US20050280039A1 - Organic electroluminescence display panel - Google Patents
Organic electroluminescence display panel Download PDFInfo
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- US20050280039A1 US20050280039A1 US11/204,042 US20404205A US2005280039A1 US 20050280039 A1 US20050280039 A1 US 20050280039A1 US 20404205 A US20404205 A US 20404205A US 2005280039 A1 US2005280039 A1 US 2005280039A1
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- 238000005401 electroluminescence Methods 0.000 title claims abstract description 54
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 238000005192 partition Methods 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 8
- 239000000049 pigment Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 18
- 229920005591 polysilicon Polymers 0.000 abstract description 18
- 239000010410 layer Substances 0.000 description 82
- 239000010408 film Substances 0.000 description 28
- 239000011229 interlayer Substances 0.000 description 24
- 239000012535 impurity Substances 0.000 description 19
- 238000003860 storage Methods 0.000 description 15
- 230000000903 blocking effect Effects 0.000 description 13
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 230000000149 penetrating effect Effects 0.000 description 9
- 239000011159 matrix material Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- -1 region Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
-
- H01L27/124—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/302—Details of OLEDs of OLED structures
- H10K2102/3023—Direction of light emission
- H10K2102/3026—Top emission
Definitions
- the present invention relates to an organic electroluminescence display panel.
- an organic electro-luminescence (EL) display is a self emissive display device, which displays images by exciting an emissive organic material to emit light.
- the organic EL display includes an anode (hole injection electrode), a cathode (electron injection electrode), and an organic light emission layer interposed therebetween. When the holes and the electrons are injected into the light emission layer, they are recombined and pair annihilated with emitting light.
- the light emission layer further includes an electron transport layer (ETL) and a hole transport layer (HTL) as well as an electron injecting layer (EIL) and a hole injecting layer (HIL) for enhancing the light emission.
- ETL electron transport layer
- HTL hole transport layer
- EIL electron injecting layer
- HIL hole injecting layer
- a plurality of pixels of the organic EL display are arranged in a matrix and driven in passive matrix (or simple matrix) addressing or active matrix addressing.
- the passive matrix type organic EL display includes a plurality of anode lines, a plurality of cathode lines intersecting the anode lines, and a plurality of pixels, each including a light emission layer.
- the selection of one of the anode lines and one of the cathode lines cause light emission of a pixel located at the intersection of the selected signal lines.
- the active matrix type organic EL display includes a plurality of pixels, each including a switching transistor, a driving transistor, and a storage capacitor as well as an anode, a cathode, and a light emission layer.
- the EL display further includes a plurality of gate lines transmitting gate signals and a plurality of data lines transmitting data voltages.
- the switching transistor is connected to one of the gate lines and one of the data lines and transmits the data voltage from the data line in response to the gate signal.
- the driving transistor receives the data voltage from the switching transistor and drives a current having a magnitude determined depending on the difference between the data voltage and a predetermined voltage such as a supply voltage.
- the current from the driving transistor enters the light emission layer to cause light emission having an intensity depending on the current.
- the storage capacitor is connected between the data voltage and the supply voltage to maintain their voltage difference.
- the gray scaling of the active matrix type EL display is accomplished by controlling the data voltages to adjust the current driven by the driving transistor.
- the color representation of the EL display is obtained by providing red, green and blue light emission layers.
- the decrease of the supply voltage reduces the current driven by the driving transistors such that the displayed image is darker than is expected.
- the data voltages with higher magnitude for displaying higher grays experience higher voltage drop such that the reduction of the currents driven by the driving transistors is much severer.
- the smaller currents makes the pixels associated therewith emit darker lights, thereby generating cross-talk, which becomes severer as the number of the pixels expected to emit bright lights is increased.
- a motivation of the present invention is to solve the above-described problems.
- an organic electro-luminescence display panel which includes: an insulating substrate; a polysilicon layer formed on the substrate; a first insulating layer formed on the polysilicon layer; a gate wire formed on the first insulating layer; a second insulating layer formed on the gate wire; a data wire formed on the second insulating layer and including first and second portions; a pixel electrode connected to the first portion of the data wire; a partition defining an area on the pixel electrode; an organic light emitting member formed in the area on the pixel electrode; a common electrode formed on the light emitting member; and a planar supply voltage electrode disposed between the pixel electrode and the substrate and connected to the second portion of the data wire.
- the supply voltage electrode may be disposed directly on the substrate.
- the organic electro-luminescence display panel may further include a blocking layer formed on the substrate.
- the blocking layer may have an opening exposing a portion of the supply voltage electrode
- the first and the second insulating layers may have a contact hole exposing the exposed portion of the supply voltage electrode through the opening
- the second portion of the data wire may be connected to the supply voltage electrode through the opening and the contact hole.
- the opening may be larger than the contact hole.
- the polysilicon layer may include first and second transistor portions, each including a channel region, a source region, and a drain region
- the gate wire may include first and second gate electrodes overlapping the first and the second transistor portions, respectively
- the data wire may include a first source electrode connected to the source region of the first transistor portion, a first drain electrode connected to the drain region the first transistor portion and the second gate electrode, a second source electrode connected to the source region of the second transistor portion and the supply voltage electrode, and a second drain electrode connected to the drain region of the second transistor portion and the pixel electrode.
- the polysilicon layer may further include a storage electrode region connected to the source region of the second transistor portion and the gate wire further comprises a storage electrode overlapping the storage electrode region and connected to the second gate electrode.
- the pixel electrode may be formed of the same layer or the same material as the data wire.
- the organic electro-luminescence display panel may further include an auxiliary electrode connected between the supply voltage electrode and the second source electrode.
- the auxiliary electrode may include the same layer as the gate wire.
- the partition preferably includes black photoresist.
- the pixel electrode may be opaque and the common electrode may be transparent.
- the pixel electrode is transparent and the common electrode is opaque.
- the supply voltage electrode preferably has a transmitting portion facing the light emitting member for transmitting light from the light emitting member.
- the supply voltage electrode preferably has an opening facing at least a portion of the polysilicon layer.
- FIG. 1 is a layout view of an organic EL display panel according to an embodiment of the present invention
- FIG. 2 is a sectional view of the organic EL display panel shown in FIG. 1 taken along the line II-II′;
- FIG. 3 is a sectional view of the organic EL display panel shown in FIG. 1 taken along the line III-III′;
- FIG. 4A is a layout view of the organic EL display panel shown in FIGS. 1-3 in a first step of a manufacturing method thereof according to an embodiment of the present invention
- FIGS. 4B and 4C are sectional views of the organic EL display panel shown in FIG. 4A taken along the lines IVB-IVB′ and IVC-IVC′, respectively;
- FIG. 5A is a layout view of the organic EL display panel shown in FIGS. 1-3 in a step following the step shown in FIGS. 4A-4C ;
- FIGS. 5B and 5C sectional views of the organic EL display panel shown in FIG. 5A taken along the lines VB-VB′ and VC-VC′, respectively;
- FIG. 6A is a layout view of the organic EL display panel shown in FIGS. 1-3 in a step following the step shown in FIGS. 5A-5C ;
- FIGS. 6B and 6C are sectional views of the organic EL display panel shown in FIG. 6A taken along the lines VIB-VIB′ and VIC-VIC′, respectively;
- FIG. 7A is a layout view of the organic EL display panel shown in FIGS. 1-3 in a step following the step shown in FIGS. 6A-6C ;
- FIGS. 7B and 7C are sectional views of the organic EL display panel shown in FIG. 7A taken along the lines VIIB-VIIB′ and VIIC-VIIC′, respectively;
- FIG. 8A is a layout view of the organic EL display panel shown in FIGS. 1-3 in a step following the step shown in FIGS. 7A-7C ;
- FIGS. 8B and 8C sectional views of the organic EL display panel shown in FIG. 8A taken along the lines VIIIB-VIIIB′ and VIIIC-VIIIC′, respectively;
- FIG. 9A is a layout view of the organic EL display panel shown in FIGS. 1-3 in a step following the step shown in FIGS. 8A-8C ;
- FIGS. 9B and 9C are sectional views of the organic EL display panel shown in FIG. 9A taken along the lines IXB-IXB′ and IXC-IXC′, respectively;
- FIG. 10A is a layout view of the organic EL display panel shown in FIGS. 1-3 in a step following the step shown in FIGS. 9A-9C ;
- FIGS. 10B and 10C are sectional views of the organic EL display panel shown in FIG. 10A taken along the lines XB-XB′ and XC-XC′, respectively;
- FIG. 11 is a layout view of a bottom emission type organic EL display panel according to an embodiment of the present invention.
- FIG. 12 is an exemplary sectional view of the display panel shown in FIG. 11 taken along the line XII-XII′;
- FIG. 13 is an exemplary sectional view of the display panel shown in FIG. 11 taken along the line XIII-XIII′;
- FIG. 14 is another exemplary sectional view of the display panel shown in FIG. 11 taken along the line XIII-XIII′;
- FIG. 15 is another exemplary sectional view of the display panel shown in FIG. 11 taken along the line XIII-XIII′.
- FIG. 1 is a layout view of an organic EL display panel according to an embodiment of the present invention
- FIG. 2 is a sectional view of the organic EL display panel shown in FIG. 1 taken along the line II-II′
- FIG. 3 is a sectional view of the organic EL display panel shown in FIG. 1 taken along the line III-III′.
- a supply voltage electrode 112 supplied with a predetermined voltage such as a supply voltage is formed on an insulating substrate 10 preferably made of transparent glass or silicon wafer.
- the supply voltage electrode 112 is preferably made of a conductive material having low resistivity such as Al, Al alloy, Ag, or Ag alloy and it substantially covers an entire surface of the substrate 110 to have a planar shape without having a stripe shape.
- a blocking layer 111 preferably made of silicon oxide or silicon nitride is formed on the supply voltage electrode 112 .
- a polysilicon layer including a plurality of pairs of a first transistor portion 150 a for a switching thin film transistor (TFT) and a second transistor portion 150 b for a driving TFT is formed on the blocking layer 111 .
- TFT switching thin film transistor
- the first transistor portion 150 a includes a plurality of impurity regions such as a (first) source region 153 a, an intermediate region 152 a, and a (first) drain region 155 a, which are doped with n type impurity and separated from one another, and a plurality of intrinsic regions such as a pair of (first) channel regions 154 a disposed between the impurity regions 153 a, 152 a and 155 a.
- the first source region 153 a extends to form a storage electrode region 157 .
- the second transistor portion 150 b includes a plurality of impurity regions such as a (second) source region 153 b and a (second) drain region 155 b, which are doped with p type impurity, and an intrinsic region such as a (second) channel region 154 b disposed between the impurity regions 153 b and 155 b.
- impurity regions such as a (second) source region 153 b and a (second) drain region 155 b, which are doped with p type impurity, and an intrinsic region such as a (second) channel region 154 b disposed between the impurity regions 153 b and 155 b.
- the impurity regions 153 a, 152 a and 155 a of the first transistor portion 150 a are doped with p type impurity, while the impurity regions 153 b and 155 b of the second transistor portion 150 b are doped with n type impurity, depending on driving conditions.
- a gate insulating layer 140 preferably made of silicon oxide or silicon nitride is formed on the polysilicon layer 150 a and 150 b.
- Each pair of first gate electrodes 123 a are branched from the gate line 121 and they intersect the first transistor portion 150 a such that they overlap the pair of the first channel regions 154 a.
- Each second gate electrode 123 b is separated from the gate line 121 and it intersects the second transistor portion 150 b such that it overlaps the second channel region 154 b.
- the second gate electrode 123 b extends to form a storage electrode 133 overlapping the storage electrode region 157 of the polysilicon layer 150 a and 150 b to form a storage capacitor.
- a first interlayer insulating film 801 is formed on the gate lines 121 and the first and the second gate electrodes 123 a and 123 b.
- a plurality of data lines 171 each including a plurality of first source electrodes 173 a, a plurality of second source electrodes 173 b, and a plurality of first and second drain electrodes 175 a and 175 b are formed on the first interlayer insulating film 801 .
- Each first source electrode 173 a is branched from the data line 171 and connected to the first source region 153 a through a contact hole 181 penetrating the first interlayer insulating film 801 and the gate insulating layer 140 .
- Each first drain electrode 175 a is connected to the first drain region 155 a through a contact hole 182 penetrating the first interlayer insulating film 801 and the gate insulating layer 140 .
- the first drain electrode 175 a is also connected to the second gate electrode 123 b through a contact hole 183 penetrating the first interlayer insulating film 801 and the gate insulating layer 140 .
- Each second source electrode 173 b has an island shape and it is connected to the second source region 153 b through a contact hole 184 penetrating the first interlayer insulating film 801 and the gate insulating layer 140 .
- Each second drain electrode 175 b is connected to the second drain region 155 b through a contact hole 186 penetrating the first interlayer insulating film 801 and the gate insulating layer 140 .
- the second source electrode 173 b is also connected to the supply voltage electrode 112 through a contact hole 187 penetrating the first interlayer insulating film 801 , the gate insulating layer 140 , and the blocking layer 111 .
- a second interlayer insulating film 802 is formed on the data lines 171 , the source electrodes 173 a and 173 b, and the drain electrodes 175 a and 175 b.
- the second interlayer insulating film 802 is preferably made of silicon nitride, silicon oxide, or organic insulating material and it has a plurality of contact holes 185 exposing the second drain electrodes 175 b.
- a plurality of pixel electrodes 190 are formed on the second interlayer insulating film 802 .
- Each pixel electrode 190 is connected to the second drain electrode 175 b through the contact hole 185 and it is preferably made of reflective opaque material such as Al or Ag alloy.
- the pixel electrode 190 may be formed of a transparent conductive material such as ITO (indium tin oxide) and IZO (indium zinc oxide).
- the pixel electrode 190 may be incorporated with the second drain electrode 175 b for reducing the manufacturing cost.
- a partition 803 for separating pixels of the organic EL display panel is formed on the second interlayer insulating film 802 and the pixel electrodes 190 .
- the partition 803 surrounds the pixel electrodes 190 like a bank to define depressions filled with organic light emitting material.
- the partition 803 is preferably made of organic insulating material and, more preferably, made of a photosensitive material containing black pigment, which is exposed to light and developed, such that the partition 803 functions as a light blocking member and a manufacturing method thereof is simplified.
- a plurality of light emitting members 70 are formed on the pixel electrodes 190 and disposed in the depressions defined by the partition 803 .
- the light emitting members 70 are preferably made of organic material emitting primary-color lights such as red, green and blue lights.
- the red, green and blue light emitting members 70 are arranged periodically.
- a buffer layer 804 is formed on the light emitting members 70 and the partition 803 .
- the buffer layer 804 may be omitted if it is not required.
- a common electrode 270 supplied with a predetermined voltage is formed on the buffer layer 804 .
- the common electrode 270 is preferably made of transparent conductive material such as ITO and IZO. If the pixel electrodes 190 are transparent, the common electrode 270 is preferably made of reflective opaque metal such as Al.
- auxiliary electrode made of low resistivity material is optionally provided for compensating the conductivity of the common electrode 270 .
