US20080119113A1 - Method for machining surfaces - Google Patents
Method for machining surfaces Download PDFInfo
- Publication number
- US20080119113A1 US20080119113A1 US11/931,552 US93155207A US2008119113A1 US 20080119113 A1 US20080119113 A1 US 20080119113A1 US 93155207 A US93155207 A US 93155207A US 2008119113 A1 US2008119113 A1 US 2008119113A1
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- United States
- Prior art keywords
- tool
- machined
- liquid
- machining
- gap
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/116—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using plastically deformable grinding compound, moved relatively to the workpiece under the influence of pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
Definitions
- the invention relates to a method for abrasive machining of surfaces of components, particularly optical components or work pieces.
- abrasively machining surfaces as is necessary for example for the manufacture of optical components such as lenses, prisms, plane parallel plates etc, but also of molds for casting or molding optical components.
- a surface to be machined is first subjected to a grinding operation, and possibly also to a fine grinding operation using contacting tools such as, for example, disk-wheel grinders, spherical grinders etc., and subsequently to a polishing operation using a polishing tool.
- contacting tools such as, for example, disk-wheel grinders, spherical grinders etc.
- polishing operation using a polishing tool.
- Most machining operations in which relatively much material is removed require a final polishing of the surface, at least when optical surfaces are to be produced.
- the polishing of spherical surfaces is performed in prior art on a large surface using a polishing disk.
- the invention is based on the object of providing a device for abrasive machining of surfaces, and particularly for grinding and/or polishing of surfaces of optical components, which permits fast machining of the surface irrespective of the shape of the particular surface being machined.
- a supply unit conveys a liquid in which abrasive agents are dissolved to the fluid inlet. This liquid flows through the tool to an outlet from which it emerges from the tool.
- this tool is positioned by a positioning means in such manner relative to the surface to be machined that the outlet from which the liquid emerges faces the surface to be machined, in particular with a small intervening space.
- the area of the annular gap defined between the boundary walls of the outlet and the surface to be machined be smaller than the cross-sectional area of the inlet.
- the liquid in which abrasive agents are dissolved emerges from the annular gap along the radial direction of the tool under a pressure which is substantially higher than the pressure under which it flows into the inlet.
- the machining of the surface of the work piece is performed by the liquid flowing out in the radial direction.
- the surface in the region of the annular gap is thus machined so as to be linearly ground or polished in accordance with the kind of abrasive agents dissolved in the liquid. Because of the linear working, the machining time is shortened by some orders of magnitude when compared with that of known methods or devices in which there is a substantially point-shaped engagement between the tool and the work piece.
- the ratio of the pressure under which the liquid flows into the tool to the pressure under which the liquid emerges from the annular gap is inversely proportional to the ratio of the cross-sectional area of the inlet to the cross-sectional area of the formed annular gap.
- the “processing pressure” can be set by the positioning of the tool relative to the work piece—in other words, by an adjustment of the height of the annular gap—without the pressure under which the supply unit conveys the liquid having to be changed.
- the supply unit can convey the liquid at a pressure of less than 20 bar, preferably less than 5 bar, and possibly even at only atmospheric pressure.
- the cross-sectional area of the inlet it is preferred for the cross-sectional area of the inlet to be greater than the cross-sectional area of the formed annular gap by a factor of at least 5. With this it is furthermore preferred for the height of the formed annular gap to be smaller than 3 mm and, in particular, about 1 mm.
- the positioning means prefferably have a control unit for controlling the positioning of the tool according to the surface data of the surface to be produced.
- the positioning of the tool it is preferred for the positioning of the tool to be so effected that the height of the annular gap remains constant during a shift along respective tracks.
- the positioning device can shift the tool relative to the work piece, i.e. to the surface to be machined, along any tracks.
- the track may be a meandering track, with either the tool or the work piece or both being moved.
- the tool and the component of which a surface is to be machined can be simultaneously shifted.
- the outlet In order to effect a homogeneous machining of the surface along the annular gap it is furthermore preferred for the outlet to have a circular cross-section, and for the tool to have an outside contour in the shape of a (regular) cylinder at least in the region of the outlet.
- a machining of the surface occurring only linearly (or circularly) in the region of the annular gap, and not also at the center of the outlet, is achieved by the cross-sectional area of the inlet being smaller than that of the outlet.
