US20080144199A1 - Arrangement for mounting an optical component - Google Patents

Arrangement for mounting an optical component Download PDF

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Publication number
US20080144199A1
US20080144199A1 US11/959,914 US95991407A US2008144199A1 US 20080144199 A1 US20080144199 A1 US 20080144199A1 US 95991407 A US95991407 A US 95991407A US 2008144199 A1 US2008144199 A1 US 2008144199A1
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United States
Prior art keywords
optical element
force
arrangement according
compression springs
constraining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/959,914
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English (en)
Inventor
Armin Schoeppach
Christian Zenger Ling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
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Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Priority to US11/959,914 priority Critical patent/US20080144199A1/en
Assigned to CARL ZEISS SMT AG reassignment CARL ZEISS SMT AG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ZENGER-LING, CHRISTIAN, SCHOEPPACH, ARMIN
Publication of US20080144199A1 publication Critical patent/US20080144199A1/en
Priority to US12/506,450 priority patent/US7920344B2/en
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/004—Manual alignment, e.g. micromanipulators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1824—Manual alignment

Definitions

  • the disclosure relates to arrangements for mounting an optical element, such as a lens or a mirror.
  • the disclosure provides an arrangement that includes an optical element, a constraining device and elastically resilient elements.
  • the optical element has an outer peripheral area and at least three constraint locations arranged at the outer peripheral area of the optical element.
  • the constraining device has a carrier body, and the elastically resilient elements are arranged in the constraining device.
  • the optical element is constrained via the constraint locations in at least one direction through force-based contact with the elastically resilient elements, and the constraining device constrains the optical element in a statically determinate manner in the carrier body.
  • the disclosure provides a device that includes two arrangements of the type described in the preceding paragraph, where the optical elements of the arrangements are arranged on a single carrier.
  • the disclosure provides an assembly that includes a constraining device having a carrier body.
  • the assembly also includes elastically resilient elements arranged in the constraining device.
  • the assembly is configured so that an optical element having constraining locations at its outer periphery can be constrained via the constraint locations in at least one direction through force-based contact with the elastically resilient elements.
  • the constraining device can constrain the optical element in a statically determinate manner in the carrier body.
  • the disclosure can provide an improved approach for supporting an optical component, such as a lens.
  • an optical element is constrained in at least one direction by way of constraint areas that are in force-based contact with elastically resilient elements, where the elastically resilient element for each constraint area is located in a constraining device with a carrier body and the constraining devices hold the optical element on the carrier body in a statically determinate manner.
  • Certain optical elements such as mirrors or lenses which, due to their shape, are sensitive to deformation, a technical concept is proposed for the connection between the optical element which consists of glass or a similar material, and the mount which holds the optical element in at least three places.
  • either an axial force is used in combination with a tangential force, or an axial force in combination with a force of arbitrary direction in a plane that extends orthogonal to the optical axis, wherein as a principle the lines of action of these forces should not intersect each other in one point.
  • the terms “axial”, “radial” and “tangential” refer to the optical axis of the element and the projection of the outside contour of the optical element into a plane that extends orthogonal to the optical axis.
  • time-dependent effects such as settling effects in coupling locations and relaxation of internal stresses between components can largely be avoided. Therefore, the number of contact locations is also limited to a minimum.
  • a connection can be realized exclusively with force-based contact, and no frictional connections are used. Due to the use of elastic forces of minimal magnitude, the occurrence of distortion-causing stresses can be reduced to a minimum.