- the auxiliary electrode may be disposed between the common electrode 270 and the buffer layer 804 or on the common electrode 270 , and it preferably has a matrix form and is disposed along the partition 803 such that it does not overlap the light emitting member 70 .
- the first transistor portion 150 a, the first gate electrode 123 a connected to the gate line 121 , the first source electrode 153 a connected to the data line 171 , and the first drain electrode 155 a form a switching TFT.
- the second transistor portion 150 b, the second gate electrode 123 b connected to the first drain electrode 155 a, the second source electrode 153 b connected to the supply voltage electrode 112 , and the second drain electrode 155 b connected to the pixel electrode 190 form a driving TFT.
- the pixel electrode 190 and the common electrode 270 serve as an anode and a cathode, respectively, and the storage electrode region 157 connected to the first drain region 155 a and the storage electrode 133 connected to the supply voltage electrode 112 through the second source electrode 153 b form a storage capacitor.
- the switching TFT transmits the data voltage from the data line 171 to the driving TFT in response to the gate signal from the gate line 121 .
- the driving TFT Upon the receipt of the data voltage, the driving TFT generates a current having a magnitude depending on the difference between the data voltage and the supply voltage.
- the data voltage is charged in the storage capacitor to be maintained after the switching TFT is turned off.
- the current driven by the driving TFT enters into the light emitting member 70 through the pixel electrode 190 and reaches the common electrode 270 .
- the current flowing in the light emitting member 70 means that positive charge carriers such as holes and negative charge carriers such as electrons are injected into the light emitting member 70 from the anode 190 and the cathode 270 , respectively, and they are drifted by an electric field generated by the voltage difference between the anode 190 and the cathode 270 .
- the holes and the electrons in the light emitting member 70 then meet each other to be recombined into excitons, which emit light with a predetermined wavelength.
- the intensity of the emitted light depends on the current driven by the driving TFT and flowing in the light emitting member 70 .
- a transparent common electrode 270 and an opaque pixel electrode 190 are applicable to a top emission type EL display, which displays an image on its top surface.
- a transparent pixel electrode 190 and an opaque common electrode 270 are applicable to a bottom emission type EL display, which displays an image on its bottom surface.
- the supply voltage electrode 112 can have various positions or arrangements between the light emitting members 70 and the substrate 111 .
- the supply voltage electrode 112 may be transparent at least in part in order to transmit the light emitted from the light emitting members 70 .
- the supply voltage electrode 112 since the supply voltage electrode 112 has a planar shape covering the entire surface of the organic EL display panel, the magnitude of the supply voltage applied to the pixels is almost constant. In addition, since the supply voltage electrode 112 has a sheet resistance, a voltage drop may not significantly differentiate the magnitude of the supply voltage applied to the pixels. Therefore, a cross-talk resulted from the difference in the brightness between the pixels is significantly reduced.
- FIGS. 1-3 a method of manufacturing the organic EL display panel shown in FIGS. 1-3 is described with reference to FIGS. 4A-10C as well as FIGS. 1-3 .
- FIGS. 4A, 5A , 6 A, 7 A, 8 A, 9 A and 10 A are layout views of the organic EL display panel shown in FIGS. 1-3 in intermediate steps of a manufacturing method thereof according to an embodiment of the present invention
- FIGS. 4B, 5B , 6 B, 7 B, 8 B, 9 B and 10 B are sectional views of the organic EL display panels shown in FIGS. 4A, 5A , 6 A, 7 A, 8 A, 9 A and 10 A taken along the lines IVB-IVB′, VB-VB′, VIB-VIB′, VIIB-VIIB′, VIIIB-VIIIB′, IXB-IXB′, and XB-XB′, respectively, and FIGS.
- 4C, 5C , 6 C, 7 C, 8 C, 9 C and 10 C are sectional views of the organic EL display panels shown in FIGS. 4 A, 5 A, 6 A, 7 A, 8 A, 9 A and 10 A taken along the lines IVC-IVC′, VB-VC′, VIC-VIC′, VIIC-VIIC′, VIIIC-VIIIC′, IXC-IXC′, and XC-XC′, respectively.
- a conductive material is deposited on an insulating substrate 110 to form a supply voltage electrode 112 .
- the supply voltage electrode 112 may be photo-etched to form openings or transmitting portions therein.
- a blocking layer 111 preferably made of silicon oxide is formed on an insulating substrate 110 , and an amorphous silicon layer is deposited on the blocking layer 111 .
- the deposition of the amorphous silicon layer is preferably performed by LPCVD (low temperature chemical vapor deposition), PECVD (plasma enhanced chemical vapor deposition) or sputtering. Consecutively, the amorphous silicon layer is laser-annealed to be crystallized into a polysilicon layer.
- the polysilicon layer is photo-etched to form a plurality of pairs of first and second transistor portions 150 a and 150 b.
- a gate insulating layer 140 is deposited on the polysilicon layer 150 a and 150 b.
- a gate metal layer is deposited on the gate insulating layer 140 and a photoresist film is coated, exposed to light, and developed to form a first photoresist PR 1 .
- the gate metal layer is etched by using the first photoresist PR 1 as an etch mask to form a plurality of gate electrodes 123 b including storage electrodes 133 and a plurality of gate metal members 120 .
- P type impurity is injected into exposed portions of the second transistor portions 150 b of the polysilicon layer to form a plurality of P type impurity regions 153 b and 155 b.
- the first transistor portions 150 a of the polysilicon layer are covered with the first photoresist PR 1 and the gate metal members 120 to be protected from impurity implantation.
- the first photoresist PR 1 is removed and another photoresist film is coated, exposed to light, and developed to form a second photoresist PR 2 .
- the gate metal layer 120 is etched by using the first photoresist PR 2 as an etch mask to form a plurality of gate lines 121 including gate electrodes 123 a.
- N type impurity is injected into exposed portions of the first transistor portions 150 a of the polysilicon layer to form a plurality of N type impurity regions 153 a and 155 a.
- the second transistor portions 150 b of the polysilicon layer are covered with the second photoresist PR 2 to be protected from impurity implantation.
- a first interlayer insulating film 801 is deposited on the gate lines 121 and the gate electrodes 123 a and 123 b.
- the first interlayer insulating film 801 , the gate insulating layer 140 , and the blocking layer 111 are photo-etched form a plurality of contact holes 181 , 182 , 184 and 186 exposing the impurity regions 153 a, 155 a, 153 b and 155 b, respectively, as well as a plurality of contact holes 183 and 187 exposing the gate electrodes 123 b and portions of the supply voltage electrode 112 .
- a data metal layer is deposited and photo-etched to form a plurality of data lines 171 including first source electrodes 173 a, a plurality of second source electrodes 173 b, a plurality of first and second drain electrodes 175 a and 175 b.
- a second interlayer insulating film 802 is deposited on the data lines 171 , the source electrodes 173 a and 173 b, and the drain electrodes 175 a and 175 b as well as on the first interlayer insulating film 801 .
- the second interlayer insulating film 802 is photo-etched to form a plurality of contact holes 185 exposing the second drain electrodes 175 b.
- a transparent conductive material or a low resistivity reflective material is deposited and patterned to form a plurality of pixel electrodes 190 .
- the pixel electrodes 190 are made of reflective opaque material, they may be formed of the data metal layer along with the data lines 171 .
- an organic film containing black pigment is coated on the pixel electrodes 190 and the second interlayer insulating film 802 , and it is exposed to light and developed to form a partition 803 defining a plurality of depressions on the pixel electrodes 190 . Thereafter, a plurality of organic light emitting members 70 are formed in the depressions by deposition or inkjet printing following a masking.
- the organic light emitting member 70 preferably has a multi-layered structure.
- an organic conductive material is deposited on the light emitting members 70 to form a buffer layer 804 , and ITO or IZO is deposited on the buffer layer 804 to form a common electrode 270 .
- An auxiliary electrode (not shown) made of low resistivity material such as Al may be formed before or after the formation of the common electrode 270 .
- a top emission type organic EL display panel includes an opaque pixel electrode and a transparent common electrode 270 , and it displays an image on its top surface.
- the supply voltage electrode 112 can be placed on another position under the organic light emitting member 70 .
- a bottom emission type organic EL display panel including a transparent pixel electrode and an opaque common electrode for displaying an image on its bottom surface is described in detail with reference to FIGS. 11-15 .
- FIG. 11 is a layout view of a bottom emission type organic EL display panel according to an embodiment of the present invention and FIGS. 12 and 13 are exemplary sectional views of the display panel shown in FIG. 11 taken along the lines XII-XII′ and XIII-XIII′, respectively.
- FIGS. 11-13 a structure of an organic EL display panel according to this embodiment is similar to that shown in FIGS. 1-3 .
- a supply voltage electrode 112 and a blocking layer 111 are sequentially formed on an insulating substrate 110 .
- a polysilicon layer including a plurality of pairs of a first transistor portion 150 a for a switching TFT and a second transistor portion 150 b for a driving TFT is formed on the blocking layer 111 , and a gate insulating layer 140 is formed thereon.
- the first transistor portion 150 a includes a plurality of impurity regions such as a first source region 153 a, an intermediate region 152 a, and a first drain region 155 a, and a pair of first channel regions 154 a disposed between the impurity regions 153 a, 152 a and 155 a.
- the second portion 150 b includes a second source region 153 b, a second drain region 155 b, and a second channel region 154 a disposed between the second source region 153 b and the second drain region 155 a.
- a plurality of gate lines 121 including first gate electrodes 123 a and a plurality of second gate electrodes 123 b including storage electrodes 133 are formed on the gate insulating layer 140 , and a first interlayer insulating film 801 is formed thereon.
- a plurality of data lines 171 including first source electrodes 173 a, a plurality of second source electrodes 173 b, and a plurality of first and second drain electrodes 175 a and 175 b are formed on the first interlayer insulating film 801 , and a second interlayer insulating film 802 is formed thereon.
- a plurality of pixel electrode 190 and a partition 803 defining a plurality of depressions on the pixel electrodes 190 are formed on the second interlayer insulating film 802 , and a plurality of organic light emitting member 70 are formed in the depressions on the pixel electrodes 190 .
- a buffer layer 804 is formed on the organic light emitting members 70 and the partition 803 , and a common electrode 270 is formed on the buffer layer 804 .
- the pixel electrodes 190 are transparent while the common electrode 270 is opaque.
- the supply voltage electrode 112 has a plurality of transmitting portions T facing the pixel electrodes 190 for the transmission of light emitted from the light emitting members 70 .
- the supply voltage electrode 112 has a plurality of openings S facing the channel regions 154 a of the first transistor portions 150 a for minimizing the effect of a supply voltage on the switching TFTs.
- a manufacturing method of the organic EL display panel shown in FIGS. 11-13 according to an embodiment of the present invention forms the openings S and the transmitting portions T by patterning the supply voltage electrode 112 using a photolithography process after depositing the supply voltage electrode 112 .
- the area of the transmitting portions T of the planar supply voltage electrode 112 according to this embodiment can be increased compared with a conventional linear supply voltage electrode.
- FIG. 14 is another exemplary sectional view of the display panel shown in FIG. 11 taken along the lines XIII-XIII′.
- auxiliary members 127 for compensating the connection between the supply voltage electrode 112 and the second source electrodes 173 b are formed on the gate insulating layer 140 .
- the auxiliary members 127 are connected to the supply voltage electrode 112 through contact holes 147 penetrating the gate insulating layer 140 and the blocking layer 111 , and also connected to the second source electrodes 173 b through contact holes 187 penetrating the first interlayer insulating film 801 .
- the auxiliary members 127 are preferably made of the same layer as the gate lines 121 .
- FIG. 15 is another exemplary sectional view of the display panel shown in FIG. 11 taken along the lines XIII-XIII′.
- the blocking layer 111 has a plurality of openings 117 exposing the supply voltage electrode 112 and a plurality of contact holes 187 penetrating the first interlayer insulating film 801 and the gate insulating layer 140 and having smaller size than the openings 117 are formed in the openings 117 .
- the second source electrodes 173 b are connected to the supply voltage electrodes 112 through the contact holes 187 .
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Abstract
According to an aspect of the present invention, an organic electro-luminescence display panel is provided, which includes: an insulating substrate; a polysilicon layer formed on the substrate; a first insulating layer formed on the polysilicon layer; a gate wire formed on the first insulating layer; a second insulating layer formed on the gate wire; a data wire formed on the second insulating layer and including first and second portions; a pixel electrode connected to the first portion of the data wire; a partition defining an area on the pixel electrode; an organic light emitting member formed in the area on the pixel electrode; a common electrode formed on the light emitting member; and a planar supply voltage electrode disposed between the pixel electrode and the substrate and connected to the second portion of the data wire.
Description
- (a) Field of the Invention
- The present invention relates to an organic electroluminescence display panel.
- (b) Description of the Related Art
- Generally, an organic electro-luminescence (EL) display is a self emissive display device, which displays images by exciting an emissive organic material to emit light. The organic EL display includes an anode (hole injection electrode), a cathode (electron injection electrode), and an organic light emission layer interposed therebetween. When the holes and the electrons are injected into the light emission layer, they are recombined and pair annihilated with emitting light. The light emission layer further includes an electron transport layer (ETL) and a hole transport layer (HTL) as well as an electron injecting layer (EIL) and a hole injecting layer (HIL) for enhancing the light emission.
- A plurality of pixels of the organic EL display, each including an anode, a cathode, and a light emission layer, are arranged in a matrix and driven in passive matrix (or simple matrix) addressing or active matrix addressing.
- The passive matrix type organic EL display includes a plurality of anode lines, a plurality of cathode lines intersecting the anode lines, and a plurality of pixels, each including a light emission layer. The selection of one of the anode lines and one of the cathode lines cause light emission of a pixel located at the intersection of the selected signal lines.
- The active matrix type organic EL display includes a plurality of pixels, each including a switching transistor, a driving transistor, and a storage capacitor as well as an anode, a cathode, and a light emission layer. The EL display further includes a plurality of gate lines transmitting gate signals and a plurality of data lines transmitting data voltages. The switching transistor is connected to one of the gate lines and one of the data lines and transmits the data voltage from the data line in response to the gate signal. The driving transistor receives the data voltage from the switching transistor and drives a current having a magnitude determined depending on the difference between the data voltage and a predetermined voltage such as a supply voltage. The current from the driving transistor enters the light emission layer to cause light emission having an intensity depending on the current. The storage capacitor is connected between the data voltage and the supply voltage to maintain their voltage difference. The gray scaling of the active matrix type EL display is accomplished by controlling the data voltages to adjust the current driven by the driving transistor. The color representation of the EL display is obtained by providing red, green and blue light emission layers.
- In the meantime, the decrease of the supply voltage reduces the current driven by the driving transistors such that the displayed image is darker than is expected. For example, the data voltages with higher magnitude for displaying higher grays experience higher voltage drop such that the reduction of the currents driven by the driving transistors is much severer. The smaller currents makes the pixels associated therewith emit darker lights, thereby generating cross-talk, which becomes severer as the number of the pixels expected to emit bright lights is increased.
- A motivation of the present invention is to solve the above-described problems.
- According to an aspect of the present invention, an organic electro-luminescence display panel is provided, which includes: an insulating substrate; a polysilicon layer formed on the substrate; a first insulating layer formed on the polysilicon layer; a gate wire formed on the first insulating layer; a second insulating layer formed on the gate wire; a data wire formed on the second insulating layer and including first and second portions; a pixel electrode connected to the first portion of the data wire; a partition defining an area on the pixel electrode; an organic light emitting member formed in the area on the pixel electrode; a common electrode formed on the light emitting member; and a planar supply voltage electrode disposed between the pixel electrode and the substrate and connected to the second portion of the data wire.
- The supply voltage electrode may be disposed directly on the substrate.
- The organic electro-luminescence display panel may further include a blocking layer formed on the substrate. The blocking layer may have an opening exposing a portion of the supply voltage electrode, the first and the second insulating layers may have a contact hole exposing the exposed portion of the supply voltage electrode through the opening, and the second portion of the data wire may be connected to the supply voltage electrode through the opening and the contact hole. The opening may be larger than the contact hole.
- The polysilicon layer may include first and second transistor portions, each including a channel region, a source region, and a drain region, the gate wire may include first and second gate electrodes overlapping the first and the second transistor portions, respectively, and the data wire may include a first source electrode connected to the source region of the first transistor portion, a first drain electrode connected to the drain region the first transistor portion and the second gate electrode, a second source electrode connected to the source region of the second transistor portion and the supply voltage electrode, and a second drain electrode connected to the drain region of the second transistor portion and the pixel electrode.
- The polysilicon layer may further include a storage electrode region connected to the source region of the second transistor portion and the gate wire further comprises a storage electrode overlapping the storage electrode region and connected to the second gate electrode.
- The pixel electrode may be formed of the same layer or the same material as the data wire.
- The organic electro-luminescence display panel may further include an auxiliary electrode connected between the supply voltage electrode and the second source electrode. The auxiliary electrode may include the same layer as the gate wire.
- The partition preferably includes black photoresist.
- The pixel electrode may be opaque and the common electrode may be transparent. Alternatively, the pixel electrode is transparent and the common electrode is opaque.
- When the pixel electrode is transparent, the supply voltage electrode preferably has a transmitting portion facing the light emitting member for transmitting light from the light emitting member.
- The supply voltage electrode preferably has an opening facing at least a portion of the polysilicon layer.
- The present invention will become more apparent by describing embodiments thereof in detail with reference to the accompanying drawings in which:
-
FIG. 1 is a layout view of an organic EL display panel according to an embodiment of the present invention; -
FIG. 2 is a sectional view of the organic EL display panel shown inFIG. 1 taken along the line II-II′; -
FIG. 3 is a sectional view of the organic EL display panel shown inFIG. 1 taken along the line III-III′; -
FIG. 4A is a layout view of the organic EL display panel shown inFIGS. 1-3 in a first step of a manufacturing method thereof according to an embodiment of the present invention; -
FIGS. 4B and 4C are sectional views of the organic EL display panel shown inFIG. 4A taken along the lines IVB-IVB′ and IVC-IVC′, respectively; -
FIG. 5A is a layout view of the organic EL display panel shown inFIGS. 1-3 in a step following the step shown inFIGS. 4A-4C ; -
FIGS. 5B and 5C sectional views of the organic EL display panel shown inFIG. 5A taken along the lines VB-VB′ and VC-VC′, respectively; -
FIG. 6A is a layout view of the organic EL display panel shown inFIGS. 1-3 in a step following the step shown inFIGS. 5A-5C ; -
FIGS. 6B and 6C are sectional views of the organic EL display panel shown inFIG. 6A taken along the lines VIB-VIB′ and VIC-VIC′, respectively; -
FIG. 7A is a layout view of the organic EL display panel shown inFIGS. 1-3 in a step following the step shown inFIGS. 6A-6C ; -
FIGS. 7B and 7C are sectional views of the organic EL display panel shown inFIG. 7A taken along the lines VIIB-VIIB′ and VIIC-VIIC′, respectively; -
FIG. 8A is a layout view of the organic EL display panel shown inFIGS. 1-3 in a step following the step shown inFIGS. 7A-7C ; -
FIGS. 8B and 8C sectional views of the organic EL display panel shown inFIG. 8A taken along the lines VIIIB-VIIIB′ and VIIIC-VIIIC′, respectively; -
FIG. 9A is a layout view of the organic EL display panel shown inFIGS. 1-3 in a step following the step shown inFIGS. 8A-8C ; -
FIGS. 9B and 9C are sectional views of the organic EL display panel shown inFIG. 9A taken along the lines IXB-IXB′ and IXC-IXC′, respectively; -
FIG. 10A is a layout view of the organic EL display panel shown inFIGS. 1-3 in a step following the step shown inFIGS. 9A-9C ; -
FIGS. 10B and 10C are sectional views of the organic EL display panel shown inFIG. 10A taken along the lines XB-XB′ and XC-XC′, respectively; -
FIG. 11 is a layout view of a bottom emission type organic EL display panel according to an embodiment of the present invention; -
FIG. 12 is an exemplary sectional view of the display panel shown inFIG. 11 taken along the line XII-XII′; -
FIG. 13 is an exemplary sectional view of the display panel shown inFIG. 11 taken along the line XIII-XIII′; -
FIG. 14 is another exemplary sectional view of the display panel shown inFIG. 11 taken along the line XIII-XIII′; and -
FIG. 15 is another exemplary sectional view of the display panel shown inFIG. 11 taken along the line XIII-XIII′. - The present invention now will be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
- In the drawings, the thickness of layers and regions are exaggerated for clarity. Like numerals refer to like elements throughout. It will be understood that when an element such as a layer, film, region, substrate or panel is referred to as being “on” another element, it can be directly on the other element or intervening elements may also be present. In contrast, when an element is referred to as being “directly on” another element, there are no intervening elements present.
- Then, organic electroluminescence display devices and manufacturing methods thereof according to embodiments of the present invention will be described with reference to the accompanying drawings.
- First, an organic EL display according to an embodiment of the present invention is described in detail with reference to
FIGS. 1-3 . -
FIG. 1 is a layout view of an organic EL display panel according to an embodiment of the present invention,FIG. 2 is a sectional view of the organic EL display panel shown inFIG. 1 taken along the line II-II′, andFIG. 3 is a sectional view of the organic EL display panel shown inFIG. 1 taken along the line III-III′. - A
supply voltage electrode 112 supplied with a predetermined voltage such as a supply voltage is formed on an insulating substrate 10 preferably made of transparent glass or silicon wafer. Thesupply voltage electrode 112 is preferably made of a conductive material having low resistivity such as Al, Al alloy, Ag, or Ag alloy and it substantially covers an entire surface of thesubstrate 110 to have a planar shape without having a stripe shape. - A
blocking layer 111 preferably made of silicon oxide or silicon nitride is formed on thesupply voltage electrode 112. - A polysilicon layer including a plurality of pairs of a
first transistor portion 150 a for a switching thin film transistor (TFT) and asecond transistor portion 150 b for a driving TFT is formed on theblocking layer 111. - The
first transistor portion 150 a includes a plurality of impurity regions such as a (first)source region 153 a, anintermediate region 152 a, and a (first)drain region 155 a, which are doped with n type impurity and separated from one another, and a plurality of intrinsic regions such as a pair of (first)channel regions 154 a disposed between theimpurity regions first source region 153 a extends to form astorage electrode region 157. - The
second transistor portion 150 b includes a plurality of impurity regions such as a (second)source region 153 b and a (second)drain region 155 b, which are doped with p type impurity, and an intrinsic region such as a (second)channel region 154 b disposed between theimpurity regions - Alternatively, the
impurity regions first transistor portion 150 a are doped with p type impurity, while theimpurity regions second transistor portion 150 b are doped with n type impurity, depending on driving conditions. - A
gate insulating layer 140 preferably made of silicon oxide or silicon nitride is formed on thepolysilicon layer - A plurality of
gate lines 121 including a plurality of pairs offirst gate electrodes 123 a and a plurality ofsecond gate electrodes 123 b, which are preferably made of low resistivity material such as Al or Al alloy, are formed on thegate insulating layer 140. Each pair offirst gate electrodes 123 a are branched from thegate line 121 and they intersect thefirst transistor portion 150 a such that they overlap the pair of thefirst channel regions 154 a. Eachsecond gate electrode 123 b is separated from thegate line 121 and it intersects thesecond transistor portion 150 b such that it overlaps thesecond channel region 154 b. Thesecond gate electrode 123 b extends to form astorage electrode 133 overlapping thestorage electrode region 157 of thepolysilicon layer - A first
interlayer insulating film 801 is formed on thegate lines 121 and the first and thesecond gate electrodes - A plurality of
data lines 171, each including a plurality offirst source electrodes 173 a, a plurality ofsecond source electrodes 173 b, and a plurality of first andsecond drain electrodes interlayer insulating film 801. - Each
first source electrode 173 a is branched from thedata line 171 and connected to thefirst source region 153 a through acontact hole 181 penetrating the firstinterlayer insulating film 801 and thegate insulating layer 140. Eachfirst drain electrode 175 a is connected to thefirst drain region 155 a through acontact hole 182 penetrating the firstinterlayer insulating film 801 and thegate insulating layer 140. Thefirst drain electrode 175 a is also connected to thesecond gate electrode 123 b through acontact hole 183 penetrating the firstinterlayer insulating film 801 and thegate insulating layer 140. - Each
second source electrode 173 b has an island shape and it is connected to thesecond source region 153 b through acontact hole 184 penetrating the firstinterlayer insulating film 801 and thegate insulating layer 140. Eachsecond drain electrode 175 b is connected to thesecond drain region 155 b through acontact hole 186 penetrating the firstinterlayer insulating film 801 and thegate insulating layer 140. Thesecond source electrode 173 b is also connected to thesupply voltage electrode 112 through acontact hole 187 penetrating the firstinterlayer insulating film 801, thegate insulating layer 140, and theblocking layer 111. - A second
interlayer insulating film 802 is formed on thedata lines 171, thesource electrodes drain electrodes interlayer insulating film 802 is preferably made of silicon nitride, silicon oxide, or organic insulating material and it has a plurality ofcontact holes 185 exposing thesecond drain electrodes 175 b. - A plurality of
pixel electrodes 190 are formed on the secondinterlayer insulating film 802. Eachpixel electrode 190 is connected to thesecond drain electrode 175 b through thecontact hole 185 and it is preferably made of reflective opaque material such as Al or Ag alloy. However, thepixel electrode 190 may be formed of a transparent conductive material such as ITO (indium tin oxide) and IZO (indium zinc oxide). Thepixel electrode 190 may be incorporated with thesecond drain electrode 175 b for reducing the manufacturing cost. - A
partition 803 for separating pixels of the organic EL display panel is formed on the secondinterlayer insulating film 802 and thepixel electrodes 190. Thepartition 803 surrounds thepixel electrodes 190 like a bank to define depressions filled with organic light emitting material. Thepartition 803 is preferably made of organic insulating material and, more preferably, made of a photosensitive material containing black pigment, which is exposed to light and developed, such that thepartition 803 functions as a light blocking member and a manufacturing method thereof is simplified. - A plurality of light emitting
members 70 are formed on thepixel electrodes 190 and disposed in the depressions defined by thepartition 803. Thelight emitting members 70 are preferably made of organic material emitting primary-color lights such as red, green and blue lights. The red, green and bluelight emitting members 70 are arranged periodically. - A
buffer layer 804 is formed on thelight emitting members 70 and thepartition 803. Thebuffer layer 804 may be omitted if it is not required. - A
common electrode 270 supplied with a predetermined voltage is formed on thebuffer layer 804. Thecommon electrode 270 is preferably made of transparent conductive material such as ITO and IZO. If thepixel electrodes 190 are transparent, thecommon electrode 270 is preferably made of reflective opaque metal such as Al. - An auxiliary electrode (not shown) made of low resistivity material is optionally provided for compensating the conductivity of the
common electrode 270. The auxiliary electrode may be disposed between thecommon electrode 270 and thebuffer layer 804 or on thecommon electrode 270, and it preferably has a matrix form and is disposed along thepartition 803 such that it does not overlap thelight emitting member 70. - In the above-described organic EL display panel, the
first transistor portion 150 a, thefirst gate electrode 123 a connected to thegate line 121, thefirst source electrode 153 a connected to thedata line 171, and thefirst drain electrode 155 a form a switching TFT. In addition, thesecond transistor portion 150 b, thesecond gate electrode 123 b connected to thefirst drain electrode 155 a, thesecond source electrode 153 b connected to thesupply voltage electrode 112, and thesecond drain electrode 155 b connected to thepixel electrode 190 form a driving TFT. Furthermore, thepixel electrode 190 and thecommon electrode 270 serve as an anode and a cathode, respectively, and thestorage electrode region 157 connected to thefirst drain region 155 a and thestorage electrode 133 connected to thesupply voltage electrode 112 through thesecond source electrode 153 b form a storage capacitor. - The switching TFT transmits the data voltage from the
data line 171 to the driving TFT in response to the gate signal from thegate line 121. Upon the receipt of the data voltage, the driving TFT generates a current having a magnitude depending on the difference between the data voltage and the supply voltage. In addition, the data voltage is charged in the storage capacitor to be maintained after the switching TFT is turned off. The current driven by the driving TFT enters into thelight emitting member 70 through thepixel electrode 190 and reaches thecommon electrode 270. The current flowing in thelight emitting member 70 means that positive charge carriers such as holes and negative charge carriers such as electrons are injected into thelight emitting member 70 from theanode 190 and thecathode 270, respectively, and they are drifted by an electric field generated by the voltage difference between theanode 190 and thecathode 270. The holes and the electrons in thelight emitting member 70 then meet each other to be recombined into excitons, which emit light with a predetermined wavelength. The intensity of the emitted light depends on the current driven by the driving TFT and flowing in thelight emitting member 70. - The emitted light goes out of the display panel after passing through the
common electrode 270 or thepixel electrode 190. A transparentcommon electrode 270 and anopaque pixel electrode 190 are applicable to a top emission type EL display, which displays an image on its top surface. On the contrary, atransparent pixel electrode 190 and an opaquecommon electrode 270 are applicable to a bottom emission type EL display, which displays an image on its bottom surface. In the former case, thesupply voltage electrode 112 can have various positions or arrangements between thelight emitting members 70 and thesubstrate 111. In the latter case, thesupply voltage electrode 112 may be transparent at least in part in order to transmit the light emitted from thelight emitting members 70. - As described above, since the
supply voltage electrode 112 has a planar shape covering the entire surface of the organic EL display panel, the magnitude of the supply voltage applied to the pixels is almost constant. In addition, since thesupply voltage electrode 112 has a sheet resistance, a voltage drop may not significantly differentiate the magnitude of the supply voltage applied to the pixels. Therefore, a cross-talk resulted from the difference in the brightness between the pixels is significantly reduced. - Now, a method of manufacturing the organic EL display panel shown in