- the size of the tool to be conformed to the shape of the surface to be machined:
- FIG. 1 is a device according to the invention, used in machining a plane surface
- FIG. 2 is a device according to the invention, used in machining a curved surface, and particularly an aspherical surface;
- FIG. 3 is an isometric view of the device of the present invention.
- FIG. 1 illustrates a device according to the invention, of which only a tool 1 is shown, used in machining a plane surface 21 of a work piece 2 which, without limitation of the generality, is a plane parallel plate.
- the tool 1 has an inlet 11 , and an outlet 12 having a cross-sectional area which is greater than that of the inlet 11 .
- a not shown supply unit conveys a liquid in which abrasive agents such as grinding agents or polishing agents are dissolved into the inlet 11 of the tool 1 .
- the tool 1 is positioned by a not shown positioning unit in such manner relative to the work piece 2 that between the boundary walls 13 of the outlet 12 and the surface 21 an annular gap 3 is formed, the cross-sectional area of which is smaller and preferably substantially smaller than the cross-sectional area of the inlet 11 .
- the pressure with which the liquid emerges from the annular gap 3 is increased in the ratio of the cross-sectional areas of the inlet 11 and the annular gap 3 .
- the pressure which is effective for the machining of the work piece surface 21 is thus substantially greater than the delivery pressure.
- the outer diameter of the tool in the region of the outlet may be of the order of magnitude of one half of the aperture of an optical component, so that a very fast machining of the surface is achieved with the greatest possible homogeneity of the machining operation.
- the outer diameter of the tool is preferably of the order of magnitude of the smallest radius (smallest principal radius of curvature) of the surface; hereby it is ensured that the height of the annular gap is practically constant along the entire formed annular gap.
- the device of the invention can be used for machining any surfaces of components or work pieces which in principle may be of any material.
- the device of the invention can be used for machining steel turbine blades.
- the work pieces concerned may be of quartz, optical glass or synthetic material; if molds are to be produced for the casting and/or molding etc. of optical components, the work pieces may also be of a metal such as steel or a ceramic material.
- abrasion depends substantially not on the design of the tool, but on the kind of liquid or abrasive agent(s) dissolved in the liquid used, one and the same device may be used successively for grinding, possibly fine grinding, and finally for polishing a component or work piece in one and the same mount.
- a change between the individual kinds of machining then necessitates merely a replacement or exchange of the working fluids used in each case.
- the device of the invention it is especially preferred for the device of the invention to used for machining aspherical surfaces.
- the not shown positioning means shifts the tool 1 parallel to the surface of the work piece 2
- an also not shown rotary unit rotates the work piece 2 about an axis 22 , so that the line-shaped engagement along the annular gap 3 is shifted across the work piece 2 in such manner that the entire surface 21 is uniformly machined, for example polished.
- the diameter of the tool 1 is of the order of magnitude of the radius of the work piece 2 .
- FIG. 2 shows a device in accordance with the invention during a machining of a curved, in particular aspherical surface 21 ′ of a work piece 2 .
- the same parts are provided with the same reference signs, so that their renewed introduction can be dispensed with.
- the diameter of the tool 1 is of the order of magnitude of the smallest radius of the aspherical surface 21 ′.
- the positioning unit also not shown, shifts the tool 1 along tracks passing through the apex of the surface 21 ′. At the same time the work piece 2 is rotated around an axis 22 of rotation passing through the apex.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
A method for abrasive machining of surfaces of components is provided. The method is effectuated by the device including a tool (1) having an inlet (11) and an outlet (12); a supply unit for conveying to the inlet (11) a liquid in which abrasive agents are dissolved and which emerges from the outlet (12); and a positioning means which guides the tool across a surface to be machined and simultaneously positions the tool in such manner that the outlet faces the surface to be machined, an area of an annular gap (3) defined by boundary walls (13) of the outlet (12) and the surface (2) to be machined being smaller than a cross-sectional area of the inlet (11).
Description
- This application is a divisional of U.S. Ser. No. 10/527,468, filed Dec. 22, 2005.
- The invention relates to a method for abrasive machining of surfaces of components, particularly optical components or work pieces.
- Various methods and devices are known for abrasively machining surfaces, as is necessary for example for the manufacture of optical components such as lenses, prisms, plane parallel plates etc, but also of molds for casting or molding optical components. With many of the known methods or devices a surface to be machined is first subjected to a grinding operation, and possibly also to a fine grinding operation using contacting tools such as, for example, disk-wheel grinders, spherical grinders etc., and subsequently to a polishing operation using a polishing tool. Instead of applying grinding operations it is also known to subject the surfaces to turning using a suitable lathe chisel on a lathe, or to apply another machining-down method. Most machining operations in which relatively much material is removed require a final polishing of the surface, at least when optical surfaces are to be produced. The polishing of spherical surfaces is performed in prior art on a large surface using a polishing disk.
- Problems always arise with conventional methods and devices when aspherical surfaces are to be produced. The manufacture of aspherical surfaces is accomplished according to prior art with tools such as spherical grinders which engage the surface to be machined in a more or less point-wise manner and are guided along a track across the surface to be machined. In this, according to the design of the tool, the surface is either ground or polished. However, for reasons of time and cost, aspherical surfaces are frequently only ground along a track; the polishing is then effected not along a track but on a large surface. Particularly when the asphericity is comparatively large, as is the case for example with progressive spectacle lenses, the surface polishing leads to a more or less large polishing error which must be compensated by means of suitable fabrication corrections during preceding processing operations.
- Furthermore, it is known to treat surfaces of work pieces and particularly optical components with jets of fluid. However, the devices proposed for this require a relatively large outlay, yet do not permit of any fast manufacture of the surfaces because of the more or less point-shaped working of the surfaces.
- The invention is based on the object of providing a device for abrasive machining of surfaces, and particularly for grinding and/or polishing of surfaces of optical components, which permits fast machining of the surface irrespective of the shape of the particular surface being machined.
- An achievement of the object in accordance with the invention is set out in
patent claim 1. Further developments of the invention are the subject matter ofclaims 2 to 17. - In accordance with the invention, the device for abrasive machining of surfaces, and particularly for grinding and/or polishing optical components comprises a tool having a fluid inlet and a fluid outlet. A supply unit conveys a liquid in which abrasive agents are dissolved to the fluid inlet. This liquid flows through the tool to an outlet from which it emerges from the tool. According to the invention, this tool is positioned by a positioning means in such manner relative to the surface to be machined that the outlet from which the liquid emerges faces the surface to be machined, in particular with a small intervening space. Here it is important that the area of the annular gap defined between the boundary walls of the outlet and the surface to be machined be smaller than the cross-sectional area of the inlet. Because of this, the liquid in which abrasive agents are dissolved emerges from the annular gap along the radial direction of the tool under a pressure which is substantially higher than the pressure under which it flows into the inlet. The machining of the surface of the work piece is performed by the liquid flowing out in the radial direction. The surface in the region of the annular gap is thus machined so as to be linearly ground or polished in accordance with the kind of abrasive agents dissolved in the liquid. Because of the linear working, the machining time is shortened by some orders of magnitude when compared with that of known methods or devices in which there is a substantially point-shaped engagement between the tool and the work piece.
- In this, the ratio of the pressure under which the liquid flows into the tool to the pressure under which the liquid emerges from the annular gap is inversely proportional to the ratio of the cross-sectional area of the inlet to the cross-sectional area of the formed annular gap. This means that the “processing pressure” can be set by the positioning of the tool relative to the work piece—in other words, by an adjustment of the height of the annular gap—without the pressure under which the supply unit conveys the liquid having to be changed.
- With this it is a special advantage of the invention that comparatively low pressures may be used on the inlet side: in particular, the supply unit can convey the liquid at a pressure of less than 20 bar, preferably less than 5 bar, and possibly even at only atmospheric pressure. In order that a pressure increase which is of advantage for the processing operation and the processing speed may be achieved, it is preferred for the cross-sectional area of the inlet to be greater than the cross-sectional area of the formed annular gap by a factor of at least 5. With this it is furthermore preferred for the height of the formed annular gap to be smaller than 3 mm and, in particular, about 1 mm.
- In any case, it is of advantage for the positioning means to have a control unit for controlling the positioning of the tool according to the surface data of the surface to be produced. In this, it is preferred for the positioning of the tool to be so effected that the height of the annular gap remains constant during a shift along respective tracks.
- In principle, the positioning device can shift the tool relative to the work piece, i.e. to the surface to be machined, along any tracks. For example, the track may be a meandering track, with either the tool or the work piece or both being moved.
- Furthermore, the tool and the component of which a surface is to be machined can be simultaneously shifted. In the case of rotationally symmetrical surfaces, or surfaces deviating only slightly from rotational symmetry, it is preferred for the tool to be moved along tracks which extend through the surface apex, and simultaneously for the work piece or the component being machined to be rotated by a rotary unit around an axis which, in particular, is the rotational axis of the surface to be produced.
- In order to effect a homogeneous machining of the surface along the annular gap it is furthermore preferred for the outlet to have a circular cross-section, and for the tool to have an outside contour in the shape of a (regular) cylinder at least in the region of the outlet.
- In a further preferred development of the invention, a machining of the surface occurring only linearly (or circularly) in the region of the annular gap, and not also at the center of the outlet, is achieved by the cross-sectional area of the inlet being smaller than that of the outlet.
- Furthermore, it is preferred for the size of the tool to be conformed to the shape of the surface to be machined:
- In the following the invention will be described by way of example without limitation of the general inventive concept, with the aid of embodiments with reference to the drawings to which attention is expressly drawn concerning the disclosure of all details of the invention not described more explicitly in the text. Shown by:
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FIG. 1 is a device according to the invention, used in machining a plane surface; -
FIG. 2 is a device according to the invention, used in machining a curved surface, and particularly an aspherical surface; and -
FIG. 3 is an isometric view of the device of the present invention. -
FIG. 1 illustrates a device according to the invention, of which only atool 1 is shown, used in machining aplane surface 21 of awork piece 2 which, without limitation of the generality, is a plane parallel plate. Thetool 1 has aninlet 11, and anoutlet 12 having a cross-sectional area which is greater than that of theinlet 11. A not shown supply unit conveys a liquid in which abrasive agents such as grinding agents or polishing agents are dissolved into theinlet 11 of thetool 1. Thetool 1 is positioned by a not shown positioning unit in such manner relative to thework piece 2 that between theboundary walls 13 of theoutlet 12 and thesurface 21 anannular gap 3 is formed, the cross-sectional area of which is smaller and preferably substantially smaller than the cross-sectional area of theinlet 11. Hereby the pressure with which the liquid emerges from theannular gap 3 is increased in the ratio of the cross-sectional areas of theinlet 11 and theannular gap 3. The pressure which is effective for the machining of thework piece surface 21 is thus substantially greater than the delivery pressure. - For a machining of plane surfaces the outer diameter of the tool in the region of the outlet may be of the order of magnitude of one half of the aperture of an optical component, so that a very fast machining of the surface is achieved with the greatest possible homogeneity of the machining operation. For a machining of curved surfaces, the outer diameter of the tool is preferably of the order of magnitude of the smallest radius (smallest principal radius of curvature) of the surface; hereby it is ensured that the height of the annular gap is practically constant along the entire formed annular gap.
- The device of the invention can be used for machining any surfaces of components or work pieces which in principle may be of any material. For example, because of the high working speed, the device of the invention can be used for machining steel turbine blades.
- Particularly preferred, however, is the use of a device of the invention for grinding and/or polishing optical surfaces. In the case of lenses, prisms, plane parallel plates etc.—i.e. directly manufactured optical components—the work pieces concerned may be of quartz, optical glass or synthetic material; if molds are to be produced for the casting and/or molding etc. of optical components, the work pieces may also be of a metal such as steel or a ceramic material.
- Because the kind of abrasion depends substantially not on the design of the tool, but on the kind of liquid or abrasive agent(s) dissolved in the liquid used, one and the same device may be used successively for grinding, possibly fine grinding, and finally for polishing a component or work piece in one and the same mount. A change between the individual kinds of machining then necessitates merely a replacement or exchange of the working fluids used in each case.
