US20030118071A1 - Laser array and method of making same - Google Patents
Laser array and method of making same Download PDFInfo
- Publication number
- US20030118071A1 US20030118071A1 US10/028,035 US2803501A US2003118071A1 US 20030118071 A1 US20030118071 A1 US 20030118071A1 US 2803501 A US2803501 A US 2803501A US 2003118071 A1 US2003118071 A1 US 2003118071A1
- Authority
- US
- United States
- Prior art keywords
- optical features
- method recited
- optical
- laser array
- recited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4221—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
- G02B6/4224—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera using visual alignment markings, e.g. index methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3807—Dismountable connectors, i.e. comprising plugs
- G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12102—Lens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3807—Dismountable connectors, i.e. comprising plugs
- G02B6/3873—Connectors using guide surfaces for aligning ferrule ends, e.g. tubes, sleeves, V-grooves, rods, pins, balls
- G02B6/3885—Multicore or multichannel optical connectors, i.e. one single ferrule containing more than one fibre, e.g. ribbon type
Definitions
- the invention relates generally to the field of microlens lens arrays. More particularly, the invention concerns forming fiducial marks on optical articles that require precise alignment in an optical system containing the microlens array.
- Optical systems such as imaging systems, telecommunications devices, micro-optical systems, micro-mechanical systems, etc., are typically constructed of several different lenses and optical articles to deliver the desired optical performance.
- the alignment of each lens and optical article with subsequent lenses and optical articles must be very precise.
- Fiducial marks are often created on the lenses and optical articles outside the optical area to serve as a reference point during alignment. Fiducial marks are particularly important in the case of aspheric lenses and lens arrays where it is difficult to identify the center of the lens during alignment activities. Fiducial marks are also very important for fiber optic arrays and laser arrays where multiple features dictate the need for a shared alignment reference which is located precisely in relation to all the optical features.
- Fiducial marks are well known in the semi-conductor manufacturing industry as an important tool for making multilayer semiconductors.
- the fiducial marks are incorporated as part of the semiconductor circuit plan. Due to the thinness (50-100 micron) of the semiconductor layers used in making multilayer semiconductors, the fiducial marks of multiple semiconductor layers can be viewed simultaneously using a high magnification microscope. The high magnification microscope aids in positioning the fiducial marks of one semiconductor layer over the fiducial marks of another semiconductor layer during the alignment process.
- Forming fiducial marks in optical articles raises special challenges in that optical surfaces are typically relatively thick, often well over a 1000 micron in thickness. This is the case even in a microlens array that has microlenses that are well under a millimeter in diameter.
- the thickness of the microlens array makes it virtually impossible to accurately locate a fiducial mark by looking through the microlens array due to optical limitations.
- the location accuracy of the fiducial mark relative to the optical article is limited because the fiducial mark is displaced by refracted light passing through the microlens array material.
- the thickness of the microlens array limits how close the microscope used for identifying the microlens array can be positioned to the fiducial mark. Consequently, only lower magnification microscopes can be used to look at the fiducial. Therefore, for optical articles, a method of applying a very accurately located fiducial mark on the side opposite to the optical article is needed.
- the fiducial marks as described are protrusions in the shape of a cross or several other variations, located on the same side as the microlenses.
- the protrusions can be semicircular in cross section or another shape as long as the grooves between the protrusions stand out as dark lines when viewed with a reflecting microscope.
- the references recognize that lens characteristics, such as thickness, interfere with the ability to identify underlying fiducial marks. Further, the references show some appreciation for useful geometries of fiducial marks and for fiducial marks molded along with a microlens array. However, neither of the patents show appreciation for fiducial marks applied on the side opposite the optical surfaces in the microlens array. Furthermore, there is no appreciation by either of the references that advantages can be gained with a molded fiducial mark having lens characteristics.
- U.S. Pat. No. 6,096,155 by Harden et al., Aug. 1, 2000, entitled “Method Of Dicing Wafer Level Integrated Multiple Optical Elements” discloses the use of fiducials to aid in alignment of microlenses on wafers during the bonding of multiple wafers together prior to dicing.