FIGS. 1-3 is described with reference toFIGS. 4A-10C as well asFIGS. 1-3 . -
FIGS. 4A, 5A , 6A, 7A, 8A, 9A and 10A are layout views of the organic EL display panel shown inFIGS. 1-3 in intermediate steps of a manufacturing method thereof according to an embodiment of the present invention,FIGS. 4B, 5B , 6B, 7B, 8B, 9B and 10B are sectional views of the organic EL display panels shown inFIGS. 4A, 5A , 6A, 7A, 8A, 9A and 10A taken along the lines IVB-IVB′, VB-VB′, VIB-VIB′, VIIB-VIIB′, VIIIB-VIIIB′, IXB-IXB′, and XB-XB′, respectively, andFIGS. 4C, 5C , 6C, 7C, 8C, 9C and 10C are sectional views of the organic EL display panels shown in FIGS. 4A, 5A, 6A, 7A, 8A, 9A and 10A taken along the lines IVC-IVC′, VB-VC′, VIC-VIC′, VIIC-VIIC′, VIIIC-VIIIC′, IXC-IXC′, and XC-XC′, respectively. - Referring to
FIGS. 4A-4C , a conductive material is deposited on an insulatingsubstrate 110 to form asupply voltage electrode 112. Thesupply voltage electrode 112 may be photo-etched to form openings or transmitting portions therein. - A
blocking layer 111 preferably made of silicon oxide is formed on an insulatingsubstrate 110, and an amorphous silicon layer is deposited on theblocking layer 111. The deposition of the amorphous silicon layer is preferably performed by LPCVD (low temperature chemical vapor deposition), PECVD (plasma enhanced chemical vapor deposition) or sputtering. Consecutively, the amorphous silicon layer is laser-annealed to be crystallized into a polysilicon layer. - Next, the polysilicon layer is photo-etched to form a plurality of pairs of first and
second transistor portions - Referring to
FIGS. 5A-5C , agate insulating layer 140 is deposited on thepolysilicon layer - Successively, a gate metal layer is deposited on the
gate insulating layer 140 and a photoresist film is coated, exposed to light, and developed to form a first photoresist PR1. The gate metal layer is etched by using the first photoresist PR1 as an etch mask to form a plurality ofgate electrodes 123 b includingstorage electrodes 133 and a plurality ofgate metal members 120. P type impurity is injected into exposed portions of thesecond transistor portions 150 b of the polysilicon layer to form a plurality of Ptype impurity regions first transistor portions 150 a of the polysilicon layer are covered with the first photoresist PR1 and thegate metal members 120 to be protected from impurity implantation. - Referring to
FIGS. 6A-6C , the first photoresist PR1 is removed and another photoresist film is coated, exposed to light, and developed to form a second photoresist PR2. Thegate metal layer 120 is etched by using the first photoresist PR2 as an etch mask to form a plurality ofgate lines 121 includinggate electrodes 123 a. N type impurity is injected into exposed portions of thefirst transistor portions 150 a of the polysilicon layer to form a plurality of Ntype impurity regions second transistor portions 150 b of the polysilicon layer are covered with the second photoresist PR2 to be protected from impurity implantation. - Referring to
FIGS. 7A-7C , a firstinterlayer insulating film 801 is deposited on thegate lines 121 and thegate electrodes interlayer insulating film 801, thegate insulating layer 140, and theblocking layer 111 are photo-etched form a plurality of contact holes 181, 182, 184 and 186 exposing theimpurity regions contact holes gate electrodes 123 b and portions of thesupply voltage electrode 112. - Referring to
FIGS. 8A-8C , a data metal layer is deposited and photo-etched to form a plurality ofdata lines 171 includingfirst source electrodes 173 a, a plurality ofsecond source electrodes 173 b, a plurality of first andsecond drain electrodes - Referring to
FIGS. 9A-9C , a secondinterlayer insulating film 802 is deposited on thedata lines 171, thesource electrodes drain electrodes interlayer insulating film 801. The secondinterlayer insulating film 802 is photo-etched to form a plurality ofcontact holes 185 exposing thesecond drain electrodes 175 b. - Referring to
FIGS. 10A-10C , a transparent conductive material or a low resistivity reflective material is deposited and patterned to form a plurality ofpixel electrodes 190. When thepixel electrodes 190 are made of reflective opaque material, they may be formed of the data metal layer along with the data lines 171. - Referring to
FIGS. 1-3 , an organic film containing black pigment is coated on thepixel electrodes 190 and the secondinterlayer insulating film 802, and it is exposed to light and developed to form apartition 803 defining a plurality of depressions on thepixel electrodes 190. Thereafter, a plurality of organiclight emitting members 70 are formed in the depressions by deposition or inkjet printing following a masking. The organiclight emitting member 70 preferably has a multi-layered structure. - Next, an organic conductive material is deposited on the
light emitting members 70 to form abuffer layer 804, and ITO or IZO is deposited on thebuffer layer 804 to form acommon electrode 270. - An auxiliary electrode (not shown) made of low resistivity material such as Al may be formed before or after the formation of the
common electrode 270. - As described above, a top emission type organic EL display panel according to this embodiment includes an opaque pixel electrode and a transparent
common electrode 270, and it displays an image on its top surface. Thesupply voltage electrode 112 can be placed on another position under the organiclight emitting member 70. - Next, a bottom emission type organic EL display panel including a transparent pixel electrode and an opaque common electrode for displaying an image on its bottom surface is described in detail with reference to
FIGS. 11-15 . -
FIG. 11 is a layout view of a bottom emission type organic EL display panel according to an embodiment of the present invention andFIGS. 12 and 13 are exemplary sectional views of the display panel shown inFIG. 11 taken along the lines XII-XII′ and XIII-XIII′, respectively. - As shown in
FIGS. 11-13 , a structure of an organic EL display panel according to this embodiment is similar to that shown inFIGS. 1-3 . - In detail, a
supply voltage electrode 112 and ablocking layer 111 are sequentially formed on an insulatingsubstrate 110. A polysilicon layer including a plurality of pairs of afirst transistor portion 150 a for a switching TFT and asecond transistor portion 150 b for a driving TFT is formed on theblocking layer 111, and agate insulating layer 140 is formed thereon. Thefirst transistor portion 150 a includes a plurality of impurity regions such as afirst source region 153 a, anintermediate region 152 a, and afirst drain region 155 a, and a pair offirst channel regions 154 a disposed between theimpurity regions second portion 150 b includes asecond source region 153 b, asecond drain region 155 b, and asecond channel region 154 a disposed between thesecond source region 153 b and thesecond drain region 155 a. A plurality ofgate lines 121 includingfirst gate electrodes 123 a and a plurality ofsecond gate electrodes 123 b includingstorage electrodes 133 are formed on thegate insulating layer 140, and a firstinterlayer insulating film 801 is formed thereon. A plurality ofdata lines 171 includingfirst source electrodes 173 a, a plurality ofsecond source electrodes 173 b, and a plurality of first andsecond drain electrodes interlayer insulating film 801, and a secondinterlayer insulating film 802 is formed thereon. A plurality ofpixel electrode 190 and apartition 803 defining a plurality of depressions on thepixel electrodes 190 are formed on the secondinterlayer insulating film 802, and a plurality of organiclight emitting member 70 are formed in the depressions on thepixel electrodes 190. Abuffer layer 804 is formed on the organiclight emitting members 70 and thepartition 803, and acommon electrode 270 is formed on thebuffer layer 804. - The
pixel electrodes 190 are transparent while thecommon electrode 270 is opaque. Thesupply voltage electrode 112 has a plurality of transmitting portions T facing thepixel electrodes 190 for the transmission of light emitted from thelight emitting members 70. In addition, thesupply voltage electrode 112 has a plurality of openings S facing thechannel regions 154 a of thefirst transistor portions 150 a for minimizing the effect of a supply voltage on the switching TFTs. - A manufacturing method of the organic EL display panel shown in
FIGS. 11-13 according to an embodiment of the present invention forms the openings S and the transmitting portions T by patterning thesupply voltage electrode 112 using a photolithography process after depositing thesupply voltage electrode 112. - The area of the transmitting portions T of the planar
supply voltage electrode 112 according to this embodiment can be increased compared with a conventional linear supply voltage electrode. -
FIG. 14 is another exemplary sectional view of the display panel shown inFIG. 11 taken along the lines XIII-XIII′. - Referring to
FIG. 14 , a plurality ofauxiliary members 127 for compensating the connection between thesupply voltage electrode 112 and thesecond source electrodes 173 b are formed on thegate insulating layer 140. Theauxiliary members 127 are connected to thesupply voltage electrode 112 throughcontact holes 147 penetrating thegate insulating layer 140 and theblocking layer 111, and also connected to thesecond source electrodes 173 b throughcontact holes 187 penetrating the firstinterlayer insulating film 801. Theauxiliary members 127 are preferably made of the same layer as the gate lines 121. -
FIG. 15 is another exemplary sectional view of the display panel shown inFIG. 11 taken along the lines XIII-XIII′. - Referring to
FIG. 15 , theblocking layer 111 has a plurality of openings 117 exposing thesupply voltage electrode 112 and a plurality ofcontact holes 187 penetrating the firstinterlayer insulating film 801 and thegate insulating layer 140 and having smaller size than the openings 117 are formed in the openings 117. Thesecond source electrodes 173 b are connected to thesupply voltage electrodes 112 through the contact holes 187. - Although preferred embodiments of the present invention have been described in detail hereinabove, it should be clearly understood that many variations and/or modifications of the basic inventive concepts herein taught which may appear to those skilled in the present art will still fall within the spirit and scope of the present invention, as defined in the appended claims.