- In every case, however, it is especially preferred for the device of the invention to used for machining aspherical surfaces. The not shown positioning means shifts the
tool 1 parallel to the surface of thework piece 2, whilst an also not shown rotary unit rotates thework piece 2 about anaxis 22, so that the line-shaped engagement along theannular gap 3 is shifted across thework piece 2 in such manner that theentire surface 21 is uniformly machined, for example polished. - The diameter of the
tool 1 is of the order of magnitude of the radius of thework piece 2.FIG. 2 shows a device in accordance with the invention during a machining of a curved, in particularaspherical surface 21′ of awork piece 2. The same parts are provided with the same reference signs, so that their renewed introduction can be dispensed with. The diameter of thetool 1 is of the order of magnitude of the smallest radius of theaspherical surface 21′. The positioning unit, also not shown, shifts thetool 1 along tracks passing through the apex of thesurface 21′. At the same time thework piece 2 is rotated around anaxis 22 of rotation passing through the apex. - In the foregoing the invention has been described with the aid of examples of embodiment without limitation of the general inventive concept.
Claims (17)
1. A method for machining surfaces with a tool having a fluid inlet and a fluid outlet having boundary walls, the method comprising the steps of:
conveying a liquid with abrasives agents to the fluid inlet by means of a supply unit having a supply pressure;
allowing the liquid to flow through the tool to the fluid outlet from which the liquid emerges from the tool;
positioning the tool such that the fluid outlet from which the liquid emerges faces the surface to be machined and such that the area of an annular gap defined between the boundary walls and the surface to be machined is smaller than a cross sectional area of the fluid inlet;
allowing the liquid to emerge from the annual gap along a radial direction thereby machining the surface in accordance with the kind of abrasive agents in the liquid; and
changing the processing pressure under which the liquid machines the surface by adjusting the height of the annular gap without changing the supply pressure.
2. The method according to claim 1 , wherein the supply pressure is less than 20 bar.
3. The method according to claim 1 , wherein the supply pressure is less than 5 bar.
4. The method according to claim 1 , wherein the cross sectional area of the inlet is greater than the cross sectional area of said gap by a factor of at least 5.
5. The method according to claim 1 , wherein a height of said gap is smaller than 3 millimeters.
6. The method according to claim 1 , wherein a height of said gap is approximately 1 millimeter.
7. The method according to claim 1 , comprising the further step of rotating a compound to be machined around an axis by means of a rotary unit.
8. The method according to claim 1 , comprising the further step of guiding said tool across a surface to be machined by means of a positioning means.
9. The method according to claim 1 , comprising the further step of conforming an outer diameter of the tool in a region of the fluid outlet to one half of an aperture of an optical component for machining plane surfaces.
10. The method according to claim 1 , comprising the further step of conforming an outer diameter of said tool to a smallest radius of the surface for machining curved surfaces.
11. The method according to claim 1 , comprising the further step of controlling the positioning of the tool according to surface data of the surface to be machined.
12. The method according to claim 1 , wherein the height of said gap is kept constant during a shift along respective tracks.
13. The method according to claim 1 , wherein said tool and a component of which the surface is to be machined are simultaneously shifted.
14. The method according to claim 13 , wherein in the case of rotationally symmetrical surfaces, said tool is moved along tracks extending through a surface apex and said component is rotated around an axis by a rotary unit.
15. The method according to claim 1 , wherein the surface is an optical surface and wherein the method further comprises the additional step of polishing the optical surface.
16. The method according to claim 1 , wherein the surface is an optical surface and wherein the method further comprises the additional step of grinding the optical surface.
