US20160290343A1 - Rotor device for a vacuum pump, and vacuum pump - Google Patents

Rotor device for a vacuum pump, and vacuum pump Download PDF

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Publication number
US20160290343A1
US20160290343A1 US15/035,492 US201415035492A US2016290343A1 US 20160290343 A1 US20160290343 A1 US 20160290343A1 US 201415035492 A US201415035492 A US 201415035492A US 2016290343 A1 US2016290343 A1 US 2016290343A1
Authority
US
United States
Prior art keywords
rotor
vacuum pump
shaft
rotor shaft
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US15/035,492
Other languages
English (en)
Inventor
Markus Henry
Juergen Brezina
Robert Stolle
Peter Koeppel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of US20160290343A1 publication Critical patent/US20160290343A1/en
Assigned to LEYBOLD GMBH reassignment LEYBOLD GMBH CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: OERLIKON LEYBOLD VACUUM GMBH
Assigned to OERLIKON LEYBOLD VACUUM GMBH reassignment OERLIKON LEYBOLD VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HENRY, MARKUS, KOEPPEL, PETER, STOLLE, ROBERT, BREZINA, JUERGEN
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/174—Titanium alloys, e.g. TiAl
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Definitions

  • the disclosure relates to a vacuum pump rotor device, as well as to a vacuum pump.
  • Vacuum pumps such as turbomolecular pumps, for example, have a rotor shaft arranged in a pump housing.
  • the rotor shaft typically driven by an electric motor carries at least one rotor element.
  • a turbomolecular pump a plurality of rotor elements in the form of rotor discs is arranged on the rotor shaft.
  • the rotor shaft is rotatably supported in the pump housing via bearing elements.
  • the vacuum pump has a stator element arranged in the housing.
  • a turbomolecular pump a plurality of stator elements formed as stator discs are provided.
  • the stator discs and the rotor discs are arranged alternating in the longitudinal direction of the pump or in flow direction of the medium to be pumped.
  • the cooling time is about 5 minutes.
  • the rotor elements must be heated in an oven, e.g. a convection oven, to about 120° C.
  • the corresponding heating time is 1-2 hours.
  • the time for heating the structural assembly thoroughly after joining about is 1 2 hours to reach room temperature. This known joining method is time-consuming and complex.
  • the rotor device for a vacuum pump of the present disclosure has a rotor shaft. At least one rotor element is arranged on the rotor shaft. In particular in case of a rotor device of a turbomolecular pump, a plurality of rotor elements in the form of rotor discs are arranged in the longitudinal direction of the rotor shaft.
  • the rotor or the rotor element contains aluminum, titanium and/or CFK and the rotor shaft comprises a chromium-nickel steel (Cr—Ni steel).
  • Cr—Ni steel chromium-nickel steel
  • the use of aluminum, titanium and/or CFK as a material for a rotor or a rotor element is advantageous in that it is possible to achieve the required strength and stability relative to the density of the material that is required in order to reach the high rotary speeds and the great forces and tensions going along therewith.
  • the required properties of the shaft can be achieved with a steel shaft, in particular a stainless steel shaft.
  • the shaft comprises Ni—Cr steel with added sulfur and, as is particularly preferred, is made from chromium-nickel steel with added sulfur.
  • the rotor or the on rotor element is made of aluminum, an aluminum alloy and/or high-strength aluminum.
  • high-strength aluminum with a high tensile strength value of in particular at least 250 N/mm.
  • High-strength aluminum further has the advantage that it has a high fatigue strength also at operating temperatures of 100-120° C. It is particularly preferred to use AW—Al Cu 2 Mg 1.5 Ni.
  • the at least one rotor element is made of titanium or a titanium alloy and/or of CFK.
  • the thermal expansion coefficient of the rotor shaft differs as little as possible from the thermal expansion coefficient of the at least one rotor element.
  • a material pair is used that does not tend to gall and which differ only slightly in thermal expansion coefficient, so that less oversize is required for joining than in prior art.
  • the components can be joined at room temperature due to the small required oversize or, at most, the components only need to have a small temperature difference.
  • the material pair used is a material pair of in particular high-strength aluminum and stainless steel.
  • the at least one rotor element is made of aluminum and the rotor shaft is made of stainless steel, in particular Cr—Ni steel with added sulfur.
  • the two components are joined at room temperature, in particular to join them by pressing.
  • the at least one rotor element has an oversize with respect to the rotor shaft for which expansions in the circumferential direction of 0.25% to 0.35% may occur. Due to this oversize, operating safety can be ensured despite the great temperature variations, while at the same time the components can still be joined at room temperature.
  • a plurality of rotor elements are arranged in particular in the longitudinal direction on the rotor shaft, in particular by pressing.
  • a corresponding rotor element may for example also be a disc-shaped carrier of a Holweck stage. This carrier caries the tubular elements of the Holweck stage or is integrally formed therewith.
  • a rotor element or such a rotor element carrier is made from the above mentioned material, in particular aluminum, and is fitted on a stainless steel shaft by pressing.
  • the rotor elements may be rotor discs, where, possibly, spacer elements are provided in addition between rotor elements or rotor discs. These elements may in particular serve to form an intermediate inlet in a multi-inlet pump.
  • the disclosure further relates to a vacuum pump which in particular is a turbomolecular pump.
  • the vacuum pump of the present disclosure has a rotor device of the present disclosure as described above, in particular in one of the preferred developments.
  • the vacuum pump has a pump housing in which the rotor shaft is supported by bearing elements.
  • a driving device is provided that drives the rotor shaft.
  • at least one stator element is arranged in the pump housing, wherein the stator element may be a stator disc.
  • a plurality of stator discs is arranged alternating with a plurality of rotor discs.
  • the FIGURE shows a greatly simplified schematic sectional view of a turbomolecular pump.
  • a plurality of rotor elements 12 in the form of rotor discs are arranged on a rotor shaft 10 by being pressed thereon.
  • Stator elements 16 are arranged in a pump housing 14 , which in the embodiment illustrated may be stator discs 16 .
  • the rotor shaft 10 is further supported in the pump housing 14 by bearing elements 18 , 20 and is driven by a driving device 22 .
  • a sleeve-like spacer element 24 is further provided between two rotor discs 12 . Thereby, an intermediate inlet 26 is formed.
  • the vacuum pump schematically illustrated in the drawing draws the medium to be conveyed through a main inlet in the direction of an arrow 28 . Further, medium is drawn via the intermediate inlet 26 in the direction of an arrow 30 . The two media taken in are conveyed towards an outlet as illustrated by an arrow 32 .
  • the rotor shaft 10 is made, in a preferred embodiment, of stainless steel.
  • the individual rotor elements 12 as well as the spacer element 24 are made of aluminum in a preferred embodiment thereof. Fitting the rotor elements 12 and the spacer element 24 is performed by pressing at room temperature.
  • the individual rotor elements 12 as well as the spacer element 24 show an oversize-related expansion in the circumferential direction of 0.07% to 0.2%.
  • the pressing force with which the components can be joined at room temperature is in a range from 5 to 50 kN.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
US15/035,492 2013-11-12 2014-11-05 Rotor device for a vacuum pump, and vacuum pump Abandoned US20160290343A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE202013010195.4U DE202013010195U1 (de) 2013-11-12 2013-11-12 Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe
DE202013010195.4 2013-11-12
PCT/EP2014/073771 WO2015071143A1 (de) 2013-11-12 2014-11-05 Vakuumpumpen-rotoreinrichtung sowie vakuumpumpe

Publications (1)

Publication Number Publication Date
US20160290343A1 true US20160290343A1 (en) 2016-10-06

Family

ID=51897252

Family Applications (1)

Application Number Title Priority Date Filing Date
US15/035,492 Abandoned US20160290343A1 (en) 2013-11-12 2014-11-05 Rotor device for a vacuum pump, and vacuum pump

Country Status (7)

Country Link
US (1) US20160290343A1 (ja)
EP (1) EP3069027B1 (ja)
JP (1) JP6532461B2 (ja)
KR (1) KR102202936B1 (ja)
CN (1) CN105765231B (ja)
DE (1) DE202013010195U1 (ja)
WO (1) WO2015071143A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106762713B (zh) * 2017-03-09 2018-12-14 苏州摩星真空科技有限公司 立式复合径流分子泵

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6095754A (en) * 1998-05-06 2000-08-01 Applied Materials, Inc. Turbo-Molecular pump with metal matrix composite rotor and stator
WO2005121561A1 (en) * 2004-06-07 2005-12-22 The Boc Group Plc Vacuum pump impeller
US20090095436A1 (en) * 2007-10-11 2009-04-16 Jean-Louis Pessin Composite Casting Method of Wear-Resistant Abrasive Fluid Handling Components
US20090214348A1 (en) * 2008-02-27 2009-08-27 Gianluca Buccheri Method for manufacturing the rotor assembly of a rotating vacuum pump
US20100187121A1 (en) * 2007-04-05 2010-07-29 Atotech Deutschland Gmbh Process for the preparation of electrodes for use in a fuel cell
US20130309076A1 (en) * 2011-02-04 2013-11-21 Edwards Japan Limited Rotating Body of Vacuum Pump, Fixed Member Disposed Opposite Rotating Body, and Vacuum Pump Provided with Rotating Body and Fixed Member

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS59113990A (ja) * 1982-12-22 1984-06-30 Hitachi Ltd タ−ボ分子ポンプのロ−タ製造方法
JP3486000B2 (ja) * 1995-03-31 2004-01-13 日本原子力研究所 ねじ溝真空ポンプ
JP3792318B2 (ja) * 1996-10-18 2006-07-05 株式会社大阪真空機器製作所 真空ポンプ
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10039006A1 (de) * 2000-08-10 2002-02-21 Leybold Vakuum Gmbh Zweiwellenvakuumpumpe
DE10053663A1 (de) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe mit Rotor und Welle
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
DE102005008643A1 (de) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck-Vakuumpumpe
US8109744B2 (en) * 2008-03-26 2012-02-07 Ebara Corporation Turbo vacuum pump
DE102008063131A1 (de) * 2008-12-24 2010-07-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6095754A (en) * 1998-05-06 2000-08-01 Applied Materials, Inc. Turbo-Molecular pump with metal matrix composite rotor and stator
WO2005121561A1 (en) * 2004-06-07 2005-12-22 The Boc Group Plc Vacuum pump impeller
US20100187121A1 (en) * 2007-04-05 2010-07-29 Atotech Deutschland Gmbh Process for the preparation of electrodes for use in a fuel cell
US20090095436A1 (en) * 2007-10-11 2009-04-16 Jean-Louis Pessin Composite Casting Method of Wear-Resistant Abrasive Fluid Handling Components
US20090214348A1 (en) * 2008-02-27 2009-08-27 Gianluca Buccheri Method for manufacturing the rotor assembly of a rotating vacuum pump
US20130309076A1 (en) * 2011-02-04 2013-11-21 Edwards Japan Limited Rotating Body of Vacuum Pump, Fixed Member Disposed Opposite Rotating Body, and Vacuum Pump Provided with Rotating Body and Fixed Member

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Also Published As

Publication number Publication date
JP6532461B2 (ja) 2019-06-19
EP3069027A1 (de) 2016-09-21
CN105765231A (zh) 2016-07-13
DE202013010195U1 (de) 2015-02-18
EP3069027B1 (de) 2020-09-09
JP2016537552A (ja) 2016-12-01
WO2015071143A1 (de) 2015-05-21
KR20160081921A (ko) 2016-07-08
KR102202936B1 (ko) 2021-01-13
CN105765231B (zh) 2018-10-26

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Legal Events

Date Code Title Description
AS Assignment

Owner name: LEYBOLD GMBH, GERMANY

Free format text: CHANGE OF NAME;ASSIGNOR:OERLIKON LEYBOLD VACUUM GMBH;REEL/FRAME:040653/0016

Effective date: 20160901

AS Assignment

Owner name: OERLIKON LEYBOLD VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HENRY, MARKUS;BREZINA, JUERGEN;STOLLE, ROBERT;AND OTHERS;SIGNING DATES FROM 20160529 TO 20160608;REEL/FRAME:043603/0549

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION