US20160111604A1 - Method for expanding spacings in light-emitting element array and light-emitting element array unit - Google Patents
Method for expanding spacings in light-emitting element array and light-emitting element array unit Download PDFInfo
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- US20160111604A1 US20160111604A1 US14/886,429 US201514886429A US2016111604A1 US 20160111604 A1 US20160111604 A1 US 20160111604A1 US 201514886429 A US201514886429 A US 201514886429A US 2016111604 A1 US2016111604 A1 US 2016111604A1
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Definitions
- the disclosure relates to a method for expanding spacings in a light-emitting element array and a light-emitting element array unit, more particularly to a method for expanding spacings in a light-emitting element array using a stretchable supporting film, and a light-emitting element array unit used in the method thereof.
- a conventional approach to this problem has been to individually transfer each of the light-emitting elements onto the package substrate such that adjustments in spacing on the package substrate are possible.
- such conventional method is meticulous, time consuming, and requires relatively high accuracy in aligning the light-emitting elements onto the package substrate.
- advancements in technology have contributed to a general reduction in the size of light-emitting elements (such as micro LEDs), demanding an even higher level of accuracy, and raising the standards in the transfer and alignment of light-emitting elements onto package substrates.
- an object of the disclosure is to provide a method that can alleviate at least one of the aforesaid drawbacks of the prior art.
- a method for expanding spacings in a light-emitting element array includes the following steps of:
- a light-emitting element array unit including a stretchable supporting film, and a plurality of light-emitting elements disposed on the stretchable supporting film and arranged into a two-dimensional array;
- a light-emitting element array unit used in the method thereof may include a stretchable supporting film, and a plurality of light-emitting elements disposed on the stretchable supporting film and arranged into a two-dimensional array.
- the stretchable supporting film is formed with a plurality of through holes in position corresponding to the light-emitting elements.
- FIG. 1 is a schematic view showing a light-emitting element array unit used in the exemplary embodiment of a method for expanding spacings in a light-emitting element array according to the present disclosure
- FIG. 2 is a schematic sectional diagram illustrating consecutive steps of the exemplary embodiment.
- FIG. 3 is a schematic top view showing a variation of the light-emitting element array unit.
- Steps (a) to (c) the exemplary embodiment of a method for expanding spacings in a light-emitting element array is shown to include Steps (a) to (c) as follows.
- the stretchable supporting film 21 can be made of a flexible polymeric material and exhibits adhesive property so as to allow the light-emitting elements 22 to be adhered thereon.
- the stretchable supporting film may be a blue tape which allows the light-emitting elements 22 to be easily removed therefrom, a light release tape which has reduced adhesion strength after being irradiated with light having a predetermined wavelength such as UV light, or a thermal release tape which has reduced adhesion strength after being heated to a predetermined temperature.
- the stretchable supporting film 21 is preferably a blue tape to save the time and cost of the process.
- Each of the light-emitting elements 22 has semiconductor layers and is operable to emit light within a predetermined wavelength range (i.e., to emit green, blue or red light).
- the dimensions of the light-emitting elements 22 may be identical or different. It should be noted that the light-emitting elements 22 may have a width ranging from 1 ⁇ m to 100 ⁇ m. In certain embodiments, the light-emitting elements 22 may have dimensions ranging from 3 ⁇ m to 30 ⁇ m, and a distance between two adjacent light-emitting elements 22 may range from 2 ⁇ m to 25 ⁇ m.
- each of the light-emitting elements 22 is configured into a geometric shape, such as a quadrilateral shape shown in FIG. 1 .
- the light-emitting elements 22 in each row of the two-dimensional array are arranged along a row direction, and the light-emitting elements 22 in each column of the two-dimensional array are arranged along a column direction.
- Adjacent two of the light-emitting elements 22 in each row of the two-dimensional array are spaced apart from each other by a first spacing (S 1 ), and adjacent two of the light-emitting elements 22 in each column of the two-dimensional array are spaced apart from each other by a second spacing (S 2 ).
- the first and second spacings (S 1 ), (S 2 ) may be identical or different. In this embodiment, the first and second spacings (S 1 ), (S 2 ) are identical.
- Step (b) can be conducted by a stretching apparatus, such as a film expander, to stretch the stretchable supporting film 21 along either one or both of the first direction (X) and the second direction (Y) by a predetermined tensile stress, so as to expand the first spacing (S 1 ) and/or second spacing (S 2 ) to a predetermined value, which may correspond to a predetermined spacing suitable for a package substrate.
- the first direction (X) and the second direction (Y) respectively correspond to the row direction and the column direction of the two-dimensional array of light-emitting elements 22 .
- the stretchable supporting film 21 is stretched along either one or both of the row direction and the column direction of the two-dimensional array of the light-emitting elements 22 .
- Step (b) may be conducted by having one side of the stretchable supporting film 21 secured and stretching the stretchable supporting film 21 from the other side thereof. In other embodiments, Step (b) may be conducted by stretching the stretchable supporting film 21 simultaneously from two opposite sides thereof.