  • connections with force-based contact are used instead of connections with frictional contact.
  • the force F RS in this example is acting perpendicular to the seating surface of the optical element so that in case of an axial acceleration of the optical element, this force will act in the axial direction (F axial ).
  • the symbol ⁇ stands for the coefficient of static friction which, with the desired precise finish of the seating surfaces, is in the range from about 0.1 to 0.2.
  • a significantly larger axial force F axial is needed for example in case of an acceleration in the x-direction in order to hold the optical element than would be the case with a holder arrangement of the optical element with force-based contact, where the inertial forces of acceleration are absorbed directly for example via elastic elements.
  • the amount of ⁇ F KS to hold the element through force-based contact is very much smaller than the amount for F RS desired for holding the element through friction-based contact, so that in the former case the optical element is exposed to a lower overall level of mechanical stress.
  • the spring force i.e.
  • the force generated by the deformation of the elastic device acting against the direction of the acceleration will push the optical element back to its original position, while in the case of a friction-based connection the optical element can behave in a non-defined way, if for example its fixation through static friction is compromised for short time intervals.
  • the large force effecting the friction hold needs to act on the optical element continuously, while with a holding arrangement of the optical element that is based on force-based contact, the optical element is exposed to a force that depends on the elastic properties of the elastic elements providing the force-based connection and is significantly reduced in comparison to the friction based connection, and this reduced force is present only at the occurrence of the aforementioned acceleration A of the optical element or in case of an abrupt force acting on the optical element (see description of FIG. 1 below).
  • the holder arrangement of the optical element based on force-based contact therefore performs the holding function with significantly reduced amounts of stress in comparison to the friction-based hold on the optical element.
  • FIG. 1 shows the force F T which acts on an optical element (for example in the tangential direction) in a case where an optical element is held by force-based contact in a position x (which is defined for example by one of the two points indicated on the x-axis, with x being a general spatial coordinate) if the optical element is held via an elastic element which is not pre-biased with regard to the holding force.
  • a force ⁇ F KS occurs as a result of a force pulse or an acceleration of the optical element, it will cause a displacement ⁇ x of the optical element which is determined by the elastic element that holds the optical element. After the effect of the force ⁇ F KS has subsided, the optical element returns to its original position.
  • the force F RS in a friction-based holding arrangement of the optical element needs to be about 5 to 10 times as large as the maximum amount of the forces that have to be anticipated as a result of force pulses acting on the optical element or as a result of accelerations of the optical element. This is indicated schematically in FIG. 1 by the amount of F RS which shows that the optical element is exposed to larger amounts of stress than in the case of a holder arrangement based on force-based contact.
  • protrusions are formed on the optical element.
  • the protrusions are formed out of the optical element itself.
  • they can also be formed by elements such as ledges, consoles or small blocks that are attached to the optical element for example by wringing or by adhesive bonding.
  • an axial force as well as a tangential force act on the optical element at each of the coupling locations.
  • the distortion-causing stress of the optical element can be reduced to a minimum.
  • An arrangement is of advantage in which the elastic elements are arranged in holder devices which partially surround the elastic elements.
  • the elastic elements are constituted by pre-tensioned compression springs.
  • the compression springs are holding the protrusions in the axial and tangential directions.
  • This arrangement can be realized advantageously with one or two compression springs arranged in the tangential direction and one or two compression springs arranged in the axial direction.
  • compression springs are pre-tensioned only far enough to enable them to absorb shock loads occurring during transportation of the optical element.
  • the compression springs are arranged in a clamping unit which receives the carrier body and holds the latter by way of a monolithically formed hinge.
  • the monolithic hinge can be realized advantageously as a bipod via two rods.
  • the protrusions of the optical element or the optical element itself such as its border area, contains notches or grooves in the axial direction, optionally in the radial and/or tangential directions for the connection with elastically resilient elements of the constraining device.
  • compression springs are received by the notches or grooves.
  • spacer elements inserted between the compression springs and the, e.g., V-shaped grooves or depressions.
  • the protrusions of the optical element are held by way of the elastic elements, specifically by way of the compression springs, in a clamp that belongs to the constraining device.
  • compression springs exerting a reduced force reduces displacements and deformations of the coupling locations caused by clamping forces and also reduces relaxation- and settling effects if an appropriately small spring constant is chosen for the springs (see FIG. 1 ).
  • the kinematic uncoupling by way of monolithic hinges reduces the number of contact locations and leads to a support arrangement that can be optimized statically and dynamically through known methods.
  • an active adjustment can be achieved by way of piezoelectric of an electromagnetic drive device.
  • the disclosure also relates to a device that comprises two arrangements, each of which includes an optical element, wherein each of the optical elements is of a design as described above.
  • the optical elements are arranged in this device with clamping elements or constraining devices that are arranged in alternatingly standing and hanging positions on a single support ring.
  • FIG. 1 represents forces that are present with a force-based connection
  • FIG. 2 shows a view from above of a clamping element with constraining device
  • FIG. 3 represents a perspective view of an arrangement with an optical element supported in a carrier body by way of three constraining devices with clamping elements;
  • FIGS. 4-8 show in a schematic manner how the optical element can be held in the arrangement.
  • FIG. 9 illustrates a fastening arrangement whereby an optical element is held via a clamp.
  • a clamping element 1 (see FIG. 2 ), also referred to as a bipod and hereinafter also called a constraining device, includes a base or carrier body 2 with a central cutout 3 and two lateral feet 4 , 5 which are supported on a support (reference 6 in FIG. 3 ) which is configured for example as a ring 6 .
  • the feet 4 , 5 are configured according to a design principle disclosed for example in EP 1 245 982 A2, which is hereby referenced in regard to the design of the feet. They include leaf-spring-like bending members 7 and/or monolithic hinges of the kind used in constraining devices disclosed in EP 1 245 982.
  • a support 13 Installed in the cutout 3 and connected to the carrier body 2 by way of holder plates 8 , 9 , 10 ( FIG. 2 ) and screws 11 , 12 is a support 13 which is acted on by three compression springs 14 , 15 , 16 to hold a protrusion 17 of an optical element, for example a lens 18 .
  • the optical element is secured in the tangential direction by way of the two compression springs 14 , 15 and in the axial direction by way of the compression spring 16 .
  • the lens 18 is held by two further constraining devices (clamping elements) 19 , 20 , wherein in each of the constraining devices the pre-tensioned compression springs 14 , 15 , 16 hold the lens 18 by the protrusion which is placed in between the springs.
  • FIG. 4 illustrates in a schematic way how a random combination of forces act on an optical element 21 with a protrusion 22 .
  • Forces F 1 and F 2 acting on the protrusion 22 are oriented, respectively, in the axial direction and in a random direction in a plane defined by a cross-section of the optical element, which is normally orthogonal to the optical axis z.
  • Forces F 3 and F 4 are acting in the axial and the tangential direction, respectively, in relation to the circular perimeter of the optical element 21 .
  • the axial forces F 1 and F 3 are taken up in this case by the constraining devices according to FIGS. 1 and 3 by way of the compression springs 16 which can have the general form of fixation elements that are elastic in the axial direction.
  • the tangential forces F 4 are received in the constraining devices according to FIG. 1 which are arranged as shown in FIG. 3 by way of the compression springs 14 and 15 .
  • These springs can analogously be substituted by elements in the general form of fixation elements that are elastic in the tangential direction.
