US20100301871A1 - Gas sensor - Google Patents

Gas sensor Download PDF

Info

Publication number
US20100301871A1
US20100301871A1 US12/747,034 US74703408A US2010301871A1 US 20100301871 A1 US20100301871 A1 US 20100301871A1 US 74703408 A US74703408 A US 74703408A US 2010301871 A1 US2010301871 A1 US 2010301871A1
Authority
US
United States
Prior art keywords
electrode
gas sensor
electrochemical gas
electrodes
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/747,034
Other languages
English (en)
Inventor
Diana Biskupski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Assigned to SIEMENS AKTIENGESELLSCHAFT reassignment SIEMENS AKTIENGESELLSCHAFT ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: WIESNER, KERSTIN, BISKUPSKI, DIANA, MOOS, RALF, SCHOENAUER, DANIELA, FLEISCHER, MAXIMILLIAN
Publication of US20100301871A1 publication Critical patent/US20100301871A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

Definitions

  • the invention relates to an electrochemical gas sensor that comprises at least a first and at least a second electrode.
  • the invention further relates to a method for producing and a method for operating an electrochemical gas sensor.
  • gas sensors are used in many fields of technology in order to satisfy increasing demands placed on environmental compatibility and safety.
  • One example of an application for gas sensors consists of detecting ammonia (NH 3 ) in the exhaust gas system of diesel engines. This may occur during selective catalytic reduction, or SCR, which is used to reduce the emission of nitrogen oxides (NO x ).
  • electrochemical gas sensors have a first and a second electrode, the second electrode being made of a different material to the first electrode, which is in contact with the gas environment in which, for example, ammonia is to be detected.
  • the two electrodes are connected via an ion-conducting, i.e. electrolytic material, for example, YSZ (yttrium-stabilized zirconium oxide).
  • electrolytic material for example, YSZ (yttrium-stabilized zirconium oxide).
  • EMF electromotive force
  • the second electrode is normally referred to as a passive electrode and is made, for example, of platinum.
  • the first electrode is normally referred to as an active electrode and consists of a complex mixture of a metal oxide, for example bismuth vanadium oxide (BiVO 4 ), with an admixture of, for example, a metal such as 5% magnesium.
  • a metal oxide for example bismuth vanadium oxide (BiVO 4 )
  • the complex material mixtures must satisfy a range of requirements. They must therefore be sufficiently electrically conductive. They must also be sufficiently thermally and chemically stable for the gas environments, which are often hot and aggressive, in which they will be used.
  • the complex material mixtures must be as catalytically selective as possible, i.e. they must promote as few chemical reactions as possible, ideally just one, in the gas environment to be measured.
  • a drawback of known sensors is that their construction, in particular the construction of the complex first electrode, is very involved.
  • the object of the invention is to specify an electrochemical gas sensor and a method for the production thereof, with which simplified construction is made possible. An operating method affording an increased functional range will also be specified for a gas sensor of this type.
  • the object is achieved by an electrochemical gas sensor having the features of the claims.
  • the production method the object is achieved by a method having the features of the claims for producing an electrochemical gas sensor.
  • the operating method the object is achieved by a method having the features of the claims for operating an electrochemical gas sensor.
  • the dependent claims relate to advantageous configurations of the solution according to the invention.
  • the electrochemical gas sensor according to the invention comprises a first and a second electrode.
  • the two electrodes are connected via an ion-conducting material.
  • the first electrode is covered, at least in part, by a first catalytically active material.
  • the electrochemical sensor is preferably based on the fact that it is known for an electromotive force (EMF), i.e. a voltage, to be set between the electrodes in the presence of catalytically oxidizable gases.
  • EMF electromotive force
  • the electrodes normally tap this voltage and it is therefore expedient for the electrodes to be sufficiently conductive.
  • Ion-conducting materials are also referred to as electrolytic materials.
  • a solid electrolytic material is preferably used in the electrochemical sensor according to the invention. Examples of this material include yttrium-stabilized zirconium oxide, also known as YSZ, or scandium-stabilized zirconium oxide (ScSZ).
  • the electrodes are expediently not in direct contact with one another, but instead each contact the electrolyte so as to allow the voltage to be formed between the electrodes as a reaction to gases.
  • the sensors may be constructed in various possible ways for this purpose.
  • the sensor is preferably formed in a planar manner.
  • a substrate is preferably used.
