US20150185254A1 - Manufacturing method of probing device - Google Patents
Manufacturing method of probing device Download PDFInfo
- Publication number
- US20150185254A1 US20150185254A1 US14/656,730 US201514656730A US2015185254A1 US 20150185254 A1 US20150185254 A1 US 20150185254A1 US 201514656730 A US201514656730 A US 201514656730A US 2015185254 A1 US2015185254 A1 US 2015185254A1
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- United States
- Prior art keywords
- space transformer
- reinforcing plate
- pad
- probing device
- manufacturing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F38/00—Adaptations of transformers or inductances for specific applications or functions
- H01F38/20—Instruments transformers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/241—Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
Definitions
- the present invention relates to a manufacturing method of probing device, and more particularly, to a manufacturing method of probing device for semiconductor testing.
- IC integrated circuit
- FIG. 1 is a diagram illustrating a conventional probing device 10 .
- the conventional probing device 10 comprises a cage 11 , a printed circuit board (PCB) 12 , a space transformer 14 and a probe head 16 .
- the space transformer 14 is disposed on the PCB 12 via a plurality of solders 18 , and the probe head 16 is fixed by the cage 11 .
- the probe head 16 comprises a plurality of probes 162 .
- One end of the probe 162 is in contact with a pad 141 disposed on the space transformer 14 , and the other end of the probe 162 is in contact with a chip (not illustrated) on the wafer being tested, so the chips (not illustrated) on the wafer can be tested via the probes 162 .
- Circuitries are disposed in the space transformer 14 , so that the probes 162 on the probe head 16 can be electrically connected to the PCB 12 via these circuitries. In this way, testing signals received by the probes 162 can be transferred to the PCB 12 via the space transformer 14 , for further follow-up analysis.
- the probing device 10 is produced and assembled by dedicated probing device manufacturers.
- the space transformer 14 is usually provided by IC manufacturers or IC design companies, due to cost issue.
- only one probe head 16 is disposed on the space transformer 14 shown in FIG. 1 , so that only one single device under test (DUT) can be detected and tested at a time.
- some manufacturers may dispose a plurality of probing areas in one probe head for allowing each probing area to correspond to one single DUT, so that number of multiple DUTs can be detected at once.
- Such probing device can be referred to as a multi-DUT probing device, and the probing device similar to FIG. 1 can be referred to as a single DUT probing device.
- FIG. 2 is a diagram illustrating another conventional multi-DUT probing device 20 .
- the multi-DUT probing device 20 comprises a cage 21 , a PCB 22 , a space transformer 24 , a reinforcing plate 25 and a probe head 26 .
- the probe head 26 comprises a plurality of probing areas 27 .
- the reinforcing plate 25 is utilized to increase the overall mechanical strength of the multi-DUT probing device 20 . Since the probe head 26 comprises a plurality of probing areas 27 , where each probing area 27 corresponds to one DUT and comprises a plurality of probes 272 , the multi-DUT probing device 20 can thus detect multiple number of DUTs at one time.
- the multi-DUT probing device 20 can detect multiple number of DUTs at the same time, but due to the probe head 26 comprising a plurality of probing areas 27 , the space transformer 24 is not interchangeable with the space transformer 14 of FIG. 1 , as a result, redesign and remanufacturing are required. Consequently, the cost of the multi-DUT probing device is increased. Hence, allowing a multi-DUT probing device to continue to utilize the space transformer of a single-DUT probing device is an issue worth considering for those skilled in the art.
- each space transformer is positioned using a reference base. After each space transformer is positioned the space transformer is then fixed onto a PCB.
- positioning method is merely preliminary. When reflow soldering is performed later on, position of the space transformer may still be shifted away, thereby causing misalignment between probes of the probing areas and the pads on the space transformer.
- a purpose of the present invention is to provide a manufacturing method of probing device.
- the probing device can utilize the space transformer of a single-DUT probing device, and the cost of the probing device can be thereby lowered.
- An embodiment of the present invention discloses a manufacturing method for a probing device.
- the manufacturing method comprises providing a reinforcing plate; disposing a plurality of space transformers on the reinforcing plate, wherein a surface of the transforming plate comprises a plurality of first pads; fixing the space transformer on the reinforcing plate, for configuring the internal circuitry of the space transformer to be electrically connected to the internal circuitry of the reinforcing plate; forming a photoresist film on the space transformer, wherein the photoresist film comprises a plurality of openings and the first pad is disposed in the opening; forming a metal layer in each of the plurality of openings, wherein the metal layer covers the plurality of first pad for forming a plurality of second pads; removing the photoresist film; providing a printed circuit board (PCB) and electrically connecting the internal circuitry of the reinforcing plate to internal circuitry of the PCB; and providing a probe head, the probe head comprising a plurality of probing
- FIG. 1 is a diagram illustrating a conventional probing device.
- FIG. 2 is a diagram illustrating another conventional multi-DUT probing device.
- FIG. 3 is a diagram illustrating a probing device according to a first embodiment of the present invention.
- FIG. 4A ?? FIGG . 4 I are a plurality of sectional view diagrams illustrating a manufacturing process of the probing device of the first embodiment of the present invention.
- FIG. 5A is a top view diagram illustrating the probing device of FIG. 4B
- FIG. 5B is a top view diagram illustrating the probing device of FIG. 4C
- FIG. 5C is a top view diagram illustrating the probing device of FIG. 4G
- FIG. 6A ?? FIGG . 6 D are a plurality of diagrams illustrating the configuration and positioning of the space transformer according to another embodiment of the present invention.
- FIG. 7 is a sectional view diagram illustrating a reinforcing plate according to another embodiment of the present invention.
- FIG. 3 is a diagram illustrating a probing device according to a first embodiment of the present invention.
- the probing device 30 comprises a cage 31 , a printed circuit board (PCB) 32 , a reinforcing plate 38 , a plurality of space transformers 34 and a probe head 35 .
- the probe head 35 comprises a plurality of probing areas 36 .
- the reinforcing plate 38 is disposed in one side of the PCB 32 and is electrically connected to the PCB 32 .
- a structure of the reinforcing plate 38 can be, for instance, Multi-Layered Ceramic (MLC), which processes relatively high hardness, for increasing the overall strength of the probing device 30 .
- MLC Multi-Layered Ceramic
- space transformers 34 are electrically connected to the reinforcing plate 38 , meaning that the internal circuitries of the space transformer 34 and the reinforcing plate 38 are electrically connected.
- Structures of the plurality of space transformers 34 can be Multi-Layered Organic (MLO), for instance.
- MLO Multi-Layered Organic
- Each probing area 36 comprises a plurality of probes 362 , and the probe head 35 is fixed by the cage 31 .
- One end of the probe 362 is electrically contacted with the space transformer 34 , and the other end of the probe 362 is in contact with a DUT (not illustrated).
- a space between two neighboring probing areas 36 is formed for jumping DUTs.
- the meaning of the phrase “Jumping DUTs” as described herein is that the probe arrangement of the multi-DUT probing device 30 shows regionalized distribution, so that during testing, the probing device can go across at least one DUT, and test other DUTs located on both sides which are next to the DUT that had being went across. For instance, when the probing device 30 touches a wafer, the probing device 30 does not simultaneously touch two neighboring chips, instead, the probing device 30 tests the chips that are located on both sides across a certain chip (or chips).
- FIG. 4A ⁇ FIG . 4 I are a plurality of sectional view diagrams illustrating a manufacturing process of the probing device 30 of the first embodiment of the present invention.
- a reinforcing plate 38 is provided.
- One side of the reinforcing plate 38 comprises a cavity 384 .
- FIG. 4B and FIG. 5A are a top view diagram illustrating the probing device of FIG. 4B .
- a plurality of space transformers 34 are disposed in the cavity 384 of the reinforcing plate 38 , as shown in FIG. 5A .
- a plurality of positioning points 382 are disposed on the bottom of the cavity 384 . During positioning of the space transformer 34 , the corners of the space transformer 34 are leaned against the positioning points 382 , so as to utilize the positioning points 382 to position the space transformer 34 .
- FIG. 4C When the space transformer 34 is positioned, reflow process is performed for soldering the solders 341 under the space transformer 34 onto the reinforcing plate 38 .
- a plurality of first pads 342 are disposed on the space transformer 34 .
- the plurality of first pads 342 can be made of copper, for instance.
- the cavity 384 is then filled with an underfill 385 , for preventing the solders 341 from being polluted by external environment.
- FIG. 5B is a top view diagram illustrating the probing device of FIG. 4C .
- the first pads 342 on each space transformer 34 is not aligned to the first pads 342 of the respective corresponding positions on other neighboring space transformers 34 .
- the respective centers of the first pads 342 on each space transformer 34 are aligned to one horizontal extension line or one vertical extension line. In other words, the center of a first pad 342 A on the space transformer 34 A and the center of a first pad 342 B of a corresponding position on the space transformer 34 B are not aligned to the same extension line A.
- the center of the first pad 342 A on the space transformer 34 A and the center of a first pad 342 C of a corresponding position on the space transformer 34 C are not aligned to the same extension line B.
- the first pad 342 A is at a left front position on the space transformer 34 A
- the first pad 342 B and the first pad 342 C are also at a corresponding left front position on the space transformer 34 B and the space transformer 34 C, respectively.
- FIG. 4D a photoresist layer 39 ′ is painted on each space transformer 34 .
- the photoresist layer 39 ′ covers the first pads 342 .
- FIG. 4E the photoresist layer 39 ′ is shown to have gone through lithography to form a photoresist film 39 .
- the photoresist film 39 comprises a plurality of openings 391 , where the first pad 342 is disposed in the opening 391 .
- a metal layer 343 is deposited in the opening 391 via electroplating; and the metal layer 343 covers and is contacted with the first pad 342 . After the metal layer 343 has completely deposited, a second pad 344 is formed. The first pad 342 is covered by the second pad 344 .
- the material of the metal layer 343 is the same as that of the first pad 342 , which mainly includes copper. Material of the metal layer 343 is not limited to copper and can be other substances with excellent conductivity.
- the first pad 342 is completely inside the opening 391 .
- the photoresist film 39 can cover a portion of the first pad 342 , so that only a part of the first pad 342 is inside opening 391 .
- the second pad 344 that is formed will only cover the part of the first pad 342 below, which is not covered by the photoresist film 39 .
- planarization process is then performed, for planarizing the upper surfaces of the second pads 344 . Via planarization, not only the upper surfaces of the second pads 344 can be planarized, upper surface of each second pad 344 can also be ensured to be aligned to the same plane. As a result, the issue of height difference found between the first pads 342 on different space transformers 34 can be compensated.
- FIG. 4G where the photoresist film 39 (as shown in FIG. 4E ) is removed, leaving only the second pads 344 to remain.
- a center line C 2 of at least one second pad 344 on another space transformer 34 does not overlap with a center line C 1 of the corresponding first pad 342 being covered below.
- FIG. 5C is a top view diagram illustrating the probing device of FIG. 4G .
- the center of the second pad 344 on each space transformer 34 and the center of the second pad 344 of a corresponding position on another neighboring space transformers 34 are aligned to one horizontal extension line or one vertical extension line.
- the center of the second pad 344 A on the space transformer 34 A and the center of the second pad 344 B of a corresponding position on the space transformer 34 B are aligned to the same extension line A.
- the center of the second pad 344 A on the space transformer 34 A and the center of the second pad 344 C on the space transformer 34 C are aligned to the same extension line B.
- FIG. 4H After the second pads 344 are produced, an anti-oxidation layer 345 can be formed on a surface of the second pads 344 .
- FIG. 4I where the reinforcing plate 38 is soldered on one PCB 32 . Internal circuitry of the reinforcing plate 38 is electrically connected to the internal circuitry of the PCB 32 via the plurality of solders 381 . The probe head can then be assembled on the space transformer 34 , completing the assembly of the probing device 30 (as shown in FIG. 3 ).
- FIG. 5B Please compare FIG. 5B and FIG. 5C .
- the space transformer 34 will shift away during reflow process, the first pads 342 on different space transformer 34 are not aligned to each other. Hence, some probes 362 of the probing area 36 will not be able to align to the first pads 342 .
- the probes 362 of the probing area 36 must contact the pads (not illustrated) on the DUT, the user cannot adjust positions of the probes 362 during assembling of the probing device for allowing the probes 362 to contact the first pads 342 whose positions are shifted away. Consequently, the assembled probing device cannot function properly. This is also the reasons as to why the space transformer (e.g. the space transformer 14 in FIG. 1 ) of a single-DUT probing device cannot be applied to a multi-DUT probing device.
- the space transformer e.g. the space transformer 14 in FIG. 1
- the probes 362 of the probing area 36 can still effectively come in contact with the second pads 344 by utilizing the first pads 342 , even though the first pads 342 are shifted away after reflow. In this way, the assembled probing device 30 can function properly.
- the area of the second pad 344 has to be large enough for achieving effective contact with the probe 362 of the probing area 36 , so that signals can be transmitted between the second pad 344 and the probe 362 .
- Area of the second pad 344 is not specifically limited, as long as the probes 362 can be electrically connected to the internal circuitry of the space transformer 34 via the second pads 344 .
- the structure of the space transformer 34 is similar to that of the space transformer 14 shown in FIG. 1 .
- the space transformer 34 can be originally designed for the single-DUT probing device (e.g. the probing device 10 in FIG. 1 ).
- the space transformer 34 can be applied to multi-DUT probing device (e.g. the probing device 30 in FIG. 3 ) via the manufacturing process as shown in FIG. 4A ⁇ FIG . 4 I.
- multi-DUT probing device e.g. the probing device 30 in FIG. 3
- FIG. 4A ⁇ FIG . 4 I This way, when manufacturing multi-DUT probing devices, new space transformers are not required, and the space transformer for the single-DUT probing device can still be utilized. Therefore, effect of economic of scales can be achieved, further lowering cost of the probing device 30 .
- a purpose of the anti-oxidation layer 345 shown in FIG. 4I is to protect the second pads 344 , for preventing the second pads from oxidation.
- those skilled in the art can choose not to implement the anti-oxidation layer 345 according to practical needs.
- the second pads 344 on different space transformer 34 are aligned.
- the second pads 344 on different space transformer 34 are not required to be aligned precisely, as long as the probes 362 of the probing area 36 can be electrically connected to the internal circuitry of the corresponding space transformer via the second pads 344 . In other words, transmittance of test signals is ensured between the probes 362 and the second pads 344 .
- a number of space transformers 34 disposed on the reinforcing plate 38 is four, but is not limited to this.
- the number of space transformers 34 being disposed on the reinforcing plate can be adjusted (e.g. two or six, etc.) according to practical needs.
- FIG. 4B the space transformer 34 is positioned via the positioning points 382 , but is not limited to such manner.
- FIG. 6A ⁇ FIG . 6 D are sectional view diagrams illustrating a method of the positioning of the space transformer according to another embodiment of the present invention. Please refer to FIG. 6A , where a cage 60 is provided. A plurality of positioning cavities 61 is disposed on the cage 60 . Please then refer to FIG. 6B , where a space transformer 34 is disposed in each of the positioning cavity 61 . Please refer to FIG.
- FIG. 6C where a reinforcing plate 38 is then arranged to be close to the cage 60 and reflow process is performed for soldering the space transformer 34 to the reinforcing plate 38 .
- FIG. 6D where the reinforcing plate 38 is then separated from the cage 60 , thereby completing the positioning of the space transformer 34 .
- FIG. 7 is a diagram illustrating a reinforcing plate 48 according to another embodiment of the present invention.
- upper surface of the reinforcing plate 48 is a flat plane without any cavities and the space transformer 34 is disposed directly on the upper surface of the reinforcing plate 48 .
- an underfill 481 can be filled between the space transformer 34 and the reinforcing plate 38 .
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Abstract
A manufacturing method of a probing device is provided. The manufacturing method includes following steps. First, a plurality of space transformers is disposed on a reinforcing plate and the space transformer includes a plurality of first pads. Then, the space transformer is fixed on the reinforcing plate. Thereafter, photoresist films having a plurality of openings are formed on the space transformer. The first pads are disposed in the openings. After that, a metal layer is formed and covered on the first pad. Later, the photoresist film is removed and the metal layer planarized to form a second pad. Afterwards, the reinforcing plate is electrically connected with a PCB. Thereafter, a probe head having a plurality of probing area is provided and each probing area is corresponding to one of the space transformer. The probes in the probing area are electrically connected with the internal circuitry of the space transformer.
Description
- The present invention relates to a manufacturing method of probing device, and more particularly, to a manufacturing method of probing device for semiconductor testing.
- Process of manufacturing semiconductor wafers to produce integrated circuit (IC) chips involves a number of steps, such as lithography, deposition and etching, etc. Due to complexity of the manufacturing process, some IC chips will inevitably possess defects. Therefore, the defective IC chips are tested before wafer dicing is performed to separate above mentioned IC chips from the semiconductor wafers, so as to determine whether the IC chips are defective.
- Please refer to
FIG. 1 .FIG. 1 is a diagram illustrating aconventional probing device 10. Theconventional probing device 10 comprises acage 11, a printed circuit board (PCB) 12, aspace transformer 14 and aprobe head 16. Thespace transformer 14 is disposed on thePCB 12 via a plurality ofsolders 18, and theprobe head 16 is fixed by thecage 11. Further, theprobe head 16 comprises a plurality ofprobes 162. One end of theprobe 162 is in contact with apad 141 disposed on thespace transformer 14, and the other end of theprobe 162 is in contact with a chip (not illustrated) on the wafer being tested, so the chips (not illustrated) on the wafer can be tested via theprobes 162. Circuitries (not illustrated) are disposed in thespace transformer 14, so that theprobes 162 on theprobe head 16 can be electrically connected to thePCB 12 via these circuitries. In this way, testing signals received by theprobes 162 can be transferred to thePCB 12 via thespace transformer 14, for further follow-up analysis. - In the current market, the
probing device 10 is produced and assembled by dedicated probing device manufacturers. Thespace transformer 14, however, is usually provided by IC manufacturers or IC design companies, due to cost issue. On the other hand, only oneprobe head 16 is disposed on thespace transformer 14 shown inFIG. 1 , so that only one single device under test (DUT) can be detected and tested at a time. To increase testing efficiency, some manufacturers may dispose a plurality of probing areas in one probe head for allowing each probing area to correspond to one single DUT, so that number of multiple DUTs can be detected at once. Such probing device can be referred to as a multi-DUT probing device, and the probing device similar toFIG. 1 can be referred to as a single DUT probing device. - Please refer to
FIG. 2 .FIG. 2 is a diagram illustrating another conventionalmulti-DUT probing device 20. Themulti-DUT probing device 20 comprises acage 21, aPCB 22, aspace transformer 24, a reinforcingplate 25 and aprobe head 26. Theprobe head 26 comprises a plurality ofprobing areas 27. As shown inFIG. 2 , the reinforcingplate 25 is utilized to increase the overall mechanical strength of themulti-DUT probing device 20. Since theprobe head 26 comprises a plurality ofprobing areas 27, where eachprobing area 27 corresponds to one DUT and comprises a plurality ofprobes 272, themulti-DUT probing device 20 can thus detect multiple number of DUTs at one time. - Although the
multi-DUT probing device 20 can detect multiple number of DUTs at the same time, but due to theprobe head 26 comprising a plurality ofprobing areas 27, thespace transformer 24 is not interchangeable with thespace transformer 14 ofFIG. 1 , as a result, redesign and remanufacturing are required. Consequently, the cost of the multi-DUT probing device is increased. Hence, allowing a multi-DUT probing device to continue to utilize the space transformer of a single-DUT probing device is an issue worth considering for those skilled in the art. - In Japan Patent Publication No. 2010266300, each space transformer is positioned using a reference base. After each space transformer is positioned the space transformer is then fixed onto a PCB. However, such positioning method is merely preliminary. When reflow soldering is performed later on, position of the space transformer may still be shifted away, thereby causing misalignment between probes of the probing areas and the pads on the space transformer.
- A purpose of the present invention is to provide a manufacturing method of probing device. The probing device can utilize the space transformer of a single-DUT probing device, and the cost of the probing device can be thereby lowered.
- An embodiment of the present invention discloses a manufacturing method for a probing device. The manufacturing method comprises providing a reinforcing plate; disposing a plurality of space transformers on the reinforcing plate, wherein a surface of the transforming plate comprises a plurality of first pads; fixing the space transformer on the reinforcing plate, for configuring the internal circuitry of the space transformer to be electrically connected to the internal circuitry of the reinforcing plate; forming a photoresist film on the space transformer, wherein the photoresist film comprises a plurality of openings and the first pad is disposed in the opening; forming a metal layer in each of the plurality of openings, wherein the metal layer covers the plurality of first pad for forming a plurality of second pads; removing the photoresist film; providing a printed circuit board (PCB) and electrically connecting the internal circuitry of the reinforcing plate to internal circuitry of the PCB; and providing a probe head, the probe head comprising a plurality of probing areas, each probing area corresponding to one of the plurality of space transformers, each probing area comprising a plurality of probes, wherein the plurality of probes are electrically connected to the internal circuitry of the space transformer via the plurality of second pads.
- These and other objectives of the present invention will no doubt become obvious to those of ordinary skill in the art after reading the following detailed description of the preferred embodiment that is illustrated in the various figures and drawings.
-
FIG. 1 is a diagram illustrating a conventional probing device. -
FIG. 2 is a diagram illustrating another conventional multi-DUT probing device. -
FIG. 3 is a diagram illustrating a probing device according to a first embodiment of the present invention. -
FIG. 4A˜FIG . 4I are a plurality of sectional view diagrams illustrating a manufacturing process of the probing device of the first embodiment of the present invention. -
FIG. 5A is a top view diagram illustrating the probing device ofFIG. 4B -
FIG. 5B is a top view diagram illustrating the probing device ofFIG. 4C -
FIG. 5C is a top view diagram illustrating the probing device ofFIG. 4G -
FIG. 6A˜FIG . 6D are a plurality of diagrams illustrating the configuration and positioning of the space transformer according to another embodiment of the present invention. -
FIG. 7 is a sectional view diagram illustrating a reinforcing plate according to another embodiment of the present invention. - Please refer to
FIG. 3 .FIG. 3 is a diagram illustrating a probing device according to a first embodiment of the present invention. Theprobing device 30 comprises acage 31, a printed circuit board (PCB) 32, areinforcing plate 38, a plurality ofspace transformers 34 and a probe head 35. The probe head 35 comprises a plurality ofprobing areas 36. The reinforcingplate 38 is disposed in one side of thePCB 32 and is electrically connected to thePCB 32. A structure of thereinforcing plate 38 can be, for instance, Multi-Layered Ceramic (MLC), which processes relatively high hardness, for increasing the overall strength of theprobing device 30. Furthermore, thespace transformers 34 are electrically connected to the reinforcingplate 38, meaning that the internal circuitries of thespace transformer 34 and the reinforcingplate 38 are electrically connected. Structures of the plurality ofspace transformers 34 can be Multi-Layered Organic (MLO), for instance. - Each probing
area 36 comprises a plurality ofprobes 362, and the probe head 35 is fixed by thecage 31. One end of theprobe 362 is electrically contacted with thespace transformer 34, and the other end of theprobe 362 is in contact with a DUT (not illustrated). As shown inFIG. 3 , a space between two neighboring probingareas 36 is formed for jumping DUTs. The meaning of the phrase “Jumping DUTs” as described herein is that the probe arrangement of themulti-DUT probing device 30 shows regionalized distribution, so that during testing, the probing device can go across at least one DUT, and test other DUTs located on both sides which are next to the DUT that had being went across. For instance, when the probingdevice 30 touches a wafer, the probingdevice 30 does not simultaneously touch two neighboring chips, instead, the probingdevice 30 tests the chips that are located on both sides across a certain chip (or chips). - Please refer to
FIG. 4A˜FIG . 4I.FIG. 4A˜FIG . 4I are a plurality of sectional view diagrams illustrating a manufacturing process of the probingdevice 30 of the first embodiment of the present invention. Firstly please refer toFIG. 4A , where a reinforcingplate 38 is provided. One side of the reinforcingplate 38 comprises acavity 384. Secondly please refer toFIG. 4B andFIG. 5A .FIG. 5A is a top view diagram illustrating the probing device ofFIG. 4B . A plurality ofspace transformers 34 are disposed in thecavity 384 of the reinforcingplate 38, as shown inFIG. 5A . A plurality ofpositioning points 382 are disposed on the bottom of thecavity 384. During positioning of thespace transformer 34, the corners of thespace transformer 34 are leaned against the positioning points 382, so as to utilize the positioning points 382 to position thespace transformer 34. - Please refer to
FIG. 4C . When thespace transformer 34 is positioned, reflow process is performed for soldering thesolders 341 under thespace transformer 34 onto the reinforcingplate 38. On the other hand, a plurality offirst pads 342 are disposed on thespace transformer 34. The plurality offirst pads 342 can be made of copper, for instance. Thecavity 384 is then filled with anunderfill 385, for preventing thesolders 341 from being polluted by external environment. - Please refer to
FIG. 5B .FIG. 5B is a top view diagram illustrating the probing device ofFIG. 4C . As shown inFIG. 5B , thefirst pads 342 on eachspace transformer 34 is not aligned to thefirst pads 342 of the respective corresponding positions on otherneighboring space transformers 34. The respective centers of thefirst pads 342 on eachspace transformer 34 are aligned to one horizontal extension line or one vertical extension line. In other words, the center of afirst pad 342A on thespace transformer 34A and the center of afirst pad 342B of a corresponding position on thespace transformer 34B are not aligned to the same extension line A. Similarly, the center of thefirst pad 342A on thespace transformer 34A and the center of afirst pad 342C of a corresponding position on thespace transformer 34C are not aligned to the same extension line B. Please note that interpretation of “corresponding positions” mentioned above should be clear to those skilled in the art. For instance, if thefirst pad 342A is at a left front position on thespace transformer 34A, thefirst pad 342B and thefirst pad 342C are also at a corresponding left front position on thespace transformer 34B and thespace transformer 34C, respectively. - One of the reasons for the above phenomenon is that: after the
space transformer 34 is preliminarily positioned on the reinforcingplate 38, reflow process is required for soldering thespace transformer 34 onto the reinforcingplate 38. However, thespace transformer 34 may shift away during the reflow process. Also, after reflow is performed, the thickness of thesolders 341 under thespace transformer 34 may change, thereby causing the height of thefirst pads 342 ondifferent space transformers 34 to be inconsistent. - Subsequently, please refer to
FIG. 4D . As shown inFIG. 4D , aphotoresist layer 39′ is painted on eachspace transformer 34. Thephotoresist layer 39′ covers thefirst pads 342. Please refer toFIG. 4E , thephotoresist layer 39′ is shown to have gone through lithography to form aphotoresist film 39. Thephotoresist film 39 comprises a plurality ofopenings 391, where thefirst pad 342 is disposed in theopening 391. - Please refer to 4F. A
metal layer 343 is deposited in theopening 391 via electroplating; and themetal layer 343 covers and is contacted with thefirst pad 342. After themetal layer 343 has completely deposited, asecond pad 344 is formed. Thefirst pad 342 is covered by thesecond pad 344. In the present embodiment, the material of themetal layer 343 is the same as that of thefirst pad 342, which mainly includes copper. Material of themetal layer 343 is not limited to copper and can be other substances with excellent conductivity. - In
FIG. 4E , thefirst pad 342 is completely inside theopening 391. In other embodiments, however, thephotoresist film 39 can cover a portion of thefirst pad 342, so that only a part of thefirst pad 342 isinside opening 391. Hence, thesecond pad 344 that is formed will only cover the part of thefirst pad 342 below, which is not covered by thephotoresist film 39. Subsequently, planarization process is then performed, for planarizing the upper surfaces of thesecond pads 344. Via planarization, not only the upper surfaces of thesecond pads 344 can be planarized, upper surface of eachsecond pad 344 can also be ensured to be aligned to the same plane. As a result, the issue of height difference found between thefirst pads 342 ondifferent space transformers 34 can be compensated. - Please refer to
FIG. 4G , where the photoresist film 39 (as shown inFIG. 4E ) is removed, leaving only thesecond pads 344 to remain. As shown inFIG. 4G , apart from thespace transformer 34A, a center line C2 of at least onesecond pad 344 on anotherspace transformer 34 does not overlap with a center line C1 of the correspondingfirst pad 342 being covered below. - Please refer to
FIG. 5C .FIG. 5C is a top view diagram illustrating the probing device ofFIG. 4G . In the present embodiment, the center of thesecond pad 344 on eachspace transformer 34 and the center of thesecond pad 344 of a corresponding position on another neighboringspace transformers 34 are aligned to one horizontal extension line or one vertical extension line. In other words, the center of thesecond pad 344A on thespace transformer 34A and the center of thesecond pad 344B of a corresponding position on thespace transformer 34B are aligned to the same extension line A. Similarly, the center of thesecond pad 344A on thespace transformer 34A and the center of thesecond pad 344C on thespace transformer 34C are aligned to the same extension line B. - Please refer to
FIG. 4H . After thesecond pads 344 are produced, ananti-oxidation layer 345 can be formed on a surface of thesecond pads 344. Afterwards, please refer toFIG. 4I , where the reinforcingplate 38 is soldered on onePCB 32. Internal circuitry of the reinforcingplate 38 is electrically connected to the internal circuitry of thePCB 32 via the plurality ofsolders 381. The probe head can then be assembled on thespace transformer 34, completing the assembly of the probing device 30 (as shown inFIG. 3 ). - Please compare
FIG. 5B andFIG. 5C . InFIG. 5B , since thespace transformer 34 will shift away during reflow process, thefirst pads 342 ondifferent space transformer 34 are not aligned to each other. Hence, someprobes 362 of the probingarea 36 will not be able to align to thefirst pads 342. Furthermore, since theprobes 362 of the probingarea 36 must contact the pads (not illustrated) on the DUT, the user cannot adjust positions of theprobes 362 during assembling of the probing device for allowing theprobes 362 to contact thefirst pads 342 whose positions are shifted away. Consequently, the assembled probing device cannot function properly. This is also the reasons as to why the space transformer (e.g. thespace transformer 14 inFIG. 1 ) of a single-DUT probing device cannot be applied to a multi-DUT probing device. - On the other hand, as shown in
FIG. 5C , since the area of thesecond pad 344 is larger than that of thefirst pad 342, theprobes 362 of the probingarea 36 can still effectively come in contact with thesecond pads 344 by utilizing thefirst pads 342, even though thefirst pads 342 are shifted away after reflow. In this way, the assembled probingdevice 30 can function properly. In other words, the area of thesecond pad 344 has to be large enough for achieving effective contact with theprobe 362 of the probingarea 36, so that signals can be transmitted between thesecond pad 344 and theprobe 362. Area of thesecond pad 344 is not specifically limited, as long as theprobes 362 can be electrically connected to the internal circuitry of thespace transformer 34 via thesecond pads 344. - In the present embodiment, the structure of the
space transformer 34 is similar to that of thespace transformer 14 shown inFIG. 1 . In other words, thespace transformer 34 can be originally designed for the single-DUT probing device (e.g. the probingdevice 10 inFIG. 1 ). However, thespace transformer 34 can be applied to multi-DUT probing device (e.g. the probingdevice 30 inFIG. 3 ) via the manufacturing process as shown inFIG. 4A˜FIG . 4I. This way, when manufacturing multi-DUT probing devices, new space transformers are not required, and the space transformer for the single-DUT probing device can still be utilized. Therefore, effect of economic of scales can be achieved, further lowering cost of the probingdevice 30. - A purpose of the
anti-oxidation layer 345 shown inFIG. 4I is to protect thesecond pads 344, for preventing the second pads from oxidation. However, those skilled in the art can choose not to implement theanti-oxidation layer 345 according to practical needs. - In the above embodiments, the
second pads 344 ondifferent space transformer 34 are aligned. However, thesecond pads 344 ondifferent space transformer 34 are not required to be aligned precisely, as long as theprobes 362 of the probingarea 36 can be electrically connected to the internal circuitry of the corresponding space transformer via thesecond pads 344. In other words, transmittance of test signals is ensured between theprobes 362 and thesecond pads 344. - For the above embodiments, a number of
space transformers 34 disposed on the reinforcingplate 38 is four, but is not limited to this. For instance, the number ofspace transformers 34 being disposed on the reinforcing plate can be adjusted (e.g. two or six, etc.) according to practical needs. - In
FIG. 4B , thespace transformer 34 is positioned via the positioning points 382, but is not limited to such manner. Please refer toFIG. 6A˜FIG . 6D.FIG. 6A˜FIG . 6D are sectional view diagrams illustrating a method of the positioning of the space transformer according to another embodiment of the present invention. Please refer toFIG. 6A , where acage 60 is provided. A plurality ofpositioning cavities 61 is disposed on thecage 60. Please then refer toFIG. 6B , where aspace transformer 34 is disposed in each of thepositioning cavity 61. Please refer toFIG. 6C , where a reinforcingplate 38 is then arranged to be close to thecage 60 and reflow process is performed for soldering thespace transformer 34 to the reinforcingplate 38. Please refer toFIG. 6D , where the reinforcingplate 38 is then separated from thecage 60, thereby completing the positioning of thespace transformer 34. - In the above embodiments,
cavities 384 are disposed on the reinforcingplate 38 and thespace transformer 34 is disposed in thecavities 384. However, the reinforcing plate can also be implemented without the cavities, according to practical needs. Please refer toFIG. 7 .FIG. 7 is a diagram illustrating a reinforcingplate 48 according to another embodiment of the present invention. In the present embodiment, upper surface of the reinforcingplate 48 is a flat plane without any cavities and thespace transformer 34 is disposed directly on the upper surface of the reinforcingplate 48. Furthermore, for avoidingsolders 341 below thespace transformer 34 from being contaminated by the environment, anunderfill 481 can be filled between thespace transformer 34 and the reinforcingplate 38. - Those skilled in the art will readily observe that numerous modifications and alterations of the device and method may be made while retaining the teachings of the invention. Accordingly, the above disclosure should be construed as limited only by the meters and bounds of the appended claims.
Claims (11)
1. A manufacturing method for a probing device comprising:
providing a reinforcing plate;
disposing a plurality of space transformers on the reinforcing plate, wherein a plurality of first pads are disposed on a surface of each space transformer;
fixing the space transformer on the reinforcing plate, for configuring the internal circuitry of the space transformer to be electrically connected to the internal circuitry of the reinforcing plate;
forming a photoresist film on the space transformer, wherein the photoresist film comprises a plurality of openings and at least a portion of the first pad is disposed in the opening;
forming a metal layer in each of the plurality of openings, wherein the metal layer is disposed on and is directly contacted with the plurality of first pads for forming a plurality of second pads;
providing a printed circuit board and electrically connecting the internal circuitry of the reinforcing plate to the internal circuitry of the printed circuit board; and
providing a probe head, the probe head comprising a plurality of probing areas, each probing area corresponding to one of the plurality of space transformers, each probing area comprising a plurality of probes, wherein the probe is electrically connected to the internal circuitry of the space transformer via the second pad.
2. The manufacturing method for the probing device of claim 1 , wherein the metal layer is formed in the opening via electroplating.
3. The manufacturing method for the probing device of claim 1 , wherein a plurality of positioning points are disposed on the reinforcing plate and the space transformer is positioned on the reinforcing plate by leaning against the positioning point.
4. The manufacturing method for the probing device of claim 1 , wherein fixing the space transformer on the reinforcing plate comprises:
providing a cage, wherein the cage comprises a plurality of positioning cavities;
disposing the space transformer in the positioning cavity; and
arranging the reinforcing plate to be close to the cage and soldering the space transformer onto the reinforcing plate.
5. The manufacturing method for the probing device of claim 1 , further comprising forming an anti-oxidation layer on a surface of the second pad.
6. The manufacturing method for the probing device of claim 1 , further comprising planarizing the second pad.
7. The manufacturing method for the probing device of claim 1 , further comprising a step of removing the photoresist film after forming the metal layer in each of the plurality of openings.
8. The manufacturing method for the probing device of claim 1 , wherein the surface on which the first pads are disposed is facing away the reinforcing plate.
9. The manufacturing method for the probing device of claim 1 , wherein a center line of at least one second pad does not overlap a center line of the first pad being covered below the second pad.
10. The manufacturing method for the probing device of claim 9 , wherein a center of the second pad on each space transforming plate and a center of the second pad of a corresponding position on a neighboring space transforming plate are aligned to one horizontal extension line or one vertical extension line.
11. The manufacturing method for the probing device of claim 1 , wherein a reflow process is performed for fixing the space transformer on the reinforcing plate.
Priority Applications (1)
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US14/656,730 US20150185254A1 (en) | 2011-09-16 | 2015-03-13 | Manufacturing method of probing device |
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TW100133504A TWI428608B (en) | 2011-09-16 | 2011-09-16 | Probing device and manufacturing method thereof |
US13/612,849 US9234917B2 (en) | 2011-09-16 | 2012-09-13 | Probing device and manufacturing method thereof |
US14/656,730 US20150185254A1 (en) | 2011-09-16 | 2015-03-13 | Manufacturing method of probing device |
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US13/612,849 Division US9234917B2 (en) | 2011-09-16 | 2012-09-13 | Probing device and manufacturing method thereof |
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US20150185254A1 true US20150185254A1 (en) | 2015-07-02 |
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US13/612,849 Active 2033-09-06 US9234917B2 (en) | 2011-09-16 | 2012-09-13 | Probing device and manufacturing method thereof |
US14/656,730 Abandoned US20150185254A1 (en) | 2011-09-16 | 2015-03-13 | Manufacturing method of probing device |
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US13/612,849 Active 2033-09-06 US9234917B2 (en) | 2011-09-16 | 2012-09-13 | Probing device and manufacturing method thereof |
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US (2) | US9234917B2 (en) |
CN (1) | CN102998491B (en) |
SG (3) | SG10201600842SA (en) |
TW (1) | TWI428608B (en) |
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TWI480561B (en) * | 2013-05-15 | 2015-04-11 | Star Techn Inc | Test assembly |
US9581639B2 (en) * | 2013-12-28 | 2017-02-28 | Intel Corporation | Organic space transformer attachment and assembly |
US10088503B2 (en) | 2014-02-27 | 2018-10-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Probe card |
TWI521212B (en) * | 2014-03-10 | 2016-02-11 | A method and a method of assembling a vertical probe device, and a vertical probe device | |
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TWI570416B (en) * | 2015-12-01 | 2017-02-11 | The probe base of the vertical probe device | |
CN110136770B (en) * | 2019-05-31 | 2020-09-22 | 济南德欧雅安全技术有限公司 | Test fixture and test method for testing memory component in application program |
KR20210119814A (en) * | 2020-03-25 | 2021-10-06 | (주)포인트엔지니어링 | Probe head and probe card having the same |
IT202200010940A1 (en) * | 2022-05-25 | 2023-11-25 | Technoprobe Spa | Measurement board for an electronic device test equipment and related space transformer |
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Also Published As
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SG10201600842SA (en) | 2016-03-30 |
US20130069686A1 (en) | 2013-03-21 |
SG188748A1 (en) | 2013-04-30 |
US9234917B2 (en) | 2016-01-12 |
TW201314214A (en) | 2013-04-01 |
CN102998491A (en) | 2013-03-27 |
SG10201501973PA (en) | 2015-05-28 |
CN102998491B (en) | 2015-04-15 |
TWI428608B (en) | 2014-03-01 |
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