Claims (21)
1-16. (canceled)
17. An organic electro-luminescence display (OELD), comprising:
a substrate;
a conductive layer formed on the substrate;
an insulating layer formed on the conductive layer;
a gate wire formed on the insulating layer;
a data wire formed on the insulating layer and insulated from the gate wire and electrically connected to the conductive layer;
a pixel electrode connected to the data wire;
an organic light emitting member formed on the pixel electrode; and
a common electrode formed on the organic light emitting member.
18. The OELD of claim 17 , further comprising a thin film transistor (TFT) having a gate electrode, a source electrode and a drain electrode, wherein the source electrode is connected to the data wire.
19. The OELD of claim 18 , further comprising an auxiliary member electrically connecting the conductive layer and the data wire.
20. The OELD of claim 17 , wherein a supply voltage is applied to the conductive layer.
21. The OELD of claim 17 , wherein the pixel electrode is formed of an opaque material.
22. The OELD of claim 17 , wherein the pixel electrode is formed of a transparent conductive material.
23. The OELD of claim 22 , wherein the conductive layer has a transmitting window corresponding to the pixel electrode.
24. The OELD of claim 18 , wherein the conductive layer has an opening overlapping at least a portion of the TFT.
25. The OELD of claim 17 , further comprising a partition surrounding the organic light emitting member.
26. The OELD of claim 25 , wherein the partition is form of a photosensitive material containing black pigments.
27. An organic electro-luminescence display (OELD), comprising:
a substrate;
a conductive layer formed on the substrate and receiving a supply voltage;
an insulating layer formed on the conductive layer;
a first thin film transistor (TFT) formed on the insulating layer;
a pixel electrode connected to the first TFT;
an organic light emitting member formed on the pixel electrode; and
a common electrode formed on the organic light emitting member.
28. The OELD of claim 27 , further comprising;
a second TFT formed on the insulating layer and connected with the pixel electrode;
a gate wire formed on the first insulating layer; and
a data wire formed on the insulating layer and insulated from the gate wire.
29. The OELD of claim 28 , wherein a portion of the data wire is connected to the conductive layer.
30. The OELD of claim 28 , wherein the first TFT has a first gate electrode, a first source electrode, and a first drain electrode, and the second TFT has a second gate electrode, a second source electrode, and a second drain electrode, and
the first gate electrode is connected to the gate wire, the first source electrode is connected to the data wire, the first drain electrode is connected to the second gate electrode, the second source electrode is connected to the data wire, and the second drain electrode is connected to the pixel electrode.
31. The OELD of claim 30 , further comprising an auxiliary member electrically connecting the conductive layer and the second TFT.
32. The OELD of claim 27 , wherein the pixel electrode is made of an opaque metal.
33. The OELD of claim 27 , wherein the pixel electrode is made of a transparent conductive material.
34. The OELD of claim 33 , wherein the conductive layer has a transmitting window corresponding to the pixel electrode.
35. The OELD of claim 27 , wherein the conductive layer has an opening overlapping at least a portion of the first TFT.
36. The OELD of claim 28 , wherein the conductive layer has a first opening overlapping at least a portion of the first TFT and a second opening overlapping at least a portion of the second TFT.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/204,042 US20050280039A1 (en) | 2002-12-11 | 2005-08-16 | Organic electroluminescence display panel |
US11/557,244 US7710019B2 (en) | 2002-12-11 | 2006-11-07 | Organic light-emitting diode display comprising auxiliary electrodes |
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KR1020020078744A KR100895313B1 (en) | 2002-12-11 | 2002-12-11 | Organic electro-luminescence display panel |
KR2002-78744 | 2002-12-11 | ||
US10/732,280 US6946791B2 (en) | 2002-12-11 | 2003-12-11 | Organic electroluminescence display panel |
US11/204,042 US20050280039A1 (en) | 2002-12-11 | 2005-08-16 | Organic electroluminescence display panel |
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US10/732,280 Continuation US6946791B2 (en) | 2002-12-11 | 2003-12-11 | Organic electroluminescence display panel |
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US11/557,244 Continuation-In-Part US7710019B2 (en) | 2002-12-11 | 2006-11-07 | Organic light-emitting diode display comprising auxiliary electrodes |
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US20050280039A1 true US20050280039A1 (en) | 2005-12-22 |
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US10/732,280 Expired - Lifetime US6946791B2 (en) | 2002-12-11 | 2003-12-11 | Organic electroluminescence display panel |
US11/204,042 Abandoned US20050280039A1 (en) | 2002-12-11 | 2005-08-16 | Organic electroluminescence display panel |
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US10/732,280 Expired - Lifetime US6946791B2 (en) | 2002-12-11 | 2003-12-11 | Organic electroluminescence display panel |
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US (2) | US6946791B2 (en) |
JP (1) | JP4813015B2 (en) |
KR (1) | KR100895313B1 (en) |
CN (2) | CN100487906C (en) |
TW (1) | TWI339543B (en) |
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Also Published As
Publication number | Publication date |
---|---|
CN1551690A (en) | 2004-12-01 |
JP4813015B2 (en) | 2011-11-09 |
CN100487906C (en) | 2009-05-13 |
KR100895313B1 (en) | 2009-05-07 |
TW200421906A (en) | 2004-10-16 |
US6946791B2 (en) | 2005-09-20 |
CN101359681A (en) | 2009-02-04 |
JP2004193129A (en) | 2004-07-08 |
KR20040050945A (en) | 2004-06-18 |
US20040135173A1 (en) | 2004-07-15 |
TWI339543B (en) | 2011-03-21 |
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