  • this may be an aluminum oxide lamina.
  • Other possibilities consist of, for example, sapphire, quartz or silicon substrates.
  • the substrate supports the other elements, i.e. at least the electrodes, the ion-conducting material and the catalytic layer, either directly or indirectly. These other elements are in turn formed as layers assembled on top of one another.
  • a further possible construction consists of a non-planar construction.
  • a spindle-shaped aluminum member supports the other elements.
  • the electrodes may, for example, be formed as wires that also act as suspension for the sensor.
  • a substrate is also not always necessary.
  • the electrodes or the ion conductor may therefore be configured in such a way that they support the electrochemical sensor.
  • the first electrode is covered, in part or completely, by a first catalytically active layer.
  • the electrode is preferably covered in the region of the ion-conducting material.
  • the catalytically active layer preferably, but not necessarily covers the first electrode completely in the region of the ion-conducting material.
  • an ion-conducting material is provided.
  • the first and second electrodes are illustrated in conjunction with the ion-conducting material.
  • a first catalytic material is attached to the first electrode in such a way that the first electrode is covered by said material, at least in part.
  • the sequence of the steps is not important, the production process preferably being carried out in such a way that there are regions in the sensor at which the first catalytic material and the ion conductor meet and, at the same time, it is possible for gas to enter into these regions.
  • a voltage is determined as a measuring signal between the first electrode and the second electrode.
  • an active electrode consisting of a complex material mixture is used in addition to an electrode commonly referred to as a passive electrode.
  • This material mixture must therefore, on the one hand, be conductive enough to fulfill the function of the electrode and, on the other hand, be sufficiently chemically and thermally stable in the measuring environment.
  • Production of these electrodes is complex and yet the electrodes, which consist for example of a mixture of a metal oxide, such as BiVO 4 , with 5% Mg for example, do not exhibit optimal conductivity.
  • the first electrode is therefore provided in conjunction with the first catalytically active material.
  • a number of the sensors according to the invention it is advantageously possible to combine a number of the sensors according to the invention to form a sensor system, this system then possibly comprising a plurality of first and second electrodes.
  • redundant elements may advantageously be omitted and therefore only one substrate might be used in a planar construction or, for example, only one ion-conducting layer might be used for a plurality of electrodes.
  • the system may be used to obtain more information about the gas composition or to identify identical information as redundant.
  • a first electrode that may also be referred to as an active electrode depending on the configuration of the sensor may therefore also be formed and is preferably more conductive over its entire extension than a known active electrode.
  • the first catalytically active material may resort to a material that, for example, is known from the field of car emission control or firing systems. In this case the specific electrical resistance of the material is insignificant since the material does not have to be electrically conductive and may therefore be high or low.
  • Known materials are often more easily available and their chemical and thermal stability are known and/or optimized.
  • At least 20% of the first electrode consists of a metal.
  • at least 50% or at least 95% of the electrode consists of a metal.
  • a construction of 20%, 50% or 95% of a metal mixture or an alloy is therefore also possible.
  • the electrode it is feasible for the electrode to consist completely of the metal or metal mixture or alloy.
  • a particularly simple production as well as simple and cost-effective construction are therefore achieved, the electrical conductivity of the electrode optimally being very high.
  • Examples of possible metals are gold or platinum, which are particularly suitable for applications at high temperatures. However, depending on the application other metals may also be used, such as aluminum or a tungsten/titanium alloy.
  • the metal mixture prefferably not be homogeneous, for example a metal being attached to a further metal, so as to ensure improved adhesion of the entire electrode for example.
  • a further possibility for layered construction consists of the first electrode being provided with a material layer that impedes diffusion of foreign material, for example from the electrolyte.
  • the electrodes are particularly advantageous for the electrodes to consist of the same material. This makes it possible to achieve simpler production since, for example, both electrodes can be produced in a single processing step.
  • the two electrodes may be used different materials for the two electrodes.
  • this may be advantageous if a material is used for the first electrode that impedes diffusion of foreign material, for example from the first catalytically active material.
  • the second electrode may be produced from a simpler or more cost-effective material.
  • a further advantageous configuration of the electrochemical gas sensor is obtained in that the sensor comprises at least a further first electrode.
  • This is preferably covered, at least in part, by a further catalytically active material.
  • the first electrode it is also possible in this instance to provide one or more catalytic materials. It is therefore possible to determine and evaluate the relative voltages of a number of electrodes with respect to one another. This may lead to redundant and therefore secured signals or to additional information.
  • the voltage is therefore preferably determined between each of the first electrodes and the second electrodes and used as a measuring signal.
  • the first catalytically active material is selected so as to be different to the further catalytically active material.
  • the two or more first electrodes are in contact with each of the different catalytic materials.
  • An integrated sensor array i.e. a multi-sensor arrangement, may therefore be formed with two or more first electrodes.
  • the senor so a second electrode, normally referred to as a reference electrode, is provided for each first electrode.
  • the sensor preferably comprises just one second electrode since this makes it possible to save space and achieve simpler construction.
  • a first catalytically active material is preferably used that has a specific resistance of at least 1 ⁇ m at temperatures below 800° C.
  • the material has a specific electrical resistance of less than 1 ⁇ m at temperatures below 800° C. or it has a specific electrical resistance of at least 1 ⁇ m or 1 m ⁇ m at temperatures below 400° C.
  • a further configuration of the invention consists of the second electrode being covered, at least in part, by a second catalytically active material.
  • a second catalytically active material is preferably different to the second catalytically active material.
  • the same catalytic material may also be used.
  • the electrodes it is expedient for the electrodes to be subjected to different gas environments, for example one of the electrodes being subjected to the ambient air and the other being subjected to the measuring gas environment.
  • the second electrode is covered, at least in part, by a protective material, in particular a perovskitic, ceramic or catalytic protective material. Increased chemical stability can thus be ensured.
  • the first, second and/or further catalytic material comprises a SCR catalyst, for example a zeolite or a metal oxide, such as titanium oxide or vanadium oxide, or a NO x storage catalyst, such as platinum with barium.
  • SCR catalysts are materials that are known per se and are used for selective catalytic reduction (SCR). They are known to be chemically and thermally stable and are therefore ideal. They can also be produced without difficulty.
  • the first, second and/or further catalytic material is porous and is therefore better penetrated by gas and thus has an improved sensor signal.
  • the electrochemical gas sensor preferably comprises a heating element.
  • a heating element of this type may, for example, be configured as a heating meander, i.e. as an electric resistance heater.
  • An alternative consists of a wire heating coil at which the sensor is formed, for example on a ceramic sheathing. It is also possible to provide more than one heating element. For example a heating element may be used for each first electrode.
  • a further example consists of the sensor comprising a first and a second electrode and a heating element for each of the electrodes.
  • the heating element(s) heat the sensor, in particular so as to bring the catalytically active materials to an optimal operating temperature.
  • the optimal temperature depends on the type of material and the gas to be detected.
  • the heater(s) it is therefore advantageous for the heater(s) to be configured and used in such a way that at least some of the electrodes can constantly be heated to different temperatures during operation.
  • each of the electrodes may independently be kept at an individual, optimal temperature, which allows the sensor to be used in a highly versatile manner.
  • the temperatures for the electrodes preferably differ by at least 20° C., in particular by at least 100° C.
  • a shield for example in the form of an equipotential layer between the heating element and the electrodes, may be provided between the heater and the electrodes in order to avoid the measurement being negatively influenced by the voltage drop in the heater.
  • the electrochemical gas sensor preferably comprises a temperature sensor, for example this sensor also possibly being formed as a single element, optionally with a heater, for example it may be formed as a platinum heating meander,
  • a combined gas sensor wherein a resistive gas sensor is formed in addition to the electrochemical gas sensor.
  • a third electrode is provided in such a way that it is possible to determine the conductivity of the first catalytic material or that of the second or further catalytic material.
  • the third electrode is therefore preferably in direct contact with the first, second or further catalytic material. In this case it is obviously expedient when measuring the first catalytic material for the third electrode to not simultaneously be in direct electrical contact with the first or second electrode.
  • interdigital contacts i.e. as finger-like or comb-like toothed contacts. This is particularly advantageous if the catalytic material exhibits a high electrical resistance since a reduced resistance is measured by the interdigital contacts.
  • a further, alternative or additional, possible configuration consists of forming a 4-point measuring arrangement in order to determine the electrical resistance of the catalytic layers by a corresponding configuration of the third electrodes.
  • the third electrodes are preferably arranged, at least in part, on the first, second or further catalytically active material.
  • one or more of the third electrodes may be arranged on the first or other electrodes and beneath the first or second or further catalytically active material, an electrically insulating, porous material preferably also being provided between these third electrodes and the first electrode.
  • a definable oxygen partial pressure may therefore also be set in at least some of the gas sensors, in each case in the region of at least one of the electrodes, for example the respective electrode being in contact with the ambient air whilst the other electrodes are in contact with the measuring gas.
  • the main applications in these examples are ammonia detection, however the sensor is in no way limited to this.
  • the gases that can be detected may advantageously be varied widely by appropriate selection of the catalytically active materials.
  • FIGS. 1 and 2 are a plan view and a side view of an electrochemical gas sensor comprising two electrodes.
  • FIGS. 3 and 4 are again a plan view and a side view of an electrochemical gas sensor comprising three electrodes.
  • FIGS. 5 and 6 are a plan view and a side view of a combined electrochemical and resistive gas sensor.
  • FIGS. 7 and 8 are a plan view and a side view of a combined electrochemical and resistive gas sensor.
  • FIG. 9 is a schematic view of the dependency of the measuring signal of two catalytically active materials on the concentration of NO and NH 3 .
  • FIGS. 10 and 11 are schematic views of the progress over time of reactions of electrochemical and combined sensors to different concentrations of NO and NH 3 .
  • FIG. 1 being a plan view of part of a first electrochemical gas sensor 10
  • FIG. 2 being a view of the same sensor 10 from the front of the sensor.
  • the first electrochemical sensor 10 is formed as a planar sensor, just as the further exemplary sensor variants 20 , 30 and 40 .
  • This means that the main elements of the sensor are attached as layers to a ceramic substrate 1 , the layers mostly being thin compared to their lateral extensions.
  • sensors according to the invention using non-planar technology. For example gas sensors are also produced effectively on small pipes made of aluminum oxide.
  • the first sensor variant 10 according to FIGS. 1 and 2 is assembled on a ceramic substrate 1 .
  • this substrate consists of aluminum oxide Al 2 O 3 .
  • One side of the substrate, illustrated as the underside in FIG. 2 comprises a heating meander 12 , in this case made of platinum.
  • the other side of the ceramic substrate 1 comprises an electrolytic layer 2 , for example made of yttrium-stabilized zirconium oxide, commonly referred to as YSZ.
  • a first platinum electrode 4 and a second platinum electrode 3 are provided beside one another on the electrolytic layer 2 . They project over the electrolytic layer 2 and are used to electrically tap the gas sensor 10 (this process not being shown in greater detail in the figures).
  • the first platinum electrode 4 is coated with a catalyst layer 5 in the region of the electrolytic layer 2 .
  • the first sensor variant 10 is therefore advantageously formed by a construction that is simple to produce by using two, for example completely similar, platinum electrodes 3 , 4 . A different reaction to different gases is achieved by the catalyst layer 5 on the first platinum electrode 4 .
  • a second sensor variant 20 is shown schematically.
  • the second sensor variant 20 is configured so as to be similar in part to the first sensor variant 10 and the differences will be discussed hereinafter.
  • the second sensor variant 20 comprises a further, third platinum electrode 6 , the third platinum electrode 6 being coated by a further catalyst layer 7 .
  • the further catalyst layer 7 it is expedient for the further catalyst layer 7 to consist of a different material to the catalyst layer 5 .
  • the third platinum electrode 6 and the first platinum electrode 4 can therefore advantageously be set so as to have different gas sensitivities, the second sensor variant 20 therefore being able to supply more information than the first sensor variant 10 .
  • a first catalyst is used that is sensitive to NH 3 and NO.
  • the other first electrode comprises a second catalyst that merely reacts to NH 3 .
  • Signals can be obtained from the electrodes and these are shown schematically in FIG. 9 . It can be seen that the second catalyst does not react to NO.
  • the concentrations of NO and NH 3 can be determined by a suitable comparison of the measuring signals, for example a linear combination.
  • FIG. 10 is a schematic view of the reaction, i.e. the measuring signal, that can be tapped at the electrodes for the two catalysts with the addition of different concentrations of NO and NH 3 in the vicinity of a gas sensor of this type.
  • a first combined sensor 30 is shown schematically.
  • the ceramic substrate 1 is not shown in FIG. 5 in order to provide a better overview.
  • the first combined sensor 30 comprises a first and a second platinum electrode 3 , 4 , the first platinum electrode 4 in turn being covered by a catalyst layer 5 .
  • the first combined sensor 30 comprises a first additional electrode 8 , parts of which are arranged on the catalyst layer 5 . Further electrical contact with the catalyst layer 5 is therefore created by the first additional electrode 8 in addition to the first platinum electrode 4 . Changes in the electrical conductivity of the catalyst layer 5 may therefore be identified and tapped by the first platinum electrode 4 and the first additional electrode 8 . These changes in conductivity may be used as a further measuring signal in addition to the electrochemical measuring signal that is tapped by the first and second platinum electrodes 3 , 4 .
  • the catalyst layer 5 therefore acts as a resistive gas sensor in conjunction with the first additional electrode 8 and the first platinum electrode 4 . If the catalyst layer 5 is a metal oxide layer then it is a resistive metal oxide gas sensor.
  • the first combined sensor 30 is therefore a combination of an electrochemical gas sensor and a resistive gas sensor.
  • a further alternative for construction in accordance with the invention in the form of a second combined sensor 40 is shown schematically.
  • the second combined sensor 40 now in turn comprises the first platinum electrode 4 with the catalyst layer 5 on the electrolytic layer 2 .
  • a further catalyst layer 7 is now provided on the second platinum electrode 3 .
  • a first additional electrode 8 and a second additional electrode 9 are provided so as to create a resistive gas sensor by way of the second combined sensor 40 .
  • These additional electrodes are arranged in part on the catalyst layer 5 and are configured as ‘interdigital contacts’ in the region of the catalyst layer 5 .
  • the conductivity of the catalyst layer 5 is therefore determined with the first and second additional electrodes 8 , 9 .
  • the first platinum electrode 4 does not have to participate in this.
  • the further catalyst layer 7 it is advantageous for the further catalyst layer 7 to exhibit a high specific electrical resistance or for an insulating protective layer to be arranged over the second platinum electrode 3 instead of the further catalyst layer 7 .
  • the second additional electrode 9 may, in this alternative configuration, extend over the two platinum electrodes 3 with the further catalyst layer 7 or the protective layer, without substantially distorting the measuring signals.
  • the course of the signal for a combined gas sensor of this type is shown schematically.
  • the reaction of the voltage between the electrodes i.e. the electrochemical signal
  • the reaction of the conductivity of the catalyst i.e. the resistive signal that is similar to that of a metal oxide gas sensor
  • the concentrations of the target gases for example in this instance NO and NH 3
  • a particularly advantageous possible configuration consists of configuring the heating meander 12 in such a way that it heats the ceramic substrate 1 and therefore the respective sensor 20 , 40 to a varying extent at different points. It is therefore possible for the different catalyst layers 5 , 7 on the sensor to be at respective, different, optimal temperatures.
  • An alternative consists of using a number of heating meanders that can be operated separately from one another.
  • a further advantageous possible configuration, shown in this example in FIGS. 2 , 6 and 8 consists of using an ‘equipotential layer’ 11 .
  • metal-conducting layer 11 is advantageously integrated into the ceramic substrate 1 in a planar manner and prevents the voltage, which drops across the heating meander 12 , from having any influence on the voltage that can be tapped between the electrodes 3 , 4 , 6 . It is also expedient for the heater 12 to be used simultaneously as a temperature sensor.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
US12/747,034 2007-12-10 2008-12-01 Gas sensor Abandoned US20100301871A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007059653.9 2007-12-10
DE102007059653A DE102007059653A1 (de) 2007-12-10 2007-12-10 Gassensor
PCT/EP2008/066486 WO2009074471A1 (de) 2007-12-10 2008-12-01 Gassensor

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/066486 A-371-Of-International WO2009074471A1 (de) 2007-12-10 2008-12-01 Gassensor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US13/895,474 Division US9068924B2 (en) 2007-12-10 2013-05-16 Gas sensor

Publications (1)

Publication Number Publication Date
US20100301871A1 true US20100301871A1 (en) 2010-12-02

Family

ID=40510405

Family Applications (2)

Application Number Title Priority Date Filing Date
US12/747,034 Abandoned US20100301871A1 (en) 2007-12-10 2008-12-01 Gas sensor
US13/895,474 Expired - Fee Related US9068924B2 (en) 2007-12-10 2013-05-16 Gas sensor

Family Applications After (1)

Application Number Title Priority Date Filing Date
US13/895,474 Expired - Fee Related US9068924B2 (en) 2007-12-10 2013-05-16 Gas sensor

Country Status (8)

Country Link
US (2) US20100301871A1 (de)
EP (1) EP2220483B1 (de)
CN (1) CN101918824B (de)
AT (1) ATE529736T1 (de)
DE (1) DE102007059653A1 (de)
ES (1) ES2373197T3 (de)
RU (1) RU2485491C2 (de)
WO (1) WO2009074471A1 (de)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120047993A1 (en) * 2010-08-26 2012-03-01 Honda Motor Co., Ltd. Particulate matter detection device
DE102011080690A1 (de) * 2011-08-09 2013-02-14 Deutsches Zentrum für Luft- und Raumfahrt e.V. NO2 selektiver Sensor mit Al- dotierten TiO2 Sensorelektroden
US20130305812A1 (en) * 2011-01-28 2013-11-21 Torsten Reitmeier Sensor Element And A Method For Detecting A Parameter Of A Gas Mixture In A Gas Chamber
US20140034495A1 (en) * 2011-04-08 2014-02-06 Philippe Grass Sensor Apparatus For Detecting A Gas Concentration And A Particle Concentration Of An Exhaust Gas
US9181835B2 (en) 2013-08-13 2015-11-10 Caterpillar Inc. Supervisory model predictive selective catalytic reduction control method
US9372170B2 (en) 2012-08-24 2016-06-21 Testo Ag Gas sensor
KR20170125957A (ko) * 2015-03-11 2017-11-15 로베르트 보쉬 게엠베하 가스 센서 제조 방법 및 상응하는 가스 센서
US20210096008A1 (en) * 2019-09-27 2021-04-01 Siemens Aktiengesellschaft Rod Shaped Measuring Electrode for a Magnetic Inductive Flow Meter

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8813539B2 (en) * 2007-07-10 2014-08-26 National Taiwan University Of Science And Technology Electrochemistry apparatus
DE102009055336B4 (de) 2009-12-28 2015-03-19 Enotec Gmbh, Prozess- Und Umweltmesstechnik Gassensor
CN102095759A (zh) * 2010-11-18 2011-06-15 大连理工大学 一种基于y型沸石薄膜材料的神经元有害气体传感器
CN102495104A (zh) * 2011-12-12 2012-06-13 大连理工大学 一种基于ZnO表面涂层的Y型沸石材料的神经元有害气体传感器
US9395344B2 (en) * 2013-02-06 2016-07-19 Veris Industries, Llc Gas sensor with thermal measurement compensation
DE102013211791A1 (de) 2013-06-21 2014-12-24 Robert Bosch Gmbh Sensorelement mit Kontaktfläche
DE102014214397A1 (de) * 2014-07-23 2016-01-28 Siemens Aktiengesellschaft Gassensor und Verfahren zur Detektion von Stickoxiden und Ammoniak in einem Gasgemisch
RU2593527C1 (ru) * 2015-04-29 2016-08-10 Открытое акционерное общество "Нефтяная компания "Роснефть" Планарный термокаталитический сенсор горючих газов и паров
US10670554B2 (en) 2015-07-13 2020-06-02 International Business Machines Corporation Reconfigurable gas sensor architecture with a high sensitivity at low temperatures
EP3130916B1 (de) 2015-08-10 2022-01-12 ARKRAY, Inc. Messverfahren eines sensors mit ineinandergreifender array-elektrode, messvorrichtung und messprogramm
US10041898B2 (en) 2015-12-01 2018-08-07 International Business Machines Corporation 3D micro and nanoheater design for ultra-low power gas sensors

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4839019A (en) * 1986-11-20 1989-06-13 Fuji Electric Co., Ltd. Oxygen sensor
US5605612A (en) * 1993-11-11 1997-02-25 Goldstar Electron Co., Ltd. Gas sensor and manufacturing method of the same
US20040094416A1 (en) * 2002-11-15 2004-05-20 Chen David K Gas sensor and method for use thereof
US20070125664A1 (en) * 2005-12-05 2007-06-07 Labarge William J Gas sensor element and methods of making and using the same
US20070170057A1 (en) * 2006-01-23 2007-07-26 Denso Corporation Gas sensing member used for gas sensor and method of manufacturing the member
WO2007115855A1 (de) * 2006-04-05 2007-10-18 Robert Bosch Gmbh Sensorelement zur bestimmung von verschiedenen gasanteilen in einem messgas

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55154450A (en) * 1979-05-19 1980-12-02 Nissan Motor Co Ltd Air-fuel-ratio detector
SU1182375A1 (ru) * 1984-01-13 1985-09-30 Институт электрохимии Уральского научного центра АН СССР Электрохимический датчик кислорода
DE3519397A1 (de) * 1985-05-30 1986-12-04 Siemens AG, 1000 Berlin und 8000 München Sensor fuer gasanalyse bzw. -detektion
DE4137030A1 (de) * 1991-11-11 1993-05-13 Mst Micro Sensor Tech Gmbh Elektrochemischer sensor zur messung der gaskonzentration
RU2037918C1 (ru) * 1993-02-03 1995-06-19 Инновационное предприятие "Новатех-патент" Электрохимический элемент с твердым электролитом
DE4308767A1 (de) * 1993-03-19 1994-09-22 Bosch Gmbh Robert Verfahren zur Bestimmung von Gaskomponenten und/oder Gaskonzentrationen von Gasgemischen
DE4408504A1 (de) * 1994-03-14 1995-09-21 Bosch Gmbh Robert Sensor zur Bestimmung der Konzentration von Gaskomponenten in Gasgemischen
US5635628A (en) * 1995-05-19 1997-06-03 Siemens Aktiengesellschaft Method for detecting methane in a gas mixture
JP3648063B2 (ja) * 1997-09-22 2005-05-18 日本特殊陶業株式会社 ガスセンサとそれを用いたガスセンサシステム、及びガスセンサの製造方法
DE19856369C2 (de) * 1998-12-07 2000-12-07 Siemens Ag Resistiver Gassensor und Verfahren zu dessen Herstellung
AU1620401A (en) * 1999-11-19 2001-05-30 Perkin Elmer Instruments Llc Hybrid film type sensor
JP2003280747A (ja) * 2002-01-18 2003-10-02 Sony Corp ガス圧調整装置、電気化学デバイス、気体貯蔵装置及びガス圧調整方法
DE10308395A1 (de) * 2003-02-27 2004-09-09 Robert Bosch Gmbh Sensorelement eines Gassensors

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4839019A (en) * 1986-11-20 1989-06-13 Fuji Electric Co., Ltd. Oxygen sensor
US5605612A (en) * 1993-11-11 1997-02-25 Goldstar Electron Co., Ltd. Gas sensor and manufacturing method of the same
US20040094416A1 (en) * 2002-11-15 2004-05-20 Chen David K Gas sensor and method for use thereof
US20070125664A1 (en) * 2005-12-05 2007-06-07 Labarge William J Gas sensor element and methods of making and using the same
US20070170057A1 (en) * 2006-01-23 2007-07-26 Denso Corporation Gas sensing member used for gas sensor and method of manufacturing the member
WO2007115855A1 (de) * 2006-04-05 2007-10-18 Robert Bosch Gmbh Sensorelement zur bestimmung von verschiedenen gasanteilen in einem messgas