  • each of the coupling locations can be a planar surface extending perpendicular to the respective force, so as not to split off components of the forces into directions other than axial or tangential, as would be the case if the surfaces were not oriented at right angles to the forces.
  • This arrangement has the advantage that the axial and tangential forces can be taken up directly by the fixating elements such as for example the compression springs 14 , 15 , 16 shown in FIG. 2 which are arranged in the holder device 1 in the axial and tangential directions and are designed so that each fixating element is elastically resilient in one of these directions.
  • elastically resilient elements 24 , 25 , 26 are set against the underside and a vertically oriented side of the protrusion 17 , which are configured for example as pre-tensioned spiral or diaphragm springs.
  • Rigid elements 27 , 28 are arranged at the topside which is opposite the underside.
  • the protrusion 17 has a domed end surface 29 which faces and rests against a cylindrical pin 30 .
  • the protrusion 17 is supported by force-based contact in regard to certain mechanical forces or loads.
  • This force-based support is effective in the case where the mechanical load of the optical element consists for example of a downward-directed force pulse occurring for example as a result of a jolt or shock of the kind that can happen for example during transport and assembly of a unit that includes the optical element, for example an optical component of a lithography system.
  • a force pulse or force impulse in the terminology of physics is normally defined as the time integral of a force.
  • a force pulse can generally be caused by the change of a momentum or, in other words, by a momentary acceleration, or simply due to a force occurring over a short time.
  • a downward-directed acceleration of the optical element occurring as a result of the force pulse is absorbed by the spring elements 24 and 25 , or is even prevented if the spring elements have a sufficient amount of pre-tension.
  • the amount of pre-tension is selected so that it approximately matches the maximum amounts of force that occur under the anticipated force pulses. This prevents that the protrusion 17 becomes separated or lifted off from the contact surfaces of the rigid elements 27 and 28 . If the amount of pre-tension is chosen smaller, the protrusion 17 of the optical element can under the anticipated maximal force pulses lift off momentarily from the rigid elements 27 and 28 , but will be brought back into contact with the latter via the springs 24 and 25 as the force subsides. Accordingly, the optical element will after a downward-directed force pulse (for example due to a jolt or shock) return to the desired position which is defined by the rigid elements 27 and 28 .
  • the spring 26 and the cylindrical pin 30 perform an analogous function as the springs 24 and 25 and the rigid elements 27 and 28 .
  • the spring 26 can likewise be pre-tensioned, optionally with the amount of pre-tension being selected so that it approximately matches the maximum amount of force that occurs under the anticipated force pulses. This prevents that the protrusion is separated or lifted off from the contact surface at the cylindrical pin 30 .
  • the amount of pre-tension of the spring 26 can be selected smaller than the expected maximum force from a force pulse, in which case the protrusion 17 can momentarily lift off from the contact surface of the cylindrical pin 30 .
  • the protrusion is brought back into contact with the cylindrical pin 30 via the spring 26 .
  • the optical element returns to the desired position which is defined by the cylindrical pin 30 .
  • the springs shown in FIG. 6 can in general be replaced by an elastic device. It should be mentioned for the sake of completeness that a holder arrangement of an optical element via the embodiment of a constraining device is also held by frictional contact in case of force pulses with force components oriented in the direction of the rigid element 27 , 28 and/or in the direction of the cylindrical pin 30 .
  • the holding force due to frictional contact is smaller than the holding force due to force contact.
  • the force pulse is oriented exactly in the direction of the rigid elements 27 , 28 or exactly in the direction of the cylindrical pin 30 , the optical element is held by form-fitting contact in the constraining device according to FIG. 6 via the protrusion 17 .
  • FIG. 7 there are elastically resilient spring elements arranged at the underside as well as at the two vertical sides of the protrusion 17 , in order to hold the optical element 21 .
  • This kind of an embodiment of the constraining device in which the resilient elements can generally be elastic elements which can also be under a pre-tension, is selected in cases where the force pulses are anticipated to occur in random but downward-oriented direction and if the optical element is to be held through force-based contact. If force pulses are expected in random directions including upward, the remaining rigid elements of the arrangement in FIG. 7 which act on the topside of the protrusion 17 can also be replaced by resilient or elastic elements which may also be pre-tensioned.
  • the protrusion 17 is held on two sides by elastic elements 35 , 36 and at the two other sides by rigid elements 37 , 38 .
  • at least one adjustment device 39 , 40 , 41 provided which serves to change the distance of the rigid element 37 , 38 or the length of the resilient elements 35 , 36 so that as an overall result, the spring force (under which the elements 35 , 36 are compressed against the protrusion 17 ), i.e. that the pre-tension of the resilient or elastic elements and the position of the optical element can be adjusted and changed, and that the position of the protrusion 17 can likewise be adjusted.
  • the position of the protrusion 17 can be adjusted with at least one degree of freedom independent of a pre-tension that may be present in the elastic element 35 , 36 .
  • the rigid elements 37 and 38 can also generally be replaced by elastic elements, wherein however at least one—or both—of the elastic elements are provided likewise with an adjustment device 41 in order to allow a change of position.
  • the protrusion 17 can be adjusted in regard to its position with at least one—respectively with two—degrees of freedom, with the additional possibility of setting a pre-tension of the elastic elements independently of the position of the protrusion 17 , so that the elastic elements bear against the optical element or its protrusion with a desired amount of pre-tension.
  • the optical element is held for example via three protrusions 17 or constraint locations 17 , with each constraint location being adjustable in its position with two degrees of freedom, the optical element is adjustable with a total of up to six degrees of freedom, with the possibility to set a pre-tension under which the elements 35 , 36 push against the protrusion 17 in at least one—or in all—of the constraint locations independently of the position of the respective constraint location 17 and thus independently of the position of the optical element.
  • the optical element has a protrusion 42 that is connected by way of a screw 44 which is surrounded by a compression spring 43 to a head element 45 of an isostatic (statically determinate) bearing element 46 .
  • the bearing element is supported and fastened relative to a carrier element by way of a bipod formed of two feet 47 , 48 .
  • the protrusion 42 is elastically supported in the tangential direction by way of a screw 50 that is surrounded by a compression spring 49 .
  • the bearing element 46 includes at its topside a bracket 51 which includes a leaf spring 52 .
  • the leaf spring 52 facilitates the insertion of the protrusion 42 into the space between the head element 45 and the bracket 51 .
  • a connecting piece 53 joined to the leaf spring 52 includes a monolithically incorporated hinge 54 , so that an elastic constraint of the protrusion 42 in the tangential direction is assisted by the screw 50 .
  • the connecting piece 53 can be adjusted in the tangential direction via an adjusting element 60 , whereby the position of the protrusion 42 can be adjusted in this direction.
  • the protrusion 52 can again be held with a desired amount of pre-tension or without pre-tension. This provides one degree of freedom to adjust the optical element in regard to its position and—independent of the position of the optical element with the protrusion 42 —to set a desired amount of pre-tension which bears against the protrusion 42 .
  • the constraint location 17 , 42 of an optical element 18 , 21 can thereby generally be adjusted with at least one degree of freedom in regard to the position of the constraint location, while the optical element 18 , 21 is in addition held by way of the constraint location 17 , 42 in at least one direction by way of at least one elastic element or at least one elastic spring element 14 , 15 , 16 , 49 through force-based contact, wherein a pre-tension which could be added to the holding force produced by the elastic spring element or the elastic element is adjustable independent of the position of the constraint location and thus independent of the position of the optical element.
  • the adjusting element 60 is replaced for example by a device that is equivalent to the screw 50 , or by the same kind of screw, wherein the screw is also optionally surrounded by a compression spring 49 .

