is shortened, and theregion 89 is blocked due to the contact between theresins 13 in thelinear path 84 during the process of spreading aresin 83, and thus air can be suppressed from being caught in theresin 83. Further, the variation example shown inFIG. 13 can be appropriately applied to each of the above resin supply patterns. As shown inFIG. 13 ,external regions 80A is referred to a region sandwiched by the resin sealing mold;external regions 80B is referred to a region closer to theelement 82 side than theexternal region 80A. - A configuration of a resin supply pattern according to a second embodiment is described with reference to
FIG. 14 .FIG. 14 is a diagram schematically showing a configuration of a resin sealing apparatus according to the second embodiment. - In the present embodiment, the object to be coated is a release film RF that delivers the supplied
resin 13 to theworkpiece 10. The release film RF is placed on thestage 150, and thedrive unit 140 moves thesupply unit 120 based on the information about the shape of acavity 901 acquired by theacquisition unit 110, and theresin 13 is supplied onto the release film RF. Aresin sealing mold 900 has a lower mold cavity structure which includes alower mold 910 that has thecavity 901 and anupper mold 920. The release film RF is set in thelower mold 910, and theworkpiece 10 is set in theupper mold 920. Thelower mold 910 has acavity piece 913 and aclamper 915 that constitutes thecavity 901, and anair vent 916 is arranged on the upper surface of the clamper 915 (the surface facing the upper mold 920) when the mold is clamped. - Next, a method for manufacturing a resin-sealed product using a resin sealing apparatus 9 according to the present embodiment is described with reference to
FIG. 14 .FIG. 15 is a flowchart showing a method for manufacturing a resin-sealed product using the resin sealing apparatus according to the second embodiment. - First, the structural information of the
cavity 901 is acquired (S91). Next, the resin supply pattern is calculated based on the structural information of the cavity 901 (S92). When calculating the resin supply pattern in consideration of the arrangement information of theelements 12, take into account that the resin supply pattern on the release film RF is inverted on theworkpiece 10. Then, theresin 13 is supplied onto the release film RF along the resin supply pattern (S93). Next, the release film RF is set in thelower mold 910, and theworkpiece 10 is set in the upper mold 920 (S94). At this time, the release film RF and theworkpiece 10 are positioned in the rotation directions centered on the first direction X, the second direction Y, and the Z axis, which can obtain effects similar to those obtained by supplying theresin 13 applied on the release film RF to a position corresponding to theelements 12 on theworkpiece 10. Subsequently, by closing the mold, theresin 13 is brought into contact with theelements 12 and thesubstrate 11 while the air is discharged from the chamber of the mold, and theresin 13 is spread by mold clamping (S95). Theresin 13 on the release film RF set in thelower mold 910 is pressed against theworkpiece 10 set in theupper mold 920, and theresin 13 is spread while being sandwiched between the workpiece 10 and the release film RF. Here, it is considered that by discharging air before bringing theresin 13 into contact with theelements 12 or thesubstrate 11, air traps can be prevented even if a closed space is formed by the contact between theresins 13 on the release film RF. However, when theresin 13 is spread, the gas generated by heating theresin 13 remains, which may cause poor filling. In contrast, by arranging the path for discharging gas as in the present embodiment, the occurrence of defects such as an air trap caused by gas can be suppressed. Subsequently, theresin 13 is cured by heating and pressurizing (S96). In this way, the same effect as that of the above-described present invention can be obtained even when the mold has the lower mold cavity structure. - Further, in the aspect described in the embodiment, any one or an appropriate combination of a plurality of the resin supply patterns described in the first embodiment can be applied.
- As described above, according to one aspect of the present invention, it is possible to provide a resin supply apparatus, a resin sealing apparatus, and a method for manufacturing a resin-sealed product, which can suppress occurrence of defects.
- A resin supply apparatus according to one aspect of the present invention is a resin supply apparatus for supplying a resin onto an object to be coated which is arranged in a lower mold of a resin sealing mold. The resin supply apparatus includes: a calculation unit for calculating a resin supply pattern based on the shape of a cavity of the resin sealing mold; and a supply unit for supplying a resin to the object to be coated along the resin supply pattern. The resin supply pattern has a plurality of linear paths. One of mutually adjacent linear paths in the plurality of linear paths is inclined with respect to an axis of symmetry that divides the cavity in line symmetry, and the other one of the mutually adjacent linear paths in the plurality of linear paths is inclined with respect to the one linear path. A region between the mutually adjacent linear paths in the plurality of linear paths is opened to the outside of the object to be coated, at least on a side on which the other linear path is separated from the one linear path.
- According to this aspect, the region between the adjacent linear paths functions as a flow passage for discharging air. In addition, when the resin is spread on the object to be coated, the resin is gradually filled in the region between the mutually adjacent linear paths from a side on which the other linear path approaches one linear path toward a side on which the other linear path is separated from the one linear path. Thus, while the resin is spreading on the object to be coated, a region surrounded by the resin in all directions is not generated, and the region between the adjacent linear paths functions as a flow passage for discharging air. Therefore, air remaining in the region between the adjacent linear paths and gas generated from the resin can be suppressed from being caught in the resin, and occurrence of defects caused by poor filling can be suppressed.
- In the above aspect, the plurality of linear paths have a first linear path, a second linear path adjacent to the first linear path, and a third linear path adjacent to the second linear path. The second linear path may be connected to the first linear path at an end portion on a side approaching the first linear path, and may be connected to the third linear path at an end portion on a side approaching the third linear path.
- In the above aspect, the resin supply pattern may be one continuous linear line.
- In the above aspect, a corner portion of the resin supply pattern may have an R shape.
- In the above aspect, the region between the mutually adjacent linear paths in the plurality of linear paths may be opened to the outside of the object to be coated on a side on which the other linear path approaches the one linear path.
- In the above aspect, the object to be coated may be a workpiece to be sealed using a supplied resin.
- In the above aspect, the object to be coated may be a release film that delivers supplied resin to a workpiece.
- In the above aspect, the resin supply apparatus may further include an acquisition unit for acquiring the shape of the cavity of the resin sealing mold and providing the acquired information to the calculation unit.
- In the above aspect, the calculation unit may calculate the resin supply pattern in consideration of the shape of a workpiece sealed by the resin supplied to the object to be coated.
- In the above aspect, the calculation unit may calculate the resin supply pattern in consideration of arrangement information of elements on the workpiece sealed by the supplied resin.
- In the above aspect, the axis of symmetry may extend in a direction in which the elements are aligned.
- In the above aspect, the resin supply pattern may be calculated so that the amount of supply of a resin in a region in the workpiece having a small area ratio of the elements is larger than the amount of supply of a resin in a region having a large area ratio of the elements.
- In the above aspect, the plurality of linear paths include a set of linear paths adjacent to each other at the center of the workpiece and another set of linear paths adjacent to each other at an end portion of the workpiece, and an angle formed by the set of linear paths may be larger than an angle formed by the other set of linear paths.
- In the above aspect, the plurality of linear paths includes a set of linear paths adjacent to each other at the center of the workpiece and another set of linear paths adjacent to each other at an end portion of the workpiece, and an angle formed by the set of linear paths may be smaller than an angle formed by the other set of linear paths.
- A resin sealing apparatus according to one aspect of the present invention includes the resin supply apparatus according to any one of the above aspects, and a resin sealing mold for sealing elements on a workpiece with a resin. The resin sealing mold has a cavity in which a resin is filled and a plurality of air vents for discharging air from the cavity. The object to be coated is arranged in the resin sealing mold so that at least one of the plurality of air vents is located on an extension line of a region between mutually adjacent linear paths in the plurality of linear paths.
- According to this aspect, when the mold is clamped and the resin is heated and pressurized, the air vents arranged on the extension line of the region between the linear paths are not blocked until the region between the mutually adjacent linear paths is completely filled with a resin. Therefore, in the resin sealing mold, the air remaining in the region between the adjacent linear paths and the gas generated from the resin can be suppressed from being caught in the resin, and the occurrence of defects caused by poor filling can be suppressed.
- A method for manufacturing a resin-sealed product according to one aspect of the present invention includes supplying a resin onto an object to be coated which is arranged in a lower mold of a resin sealing mold. The method for manufacturing a resin-sealed product includes: calculating a resin supply pattern based on the shape of a cavity of the resin sealing mold; and supplying a resin to the object to be coated along the resin supply pattern. The resin supply pattern has a plurality of linear paths. One of the mutually adjacent linear paths in the plurality of linear paths is inclined with respect to an axis of symmetry that divides the cavity in line symmetry, and the other one of the mutually adjacent linear paths in the plurality of linear paths is inclined with respect to the one linear path. A region between the mutually adjacent linear paths in the plurality of linear paths is opened to the outside of the object to be coated, at least on a side on which the other linear path is separated from the one linear path
- According to this aspect, the region between the adjacent linear paths functions as a flow passage for discharging air. In addition, when the resin is spread on the object to be coated, the resin is gradually filled in the region between the mutually adjacent linear paths from a side on which the other linear path approaches one linear path toward a side on which the other linear path is separated from the one linear path. Thus, while the resin is spreading on the object to be coated, a region surrounded by the resin in all directions is not generated, and the region between the adjacent linear paths functions as a flow passage for discharging air. Therefore, the air remaining in the region between the adjacent linear paths and the gas generated from the resin can be suppressed from being caught in the resin, and occurrence of defects caused by poor filling can be suppressed.
- In the above aspect, the object to be coated may be a workpiece to be sealed using a supplied resin.
- In the above aspect, the object to be coated may be a release film that delivers supplied resin to a workpiece.
- According to the present invention, it is possible to provide a resin supply apparatus, a resin sealing apparatus, and a method for manufacturing a resin-sealed product, which can suppress occurrence of defects.
- The embodiments described above are for purposes of facilitating the understanding of the present invention, and should not be interpreted as limiting the present invention. Each element included in the embodiment and its arrangement, material, condition, shape, size, and the like are not limited to the illustrated ones, and can be changed as appropriate. In addition, the configurations shown in different embodiments can be partially replaced or combined.
Claims (18)
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US20220152887A1 (en) * | 2020-11-17 | 2022-05-19 | Apic Yamada Corporation | Resin supply apparatus, resin sealing apparatus, and method for manufacturing resin-sealed product |
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US20050202350A1 (en) * | 2004-03-13 | 2005-09-15 | Colburn Matthew E. | Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning |
KR20100019137A (en) * | 2008-08-08 | 2010-02-18 | 세크론 주식회사 | Resin molding system for semiconductor device and method for molding semiconductor device with resin using the same |
JP2018134846A (en) * | 2017-02-23 | 2018-08-30 | アピックヤマダ株式会社 | Resin supply device, resin supply method and resin molding apparatus |
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JP5563917B2 (en) * | 2010-07-22 | 2014-07-30 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | Circuit device and manufacturing method thereof |
JP2017212419A (en) * | 2016-05-27 | 2017-11-30 | Towa株式会社 | Resin sealed product manufacturing method and resin sealing device |
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US20050202350A1 (en) * | 2004-03-13 | 2005-09-15 | Colburn Matthew E. | Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning |
KR20100019137A (en) * | 2008-08-08 | 2010-02-18 | 세크론 주식회사 | Resin molding system for semiconductor device and method for molding semiconductor device with resin using the same |
JP2018134846A (en) * | 2017-02-23 | 2018-08-30 | アピックヤマダ株式会社 | Resin supply device, resin supply method and resin molding apparatus |
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US20220152887A1 (en) * | 2020-11-17 | 2022-05-19 | Apic Yamada Corporation | Resin supply apparatus, resin sealing apparatus, and method for manufacturing resin-sealed product |
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