- Step (b) is conducted by first stretching the stretchable supporting film 21 along the first direction (X) by a first tensile stress (P 1 ) so as to expand the first spacing (S 1 ) to an expanded first spacing (S 1 ′), followed by stretching the stretchable supporting film 21 along the second direction (Y) by a second tensile stress (P 2 ) to expand the second distance (S 2 ) to an expanded second spacing (S 2 ′), which may be identical to or different from the expanded first spacing (S 1 ′).
- Step (b) may be conducted by first stretching the stretchable supporting film 21 along the second direction (Y) and then stretching the same along the first direction (X).
- Step (b) may be conducted by stretching the stretchable supporting film 21 simultaneously along the first and second directions (X), (Y) of the two dimensional array of the light-emitting elements 22 .
- FIG. 2 only shows the stretching of the stretchable supporting film 21 along the first direction (X), so that the expanded second spacing (S 2 ′) is not shown
- a step (c) is further provided in this embodiment.
- the package substrate 3 has a plurality of connecting pads 31 that correspond in position to the light-emitting elements 22 on the stretchable supporting film 21 after Step (b).
- the connecting pads 31 are arranged in a manner similar to that of the light-emitting elements 21 and have spacings respectively corresponding to the expanded first and second spacings (S 1 ′), (S 2 ′) of the light-emitting elements 22 .
- the package substrate 3 may be, but is not limited to, a printed circuit board, a TFT substrate, a CMOS substrate, a substrate having transistors or integrated circuits incorporated therein, a substrate having metal redistribution lines or the like.
- Each of the connecting pads 31 may be configured as a single-layered or multi-layered structure and is made of electrically conductive materials, such as metal materials, non-metal conductive materials (e.g., conductive polymers, graphite, graphenes and black phosphorus), or combinations thereof.
- the connecting pads 31 are made of an alloy material having a eutectic point lower than 300° C., so that attachment of the light-emitting elements 22 onto the connecting pads 31 may be conducted by heating the connecting pads 31 to a temperature above the eutectic point, followed by cooling so as to fixedly attach the light-emitting elements 22 onto the connecting pads 31 of the package substrate 3 .
- the removal of the stretchable supporting film 21 in Step (c) may be conducted by irradiating the stretchable supporting film 21 with a light having a predetermined wavelength (e.g., UV light), so as to reduce adhesion strength between the stretchable supporting film 21 and the light-emitting elements 22 .
- the stretchable supporting film 21 is a thermal release tape
- the removal of the stretchable supporting film 21 from the light-emitting elements 22 in Step (c) may be conducted by heating the stretchable supporting film 21 so as to reduce adhesion strength between the stretchable supporting film 21 and the light-emitting elements 22 .
- the removal of the stretchable supporting film 21 in Step (c) may be conducted by directly peeling off the stretchable supporting film 21 from the light-emitting elements 22 .
- the first and second spacings (S 1 ), (S 2 ) among the light-emitting elements 22 in the two-dimensional array can be accurately expanded.
- the stretching of the stretchable supporting film 21 along the first direction (X) and/or the second direction (Y) further ensures uniform spacings of the light-emitting elements 22 along the corresponding direction(s).
- relatively high alignment accuracy can be achieved according to the present disclosure while transferring the light-emitting elements 22 , especially when transferring the light-emitting elements 22 having small dimensions onto the package substrate 3 .
- FIG. 3 shows a variation of the light-emitting element array unit 2 .
- the stretchable supporting film 21 is formed with a plurality of through holes 23 , each corresponding in position to the light-emitting elements 22 .
- each of the light-emitting elements 22 of this embodiment is configured into a geometric shape with at least three corners.
- the geometric share is a quadrilateral shape provided with four corners, and the through holes 23 correspond in position to the corners of the light-emitting elements 22 or midpoints on sides of the light-emitting elements 22 (not shown).
- the stretchable supporting film 21 of this embodiment has a plurality of first imaginary lines (L 1 ) each located equidistantly between two adjacent rows of the light-emitting elements 22 , i.e., passing through the midpoints of the second spacings (S 2 ), and a plurality of second imaginary lines (L 2 ) each located equidistantly between two adjacent columns of the light-emitting elements 22 , i.e., passing through the midpoints of the first spacings (S 1 ).
- the through holes 23 of this embodiment are periodically formed on the first and second imaginary lines (L 1 ), (L 2 ) and correspond in position to the light-emitting elements 22 .
- each of the through holes 23 may correspond in position to at least two light-emitting elements 22 .
- the through holes 23 can be formed at intersections 24 of the first and second imaginary lines (L 1 ), (L 2 ).
- each of the through holes 23 may correspond in position to four adjacent light-emitting elements 22 in this embodiment.
- the through holes 23 may be periodically formed at positions on the first and second imaginary lines (L 1 ), (L 2 ) that correspond to the midpoints of the sides of the light-emitting elements 22 , where the through holes 23 correspond in position to two adjacent light-emitting elements 22 .
