US20200105644A1 - Semiconductor device and fabricating method of the same - Google Patents
Semiconductor device and fabricating method of the same Download PDFInfo
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- US20200105644A1 US20200105644A1 US16/533,789 US201916533789A US2020105644A1 US 20200105644 A1 US20200105644 A1 US 20200105644A1 US 201916533789 A US201916533789 A US 201916533789A US 2020105644 A1 US2020105644 A1 US 2020105644A1
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Definitions
- FIG. 1 through FIG. 4 and FIG. 6 through FIG. 10 illustrate a process flow for fabricating a semiconductor device in accordance with some embodiments of the present disclosure.
- FIGS. 5A and 5B illustrate the back surface of the singulated semiconductor die and the back surface of the wafer respectively in accordance with some embodiments of the present disclosure.
- FIG. 11 through 19 illustrate alternative embodiments in accordance with some embodiments of the present disclosure.
- FIGS. 20A and 20B are top views of the heat spreader illustrated in FIG. 19 .
- first and second features are formed in direct contact
- additional features may be formed between the first and second features, such that the first and second features may not be in direct contact
- present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
- spatially relative terms such as “beneath,” “below,” “lower,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures.
- the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures.
- the apparatus may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.
- testing structures may be included to aid in the verification testing of the 3D packaging or 3DIC devices.
- the testing structures may include, for example, test pads formed in a redistribution layer or on a substrate that allows the testing of the 3D packaging or 3DIC, the use of probes and/or probe cards, and the like.
- the verification testing may be performed on intermediate structures as well as the final structure.
- the structures and methods disclosed herein may be used in conjunction with testing methodologies that incorporate intermediate verification of known good dies to increase the yield and decrease costs.
- FIG. 1 through FIG. 4 and FIG. 6 through 10 illustrate a process flow for fabricating a semiconductor device in accordance with some embodiments of the present disclosure.
- FIGS. 11A and 11B are top views of a semiconductor device according to the FIG. 10 in accordance with some embodiments of the present disclosure. It is to be noted that the process steps described herein cover a portion of the fabricating processes used to fabricate a package structure. The embodiments are intended to provide further explanations but are not used to limit the scope of the present disclosure. In FIG. 1 through FIG. 4 and FIG. 6 through FIG.
- semiconductor die is shown to represent plural semiconductor dies 111 of the wafer 20
- a combination of a chip package and a heat dissipation structure is shown to represent a semiconductor device obtained following the fabricating method, for example.
- two or more dies are shown to represent plural chips or dies of the wafer
- one or more package structures are shown to represent plural semiconductor devices obtained following the fabricating method, the disclosure is not limited thereto.
- FIG. 1 illustrates the formation of an initial structure of semiconductor die, which may be a part of wafer 20 that includes a plurality of semiconductor dies 111 therein.
- the semiconductor dies 111 may include active components (e.g., transistors or the like) and passive components (e.g., resistors, capacitors, inductors or the like) formed therein.
- the semiconductor dies 111 includes a crystalline silicon substrate.
- the semiconductor dies 111 includes an elementary semiconductor substrate such as germanium; a compound semiconductor substrate including silicon carbon, gallium arsenic, gallium phosphide, indium phosphide, indium arsenide, and/or indium antimonide; an alloy semiconductor substrate including SiGe, GaAsP, AlInAs, AlGaAs, GaInAs, GaInP, and/or GaInAsP; or combinations thereof. Other semiconductor substrates such as multi-layered or gradient substrates may also be used.
- the semiconductor dies 111 includes an active surface 111 A and a back surface 111 B opposite to the active surface 111 A, as illustrated in FIG. 1 , the active surface 111 A of the semiconductor dies 111 is referred to as the top surface of semiconductor dies 111 , and a back surface 111 B is referred to as the bottom surface of semiconductor dies 111 , for example.
- the semiconductor dies 111 or the wafer 20 may include connection pads 112 and a passivation layer 113 .
- the connection pads 112 are formed on the active surface 111 A of the semiconductor dies 111 or the wafer 20 to physically and electrically connect the active device, passive device or integrated circuit in the semiconductor dies 111 and include a conductive material such as aluminum (Al), copper (Cu), or other suitable metal.
- the passivation layer 113 such as an oxide film, a nitride film, a dielectric film (such as benzocyclobutene (BCB), polybenzoxazole (PBO)), or the like, is formed on the active surface 111 A of the semiconductor dies 111 and expose at least portions of the connection pads 112 .
- the semiconductor dies 111 or the wafer 20 include a plurality of conductive pillars 114 formed over each of the exposed portions of the connection pads 112 .
- the conductive pillars 114 are plated on and electrically connected to the connection pads 112 .
- the plating process of conductive pillars 114 is described in detail as followings. First, a seed layer (not shown) is sputtered onto the passivation layer 113 and the exposed portions of the connection pads 112 , for example.
- a patterned photoresist layer such as patterned mask layer 116 may be then formed over the seed layer by photolithography, wherein the patterned photoresist layer exposes portions of the seed layer that are corresponding to the exposed portions of the connection pads 112 .
- the wafer 20 including the patterned photoresist layer formed thereon is then immersed into a plating solution of a plating bath such that the conductive pillars 114 are plated on the exposed portions of the seed layer.
- the patterned photoresist layer is stripped by an acceptable ashing or stripping process. Thereafter, by using the conductive pillars 114 as a hard mask, portions of the seed layer that are not covered by the conductive pillars 114 are removed through etching until the passivation layer 113 is exposed, for example.
- a protection layer 115 is formed on the passivation layer 113 so as to cover the conductive pillars 114 .
- the protection layer 115 may be a polymer layer having sufficient thickness to encapsulate and protect the conductive pillars 114 .
- the protection layer 115 may be a polybenzoxazole (PBO) layer, a polyimide (PI) layer or other suitable polymers.
- the protection layer 115 may be made of inorganic materials.
- a patterned mask layer 116 formed on the back surface 111 B of semiconductor dies 111 or the wafer 20 may include a plurality of openings 116 A which expose portions of the back surface 111 B.
- the patterned mask layer 116 may be formed of silicon nitride, titanium nitride, or the like.
- the patterned mask layer 116 is formed of silicon nitride, for example, by Low-Pressure Chemical Vapor Deposition (LPCVD).
- LPCVD Low-Pressure Chemical Vapor Deposition
- the patterned mask layer 116 is formed by thermal nitridation of silicon, Plasma Enhanced Chemical Vapor Deposition (PECVD), or the like.
- patterned mask layer 116 The patterning process of patterned mask layer 116 is described in detail as followings.
- a photoresist layer is formed on the back surface 111 B of the semiconductor dies 111 .
- a patterned mask layer (not shown) with plurality of openings corresponding to the plurality of openings 116 A may be located above the photoresist layer.
- an etching process is performed to form the patterned mask layer 116 using the patterned mask as an etching mask.
- an etching process is performed to form a thermal enhancement pattern 117 shown in FIG. 3 .
- the etching process may include a wet etching process, which may be performed using KOH, Tetra Methyl Ammonium Hydroxide (TMAH), or the like as an etchant.
- TMAH Tetra Methyl Ammonium Hydroxide
- the patterned mask layer 116 is removed from the back surface 111 B of the semiconductor dies 111 .
- the thermal enhancement pattern 117 includes recesses 117 A extends from the back surface 111 B of the semiconductor dies 111 into the semiconductor dies 111 .
- the depth of the recesses 117 A is less than the thickness of the semiconductor dies 111 or the wafer 20 .
- the depth of the recesses 117 is about 10% to about 50% of the thickness of the semiconductor dies 111 or the wafer 20 .
- the area occupied by the recesses 117 A may range from about 10% to about 80% of the area of the back surface 111 B of the semiconductor dies 111 .
- the recesses 117 A may be formed on the back surface 111 B of the semiconductor dies 111 or the wafer 20 without significantly decreasing structural strength of the semiconductor dies 111 or the wafer 20 .
- each of the singulated semiconductor dies 111 includes the connection pads 112 , a passivation layer 113 , the conductive pillars 114 , and the protection layer 115 .
- the protection layer 115 may well protect the conductive pillars 114 of the singulated semiconductor dies 111 .
- the conductive pillars 114 of the singulated semiconductor dies 111 may be protected from being damaged by subsequently performed processes, such as the picking-up and placing process of the singulated semiconductor dies 111 , the molding process, and so on.
- the wafer 20 temporarily adhered with the tape 30 may not be singulated into the plurality of singulated semiconductor dies 111 and the wafer 20 may be packed by the subsequently performed processes as illustrated in FIG. 6 through FIG. 10 .
- FIG. 5A and FIG. 5B illustrate the back surface 111 B of the singulated semiconductor die 111 and the back surface 111 B of the wafer 20 , respectively.
- the back surface 111 B of each singulated semiconductor die 111 may be singulated into the desired shape such as rectangular shape for the subsequent packaging processes.
- the wafer 20 may not be singulated and have round shape.
- a carrier 60 having a de-bonding layer 61 formed thereon is provided.
- the carrier 60 is a glass substrate and the de-bonding layer 61 is formed on the glass substrate.
- the de-bonding layer 61 may include a dielectric material layer made of an epoxy-based thermal-release material, which loses its adhesive property when being heated, such as a light-to-heat-conversion (LTHC) release coating film.
- the de-bonding layer 61 may include a dielectric material layer made of an ultra-violet (UV) glue, which loses its adhesive property when being exposed to UV lights, for example. however, the disclosure is not limited thereto.
- UV ultra-violet
- the wafer 20 or at least one of the singulated semiconductor dies 111 singulated from the wafer 20 is picked-up from the tape 30 and placed on the de-bonding layer 61 carried by the carrier 60 .
- the wafer 20 or the singulated semiconductor die 111 is disposed on the de-bonding layer 61 carried by the carrier 60 such that the back surface 111 B of the singulated semiconductor die 111 or the wafer 20 is in contact with the de-bonding layer 61 and the thermal enhancement pattern 117 (e.g., the recesses 117 A) is enclosed by the de-bonding layer 61 .
- an insulating material 118 is formed on the de-bonding layer 61 to cover the at least one of the singulated semiconductor dies 111 or the wafer 20 .
- the insulating material 118 is a molding compound formed by an over-mold process.
- the conductive pillars 114 and the protection layer 115 of the singulated semiconductor die 111 or the wafer 20 are covered by the insulating material 118 .
- the conductive pillars 114 and the protection layer 115 of singulated the semiconductor die 111 are not revealed and are well protected by the insulating material 118 .
- the insulating material 118 includes epoxy resin or other suitable dielectric materials.
- the insulating material 118 is then ground until the top surfaces of the conductive pillars 114 and the top surface of the protection layer 115 are exposed.
- the insulating material 118 is ground by a mechanical grinding process, a chemical mechanical polishing (CMP) process or combinations thereof.
- CMP chemical mechanical polishing
- an insulating encapsulant 118 ′ is formed over the de-bonding layer 61 to laterally encapsulate the singulated semiconductor die 111 or the wafer 20 .
- the insulating encapsulant 118 ′ is in contact with and surrounds sidewalls of the singulated semiconductor die 111 or the wafer 20 .
- portions of the protection layer 115 are ground to reveal the conductive pillars 114 and a protection layer 115 ′ is formed to laterally encapsulate the conductive pillars 114 .
- the top surface of the insulating encapsulant 118 ′, the top surfaces of the conductive pillars 114 and the top surface of the protection layer 115 ′ are substantially at the same level.
- a redistribution circuit structure 119 electrically connected to the conductive pillars 114 of the singulated semiconductor die 111 or the wafer 20 is formed on the top surfaces of the top surface of the insulating encapsulant 118 ′, the top surfaces of the conductive pillars 114 , and the top surface of the protection layer 115 ′.
- the redistribution circuit structure 119 may include a plurality of redistribution wirings 119 a , a plurality of vias 119 b , and a plurality of patterned dielectric layers 119 c , as shown in FIG. 9 .
- the redistribution wirings 119 a and the patterned dielectric layers 119 c are stacked alternately, and the vias 119 b are embedded in and penetrate the patterned dielectric layers 119 c to electrically connect the redistribution wirings 119 a .
- the redistribution wirings 119 a and a plurality of vias 119 b may be copper wirings and copper vias
- the material of the patterned dielectric layers 119 c may include polyimide (PI), polybenzoxazole (PBO) or other suitable dielectric polymer.
- the material of the patterned dielectric layers 119 c may be the same material as the protection layer 115 ′.
- a plurality of conductive features 90 electrically connected to the redistribution circuit structure 119 are formed.
- the conductive features 90 are disposed on the redistribution circuit structure 119 and are arranged in array.
- the chip package 110 including the semiconductor chip 50 , the insulating encapsulant 118 ′, redistribution circuit structure 119 , and the conductive features 90 are formed.
- the conductive features 90 may be conductive balls (e.g., solder balls) arranged in array.
- the de-bonding layer 61 and the carrier 60 is de-bonded from the chip package 110 such that the back surface 111 B of the semiconductor die 111 or the wafer 20 , the bottom surface of the insulating encapsulant 118 ′ opposite to the top surface of the insulating encapsulant 118 ′ are de-bonded from the carrier 60 and are thus revealed.
- the back surface 111 B of the semiconductor die 111 and the thermal enhancement pattern 117 (e.g., the recesses 117 A) formed thereon are revealed.
- the bottom surface of the insulating encapsulant 118 ′ and the back surface 111 B of the semiconductor die 111 or the wafer 20 are substantially at the same level after de-bonding.
- the external energy such as UV laser, visible light or heat, may be applied to the de-bonding layer 61 such that the chip package 110 and the de-bonding layer 61 carried by the carrier 60 can be separated from each other.
- the chip package 110 is disposed over and assembled with a first heat dissipation structure 120 which includes a heat spreader 121 and a first sealing member 122 .
- the chip package 110 is assembled with side wall 121 a of the heat spreader 121 through the first sealing member 122 .
- the first sealing member 122 is disposed between the chip package 110 and the side wall 121 a of the heat spreader 121 . Both the chip package 110 and the side wall 121 a of the heat spreader 121 are in contact with the first sealing member 122 .
- an inner side surface of the first sealing member 122 and an inner side surface of the side wall 121 a of the heat spreader 121 are substantially aligned with each other in vertical direction. Furthermore, in some embodiments, an side surface of the semiconductor die 111 or the wafer 20 is not aligned with the inner side surfaces of the side wall 121 a and the first sealing member 122 such that the interface between the insulating encapsulant 118 ′ and the semiconductor die 111 (or the wafer 20 ) may be protected by the first sealing member 122 from delamination.
- the first sealing member 122 not only provides sealing function but also serves as stress buffer between the chip package 110 and the side wall 121 a of the heat spreader 121 .
- the first sealing member 122 may prevent the chip package 110 from directly in contact with the side wall 121 a of the heat spreader 121 to increase assembly yield rates of the first heat dissipation structure 120 .
- the heat spreader 121 has a recess R surrounded by the side wall 121 a and bottom plate 121 b of the heat spreader 121 .
- the recess R is corresponding to the thermal enhancement pattern 117 (e.g., the recesses 117 A) on the back surface 111 B of the semiconductor die 111 or the wafer 20 .
- the first sealing member 122 disposed on the back surface 111 B of the semiconductor die 111 or the wafer 20 and the bottom surface of the insulating encapsulant 118 ′ may expose the thermal enhancement pattern 117 . Therefore, after assembling the chip package 110 , the first sealing member 122 and the heat spreader 121 , the recess R is capped or enclosed by the back surface 111 B of the semiconductor die 111 or the wafer 20 and the recess R may serve as flow channel for cooling liquid (e.g., cooling water or other types of coolant).
- cooling liquid e.g., cooling water or other types of coolant
- the heat spreader 121 further includes an inlet I and an outlet O communicated with the flow channel, wherein the inlet I and the outlet O penetrate through the bottom plate 121 b of the heat spreader 121 .
- the cooling liquid may be applied and flow into the flow channel (e.g., the recess R and the recesses 117 A) from the inlet I and may flow out from the outlet O.
- the material of the first sealing member 122 may include organic adhesive such as polybutylacrylate (PBA) or other suitable sealants.
- PBA polybutylacrylate
- the first sealing member 122 may not only cover the bottom surface of the insulating encapsulant 118 ′, but also partially cover the back surface 111 B of the semiconductor die 111 or the wafer 20 .
- the distribution of the first sealing member 122 is not limited in the present disclosure.
- the material of the heat spreader 121 may be high thermal conductivity material such as copper, aluminum, steel, the combination thereof and so on.
- the inlet I and the outlet O formed on the heat spreader 121 may be machined using a laser drill, a mechanical drill or the like.
- the heat spreader 121 includes thermal enhancement protrusions 123 formed on an inner top surface of the bottom plate 121 b .
- the thermal enhancement protrusions 123 protrude from the inner top surface of the bottom plate 121 b toward the back surface 111 B of the semiconductor die 111 or the wafer 20 .
- the thermal enhancement protrusions 123 extend into the recess R between the bottom plate 121 b and the semiconductor die 111 or the wafer 20 .
- the thermal enhancement protrusions 123 and the thermal enhancement pattern 117 face to each other. In some embodiments, as illustrated in FIG.
- the thermal enhancement protrusions 123 are not in contact with the back surface 111 B of the semiconductor die 111 such that a gap is formed between the thermal enhancement protrusions 123 and the back surface 111 B of the semiconductor die 111 or the wafer 20 .
- the thermal enhancement protrusions 123 may generate turbulence of the cooling liquid when the cooling liquid flows in the recess R so as to further enhance the ability of heat dissipation of the heat spreader 121 .
- the thermal enhancement pattern 117 (e.g., the recesses 117 A) formed on the back surface 111 B of the semiconductor dies 111 or the wafer 20 may serve as heat dissipation fins to increase the contact area of the semiconductor die 111 and cooling liquid such that the heat dissipation ability of the heat spreader 121 is enhanced.
- the first sealing member 122 serves as a sealant for preventing the cooling liquid from leakage.
- FIG. 12 to FIG. 19 are schematic cross-sectional views of alternative embodiments of a semiconductor device according to some exemplary embodiments of the present disclosure.
- the thermal enhancement pattern 117 (e.g., the recesses 117 A) may be filled with the conductive material 117 B (e.g., thermal conductive posts) to enhance the ability of heat dissipation.
- the conductive material 117 B e.g., thermal conductive posts
- the conductive material 117 B may be formed by sputtering of a seed layer on the back surface 111 B of the semiconductor die 111 or the wafer 20 .
- the seed layer may be a metal layer with high thermal conductivity, which may be a single layer or a composite layer including a plurality of sub-layers formed of different materials.
- the seed layer includes a titanium layer and a copper layer over the titanium layer.
- the seed layer may be formed using, for example, PVD or the like.
- patterned photoresist may be stripped and the seed layer and the conductive materials may be ground or polished by a CMP process until the portion of the back surface 111 B of the semiconductor die 111 or the wafer 20 is exposed.
- the forming of the conductive material 117 B is not limited in the present disclosure.
- the conductive material 117 B may be copper or other suitable material with high thermal conductivity. Because of the high thermal conductivity, the conductive material 117 B may further enhance the ability of heat dissipation.
- the exposed surface of the conductive material 117 B and the back surface 111 B of the semiconductor die 111 or the wafer 20 are substantially at the same level, and the gap may be formed between the thermal enhancement protrusions 123 and the back surface 111 B of the semiconductor die 111 or the wafer 20 .
- the conductive material 117 C may be blanket deposited over the back surface 111 B of the semiconductor die 111 or the wafer 20 .
- the conductive material 117 C may include one or more layers of copper, gold, a combination thereof, or other suitable material with high thermal conductivity, and may be formed by ALD, PVD, CVD, a combination thereof, or the like.
- the conductive material 117 C may be formed conformally and includes a first conductive portion located inside the thermal enhancement pattern 117 (e.g., the recesses 117 A) and a second conductive portion located outside the thermal enhancement pattern 117 .
- the first portion of the conductive material 117 C at least partially fills the recesses 117 A and the second portion of the conductive material 117 C formed on the back surface 111 B of the semiconductor die 111 or the wafer 20 .
- the conductive material 117 C may partially or fully cover the back surface 111 B of the semiconductor die 111 or the wafer 20 except the region of the thermal enhancement pattern 117 (e.g., the recesses 117 A).
- the thermal enhancement pattern 117 (e.g., the recesses 117 A) may be partially or fully filled with the conductive material 117 C 1 .
- the conductive material 117 C may serves as the heat dissipation fin structures to increase the contact area of the semiconductor die 111 or the wafer 20 and the cooling liquid in a limited region.
- the gap may be formed between the thermal enhancement protrusions 123 and the conductive material 117 C such that the cooling liquid flows in the recess R so as to further enhance the ability of heat dissipation of the heat spreader 121 .
- the thermal enhancement pattern 117 ′ may be formed over the back surface 111 B of the semiconductor die 111 or the wafer 20 .
- the thermal enhancement pattern 117 ′ includes conductive protrusions 117 D protruding outwardly from the back surface 111 B of the semiconductor die 111 or the wafer 20 .
- the steps for forming the thermal enhancement pattern 117 ′ are described by following description.
- a seed layer may be formed over the back surface 111 B of the semiconductor die 111 or the wafer 20 .
- the seed layer may be a metal layer with high thermal conductivity, which may be a single layer or a composite layer including a plurality of sub-layers formed of different materials.
- the seed layer includes a titanium layer and a copper layer over the titanium layer.
- the seed layer may be formed using, for example, PVD or the like.
- a photoresist (not shown) is then formed and patterned on the seed layer.
- the photoresist may be formed by spin coating or the like and may be exposed to the light for patterning.
- the patterned photoresist corresponds to the desired thermal enhancement pattern 117 ′.
- an electro-plating process may be performed to form the conductive protrusions 117 D on the seed layer exposed by the patterned photoresist.
- the conductive protrusions 117 D may include a metal, like copper, gold, a combination thereof, or other suitable material with high thermal conductivity.
- the patterned photoresist and the portions of the seed layer on which the conductive protrusions 117 D is not formed may be removed.
- the patterned photoresist may be removed by an acceptable ashing or stripping process, such as using an oxygen plasma or the like.
- exposed portions of the seed layer are removed by using an acceptable etching process, such as wet or dry etching.
- the remaining portions of the seed layer and conductive material may together form the thermal enhancement pattern 117 ′ (e.g., the conductive protrusions 117 D).
- the thermal enhancement pattern 117 ′ protruding from the back surface 111 B of the semiconductor die 111 or the wafer 20 may serve as the fin structures to increase the contact area of the semiconductor die 111 or the wafer 20 and the cooling liquid in a limited region.
- the gap may be formed between the thermal enhancement protrusions 123 and the thermal enhancement pattern 117 ′ (e.g., the conductive protrusions 117 D) such that the cooling liquid flows in the recess R to further enhance the ability of heat dissipation of the heat spreader 121 .
- the semiconductor die 111 ′ of the semiconductor device 100 D may include a first semiconductor portion 111 a and a second semiconductor portion 111 b .
- the second semiconductor portion 111 b is disposed on the first semiconductor portion 111 a .
- the thermal enhancement pattern 117 (e.g., the recesses 117 A) is formed on the first semiconductor portion 111 a .
- the first semiconductor portion 111 a and the second semiconductor portion 111 b may or may not be formed by the same material such as the material of the semiconductor die 111 described above.
- the first semiconductor portion 111 a may be formed by the singulated semiconductor die 111 or the wafer 20 described above.
- the first semiconductor portion 111 a may include the connection pads 112 , the passivation layer 113 , the conductive pillars 114 and the protection layer 115 ′.
- the second semiconductor portion 111 b may be another wafer or another singulated semiconductor dies with or without the functional circuit therein. Then, a chip-to-wafer, a chip-to-chip or a chip-to-wafer bonding technology may be utilized to bond the first semiconductor portion 111 a and the second semiconductor portion 111 b .
- the dimension of the first semiconductor portion 111 a is greater than that of the second semiconductor portion 111 b .
- the thermal enhancement pattern 117 (e.g., the recesses 117 A) may be formed on the bottom surface of the first semiconductor portion 111 a which is away from the second semiconductor portion 111 b . Once the first semiconductor portion 111 a and the second semiconductor portion 111 b are bonded, the procedure referring from FIG. 2 through FIG. 4 and FIG. 6 through FIG. 10 may be performed to pack the semiconductor die 111 ′. In some embodiments, the gap may be formed between the thermal enhancement protrusions 123 and the thermal enhancement pattern 117 (e.g., the recesses 117 A) such that the cooling liquid flows in the recess R to further enhance the ability of heat dissipation of the heat spreader 121 .
- a second heat dissipation structure 130 may be further utilized.
- the second heat dissipation structure 130 may include a heat dissipation portion 131 and a second sealing member 132 .
- the heat dissipation portion 131 may be disposed on a top surface of the chip package 110 opposite to the heat spreader 121 .
- the second sealing member 132 may be disposed between the chip package 110 and the heat dissipation portion 131 such that the first heat dissipation structure 120 and the second heat dissipation structure 130 clamp the chip package 110 .
- the second sealing member 132 serves as stress buffer between the chip package 110 and the heat dissipation portion 130 .
- the second sealing member 132 may prevent the chip package 110 from directly in contact with the heat dissipation portion 131 to increase assembly yield rates of the second heat dissipation structure 130 .
- one or more screws S penetrated through the side wall 121 a of the first heat dissipation structure 120 , the insulating encapsulant 118 ′ of the chip package 110 , and the second heat dissipation structure 130 . Once the one or more screws S are penetrated, a plurality of nuts N thread in the both ends of the screws S to fasten the semiconductor device 100 E.
- the chip package 110 may be not easily separate from the first heat dissipation structure 120 and the second heat dissipation structure 130 .
- the conductive features 90 of the chip package 110 may be surrounded by and exposed from the second heat dissipation structure 130 .
- the top of the conductive features 90 may be higher than the top of the one or more screws S such that the conductive features 90 may be connected to other external devices.
- the material of the heat dissipation portion 131 and the second sealing member 132 may be or may not be the same as the heat spreader 121 and the first sealing member 122 , respectively.
- the heat dissipation portion 131 formed by the material with high thermal conductivity may further enhance the ability of the heat dissipation of the semiconductor device 100 E.
- the heat dissipation portion 131 ′ and the side wall 121 a ′ of the heat spreader 121 ′ may have corresponding screw threads ST such that the heat dissipation portion 131 ′ and the side wall 121 a ′ of the heat spreader 121 ′ may engage with each other.
- the first heat dissipation structure 120 ′ and the second heat dissipation structure 130 ′ clamp the chip package 110 into a firm combination situation to increase the assembly yield rate.
- the top of the conductive features 90 may be high than the top of the second heat dissipation structure 130 ′ such that the conductive features 90 may be connected to other external devices.
- the first sealing member 122 ′ and the second sealing member 132 ′ may prevent the chip package 110 from directly in contact with the side wall 121 a ′ of the heat spreader 121 ′ and the heat dissipation portion 131 ′ respectively to increase assembly yield rates of the first heat dissipation structure 120 ′ and the second heat dissipation structure 130 ′.
- the configuration of the inlet I and the outlet O in the semiconductor device 100 G as illustrated in FIG. 18 is different.
- the inlet I and the outlet O of the heat spreader 121 ′′ substantially extend and horizontally penetrate through side wall 121 a ′′ of the heat spreader 121 ′′, for example.
- the influence of the gravity may decrease such that the cooling liquid may be more easily to fulfill the recess R and the thermal enhancement pattern 117 (e.g., the recesses 117 A) and provide the steady ability of the heat dissipation.
- the thermal enhancement protrusions 123 ′ in the semiconductor device 100 H may protrude toward and be in contact with the back surface 111 B of the semiconductor die 111 or the wafer 20 .
- the physical contact between the semiconductor die 111 or the wafer 20 and thermal enhancement protrusions 123 ′ promotes the efficiency of heat conduction.
- the thermal enhancement protrusions 123 ′ may serve as the channel wall such that the space between the thermal enhancement protrusions 123 ′ may communicated the inlet I and the outlet O.
- the thermal enhancement protrusions 123 ′ may not cover each of the recesses 117 A.
- the recesses 117 A may be formed as the trench shape and the thermal enhancement protrusions 123 ′ may not fully cover each of the recesses 117 A. Thus, when the cooling liquid flows in the recess R, the cooling liquid may flow into the recesses 117 A as well.
- FIGS. 20A and 20B are top views of the heat spreader 121 illustrated in FIG. 19 .
- different types of the thermal enhancement protrusions 123 A and the thermal enhancement protrusions 123 B are illustrated.
- the thermal enhancement protrusions 123 A and the thermal enhancement protrusions 123 B are surrounded by the side wall 121 a of the heat spreader 121 .
- the space defined by the thermal enhancement protrusions 123 A or 123 B serves as the flow channel in which the cooling liquid may flow.
- various types of flow channels are defined and the cooling liquid flowing in the flow channel may increase the thermal exchange efficiency of the heat spreader 121 .
- the different characteristics shown in the alternative embodiments may combine with each other in accordance with the desired design of the packaging.
- the first heat dissipation structure 120 ′ and the second heat dissipation structure 130 ′ shown in FIG. 17 and the thermal enhancement protrusions 123 ′ may be utilized simultaneously, for example.
- a semiconductor device includes a chip package and a heat dissipation structure.
- the chip package including a semiconductor die is laterally encapsulated by an insulating encapsulant.
- the semiconductor die has an active surface, a back surface which is opposite to the active surface, and a thermal enhancement pattern on the back surface.
- a heat dissipation structure is connected to the chip package.
- the heat dissipation structure includes a heat spreader having a flow channel for a cooling liquid, and the cooling liquid in the flow channel is in contact with the thermal enhancement pattern.
- a semiconductor device includes a chip package and a heat dissipation structure.
- the chip package including a semiconductor die is laterally encapsulated by an insulating encapsulant.
- the semiconductor die has an active surface, a back surface which is opposite to the active surface, and a thermal enhancement pattern on the back surface.
- the heat dissipation structure includes a first dissipation portion and a second dissipation portion disposed on opposite surfaces of the chip package. The first dissipation portion and the second dissipation portion clamp the chip package.
- the first dissipation portion of the heat dissipation structure has a flow channel for a cooling liquid, and the cooling liquid in the flow channel is in contact with the thermal enhancement pattern.
- a method of fabricating a semiconductor device including the following steps is provided.
- a semiconductor die having an active surface and a back surface which is opposite to the active surface is provided.
- a thermal enhancement pattern is formed on the back surface of the semiconductor die.
- a heat dissipation structure is assembled with the chip package to form a flow channel for a cooling liquid between the heat dissipation structure and the chip package, wherein the cooling liquid in the flow channel is in contact with the thermal enhancement pattern.
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Abstract
Description
- This application claims the priority benefit of U.S. provisional application Ser. No. 62/737,859, filed on Sep. 27, 2018. The entirety of the above-mentioned patent application is hereby incorporated by reference herein and made a part of this specification.
- The semiconductor industry has experienced rapid growth due to continuous improvements in the integration density of various electronic components (i.e., transistors, diodes, resistors, capacitors, etc.). For the most part, this improvement in integration density has come from repeated reductions in minimum feature size, which allows more of the smaller components to be integrated into a given area. These smaller electronic components also require smaller packages that utilize less area than previous packages. Some smaller types of packages for semiconductor components include quad flat packages (QFPs), pin grid array (PGA) packages, ball grid array (BGA) packages, and so on.
- Currently, integrated packages, such as Fan-Out Wafer Level Package (FOWLP), Chip on Wafer on Substrate (CoWoS) package and so on, are becoming increasingly popular for their compactness. As the integration density increased, the power of the semiconductor components increases (i.e. over 16 kw/rack) to handle complicated operation. The more power inputs, the more heat is generated by the semiconductor components.
- Aspects of the present disclosure are best understood from the following detailed description when read with the accompanying figures. It is noted that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.
-
FIG. 1 throughFIG. 4 andFIG. 6 throughFIG. 10 illustrate a process flow for fabricating a semiconductor device in accordance with some embodiments of the present disclosure. -
FIGS. 5A and 5B illustrate the back surface of the singulated semiconductor die and the back surface of the wafer respectively in accordance with some embodiments of the present disclosure. -
FIG. 11 through 19 illustrate alternative embodiments in accordance with some embodiments of the present disclosure. -
FIGS. 20A and 20B are top views of the heat spreader illustrated inFIG. 19 . - The following disclosure provides many different embodiments, or examples, for implementing different features of the provided subject matter. Specific examples of components, values, operations, materials, arrangements, or the like, are described below to simplify the present disclosure. These are, of course, merely examples and are not intended to be limiting. Other components, values, operations, materials, arrangements, or the like, are contemplated. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
- Further, spatially relative terms, such as “beneath,” “below,” “lower,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The apparatus may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.
- In addition, terms, such as “first”, “second”, “third” and the like, may be used herein for ease of description to describe similar or different element(s) or feature(s) as illustrated in the figures, and may be used interchangeably depending on the order of the presence or the contexts of the description.
- Other features and processes may also be included. For example, testing structures may be included to aid in the verification testing of the 3D packaging or 3DIC devices. The testing structures may include, for example, test pads formed in a redistribution layer or on a substrate that allows the testing of the 3D packaging or 3DIC, the use of probes and/or probe cards, and the like. The verification testing may be performed on intermediate structures as well as the final structure. Additionally, the structures and methods disclosed herein may be used in conjunction with testing methodologies that incorporate intermediate verification of known good dies to increase the yield and decrease costs.
-
FIG. 1 throughFIG. 4 andFIG. 6 through 10 illustrate a process flow for fabricating a semiconductor device in accordance with some embodiments of the present disclosure.FIGS. 11A and 11B are top views of a semiconductor device according to theFIG. 10 in accordance with some embodiments of the present disclosure. It is to be noted that the process steps described herein cover a portion of the fabricating processes used to fabricate a package structure. The embodiments are intended to provide further explanations but are not used to limit the scope of the present disclosure. InFIG. 1 throughFIG. 4 andFIG. 6 throughFIG. 10 , semiconductor die is shown to representplural semiconductor dies 111 of thewafer 20, and a combination of a chip package and a heat dissipation structure is shown to represent a semiconductor device obtained following the fabricating method, for example. In other embodiments, two or more dies are shown to represent plural chips or dies of the wafer, and one or more package structures are shown to represent plural semiconductor devices obtained following the fabricating method, the disclosure is not limited thereto. - Referring to
FIG. 1 ,FIG. 1 illustrates the formation of an initial structure of semiconductor die, which may be a part ofwafer 20 that includes a plurality of semiconductor dies 111 therein. The semiconductor dies 111 may include active components (e.g., transistors or the like) and passive components (e.g., resistors, capacitors, inductors or the like) formed therein. In accordance with some embodiments of the present disclosure, the semiconductor dies 111 includes a crystalline silicon substrate. In accordance with other embodiments of the present disclosure, the semiconductor dies 111 includes an elementary semiconductor substrate such as germanium; a compound semiconductor substrate including silicon carbon, gallium arsenic, gallium phosphide, indium phosphide, indium arsenide, and/or indium antimonide; an alloy semiconductor substrate including SiGe, GaAsP, AlInAs, AlGaAs, GaInAs, GaInP, and/or GaInAsP; or combinations thereof. Other semiconductor substrates such as multi-layered or gradient substrates may also be used. Thesemiconductor dies 111 includes anactive surface 111A and aback surface 111B opposite to theactive surface 111A, as illustrated inFIG. 1 , theactive surface 111A of thesemiconductor dies 111 is referred to as the top surface of semiconductor dies 111, and aback surface 111B is referred to as the bottom surface of semiconductor dies 111, for example. - In some embodiments, the semiconductor dies 111 or the
wafer 20 may includeconnection pads 112 and apassivation layer 113. Theconnection pads 112 are formed on theactive surface 111A of the semiconductor dies 111 or thewafer 20 to physically and electrically connect the active device, passive device or integrated circuit in the semiconductor dies 111 and include a conductive material such as aluminum (Al), copper (Cu), or other suitable metal. Thepassivation layer 113 such as an oxide film, a nitride film, a dielectric film (such as benzocyclobutene (BCB), polybenzoxazole (PBO)), or the like, is formed on theactive surface 111A of the semiconductor dies 111 and expose at least portions of theconnection pads 112. - In some embodiments, the semiconductor dies 111 or the
wafer 20 include a plurality ofconductive pillars 114 formed over each of the exposed portions of theconnection pads 112. In some embodiments, theconductive pillars 114 are plated on and electrically connected to theconnection pads 112. The plating process ofconductive pillars 114 is described in detail as followings. First, a seed layer (not shown) is sputtered onto thepassivation layer 113 and the exposed portions of theconnection pads 112, for example. A patterned photoresist layer (not shown) such as patternedmask layer 116 may be then formed over the seed layer by photolithography, wherein the patterned photoresist layer exposes portions of the seed layer that are corresponding to the exposed portions of theconnection pads 112. Thewafer 20 including the patterned photoresist layer formed thereon is then immersed into a plating solution of a plating bath such that theconductive pillars 114 are plated on the exposed portions of the seed layer. After the platedconductive pillars 114 are formed, the patterned photoresist layer is stripped by an acceptable ashing or stripping process. Thereafter, by using theconductive pillars 114 as a hard mask, portions of the seed layer that are not covered by theconductive pillars 114 are removed through etching until thepassivation layer 113 is exposed, for example. - In some embodiments, after the
conductive pillars 114 are formed, aprotection layer 115 is formed on thepassivation layer 113 so as to cover theconductive pillars 114. In some embodiments, theprotection layer 115 may be a polymer layer having sufficient thickness to encapsulate and protect theconductive pillars 114. For example, theprotection layer 115 may be a polybenzoxazole (PBO) layer, a polyimide (PI) layer or other suitable polymers. In some alternative embodiments, theprotection layer 115 may be made of inorganic materials. - Referring to
FIG. 2 , thewafer 20 is flipped upside down. A patternedmask layer 116 formed on theback surface 111B of semiconductor dies 111 or thewafer 20 may include a plurality ofopenings 116A which expose portions of theback surface 111B. In some embodiments, the patternedmask layer 116 may be formed of silicon nitride, titanium nitride, or the like. In some embodiments, the patternedmask layer 116 is formed of silicon nitride, for example, by Low-Pressure Chemical Vapor Deposition (LPCVD). In accordance with other embodiments, the patternedmask layer 116 is formed by thermal nitridation of silicon, Plasma Enhanced Chemical Vapor Deposition (PECVD), or the like. The patterning process of patternedmask layer 116 is described in detail as followings. A photoresist layer is formed on theback surface 111B of the semiconductor dies 111. A patterned mask layer (not shown) with plurality of openings corresponding to the plurality ofopenings 116A may be located above the photoresist layer. Once the patterned mask layer is formed, an etching process is performed to form the patternedmask layer 116 using the patterned mask as an etching mask. - Next, in some embodiments, once the patterned
mask layer 116 is formed on theback surface 111B of semiconductor dies 111 or thewafer 20, an etching process is performed to form athermal enhancement pattern 117 shown inFIG. 3 . The etching process may include a wet etching process, which may be performed using KOH, Tetra Methyl Ammonium Hydroxide (TMAH), or the like as an etchant. After the etching process is performed to form thethermal enhancement pattern 117 on theback surface 111B of the semiconductor dies 111, the patternedmask layer 116 is removed from theback surface 111B of the semiconductor dies 111. In some embodiments, thethermal enhancement pattern 117 includesrecesses 117A extends from theback surface 111B of the semiconductor dies 111 into the semiconductor dies 111. As illustrated inFIG. 3 , the depth of therecesses 117A is less than the thickness of the semiconductor dies 111 or thewafer 20. For example, the depth of therecesses 117 is about 10% to about 50% of the thickness of the semiconductor dies 111 or thewafer 20. The area occupied by therecesses 117A may range from about 10% to about 80% of the area of theback surface 111B of the semiconductor dies 111. Therecesses 117A may be formed on theback surface 111B of the semiconductor dies 111 or thewafer 20 without significantly decreasing structural strength of the semiconductor dies 111 or thewafer 20. - Referring to
FIG. 4 , after striping the patternedmask layer 116 from theback surface 111B of the semiconductor dies 111, thewafer 20 is flipped upside down and mounted onto atape 30 such that theback surface 111B of the semiconductor dies 111 or thewafer 20 are adhered with thetape 30. In some embodiments, thetape 30 may support thewafer 20 mounted thereon and temporarily adhere with theback surface 111B of thewafer 20. After mounting thewafer 20 on thetape 30, a wafer dicing process is performed on thewafer 20 such that thewafer 20 is singulated. After performing the singulation process, a plurality of singulated semiconductor dies 111 temporarily adhered with thetape 30 are formed. As shown inFIG. 4 , each of the singulated semiconductor dies 111 includes theconnection pads 112, apassivation layer 113, theconductive pillars 114, and theprotection layer 115. - Moreover, during the wafer dicing process, the
protection layer 115 may well protect theconductive pillars 114 of the singulated semiconductor dies 111. In addition, theconductive pillars 114 of the singulated semiconductor dies 111 may be protected from being damaged by subsequently performed processes, such as the picking-up and placing process of the singulated semiconductor dies 111, the molding process, and so on. - In some alternative embodiments, the
wafer 20 temporarily adhered with thetape 30 may not be singulated into the plurality of singulated semiconductor dies 111 and thewafer 20 may be packed by the subsequently performed processes as illustrated inFIG. 6 throughFIG. 10 . -
FIG. 5A andFIG. 5B illustrate theback surface 111B of the singulated semiconductor die 111 and theback surface 111B of thewafer 20, respectively. As illustrated inFIG. 5A , in some embodiments which the wafer is singulated into the singulated semiconductor dies 111, theback surface 111B of each singulated semiconductor die 111 may be singulated into the desired shape such as rectangular shape for the subsequent packaging processes. However, as illustrated inFIG. 5B , in some alternative embodiments, thewafer 20 may not be singulated and have round shape. - Referring to
FIG. 6 , acarrier 60 having ade-bonding layer 61 formed thereon is provided. In some embodiments, thecarrier 60 is a glass substrate and thede-bonding layer 61 is formed on the glass substrate. In some embodiments, thede-bonding layer 61 may include a dielectric material layer made of an epoxy-based thermal-release material, which loses its adhesive property when being heated, such as a light-to-heat-conversion (LTHC) release coating film. In alternative embodiments, thede-bonding layer 61 may include a dielectric material layer made of an ultra-violet (UV) glue, which loses its adhesive property when being exposed to UV lights, for example. however, the disclosure is not limited thereto. - In some embodiments, the
wafer 20 or at least one of the singulated semiconductor dies 111 singulated from thewafer 20 is picked-up from thetape 30 and placed on thede-bonding layer 61 carried by thecarrier 60. For example, thewafer 20 or the singulated semiconductor die 111 is disposed on thede-bonding layer 61 carried by thecarrier 60 such that theback surface 111B of the singulated semiconductor die 111 or thewafer 20 is in contact with thede-bonding layer 61 and the thermal enhancement pattern 117 (e.g., therecesses 117A) is enclosed by thede-bonding layer 61. - Referring to
FIG. 7 , an insulatingmaterial 118 is formed on thede-bonding layer 61 to cover the at least one of the singulated semiconductor dies 111 or thewafer 20. In some embodiments, the insulatingmaterial 118 is a molding compound formed by an over-mold process. Theconductive pillars 114 and theprotection layer 115 of the singulated semiconductor die 111 or thewafer 20 are covered by the insulatingmaterial 118. As illustrated inFIG. 7 , theconductive pillars 114 and theprotection layer 115 of singulated the semiconductor die 111 are not revealed and are well protected by the insulatingmaterial 118. In some embodiments, the insulatingmaterial 118 includes epoxy resin or other suitable dielectric materials. - Referring to
FIG. 8 , the insulatingmaterial 118 is then ground until the top surfaces of theconductive pillars 114 and the top surface of theprotection layer 115 are exposed. In some embodiments, the insulatingmaterial 118 is ground by a mechanical grinding process, a chemical mechanical polishing (CMP) process or combinations thereof. After the insulatingmaterial 118 is ground, an insulatingencapsulant 118′ is formed over thede-bonding layer 61 to laterally encapsulate the singulated semiconductor die 111 or thewafer 20. In other words, the insulatingencapsulant 118′ is in contact with and surrounds sidewalls of the singulated semiconductor die 111 or thewafer 20. During the grinding process of the insulatingmaterial 118, portions of theprotection layer 115 are ground to reveal theconductive pillars 114 and aprotection layer 115′ is formed to laterally encapsulate theconductive pillars 114. In some embodiments, after the forming of the insulatingencapsulant 118′ and theprotection layer 115′, the top surface of the insulatingencapsulant 118′, the top surfaces of theconductive pillars 114 and the top surface of theprotection layer 115′ are substantially at the same level. - Referring to
FIG. 9 , after the insulatingencapsulant 118′ and theprotection layer 115′ are formed, aredistribution circuit structure 119 electrically connected to theconductive pillars 114 of the singulated semiconductor die 111 or thewafer 20 is formed on the top surfaces of the top surface of the insulatingencapsulant 118′, the top surfaces of theconductive pillars 114, and the top surface of theprotection layer 115′. Theredistribution circuit structure 119 may include a plurality ofredistribution wirings 119 a, a plurality ofvias 119 b, and a plurality of patterneddielectric layers 119 c, as shown inFIG. 9 . The redistribution wirings 119 a and the patterneddielectric layers 119 c are stacked alternately, and thevias 119 b are embedded in and penetrate the patterneddielectric layers 119 c to electrically connect the redistribution wirings 119 a. For example, the redistribution wirings 119 a and a plurality ofvias 119 b may be copper wirings and copper vias, and the material of the patterneddielectric layers 119 c may include polyimide (PI), polybenzoxazole (PBO) or other suitable dielectric polymer. In some embodiments, the material of the patterneddielectric layers 119 c may be the same material as theprotection layer 115′. - Referring to
FIG. 9 andFIG. 10 , after forming theredistribution circuit structure 119, a plurality ofconductive features 90 electrically connected to theredistribution circuit structure 119 are formed. The conductive features 90 are disposed on theredistribution circuit structure 119 and are arranged in array. Thus, thechip package 110 including the semiconductor chip 50, the insulatingencapsulant 118′,redistribution circuit structure 119, and the conductive features 90 are formed. In some embodiments, the conductive features 90 may be conductive balls (e.g., solder balls) arranged in array. Subsequently, thede-bonding layer 61 and thecarrier 60 is de-bonded from thechip package 110 such that theback surface 111B of the semiconductor die 111 or thewafer 20, the bottom surface of the insulatingencapsulant 118′ opposite to the top surface of the insulatingencapsulant 118′ are de-bonded from thecarrier 60 and are thus revealed. After de-bonding, theback surface 111B of the semiconductor die 111 and the thermal enhancement pattern 117 (e.g., therecesses 117A) formed thereon are revealed. The bottom surface of the insulatingencapsulant 118′ and theback surface 111B of the semiconductor die 111 or thewafer 20 are substantially at the same level after de-bonding. In some embodiments, the external energy such as UV laser, visible light or heat, may be applied to thede-bonding layer 61 such that thechip package 110 and thede-bonding layer 61 carried by thecarrier 60 can be separated from each other. - Referring to
FIG. 11 , thechip package 110 is disposed over and assembled with a firstheat dissipation structure 120 which includes aheat spreader 121 and afirst sealing member 122. Thechip package 110 is assembled withside wall 121 a of theheat spreader 121 through thefirst sealing member 122. As illustrated inFIG. 11 , thefirst sealing member 122 is disposed between thechip package 110 and theside wall 121 a of theheat spreader 121. Both thechip package 110 and theside wall 121 a of theheat spreader 121 are in contact with thefirst sealing member 122. In some embodiments, an inner side surface of thefirst sealing member 122 and an inner side surface of theside wall 121 a of theheat spreader 121 are substantially aligned with each other in vertical direction. Furthermore, in some embodiments, an side surface of the semiconductor die 111 or thewafer 20 is not aligned with the inner side surfaces of theside wall 121 a and thefirst sealing member 122 such that the interface between the insulatingencapsulant 118′ and the semiconductor die 111 (or the wafer 20) may be protected by thefirst sealing member 122 from delamination. Thefirst sealing member 122 not only provides sealing function but also serves as stress buffer between thechip package 110 and theside wall 121 a of theheat spreader 121. Thefirst sealing member 122 may prevent thechip package 110 from directly in contact with theside wall 121 a of theheat spreader 121 to increase assembly yield rates of the firstheat dissipation structure 120. Theheat spreader 121 has a recess R surrounded by theside wall 121 a andbottom plate 121 b of theheat spreader 121. In some embodiments, the recess R is corresponding to the thermal enhancement pattern 117 (e.g., therecesses 117A) on theback surface 111B of the semiconductor die 111 or thewafer 20. Thefirst sealing member 122 disposed on theback surface 111B of the semiconductor die 111 or thewafer 20 and the bottom surface of the insulatingencapsulant 118′ may expose thethermal enhancement pattern 117. Therefore, after assembling thechip package 110, thefirst sealing member 122 and theheat spreader 121, the recess R is capped or enclosed by theback surface 111B of the semiconductor die 111 or thewafer 20 and the recess R may serve as flow channel for cooling liquid (e.g., cooling water or other types of coolant). After assembling thechip package 110, thefirst sealing member 122 and theheat spreader 121, the recess R and therecesses 117A are communicated with each other, and both the recess R and therecesses 117A may serve as flow channel for cooling liquid. In some embodiments, theheat spreader 121 further includes an inlet I and an outlet O communicated with the flow channel, wherein the inlet I and the outlet O penetrate through thebottom plate 121 b of theheat spreader 121. The cooling liquid may be applied and flow into the flow channel (e.g., the recess R and therecesses 117A) from the inlet I and may flow out from the outlet O. The material of thefirst sealing member 122 may include organic adhesive such as polybutylacrylate (PBA) or other suitable sealants. In some embodiments, thefirst sealing member 122 may not only cover the bottom surface of the insulatingencapsulant 118′, but also partially cover theback surface 111B of the semiconductor die 111 or thewafer 20. However, the distribution of thefirst sealing member 122 is not limited in the present disclosure. The material of theheat spreader 121 may be high thermal conductivity material such as copper, aluminum, steel, the combination thereof and so on. In some embodiments, the inlet I and the outlet O formed on theheat spreader 121 may be machined using a laser drill, a mechanical drill or the like. - Moreover, in some embodiments, the