17. The method according to claim 1 , wherein the liquid may grind, fine grind and polish the surface to be machined and wherein a change between the grinding, fine grinding and polishing of the surface to be machined is made by changing the liquid.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US11/931,552 US20080119113A1 (en) | 2001-03-20 | 2007-10-31 | Method for machining surfaces |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
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DE10113599.8 | 2001-03-20 | ||
DE10113599A DE10113599A1 (en) | 2001-03-20 | 2001-03-20 | Device for the abrasive processing of surfaces of optical elements |
PCT/EP2002/003120 WO2002074489A1 (en) | 2001-03-20 | 2002-03-20 | Device for the abrasive machining of surfaces of elements and in particular optical elements or workpieces |
US10/527,468 US20060141911A1 (en) | 2001-03-20 | 2002-03-20 | Device for the abrasive machining of surfaces of elements and in particular optical elements or workpieces |
EPPCT/EP02/03120 | 2002-03-20 | ||
US11/931,552 US20080119113A1 (en) | 2001-03-20 | 2007-10-31 | Method for machining surfaces |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US10/527,468 Division US20060141911A1 (en) | 2001-03-20 | 2002-03-20 | Device for the abrasive machining of surfaces of elements and in particular optical elements or workpieces |
Publications (1)
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US20080119113A1 true US20080119113A1 (en) | 2008-05-22 |
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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US10/527,468 Abandoned US20060141911A1 (en) | 2001-03-20 | 2002-03-20 | Device for the abrasive machining of surfaces of elements and in particular optical elements or workpieces |
US11/931,552 Abandoned US20080119113A1 (en) | 2001-03-20 | 2007-10-31 | Method for machining surfaces |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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US10/527,468 Abandoned US20060141911A1 (en) | 2001-03-20 | 2002-03-20 | Device for the abrasive machining of surfaces of elements and in particular optical elements or workpieces |
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Country | Link |
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US (2) | US20060141911A1 (en) |
EP (1) | EP1409199B1 (en) |
DE (2) | DE10113599A1 (en) |
WO (1) | WO2002074489A1 (en) |
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NL1022293C2 (en) * | 2002-12-31 | 2004-07-15 | Tno | Device and method for manufacturing or processing optical elements and / or optical form elements, as well as such elements. |
DE10314625B3 (en) * | 2003-04-01 | 2004-10-14 | Optotech Optikmaschinen Gmbh | Process for post-processing precision surfaces on random workpieces comprises using a rotating polishing tool for fine grinding an polishing having a polishing element which is longitudinally guided in a guiding chamber of a housing |
MXPA03006434A (en) * | 2003-07-18 | 2005-01-21 | Univ Mexico Nacional Autonoma | Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces. |
WO2005063441A1 (en) * | 2003-12-23 | 2005-07-14 | C. Hilzinger-Thum | Method and device for surface control |
NL1026526C2 (en) * | 2004-06-30 | 2005-05-31 | Tno | Optical element forming or working apparatus, has at least one measuring device which operates to measure changes in form of surface being worked when roughness are formed on the surface |
ATE411138T1 (en) * | 2004-07-22 | 2008-10-15 | Fisba Optik Ag | APPARATUS AND METHOD FOR GRINDING AND/OR POLISHING SURFACES |
ATE411139T1 (en) * | 2004-07-22 | 2008-10-15 | Fisba Optik Ag | METHOD FOR GRINDING AND/OR POLISHING SURFACES |
EP1977860B1 (en) * | 2007-04-04 | 2010-12-15 | Fisba Optik Ag | Device and method for manufacturing optical elements |
DE102009033206A1 (en) | 2009-07-15 | 2011-01-27 | Brand, Guido | Polishing method and polishing apparatus for correcting geometric deviation errors on precision surfaces |
CN102284911B (en) * | 2011-07-22 | 2013-01-02 | 中国科学院长春光学精密机械与物理研究所 | Long-range polishing stable-clearance device |
CN103128671B (en) * | 2013-02-05 | 2015-04-29 | 浙江工业大学 | Restraining abrasive particle flow polishing device of hard and brittle material complex curve part |
CN103128673B (en) * | 2013-02-05 | 2015-04-29 | 浙江工业大学 | Restraining abrasive particle flow polishing tool head of hard and brittle materials |
CN103128672B (en) * | 2013-02-05 | 2015-02-18 | 浙江工业大学 | Constraint abrasive flow polishing tool head |
CN105234825A (en) * | 2015-09-25 | 2016-01-13 | 安庆市凯立金刚石科技有限公司 | Jet polishing device used for diamond film |
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- 2002-03-20 EP EP02716837A patent/EP1409199B1/en not_active Expired - Lifetime
- 2002-03-20 US US10/527,468 patent/US20060141911A1/en not_active Abandoned
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US20100322783A1 (en) * | 2009-06-17 | 2010-12-23 | Nebb Technology As | Rotor or stator blade and method for forming such rotor or stator blade |
Also Published As
Publication number | Publication date |
---|---|
DE10113599A1 (en) | 2002-10-02 |
US20060141911A1 (en) | 2006-06-29 |
DE50208850D1 (en) | 2007-01-11 |
EP1409199B1 (en) | 2006-11-29 |
WO2002074489A1 (en) | 2002-09-26 |
EP1409199A1 (en) | 2004-04-21 |
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