- the formation of the through holes 23 facilitates uniform stress distribution throughout the stretchable supporting film 21 while the same is being stretched, so as to further ensure uniform spacing of the light-emitting elements 22 along the corresponding direction(s).
- the light-emitting elements 22 can be transferred onto the package substrate 3 in a more precise manner as shown in FIG. 2 after Step (b).
- the through holes 23 are periodically formed at positions which correspond in position to at least two adjacent light-emitting elements 22 .
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Abstract
A method for expanding spacings in a light-emitting element array includes the following steps of: providing a light-emitting element array unit including a stretchable supporting film, and a plurality of light-emitting elements disposed on the stretchable supporting film and arranged into a two-dimensional array; stretching the stretchable supporting film along a first direction and a second direction. The first direction and the second direction respectively correspond to a row direction and a column direction of the two-dimensional array.
Description
- This application claims priority of Taiwanese Patent Application No. 103136145, filed on Oct. 20, 2014.
- The disclosure relates to a method for expanding spacings in a light-emitting element array and a light-emitting element array unit, more particularly to a method for expanding spacings in a light-emitting element array using a stretchable supporting film, and a light-emitting element array unit used in the method thereof.
- The transfer of light-emitting elements, such as LEDs, from an epitaxial substrate onto a package substrate, requires high alignment accuracy. Often, the spacing between light-emitting elements on the epitaxial substrate does not match the spacing between predetermined positions of the package substrate on which light-emitting elements are to be mounted. A conventional approach to this problem has been to individually transfer each of the light-emitting elements onto the package substrate such that adjustments in spacing on the package substrate are possible. However, such conventional method is meticulous, time consuming, and requires relatively high accuracy in aligning the light-emitting elements onto the package substrate. Moreover, advancements in technology have contributed to a general reduction in the size of light-emitting elements (such as micro LEDs), demanding an even higher level of accuracy, and raising the standards in the transfer and alignment of light-emitting elements onto package substrates.
- Therefore, an object of the disclosure is to provide a method that can alleviate at least one of the aforesaid drawbacks of the prior art.
- According to one aspect of the present disclosure, a method for expanding spacings in a light-emitting element array includes the following steps of:
- providing a light-emitting element array unit including a stretchable supporting film, and a plurality of light-emitting elements disposed on the stretchable supporting film and arranged into a two-dimensional array; and
- stretching the stretchable supporting film along a first direction and a second direction which respectively correspond to a row direction and a column direction of the two-dimensional array.
- According to another aspect of the present disclosure, a light-emitting element array unit used in the method thereof is provided. The light-emitting array unit may include a stretchable supporting film, and a plurality of light-emitting elements disposed on the stretchable supporting film and arranged into a two-dimensional array. The stretchable supporting film is formed with a plurality of through holes in position corresponding to the light-emitting elements.
- In light of the foregoing, by stretching the stretchable supporting film along the first direction and/or the second direction ensures uniform spacing of the light-emitting element array along the corresponding direction(s). Relatively high alignment accuracy can be achieved according to the present disclosure while transferring the light-emitting element array to a package substrate.
- Other features and advantages of the disclosure will become apparent in the following detailed description of the embodiments with reference to the accompanying drawings, of which:
-
FIG. 1 is a schematic view showing a light-emitting element array unit used in the exemplary embodiment of a method for expanding spacings in a light-emitting element array according to the present disclosure; -
FIG. 2 is a schematic sectional diagram illustrating consecutive steps of the exemplary embodiment; and -
FIG. 3 is a schematic top view showing a variation of the light-emitting element array unit. - Referring to
FIGS. 1 and 2 , the exemplary embodiment of a method for expanding spacings in a light-emitting element array is shown to include Steps (a) to (c) as follows. - Step (a): providing a light-emitting
element array unit 2, which includes a stretchable supportingfilm 21, and a plurality of light-emittingelements 22 that are disposed on the stretchable supportingfilm 21 and that are arranged into a two-dimensional array. - The stretchable supporting
film 21 can be made of a flexible polymeric material and exhibits adhesive property so as to allow the light-emittingelements 22 to be adhered thereon. In certain embodiments, the stretchable supporting film may be a blue tape which allows the light-emittingelements 22 to be easily removed therefrom, a light release tape which has reduced adhesion strength after being irradiated with light having a predetermined wavelength such as UV light, or a thermal release tape which has reduced adhesion strength after being heated to a predetermined temperature. In this embodiment, the stretchable supportingfilm 21 is preferably a blue tape to save the time and cost of the process. - Each of the light-emitting
elements 22 has semiconductor layers and is operable to emit light within a predetermined wavelength range (i.e., to emit green, blue or red light). The dimensions of the light-emitting elements 22, such as height or width, may be identical or different. It should be noted that the light-emittingelements 22 may have a width ranging from 1 μm to 100 μm. In certain embodiments, the light-emitting elements 22 may have dimensions ranging from 3 μm to 30 μm, and a distance between two adjacent light-emitting elements 22 may range from 2 μm to 25 μm. - In this embodiment, each of the light-emitting
elements 22 is configured into a geometric shape, such as a quadrilateral shape shown inFIG. 1 . As shown inFIG. 1 , the light-emitting elements 22 in each row of the two-dimensional array are arranged along a row direction, and the light-emitting elements 22 in each column of the two-dimensional array are arranged along a column direction. Adjacent two of the light-emittingelements 22 in each row of the two-dimensional array are spaced apart from each other by a first spacing (S1), and adjacent two of the light-emittingelements 22 in each column of the two-dimensional array are spaced apart from each other by a second spacing (S2). It should be noted that the first and second spacings (S1), (S2) may be identical or different. In this embodiment, the first and second spacings (S1), (S2) are identical. - Step (b): stretching the stretchable supporting
film 21 along a first direction (X) and a second direction (Y) so as to expand the first and second spacings (S1), (S2). - Step (b) can be conducted by a stretching apparatus, such as a film expander, to stretch the stretchable supporting
film 21 along either one or both of the first direction (X) and the second direction (Y) by a predetermined tensile stress, so as to expand the first spacing (S1) and/or second spacing (S2) to a predetermined value, which may correspond to a predetermined spacing suitable for a package substrate. In this preferred embodiment, the first direction (X) and the second direction (Y) respectively correspond to the row direction and the column direction of the two-dimensional array of light-emitting elements 22. In other words, the stretchable supportingfilm 21 is stretched along either one or both of the row direction and the column direction of the two-dimensional array of the light-emittingelements 22. It should be noted that, in this embodiment, Step (b) may be conducted by having one side of the stretchable supportingfilm 21 secured and stretching the stretchable supportingfilm 21 from the other side thereof. In other embodiments, Step (b) may be conducted by stretching the stretchable supportingfilm 21 simultaneously from two opposite sides thereof. - In this embodiment, Step (b) is conducted by first stretching the stretchable supporting
film 21 along the first direction (X) by a first tensile stress (P1) so as to expand the first spacing (S1) to an expanded first spacing (S1′), followed by stretching the stretchable supportingfilm 21 along the second direction (Y) by a second tensile stress (P2) to expand the second distance (S2) to an expanded second spacing (S2′), which may be identical to or different from the expanded first spacing (S1′). It should be noted that in certain embodiments, Step (b) may be conducted by first stretching the stretchable supportingfilm 21 along the second direction (Y) and then stretching the same along the first direction (X). In certain embodiments, Step (b) may be conducted by stretching the stretchable supportingfilm 21 simultaneously along the first and second directions (X), (Y) of the two dimensional array of the light-emitting elements 22. - When the first and second spacings (S1), (S2) are expanded to be the expanded first and second spacing (S1′), (S2′) by stretching (
FIG. 2 only shows the stretching of the stretchable supportingfilm 21 along the first direction (X), so that the expanded second spacing (S2′) is not shown), a step (c) is further provided in this embodiment. - Step (c): attaching a surface of each of the light-emitting
elements 22, which are away from the stretchable supportingfilm 21, onto apackage substrate 3, followed by removing the stretchable supportingfilm 21 therefrom. - In this embodiment, the
package substrate 3 has a plurality of connectingpads 31 that correspond in position to the light-emittingelements 22 on the stretchable supportingfilm 21 after Step (b). In other words, the connectingpads 31 are arranged in a manner similar to that of the light-emittingelements 21 and have spacings respectively corresponding to the expanded first and second spacings (S1′), (S2′) of the light-emittingelements 22. Thepackage substrate 3 may be, but is not limited to, a printed circuit board, a TFT substrate, a CMOS substrate, a substrate having transistors or integrated circuits incorporated therein, a substrate having metal redistribution lines or the like. Each of the connectingpads 31 may be configured as a single-layered or multi-layered structure and is made of electrically conductive materials, such as metal materials, non-metal conductive materials (e.g., conductive polymers, graphite, graphenes and black phosphorus), or combinations thereof. In certain embodiments, the connectingpads 31 are made of an alloy material having a eutectic point lower than 300° C., so that attachment of the light-emittingelements 22 onto the connectingpads 31 may be conducted by heating the connectingpads 31 to a temperature above the eutectic point, followed by cooling so as to fixedly attach the light-emittingelements 22 onto the connectingpads 31 of thepackage substrate 3. - It should be noted that, in certain embodiments where the stretchable supporting
film 21 is a light release tape (such as UV tape), the removal of the stretchable supportingfilm 21 in Step (c) may be conducted by irradiating the stretchable supportingfilm 21 with a light having a predetermined wavelength (e.g., UV light), so as to reduce adhesion strength between the stretchable supportingfilm 21 and the light-emittingelements 22. In addition, in certain embodiments where the stretchable supportingfilm 21 is a thermal release tape, the removal of the stretchable supportingfilm 21 from the light-emittingelements 22 in Step (c) may be conducted by heating the stretchable supportingfilm 21 so as to reduce adhesion strength between the stretchable supportingfilm 21 and the light-emittingelements 22. In certain embodiments where the stretchable supportingfilm 21 is a blue tape, the removal of the stretchable supportingfilm 21 in Step (c) may be conducted by directly peeling off the stretchable supportingfilm 21 from the light-emittingelements 22. - By disposing the light-emitting
elements 22 on the stretchable supportingfilm 21 and by stretching the same, the first and second spacings (S1), (S2) among the light-emittingelements 22 in the two-dimensional array can be accurately expanded. In addition, the stretching of the stretchable supportingfilm 21 along the first direction (X) and/or the second direction (Y) further ensures uniform spacings of the light-emitting elements 22 along the corresponding direction(s). As such, relatively high alignment accuracy can be achieved according to the present disclosure while transferring the light-emitting elements 22, especially when transferring the light-emittingelements 22 having small dimensions onto thepackage substrate 3. -
FIG. 3 shows a variation of the light-emittingelement array unit 2. In the variation of the light-emittingelement array unit 2, the stretchable supportingfilm 21 is formed with a plurality of throughholes 23, each corresponding in position to the light-emitting elements 22. As shown inFIG. 3 , each of the light-emittingelements 22 of this embodiment is configured into a geometric shape with at least three corners. In this embodiment, the geometric share is a quadrilateral shape provided with four corners, and the throughholes 23 correspond in position to the corners of the light-emittingelements 22 or midpoints on sides of the light-emitting elements 22 (not shown). Specifically, thestretchable supporting film 21 of this embodiment has a plurality of first imaginary lines (L1) each located equidistantly between two adjacent rows of the light-emittingelements 22, i.e., passing through the midpoints of the second spacings (S2), and a plurality of second imaginary lines (L2) each located equidistantly between two adjacent columns of the light-emittingelements 22, i.e., passing through the midpoints of the first spacings (S1). The through holes 23 of this embodiment are periodically formed on the first and second imaginary lines (L1), (L2) and correspond in position to the light-emittingelements 22. More specifically, each of the throughholes 23 may correspond in position to at least two light-emittingelements 22. For example, like in this embodiment, the throughholes 23 can be formed atintersections 24 of the first and second imaginary lines (L1), (L2). In other words, each of the throughholes 23 may correspond in position to four adjacent light-emittingelements 22 in this embodiment. In other embodiments, the throughholes 23 may be periodically formed at positions on the first and second imaginary lines (L1), (L2) that correspond to the midpoints of the sides of the light-emittingelements 22, where the throughholes 23 correspond in position to two adjacent light-emittingelements 22. - The formation of the through
holes 23 facilitates uniform stress distribution throughout thestretchable supporting film 21 while the same is being stretched, so as to further ensure uniform spacing of the light-emittingelements 22 along the corresponding direction(s). As such, the light-emittingelements 22 can be transferred onto thepackage substrate 3 in a more precise manner as shown inFIG. 2 after Step (b). It should be noted that a too much higher number of the throughholes 23 or a too much bigger aperture of the throughholes 23 may result in adverse effect on physical properties, such as mechanical strength, of thestretchable supporting film 21. Therefore, in preferred embodiments, the throughholes 23 are periodically formed at positions which correspond in position to at least two adjacent light-emittingelements 22. - While the disclosure has been described in connection with what is considered the exemplary embodiment, it is understood that this disclosure is not limited to the disclosed embodiment but is intended to cover various arrangements included within the spirit and scope of the broadest interpretation so as to encompass all such modifications and equivalent arrangements.
Claims (17)
1. A method for expanding spacings in a light-emitting element array, comprising:
providing a light-emitting element array unit including a stretchable supporting film, and a plurality of light-emitting elements disposed on the stretchable supporting film and arranged into a two-dimensional array; and
stretching the stretchable supporting film along a first direction and a second direction so as to expand spacings between the light-emitting elements, wherein the first direction and the second direction respectively correspond to a row direction and a column direction of the two-dimensional array.
2. The method of claim 1 , wherein the step of stretching the stretchable supporting film is conducted by stretching the stretchable supporting film along the first direction followed by stretching the stretchable supporting film along the second direction.
3. The method of claim 1 , wherein the step of stretching the stretchable supporting film is conducted by simultaneously stretching the stretchable supporting film along the first and second directions.
4. The method of claim 1 , wherein the stretchable supporting film is formed with a plurality of through holes corresponding in position to the light-emitting elements.
5. The method of claim 4 , wherein each of the light-emitting elements is configured into a geometric shape and has at least three corners, the through holes corresponding in position to the corners of the light-emitting elements.
6. The method of claim 4 , wherein each of the light-emitting elements is configured into a geometric shape and has at least three sides each having a midpoint, the through holes corresponding in position to the midpoints of the sides of the light-emitting elements.
7. The method of claim 4 , wherein the stretchable supporting film has a plurality of first imaginary lines each located equidistantly between two adjacent rows of the light-emitting elements, and a plurality of second imaginary lines each located equidistantly between two adjacent columns of the light-emitting elements, the through holes being formed on the first and second imaginary lines of the stretchable supporting film.
8. The method of claim 7 , wherein the through holes of the stretchable supporting film are formed at intersections of the first and the second imaginary lines.
