US20160240514A1 - Package structure and its fabrication method - Google Patents
Package structure and its fabrication method Download PDFInfo
- Publication number
- US20160240514A1 US20160240514A1 US15/137,416 US201615137416A US2016240514A1 US 20160240514 A1 US20160240514 A1 US 20160240514A1 US 201615137416 A US201615137416 A US 201615137416A US 2016240514 A1 US2016240514 A1 US 2016240514A1
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- layer
- metal
- molding compound
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Definitions
- the present invention relates to a flip-chip package-on-package structure, more particularly a package structure and its fabrication method.
- flip-chip packaging technology especially the flip-chip chip size package (FCCSP) and the flip-chip package-on-package (FCPOP), which are advanced IC fabrication methods capable of assembling and packaging various IC components of different characteristics and are being applied primarily in network communication devices, whichever require high performance in high-frequency high-speed operations and high-density distribution in IC packages that are thinner, lighter and smaller, such as smart phones, tablet computers, and notebook computers.
- FCCSP flip-chip chip size package
- FCPOP flip-chip package-on-package
- the present invention provides a package structure, which comprises: a protective insulation layer; a wiring layer, having at least one metal wire and disposed on the protective insulation layer; a first package unit, disposed on the wiring layer and being configured with a plurality of metal pillars, a first integrated-circuit chip and a first molding compound layer in a manner that the plural metal pillars are located in a pillar region and electrically connected to the at least one metal wire, the first integrated-circuit chip is located in a device region and electrically connected to the at least one metal wire, and the first molding compound layer is arranged filling up the remaining part of the first package unit excluding the first integrated-circuit chip and the plural metal pillars; and a second package unit, disposed on the first package unit and being configured with a second integrated-circuit chip and a second molding compound layer in a manner that the second integrated-circuit chip is connected electrically to the plural metal pillars, and the second molding compound layer is arranged filling up the remaining part of the second package unit excluding the second
- the wiring layer further comprises a dielectric material layer, disposed filling up the remaining part of the wiring layer excluding the at least one metal wire.
- the dielectric material layer and the first molding compound layer can be made of the same material or different materials, whereas the dielectric material layer can be made of a photosensitive resin composition or a non-photosensitive resin composition, such as bismaleimide-triazine (BT) resin, polymide (PI) resin, ajinomoto build-up film (ABF), flame retardant 5 (FR5) glass-epoxy, liquid crystal polymide (LCP), telfon, and so on.
- BT bismaleimide-triazine
- PI polymide
- ABS5 ajinomoto build-up film
- FR5 flame retardant 5
- LCP liquid crystal polymide
- each of the plural metal pillars is a copper column.
- each of the first molding compound layer and the second molding compound layer can be composed of a material selected from the group consisting of a novolac-based resin, an epoxy-based resin, and a silicon-based resin.
- the first integrated-circuit chip further comprises: a plurality of first conductive pins, arranged connecting to the at least one metal wire; and the second circuit chip further comprises: a plurality of second conductive pins, arranged connecting to the plural metal pillars.
- the package structure further comprises: a plurality of connectors, including bumps, passive components and active components that are disposed under the protective insulation layer and electrically connected to the at least one metal wire while being provided for connecting to active components and passive components of the package structure.
- the present invention further provide a method for fabricating a package structure, which comprises the steps of: (A) providing a carrier; (B) forming a wiring layer on the carrier while enabling the wiring layer to be formed including at least one metal wire; (C) forming a plurality of metal pillars on the wiring layer while enabling the plural metal pillars to connect electrically to the at least one metal wire; (D) providing a first integrated-circuit chip to be disposed on the wiring layer while enabling the first integrated-circuit chip to connect electrically to the at least one metal wire without overlapping with the plural metal pillars; (E) forming a first molding compound layer on the carrier while enabling the first molding compound layer to cover all the wiring layer, the plural metal pillars and the first integrated-circuit chip; (F) removing a portion of the first molding compound layer for exposing the plural metal pillars; (G) providing a second integrated-circuit chip to be disposed on the first molding compound layer while enabling the second integrated-circuit chip to connect electrical
- the forming of a wiring layer in the step (B) further comprises the steps of: forming and patterning a first photo resist layer on the carrier; forming a first metal layer on an opening region of the patterned first photoresist layer; and patterning the first metal layer by the removing of the first photoresist layer so as to form the at least one metal wire.
- the forming of a wiring layer in the step (B) further comprises the steps of: forming a dielectric material layer on the carrier; removing a portion of the dielectric material layer into a pattern of the at least one metal wire accordingly; and forming a first metal layer on the region of the carrier where the dielectric material layer had been removed so as to form the at least one metal wire.
- the forming of a wiring layer in the step (B) further comprises the steps of: forming a first metal layer on the carrier; removing a portion of the first metal layer into a pattern of the at least one metal wire; and disposing a dielectric material layer on the region of the carrier where the first metal layer had been removed so as to enable the dielectric material layer along with the remaining first metal layer to form the wiring layer.
- the forming of a plurality of metal pillars in the step (C) further comprises the steps of: forming and patterning a second photo resist layer on the carrier; forming a second metal layer on the patterned second photoresist layer; and patterning the second metal layer by the removing of the second photoresist layer so as to form the plural metal pillars.
- the first integrated-circuit chip further comprises: a plurality of first conductive pins, arranged connecting to the at least one metal wire while the first integrated-circuit chip is being disposed on the wiring layer.
- the step (E) is performed using a means selected from the group consisting of: a top molding means, a compression molding means, a transfer molding means and an injection molding means.
- the step (F) uses polishing, grinding, sand blasting, plasma etching or chemical etching to remove the first molding compound layer in a top-down manner until the top ends of the plural metal pillars are exposed out of the covering of the first molding compound layer.
- the second integrated-circuit chip further comprises: a plurality of second conductive pins, connecting to the exposed portions of the plural metal pillars while the second integrated-circuit chip is being disposed on the first molding compound layer.
- the step (H) is performed using a means selected from the group consisting of: a top molding means, a compression molding means, a transfer molding means and an injection molding means.
- FIG. 1 is a sectional view of a package structure according to a first embodiment of the present invention.
- FIG. 2 is a sectional view of a package structure according to a second embodiment of the present invention.
- FIG. 3 is a flow chart depicting the steps performed in a method for fabricating a package structure according to an embodiment of the present invention.
- FIG. 4A to FIG. 4H are sectional views of a package structure in different steps of the present invention.
- FIG. 5 is a sectional view of a package structure according to a third embodiment of the present invention.
- an element when an element is described to be disposed above/mounted on top of or below/under another element, it comprises either the element is directly or indirectly disposed above/below the other element, i.e. when indirectly, there can be some other element arranged between the two; and when directly, there is no other element disposed between the two.
- the descriptions in the present disclosure relate to “above” or “below” are based upon the related diagrams provided, but are not limited thereby.
- the terms “first”, “second”, and “third”, and so on, are simply used for clearly identifying different elements of the same nature, but those elements are not restricted thereby and must be positioned or arranged accordingly.
- the size or thickness of each and every element provided in the following diagrams of the present disclosure is only schematic representation used for illustration and may not represent its actual size.
- a package structure 100 comprises: a protective insulation layer 110 , a first wiring layer 120 , a first package unit 130 and a second package unit 140 .
- the protective insulation layer 110 which can be disposed at the outermost layer or the bottommost layer of the package structure 100 is used for protecting the package structure 100 from any adverse affect of its surrounding environment or posterior processes, such as soldering. As shown in FIG.
- the first wiring layer 120 is disposed on the protective insulation layer 110 and is formed with at least one metal wire that is to be used for constructing the predefined circuitry layout of the package structure 100 , as the metal wires 121 ⁇ 126 shown in FIG. 1 .
- the first package unit 130 is disposed on the first wiring layer 120 and is configured with a plurality of metal pillars 132 , a first integrated-circuit chip 134 and a first molding compound layer 136 in a manner that the plural metal pillars 132 are electrically connected to the metal wires 121 ⁇ 124 , the first integrated-circuit chip 134 electrically connected to the metal wires 125 and 126 , and the first molding compound layer 136 is arranged filling up the remaining part of the first package unit 130 excluding the first integrated-circuit chip 134 and the plural metal pillars 132 .
- the integrated-circuit chip 134 is located in a device region of the first package unit 130 , as the device region 137 shown in FIG.
- the plural metal pillars 132 are located in a pillar region of the first package unit 130 , as the pillar region 138 shown in FIG. 4C ; whereas the device region 137 and the pillar region 138 are different areas in the first package unit 130 that are arranged without overlapping with each other.
- the second package unit 140 is disposed on the first package unit 130 and is configured with a second integrated-circuit chip 144 and a second molding compound layer 146 in a manner that the second integrated-circuit chip 144 is electrically connected to the plural metal pillars 132 , and the second molding compound layer 146 is disposed filling up the remaining region of the second package unit 140 excluding the second integrated-circuit chip 144 .
- each of the plural metal pillars 132 can be a conductive pillar that is made of copper, aluminum, nickel, tin, or other alloys, but is preferred to be a copper pillar; and each of the plural metal pillars 132 is used for electrically connecting the circuit component of the second package unit, such as the second integrated-circuit chip 144 , to the first wiring layer 120 via the first package unit 130 .
- each of the first integrated-circuit chip 134 and the second integrated-circuit chip 144 is configured with a plurality of conductive pins, such as the first conductive pins 1341 and 1342 of the first integrated-circuit chip 134 that are connected to the metal wires 125 and 126 , and the second conductive pins 1441 of the second integrated-circuit chip 144 that are connected to the metal pillars 132 , as shown in FIG. 1 .
- the high-precision and narrow-pitch alignment operation between the second conductive pins 1441 and the plural metal pillars 132 can be achieved both for those package structures with thinner first package unit 130 and for those package structures with smaller pitches in the second integrated-circuit chip 144 .
- Each of the first and the second molding compound layers 136 , 146 is formed by a means selected from the group consisting of: a top molding means, a compression molding means, a transfer molding means and an injection molding means; and moreover each of the first and the second molding compound layers 136 , 146 is composed of a material selected from the group consisting of a novolac-based resin, an epoxy-based resin, and a silicon-based resin, whichever is capable of reducing the package thickness of the first package unit 130 and the second package unit 140 while preventing the resulting package structure 100 from deforming or wrapping, whereas the first molding compound layer 136 and the second molding compound layer 146 can be made of the same material.
- the first integrated-circuit chip 134 can be an active component that is disposed on or embedded into the first molding compound layer 136 so as to form the first package unit 130 ; and the second integrated-circuit chip 144 can be another active component that can also be disposed on or embedded into the second molding compound layer 146 so as to form the second package unit 140 .
- both the first and the second package units 130 , 140 are flip-chip structures while the second package unit 140 is disposed and packaged on the first package unit 130 , a package structure of the present invention is achieved for integrating and packaging IC units of different characteristics.
- the protective insulation layer 110 for achieving electrical connection between the package structure 100 to with external circuits, there can be openings or via holes to be formed on the protective insulation layer 110 while enabling electric connectors, such as bumps 150 , to be formed under the protective insulation layer 110 that are to be used for filling the openings or via holes during the formation of the bumps 150 and the same time connecting electrically to the metal wires 121 , 124 , 125 and 126 .
- the other portion of the first wiring layer 120 can be filled with a dielectric material layer 128 that is to be used for separating and insulating the metal wires 121 ⁇ 126 from one another.
- the dielectric material layer 128 of FIG. 1 and the first molding compound layer 136 can be made of the same material or different materials, whereas the dielectric material layer 128 can be made of a photosensitive resin composition or a non-photosensitive resin composition, such as bismaleimide-triazine (BT) resin, polymide (PI) resin, ajinomoto build-up film (ABF), flame retardant 5 (FR5) glass-epoxy, liquid crystal polymide (LCP), telfon, and so on.
- BT bismaleimide-triazine
- PI polymide
- ABS5 ajinomoto build-up film
- FR5 flame retardant 5
- LCP liquid crystal polymide
- FIG. 3 is a flow chart depicting the steps performed in a method 300 for fabricating a package structure 200 of the second embodiment of the present invention
- FIG. 4A to FIG. 4H are sectional views of a package structure in different steps S 310 ⁇ S 390 of the fabrication method 300 of the present invention.
- the fabrication method 300 comprises the following steps:
- the major part of the package structure 200 had been completed. Thereafter, in order to provide a means for connecting the package structure 200 electrically to external circuits, there are electric connectors, such as bumps 150 , to be formed on the openings of the protective insulation layer 110 that are to be used for connecting the metal wires 121 , 124 , 125 and 126 electrically to external circuits. As shown in FIG. 2 , there are a plurality of electric connectors to be disposed under the protective insulation layer 110 while being connected electrically to the at least one metal wire that are used for connecting the active components and the passive components in the package structure 200 , or the active components and the passive components can be soldered directly to the plural electric connectors.
- electric connectors such as bumps 150
- the first wiring layer 120 further comprises a dielectric material layer 128 , that is disposed filling up the remaining part of the first wiring layer 120 excluding the metal wires 121 ⁇ 126 , and is used for separating and insulating the metal wires 121 ⁇ 126 from one another while reducing the generation of voids or bubbles when there are insufficient filling of the first molding compound layer 136 .
- the dielectric material layer 128 can be made of a photosensitive resin composition or a non-photosensitive resin composition, such as bismaleimide-triazine (BT) resin, polymide (PI) resin, ajinomoto build-up film (ABF), flame retardant 5 (FR5) glass-epoxy, liquid crystal polymide (LCP), telfon, and so on.
- the aforesaid fabrication method 300 can further comprise a step S 321 : enabling a dielectric material layer to be formed at a position where the first metal had been removed, that is performed after the step S 320 or S 320 ′.
- the operation of the steps S 320 ′ and S 321 can be performed for allowing the dielectric material layer 120 to formed into a predefined pattern and then enabling the first metal layer 128 to be deposited onto positions where there is no dielectric material layer, that is, according to the following steps: enabling a dielectric material layerdielectric material layer to be formed on the carrier 102 ; patterning the dielectric material layerdielectric material layer by the removing of a specific portion of the dielectric material layerdielectric material layer using an exposure-developing process or a laser process so as to form a pattern of the metal wires 121 ⁇ 126 on the dielectric material layer; depositing a first metal layer on the position where the dielectric material layer had been removed so as to form a first wiring layer by the composition of the remaining dielectric material layer 128 and the metal wires 121 ⁇ 126 .
- FIG. 5 is a sectional view of a package structure according to a third embodiment of the present invention.
- the exemplary package structure is configured with three package units and has multiple dielectric material layers and multiple wiring layers. As shown in FIG.
- a package structure 500 comprises: a plurality of bumps 550 , an protective insulation layer 510 , a first wiring layer 520 , a first package unit 530 , a second package unit 540 , a second wiring layer 560 , and a third package unit 570 .
- a package structure 500 comprises: a plurality of bumps 550 , an protective insulation layer 510 , a first wiring layer 520 , a first package unit 530 , a second package unit 540 , a second wiring layer 560 , and a third package unit 570 .
- the plural bumps 550 , the protective insulation layer 510 , the first wiring layer 520 , the first package unit 530 and the second package unit 540 are the equivalence of the bumps 150 , the protective insulation layer 110 , the first wiring layer 120 , the first package unit 130 and the second package unit 140 of the first embodiment, and the difference is that: the first wiring layer 520 further comprises metal pillars 535 , the second package unit further comprises metal pillars 545 , whereas the metal pillars 535 are connected to the metal pillars 545 and the metal wires 527 that are provided for allowing the third package unit 570 to connect to external circuits.
- the second wiring layer 560 comprises a plurality of metal wires 561 ⁇ 565
- the third package unit 570 comprises a third integrated-circuit chip 574
- the other portions of the third package unit 570 are formed similar to the second package unit 140 of the first embodiment.
- the third integrated-circuit chip 574 is arranged electrically connecting to the metal wires 561 ⁇ 565 , while enabling the metal wire 565 to connect to external circuits of the package structure 500 via the connection of the metal pillars 545 , the metal pillars 535 and the metal wire 527 .
- the aforesaid embodiments of the present invention is exemplified using package structures, but they are not limited thereby.
- the electric components in the top layered package unit, i.e. the second package unit 140 can be connected to the metal wires or the external circuits.
- the high-precision and narrow-pitch alignment operation between the second conductive pins 1441 and the plural metal pillars 132 can be achieved both for those package structures with thinner first package unit and for those package structures with smaller pitches in the second integrated-circuit chip.
- the present invention adopts a molding compound with high rigidity for packaging each and every of its package units, such as the package units 130 , 140 and 570 , the thickness of the package unit is reduced and the wrapping and deformation of the package structure can be prevented effectively.
Abstract
This disclosure provides a package structure and its fabrication method. The package structure includes: a protective insulation layer; a wiring layer including at least one metal wire and disposed on the protective insulation layer; and a first package unit disposed on the wiring layer and including a plurality of metal pillars, a first integrated-circuit chip and a first molding compound layer; wherein the plural metal pillars are located in a pillar region and electrically connected to the at least one metal wire, the first integrated-circuit chip is located in a device region and electrically connected to the at least one metal wire, and the first molding compound layer filling up the remaining part of the first package unit.
Description
- This application is a divisional application of co-pending U.S. application Ser. No. 14/445,394, filed on Jul. 29, 2014, which claims the priority to Taiwan Patent Application No. 103111063 filed in the Taiwan Patent Office on Mar. 25, 2014, which is herein incorporated by reference in its entirety.
- The present invention relates to a flip-chip package-on-package structure, more particularly a package structure and its fabrication method.
- As recent rapid trend in modern electronic devices is not only toward thinner, lighter and smaller devices, but also toward multifunctional and high-performance devices, the fabrication and technology of integrated circuits (ICs) has to evolve correspondingly toward a more high-density and miniature design so as to allow more electronic components to be received inside limited chip space. Consequently, the relating IC package substrate and the package technology are evolved accordingly to meet the trend. One example is the development of the flip-chip packaging technology, especially the flip-chip chip size package (FCCSP) and the flip-chip package-on-package (FCPOP), which are advanced IC fabrication methods capable of assembling and packaging various IC components of different characteristics and are being applied primarily in network communication devices, whichever require high performance in high-frequency high-speed operations and high-density distribution in IC packages that are thinner, lighter and smaller, such as smart phones, tablet computers, and notebook computers. In response to the aforesaid trend of thinner, lighter and smaller, it is in need of a new and advanced flip-chip packaging solution.
- The present invention provides a package structure, which comprises: a protective insulation layer; a wiring layer, having at least one metal wire and disposed on the protective insulation layer; a first package unit, disposed on the wiring layer and being configured with a plurality of metal pillars, a first integrated-circuit chip and a first molding compound layer in a manner that the plural metal pillars are located in a pillar region and electrically connected to the at least one metal wire, the first integrated-circuit chip is located in a device region and electrically connected to the at least one metal wire, and the first molding compound layer is arranged filling up the remaining part of the first package unit excluding the first integrated-circuit chip and the plural metal pillars; and a second package unit, disposed on the first package unit and being configured with a second integrated-circuit chip and a second molding compound layer in a manner that the second integrated-circuit chip is connected electrically to the plural metal pillars, and the second molding compound layer is arranged filling up the remaining part of the second package unit excluding the second integrated-circuit chip.
- In an exemplary embodiment of the present invention, the wiring layer further comprises a dielectric material layer, disposed filling up the remaining part of the wiring layer excluding the at least one metal wire.
- In an exemplary embodiment of the present invention, the dielectric material layer and the first molding compound layer can be made of the same material or different materials, whereas the dielectric material layer can be made of a photosensitive resin composition or a non-photosensitive resin composition, such as bismaleimide-triazine (BT) resin, polymide (PI) resin, ajinomoto build-up film (ABF), flame retardant 5 (FR5) glass-epoxy, liquid crystal polymide (LCP), telfon, and so on.
- In an exemplary embodiment of the present invention, each of the plural metal pillars is a copper column.
- In an exemplary embodiment of the present invention, each of the first molding compound layer and the second molding compound layer can be composed of a material selected from the group consisting of a novolac-based resin, an epoxy-based resin, and a silicon-based resin.
- In an exemplary embodiment of the present invention, the first integrated-circuit chip further comprises: a plurality of first conductive pins, arranged connecting to the at least one metal wire; and the second circuit chip further comprises: a plurality of second conductive pins, arranged connecting to the plural metal pillars.
- In an exemplary embodiment of the present invention, the package structure further comprises: a plurality of connectors, including bumps, passive components and active components that are disposed under the protective insulation layer and electrically connected to the at least one metal wire while being provided for connecting to active components and passive components of the package structure.
- Moreover, the present invention further provide a method for fabricating a package structure, which comprises the steps of: (A) providing a carrier; (B) forming a wiring layer on the carrier while enabling the wiring layer to be formed including at least one metal wire; (C) forming a plurality of metal pillars on the wiring layer while enabling the plural metal pillars to connect electrically to the at least one metal wire; (D) providing a first integrated-circuit chip to be disposed on the wiring layer while enabling the first integrated-circuit chip to connect electrically to the at least one metal wire without overlapping with the plural metal pillars; (E) forming a first molding compound layer on the carrier while enabling the first molding compound layer to cover all the wiring layer, the plural metal pillars and the first integrated-circuit chip; (F) removing a portion of the first molding compound layer for exposing the plural metal pillars; (G) providing a second integrated-circuit chip to be disposed on the first molding compound layer while enabling the second integrated-circuit chip to connect electrically to the plural metal pillars; (H) forming a second molding compound layer on the first molding compound layer while enabling the second molding compound layer to cover the second integrated-circuit chip; and (I) removing the carrier and forming a protective insulation layer under the wiring layer.
- In an exemplary embodiment of the present invention, the forming of a wiring layer in the step (B) further comprises the steps of: forming and patterning a first photo resist layer on the carrier; forming a first metal layer on an opening region of the patterned first photoresist layer; and patterning the first metal layer by the removing of the first photoresist layer so as to form the at least one metal wire.
- In an exemplary embodiment of the present invention, the forming of a wiring layer in the step (B) further comprises the steps of: forming a dielectric material layer on the carrier; removing a portion of the dielectric material layer into a pattern of the at least one metal wire accordingly; and forming a first metal layer on the region of the carrier where the dielectric material layer had been removed so as to form the at least one metal wire.
- In an exemplary embodiment of the present invention, the forming of a wiring layer in the step (B) further comprises the steps of: forming a first metal layer on the carrier; removing a portion of the first metal layer into a pattern of the at least one metal wire; and disposing a dielectric material layer on the region of the carrier where the first metal layer had been removed so as to enable the dielectric material layer along with the remaining first metal layer to form the wiring layer.
- In an exemplary embodiment of the present invention, the forming of a plurality of metal pillars in the step (C) further comprises the steps of: forming and patterning a second photo resist layer on the carrier; forming a second metal layer on the patterned second photoresist layer; and patterning the second metal layer by the removing of the second photoresist layer so as to form the plural metal pillars.
- In an exemplary embodiment of the present invention, the first integrated-circuit chip further comprises: a plurality of first conductive pins, arranged connecting to the at least one metal wire while the first integrated-circuit chip is being disposed on the wiring layer.
- In an exemplary embodiment of the present invention, the step (E) is performed using a means selected from the group consisting of: a top molding means, a compression molding means, a transfer molding means and an injection molding means.
- In an exemplary embodiment of the present invention, the step (F) uses polishing, grinding, sand blasting, plasma etching or chemical etching to remove the first molding compound layer in a top-down manner until the top ends of the plural metal pillars are exposed out of the covering of the first molding compound layer.
- In an exemplary embodiment of the present invention, the second integrated-circuit chip further comprises: a plurality of second conductive pins, connecting to the exposed portions of the plural metal pillars while the second integrated-circuit chip is being disposed on the first molding compound layer.
- In an exemplary embodiment of the present invention, the step (H) is performed using a means selected from the group consisting of: a top molding means, a compression molding means, a transfer molding means and an injection molding means.
- Further scope of applicability of the present application will become more apparent from the detailed description given hereinafter. However, it should be understood that the detailed description and specific examples, while indicating preferred embodiments of the invention, are given by way of illustration only, since various changes and modifications within the spirit and scope of the invention will become apparent to those skilled in the art from this detailed description.
- The present invention will become more fully understood from the detailed description given herein below and the accompanying drawings which are given by way of illustration only, and thus are not limitative of the present invention and wherein:
-
FIG. 1 is a sectional view of a package structure according to a first embodiment of the present invention. -
FIG. 2 is a sectional view of a package structure according to a second embodiment of the present invention. -
FIG. 3 is a flow chart depicting the steps performed in a method for fabricating a package structure according to an embodiment of the present invention. -
FIG. 4A toFIG. 4H are sectional views of a package structure in different steps of the present invention. -
FIG. 5 is a sectional view of a package structure according to a third embodiment of the present invention. - For your esteemed members of reviewing committee to further understand and recognize the fulfilled functions and structural characteristics of the invention, several exemplary embodiments cooperating with detailed description are presented as the follows.
- In the following embodiments of the present disclosure, when an element is described to be disposed above/mounted on top of or below/under another element, it comprises either the element is directly or indirectly disposed above/below the other element, i.e. when indirectly, there can be some other element arranged between the two; and when directly, there is no other element disposed between the two. It is noted that the descriptions in the present disclosure relate to “above” or “below” are based upon the related diagrams provided, but are not limited thereby. Moreover, the terms “first”, “second”, and “third”, and so on, are simply used for clearly identifying different elements of the same nature, but those elements are not restricted thereby and must be positioned or arranged accordingly. In addition, the size or thickness of each and every element provided in the following diagrams of the present disclosure is only schematic representation used for illustration and may not represent its actual size.
- Please refer to
FIG. 1 , which is a sectional view of a package structure according to a first embodiment of the present invention. InFIG. 1 , apackage structure 100 comprises: aprotective insulation layer 110, afirst wiring layer 120, afirst package unit 130 and asecond package unit 140. Theprotective insulation layer 110 which can be disposed at the outermost layer or the bottommost layer of thepackage structure 100 is used for protecting thepackage structure 100 from any adverse affect of its surrounding environment or posterior processes, such as soldering. As shown inFIG. 1 , thefirst wiring layer 120 is disposed on theprotective insulation layer 110 and is formed with at least one metal wire that is to be used for constructing the predefined circuitry layout of thepackage structure 100, as themetal wires 121˜126 shown inFIG. 1 . In this embodiment, thefirst package unit 130 is disposed on thefirst wiring layer 120 and is configured with a plurality ofmetal pillars 132, a first integrated-circuit chip 134 and a firstmolding compound layer 136 in a manner that theplural metal pillars 132 are electrically connected to themetal wires 121˜124, the first integrated-circuit chip 134 electrically connected to themetal wires molding compound layer 136 is arranged filling up the remaining part of thefirst package unit 130 excluding the first integrated-circuit chip 134 and theplural metal pillars 132. Moreover, the integrated-circuit chip 134 is located in a device region of thefirst package unit 130, as thedevice region 137 shown inFIG. 4C ; and theplural metal pillars 132 are located in a pillar region of thefirst package unit 130, as thepillar region 138 shown inFIG. 4C ; whereas thedevice region 137 and thepillar region 138 are different areas in thefirst package unit 130 that are arranged without overlapping with each other. In addition, thesecond package unit 140 is disposed on thefirst package unit 130 and is configured with a second integrated-circuit chip 144 and a secondmolding compound layer 146 in a manner that the second integrated-circuit chip 144 is electrically connected to theplural metal pillars 132, and the secondmolding compound layer 146 is disposed filling up the remaining region of thesecond package unit 140 excluding the second integrated-circuit chip 144. - In this embodiment, each of the
plural metal pillars 132 can be a conductive pillar that is made of copper, aluminum, nickel, tin, or other alloys, but is preferred to be a copper pillar; and each of theplural metal pillars 132 is used for electrically connecting the circuit component of the second package unit, such as the second integrated-circuit chip 144, to thefirst wiring layer 120 via thefirst package unit 130. In this embodiment, each of the first integrated-circuit chip 134 and the second integrated-circuit chip 144 is configured with a plurality of conductive pins, such as the firstconductive pins circuit chip 134 that are connected to themetal wires conductive pins 1441 of the second integrated-circuit chip 144 that are connected to themetal pillars 132, as shown inFIG. 1 . Since the positioning of the metal pillars as well as their lengths and diameters can be controlled in the fabrication process, the high-precision and narrow-pitch alignment operation between the secondconductive pins 1441 and theplural metal pillars 132 can be achieved both for those package structures with thinnerfirst package unit 130 and for those package structures with smaller pitches in the second integrated-circuit chip 144. Each of the first and the secondmolding compound layers molding compound layers first package unit 130 and thesecond package unit 140 while preventing the resultingpackage structure 100 from deforming or wrapping, whereas the firstmolding compound layer 136 and the secondmolding compound layer 146 can be made of the same material. The first integrated-circuit chip 134 can be an active component that is disposed on or embedded into the firstmolding compound layer 136 so as to form thefirst package unit 130; and the second integrated-circuit chip 144 can be another active component that can also be disposed on or embedded into the secondmolding compound layer 146 so as to form thesecond package unit 140. In addition, since both the first and thesecond package units second package unit 140 is disposed and packaged on thefirst package unit 130, a package structure of the present invention is achieved for integrating and packaging IC units of different characteristics. - As shown in
FIG. 1 , for achieving electrical connection between thepackage structure 100 to with external circuits, there can be openings or via holes to be formed on theprotective insulation layer 110 while enabling electric connectors, such asbumps 150, to be formed under theprotective insulation layer 110 that are to be used for filling the openings or via holes during the formation of thebumps 150 and the same time connecting electrically to themetal wires wires 121˜126, the other portion of thefirst wiring layer 120 can be filled with adielectric material layer 128 that is to be used for separating and insulating themetal wires 121˜126 from one another. In another embodiment, that portion of thefirst wiring layer 120 excluding themetal wires 121˜126 us filled directly by the first molding compound layer, as thepackage structure 200 shown in the second embodiment ofFIG. 2 . That is, thedielectric material layer 128 ofFIG. 1 and the firstmolding compound layer 136 can be made of the same material or different materials, whereas thedielectric material layer 128 can be made of a photosensitive resin composition or a non-photosensitive resin composition, such as bismaleimide-triazine (BT) resin, polymide (PI) resin, ajinomoto build-up film (ABF), flame retardant 5 (FR5) glass-epoxy, liquid crystal polymide (LCP), telfon, and so on. -
FIG. 3 is a flow chart depicting the steps performed in amethod 300 for fabricating apackage structure 200 of the second embodiment of the present invention, andFIG. 4A toFIG. 4H are sectional views of a package structure in different steps S310˜S390 of thefabrication method 300 of the present invention. Thefabrication method 300 comprises the following steps: -
- S310: providing a
carrier 102, as shown inFIG. 4A ; whereas thecarrier 102 can be a metal substrate or a fiberglass core substrate having metal layers, and can be used for supporting electric circuits and electric components disposed thereon, such as thefirst wiring layer 120, thefirst package unit 130 and thesecond package unit 140 that are shown inFIG. 1 andFIG. 2 ; and the aforesaid metal can be Fe, Fe/Ni, Cu, Al, or the composition or alloy thereof, but is not limited thereby; - S320: forming a
first wiring layer 120 on thecarrier 102 while patterning thefirst wiring layer 120 into a predefined pattern including at least one metal wire, such as themetal wires 121˜126, as shown inFIG. 4B ; whereas thefirst wiring layer 120 can be formed using an electrolytic plating process or an evaporation process, and the patterning of thefirst wiring layer 120 can be enabled using a photolithography process; moreover, in one embodiment, the formation of thefirst wiring layer 120 further comprises the steps of: depositing a first photoresist layer on thecarrier 102 using a PCB build-up process or a spin coating process; patterning the first photoresist layer using an exposure-developing process so as to form a plurality of openings; - forming a first metal layer on the openings of the patterned first photoresist layer; and forming the
first wiring layer 120 while patterning the same into a predefined pattern including themetal wires 121˜126 by removing the first photoresist layer using a dry mechanical means or a wet chemical means; and moreover, in another embodiment, the step S320 can be performed by laser processing, such as the step S320′: forming a first metal layer on the carrier; and using a laser carving process to remove a specific portion of the first metal layer into a pattern including themetal wires 121˜126; - S330: forming a plurality of
metal pillars 132, such as copper pillars or aluminum pillars, on thefirst wiring layer 120, as shown inFIG. 4C , that are to be used for electrically connecting the first wiring layer 120 to circuit components, such as the second integrated-circuit chip 144 of the second package units 140, that are formed in the posterior steps; whereas the metal pillars 132 can be formed from a metal, such as copper or aluminum, by an electrolytic plating process or an evaporation process, and the patterning of the metal pillars can be enabled using a photolithography process; moreover, in one embodiment, the formation of the plural metal pillars 132 further comprises the steps of: depositing a second photoresist layer on the carrier 102 and the first wiring layer 120 using a dry film photoresist lamination process; patterning the second photoresist layer using an exposure-developing process so as to form a plurality of openings; forming a second metal layer on the openings of the patterned second photoresist layer; and patterning the second metal layer into the plural metal pillars 132 by removing the second photoresist layer using a dry mechanical means or a wet chemical means; and moreover, during the proceeding of the step S330, the layer where the metal pillars 132 are formed is referred as a first package layer 130′, and the first package layer 130′ can be divided into two regions, i.e. the device region 137 and the pillar region 138 shown inFIG. 4C , in which the patterning of the second photoresist layer is going to enable the metal pillars to be formed inside thepillar region 138 while connecting electrically to themetal wires 121˜124, and the second photoresist layer corresponding to thedevice region 137 to be removed completely into a recess that can be provided for receiving circuit components, such as the first integrated-circuit chip 134; - S340: providing a first integrated-
circuit chip 134 to be disposed on thefirst wiring layer 120 while enabling the first integrated-circuit chip 134 to connect electrically to themetal wires FIG. 4D , while enabling the first integrated-circuit chip 134 to be active device that is disposed inside thedevice region 137 offirst package layer 130′ and theplural metal pillars 132 to be disposed inside thepillar region 138 of thefirst package layer 130′, by that although both the first integrated-circuit chip 134 and theplural metal pillars 132 are disposed on thefirst package layer 130′ but are resided inside respectively in thedevice region 137 and thepillar region 138 without overlapping; and moreover, in one embodiment, the first integrated-circuit chip 134 further comprises: a plurality of first conductive pins, such as the twopins metal wires circuit chip 134 is mounted to thefirst wiring layer 120; - S350: forming a first
molding compound layer 136 on thecarrier 102 while enabling the firstmolding compound layer 136 to cover all themetal wires 121˜126, theplural metal pillars 132 and the first integrated-circuit chip 134 so as to construct one of the package unit in thepackage structure 200 of the present invention, as shown inFIG. 4E ; whereas the firstmolding compound layer 136 is formed by a means selected from the group consisting of: a top molding means, a compression molding means, a transfer molding means and an injection molding means, and can comprises the steps of: placing a material of the first molding compound layer into a first casting mold; arranging the first casting mold to be aligned corresponding to thecarrier 102 for enabling themetal wires 121˜126, themetal pillars 132 and the first integrated-circuit chip 134 to be disposed at a position between the first casting mold and thecarrier 102; forcing the first casting mold and thecarrier 102 to be pressed together while curing the material of the first molding compound layer to be hardened into the first molding compound layer that are arranged covering all themetal wires 121˜126, theplural metal pillars 132 and the first integrated-circuit chip 134; and removing the first casting mold so that a structure with a cross section as the one shown inFIG. 4E is constructed; and moreover, in an other embodiment, the formation of the firstmolding compound layer 136 can otherwise comprises the steps of: providing a first casting mold and a material of the first molding compound layer that can be a power-like material or a platelet-like material; heating the material of the first molding compound layer into its liquid state while enabling the liquefied first molding compound layer to flow into the first casting mold; arranging the first casting mold to be aligned corresponding to thecarrier 102 for enabling themetal wires 121˜126, themetal pillars 132 and the first integrated-circuit chip 134 to be disposed at a position between the first casting mold and thecarrier 102; forcing the first casting mold and thecarrier 102 to be pressed together while curing the material of the first molding compound layer to be hardened into the firstmolding compound layer 136 that are arranged covering all themetal wires 121˜126, theplural metal pillars 132 and the first integrated-circuit chip 134; and removing the first casting mold so that a structure with a cross section as the one shown inFIG. 4E is constructed; in addition, the firstmolding compound layer 136 is composed of an insulation material selected from the group consisting of a novolac-based resin, an epoxy-based resin, and a silicon-based resin, but is not limited thereby; - S360: removing a portion of the first
molding compound layer 136 for exposing theplural metal pillars 132 so as to form thefirst package unit 130, as shown inFIG. 4F , i.e. enabling a first package unit 130 to be formed including the plural metal pillars 132, the first integrated-circuit chip 134 and the first molding compound layer 136 and to be disposed on the first wiring layer 120; whereas the first molding compound layer 136 is filled inside the first package unit 130 excluding the portion thereof that is occupied by the metal pillars 132 and the first integrated-circuit chip 134; and moreover, although all the metal wires 121˜126 on the carrier 102 are covered by the first molding compound layer 136 at this point, the top half of the first molding compound layer must be removed for exposing the top half of the plural metal pillars 132 so as to allowing another active component, such as a second integrated-circuit chip 144, to be connected to the metal wires 121˜124 via the metal pillars 132 in the posterior process, and the removal of the top half of the first molding compound layer 136 can be performed using a means of polishing, grinding, sand blasting, plasma etching or chemical etching to remove the top half of the first molding compound layer 136 in a top-down manner until the top ends of the plural metal pillars 132 are exposed out of the covering of the first molding compound layer, but is not limited thereby; and in another embodiment, the first molding compound layer 136 is formed just for allowing the top ends of the plural metal pillars 132 to be exposed, and thus the process for removing the top half of the first molding compound layer 136 can be avoided; - S370: providing a second integrated-
circuit chip 144 to be disposed on thefirst package unit 130 while enabling the second integrated-circuit chip 144 to connect electrically to theplural metal pillars 132, as shown inFIG. 4G ; whereas the second integrated-circuit chip 144 is another active component that is configured with a plurality of secondconductive pins 1441, and the pluralconductive pins 1441 are arranged aligning and electrically connected to the exposed top ends of themetal pillars 132 in respective when the second integrated-circuit chip 144 is mounted on thefirst package unit 130; - S380: forming a second
molding compound layer 146 on thefirst package unit 130 while enabling the secondmolding compound layer 146 to cover the second integrated-circuit chip 144 so as to construct anotherpackage unit 140 in thepackage structure 200 of the present invention, as shown inFIG. 4H ; whereas the secondmolding compound layer 146 is formed by a means selected from the group consisting of: a top molding means, a compression molding means, a transfer molding means and an injection molding means, and can comprises the steps of: placing a material of the secondmolding compound layer 146 into a second casting mold; arranging the second casting mold to be aligned corresponding to thecarrier 102 for enabling the second integrated-circuit chip 144 to be disposed at a position between the second casting mold and thecarrier 102; forcing the second casting mold and thecarrier 102 to be pressed together while curing the material of the secondmolding compound layer 146 to be hardened into the secondmolding compound layer 146 that are arranged covering all the second integrated-circuit chip 144 that is disposed on thefirst package unit 130; and removing the second casting mold so that a structure with a cross section as the one shown inFIG. 4H is constructed; and moreover, in an other embodiment, the formation of the secondmolding compound layer 146 can otherwise comprises the steps of: providing a second casting mold and a material of the second molding compound layer that can be a power-like material or a platelet-like material; heating the material of the secondmolding compound layer 146 into its liquid state while enabling the liquefied secondmolding compound layer 146 to flow into the second casting mold; arranging the second casting mold to be aligned corresponding to thecarrier 102 for enabling the second integrated-circuit chip 144 to be disposed at a position between the second casting mold and thecarrier 102; forcing the second casting mold and thecarrier 102 to be pressed together while curing the material of the secondmolding compound layer 146 to be hardened into the secondmolding compound layer 146 that are arranged covering the second integrated-circuit chip 144; and removing the first casting mold so that a structure with a cross section as the one shown inFIG. 4H is constructed; in addition, the firstmolding compound layer 136 is composed of an insulation material selected from the group consisting of a novolac-based resin, an epoxy-based resin, and a silicon-based resin, but is not limited thereby; - S390: removing the
carrier 102 and forming aprotective insulation layer 110 under thefirst wiring layer 120; whereas, at this stage, the use of thecarrier 102 is no longer needed so it is removed, and the removal of thecarrier 102 can be performed using a chemical etching means or a laser means; and theprotective insulation layer 110 which can be disposed at the outermost layer of thepackage structure 200, i.e. it is positioned under thefirst wiring layer 120, is used for protecting thepackage structure 200 from any adverse affect of its surrounding environment or posterior processes, such as soldering.
- S310: providing a
- At this point, the major part of the
package structure 200 had been completed. Thereafter, in order to provide a means for connecting thepackage structure 200 electrically to external circuits, there are electric connectors, such asbumps 150, to be formed on the openings of theprotective insulation layer 110 that are to be used for connecting themetal wires FIG. 2 , there are a plurality of electric connectors to be disposed under theprotective insulation layer 110 while being connected electrically to the at least one metal wire that are used for connecting the active components and the passive components in thepackage structure 200, or the active components and the passive components can be soldered directly to the plural electric connectors. - In addition, the
first wiring layer 120 further comprises adielectric material layer 128, that is disposed filling up the remaining part of thefirst wiring layer 120 excluding themetal wires 121˜126, and is used for separating and insulating themetal wires 121˜126 from one another while reducing the generation of voids or bubbles when there are insufficient filling of the firstmolding compound layer 136. Thedielectric material layer 128 can be made of a photosensitive resin composition or a non-photosensitive resin composition, such as bismaleimide-triazine (BT) resin, polymide (PI) resin, ajinomoto build-up film (ABF), flame retardant 5 (FR5) glass-epoxy, liquid crystal polymide (LCP), telfon, and so on. In another embodiment, theaforesaid fabrication method 300 can further comprise a step S321: enabling a dielectric material layer to be formed at a position where the first metal had been removed, that is performed after the step S320 or S320′. Moreover, the operation of the steps S320′ and S321 can be performed for allowing thedielectric material layer 120 to formed into a predefined pattern and then enabling thefirst metal layer 128 to be deposited onto positions where there is no dielectric material layer, that is, according to the following steps: enabling a dielectric material layerdielectric material layer to be formed on thecarrier 102; patterning the dielectric material layerdielectric material layer by the removing of a specific portion of the dielectric material layerdielectric material layer using an exposure-developing process or a laser process so as to form a pattern of themetal wires 121˜126 on the dielectric material layer; depositing a first metal layer on the position where the dielectric material layer had been removed so as to form a first wiring layer by the composition of the remainingdielectric material layer 128 and themetal wires 121˜126. Consequently, apackage structure 100 ofFIG. 1 is achieved, whereas the performing of the steps S310, S330, S340, S350, S360, S370, S380 and S390 are the same as those described in thefabrication method 300, and thus will not described further herein. - It is noted that although the package structure in the foregoing embodiments is configured with two package units, i.e. the
first package unit 130 and thesecond package unit 140, it is not limited thereby and thus there can be more than two package units being included in the FCPOP of the present invention. Please refer toFIG. 5 , which is a sectional view of a package structure according to a third embodiment of the present invention. InFIG. 5 , the exemplary package structure is configured with three package units and has multiple dielectric material layers and multiple wiring layers. As shown inFIG. 5 , apackage structure 500 comprises: a plurality ofbumps 550, anprotective insulation layer 510, afirst wiring layer 520, afirst package unit 530, asecond package unit 540, asecond wiring layer 560, and athird package unit 570. In this third embodiment ofFIG. 5 , theplural bumps 550, theprotective insulation layer 510, thefirst wiring layer 520, thefirst package unit 530 and thesecond package unit 540 are the equivalence of thebumps 150, theprotective insulation layer 110, thefirst wiring layer 120, thefirst package unit 130 and thesecond package unit 140 of the first embodiment, and the difference is that: thefirst wiring layer 520 further comprisesmetal pillars 535, the second package unit further comprisesmetal pillars 545, whereas themetal pillars 535 are connected to themetal pillars 545 and themetal wires 527 that are provided for allowing thethird package unit 570 to connect to external circuits. In addition, thesecond wiring layer 560 comprises a plurality ofmetal wires 561˜565, and thethird package unit 570 comprises a third integrated-circuit chip 574, whereas the other portions of thethird package unit 570 are formed similar to thesecond package unit 140 of the first embodiment. Furthermore, the third integrated-circuit chip 574 is arranged electrically connecting to themetal wires 561˜565, while enabling themetal wire 565 to connect to external circuits of thepackage structure 500 via the connection of themetal pillars 545, themetal pillars 535 and themetal wire 527. The construction of the package structure in this third embodiment that is similar to the package structure of the first embodiment is not described further herein. - It is noted that the aforesaid embodiments of the present invention is exemplified using package structures, but they are not limited thereby. In the embodiments of the present invention, by the use of the metal pillars that are arranged piecing through the bottom-layered package unit, i.e. the
first package unit 130, the electric components in the top layered package unit, i.e. thesecond package unit 140, can be connected to the metal wires or the external circuits. Since the positioning of the metal pillars as well as their lengths and diameters can be controlled in the fabrication process, the high-precision and narrow-pitch alignment operation between the secondconductive pins 1441 and theplural metal pillars 132 can be achieved both for those package structures with thinner first package unit and for those package structures with smaller pitches in the second integrated-circuit chip. Moreover, as the present invention adopts a molding compound with high rigidity for packaging each and every of its package units, such as thepackage units - With respect to the above description then, it is to be realized that the optimum dimensional relationships for the parts of the invention, to include variations in size, materials, shape, form, function and manner of operation, assembly and use, are deemed readily apparent and obvious to one skilled in the art, and all equivalent relationships to those illustrated in the drawings and described in the specification are intended to be encompassed by the present invention.
Claims (12)
1. A method for fabricating a package structure, comprising the steps of:
(A) providing a carrier;
(B) forming a wiring layer on the carrier while enabling the wiring layer to be formed including at least one metal wire;
(C) forming a plurality of metal pillars on the wiring layer while enabling the plural metal pillars to connect electrically to the at least one metal wire;
(D) providing a first integrated-circuit chip to be disposed on the wiring layer while enabling the first integrated-circuit chip to connect electrically to the at least one metal wire without overlapping with the plural metal pillars;
(E) forming a first molding compound layer on the carrier while enabling the first molding compound layer to cover all the wiring layer, the plural metal pillars and the first integrated-circuit chip;
(F) removing a portion of the first molding compound layer for exposing the plural metal pillars;
(G) providing a second integrated-circuit chip to be disposed on the first molding compound layer while enabling the second integrated-circuit chip to connect electrically to the plural metal pillars;
(H) forming a second molding compound layer on the first molding compound layer while enabling the second molding compound layer to cover the second integrated-circuit chip; and
(I) removing the carrier and forming a protective insulation layer under the wiring layer.
2. The method of claim 1 , wherein the forming of a wiring layer in the step (B) further comprises the steps of:
forming and patterning a first photo resist layer on the carrier;
forming a first metal layer on an opening region of the patterned first photoresist layer; and
patterning the first metal layer by the removing of the first photoresist layer so as to form the at least one metal wire.
3. The method of claim 1 , wherein the forming of a wiring layer in the step (B) further comprises the steps of:
forming a dielectric material layer on the carrier;
removing a portion of the dielectric material layer into a pattern of the at least one metal wire accordingly; and
forming a first metal layer on the region of the carrier where the dielectric material layer had been removed so as to form the at least one metal wire.
4. The method of claim 1 , wherein the forming of a wiring layer in the step (B) further comprises the steps of:
forming a first metal layer on the carrier;
removing a portion of the first metal layer into a pattern of the at least one metal wire accordingly; and
disposing a dielectric material layer on the region of the carrier where the first metal layer had been removed so as to enable the dielectric material layer along with the remaining first metal layer to form the wiring layer.
5. The method of claim 1 , wherein the forming of a plurality of metal pillars in the step (C) further comprises the steps of:
forming and patterning a second photo resist layer on the carrier;
forming a second metal layer on the patterned second photoresist layer; and
patterning the second metal layer by the removing of the second photoresist layer so as to form the plural metal pillars.
6. The method of claim 1 , wherein the first integrated-circuit chip further comprises:
a plurality of first conductive pins, arranged connecting to the at least one metal wire while the first integrated-circuit chip is being disposed on the wiring layer.
7. The method of claim 1 , wherein the step (E) is performed using a means selected from the group consisting of: a top molding means, a compression molding means, a transfer molding means and an injection molding means.
8. The method of claim 7 , wherein the first molding compound layer is composed of a material selected from the group consisting of a novolac-based resin, an epoxy-based resin, and a silicon-based resin.
9. The method of claim 1 , wherein the step (F) uses polishing, grinding, sand blasting, plasma etching or chemical etching to remove the first molding compound layer in a top-down manner until the top ends of the plural metal pillars are exposed out of the covering of the first molding compound layer.
10. The method of claim 1 , wherein the second integrated-circuit chip further comprises:
a plurality of second conductive pins, connecting to the exposed portions of the plural metal pillars while the second integrated-circuit chip is being disposed on the first molding compound layer.
11. The method of claim 1 , wherein the step (H) is performed using a means selected from the group consisting of: a top molding means, a compression molding means, a transfer molding means and an injection molding means.
12. The method of claim 11 , wherein the second molding compound layer is composed of a material selected from the group consisting of a novolac-based resin, an epoxy-based resin, and a silicon-based resin.
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TW103111063A TWI517343B (en) | 2014-03-25 | 2014-03-25 | Flip-chip package-on-package structure and its fabrication method |
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US14/445,394 US9536864B2 (en) | 2014-03-25 | 2014-07-29 | Package structure and its fabrication method |
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Also Published As
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CN104952828A (en) | 2015-09-30 |
TW201537716A (en) | 2015-10-01 |
US20150279818A1 (en) | 2015-10-01 |
TWI517343B (en) | 2016-01-11 |
US9536864B2 (en) | 2017-01-03 |
JP2015185845A (en) | 2015-10-22 |
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