- This patent generally teaches making integrated multiple optical elements with features to help control the thickness of adhesives and solders used to bond together the wafers. While effective use of the fiducial marks is described, there is absolutely no mention of ways to improve alignment of fiducial marks on one side with the optical element on the other side of the wafer.
- U.S. Pat. No. 4,598,039 by Fischer et al., Jul. 1, 1986, entitled “Formation Of Features In Optical Material” describes the use of a laser to remove optical material in a controlled fashion.
- the laser can be used directly on the optical material or a layer of ablative absorber material can be put onto the surface of the optical material to enhance the coupling to the laser.
- This ablative technique is well suited to making fiducial type marks for alignment.
- the reference does not show appreciation for how to align the laser with a lens array that is located on the opposite side from the desired location for the fiducial marks.
- a laser array having a plurality of lasers supportedly arranged on a first surface of a transparent medium.
- the transparent medium has a second surface opposite the first surface.
- At least two optical features are arranged on the first surface of the transparent medium adjacent to the plurality of lasers.
- a fiducial mark precisely corresponding to each one of the optical features is formed on the second surface of the transparent medium.
- a method of manufacturing a laser array having a plurality of lasers comprises the steps of providing a medium having a plurality of openings configured for supporting the lasers.
- the openings pass at least partially through a first surface of the medium that also has a second surface opposite the first surface.
- the plurality of lasers is arranged in the openings.
- At least two optical features are formed on the first surface of the medium adjacent the laser array.
- At least a portion of the second surface of the medium is altered.
- a collimated beam of light is directed through the at least two optical features and onto the at least portion of the second surface.
- the optical features focuses the collimated beam of light onto the altered portion of the second surface to form precisely located fiducial marks thereon.
- the present invention has numerous advantages over prior art developments, including: it results in precision locating of fiducial marks; it is a far superior method of aligning optical articles in an array; and, it is significantly easier to implement since all required optical features are formed with the same forming process.
- FIG. 1 a is a perspective view of a prior art lens array with fiducial marks located on the side opposite the lens surfaces;
- FIG. 1 b is a perspective view of an optical system made in accordance with the method of the invention.
- FIG. 2 is an elevated side view of a microlens array set in a transparent medium having optical features formed in accordance with the method of the invention
- FIG. 3 is an elevated side view of a microlens array set in a transparent medium with a fiducial mark forming means arranged for forming fiducial marks on an opposing surface of the transparent medium;
- FIG. 4 is a perspective view of the optical article having generally circular fiducial marks on a surface opposite the optical article;
- FIG. 5 is a perspective view of the optical article of the invention having a generally linear crossed fiducial mark on a surface opposite the optical article,
- FIGS. 6 a and 6 b are perspective views of an alternative embodiment of the invention having a plurality of optical articles on either face of the transparent medium with corresponding fiducial marks on opposing surfaces in the transparent medium opposite the optical article;
- FIG. 7 is a perspective view of an alternative embodiment of the invention comprising a laser array.
- FIG. 8 is a perspective view of another embodiment of the invention comprising a fiber optic array.
- FIG. 1 a A typical prior art microlens array 2 is illustrated in FIG. 1 a for comparative purposes.
- microlens array 2 has multiple microlenses 1 mounted coincidentally on a mounting flange 3 .
- Fiducial marks 7 are located on a surface 5 of mounting flange 3 opposite the surface 6 of microlenses 1 .
- Fiducial marks 7 would either be directly molded onto surface 5 or would be applied after referencing an edge of the optical surface from the opposite side of mounting flange 3 .
- mold misalignment due to clearance in the alignment pins across the molded parting line would limit the accuracy of fiducial mark 7 to approximately 15 microns or more.
- each measurement introduces approximately 2-5 microns of inaccuracy. Since a minimum of three (3) measurements are required to identify an edge of a round lens, the total inaccuracy is a minimum of 6-15 microns to place the fiducial mark 7 . While this inaccuracy is usually acceptable for large optical articles, as the size of optics for applications such as fiber optics shrinks below 1000 micron, the alignment accuracy required shrinks as well. Consequently, it is not uncommon for alignment accuracy of microlenses to be 5 microns or better with some applications calling for 2 micron alignment. Obviously, the accuracy of the fiducial marks 7 must be better than the alignment accuracy required.
- fiducial marks 13 formed in an optical article array, such as refractive lens array 11 using the method of the invention is illustrated.
- fiducial marks 13 are used to align an optical assemblage 8 comprising refractive lens array 11 and laser array 9 .
- fiducial marks 13 on the lens array 11 are precisely located on opposing surface 11 b of lens array 11 .
- each one of a plurality of precision through-holes 15 formed in laser array 9 is alignably centered over a corresponding fiducial mark 13 in lens array 11 .
- This process aligns each of the lasers 9 a in the laser array 9 with a refractive lens 11 a in the refractive lens array 11 .
- the optical assemblage 8 is rigidly affixed typically by potting in a suitable adhesive material. Precise alignment of precision through-holes 15 over the fiducial marks 13 is accomplished with a high power microscope (not shown) often with a computerized vision system linked to a computerized positioning system to automate the process.
- FIGS. 2 and 3 an optical array 10 having accurately located fiducial marks 24 , 28 formed on an opposing surface 30 of a transparent substrate 12 is illustrated.
- optical articles such as microlens array 22 , 32
- mounting surface 14 of transparent substrate 12 that is opposite surface 30 .
- an additional optical feature 20 is formed adjacent to the microlens array 22 , 32 to aid in precisely forming fiducial marks at focal points 24 , 28 .
- focal point 24 (corresponding to a fiducial mark) is then produced with a high intensity collimated beam of light 26 .
- a laser source 27 may be used to produce such high intensity light 26 .
- the additional optical feature 20 receives the collimated beam of light 26 from laser source 27 and precisely focuses it onto opposing surface 30 of the microlens array 10 . It is also important to the invention that prior to forming the fiducial marks 13 at focal points 24 , 28 , surface 30 of the transparent substrate 12 is altered or treated in the area where the fiducial marks 13 are to be formed. The objective of altering or treating surface 30 is to make suitably visible fiducial marks 13 when exposed to the focused high intensity light 26 . Suitable surface altering techniques include dip coating, roughening, spin coating, vacuum coating, metallizing, among others.
- a lens array 40 has a plurality of lenses 41 formed in first surface 46 of transparent medium 44 .
- Generally round refractive lens feature 45 can be used to make a generally round fiducial mark 42 in second surface 48 of transparent medium 44 , opposite first surface 46 of the transparent medium 44 .
- a generally linear lens feature is required (not shown).
- a generally crossed linear refractive lens feature 50 is used to produce a generally crossed-shaped (X-shaped) fiducial mark 52 .
- double-sided optical arrays 58 , 59 are illustrated.
- double-sided optical array 58 has an arrangement of optical articles 60 , 62 on either of opposing surfaces 61 a, 61 b in transparent medium 61 .
- Fiducial marks 69 , 66 are formed on both opposing surfaces 61 a, 61 b, respectively, by repeating the fiducial marking process described hereinabove.
- double-sided optical array 59 has optical features 72 , 80 mounted on opposing surfaces 70 a, 70 b of transparent medium 70 .
- two sets of fiducial marks 78 , 83 are formed only on surface 70 b opposite surface 70 a so the misalignment between the two optical articles 72 , 80 could be easily determined.
- double-sided optical array 58 has a first plurality of lenses 60 matched to a second plurality of lenses 62 , both being mounted in opposing surfaces 61 a, 61 b of transparent medium 61 .
- Two complimentary sets of additional optical features 65 , 68 are formed in either of opposing surfaces 61 a, 61 b, respectively.
- Optical features 65 , 68 are used to form fiducial marks 66 , 69 on the opposing surfaces 61 b, 61 a, respectively.
- optical feature 65 has a generally round shape which forms a generally round shaped fiducial mark 66 on the opposing surface 61 b.
- a generally ring shaped optical feature 68 formed on surface 61 b produces a generally ring shaped fiducial mark 69 .
- fiducial marks 66 , 69 and optical features 68 , 65 can be used as matching reference marks to measure the relative alignment of the optical articles 60 , 62 on surfaces 61 a, 61 b by measuring the relative centering of the fiducial marks 66 , 69 from the optical features 65 , 68 .