9. The method of claim 1 , further comprising:
attaching a surface of each of the light-emitting elements onto a package substrate, followed by removing the stretchable supporting film therefrom, wherein the surface of each of the light-emitting elements is away from the stretchable supporting film.
10. The method of claim 9 , wherein the removal of the stretchable supporting film from the light-emitting elements is conducted by irradiating the stretchable supporting film with a light having a predetermined wavelength, so as to reduce adhesion strength between the stretchable supporting film and the light-emitting elements.
11. The method of claim 9 , wherein the removal of the stretchable supporting film from the light-emitting elements is conducted by heating the stretchable supporting film so as to reduce adhesion strength between the stretchable supporting film and the light-emitting elements.
12. The method of claim 9 , wherein the package substrate is one of a printed circuit board, a TFT substrate, and a CMOS substrate.
13. A light-emitting element array unit comprising:
a stretchable supporting film; and
a plurality of light-emitting elements that are disposed on said stretchable supporting film and that are arranged into a two-dimensional array;
wherein said stretchable supporting film is formed with a plurality of through holes that correspond in position to said light-emitting elements.
14. The light-emitting element array unit according to claim 13 , wherein each of said light-emitting elements is configured into a geometric shape and has at least three corners, said through holes corresponding in position to said corners of said light-emitting elements.
15. The light-emitting element array unit according to claim 13 , wherein each of said light-emitting elements is configured into a geometric shape and has at least three sides each having a midpoint, said through holes corresponding in position to said midpoints of said sides of said light-emitting elements.
16. The light-emitting element array unit according to claim 13 , wherein said stretchable supporting film has a plurality of first imaginary lines each located equidistantly between two adjacent rows of said light-emitting elements, and a plurality of second imaginary lines each located equidistantly between two adjacent columns of said light-emitting elements, said through holes being formed on said first and second imaginary lines of said stretchable supporting film.
17. The light-emitting element array unit according to claim 16 , wherein said through holes of said stretchable supporting film are formed at intersections of said first and second imaginary lines.
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TW103136145 | 2014-10-20 |
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Citations (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5110388A (en) * | 1988-07-21 | 1992-05-05 | Lintec Corporation | Method of dicing and bonding semiconductor chips using a photocurable and heat curable adhesive tape |
US5411921A (en) * | 1992-02-10 | 1995-05-02 | Rohm Co., Ltd. | Semiconductor chip die bonding using a double-sided adhesive tape |
US5882956A (en) * | 1996-01-22 | 1999-03-16 | Texas Instruments Japan Ltd. | Process for producing semiconductor device |
US6534386B2 (en) * | 2001-06-26 | 2003-03-18 | Mitsubishi Denki Kabushiki Kaisha | Method of manufacturing semiconductor chips |
US20030124291A1 (en) * | 2001-12-11 | 2003-07-03 | 3M Innovative Properties Company | Film structures and methods of making film structures |
US20050009299A1 (en) * | 2003-03-31 | 2005-01-13 | Takashi Wada | Method of manufacturing a semiconductor device |
JP2005079151A (en) * | 2003-08-28 | 2005-03-24 | Seiko Epson Corp | Dicing tape, pickup device, and process for manufacturing semiconductor device |
US20050215033A1 (en) * | 2004-03-29 | 2005-09-29 | Nitto Denko Corporation | Method of dicing semiconductor wafer into chips, and apparatus using this method |
US20060197094A1 (en) * | 2005-03-04 | 2006-09-07 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device, semiconductor light emitting apparatus, and method of manufacturing semiconductor light emitting device |
US20080102541A1 (en) * | 2006-10-31 | 2008-05-01 | Kang Eun Jeong | Method for manufacturing light emitting diode chip and light emitting diode light source module |
US20090267230A1 (en) * | 2008-04-24 | 2009-10-29 | Mutual-Pak Technology Co., Ltd. | Package structure for integrated circuit device and method of the same |
US20100029023A1 (en) * | 2008-07-24 | 2010-02-04 | Koninklijke Philips Electronics N.V. | Controlling edge emission in package-free led die |
US20100148704A1 (en) * | 2008-12-16 | 2010-06-17 | Wei-Yean Howng | Flexible light emitting array |
US20100279437A1 (en) * | 2009-05-01 | 2010-11-04 | Koninklijke Philips Electronics N.V. | Controlling edge emission in package-free led die |
US20120052608A1 (en) * | 2010-08-25 | 2012-03-01 | Yoo Cheol-Jun | Phosphor film, method of forming the same, and method of coating phosphor layer on led chips |
US8153475B1 (en) * | 2009-08-18 | 2012-04-10 | Sorra, Inc. | Back-end processes for substrates re-use |
US20140001656A1 (en) * | 2012-06-29 | 2014-01-02 | Nitto Denko Corporation | Encapsulating layer-covered semiconductor element, producing method thereof, and semiconductor device |
WO2014002535A1 (en) * | 2012-06-29 | 2014-01-03 | シャープ株式会社 | Semiconductor device manufacturing method |
US20140077235A1 (en) * | 2012-09-14 | 2014-03-20 | Bridgelux, Inc. | Substrate Free LED Package |
US20140091348A1 (en) * | 2012-10-03 | 2014-04-03 | Nitto Denko Corporation | Encapsulating sheet-covered semiconductor element, producing method thereof, semiconductor device, and producing method thereof |
US20140340877A1 (en) * | 2013-05-17 | 2014-11-20 | Anders Kristofer Nelson | Fabric-Encapsulated Light Arrays and Systems for Displaying Video on Clothing |
US20150263256A1 (en) * | 2014-03-14 | 2015-09-17 | Epistar Corporation | Light-emitting array |
US20160043254A1 (en) * | 2013-03-29 | 2016-02-11 | Soitec | Multiple transfer assembly process |
US20160049602A1 (en) * | 2014-08-12 | 2016-02-18 | Samsung Display Co., Ltd. | Stretchable substrate and organic light emitting display apparatus comprising the same |
US9391286B1 (en) * | 2015-01-15 | 2016-07-12 | Samsung Display Co., Ltd. | Stretchable display device |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6312800B1 (en) * | 1997-02-10 | 2001-11-06 | Lintec Corporation | Pressure sensitive adhesive sheet for producing a chip |
JP4703127B2 (en) * | 2004-03-31 | 2011-06-15 | ルネサスエレクトロニクス株式会社 | Semiconductor wafer, semiconductor chip and manufacturing method thereof |
JP4360446B1 (en) * | 2008-10-16 | 2009-11-11 | 住友ベークライト株式会社 | Semiconductor device manufacturing method and semiconductor device |
-
2014
- 2014-10-20 TW TW103136145A patent/TWI546934B/en active
-
2015
- 2015-10-19 US US14/886,429 patent/US20160111604A1/en not_active Abandoned
-
2018
- 2018-04-23 US US15/959,286 patent/US10290622B2/en active Active
Patent Citations (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5110388A (en) * | 1988-07-21 | 1992-05-05 | Lintec Corporation | Method of dicing and bonding semiconductor chips using a photocurable and heat curable adhesive tape |
US5411921A (en) * | 1992-02-10 | 1995-05-02 | Rohm Co., Ltd. | Semiconductor chip die bonding using a double-sided adhesive tape |
US5882956A (en) * | 1996-01-22 | 1999-03-16 | Texas Instruments Japan Ltd. | Process for producing semiconductor device |
US6534386B2 (en) * | 2001-06-26 | 2003-03-18 | Mitsubishi Denki Kabushiki Kaisha | Method of manufacturing semiconductor chips |
US20030124291A1 (en) * | 2001-12-11 | 2003-07-03 | 3M Innovative Properties Company | Film structures and methods of making film structures |
US20050009299A1 (en) * | 2003-03-31 | 2005-01-13 | Takashi Wada | Method of manufacturing a semiconductor device |
JP2005079151A (en) * | 2003-08-28 | 2005-03-24 | Seiko Epson Corp | Dicing tape, pickup device, and process for manufacturing semiconductor device |
US20050215033A1 (en) * | 2004-03-29 | 2005-09-29 | Nitto Denko Corporation | Method of dicing semiconductor wafer into chips, and apparatus using this method |
US20060197094A1 (en) * | 2005-03-04 | 2006-09-07 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device, semiconductor light emitting apparatus, and method of manufacturing semiconductor light emitting device |
US20080102541A1 (en) * | 2006-10-31 | 2008-05-01 | Kang Eun Jeong | Method for manufacturing light emitting diode chip and light emitting diode light source module |
US20090267230A1 (en) * | 2008-04-24 | 2009-10-29 | Mutual-Pak Technology Co., Ltd. | Package structure for integrated circuit device and method of the same |
US20100029023A1 (en) * | 2008-07-24 | 2010-02-04 | Koninklijke Philips Electronics N.V. | Controlling edge emission in package-free led die |
US20100148704A1 (en) * | 2008-12-16 | 2010-06-17 | Wei-Yean Howng | Flexible light emitting array |
US20100279437A1 (en) * | 2009-05-01 | 2010-11-04 | Koninklijke Philips Electronics N.V. | Controlling edge emission in package-free led die |
US8153475B1 (en) * | 2009-08-18 | 2012-04-10 | Sorra, Inc. | Back-end processes for substrates re-use |
US20120052608A1 (en) * | 2010-08-25 | 2012-03-01 | Yoo Cheol-Jun | Phosphor film, method of forming the same, and method of coating phosphor layer on led chips |
US20140001656A1 (en) * | 2012-06-29 | 2014-01-02 | Nitto Denko Corporation | Encapsulating layer-covered semiconductor element, producing method thereof, and semiconductor device |