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lens Barrels (AREA)
US11/959,914 2005-07-01 2007-12-19 Arrangement for mounting an optical component Abandoned US20080144199A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US11/959,914 US20080144199A1 (en) 2005-07-01 2007-12-19 Arrangement for mounting an optical component
US12/506,450 US7920344B2 (en) 2005-07-01 2009-07-21 Arrangement for mounting an optical element

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US69643205P 2005-07-01 2005-07-01
PCT/EP2006/006353 WO2007017013A2 (de) 2005-07-01 2006-06-30 Anordnung zur lagerung eines optischen bauelements
US11/959,914 US20080144199A1 (en) 2005-07-01 2007-12-19 Arrangement for mounting an optical component

Related Parent Applications (1)

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PCT/EP2006/006353 Continuation WO2007017013A2 (de) 2005-07-01 2006-06-30 Anordnung zur lagerung eines optischen bauelements

Related Child Applications (1)

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US12/506,450 Continuation US7920344B2 (en) 2005-07-01 2009-07-21 Arrangement for mounting an optical element

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US12/506,450 Expired - Fee Related US7920344B2 (en) 2005-07-01 2009-07-21 Arrangement for mounting an optical element

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US (2) US20080144199A1 (ja)
EP (1) EP1899756A2 (ja)
JP (1) JP4934131B2 (ja)
WO (1) WO2007017013A2 (ja)

Cited By (6)

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US20100201964A1 (en) * 2007-10-01 2010-08-12 Carl Zeiss Smt Ag Projection objective for microlithography
US20110279802A1 (en) * 2010-05-12 2011-11-17 Carl Zeiss Smt Gmbh Device for an optical arrangement and method for positioning an optical element of an optical arrangement
CN102549468A (zh) * 2009-07-31 2012-07-04 卡尔蔡司激光器材有限责任公司 光学元件的保持布置
US20130182344A1 (en) * 2010-09-29 2013-07-18 Carl Zeiss Smt Gmbh Systems for aligning an optical element and method for same
US20140285880A1 (en) * 2013-03-19 2014-09-25 Goodrich Corporation High correctability deformable mirror
US11056803B2 (en) * 2017-09-12 2021-07-06 Lumentum Operations Llc Spring clamp for optics

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WO2009024192A1 (en) * 2007-08-23 2009-02-26 Carl Zeiss Smt Ag Optical element module with minimized parasitic loads
DE102007063305A1 (de) * 2007-12-27 2009-07-02 Carl Zeiss Smt Ag Optische Einrichtung mit einer Federeinrichtung mit einem Bereich konstanter Federkraft
US8036502B2 (en) * 2008-04-17 2011-10-11 Jds Uniphase Corporation Stress free mounting of optical bench for WSS
DE102008036574A1 (de) * 2008-07-31 2010-02-04 Carl Zeiss Laser Optics Gmbh Vorrichtung zum Lagern eines optischen Elements
DE102009037135B4 (de) 2009-07-31 2013-07-04 Carl Zeiss Laser Optics Gmbh Haltevorrichtung für ein optisches Element
JP5848470B2 (ja) * 2015-02-05 2016-01-27 カール・ツァイス・エスエムティー・ゲーエムベーハー 寄生負荷最小化光学素子モジュール
DE102021200131A1 (de) 2021-01-11 2022-07-14 Carl Zeiss Smt Gmbh Baugruppe mit einem Entkopplungsgelenk zur mechanischen Lagerung eines Elements

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US20100201964A1 (en) * 2007-10-01 2010-08-12 Carl Zeiss Smt Ag Projection objective for microlithography
US8553202B2 (en) 2007-10-01 2013-10-08 Carl Zeiss Smt Gmbh Projection objective for microlithography
CN102549468A (zh) * 2009-07-31 2012-07-04 卡尔蔡司激光器材有限责任公司 光学元件的保持布置
US20110279802A1 (en) * 2010-05-12 2011-11-17 Carl Zeiss Smt Gmbh Device for an optical arrangement and method for positioning an optical element of an optical arrangement
US8665419B2 (en) * 2010-05-12 2014-03-04 Carl Zeiss Smt Gmbh Device for an optical arrangement and method for positioning an optical element of an optical arrangement
US20130182344A1 (en) * 2010-09-29 2013-07-18 Carl Zeiss Smt Gmbh Systems for aligning an optical element and method for same
US9274256B2 (en) * 2010-09-29 2016-03-01 Carl Zeiss Smt Gmbh Systems for aligning an optical element and method for same
US20140285880A1 (en) * 2013-03-19 2014-09-25 Goodrich Corporation High correctability deformable mirror
US9314980B2 (en) * 2013-03-19 2016-04-19 Goodrich Corporation High correctability deformable mirror
US11056803B2 (en) * 2017-09-12 2021-07-06 Lumentum Operations Llc Spring clamp for optics

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JP4934131B2 (ja) 2012-05-16
JP2008545152A (ja) 2008-12-11
WO2007017013A2 (de) 2007-02-15
US20090284849A1 (en) 2009-11-19
EP1899756A2 (de) 2008-03-19
WO2007017013A3 (de) 2008-05-02
US7920344B2 (en) 2011-04-05

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