- the additional optical lens feature can also be designed for different wavelengths if the fiducial marking is to be done using a light source that operates at a different wavelength than used by the optical array.
- a first plurality of lenses 72 in optical array 59 has additional generally round optical features 74 formed on surface 70 a of transparent substrate 70 .
- Optical features 74 provide precise focusing of the collimated beam of light (FIG. 2) onto opposing surface 70 b which forms a generally round fiducial mark 78 on a treated portion 76 of opposing surface 70 b.
- the second plurality of lenses 80 is formed on opposing surface 70 b of transparent medium 70 .
- generally square fiducial marks 83 surround generally round fiducial marks 78 that have been produced by optical features 74 formed on opposing surface 70 a.
- the alignment of the first plurality of lenses 72 to the second plurality of lenses 80 is preferably determined by measuring the magnitude and direction of the decentering, i.e., the distance from an imaginary centerline passing through the lenses to the fiducial mark.
- a laser array 110 having lasers 90 , includes two additional optical features or cross linear lens 92 that produce fiducial marks 94 in the form of a cross (X) on an opposing surface 96 b.
- Lasers 90 may be arranged in openings in transparent medium 96 or they may be bonded to first surface 96 a of transparent medium 96 .
- a fiber optic array 120 having fiber optic units 100 formed in transparent substrate 106 , includes additional optical features 102 adjacent to fiber optic units 100 that are used to produce fiducial marks 104 on an opposing surface 106 b of the fiber optic array 120 .
- the fiber optic units 100 may be formed in transparent substrate 106 or they may be bonded to first surface 106 a .
- the same process, described above, for forming fiducial marks 94 , 104 is used in the present embodiments of the invention.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/028,035 US20030118071A1 (en) | 2001-12-20 | 2001-12-20 | Laser array and method of making same |
EP02080195A EP1326112A3 (en) | 2001-12-20 | 2002-12-09 | Laser array and method of making same |
JP2002368242A JP2003202409A (ja) | 2001-12-20 | 2002-12-19 | レーザーアレイ及びその製作方法 |
US10/420,244 US6845120B2 (en) | 2001-12-20 | 2003-04-22 | Laser array and method of making same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/028,035 US20030118071A1 (en) | 2001-12-20 | 2001-12-20 | Laser array and method of making same |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/420,244 Division US6845120B2 (en) | 2001-12-20 | 2003-04-22 | Laser array and method of making same |
Publications (1)
Publication Number | Publication Date |
---|---|
US20030118071A1 true US20030118071A1 (en) | 2003-06-26 |
Family
ID=21841196
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/028,035 Abandoned US20030118071A1 (en) | 2001-12-20 | 2001-12-20 | Laser array and method of making same |
US10/420,244 Expired - Lifetime US6845120B2 (en) | 2001-12-20 | 2003-04-22 | Laser array and method of making same |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/420,244 Expired - Lifetime US6845120B2 (en) | 2001-12-20 | 2003-04-22 | Laser array and method of making same |
Country Status (3)
Country | Link |
---|---|
US (2) | US20030118071A1 (ja) |
EP (1) | EP1326112A3 (ja) |
JP (1) | JP2003202409A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6683723B2 (en) * | 2002-06-13 | 2004-01-27 | Eastman Kodak Company | Solid immersion lens array and methods for producing and using solid immersion lens array with fiducial marks |
US20140086540A1 (en) * | 2012-09-26 | 2014-03-27 | Delta Electronics, Inc. | Optical communication module and assembling method thereof |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4107417B2 (ja) | 2002-10-15 | 2008-06-25 | 日東電工株式会社 | チップ状ワークの固定方法 |
JP4283596B2 (ja) * | 2003-05-29 | 2009-06-24 | 日東電工株式会社 | チップ状ワークの固定方法 |
JP4275522B2 (ja) * | 2003-12-26 | 2009-06-10 | 日東電工株式会社 | ダイシング・ダイボンドフィルム |
JP4443962B2 (ja) * | 2004-03-17 | 2010-03-31 | 日東電工株式会社 | ダイシング・ダイボンドフィルム |
WO2007044436A2 (en) * | 2005-10-05 | 2007-04-19 | Massachusetts Institute Of Technology | Ultra-high-q surface-tension-induced monolithically integrated on-chip resonator and associated devices |
US20100019365A1 (en) * | 2006-09-12 | 2010-01-28 | Nitto Denko Corporation | Dicing/die bonding film |
US8101247B2 (en) * | 2007-06-19 | 2012-01-24 | The United States Of America As Represented By The Secretary Of The Navy | Sub-micron laser direct write |
US9593810B2 (en) | 2007-09-20 | 2017-03-14 | Koninklijke Philips N.V. | LED package and method for manufacturing the LED package |
EP2581776A1 (en) | 2011-10-13 | 2013-04-17 | Tyco Electronics Svenska Holdings AB | Optical connector with alignment element, optical unit and assembly method |
WO2014139128A1 (en) * | 2013-03-14 | 2014-09-18 | Source Photonics (Chengdu) Co., Ltd. | Actively aligned detectors for optical and optoelectronic arrays |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5871888A (en) * | 1995-07-11 | 1999-02-16 | Imec Vzw | Method of forming multiple-layer microlenses and use thereof |
US20030231400A1 (en) * | 2002-06-13 | 2003-12-18 | Frosig Peter A. | Solid immersion lens array and methods for producing and using solid immersion lens array with fiducial marks |
US6679635B2 (en) * | 2000-09-27 | 2004-01-20 | Oki Electric Industry Co., Ltd. | Optical device permitting passive alignment of lens element |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4598039A (en) * | 1984-07-02 | 1986-07-01 | At&T Bell Laboratories | Formation of features in optical material |
US5333077A (en) * | 1989-10-31 | 1994-07-26 | Massachusetts Inst Technology | Method and apparatus for efficient concentration of light from laser diode arrays |
US5168401A (en) * | 1991-05-07 | 1992-12-01 | Spectra Diode Laboratories, Inc. | Brightness conserving optical system for modifying beam symmetry |
DE4235549C2 (de) * | 1991-10-21 | 1999-12-09 | Rohm Co Ltd | Gerät zum Justieren einer Lichtquelleneinheit |
DE4418477C1 (de) * | 1994-05-20 | 1995-11-16 | Siemens Ag | Optoelektronische Baugruppe |
US5973844A (en) * | 1996-01-26 | 1999-10-26 | Proxemics | Lenslet array systems and methods |
US5867519A (en) * | 1996-08-07 | 1999-02-02 | Lumonics Inc. | Multiple element, folded beam laser |
JP3155717B2 (ja) * | 1996-10-24 | 2001-04-16 | 日本板硝子株式会社 | マイクロレンズに対するレーザ加工方法 |
US5790310A (en) * | 1996-10-28 | 1998-08-04 | Lucent Technologies Inc. | Lenslet module for coupling two-dimensional laser array systems |
US6515800B1 (en) * | 2001-12-20 | 2003-02-04 | Eastman Kodak Company | Microlens array |
-
2001
- 2001-12-20 US US10/028,035 patent/US20030118071A1/en not_active Abandoned
-
2002
- 2002-12-09 EP EP02080195A patent/EP1326112A3/en not_active Withdrawn
- 2002-12-19 JP JP2002368242A patent/JP2003202409A/ja active Pending
-
2003
- 2003-04-22 US US10/420,244 patent/US6845120B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5871888A (en) * | 1995-07-11 | 1999-02-16 | Imec Vzw | Method of forming multiple-layer microlenses and use thereof |
US6679635B2 (en) * | 2000-09-27 | 2004-01-20 | Oki Electric Industry Co., Ltd. | Optical device permitting passive alignment of lens element |
US20030231400A1 (en) * | 2002-06-13 | 2003-12-18 | Frosig Peter A. | Solid immersion lens array and methods for producing and using solid immersion lens array with fiducial marks |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6683723B2 (en) * | 2002-06-13 | 2004-01-27 | Eastman Kodak Company | Solid immersion lens array and methods for producing and using solid immersion lens array with fiducial marks |
US20140086540A1 (en) * | 2012-09-26 | 2014-03-27 | Delta Electronics, Inc. | Optical communication module and assembling method thereof |
US9011024B2 (en) * | 2012-09-26 | 2015-04-21 | Delta Electronics, Inc. | Optical communication module and assembling method thereof |
Also Published As
Publication number | Publication date |
---|---|
EP1326112A3 (en) | 2004-04-14 |
US6845120B2 (en) | 2005-01-18 |
JP2003202409A (ja) | 2003-07-18 |
US20030207479A1 (en) | 2003-11-06 |
EP1326112A2 (en) | 2003-07-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6765603B2 (en) | Method of forming fiducial marks on a micro-sized article | |
US6104690A (en) | Integrated optical apparatus and associated methods | |
US6845120B2 (en) | Laser array and method of making same | |
US6515800B1 (en) | Microlens array | |
US6587274B1 (en) | Double-sided microlens array and method of manufacturing same | |
US6748145B2 (en) | Fiber optic array and method of making same | |
US8153957B2 (en) | Integrated optical imaging systems including an interior space between opposing substrates and associated methods | |
JP4221513B2 (ja) | 集積型ビーム整形器およびその使用方法 | |
US20080136955A1 (en) | Integrated camera and associated methods | |
WO1998013825A2 (en) | Integrated optical head apparatus and associated methods | |
US6594084B1 (en) | Method and manufacturing a precisely aligned microlens array | |
US20070110361A1 (en) | Wafer level integration of multiple optical elements | |
US6379777B1 (en) | Die and production method thereof, glass substrate and production method thereof and method of forming pattern on the glass substrate | |
US10014657B2 (en) | Laser-machined optical components and related methods for pick and bond assembly | |
JP4219677B2 (ja) | 光学装置の製造方法 | |
US20240019609A1 (en) | Forming an optical system | |
US8059345B2 (en) | Integrated micro-optical systems |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: EASTMAN KODAK COMPANY, NEW YORK Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BORDER, JOHN;BERNEGGER, SUSAN H.;PULVER, JOHN C.;AND OTHERS;REEL/FRAME:012417/0147 Effective date: 20011219 |
|
AS | Assignment |
Owner name: CITICORP NORTH AMERICA, INC., AS AGENT, NEW YORK Free format text: SECURITY INTEREST;ASSIGNORS:EASTMAN KODAK COMPANY;PAKON, INC.;REEL/FRAME:028201/0420 Effective date: 20120215 |
|
AS | Assignment |
Owner name: WILMINGTON TRUST, NATIONAL ASSOCIATION, AS AGENT, MINNESOTA Free format text: PATENT SECURITY AGREEMENT;ASSIGNORS:EASTMAN KODAK COMPANY;PAKON, INC.;REEL/FRAME:030122/0235 Effective date: 20130322 Owner name: WILMINGTON TRUST, NATIONAL ASSOCIATION, AS AGENT, Free format text: PATENT SECURITY AGREEMENT;ASSIGNORS:EASTMAN KODAK COMPANY;PAKON, INC.;REEL/FRAME:030122/0235 Effective date: 20130322 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |
|
AS | Assignment |
Owner name: BANK OF AMERICA N.A., AS AGENT, MASSACHUSETTS Free format text: INTELLECTUAL PROPERTY SECURITY AGREEMENT (ABL);ASSIGNORS:EASTMAN KODAK COMPANY;FAR EAST DEVELOPMENT LTD.;FPC INC.;AND OTHERS;REEL/FRAME:031162/0117 Effective date: 20130903 Owner name: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE, DELAWARE Free format text: INTELLECTUAL PROPERTY SECURITY AGREEMENT (FIRST LIEN);ASSIGNORS:EASTMAN KODAK COMPANY;FAR EAST DEVELOPMENT LTD.;FPC INC.;AND OTHERS;REEL/FRAME:031158/0001 Effective date: 20130903 Owner name: BARCLAYS BANK PLC, AS ADMINISTRATIVE AGENT, NEW YORK Free format text: INTELLECTUAL PROPERTY SECURITY AGREEMENT (SECOND LIEN);ASSIGNORS:EASTMAN KODAK COMPANY;FAR EAST DEVELOPMENT LTD.;FPC INC.;AND OTHERS;REEL/FRAME:031159/0001 Effective date: 20130903 Owner name: EASTMAN KODAK COMPANY, NEW YORK Free format text: RELEASE OF SECURITY INTEREST IN PATENTS;ASSIGNORS:CITICORP NORTH AMERICA, INC., AS SENIOR DIP AGENT;WILMINGTON TRUST, NATIONAL ASSOCIATION, AS JUNIOR DIP AGENT;REEL/FRAME:031157/0451 Effective date: 20130903 Owner name: BARCLAYS BANK PLC, AS ADMINISTRATIVE AGENT, NEW YO Free format text: INTELLECTUAL PROPERTY SECURITY AGREEMENT (SECOND LIEN);ASSIGNORS:EASTMAN KODAK COMPANY;FAR EAST DEVELOPMENT LTD.;FPC INC.;AND OTHERS;REEL/FRAME:031159/0001 Effective date: 20130903 Owner name: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE, DELA Free format text: INTELLECTUAL PROPERTY SECURITY AGREEMENT (FIRST LIEN);ASSIGNORS:EASTMAN KODAK COMPANY;FAR EAST DEVELOPMENT LTD.;FPC INC.;AND OTHERS;REEL/FRAME:031158/0001 Effective date: 20130903 Owner name: PAKON, INC., NEW YORK Free format text: RELEASE OF SECURITY INTEREST IN PATENTS;ASSIGNORS:CITICORP NORTH AMERICA, INC., AS SENIOR DIP AGENT;WILMINGTON TRUST, NATIONAL ASSOCIATION, AS JUNIOR DIP AGENT;REEL/FRAME:031157/0451 Effective date: 20130903 |
|
AS | Assignment |
Owner name: KODAK AVIATION LEASING LLC, NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: EASTMAN KODAK COMPANY, NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: FAR EAST DEVELOPMENT LTD., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: KODAK PHILIPPINES, LTD., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: KODAK REALTY, INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: FPC, INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: KODAK (NEAR EAST), INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: KODAK IMAGING NETWORK, INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: PAKON, INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: LASER PACIFIC MEDIA CORPORATION, NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: QUALEX, INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: CREO MANUFACTURING AMERICA LLC, NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: KODAK AMERICAS, LTD., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: KODAK PORTUGUESA LIMITED, NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 Owner name: NPEC, INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:JP MORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT;REEL/FRAME:049814/0001 Effective date: 20190617 |
|
AS | Assignment |
Owner name: LASER PACIFIC MEDIA CORPORATION, NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:BARCLAYS BANK PLC;REEL/FRAME:052773/0001 Effective date: 20170202 Owner name: KODAK PHILIPPINES LTD., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:BARCLAYS BANK PLC;REEL/FRAME:052773/0001 Effective date: 20170202 Owner name: QUALEX INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:BARCLAYS BANK PLC;REEL/FRAME:052773/0001 Effective date: 20170202 Owner name: NPEC INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:BARCLAYS BANK PLC;REEL/FRAME:052773/0001 Effective date: 20170202 Owner name: FPC INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:BARCLAYS BANK PLC;REEL/FRAME:052773/0001 Effective date: 20170202 Owner name: FAR EAST DEVELOPMENT LTD., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:BARCLAYS BANK PLC;REEL/FRAME:052773/0001 Effective date: 20170202 Owner name: KODAK REALTY INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:BARCLAYS BANK PLC;REEL/FRAME:052773/0001 Effective date: 20170202 Owner name: KODAK (NEAR EAST) INC., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:BARCLAYS BANK PLC;REEL/FRAME:052773/0001 Effective date: 20170202 Owner name: EASTMAN KODAK COMPANY, NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:BARCLAYS BANK PLC;REEL/FRAME:052773/0001 Effective date: 20170202 Owner name: KODAK AMERICAS LTD., NEW YORK Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:BARCLAYS BANK PLC;REEL/FRAME:052773/0001 Effective date: 20170202 |