WO2014002535A1 (en) * | 2012-06-29 | 2014-01-03 | シャープ株式会社 | Semiconductor device manufacturing method |
US20140077235A1 (en) * | 2012-09-14 | 2014-03-20 | Bridgelux, Inc. | Substrate Free LED Package |
US20140091348A1 (en) * | 2012-10-03 | 2014-04-03 | Nitto Denko Corporation | Encapsulating sheet-covered semiconductor element, producing method thereof, semiconductor device, and producing method thereof |
US20160043254A1 (en) * | 2013-03-29 | 2016-02-11 | Soitec | Multiple transfer assembly process |
US20140340877A1 (en) * | 2013-05-17 | 2014-11-20 | Anders Kristofer Nelson | Fabric-Encapsulated Light Arrays and Systems for Displaying Video on Clothing |
US20150263256A1 (en) * | 2014-03-14 | 2015-09-17 | Epistar Corporation | Light-emitting array |
US20160049602A1 (en) * | 2014-08-12 | 2016-02-18 | Samsung Display Co., Ltd. | Stretchable substrate and organic light emitting display apparatus comprising the same |
KR20160020034A (en) * | 2014-08-12 | 2016-02-23 | 삼성디스플레이 주식회사 | Stretchable substrate and organic light emitting display comprising the same |
US9391286B1 (en) * | 2015-01-15 | 2016-07-12 | Samsung Display Co., Ltd. | Stretchable display device |
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD857669S1 (en) * | 2016-08-05 | 2019-08-27 | Sony Corporation | Antenna |
US20190035817A1 (en) * | 2017-07-25 | 2019-01-31 | Lg Display Co., Ltd. | Light emitting display device and method of manufacturing the same |
US11398501B2 (en) | 2017-07-25 | 2022-07-26 | Lg Display Co., Ltd. | Light emitting display device and method of manufacturing the same |
US10797079B2 (en) * | 2017-07-25 | 2020-10-06 | Lg Display Co., Ltd. | Light emitting display device and method of manufacturing the same |
US10510287B2 (en) | 2017-08-07 | 2019-12-17 | Industrial Technology Research Institute | Transfer method of expanding pitches of device and an apparatus for performing the same |
FR3083921A1 (en) | 2018-07-10 | 2020-01-17 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | METHOD FOR TRANSFERRING STRUCTURES |
CN110707034A (en) * | 2018-07-10 | 2020-01-17 | 原子能和替代能源委员会 | Method for transferring structure |
EP3595007A1 (en) | 2018-07-10 | 2020-01-15 | Commissariat à l'énergie atomique et aux énergies alternatives | Method of transferring structures |
US11127710B2 (en) * | 2018-07-10 | 2021-09-21 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method for transferring structures |
US10886158B2 (en) * | 2018-07-13 | 2021-01-05 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method for transferring structures |
FR3083918A1 (en) | 2018-07-13 | 2020-01-17 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | METHOD FOR TRANSFERRING STRUCTURES |
CN110718498A (en) * | 2018-07-13 | 2020-01-21 | 原子能和替代能源委员会 | Method for transferring structure |
EP3595029A1 (en) | 2018-07-13 | 2020-01-15 | Commissariat à l'énergie atomique et aux énergies alternatives | Structure transfer method |
US20210384180A1 (en) * | 2018-10-15 | 2021-12-09 | Samsung Display Co., Ltd. | Display device and manufacturing method thereof |
CN112913019A (en) * | 2018-10-15 | 2021-06-04 | 三星显示有限公司 | Display device and method for manufacturing the same |
US11996395B2 (en) * | 2018-10-15 | 2024-05-28 | Samsung Display Co., Ltd. | Display device and manufacturing method thereof |
CN109599463A (en) * | 2018-12-07 | 2019-04-09 | 广东工业大学 | A kind of pick-up structure and transfer method for the transfer of Micro-LED flood tide |
JP2020107763A (en) * | 2018-12-27 | 2020-07-09 | 日亜化学工業株式会社 | Semiconductor element mounting method and semiconductor device manufacturing method |
US11404398B2 (en) * | 2018-12-27 | 2022-08-02 | Nichia Corporation | Method of mounting semiconductor elements and method of manufacturing semiconductor device using a stretched film |
JP7436772B2 (en) | 2018-12-27 | 2024-02-22 | 日亜化学工業株式会社 | Manufacturing method of semiconductor device |
US20220293555A1 (en) * | 2019-08-26 | 2022-09-15 | Lintec Corporation | Method of manufacturing laminate |
WO2021107636A1 (en) * | 2019-11-29 | 2021-06-03 | Samsung Electronics Co., Ltd. | Micro led display with printed circuit board assembly |
CN112038280A (en) * | 2020-07-24 | 2020-12-04 | 华为技术有限公司 | Chip transfer method and electronic equipment |
WO2022017402A1 (en) * | 2020-07-24 | 2022-01-27 | 华为技术有限公司 | Chip transfer method and electronic device |
CN113299594A (en) * | 2021-05-25 | 2021-08-24 | 江西信芯半导体有限公司 | Post-processing method for blue film pasting of TVS chip |
Also Published As
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---|---|
TWI546934B (en) | 2016-08-21 |
US20180240941A1 (en) | 2018-08-23 |
TW201616635A (en) | 2016-05-01 |
US10290622B2 (en) | 2019-05-14 |
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