heat spreader 121 includesthermal enhancement protrusions 123 formed on an inner top surface of thebottom plate 121 b. Thethermal enhancement protrusions 123 protrude from the inner top surface of thebottom plate 121 b toward theback surface 111B of the semiconductor die 111 or thewafer 20. Furthermore, thethermal enhancement protrusions 123 extend into the recess R between thebottom plate 121 b and the semiconductor die 111 or thewafer 20. In certain embodiments, thethermal enhancement protrusions 123 and thethermal enhancement pattern 117 face to each other. In some embodiments, as illustrated inFIG. 11 , thethermal enhancement protrusions 123 are not in contact with theback surface 111B of the semiconductor die 111 such that a gap is formed between thethermal enhancement protrusions 123 and theback surface 111B of the semiconductor die 111 or thewafer 20. In certain embodiments, thethermal enhancement protrusions 123 may generate turbulence of the cooling liquid when the cooling liquid flows in the recess R so as to further enhance the ability of heat dissipation of theheat spreader 121. Meanwhile, the thermal enhancement pattern 117 (e.g., therecesses 117A) formed on theback surface 111B of the semiconductor dies 111 or thewafer 20 may serve as heat dissipation fins to increase the contact area of the semiconductor die 111 and cooling liquid such that the heat dissipation ability of theheat spreader 121 is enhanced. Moreover, thefirst sealing member 122 serves as a sealant for preventing the cooling liquid from leakage. -
FIG. 12 toFIG. 19 are schematic cross-sectional views of alternative embodiments of a semiconductor device according to some exemplary embodiments of the present disclosure. - Referring to
FIG. 12 , in thesemiconductor device 100A, the thermal enhancement pattern 117 (e.g., therecesses 117A) may be filled with theconductive material 117B (e.g., thermal conductive posts) to enhance the ability of heat dissipation. In some alternative embodiments, after the patternedmask layer 116 is removed from theback surface 111B of the semiconductor die 111 or thewafer 20 as shown inFIG. 3 , theconductive material 117B is embedded in therecesses 117A of thethermal enhancement pattern 117. In some embodiments, theconductive material 117B may be formed by sputtering of a seed layer on theback surface 111B of the semiconductor die 111 or thewafer 20. In some embodiments, the seed layer may be a metal layer with high thermal conductivity, which may be a single layer or a composite layer including a plurality of sub-layers formed of different materials. In some embodiments, the seed layer includes a titanium layer and a copper layer over the titanium layer. The seed layer may be formed using, for example, PVD or the like. Once the seed layer is deposited, the process of developing the photoresist on theback surface 111B of the semiconductor die 111 or thewafer 20 may be performed. Then, conductive materials, is plated on the portions of the seed layer which are not covered by the patterned photoresist to fill therecesses 117A. Subsequently, patterned photoresist may be stripped and the seed layer and the conductive materials may be ground or polished by a CMP process until the portion of theback surface 111B of the semiconductor die 111 or thewafer 20 is exposed. However, the forming of theconductive material 117B is not limited in the present disclosure. In certain embodiments, theconductive material 117B may be copper or other suitable material with high thermal conductivity. Because of the high thermal conductivity, theconductive material 117B may further enhance the ability of heat dissipation. In certain embodiments, the exposed surface of theconductive material 117B and theback surface 111B of the semiconductor die 111 or thewafer 20 are substantially at the same level, and the gap may be formed between thethermal enhancement protrusions 123 and theback surface 111B of the semiconductor die 111 or thewafer 20. - Referring to
FIG. 13 , in some alternative embodiments, after the patternedmask layer 116 is removed from theback surface 111B of the semiconductor die 111 or thewafer 20 as shown inFIG. 3 , theconductive material 117C may be blanket deposited over theback surface 111B of the semiconductor die 111 or thewafer 20. Theconductive material 117C may include one or more layers of copper, gold, a combination thereof, or other suitable material with high thermal conductivity, and may be formed by ALD, PVD, CVD, a combination thereof, or the like. In certain embodiments, theconductive material 117C may be formed conformally and includes a first conductive portion located inside the thermal enhancement pattern 117 (e.g., therecesses 117A) and a second conductive portion located outside thethermal enhancement pattern 117. In other words, the first portion of theconductive material 117C at least partially fills therecesses 117A and the second portion of theconductive material 117C formed on theback surface 111B of the semiconductor die 111 or thewafer 20. In some embodiments, theconductive material 117C may partially or fully cover theback surface 111B of the semiconductor die 111 or thewafer 20 except the region of the thermal enhancement pattern 117 (e.g., therecesses 117A). In certain embodiments, the thermal enhancement pattern 117 (e.g., therecesses 117A) may be partially or fully filled with the conductive material 117C1. In certain embodiments, when thesemiconductor device 100B operates, theconductive material 117C may serves as the heat dissipation fin structures to increase the contact area of the semiconductor die 111 or thewafer 20 and the cooling liquid in a limited region. In certain embodiments, the gap may be formed between thethermal enhancement protrusions 123 and theconductive material 117C such that the cooling liquid flows in the recess R so as to further enhance the ability of heat dissipation of theheat spreader 121. - Referring to
FIG. 14 , in some alternative embodiments, rather than performing the etching process to form the thermal enhancement pattern 117 (e.g., therecesses 117A) as shown inFIG. 3 , thethermal enhancement pattern 117′ may be formed over theback surface 111B of the semiconductor die 111 or thewafer 20. In certain embodiments, thethermal enhancement pattern 117′ includes conductive protrusions 117D protruding outwardly from theback surface 111B of the semiconductor die 111 or thewafer 20. The steps for forming thethermal enhancement pattern 117′ are described by following description. A seed layer may be formed over theback surface 111B of the semiconductor die 111 or thewafer 20. In some embodiments, the seed layer may be a metal layer with high thermal conductivity, which may be a single layer or a composite layer including a plurality of sub-layers formed of different materials. In some embodiments, the seed layer includes a titanium layer and a copper layer over the titanium layer. The seed layer may be formed using, for example, PVD or the like. A photoresist (not shown) is then formed and patterned on the seed layer. The photoresist may be formed by spin coating or the like and may be exposed to the light for patterning. The patterned photoresist corresponds to the desiredthermal enhancement pattern 117′. Then, an electro-plating process may be performed to form the conductive protrusions 117D on the seed layer exposed by the patterned photoresist. The conductive protrusions 117D may include a metal, like copper, gold, a combination thereof, or other suitable material with high thermal conductivity. Once the conductive protrusions 117D has been formed, the patterned photoresist and the portions of the seed layer on which the conductive protrusions 117D is not formed may be removed. The patterned photoresist may be removed by an acceptable ashing or stripping process, such as using an oxygen plasma or the like. In some embodiments, once the patterned photoresist has been removed, exposed portions of the seed layer are removed by using an acceptable etching process, such as wet or dry etching. Thus, the remaining portions of the seed layer and conductive material may together form thethermal enhancement pattern 117′ (e.g., the conductive protrusions 117D). In some embodiments, thethermal enhancement pattern 117′ protruding from theback surface 111B of the semiconductor die 111 or thewafer 20 may serve as the fin structures to increase the contact area of the semiconductor die 111 or thewafer 20 and the cooling liquid in a limited region. In certain embodiments, the gap may be formed between thethermal enhancement protrusions 123 and thethermal enhancement pattern 117′ (e.g., the conductive protrusions 117D) such that the cooling liquid flows in the recess R to further enhance the ability of heat dissipation of theheat spreader 121. - Referring to
FIG. 15 , in some embodiments, the semiconductor die 111′ of thesemiconductor device 100D may include afirst semiconductor portion 111 a and asecond semiconductor portion 111 b. Thesecond semiconductor portion 111 b is disposed on thefirst semiconductor portion 111 a. The thermal enhancement pattern 117 (e.g., therecesses 117A) is formed on thefirst semiconductor portion 111 a. Thefirst semiconductor portion 111 a and thesecond semiconductor portion 111 b may or may not be formed by the same material such as the material of the semiconductor die 111 described above. In some embodiments, thefirst semiconductor portion 111 a may be formed by the singulated semiconductor die 111 or thewafer 20 described above. Thefirst semiconductor portion 111 a may include theconnection pads 112, thepassivation layer 113, theconductive pillars 114 and theprotection layer 115′. In some embodiments, thesecond semiconductor portion 111 b may be another wafer or another singulated semiconductor dies with or without the functional circuit therein. Then, a chip-to-wafer, a chip-to-chip or a chip-to-wafer bonding technology may be utilized to bond thefirst semiconductor portion 111 a and thesecond semiconductor portion 111 b. In some embodiments, the dimension of thefirst semiconductor portion 111 a is greater than that of thesecond semiconductor portion 111 b. The thermal enhancement pattern 117 (e.g., therecesses 117A) may be formed on the bottom surface of thefirst semiconductor portion 111 a which is away from thesecond semiconductor portion 111 b. Once thefirst semiconductor portion 111 a and thesecond semiconductor portion 111 b are bonded, the procedure referring fromFIG. 2 throughFIG. 4 andFIG. 6 throughFIG. 10 may be performed to pack the semiconductor die 111′. In some embodiments, the gap may be formed between thethermal enhancement protrusions 123 and the thermal enhancement pattern 117 (e.g., therecesses 117A) such that the cooling liquid flows in the recess R to further enhance the ability of heat dissipation of theheat spreader 121. - Referring to
FIG. 16 , in some embodiments, in order to enhance the structural strength of thesemiconductor device 100E, after thesemiconductor device 100 illustrated inFIG. 10 is formed, a secondheat dissipation structure 130 may be further utilized. The secondheat dissipation structure 130 may include aheat dissipation portion 131 and asecond sealing member 132. Theheat dissipation portion 131 may be disposed on a top surface of thechip package 110 opposite to theheat spreader 121. Thesecond sealing member 132 may be disposed between thechip package 110 and theheat dissipation portion 131 such that the firstheat dissipation structure 120 and the secondheat dissipation structure 130 clamp thechip package 110. Thesecond sealing member 132 serves as stress buffer between thechip package 110 and theheat dissipation portion 130. Thesecond sealing member 132 may prevent thechip package 110 from directly in contact with theheat dissipation portion 131 to increase assembly yield rates of the secondheat dissipation structure 130. Then, one or more screws S penetrated through theside wall 121 a of the firstheat dissipation structure 120, the insulatingencapsulant 118′ of thechip package 110, and the secondheat dissipation structure 130. Once the one or more screws S are penetrated, a plurality of nuts N thread in the both ends of the screws S to fasten thesemiconductor device 100E. In such way, thechip package 110 may be not easily separate from the firstheat dissipation structure 120 and the secondheat dissipation structure 130. In certain embodiments, the conductive features 90 of thechip package 110 may be surrounded by and exposed from the secondheat dissipation structure 130. The top of the conductive features 90 may be higher than the top of the one or more screws S such that the conductive features 90 may be connected to other external devices. In certain embodiments, the material of theheat dissipation portion 131 and thesecond sealing member 132 may be or may not be the same as theheat spreader 121 and thefirst sealing member 122, respectively. In certain embodiments, theheat dissipation portion 131 formed by the material with high thermal conductivity may further enhance the ability of the heat dissipation of thesemiconductor device 100E. - Referring to
FIG. 17 , in some alternative embodiments of thesemiconductor device 100F, in the case which thewafer 20 may not be singulated or the desired shape of the singulated semiconductor dies 111 may be round shape, theheat dissipation portion 131′ and theside wall 121 a′ of theheat spreader 121′ may have corresponding screw threads ST such that theheat dissipation portion 131′ and theside wall 121 a′ of theheat spreader 121′ may engage with each other. The firstheat dissipation structure 120′ and the secondheat dissipation structure 130′ clamp thechip package 110 into a firm combination situation to increase the assembly yield rate. In certain embodiments, the top of the conductive features 90 may be high than the top of the secondheat dissipation structure 130′ such that the conductive features 90 may be connected to other external devices. In certain embodiments, thefirst sealing member 122′ and thesecond sealing member 132′ may prevent thechip package 110 from directly in contact with theside wall 121 a′ of theheat spreader 121′ and theheat dissipation portion 131′ respectively to increase assembly yield rates of the firstheat dissipation structure 120′ and the secondheat dissipation structure 130′. - Compared to the
semiconductor device 100 as illustrated inFIG. 11 , the configuration of the inlet I and the outlet O in thesemiconductor device 100G as illustrated inFIG. 18 , is different. As shown inFIG. 18 , the inlet I and the outlet O of theheat spreader 121″ substantially extend and horizontally penetrate throughside wall 121 a″ of theheat spreader 121″, for example. In certain embodiments, when the cooling liquid flow through the recess R, the influence of the gravity may decrease such that the cooling liquid may be more easily to fulfill the recess R and the thermal enhancement pattern 117 (e.g., therecesses 117A) and provide the steady ability of the heat dissipation. - Compared to the
semiconductor device 100 as illustrated inFIG. 1 , thethermal enhancement protrusions 123′ in thesemiconductor device 100H may protrude toward and be in contact with theback surface 111B of the semiconductor die 111 or thewafer 20. The physical contact between the semiconductor die 111 or thewafer 20 andthermal enhancement protrusions 123′ promotes the efficiency of heat conduction. Thethermal enhancement protrusions 123′ may serve as the channel wall such that the space between thethermal enhancement protrusions 123′ may communicated the inlet I and the outlet O. On the other hand, it should be appreciated that thethermal enhancement protrusions 123′ may not cover each of therecesses 117A. In some embodiments, therecesses 117A may be formed as the trench shape and thethermal enhancement protrusions 123′ may not fully cover each of therecesses 117A. Thus, when the cooling liquid flows in the recess R, the cooling liquid may flow into therecesses 117A as well. -
FIGS. 20A and 20B are top views of theheat spreader 121 illustrated inFIG. 19 . As shown inFIG. 20A andFIG. 20B , different types of thethermal enhancement protrusions 123A and thethermal enhancement protrusions 123B are illustrated. Thethermal enhancement protrusions 123A and thethermal enhancement protrusions 123B are surrounded by theside wall 121 a of theheat spreader 121. In such embodiments, the space defined by thethermal enhancement protrusions thermal enhancement protrusions 123A and thethermal enhancement protrusions 123B, various types of flow channels are defined and the cooling liquid flowing in the flow channel may increase the thermal exchange efficiency of theheat spreader 121. - Furthermore, it should be appreciated that the different characteristics shown in the alternative embodiments (i.e., the characteristics are shown in
FIG. 11 throughFIG. 19 ) may combine with each other in accordance with the desired design of the packaging. The firstheat dissipation structure 120′ and the secondheat dissipation structure 130′ shown inFIG. 17 and thethermal enhancement protrusions 123′ may be utilized simultaneously, for example. - In accordance with some embodiments of the disclosure, a semiconductor device includes a chip package and a heat dissipation structure. The chip package including a semiconductor die is laterally encapsulated by an insulating encapsulant. The semiconductor die has an active surface, a back surface which is opposite to the active surface, and a thermal enhancement pattern on the back surface. A heat dissipation structure is connected to the chip package. The heat dissipation structure includes a heat spreader having a flow channel for a cooling liquid, and the cooling liquid in the flow channel is in contact with the thermal enhancement pattern.
- In accordance with some embodiments of the disclosure, a semiconductor device includes a chip package and a heat dissipation structure. The chip package including a semiconductor die is laterally encapsulated by an insulating encapsulant. the semiconductor die has an active surface, a back surface which is opposite to the active surface, and a thermal enhancement pattern on the back surface. The heat dissipation structure includes a first dissipation portion and a second dissipation portion disposed on opposite surfaces of the chip package. The first dissipation portion and the second dissipation portion clamp the chip package. The first dissipation portion of the heat dissipation structure has a flow channel for a cooling liquid, and the cooling liquid in the flow channel is in contact with the thermal enhancement pattern.
- In accordance with some embodiments of the disclosure, a method of fabricating a semiconductor device including the following steps is provided. A semiconductor die having an active surface and a back surface which is opposite to the active surface is provided. A thermal enhancement pattern is formed on the back surface of the semiconductor die. An insulating encapsulant laterally encapsulates the semiconductor die to form a chip package. A heat dissipation structure is assembled with the chip package to form a flow channel for a cooling liquid between the heat dissipation structure and the chip package, wherein the cooling liquid in the flow channel is in contact with the thermal enhancement pattern.
- The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure.
Claims (20)
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US11177192B2 (en) | 2021-11-16 |
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