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Machine translation of WO/2007/115855 dated 11/26/12. *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120047993A1 (en) * 2010-08-26 2012-03-01 Honda Motor Co., Ltd. Particulate matter detection device
US20130305812A1 (en) * 2011-01-28 2013-11-21 Torsten Reitmeier Sensor Element And A Method For Detecting A Parameter Of A Gas Mixture In A Gas Chamber
US9829457B2 (en) * 2011-01-28 2017-11-28 Continental Automotive Gmbh Sensor element and a method for detecting a parameter of a gas mixture in a gas chamber
US20140034495A1 (en) * 2011-04-08 2014-02-06 Philippe Grass Sensor Apparatus For Detecting A Gas Concentration And A Particle Concentration Of An Exhaust Gas
US9011659B2 (en) * 2011-04-08 2015-04-21 Continental Automotive Gmbh Sensor apparatus for detecting a gas concentration and a particle concentration of an exhaust gas
DE102011080690A1 (de) * 2011-08-09 2013-02-14 Deutsches Zentrum für Luft- und Raumfahrt e.V. NO2 selektiver Sensor mit Al- dotierten TiO2 Sensorelektroden
DE102011080690B4 (de) * 2011-08-09 2021-02-04 Deutsches Zentrum für Luft- und Raumfahrt e.V. NO2 selektiver Sensor mit Al-dotierten TiO2 Sensorelektroden
US9372170B2 (en) 2012-08-24 2016-06-21 Testo Ag Gas sensor
US9181835B2 (en) 2013-08-13 2015-11-10 Caterpillar Inc. Supervisory model predictive selective catalytic reduction control method
KR20170125957A (ko) * 2015-03-11 2017-11-15 로베르트 보쉬 게엠베하 가스 센서 제조 방법 및 상응하는 가스 센서
KR102411956B1 (ko) 2015-03-11 2022-06-22 로베르트 보쉬 게엠베하 가스 센서 제조 방법 및 상응하는 가스 센서
US20210096008A1 (en) * 2019-09-27 2021-04-01 Siemens Aktiengesellschaft Rod Shaped Measuring Electrode for a Magnetic Inductive Flow Meter

Also Published As

Publication number Publication date
US9068924B2 (en) 2015-06-30
WO2009074471A1 (de) 2009-06-18
DE102007059653A1 (de) 2009-06-18
RU2485491C2 (ru) 2013-06-20
CN101918824A (zh) 2010-12-15
EP2220483B1 (de) 2011-10-19
ATE529736T1 (de) 2011-11-15
US20130285682A1 (en) 2013-10-31
CN101918824B (zh) 2013-12-11
ES2373197T3 (es) 2012-02-01
EP2220483A1 (de) 2010-08-25
RU2010128564A (ru) 2012-01-20

Similar Documents

Publication Publication Date Title
US9068924B2 (en) Gas sensor
US6787014B2 (en) Gas-detecting element and gas-detecting device comprising same
JP3871497B2 (ja) ガスセンサ
US6045673A (en) Gas sensor
EP0990144B1 (de) Integrierter keramischer abgassensor
US20070289870A1 (en) Ammonia Gas Sensor With Dissimilar Electrodes
US7442555B2 (en) Ammonia gas sensor method and device
US20020017461A1 (en) NOx sensor
US10634641B2 (en) Combination NOx and Oxygen sensor with common gas chamber
US20180031515A1 (en) Sensor material and gas sensor element and gas sensor derived therefrom
US20090065370A1 (en) Ammonia gas sensor method and device
US20030121800A1 (en) Sensor element of a gas sensor for determining gas components
KR20000068983A (ko) 개스센서
US20160290953A1 (en) Oxygen sensor element
US20040089054A1 (en) Sensor element of a gas sensor
JP6941373B2 (ja) アンペロメトリック電気化学センサ、センサシステムおよび検出方法
JP2002243692A (ja) 窒素酸化物ガスセンサ
US20110210013A1 (en) Selective gas sensor device and associated method
JP2003329644A (ja) 電気化学的酸素ポンプセルおよびそれを用いた窒素酸化物検知装置
US20050214170A1 (en) Gas sensor and process for producing a gas sensor
JP3696494B2 (ja) 窒素酸化物センサ
US9465004B2 (en) Sensor device for sensing a gas, method for operating a sensor device for sensing a gas and production method for a sensor device for sensing a gas
JPH08247991A (ja) 一酸化炭素ガス検知素子
US20080107923A1 (en) Electrode arrangement for gas sensors
JPH07306175A (ja) 排ガス用不完全燃焼検知素子の製造方法

Legal Events

Date Code Title Description
AS Assignment

Owner name: SIEMENS AKTIENGESELLSCHAFT, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BISKUPSKI, DIANA;FLEISCHER, MAXIMILLIAN;MOOS, RALF;AND OTHERS;SIGNING DATES FROM 20100606 TO 20100609;REEL/FRAME:024865/0085

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION