US20030001101A1 - Scintillator panel and radiation image sensor - Google Patents
Scintillator panel and radiation image sensor Download PDFInfo
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- US20030001101A1 US20030001101A1 US10/217,628 US21762802A US2003001101A1 US 20030001101 A1 US20030001101 A1 US 20030001101A1 US 21762802 A US21762802 A US 21762802A US 2003001101 A1 US2003001101 A1 US 2003001101A1
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- film
- scintillator
- substrate
- protective
- scintillator panel
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
Definitions
- the present invention relates to a scintillator panel and radiation image sensor which are used for medical X-ray photography or the like.
- a typical radiation detector is one having a structure in which a scintillator panel comprising a scintillator formed on a substrate made of aluminum, glass, fused silica, or the like and an imaging device are cemented together.
- the radiation entering from the substrate side is converted by the scintillator into visible light, which is then detected by the imaging device (see JP7-21560A).
- a scintillator panel comprises (1) a radiation-transmitting substrate, (2) a light reflective metal thin film disposed on the substrate, (3) a protective film covering an entire surface of the reflective metal thin film, and (4) a scintillator deposited on the protective film.
- the protective film has a function to protect the reflective metal thin film against the scintillator.
- the scintillator panel of the present invention since the entire surface of the reflective metal thin film is covered with the protective film, any decomposition of this thin film based on water contained in the scintillator in a small amount can be prevented, and any degradation in function of the reflective metal thin film as a reflecting film can be prevented. Hence, an increased optical output of the scintillator panel can be maintained.
- Another scintillator panel of the present invention comprises (1) a radiation-transmitting substrate, (2) a reflective metal thin film disposed on the substrate, (3) a protective film disposed on the reflective metal thin film, and (4) a scintillator deposited on the protective film at a position except an edge portion thereof.
- the reflective metal thin film transmits radiation and reflects light irradiated from the scintillator, and has a function to protect the reflective metal thin film against the scintillator.
- the reflective film may be directly or indirectly disposed on the substrate.
- the reflective film may be substantially made of a material containing a substance selected from the group consisting of Al, Ag, Cr, Cu, Ni, Ti, Mg, Rh, Pt, and Au.
- the protective film may be an inorganic film like a metal oxide film or an organic film like polyimide.
- the inorganic film may be substantially made of a material containing a substance selected for the group consisting of LiF, MgF 2 , SiO 2 , TiO 2 , Al 2 O 3 , MgO, SiN.
- the metal oxide film may be an oxidized material of the reflective metal thin film.
- the protective film preferably comprises an inorganic film such as SiN and an organic film such as polyimide.
- the scintillator may be covered with an organic film. According to this configuration, the water-vapor resistance of the scintillator can be improved.
- the organic film further covers at least an outer periphery of said protective film.
- the organic film covers over the scintillator and the outer periphery of said protective film and reaches to the surface of the substrate around the protective film.
- the water-vapor resistance of the scintillator can be further improved as compared to a structure in which only the scintillator is covered with an organic film.
- the scintillating material depositing outside the scintillator layer is prevented to contact with the reflective metal thin film.
- this organic film further covers an entire surface of the substrate then it is preferable to further improve the water-vapor resistance as compared to a structure in which only the scintillator and at least part of the substrate surface are covered with an organic film.
- a radiation image sensor according to the present invention is characterized in that an image sensing element is arranged to face the scintillator of the scintillator panel. According to the radiation image sensor of the present invention, since the scintillator panel can maintain an increased optical output, the output of the radiation image sensor can be maintained.
- FIG. 1 is a sectional view of a scintillator panel according to the first embodiment
- FIG. 2 is a sectional view of a radiation image sensor according to the first embodiment
- FIGS. 3 is a sectional view of a scintillator panel according to the second embodiment
- FIG. 4 is a sectional view of a scintillator panel according to the third embodiment
- FIG. 5 is a sectional view of a modification of this embodiment
- FIG. 6 is a sectional view of a scintillator panel according to the fourth embodiment.
- FIG. 7 is a sectional view of a modification to the scintillator panel according to the fourth embodiment, and FIGS. 8 and 9 are sectional views of modifications of this embodiment;
- FIG. 10 is a sectional view of a scintillator panel according to the fifth embodiment.
- FIG. 11 is a sectional view of a radiation image sensor according to the fifth embodiment.
- FIG. 12 is a sectional view of a scintillator panel according to the sixth embodiment, and FIG. 13 is a sectional view of a modification of this embodiment;
- FIG. 14 is a sectional view of a seventh embodiment of the scintillator panel according to the present invention
- FIG. 15 is a sectional view of a seventh embodiment of the radiation image sensor according to the present invention, which is used in this scintillator panel;
- FIG. 16 is a sectional view of an eighth embodiment of the scintillator panel according to the present invention
- FIG. 17 is a sectional view of a ninth embodiment of the scintillator panel according to the present invention.
- FIG. 18 is a sectional constitutional diagram showing a tenth embodiment of the scintillator panel according to the present invention
- FIGS. 19A through 19D are views showing the making process thereof
- FIG. 20 is a detailed explanatory view of the scintillator deposition process
- FIG. 21 is a sectional constitutional diagram showing an eleventh embodiment of the scintillator panel according to the present invention.
- FIGS. 22 and 23 are sectional constitutional diagrams showing a twelfth embodiment of the scintillator panel according to the present invention and an example of modification thereof;
- FIGS. 24 and 25 are sectional constitutional diagrams showing a thirteenth embodiment of the scintillator panel according to the present invention and an example of modification thereof;
- FIGS. 26A through 26C are explanatory views of the making process of the scintillator panel of FIG. 24;
- FIGS. 27A through 27D are sectional constitutional diagrams showing a fourteenth embodiment of the scintillator panel according to the present invention and an example of modification thereof;
- FIGS. 28A through 28C are explanatory views of the making process of the scintillator panel of FIG. 27A;
- FIG. 29 is a sectional constitutional diagram showing a fifteenth embodiment of the scintillator panel according to the present invention, and FIG. 30 is a view showing an example of modification thereof;
- FIGS. 31A through 31E are views showing the making process of the scintillator panel of FIG. 29;
- FIGS. 32 and 33 are sectional constitutional views showing sixteenth and seventeenth embodiments of the scintillator panel according to the present invention.
- FIGS. 34A through 34E are explanatory views of the making process of the scintillator panel of FIG. 33.
- FIGS. 35 through 38 are a front view, a rear view, and sectional views along the XXXVII-XXXVII line and the XXXVIII-XXXVIII line of an eighteenth embodiment of the scintillator panel according to the present invention.
- FIG. 1 is a sectional view of a scintillator panel 1
- FIG. 2 is a sectional view of a radiation image sensor 2 .
- an Ag film 12 as a light-reflecting film is disposed on one surface of an amorphous carbon (a-C) (glassy carbon or glass-like carbon) substrate 10 of the scintillator panel 1 .
- the surface of the Ag film 12 is covered with an SiN film 14 for protecting the Ag film 12 .
- a scintillator 16 with a columnar structure, which converts incident radiation into visible light, is made on the surface of the SiN film 14 .
- Tl-doped CsI is used as the scintillator 16 .
- This scintillator 16 is covered with a polyparaxylylene film 18 together with the substrate 10 .
- the radiation image sensor 2 has a structure in which an image sensing element 20 is bonded to the distal end portion side of the scintillator 16 of the scintillator panel 1 , as shown in FIG. 2.
- an Ag film 12 as a light-reflecting film is formed to a thickness of 150 nm on one surface of a rectangular or circular a-C substrate 10 (thickness: 1 mm) by vacuum deposition.
- An SiN film 14 is formed to a thickness of 200 nm on the Ag film 12 by plasma CVD to cover the entire surface of the Ag film 12 .
- a columnar crystal of Tl-doped CsI is grown (deposited) on the surface of the SiN film 14 by deposition, thereby forming a scintillator 16 having a thickness of 250 ⁇ m.
- CsI that forms the scintillator 16 has high hygroscopicity, and if the scintillator is kept exposed, it absorbs vapor in air and deliquesces.
- a polyparaxylylene film 18 is formed by CVD. That is, the substrate 10 with the scintillator 16 formed is placed in a CVD apparatus, and a polyparaxylylene film 18 is deposited to a thickness of 10 ⁇ m. With the above process, the polyparaxylylene film 18 is formed on the entire surfaces of the scintillator 16 and substrate 10 (the entire substrate surface that is exposed without any scintillator or the like).
- the radiation image sensor 2 is manufactured by bonding the light-receiving portion of the image sensing element (CCD) 20 to the distal end portion side of the scintillator 16 of the completed scintillator panel 1 (FIG. 2).
- the radiation image sensor 2 of this embodiment radiation incident from the substrate 10 side is converted into light by the scintillator 16 and detected by the image sensing element 20 . Since the scintillator panel 1 of the radiation image sensor 2 has the Ag film 12 as a reflective metal thin film, the light incident on the light-receiving portion of the image sensing element 20 can be increased, and a clear image can be detected by the radiation image sensor 2 . In addition, since the Ag film 12 is wholly covered with the SiN film 14 that functions as a protective film for the Ag film 12 , the function for a reflecting film of the Ag film 12 can be prevented from being damaged by decomposition due to corrosion or the like.
- the CsI deposits not only on the region on the SiN film 14 but also deposits outside of the SiN film 14 .
- the outer periphery of the SiN film 14 is covered over the polyparaxylylene film 18 , the CsI which deposits outside of the SiN film 14 cannot intrude into the SiN film 14 and cannot contact with Ag film 12 . So the Ag film 12 is effectually protected against the CsI.
- FIG. 3 is a sectional view of a scintillator panel 3 .
- an Al film 13 serving as a reflecting film is formed on one surface of an a-C substrate 10 of the scintillator panel 3 .
- the surface of the Al film 13 is covered with a polyimide film 22 for protecting the Al film 13 .
- a scintillator 16 with a columnar structure, which converts incident radiation into visible light, is formed on the surface of the polyimide film 22 .
- Tl-doped CsI is used as the scintillator 16 .
- This scintillator 16 is covered with a polyparaxylylene film 18 together with the substrate 10 .
- a radiation image sensor is constructed by bonding an image sensing element to the distal end portion side of the scintillator 16 of the scintillator panel 3 .
- an Al film 13 as a light-reflecting film is formed to a thickness of 150 nm on one surface of a rectangular or circular a-C substrate 10 (thickness: 1 mm) by vacuum deposition.
- a polyimide film 22 is formed to a thickness of 1,000 nm on the Al film 13 by a spin coat process to cover the entire surface of the Al film 13 .
- a columnar crystal of Tl-doped CsI is grown on the surface of the polyimide film 22 by deposition, thereby forming a scintillator 16 having a thickness of 250 ⁇ m.
- CsI that forms the scintillator 16 has high hygroscopicity, and if the scintillator is kept exposed, it absorbs vapor in air and deliquesces.
- the polyparaxylylene film 18 is formed by CVD. That is, the polyparaxylylene film 18 is formed on the entire surfaces of the scintillator 16 and substrate 10 .
- the radiation image sensor is manufactured by bonding the light-receiving portion of an image sensing element (CCD) 20 to the distal end portion side of the scintillator 16 of the completed scintillator panel 3 .
- CCD image sensing element
- the radiation image sensor using the scintillator panel 3 of this embodiment radiation incident from the substrate 10 side is converted into light by the scintillator 16 and detected by the image sensing element 20 . Since the scintillator panel 3 of the radiation image sensor has the Al film 13 as a reflective metal thin film, the light incident on the light-receiving portion of the image sensing element can be increased, and a clear image can be detected by the radiation image sensor. In addition, since the Al film 13 is wholly covered with the polyimide film 22 that functions as a protective film for the Al film 13 , the Al film 13 as a reflecting film can be prevented from being damaged in function by a decomposition due to corrosion or the like.
- FIG. 4 is a sectional view of a scintillator panel 4 .
- an Ag film 12 as a light-reflecting film is formed on one surface of an a-C substrate 10 of the scintillator panel 4 .
- An SiN film 14 for protecting the Ag film 12 is formed on the entire surface of the Ag film 12 .
- the scintillator 16 is formed at a position except the edge portion on the SiN film 14 so that the scintillator 16 located on the outer side is separated from the edge portion of the Ag film 12 .
- Tl-doped CsI is used as the scintillator 16 .
- This scintillator 16 is covered with a polyparaxylylene film 18 together with the substrate 10 .
- a radiation image sensor is constructed by bonding an image sensing element to the distal end portion side of the scintillator 16 of the scintillator panel 4 .
- the radiation image sensor using the scintillator panel 4 of this embodiment radiation incident from the substrate 10 side is converted into light by the scintillator 16 and detected by an image sensing element 20 . Since the scintillator panel 4 of the radiation image sensor has the Ag film 12 as a reflective metal thin film, the light incident on the light-receiving portion of the image sensing element 20 can be increased, and a clear image can be detected by the radiation image sensor. In addition, since the edge portion of the Ag film 12 is separated from the scintillator 16 , the Ag film 12 as a reflecting film can be prevented from being damaged in function by a decomposition due to corrosion or the like.
- the SiN film 14 is formed on the entire surface of the Ag film 12 .
- the SiN film 14 may be formed at a position except the edge portion of the Ag film 12
- the scintillator 16 may be formed at a position except the edge portion of the SiN film 14 .
- the Ag film 12 as a reflecting film can be prevented from being damaged in function by a decomposition due to corrosion or the like.
- FIG. 6 is a sectional view of a scintillator panel 6 .
- an Al film 24 made of an Al film 24 a and Al 2 O 3 film (oxide film) 24 b is formed on one surface of an a-C substrate 10 of the scintillator panel 6 .
- a scintillator 16 with a columnar structure, which converts an incident radiation into visible light, is formed on the Al 2 O 3 film 24 b on the surface of the Al film 24 .
- Tl-doped CsI is used as the scintillator 16 .
- This scintillator 16 is covered with a polyparaxylylene film 18 together with the substrate 10 .
- a radiation image sensor is constructed by bonding an image sensing element to the distal end portion side of the scintillator 16 of the scintillator panel 6 .
- an Al film 24 as a light-reflecting film is formed to a thickness of 150 nm on one surface of a rectangular or circular a-C substrate 10 (thickness: 1 mm) by vacuum deposition. Subsequently, Al is evaporated while supplying oxygen gas, thereby forming an Al 2 O 3 film 24 b having a thickness of 30 nm on the entire surface of the Al film 24 a.
- a columnar crystal of Tl-doped CsI is grown on the surface of the Al 2 O 3 film 24 b by deposition, thereby forming a scintillator 16 having a thickness of 250 ⁇ m.
- CsI that forms the scintillator 16 has high hygroscopicity, and if the scintillator is kept exposed, it absorbs vapor in air and deliquesces.
- a polyparaxylylene film 18 is formed by CVD. That is, the polyparaxylylene film 18 is formed on the entire surfaces of the scintillator 16 and substrate 10 .
- a radiation image sensor is constructed by bonding an image sensing element to the distal end portion side of the scintillator 16 of the scintillator panel 6 .
- the radiation image sensor using the scintillator panel 6 of this embodiment radiation incident from the substrate 10 side is converted into light by the scintillator 16 and detected by an image sensing element 20 . Since the scintillator panel 6 of the radiation image sensor has the Al film 24 a as a reflective metal thin film, the light incident on the light-receiving portion of the image sensing element 20 can be increased, and a clear image can be detected by the radiation image sensor.
- the Al film 24 a is wholly covered with the Al 2 O 3 film 24 b as a protective film for the Al film 24 a , the Al film 24 a as a reflecting film can be prevented from being damaged in function by a decomposition due to corrosion or the like.
- the edge portion of the Ag film 12 is separated from the scintillator 16 , the Ag film 12 as a reflecting film can be prevented from being damaged in function by a decomposition due to corrosion or the like.
- the Al 2 O 3 film 24 b is formed on the entire surface of the Al film 24 a . However, as in a scintillator panel 7 shown in FIG.
- the Al 2 O 3 film 24 b may be formed at a position except the edge portion of the Al film 24 a . Even in this case, since the edge portion of the Al film 24 is separated from the scintillator 16 , the Al film 24 a as a reflecting film can be prevented from being damaged in function by a decomposition due to corrosion or the like.
- an a-C substrate is used.
- a graphite substrate, Al substrate, Be substrate, or glass substrate may be used.
- a polyimide film as a protective film is also preferably formed on the oxide film.
- the Al film can be completely protected by the oxide film and polyimide film.
- an SiN film or polyimide film is used as a protective film.
- a film made of a material containing a substance selected from the group consisting of transparent inorganic films such as LiF, MgF 2 , SiO 2 , Al 2 O 3 , TiO 2 , MgO, and SiN and a transparent organic film such as polyimide may be used.
- a protective film formed from inorganic and organic films may be used, as shown in FIG. 8. That is, in a scintillator panel shown in FIG. 8, an Ag film 12 as a light-reflecting film is formed on one surface of an a-C substrate 10 .
- the surface of the Ag film 12 is covered with the SiN film (inorganic film) 14 for protecting the Ag film 12 , and the surface of the SiN film 14 is covered with a polyimide film (organic film) 22 .
- a scintillator 16 having a columnar structure is formed on the surface of the polyimide film 22 .
- the scintillator 16 is covered with a polyparaxylylene film 18 together with the substrate 10 .
- an Ag film or Al film is used as a reflective metal thin film.
- a film made of a material containing a substance selected from the group consisting of Al, Ag, Cr, Cu, Ni, Ti, Mg, Rh, Pt, and Au may be used.
- two or more reflective metal thin films may be formed by forming, e.g., an Au film on a Cr film.
- the entire surfaces of the scintillator 16 and substrate are covered with the polyparaxylylene film 18 , thereby making the scintillator completely resistant against water vapor.
- the entire surface of the scintillator 16 and at least part of the surface of the substrate 10 are covered with the polyparaxylylene film 18 , as shown in FIG. 9, the water-vapor resistance of the scintillator can be made higher than in a case wherein only the scintillator is covered.
- a scintillator panel 8 has a glass substrate 26 having a flat shape.
- An Al film 13 as a reflecting film is formed to a thickness of 100 nm on one surface of the substrate by vacuum deposition.
- Tl-doped CsI grown by deposition is used for the scintillator 16 .
- the entire surface of the scintillator 16 is covered with a 10- ⁇ m thick polyparaxylylene film (transparent organic film) 18 formed by CVD, together with the substrate 26 .
- a radiation image sensor has a structure in which an image sensing element 20 is bonded to the distal end portion side of the scintillator 16 of the scintillator panel 8 , as shown in FIG. 11.
- the radiation image sensor of this embodiment radiation incident from the substrate 26 side is converted into light by the scintillator 16 and detected by the image sensing element 20 . Since the scintillator panel 8 of the radiation image sensor has the Al film 13 as a reflecting film, the light incident on the light-receiving portion of the image sensing element 20 can be increased, and a clear image can be detected by the radiation image sensor.
- the substrate used for the scintillator panel 8 is preferably made thin to increase the radiation transmittance.
- a glass substrate is used, a given rigidity can be ensured as compared to an Al substrate or a-C substrate even when the panel size is increased as in a scintillator panel used for a radiation image sensor for chest. For this reason, any deflection of the substrate can be prevented in forming a scintillator on the glass substrate. Hence, the scintillator can easily be formed on the substrate, and the quality of the formed scintillator can be maintained.
- Pyrex glass is preferably used because of its cost and a small content of radiation absorbing component.
- a scintillator panel 9 has a glass substrate 26 having a flat shape.
- a Cr film 28 as a reflecting film is formed to a thickness of 100 nm on one surface of the substrate by vacuum deposition.
- An Au film 30 is formed on the surface of the Cr film 28 , and a 250- ⁇ m thick scintillator 16 with a columnar structure is formed on the surface of the Au film 30 .
- Tl-doped CsI grown by deposition is used as the scintillator 16 .
- a radiation image sensor has a structure in which an image sensing element 20 is bonded to the distal end portion side of the scintillator 16 of the scintillator panel 9 .
- the reflecting film of the scintillator panel according to this embodiment is formed from the Cr film 28 with good adhesion to the glass substrate and the Au film 30 with good bonding to Cr, the reflecting film can have high stability.
- a film made of a material containing a substance selected from the group consisting of Al, Ag, Cr, Cu, Ni, Ti, Mg, Rh, Pt, and Au may be used as a reflective metal thin film.
- FIG. 14 is a sectional view of the scintillator panel 1 a of the seventh embodiment
- FIG. 15 is a sectional view of the radiation image sensor 2 a which is used in the scintillator panel 1 a.
- a polyimide intermediate film 31 is disposed on one surface of the amorphous carbon (a-C) (glassy carbon or glass-like carbon) substrate 10 of the scintillator panel 1 a by adhesion, and a metal thin film 12 which functions as a light-reflecting film is formed on the surface of this intermediate film 31 by adhesion.
- This metal thin film is manufactured from Al, for example.
- the surface of this metal thin film 12 is covered by a polyimide protective film 34 for protecting the metal thin film 12 .
- the metal thin film 12 is sandwiched between, and thus sealed by, the intermediate film 31 and the protective film 34 to which it is adhered.
- the structure of the scintillator 16 is such that a large number of columnar crystals stand grouped together on the protective film 34 .
- a Tl-doped CsI is used in the scintillator 16 .
- This scintillator 16 , as well as the substrate 10 is covered with a polyparaxylylene moisture-resistant protective film 18 .
- the radiation image sensor 2 has a configuration in which the light-receiving surface of an image-sensing element 20 is affixed to the side of the scintlillator panel 1 a on which the scintillator 16 is formed.
- the metal thin film 12 which functions as a light-reflecting film is formed on the surface of this intermediate film 31 at a thickness of 150 nm by vacuum deposition.
- the polyimide constituting the intermediate film 31 has a good affinity with the Al metal thin film 12 , and hence, the metal thin film 12 becomes adhered to the intermediate film 31 . Since the intermediate film 31 is also adhered to the substrate 10 , peeling away of the metal thin film 12 from the substrate 10 can be effectively prevented.
- a large number of Tl-doped CsI columnar crystals are grown (accumulated) by deposition on the surface of the protective film 34 so as to stand grouped together, thereby forming the scintillator 16 at a thickness of 250 ⁇ m.
- the CsI that forms the scintillator 16 has high hygroscopicity, and if left exposed, absorbs vapor in the air and deliquesces.
- the polyparaxylylene moisture-resistant protective film 18 is formed by CVD. That is, the substrate 10 on which the scintillator 16 is formed is inserted into a CVD device, and the moisture-resistant protective film 18 is formed at a thickness of 10 m.
- this moisture-resistant protective film 18 is described in detail in International Publication No. WO99/66351.
- the polyparaxylylene moisture-resistant protective film 18 is formed on substantially the entire surface of the scintillator 16 and the substrate 10 , or in other words, substantially the entire surface of the substrate that is exposed and does not have a scintillator or the like formed thereon.
- the protective film 18 is not formed at positions corresponding to the support protrusions of a target-support element each of which supports the substrate during CVD process.
- substantially the entire surface means almost entire surfaces except these portions.
- the radiation image sensor 2 a is made by disposing the light-receiving portion of an image sensing element (CCD) 20 to face the distal end side of the scintillator 16 of the completed scintillator panel 1 a and bonding them (see FIG. 15).
- CCD image sensing element
- the radiation image sensor 2 a of this embodiment radiation which enters from the substrate 10 side is converted into light by the scintillator 16 and detected by the image sensing element 20 . Since the light-reflecting metal thin film 12 is provided in the scintillator panel 1 a comprising the radiation image sensor 2 , the amount of light incident on the light-receiving portion of the image-sensing element 20 can be increased, and the image detected by the radiation image sensor 2 can be made clearer.
- the metal thin film 12 is adhered to the polyimide intermediate film 31 and the protective film 34 , and thus sandwiched between the two to seal the entire film, damage to the function of the metal thin film 12 as a reflecting film due to deterioration such as corrosion, peeling, or other impairments, can be prevented, and the stability thereof as a reflecting film can be improved.
- FIG. 16 is a sectional view of an eighth embodiment of the scintillator panel in accordance with the present invention.
- This scintillator panel 3 a differs from the first embodiment in that the protective film 34 a does not cover the entire surface of the metal thin film 12 , but rather covers only the central part of the metal thin film 12 .
- the scintillator 16 is formed only on the surface of the protective film 34 a , and thus the metal thin film 12 is completely prevented from contacting the scintillator 16 by the protective film 34 a.
- the scintillator 16 formation part of the metal thin film 12 is sandwiched between, and sealed by, the intermediate film 31 and the protective film 34 a , and hence, damage, peeling, deterioration and the like can be effectively prevented, and the stability of the metal thin film 12 as a reflecting film can be improved.
- FIG. 17 is a sectional view of the ninth embodiment of the scintillator panel in accordance with the present invention.
- This scintillator panel 4 a differs from those of the seventh and eighth embodiments, illustrated in FIGS. 14 and 16, in that a polyparaxylylene film which is the same as the moisture-resistant protective film 18 is used as the intermediate film 31 b and the protective film 34 b .
- the intermediate film 31 b covers the entire substrate 10
- the protective film 34 b covers the metal thin film 12 and the exposed intermediate film 31 b on the periphery of the metal thin film 12 .
- the intermediate film 31 b and the protective film 34 b are formed by CVD, thus forming a satisfactory thin film that is uniform and has no pin holes or the like.
- the metal thin film 12 is sealed, and contact with the outside air and the scintillator 16 which is formed on the protective film 34 b is completely prevented, and thereby, reactions of the metal with scintillator components and moisture can be suppressed.
- the protective film 34 b completely covers the substrate 10 and the metal thin film 12 , and thus even the effects of the scintillator components becoming attached to another location can be suppressed.
- the intermediate film 31 b which is a nonconductor
- the substrate 10 and the metal thin film 12 which have conducting properties
- electrical contact between the substrate 19 and the metal thin film 12 can be prevented, and electric corrosion of the metal thin film 12 can be effectively suppressed.
- the intermediate film 31 b and the protective film 34 b cover the entire substrate 10 ; however, it is sufficient if the metal thin film 12 is formed on the surface of the intermediate film 31 b , and the intermediate film 31 b may be formed on only the formation surface side of the scintillator 16 on the substrate. It is also sufficient if the protective film 34 b is formed on at least the formation surface part of the scintillator 16 , as in the eighth embodiment. However, if a structure such as that of the present embodiment is employed, wherein the intermediate film 31 b and the protective film 34 b cover the entire substrate 10 , sealing is improved, and the formation of the films by CVD is simple, and therefore this structure is preferable.
- FIG. 18 is a sectional view showing this scintillator panel 1 b .
- a metal reflective film 12 is formed on one surface of the radiolucent substrate 10 (made of a material in which the main component is glass, amorphous carbon, or another carbon).
- This metal reflective film 12 is comprised of a material containing one of Al, Ag, Cr, Cu, Ni, Ti, Mg, or Rh.
- a protective organic film 14 is formed so as to envelop the substrate 10 from above the metal reflective film 12 .
- This protective organic film 14 is made, for example, from polyparaxylylene.
- a scintillator 16 which converts into visible light incident radiation that has passed through the substrate 10 is formed on the portion of the surface where the metal reflective film 12 and the protective organic film 14 are laminated.
- a Tl-doped CsI for example, is used in this scintillator 16 .
- the CsI has a configuration in which a large number of needle crystals stand grouped together.
- This scintillator 16 , as well as the substrate 10 is covered by a moisture-proof organic film 18 made of polyparaxylylene.
- FIGS. 18, 19A through 19 D, and 20 the making process of this scintillator panel 1 b will be explained with reference to FIGS. 18, 19A through 19 D, and 20 .
- a rectangular or circular substrate 10 (thickness: 1 mm) is prepared (see FIG. 19A), and the metal reflective film 12 is formed on a surface thereof at a thickness of 150 nm by vacuum deposition (see FIG. 19B).
- the polyparaxylylene protective organic film 14 is formed on the metal reflective film 12 by CVD.
- the substrate 10 with the metal reflective film 12 deposited thereon is inserted into a CVD device, whereby the moisture-proof organic film 12 is formed over the entire surface of the substrate 10 at a thickness of 10 ⁇ m.
- the metal reflective film 12 is covered, and the polyparaxylylene protective organic film 14 is formed covering substantially the entire substrate 10 , from the periphery of the metal reflective film 12 to the side walls and moreover to the rear surface thereof (see FIG. 19C).
- This organic film making method is described in detail in International Publication No. WO99/66351.
- the scintillator 16 can be selectively formed in a substantially predetermined area. It is conceivable that the scintillator components that pass through the opening 201 , that is, one part of the CsI component, pass through the gap between the protective organic film 14 and the floor surface of the cavity portion 200 x , thus becoming attached to the protective organic film 14 on the side wall of the substrate 10 ; however, these components almost never reach the protective organic film 14 on the rear surface side of the substrate 10 . If a cover plate 300 is disposed on the rear surface of the substrate 10 to cover the rear surface of the substrate 10 , attachment to this rear surface can be completely prevented, and it is therefore preferable to provide this cover plate 300 .
- the CsI which forms this scintillator 16 has high hygroscopicity, and if left exposed, absorbs vapor in the air and deliquesces. In order to prevent this, the scintillator 16 is further covered by a polyparaxylylene moisture-proof organic film 18 (thickness: 10 ⁇ m), thereby completing the scintillator panel 1 b illustrated in FIG. 18.
- This moisture-proof organic film 18 may be formed using the same making method as for the protective organic film 14 .
- the protective organic film 14 covering the metal reflective film 12 does not only cover the metal reflective film 12 , but also covers the substrate 10 from the periphery of the metal reflective film 12 to the side wall parts and furthermore to the rear surface thereof. Therefore, even when scintillator components which have passed through the opening 201 become attached to the protective organic film 14 , these scintillator components can be securely prevented from penetrateing between the protective organic film 14 and the substrate 10 to reach the metal reflective film 12 . Thus, deterioration of the metal reflective film 12 can be suppressed, and the durability thereof can be improved. Moreover, peeling of the protective organic film 14 can be securely prevented.
- the scintillator 16 is disposed facing the opposite side to the radiation entrance side, and the image-sensing element, television camera and so on are disposed and used on the scintillator 16 side.
- Radiation enters the scintillator panel 1 b from the direction of arrow A, penetrates the moisture-resistant protective film 14 , protective organic film 14 , substrate 10 , metal reflective film 12 , and protective organic film 14 in succession, and reaches the scintillator 16 .
- the radiation is absorbed by the scintillator 16 and emitted as visible light.
- the light directed toward the substrate 10 side passes through the transparent protective organic film 14 , and is thereafter reflected by the metal reflective film 12 to return to the scintillator 16 side.
- the bulk of the light emitted from the scintillator 16 passes through the moisture-resistant protective film 14 and is radiated in the direction of arrow B.
- this optical image is captured, whereby an image signal corresponding to a radiographic image can be obtained.
- This protective organic film 14 does not have to cover the entire rear surface of the substrate 10 ; it is sufficient if the protective organic film 14 covers the side wall part and extends to the edges of the rear surface side, as does the protective organic film 14 a in the eleventh embodiment, shown in FIG. 21. In this case, even if scintillator components become attached to the rear surface part of the substrate 10 which is exposed during the deposition of the scintillator 16 , the protective organic film 14 a becomes adhered to the side wall of the substrate 10 such that penetrating between the protective organic film 14 a and the substrate 10 becomes difficult. Furthermore, the scintillator components are covered and encapsulated by the moisture-resistant organic film 14 in a subsequent procedure, and thus undergo no further movement, meaning that deterioration of the metal reflective film 12 can be suppressed.
- FIGS. 22 and 23 are sectional views showing the twelfth embodiment of the scintillator panel according to the present invention and an example of a modification thereof respectively. These embodiments differ from the tenth and eleventh embodiments in that a film made of polyimide is used as the protective organic films 14 b and 14 b′.
- These polyimide protective organic films 14 b and 14 b ′ can be made following the making process of the metal reflective film 12 , shown in FIG. 19B, by applying polyimide resin over the metal reflective film 12 down to the side walls of the substrate 10 at a constant thickness (10 ⁇ m) and causing this resin to harden.
- the protective organic film 14 b when a protective organic film is formed using polyimide resin, the protective organic film 14 b must be formed up to the edges of the side walls and the rear surface of the substrate 10 , as is shown in FIG. 22, and it is preferable that the protective organic film 14 b ′ be formed over the rear surface edges, as is shown in FIG. 23.
- FIGS. 24 and 25 are sectional views showing the thirteenth embodiment of the scintillator panel according to the present invention and an example of a modification thereof. These embodiments are similar to the twelfth embodiment in that a polyimide protective organic film 14 c is used, but differ in that the protective organic film 14 c comprises two parts: a second protective organic film 141 in the form of a picture frame casing which principally covers the side walls of the substrate 10 ; and a first protective organic film 140 in a substantially planar form, which principally covers the metal reflective film 12 .
- the second protective organic film 141 is formed over the side walls of the substrate 10 from the peripheral edges of the metal reflective film 12 . As is shown in FIG. 24, it is preferable that the second protective organic film 141 extend to the rear surface of the substrate 10 ; however, it is acceptable for this film to extend to the edges of the rear surface of the substrate 10 , as is shown in FIG. 25.
- this scintillator panel 1 e will be explained. This method is identical to the making process for the scintillator panel 1 b illustrated in FIGS. 19A and 19B up to the manufacture of the metal reflective film 12 . Thereafter, polyimide resin is painted onto the side walls of the substrate 10 and the proximal substrate surfaces up to the peripheral edges of the metal reflective film 12 , and then this resin is hardened, thus forming the second protective organic film 141 in a frame shape (see FIG. 26A) .
- the second protective organic film 141 may also be formed by affixing resin in the form of a tape or a film rather than by painting.
- polyimide resin is painted onto the second protective organic film 141 over the metal reflective film 12 and around the periphery there of, and then caused to harden, thus forming the first protective organic film 140 in planar form to cover the metal reflective film 12 (see FIG. 26B).
- a large number of Tl-doped CsI needle crystals are grown by deposition in a predetermined area on the surface of the protective organic film 14 c (actually, the first protective organic film 140 ) over the metal reflective film 12 , and thus the scintillator 16 is formed (see FIG. 26 c ) .
- the scintillator 16 is covered with a moisture-proof organic film 18 made of polyparaxylylene.
- the resins which are formed on the side wall sections and on the metal reflective film can be made to have different qualities and formulae, and it is thus possible to combine them such that each exhibits suitable performance. Furthermore, formation is easier when the resin is painted on than integrated formation, and the shielding ability of the resin can be secured.
- FIGS. 27A through 27D are sectional views showing the fourteenth embodiment of the scintillator panel according to the present invention and an example of modification thereof.
- the order of lamination of the first protective organic film 142 and the second protective organic film 143 is made to be different from that of the thirteenth embodiment. That is, in these embodiments, the second protective organic film 143 covers the peripheral edges of the first protective organic film 142 .
- the second protective organic film 143 it is sufficient for the second protective organic film 143 to extend to the edges of the rear surface of the substrate 10 , but it is preferable that this film extend to the rear surface of the substrate 10 , as shown in FIG. 27B.
- the first protective organic film 142 it is acceptable for the first protective organic film 142 to extend to the side walls of the substrate 10 , as shown in FIG. 27C.
- the second protective organic film 143 it is also acceptable for the second protective organic film 143 to extend to the peripheral edges of the metal reflective film 12 , as shown in FIG. 27D.
- polyimide resin is painted onto the side walls of the substrate 10 and the proximal substrate surfaces up to the peripheral edges of the first protective organic film 142 , and then caused to harden, thus forming the second protective organic film 143 in a frame shape (see FIG. 28B).
- the second protective organic film 143 may be formed by affixing resin molded into the form of a tape or film rather than by painting on the resin.
- a large number of Tl-doped CsI needle crystals are grown by deposition in a predetermined area on the surface of the protective organic film 14 d (actually the first protective organic film 142 ) over the metal reflective film 12 , thus forming the scintillator 16 (see FIG. 28C).
- the scintillator 16 is covered with a moisture-proof organic film 18 made of polyparaxylylene.
- the protective organic film 14 d is formed in two stages, and thus the same effects as those of the thirteenth embodiment may be obtained.
- FIG. 29 is a sectional constitutional diagram showing the fifteenth embodiment of the scintillator panel according to the present invention.
- the metal reflective film 12 is formed on one surface of the radiolucent substrate 10 (made of a material in which the main component is glass, amorphous carbon, or another carbon).
- This metal reflective film 12 is comprised of a material containing one of Al, Ag, Cr, Cu, Ni, Ti, Mg, or Rh.
- a first protective organic film 14 is formed so as to envelop the substrate 10 from above the metal reflective film 12 .
- This first protective organic film 14 is made, for example, from polyparaxylylene.
- a scintillator 16 which converts into visible light incident radiation that has passed through the substrate 10 is formed on the portion of the surface thereof on which the metal reflective film 12 and the first protective organic film 14 are laminated.
- a Tl-doped CsI for example, is used as this scintillator 16 .
- the CsI has a configuration in which a large number of needle crystals stand grouped together.
- a second protective organic film 19 is formed in the shape of a picture frame covering an area extending from the peripheral edges of the top surface of the scintillator 16 to the edges of the rear surface of the substrate 10 .
- This protective organic film 19 is made of polyimide, for example.
- This second protective organic film 19 adheres to the side walls of the scintillator 16 and also adheres to the first protective organic film 10 , thereby covering the surfaces of the substrate 10 on the periphery of the scintillator 16 and the side walls of the substrate 10 from over the first protective organic film 14 .
- the entire scintillator panel 1 g is substantially covered with a polyparaxylylene moisture-proof organic film 18 .
- this scintillator panel 1 g will be explained. First, a rectangular or circular substrate 10 (thickness: 1 mm) is prepared (see FIG. 31A), and a metal reflective film 12 is formed on a surface thereof at a thickness of 150 nm by vacuum deposition (see FIG. 31B).
- a protective organic film 14 made of polyparaxylylene is formed on the metal reflective film 12 by CVD.
- the substrate 10 with the metal reflective film 12 deposited thereon is placed in a CVD device, wherein a moisture-proof film 12 is formed over the entire surface of the substrate 10 at a thickness of 10 ⁇ m.
- a polyparaxylylene protective organic film 14 is formed, covering the metal reflective film 12 and also substantially covering the entire substrate 10 , from the periphery of the substrate reflective film 11 to the side walls thereof, and furthermore to the rear surface thereof (see FIG. 31C).
- the making method for this organic film is described in detail in International Publication No. WO99/66351.
- polyimide tape is wound and fixed around the part extending from the peripheral edges of the top surface of the scintillator 16 , over the exposed wall surfaces of the scintillator 16 and the exposed first protective organic film 14 on the periphery of the scintillator 16 , up to the peripheral edges of the rear surface of the substrate 12 , thus forming the second protective organic film 19 (see FIG. 31E) .
- Polyimide resin which has been molded into sheet form may be used as this tape, as may tape to which an adhesive has been applied, such as Kapton Tape by E. I. du Pont de Nemours and Company.
- the CsI that forms the scintillator 16 has high hygroscopicity, and if left exposed, absorbs vapor in the air and deliquesces.
- the scintillator 16 is covered with a polyparaxylylene moisture-proof organic film 18 (thickness: 10 82 m), thus completing the scintillator panel 1 g as shown in FIG. 29.
- This moisture-proof organic film 18 may be formed by the same making process as the protective organic film 14 .
- this scintillator panel 1 g is disposed such that the scintillator 16 faces the opposite side to the radiation entrance side, and the image-sensing element, television camera and so on are disposed and used on the scintillator 16 side. It goes without saying that an optical system which is not illustrated may be used to lead output images from the scintillator 16 to the image-sensing element, television camera or the like.
- the radiation is absorbed by the scintillator 16 and emitted as visible light.
- the light directed toward the substrate 10 side passes through the transparent protective organic film 14 , and is thereafter reflected by the metal reflective film 12 to return to the scintillator 16 side.
- the bulk of the light emitted from the scintillator 16 passes through the moisture-resistant protective film 14 and is radiated in the direction of arrow B.
- this optical image is captured, and thus an image signal corresponding to a radiographic image can be obtained.
- the side walls of the scintillator panel 1 g of this embodiment are fortified by the second protective organic film 19 , and hence the mechanical strength of this part can be improved.
- These side wall parts are not positioned on the light path of the radiation and the visible light which is converted by the scintillator 16 , and it is therefore possible to increase the thickness of the side wall parts so as to obtain the necessary strength without influencing the radiation characteristic and optical characteristic of the scintillator 16 .
- the substrate 10 part can be made with a large surface area while remaining thin, thereby enabling a combination of a large-sized screen with high resolution and a high S/N ratio.
- annealing processing in which the scintillator 16 is heated following formation, is sometimes performed.
- this annealing processing is possible either before or after the formation process of the second protective organic film 19 (see FIG. 31E).
- the second protective organic film 19 When annealing processing is performed after the second protective organic film 19 is formed, the second protective organic film functions as a moisture-resistant protective film to prevent excess heat from being applied to the first protective organic film 11 during annealing processing, and hence damage to the first protective organic film 14 may be suppressed.
- the second protective organic film 19 requires better heat resistance than the first protective organic film, and polyimide resin is suitable since it has good heat resistance.
- the second protective organic film 19 is not positioned on the light path of the output light from the scintillator 16 . Consequently, it is preferable that the second protective organic film 19 be opaque with respect to the light generated by the scintillator 16 (preferably with 50% transmissivity or less, and more preferably 10% transmissivity or less) .
- the second protective organic film 19 is made opaque in this manner, ambient light passes through the second protective organic film 19 to enter the scintillator 16 , where this ambient light is refracted and reflected, thereby preventing its intrusion into the output image as noise. As a result, an output image with a good S/N ratio can be obtained.
- the second protective organic film 19 does not necessarily have to cover the area extending from the peripheral edges of the rear surface of the substrate 10 to the peripheral edges of the top surface of the scintillator 16 , and it is sufficient if the film 19 covers the sidewalls of the substrate 10 and scintillator 16 and the first protective organic film 14 therebetween, as is shown in FIG. 30. In so doing, the optical output surface may be made larger.
- FIG. 32 is a sectional view showing the sixteenth embodiment of the scintillator panel according to the present invention.
- This scintillator panel 1 h differs from that of the fifteenth embodiment in that a polyimide film is used as the protective organic film 14 h , and this film is not formed up to the rear surface of the substrate 10 .
- This polyimide protective organic film 14 h may be manufactured following the making process of the metal reflective film 12 shown in FIG. 31B by applying polyimide resin over the metal reflective film 12 down to the side walls of the substrate 10 at a constant thickness (10 ⁇ m) and causing this resin to harden.
- the first protective organic film 14 h is formed with heat-resistant polyimide resin, it is difficult to envelop the entire substrate 10 therein, as with the polyparaxylylene first protective organic film 14 in the first embodiment. However, in the annealing processing step to activate the scintillator 16 , damage to the protective organic film 14 h can be suppressed.
- FIG. 33 is a sectional view showing the seventeenth embodiment of the scintillator panel according to the present invention.
- the scintillator panel 1 i of this embodiment differs from the scintillator panel 1 of the second embodiment in that the second protective organic film 19 is formed on the outside of the moisture-resistant protective film 18 .
- the moisture-resistant protective film 18 in this scintillator panel 1 b is formed so as to substantially cover the entire panel from the top surface to the side walls of the scintillator 16 , the surfaces of the first protective organic film 14 on the periphery of the scintillator 16 , and from the side walls to the rear surface of the substrate 10 .
- a second protective organic film 19 is configured in the form of a picture frame, covering the side walls of the scintillator panel 1 i , that is, covering the moisture-resistant protective film 18 from the side walls of the scintillator 16 to the side walls of the substrate 10 .
- the second protective organic film 19 extends to at least the edges of the side walls of the substrate 10 and the scintillator 16 , but it is also acceptable for the film to extend to the rear surface of the substrate 10 or the top surface of the scintillator 16 .
- this scintillator panel 1 i will be explained. This method is identical to the making process for the scintillator panel 1 g illustrated in FIGS. 31A and 31B up to the manufacture of the metal reflective film 12 (FIGS. 34A and 34B) . Thereafter, polyimide resin is painted onto the metal reflective film 12 and the surfaces of the substrate 10 around the periphery of the metal reflective film 12 , and then caused to harden, thereby forming the first protective organic film 14 in planar form, covering the metal reflective film 12 (see FIG. 34C).
- the second protective organic film 19 may be formed by affixing resin molded into the form of a tape or film rather than by painting on the resin.
- FIGS. 35 through 38 are views showing an eighteenth embodiment of the scintillator panel according to the present invention.
- FIG. 35 is a front view of this scintillator panel 1 j seen from the scintillator 16 side
- FIG. 36 is a back view seen from the substrate 10 side
- FIGS. 37 and 38 are sectional views on the XXXVII-XXXVII line and the XXXVIII-XXXVIII line of FIG. 35 respectively.
- This scintillator panel 1 j has the same basic structure as the scintillator panel 1 i of the sixteenth embodiment shown in FIG. 33, but differs therefrom in that the substrate surface and the width of the rear surface part of the second protective organic film 19 j are comparatively larger.
- the laminated structure of the metal reflective film 12 , the first protective organic film 14 , and the scintillator 16 is formed in the central part of the substrate 10 , providing space on the periphery of the scintillator 16 .
- through holes 190 are provided through the substrate 10 . These through holes 190 are provided in the substrate 10 in advance, prior to the formation of the scintillator 16 .
- the scintillator panel 1 j can be fixed by inserting and fixing bolts, screws or the like into these through holes 190 . Since the second protective organic film 19 j protects the subjacent substrate 10 and moisture-resistant organic film 18 , damage thereto during fixing can be suppressed. If the moisture-resistant film 18 were to lie exposed, the moisture-resistant film 18 would be damaged when screws and the like were inserted and tightened, allowing moisture to enter the interior through [the damaged area]. However, since the moisture-resistant organic film 18 is protected by the second protective organic film 19 c , damage is unlikely to occur to the moisture-resistant organic film even when screws and the like are inserted and tightened. In FIG. 37, the scintillator 16 is depicted in a protruding state; however, the second protective organic film 19 j maybe formed thicker than the scintillator 16 in order to strengthen its protecting function.
- the second protective organic film 19 j it is acceptable to form the second protective organic film 19 j so as to cover the entire rear surface of the scintillator panel 1 j . However, in order to obtain a clearer output image, it is preferable not to form the second protective organic film 19 j on the radiographic image input part.
- CsI (Tl) is used as the scintillator 16 .
- the present invention is not limited to this, and CsI (Na), NaI (Ti), LiI (Eu), KI (Tl), or the like may be used.
- the entire surfaces of the scintillator 16 and substrate are covered with the polyparaxylylene film 18 , thereby making the scintillator completely resistant against water vapor.
- the scintillator 16 and at least part of the surface of the substrate are covered with the polyparaxylylene film 18 , as shown in FIG. 13, the water-vapor resistance of the scintillator can be made higher than in a case wherein only the scintillator is covered.
- Polyparaxylylene in the above-described embodiments includes, in addition to polyparaxylylene, polymonochloroparaxylylene, polydichloroparaxylylene, polytetrachloroparaxylylene, polyfluoroparaxylylene, polydimethylparaxylylene, polydiethylparaxylylene, and the like.
- any change in properties of the reflective metal thin film based on water contained in the scintillator in a small amount can be prevented, and the function of the reflective metal thin film as a reflecting film can be prevented from degrading.
- an increased optical output of the scintillator panel can be maintained.
- the scintillator panel can maintain an increased optical output, the output of the radiation image sensor can be maintained.
- the output of the radiation image sensor can be maintained.
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Abstract
An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.
Description
- This is a Continuation-In-Part application of International Patent Application serial No.09/971,943 filed on Oct. 9, 2001 now pending.
- 1. Field of the Invention
- The present invention relates to a scintillator panel and radiation image sensor which are used for medical X-ray photography or the like.
- 2. Related Background Art
- While X-ray sensitive films have conventionally been used in medical and industrial X-ray photography, radiation imaging systems using radiation detectors have been coming into widespread use from the viewpoint of convenience and storability of photographed results. In such a radiation imaging system, pixel data caused by two-dimensional radiation are acquired as an electric signal by a radiation detector, and this signal is processed by a processing unit, so as to be displayed on a monitor.
- Conventionally known as a typical radiation detector is one having a structure in which a scintillator panel comprising a scintillator formed on a substrate made of aluminum, glass, fused silica, or the like and an imaging device are cemented together. In this radiation detector, the radiation entering from the substrate side is converted by the scintillator into visible light, which is then detected by the imaging device (see JP7-21560A).
- Meanwhile, though it is necessary for the scintillator panel to have a sufficiently high optical output in order to attain clear images in a radiation detector, the optical output has not been sufficient in the above-mentioned radiation detector.
- It is an object of the present invention to provide a scintillator panel having an enhanced optical output, and a radiation image sensor using a scintillator panel having an enhanced optical output.
- A scintillator panel according to the present invention comprises (1) a radiation-transmitting substrate, (2) a light reflective metal thin film disposed on the substrate, (3) a protective film covering an entire surface of the reflective metal thin film, and (4) a scintillator deposited on the protective film. And the protective film has a function to protect the reflective metal thin film against the scintillator.
- According to the scintillator panel of the present invention, since the entire surface of the reflective metal thin film is covered with the protective film, any decomposition of this thin film based on water contained in the scintillator in a small amount can be prevented, and any degradation in function of the reflective metal thin film as a reflecting film can be prevented. Hence, an increased optical output of the scintillator panel can be maintained.
- Another scintillator panel of the present invention comprises (1) a radiation-transmitting substrate, (2) a reflective metal thin film disposed on the substrate, (3) a protective film disposed on the reflective metal thin film, and (4) a scintillator deposited on the protective film at a position except an edge portion thereof. The reflective metal thin film transmits radiation and reflects light irradiated from the scintillator, and has a function to protect the reflective metal thin film against the scintillator.
- According to this scintillator panel, since the scintillator and reflective metal thin film are separated, any decomposition of this film based on water contained in the scintillator in a small amount can be prevented, and any degradation in function of the reflective metal thin film as a reflecting film can be prevented. Hence, an increased optical output of the scintillator panel can be maintained.
- The reflective film may be directly or indirectly disposed on the substrate. And the reflective film may be substantially made of a material containing a substance selected from the group consisting of Al, Ag, Cr, Cu, Ni, Ti, Mg, Rh, Pt, and Au.
- The protective film may be an inorganic film like a metal oxide film or an organic film like polyimide. The inorganic film may be substantially made of a material containing a substance selected for the group consisting of LiF, MgF2, SiO2, TiO2, Al2O3, MgO, SiN. Or the metal oxide film may be an oxidized material of the reflective metal thin film.
- The protective film preferably comprises an inorganic film such as SiN and an organic film such as polyimide.
- The scintillator may be covered with an organic film. According to this configuration, the water-vapor resistance of the scintillator can be improved.
- Preferably, the organic film further covers at least an outer periphery of said protective film. According to this configuration, the organic film covers over the scintillator and the outer periphery of said protective film and reaches to the surface of the substrate around the protective film. Whereby the water-vapor resistance of the scintillator can be further improved as compared to a structure in which only the scintillator is covered with an organic film. And the scintillating material depositing outside the scintillator layer is prevented to contact with the reflective metal thin film.
- If this organic film further covers an entire surface of the substrate then it is preferable to further improve the water-vapor resistance as compared to a structure in which only the scintillator and at least part of the substrate surface are covered with an organic film.
- A radiation image sensor according to the present invention is characterized in that an image sensing element is arranged to face the scintillator of the scintillator panel. According to the radiation image sensor of the present invention, since the scintillator panel can maintain an increased optical output, the output of the radiation image sensor can be maintained.
- FIG. 1 is a sectional view of a scintillator panel according to the first embodiment, and FIG. 2 is a sectional view of a radiation image sensor according to the first embodiment;
- FIGS.3 is a sectional view of a scintillator panel according to the second embodiment;
- FIG. 4 is a sectional view of a scintillator panel according to the third embodiment, and FIG. 5 is a sectional view of a modification of this embodiment;
- FIG. 6 is a sectional view of a scintillator panel according to the fourth embodiment;
- FIG. 7 is a sectional view of a modification to the scintillator panel according to the fourth embodiment, and FIGS. 8 and 9 are sectional views of modifications of this embodiment;
- FIG. 10 is a sectional view of a scintillator panel according to the fifth embodiment;
- FIG. 11 is a sectional view of a radiation image sensor according to the fifth embodiment;
- FIG. 12 is a sectional view of a scintillator panel according to the sixth embodiment, and FIG. 13 is a sectional view of a modification of this embodiment;
- FIG. 14 is a sectional view of a seventh embodiment of the scintillator panel according to the present invention, and FIG. 15 is a sectional view of a seventh embodiment of the radiation image sensor according to the present invention, which is used in this scintillator panel;
- FIG. 16 is a sectional view of an eighth embodiment of the scintillator panel according to the present invention, and FIG. 17 is a sectional view of a ninth embodiment of the scintillator panel according to the present invention;
- FIG. 18 is a sectional constitutional diagram showing a tenth embodiment of the scintillator panel according to the present invention, FIGS. 19A through 19D are views showing the making process thereof, and FIG. 20 is a detailed explanatory view of the scintillator deposition process;
- FIG. 21 is a sectional constitutional diagram showing an eleventh embodiment of the scintillator panel according to the present invention;
- FIGS. 22 and 23 are sectional constitutional diagrams showing a twelfth embodiment of the scintillator panel according to the present invention and an example of modification thereof;
- FIGS. 24 and 25 are sectional constitutional diagrams showing a thirteenth embodiment of the scintillator panel according to the present invention and an example of modification thereof;
- FIGS. 26A through 26C are explanatory views of the making process of the scintillator panel of FIG. 24;
- FIGS. 27A through 27D are sectional constitutional diagrams showing a fourteenth embodiment of the scintillator panel according to the present invention and an example of modification thereof;
- FIGS. 28A through 28C are explanatory views of the making process of the scintillator panel of FIG. 27A;
- FIG. 29 is a sectional constitutional diagram showing a fifteenth embodiment of the scintillator panel according to the present invention, and FIG. 30 is a view showing an example of modification thereof;
- FIGS. 31A through 31E are views showing the making process of the scintillator panel of FIG. 29;
- FIGS. 32 and 33 are sectional constitutional views showing sixteenth and seventeenth embodiments of the scintillator panel according to the present invention;
- FIGS. 34A through 34E are explanatory views of the making process of the scintillator panel of FIG. 33; and
- FIGS. 35 through 38 are a front view, a rear view, and sectional views along the XXXVII-XXXVII line and the XXXVIII-XXXVIII line of an eighteenth embodiment of the scintillator panel according to the present invention.
- We will describe some preferred embodiments of the present invention hereinafter. To facilitate the comprehension of the explanation, the same reference numerals denote the same parts, where possible, throughout the drawings, and a repeated explanation will be omitted.
- The first embodiment of the present invention will be described below with reference to FIGS. 1 and 2. FIG. 1 is a sectional view of a
scintillator panel 1, and FIG. 2 is a sectional view of aradiation image sensor 2. - As shown in FIG. 1, an
Ag film 12 as a light-reflecting film (reflective metal thin film) is disposed on one surface of an amorphous carbon (a-C) (glassy carbon or glass-like carbon)substrate 10 of thescintillator panel 1. The surface of theAg film 12 is covered with anSiN film 14 for protecting theAg film 12. Ascintillator 16 with a columnar structure, which converts incident radiation into visible light, is made on the surface of theSiN film 14. Tl-doped CsI is used as thescintillator 16. Thisscintillator 16 is covered with apolyparaxylylene film 18 together with thesubstrate 10. - The
radiation image sensor 2 has a structure in which animage sensing element 20 is bonded to the distal end portion side of thescintillator 16 of thescintillator panel 1, as shown in FIG. 2. - The making process of the
scintillator panel 1 will be described. First, anAg film 12 as a light-reflecting film is formed to a thickness of 150 nm on one surface of a rectangular or circular a-C substrate 10 (thickness: 1 mm) by vacuum deposition. AnSiN film 14 is formed to a thickness of 200 nm on theAg film 12 by plasma CVD to cover the entire surface of theAg film 12. - A columnar crystal of Tl-doped CsI is grown (deposited) on the surface of the
SiN film 14 by deposition, thereby forming ascintillator 16 having a thickness of 250 μm. CsI that forms thescintillator 16 has high hygroscopicity, and if the scintillator is kept exposed, it absorbs vapor in air and deliquesces. To prevent this deliquescence, apolyparaxylylene film 18 is formed by CVD. That is, thesubstrate 10 with thescintillator 16 formed is placed in a CVD apparatus, and apolyparaxylylene film 18 is deposited to a thickness of 10 μm. With the above process, thepolyparaxylylene film 18 is formed on the entire surfaces of thescintillator 16 and substrate 10 (the entire substrate surface that is exposed without any scintillator or the like). - The
radiation image sensor 2 is manufactured by bonding the light-receiving portion of the image sensing element (CCD) 20 to the distal end portion side of thescintillator 16 of the completed scintillator panel 1 (FIG. 2). - According to the
radiation image sensor 2 of this embodiment, radiation incident from thesubstrate 10 side is converted into light by thescintillator 16 and detected by theimage sensing element 20. Since thescintillator panel 1 of theradiation image sensor 2 has theAg film 12 as a reflective metal thin film, the light incident on the light-receiving portion of theimage sensing element 20 can be increased, and a clear image can be detected by theradiation image sensor 2. In addition, since theAg film 12 is wholly covered with theSiN film 14 that functions as a protective film for theAg film 12, the function for a reflecting film of theAg film 12 can be prevented from being damaged by decomposition due to corrosion or the like. Furthermore, when thescintillator 16 is deposited the CsI deposits not only on the region on theSiN film 14 but also deposits outside of theSiN film 14. According to the present invention, the outer periphery of theSiN film 14 is covered over thepolyparaxylylene film 18, the CsI which deposits outside of theSiN film 14 cannot intrude into theSiN film 14 and cannot contact withAg film 12. So theAg film 12 is effectually protected against the CsI. - The second embodiment of the present invention will be described next. In the second embodiment to be described below, the same reference numerals as in the
scintillator panel 1 andradiation image sensor 2 of the first embodiment denote the same components in the second embodiment. - FIG. 3 is a sectional view of a
scintillator panel 3. As shown in FIG. 3, anAl film 13 serving as a reflecting film is formed on one surface of ana-C substrate 10 of thescintillator panel 3. The surface of theAl film 13 is covered with apolyimide film 22 for protecting theAl film 13. Ascintillator 16 with a columnar structure, which converts incident radiation into visible light, is formed on the surface of thepolyimide film 22. Tl-doped CsI is used as thescintillator 16. Thisscintillator 16 is covered with apolyparaxylylene film 18 together with thesubstrate 10. - A radiation image sensor is constructed by bonding an image sensing element to the distal end portion side of the
scintillator 16 of thescintillator panel 3. - The making process of the
scintillator panel 3 will be described. First, anAl film 13 as a light-reflecting film is formed to a thickness of 150 nm on one surface of a rectangular or circular a-C substrate 10 (thickness: 1 mm) by vacuum deposition. Apolyimide film 22 is formed to a thickness of 1,000 nm on theAl film 13 by a spin coat process to cover the entire surface of theAl film 13. - A columnar crystal of Tl-doped CsI is grown on the surface of the
polyimide film 22 by deposition, thereby forming ascintillator 16 having a thickness of 250 μm. CsI that forms thescintillator 16 has high hygroscopicity, and if the scintillator is kept exposed, it absorbs vapor in air and deliquesces. To prevent this deliquescence, thepolyparaxylylene film 18 is formed by CVD. That is, thepolyparaxylylene film 18 is formed on the entire surfaces of thescintillator 16 andsubstrate 10. - The radiation image sensor is manufactured by bonding the light-receiving portion of an image sensing element (CCD)20 to the distal end portion side of the
scintillator 16 of the completedscintillator panel 3. - According to the radiation image sensor using the
scintillator panel 3 of this embodiment, radiation incident from thesubstrate 10 side is converted into light by thescintillator 16 and detected by theimage sensing element 20. Since thescintillator panel 3 of the radiation image sensor has theAl film 13 as a reflective metal thin film, the light incident on the light-receiving portion of the image sensing element can be increased, and a clear image can be detected by the radiation image sensor. In addition, since theAl film 13 is wholly covered with thepolyimide film 22 that functions as a protective film for theAl film 13, theAl film 13 as a reflecting film can be prevented from being damaged in function by a decomposition due to corrosion or the like. - The third embodiment of the present invention will be described next. In the third embodiment to be described below, the same reference numerals as in the
scintillator panel 1 andradiation image sensor 2 of the first embodiment denote the same components in the third embodiment. - FIG. 4 is a sectional view of a
scintillator panel 4. As shown in FIG. 4, anAg film 12 as a light-reflecting film is formed on one surface of ana-C substrate 10 of thescintillator panel 4. AnSiN film 14 for protecting theAg film 12 is formed on the entire surface of theAg film 12. Ascintillator 16 with a columnar structure, which converts an incident radiation into visible light, is formed on the surface of theSiN film 14. - The
scintillator 16 is formed at a position except the edge portion on theSiN film 14 so that thescintillator 16 located on the outer side is separated from the edge portion of theAg film 12. Tl-doped CsI is used as thescintillator 16. Thisscintillator 16 is covered with apolyparaxylylene film 18 together with thesubstrate 10. - A radiation image sensor is constructed by bonding an image sensing element to the distal end portion side of the
scintillator 16 of thescintillator panel 4. - According to the radiation image sensor using the
scintillator panel 4 of this embodiment, radiation incident from thesubstrate 10 side is converted into light by thescintillator 16 and detected by animage sensing element 20. Since thescintillator panel 4 of the radiation image sensor has theAg film 12 as a reflective metal thin film, the light incident on the light-receiving portion of theimage sensing element 20 can be increased, and a clear image can be detected by the radiation image sensor. In addition, since the edge portion of theAg film 12 is separated from thescintillator 16, theAg film 12 as a reflecting film can be prevented from being damaged in function by a decomposition due to corrosion or the like. - In the
scintillator panel 4 according to the third embodiment, theSiN film 14 is formed on the entire surface of theAg film 12. However, as in ascintillator panel 5 shown in FIG. 5, theSiN film 14 may be formed at a position except the edge portion of theAg film 12, and thescintillator 16 may be formed at a position except the edge portion of theSiN film 14. Even in this case, since the edge portion of theAg film 12 is separated from thescintillator 16, theAg film 12 as a reflecting film can be prevented from being damaged in function by a decomposition due to corrosion or the like. - The fourth embodiment of the present invention will be described next. In the fourth embodiment to be described below, the same reference numerals as in the
scintillator panel 1 andradiation image sensor 2 of the first embodiment denote the same components in the fourth embodiment. - FIG. 6 is a sectional view of a
scintillator panel 6. As shown in FIG. 6, anAl film 24 made of anAl film 24 a and Al2O3 film (oxide film) 24 b is formed on one surface of ana-C substrate 10 of thescintillator panel 6. Ascintillator 16 with a columnar structure, which converts an incident radiation into visible light, is formed on the Al2O3 film 24 b on the surface of theAl film 24. Tl-doped CsI is used as thescintillator 16. Thisscintillator 16 is covered with apolyparaxylylene film 18 together with thesubstrate 10. - A radiation image sensor is constructed by bonding an image sensing element to the distal end portion side of the
scintillator 16 of thescintillator panel 6. - The making process of the
scintillator panel 6 will be described. First, anAl film 24 as a light-reflecting film is formed to a thickness of 150 nm on one surface of a rectangular or circular a-C substrate 10 (thickness: 1 mm) by vacuum deposition. Subsequently, Al is evaporated while supplying oxygen gas, thereby forming an Al2O3 film 24 b having a thickness of 30 nm on the entire surface of theAl film 24 a. - A columnar crystal of Tl-doped CsI is grown on the surface of the Al2O3 film 24 b by deposition, thereby forming a
scintillator 16 having a thickness of 250 μm. CsI that forms thescintillator 16 has high hygroscopicity, and if the scintillator is kept exposed, it absorbs vapor in air and deliquesces. To prevent this deliquescence, apolyparaxylylene film 18 is formed by CVD. That is, thepolyparaxylylene film 18 is formed on the entire surfaces of thescintillator 16 andsubstrate 10. - A radiation image sensor is constructed by bonding an image sensing element to the distal end portion side of the
scintillator 16 of thescintillator panel 6. - According to the radiation image sensor using the
scintillator panel 6 of this embodiment, radiation incident from thesubstrate 10 side is converted into light by thescintillator 16 and detected by animage sensing element 20. Since thescintillator panel 6 of the radiation image sensor has theAl film 24 a as a reflective metal thin film, the light incident on the light-receiving portion of theimage sensing element 20 can be increased, and a clear image can be detected by the radiation image sensor. - In addition, since the
Al film 24 a is wholly covered with the Al2O3 film 24 b as a protective film for theAl film 24 a, theAl film 24 a as a reflecting film can be prevented from being damaged in function by a decomposition due to corrosion or the like. In addition, since the edge portion of theAg film 12 is separated from thescintillator 16, theAg film 12 as a reflecting film can be prevented from being damaged in function by a decomposition due to corrosion or the like. In thescintillator panel 6 according to the fourth embodiment, the Al2O3 film 24 b is formed on the entire surface of theAl film 24 a. However, as in ascintillator panel 7 shown in FIG. 7, the Al2O3 film 24 b may be formed at a position except the edge portion of theAl film 24 a. Even in this case, since the edge portion of theAl film 24 is separated from thescintillator 16, theAl film 24 a as a reflecting film can be prevented from being damaged in function by a decomposition due to corrosion or the like. - In the above-described embodiments, an a-C substrate is used. However, since the substrate only need to pass radiation, a graphite substrate, Al substrate, Be substrate, or glass substrate may be used.
- In the above-described embodiments, when an Al oxide film on the substrate is used as a protective film, a polyimide film as a protective film is also preferably formed on the oxide film. In this case, the Al film can be completely protected by the oxide film and polyimide film.
- In the above-described embodiments, an SiN film or polyimide film is used as a protective film. However, the present invention is not limited to this. A film made of a material containing a substance selected from the group consisting of transparent inorganic films such as LiF, MgF2, SiO2, Al2O3, TiO2, MgO, and SiN and a transparent organic film such as polyimide may be used. Alternatively, a protective film formed from inorganic and organic films may be used, as shown in FIG. 8. That is, in a scintillator panel shown in FIG. 8, an
Ag film 12 as a light-reflecting film is formed on one surface of ana-C substrate 10. The surface of theAg film 12 is covered with the SiN film (inorganic film) 14 for protecting theAg film 12, and the surface of theSiN film 14 is covered with a polyimide film (organic film) 22. Ascintillator 16 having a columnar structure is formed on the surface of thepolyimide film 22. Thescintillator 16 is covered with apolyparaxylylene film 18 together with thesubstrate 10. When a protective film formed from inorganic and organic films is used, as in the scintillator panel shown in FIG. 8, the effect for protecting the light-reflecting film can be further improved. - In the above-described embodiments, an Ag film or Al film is used as a reflective metal thin film. However, a film made of a material containing a substance selected from the group consisting of Al, Ag, Cr, Cu, Ni, Ti, Mg, Rh, Pt, and Au may be used. In addition, two or more reflective metal thin films may be formed by forming, e.g., an Au film on a Cr film.
- In the above-described embodiments, when a film made of a material containing a substance selected from the group consisting of Al, Ag, Cr, Cu, Ni, Ti, Mg, Rh, and Pt is used as a reflective metal thin film, an oxide film thereof can be used as a protective film.
- In the above-described embodiments, the entire surfaces of the
scintillator 16 and substrate (the surface with the scintillator formed and a surface on the opposite side, i.e., the radiation incident surface) are covered with thepolyparaxylylene film 18, thereby making the scintillator completely resistant against water vapor. When the entire surface of thescintillator 16 and at least part of the surface of thesubstrate 10 are covered with thepolyparaxylylene film 18, as shown in FIG. 9, the water-vapor resistance of the scintillator can be made higher than in a case wherein only the scintillator is covered. - The fifth embodiment of the present invention will be described next. In the fifth embodiment to be described below, the same reference numerals as in the
scintillator panels radiation image sensor 2 of the first and second embodiments denote the same components in the fifth embodiment. - As shown in FIG. 10, a
scintillator panel 8 has aglass substrate 26 having a flat shape. AnAl film 13 as a reflecting film is formed to a thickness of 100 nm on one surface of the substrate by vacuum deposition. A 250-μmthick scintillator 16 with a columnar structure, which converts an incident radiation into visible light, is formed on the surface of theAl film 13. Tl-doped CsI grown by deposition is used for thescintillator 16. - The entire surface of the
scintillator 16 is covered with a 10-μm thick polyparaxylylene film (transparent organic film) 18 formed by CVD, together with thesubstrate 26. - A radiation image sensor has a structure in which an
image sensing element 20 is bonded to the distal end portion side of thescintillator 16 of thescintillator panel 8, as shown in FIG. 11. - According to the radiation image sensor of this embodiment, radiation incident from the
substrate 26 side is converted into light by thescintillator 16 and detected by theimage sensing element 20. Since thescintillator panel 8 of the radiation image sensor has theAl film 13 as a reflecting film, the light incident on the light-receiving portion of theimage sensing element 20 can be increased, and a clear image can be detected by the radiation image sensor. - The substrate used for the
scintillator panel 8 is preferably made thin to increase the radiation transmittance. When a glass substrate is used, a given rigidity can be ensured as compared to an Al substrate or a-C substrate even when the panel size is increased as in a scintillator panel used for a radiation image sensor for chest. For this reason, any deflection of the substrate can be prevented in forming a scintillator on the glass substrate. Hence, the scintillator can easily be formed on the substrate, and the quality of the formed scintillator can be maintained. As a type of glass to be used for the glass substrate of this embodiment, Pyrex glass is preferably used because of its cost and a small content of radiation absorbing component. - The sixth embodiment of the present invention will be described next. In the sixth embodiment to be described below, the same reference numerals as in the
scintillator panel 5 and radiation image sensor of the fifth embodiment denote the same components in the sixth embodiment. - As shown in FIG. 12, a
scintillator panel 9 has aglass substrate 26 having a flat shape. ACr film 28 as a reflecting film is formed to a thickness of 100 nm on one surface of the substrate by vacuum deposition. AnAu film 30 is formed on the surface of theCr film 28, and a 250-μmthick scintillator 16 with a columnar structure is formed on the surface of theAu film 30. Tl-doped CsI grown by deposition is used as thescintillator 16. - The entire surface of the
scintillator 16 is covered with a 10-μm thick polyparaxylylene film (transparent organic film) 18 formed by CVD, together with thesubstrate 26. A radiation image sensor has a structure in which animage sensing element 20 is bonded to the distal end portion side of thescintillator 16 of thescintillator panel 9. - Since the reflecting film of the scintillator panel according to this embodiment is formed from the
Cr film 28 with good adhesion to the glass substrate and theAu film 30 with good bonding to Cr, the reflecting film can have high stability. - In the above-described embodiments, a film made of a material containing a substance selected from the group consisting of Al, Ag, Cr, Cu, Ni, Ti, Mg, Rh, Pt, and Au may be used as a reflective metal thin film.
- Next, the seventh embodiment of the present invention will be described. FIG. 14 is a sectional view of the
scintillator panel 1 a of the seventh embodiment, and FIG. 15 is a sectional view of theradiation image sensor 2 a which is used in thescintillator panel 1 a. - As is illustrated in FIG. 14, a polyimide
intermediate film 31 is disposed on one surface of the amorphous carbon (a-C) (glassy carbon or glass-like carbon)substrate 10 of thescintillator panel 1 a by adhesion, and a metalthin film 12 which functions as a light-reflecting film is formed on the surface of thisintermediate film 31 by adhesion. This metal thin film is manufactured from Al, for example. The surface of this metalthin film 12 is covered by a polyimideprotective film 34 for protecting the metalthin film 12. As a result, the metalthin film 12 is sandwiched between, and thus sealed by, theintermediate film 31 and theprotective film 34 to which it is adhered. Ascintillator 16 with a columnar structure, which converts incident radiation into visible light, is formed on the surface of theprotective film 34. In other words, the structure of thescintillator 16 is such that a large number of columnar crystals stand grouped together on theprotective film 34. Further, a Tl-doped CsI is used in thescintillator 16. Thisscintillator 16, as well as thesubstrate 10, is covered with a polyparaxylylene moisture-resistantprotective film 18. - As is shown in FIG. 15, the
radiation image sensor 2 has a configuration in which the light-receiving surface of an image-sensing element 20 is affixed to the side of thescintlillator panel 1 a on which thescintillator 16 is formed. - Next, the making process for the
scintillator panel 1 a will be explained. First, polyimide resin is painted onto one surface of the rectangular or circular a-C substrate 10 (thickness: 1 mm) at a constant thickness (10μm) and caused to harden, thereby becoming adhered to thesubstrate 10 and forming theintermediate film 31 with a flat surface. - The metal
thin film 12 which functions as a light-reflecting film is formed on the surface of thisintermediate film 31 at a thickness of 150 nm by vacuum deposition. The polyimide constituting theintermediate film 31 has a good affinity with the Al metalthin film 12, and hence, the metalthin film 12 becomes adhered to theintermediate film 31. Since theintermediate film 31 is also adhered to thesubstrate 10, peeling away of the metalthin film 12 from thesubstrate 10 can be effectively prevented. - Subsequently, spin coat processing is applied onto the metal
thin film 12, thus forming a polyimideprotective film 34 at a thickness of 1000 nm which covers the entire metalthin film 12. As a result, the metalthin film 12 is sandwiched between theintermediate film 31 and theprotective film 34 so as to be adhered to and sealed by both, and hence can be effectively protected from damage or peeling in the subsequent making process. - Next, a large number of Tl-doped CsI columnar crystals are grown (accumulated) by deposition on the surface of the
protective film 34 so as to stand grouped together, thereby forming thescintillator 16 at a thickness of 250 μm. The CsI that forms thescintillator 16 has high hygroscopicity, and if left exposed, absorbs vapor in the air and deliquesces. In order to prevent this, the polyparaxylylene moisture-resistantprotective film 18 is formed by CVD. That is, thesubstrate 10 on which thescintillator 16 is formed is inserted into a CVD device, and the moisture-resistantprotective film 18 is formed at a thickness of 10 m. The making method for this moisture-resistantprotective film 18 is described in detail in International Publication No. WO99/66351. Thereby, the polyparaxylylene moisture-resistantprotective film 18 is formed on substantially the entire surface of thescintillator 16 and thesubstrate 10, or in other words, substantially the entire surface of the substrate that is exposed and does not have a scintillator or the like formed thereon. According this process theprotective film 18 is not formed at positions corresponding to the support protrusions of a target-support element each of which supports the substrate during CVD process. The words “substantially the entire surface” means almost entire surfaces except these portions. - The
radiation image sensor 2 a is made by disposing the light-receiving portion of an image sensing element (CCD) 20 to face the distal end side of thescintillator 16 of the completedscintillator panel 1 a and bonding them (see FIG. 15). - According to the
radiation image sensor 2 a of this embodiment, radiation which enters from thesubstrate 10 side is converted into light by thescintillator 16 and detected by theimage sensing element 20. Since the light-reflecting metalthin film 12 is provided in thescintillator panel 1 a comprising theradiation image sensor 2, the amount of light incident on the light-receiving portion of the image-sensing element 20 can be increased, and the image detected by theradiation image sensor 2 can be made clearer. Further, since the metalthin film 12 is adhered to the polyimideintermediate film 31 and theprotective film 34, and thus sandwiched between the two to seal the entire film, damage to the function of the metalthin film 12 as a reflecting film due to deterioration such as corrosion, peeling, or other impairments, can be prevented, and the stability thereof as a reflecting film can be improved. - FIG. 16 is a sectional view of an eighth embodiment of the scintillator panel in accordance with the present invention. This
scintillator panel 3 a differs from the first embodiment in that theprotective film 34 a does not cover the entire surface of the metalthin film 12, but rather covers only the central part of the metalthin film 12. In this embodiment also, thescintillator 16 is formed only on the surface of theprotective film 34 a, and thus the metalthin film 12 is completely prevented from contacting thescintillator 16 by theprotective film 34 a. - In this embodiment also, at least the
scintillator 16 formation part of the metalthin film 12 is sandwiched between, and sealed by, theintermediate film 31 and theprotective film 34 a, and hence, damage, peeling, deterioration and the like can be effectively prevented, and the stability of the metalthin film 12 as a reflecting film can be improved. - FIG. 17 is a sectional view of the ninth embodiment of the scintillator panel in accordance with the present invention. This
scintillator panel 4 a differs from those of the seventh and eighth embodiments, illustrated in FIGS. 14 and 16, in that a polyparaxylylene film which is the same as the moisture-resistantprotective film 18 is used as theintermediate film 31 b and theprotective film 34 b. Furthermore, theintermediate film 31 b covers theentire substrate 10, and theprotective film 34 b covers the metalthin film 12 and the exposedintermediate film 31 b on the periphery of the metalthin film 12. - Similarly to the case of the aforementioned moisture-resistant
protective film 18, theintermediate film 31 b and theprotective film 34 b are formed by CVD, thus forming a satisfactory thin film that is uniform and has no pin holes or the like. As a result the metalthin film 12 is sealed, and contact with the outside air and thescintillator 16 which is formed on theprotective film 34 b is completely prevented, and thereby, reactions of the metal with scintillator components and moisture can be suppressed. In particular, during the formation of thescintillator 16, theprotective film 34 b completely covers thesubstrate 10 and the metalthin film 12, and thus even the effects of the scintillator components becoming attached to another location can be suppressed. Furthermore, by interposing theintermediate film 31 b, which is a nonconductor, between thesubstrate 10 and the metalthin film 12, which have conducting properties, electrical contact between thesubstrate 19 and the metalthin film 12 can be prevented, and electric corrosion of the metalthin film 12 can be effectively suppressed. - Here, an embodiment was explained in which the
intermediate film 31 b and theprotective film 34 b cover theentire substrate 10; however, it is sufficient if the metalthin film 12 is formed on the surface of theintermediate film 31 b, and theintermediate film 31 b may be formed on only the formation surface side of thescintillator 16 on the substrate. It is also sufficient if theprotective film 34 b is formed on at least the formation surface part of thescintillator 16, as in the eighth embodiment. However, if a structure such as that of the present embodiment is employed, wherein theintermediate film 31 b and theprotective film 34 b cover theentire substrate 10, sealing is improved, and the formation of the films by CVD is simple, and therefore this structure is preferable. - A tenth embodiment of the scintillator panel in accordance with the present invention will now be explained. FIG. 18 is a sectional view showing this
scintillator panel 1 b. In thescintillator panel 1 b, a metalreflective film 12 is formed on one surface of the radiolucent substrate 10 (made of a material in which the main component is glass, amorphous carbon, or another carbon). This metalreflective film 12 is comprised of a material containing one of Al, Ag, Cr, Cu, Ni, Ti, Mg, or Rh. A protectiveorganic film 14 is formed so as to envelop thesubstrate 10 from above the metalreflective film 12. This protectiveorganic film 14 is made, for example, from polyparaxylylene. Ascintillator 16 which converts into visible light incident radiation that has passed through thesubstrate 10 is formed on the portion of the surface where the metalreflective film 12 and the protectiveorganic film 14 are laminated. A Tl-doped CsI, for example, is used in thisscintillator 16. The CsI has a configuration in which a large number of needle crystals stand grouped together. Thisscintillator 16, as well as thesubstrate 10, is covered by a moisture-prooforganic film 18 made of polyparaxylylene. - Next, the making process of this
scintillator panel 1 b will be explained with reference to FIGS. 18, 19A through 19D, and 20. First, a rectangular or circular substrate 10 (thickness: 1 mm) is prepared (see FIG. 19A), and the metalreflective film 12 is formed on a surface thereof at a thickness of 150 nm by vacuum deposition (see FIG. 19B). - Next, the polyparaxylylene protective
organic film 14 is formed on the metalreflective film 12 by CVD. In other words, thesubstrate 10 with the metalreflective film 12 deposited thereon is inserted into a CVD device, whereby the moisture-prooforganic film 12 is formed over the entire surface of thesubstrate 10 at a thickness of 10 μm. As a result, the metalreflective film 12 is covered, and the polyparaxylylene protectiveorganic film 14 is formed covering substantially theentire substrate 10, from the periphery of the metalreflective film 12 to the side walls and moreover to the rear surface thereof (see FIG. 19C). This organic film making method is described in detail in International Publication No. WO99/66351. - Subsequently, a large number of Tl-doped CsI needle crystals are grown (accumulated) by deposition in a predetermined area on the surface of the protective
organic film 14 on the metalreflective film 12, and thus thescintillator 16 is formed at a thickness of 250 μm (see FIGS. 19D, 20). At the time of this deposition, thesubstrate 10 which is covered by the protectiveorganic film 14 is housed in a cavity portion 200 x of adeposition holder 200, and only the part of thesubstrate 10 on which thescintillator 16 is to be formed (the aforementioned predetermined area) is exposed to thedeposition chamber 400 side through anopening 201 provided in thedeposition holder 200. Thereby, thescintillator 16 can be selectively formed in a substantially predetermined area. It is conceivable that the scintillator components that pass through theopening 201, that is, one part of the CsI component, pass through the gap between the protectiveorganic film 14 and the floor surface of the cavity portion 200 x, thus becoming attached to the protectiveorganic film 14 on the side wall of thesubstrate 10; however, these components almost never reach the protectiveorganic film 14 on the rear surface side of thesubstrate 10. If acover plate 300 is disposed on the rear surface of thesubstrate 10 to cover the rear surface of thesubstrate 10, attachment to this rear surface can be completely prevented, and it is therefore preferable to provide thiscover plate 300. - The CsI which forms this
scintillator 16 has high hygroscopicity, and if left exposed, absorbs vapor in the air and deliquesces. In order to prevent this, thescintillator 16 is further covered by a polyparaxylylene moisture-proof organic film 18 (thickness: 10 μm), thereby completing thescintillator panel 1 b illustrated in FIG. 18. This moisture-prooforganic film 18 may be formed using the same making method as for the protectiveorganic film 14. - In the
scintillator panel 1 b of this embodiment, the protectiveorganic film 14 covering the metalreflective film 12 does not only cover the metalreflective film 12, but also covers thesubstrate 10 from the periphery of the metalreflective film 12 to the side wall parts and furthermore to the rear surface thereof. Therefore, even when scintillator components which have passed through theopening 201 become attached to the protectiveorganic film 14, these scintillator components can be securely prevented from penetrateing between the protectiveorganic film 14 and thesubstrate 10 to reach the metalreflective film 12. Thus, deterioration of the metalreflective film 12 can be suppressed, and the durability thereof can be improved. Moreover, peeling of the protectiveorganic film 14 can be securely prevented. - In this
scintillator panel 1 b, as illustrated in FIG. 18, thescintillator 16 is disposed facing the opposite side to the radiation entrance side, and the image-sensing element, television camera and so on are disposed and used on thescintillator 16 side. Radiation enters thescintillator panel 1 b from the direction of arrow A, penetrates the moisture-resistantprotective film 14, protectiveorganic film 14,substrate 10, metalreflective film 12, and protectiveorganic film 14 in succession, and reaches thescintillator 16. Here, the radiation is absorbed by thescintillator 16 and emitted as visible light. Of the emitted visible light, the light directed toward thesubstrate 10 side passes through the transparent protectiveorganic film 14, and is thereafter reflected by the metalreflective film 12 to return to thescintillator 16 side. As a result, the bulk of the light emitted from thescintillator 16 passes through the moisture-resistantprotective film 14 and is radiated in the direction of arrow B. In the image-sensing element or television camera (not shown), this optical image is captured, whereby an image signal corresponding to a radiographic image can be obtained. - This protective
organic film 14 does not have to cover the entire rear surface of thesubstrate 10; it is sufficient if the protectiveorganic film 14 covers the side wall part and extends to the edges of the rear surface side, as does the protectiveorganic film 14 a in the eleventh embodiment, shown in FIG. 21. In this case, even if scintillator components become attached to the rear surface part of thesubstrate 10 which is exposed during the deposition of thescintillator 16, the protectiveorganic film 14 a becomes adhered to the side wall of thesubstrate 10 such that penetrating between the protectiveorganic film 14 a and thesubstrate 10 becomes difficult. Furthermore, the scintillator components are covered and encapsulated by the moisture-resistantorganic film 14 in a subsequent procedure, and thus undergo no further movement, meaning that deterioration of the metalreflective film 12 can be suppressed. - FIGS. 22 and 23 are sectional views showing the twelfth embodiment of the scintillator panel according to the present invention and an example of a modification thereof respectively. These embodiments differ from the tenth and eleventh embodiments in that a film made of polyimide is used as the protective
organic films - These polyimide protective
organic films reflective film 12, shown in FIG. 19B, by applying polyimide resin over the metalreflective film 12 down to the side walls of thesubstrate 10 at a constant thickness (10 μm) and causing this resin to harden. - Here also, when a protective organic film is formed using polyimide resin, the protective
organic film 14 b must be formed up to the edges of the side walls and the rear surface of thesubstrate 10, as is shown in FIG. 22, and it is preferable that the protectiveorganic film 14 b′ be formed over the rear surface edges, as is shown in FIG. 23. - FIGS. 24 and 25 are sectional views showing the thirteenth embodiment of the scintillator panel according to the present invention and an example of a modification thereof. These embodiments are similar to the twelfth embodiment in that a polyimide protective
organic film 14 c is used, but differ in that the protectiveorganic film 14 c comprises two parts: a second protectiveorganic film 141 in the form of a picture frame casing which principally covers the side walls of thesubstrate 10; and a first protectiveorganic film 140 in a substantially planar form, which principally covers the metalreflective film 12. - Here, the second protective
organic film 141 is formed over the side walls of thesubstrate 10 from the peripheral edges of the metalreflective film 12. As is shown in FIG. 24, it is preferable that the second protectiveorganic film 141 extend to the rear surface of thesubstrate 10; however, it is acceptable for this film to extend to the edges of the rear surface of thesubstrate 10, as is shown in FIG. 25. - Next, the making method of this
scintillator panel 1 e will be explained. This method is identical to the making process for thescintillator panel 1 b illustrated in FIGS. 19A and 19B up to the manufacture of the metalreflective film 12. Thereafter, polyimide resin is painted onto the side walls of thesubstrate 10 and the proximal substrate surfaces up to the peripheral edges of the metalreflective film 12, and then this resin is hardened, thus forming the second protectiveorganic film 141 in a frame shape (see FIG. 26A) . The second protectiveorganic film 141 may also be formed by affixing resin in the form of a tape or a film rather than by painting. - Next, polyimide resin is painted onto the second protective
organic film 141 over the metalreflective film 12 and around the periphery there of, and then caused to harden, thus forming the first protectiveorganic film 140 in planar form to cover the metal reflective film 12 (see FIG. 26B). Thereafter, similarly to the process in FIG. 19D, a large number of Tl-doped CsI needle crystals are grown by deposition in a predetermined area on the surface of the protectiveorganic film 14 c (actually, the first protective organic film 140) over the metalreflective film 12, and thus thescintillator 16 is formed (see FIG. 26c) . To complete thescintillator panel 1 e illustrated in FIG. 24, thescintillator 16 is covered with a moisture-prooforganic film 18 made of polyparaxylylene. - In forming the protective
organic film 14 c in two stages in this way, the resins which are formed on the side wall sections and on the metal reflective film can be made to have different qualities and formulae, and it is thus possible to combine them such that each exhibits suitable performance. Furthermore, formation is easier when the resin is painted on than integrated formation, and the shielding ability of the resin can be secured. - FIGS. 27A through 27D are sectional views showing the fourteenth embodiment of the scintillator panel according to the present invention and an example of modification thereof. In these embodiments, the order of lamination of the first protective
organic film 142 and the second protectiveorganic film 143 is made to be different from that of the thirteenth embodiment. That is, in these embodiments, the second protectiveorganic film 143 covers the peripheral edges of the first protectiveorganic film 142. - Here, as illustrated in FIG. 27A, it is sufficient for the second protective
organic film 143 to extend to the edges of the rear surface of thesubstrate 10, but it is preferable that this film extend to the rear surface of thesubstrate 10, as shown in FIG. 27B. On the other hand, it is acceptable for the first protectiveorganic film 142 to extend to the side walls of thesubstrate 10, as shown in FIG. 27C. It is also acceptable for the second protectiveorganic film 143 to extend to the peripheral edges of the metalreflective film 12, as shown in FIG. 27D. - Next, the making method for this scintillator panel If will be explained. This method is the same as the making process of the
scintillator panel 1 b shown in FIGS. 19A and B up to the manufacture of the metalreflective film 12. Thereafter, polyimide resin is painted over the metalreflective film 12 and the surfaces of thesubstrate 10 on the periphery of the metalreflective film 12, and then caused to harden, thus forming the first protectiveorganic film 142 in planar form, covering the metal reflective film 12 (see FIG. 28A). - Subsequently, polyimide resin is painted onto the side walls of the
substrate 10 and the proximal substrate surfaces up to the peripheral edges of the first protectiveorganic film 142, and then caused to harden, thus forming the second protectiveorganic film 143 in a frame shape (see FIG. 28B). The second protectiveorganic film 143 may be formed by affixing resin molded into the form of a tape or film rather than by painting on the resin. - Next, similarly to the process in FIG. 19D, a large number of Tl-doped CsI needle crystals are grown by deposition in a predetermined area on the surface of the protective
organic film 14 d (actually the first protective organic film 142) over the metalreflective film 12, thus forming the scintillator 16 (see FIG. 28C). To complete thescintillator panel 1 d shown in FIG. 27A, thescintillator 16 is covered with a moisture-prooforganic film 18 made of polyparaxylylene. - In this embodiment also, the protective
organic film 14 d is formed in two stages, and thus the same effects as those of the thirteenth embodiment may be obtained. - FIG. 29 is a sectional constitutional diagram showing the fifteenth embodiment of the scintillator panel according to the present invention. In this
scintillator panel 1 g, the metalreflective film 12 is formed on one surface of the radiolucent substrate 10 (made of a material in which the main component is glass, amorphous carbon, or another carbon). This metalreflective film 12 is comprised of a material containing one of Al, Ag, Cr, Cu, Ni, Ti, Mg, or Rh. A first protectiveorganic film 14 is formed so as to envelop thesubstrate 10 from above the metalreflective film 12. This first protectiveorganic film 14 is made, for example, from polyparaxylylene. Ascintillator 16 which converts into visible light incident radiation that has passed through thesubstrate 10 is formed on the portion of the surface thereof on which the metalreflective film 12 and the first protectiveorganic film 14 are laminated. A Tl-doped CsI, for example, is used as thisscintillator 16. The CsI has a configuration in which a large number of needle crystals stand grouped together. A second protectiveorganic film 19 is formed in the shape of a picture frame covering an area extending from the peripheral edges of the top surface of thescintillator 16 to the edges of the rear surface of thesubstrate 10. This protectiveorganic film 19 is made of polyimide, for example. This second protectiveorganic film 19 adheres to the side walls of thescintillator 16 and also adheres to the first protectiveorganic film 10, thereby covering the surfaces of thesubstrate 10 on the periphery of thescintillator 16 and the side walls of thesubstrate 10 from over the first protectiveorganic film 14. Theentire scintillator panel 1 g is substantially covered with a polyparaxylylene moisture-prooforganic film 18. - Next, the making method of this
scintillator panel 1 g will be explained. First, a rectangular or circular substrate 10 (thickness: 1 mm) is prepared (see FIG. 31A), and a metalreflective film 12 is formed on a surface thereof at a thickness of 150 nm by vacuum deposition (see FIG. 31B). - Next, a protective
organic film 14 made of polyparaxylylene is formed on the metalreflective film 12 by CVD. In other words, thesubstrate 10 with the metalreflective film 12 deposited thereon is placed in a CVD device, wherein a moisture-proof film 12 is formed over the entire surface of thesubstrate 10 at a thickness of 10 μm. In so doing, a polyparaxylylene protectiveorganic film 14 is formed, covering the metalreflective film 12 and also substantially covering theentire substrate 10, from the periphery of the substratereflective film 11 to the side walls thereof, and furthermore to the rear surface thereof (see FIG. 31C). The making method for this organic film is described in detail in International Publication No. WO99/66351. - Next, a large number of Tl-doped CsI needle crystals are grown by deposition in a predetermined area on the surface of the protective
organic film 14 over the metalreflective film 12, thus forming thescintillator 16 at a thickness of 250 μm (see FIG. 31D). - Subsequently, polyimide tape is wound and fixed around the part extending from the peripheral edges of the top surface of the
scintillator 16, over the exposed wall surfaces of thescintillator 16 and the exposed first protectiveorganic film 14 on the periphery of thescintillator 16, up to the peripheral edges of the rear surface of thesubstrate 12, thus forming the second protective organic film 19 (see FIG. 31E) . Polyimide resin which has been molded into sheet form may be used as this tape, as may tape to which an adhesive has been applied, such as Kapton Tape by E. I. du Pont de Nemours and Company. - The CsI that forms the
scintillator 16 has high hygroscopicity, and if left exposed, absorbs vapor in the air and deliquesces. In order to prevent this, thescintillator 16 is covered with a polyparaxylylene moisture-proof organic film 18 (thickness: 10 82 m), thus completing thescintillator panel 1 g as shown in FIG. 29. This moisture-prooforganic film 18 may be formed by the same making process as the protectiveorganic film 14. - As is shown in FIG. 29, this
scintillator panel 1 g is disposed such that thescintillator 16 faces the opposite side to the radiation entrance side, and the image-sensing element, television camera and so on are disposed and used on thescintillator 16 side. It goes without saying that an optical system which is not illustrated may be used to lead output images from thescintillator 16 to the image-sensing element, television camera or the like. - Radiation enters the
scintillator panel 1 g from the direction of the arrow A, passes through the moisture-resistantprotective film 14, the first protectiveorganic film 14, thesubstrate 10, the metalreflective film 12, and the first protectiveorganic film 14 in succession, and reaches thescintillator 16. Here, the radiation is absorbed by thescintillator 16 and emitted as visible light. Of the emitted visible light, the light directed toward thesubstrate 10 side passes through the transparent protectiveorganic film 14, and is thereafter reflected by the metalreflective film 12 to return to thescintillator 16 side. As a result, the bulk of the light emitted from thescintillator 16 passes through the moisture-resistantprotective film 14 and is radiated in the direction of arrow B. In the image-sensing element or television camera (not shown), this optical image is captured, and thus an image signal corresponding to a radiographic image can be obtained. - The side walls of the
scintillator panel 1 g of this embodiment are fortified by the second protectiveorganic film 19, and hence the mechanical strength of this part can be improved. These side wall parts are not positioned on the light path of the radiation and the visible light which is converted by thescintillator 16, and it is therefore possible to increase the thickness of the side wall parts so as to obtain the necessary strength without influencing the radiation characteristic and optical characteristic of thescintillator 16. Conversely, thesubstrate 10 part can be made with a large surface area while remaining thin, thereby enabling a combination of a large-sized screen with high resolution and a high S/N ratio. - In order to activate the
scintillator 16, annealing processing, in which thescintillator 16 is heated following formation, is sometimes performed. In thescintillator panel 1 according to the present invention, this annealing processing is possible either before or after the formation process of the second protective organic film 19 (see FIG. 31E). - When annealing processing is performed before the second protective
organic film 19 is formed, there is a possibility that damage such as pin holes will occur in the exposed part of the first protectiveorganic film 14 due to the heat during annealing processing. However, by blocking these damaged parts, scintillator components or moisture are prevented from penetrating into the metalreflective film 12 during use following manufacture. - When annealing processing is performed after the second protective
organic film 19 is formed, the second protective organic film functions as a moisture-resistant protective film to prevent excess heat from being applied to the first protectiveorganic film 11 during annealing processing, and hence damage to the first protectiveorganic film 14 may be suppressed. In this case, the second protectiveorganic film 19 requires better heat resistance than the first protective organic film, and polyimide resin is suitable since it has good heat resistance. - As noted above, the second protective
organic film 19 is not positioned on the light path of the output light from thescintillator 16. Consequently, it is preferable that the second protectiveorganic film 19 be opaque with respect to the light generated by the scintillator 16 (preferably with 50% transmissivity or less, and more preferably 10% transmissivity or less) . When the second protectiveorganic film 19 is made opaque in this manner, ambient light passes through the second protectiveorganic film 19 to enter thescintillator 16, where this ambient light is refracted and reflected, thereby preventing its intrusion into the output image as noise. As a result, an output image with a good S/N ratio can be obtained. - The second protective
organic film 19 does not necessarily have to cover the area extending from the peripheral edges of the rear surface of thesubstrate 10 to the peripheral edges of the top surface of thescintillator 16, and it is sufficient if thefilm 19 covers the sidewalls of thesubstrate 10 andscintillator 16 and the first protectiveorganic film 14 therebetween, as is shown in FIG. 30. In so doing, the optical output surface may be made larger. - FIG. 32 is a sectional view showing the sixteenth embodiment of the scintillator panel according to the present invention. This
scintillator panel 1 h differs from that of the fifteenth embodiment in that a polyimide film is used as the protectiveorganic film 14 h, and this film is not formed up to the rear surface of thesubstrate 10. - This polyimide protective
organic film 14 h may be manufactured following the making process of the metalreflective film 12 shown in FIG. 31B by applying polyimide resin over the metalreflective film 12 down to the side walls of thesubstrate 10 at a constant thickness (10 μm) and causing this resin to harden. - When the first protective
organic film 14 h is formed with heat-resistant polyimide resin, it is difficult to envelop theentire substrate 10 therein, as with the polyparaxylylene first protectiveorganic film 14 in the first embodiment. However, in the annealing processing step to activate thescintillator 16, damage to the protectiveorganic film 14 h can be suppressed. - FIG. 33 is a sectional view showing the seventeenth embodiment of the scintillator panel according to the present invention. The
scintillator panel 1 i of this embodiment differs from thescintillator panel 1 of the second embodiment in that the second protectiveorganic film 19 is formed on the outside of the moisture-resistantprotective film 18. In other words, the moisture-resistantprotective film 18 in thisscintillator panel 1 b is formed so as to substantially cover the entire panel from the top surface to the side walls of thescintillator 16, the surfaces of the first protectiveorganic film 14 on the periphery of thescintillator 16, and from the side walls to the rear surface of thesubstrate 10. Further, a second protectiveorganic film 19 is configured in the form of a picture frame, covering the side walls of thescintillator panel 1 i, that is, covering the moisture-resistantprotective film 18 from the side walls of thescintillator 16 to the side walls of thesubstrate 10. - Here, it is sufficient if the second protective
organic film 19 extends to at least the edges of the side walls of thesubstrate 10 and thescintillator 16, but it is also acceptable for the film to extend to the rear surface of thesubstrate 10 or the top surface of thescintillator 16. - Next, the method of making this
scintillator panel 1 i will be explained. This method is identical to the making process for thescintillator panel 1 g illustrated in FIGS. 31A and 31B up to the manufacture of the metal reflective film 12 (FIGS. 34A and 34B) . Thereafter, polyimide resin is painted onto the metalreflective film 12 and the surfaces of thesubstrate 10 around the periphery of the metalreflective film 12, and then caused to harden, thereby forming the first protectiveorganic film 14 in planar form, covering the metal reflective film 12 (see FIG. 34C). - Next, similarly to the process in FIG. 31D, a large number of Tl-doped CsI needle crystals are grown by deposition in a predetermined area on the surface of the first protective
organic film 14 on the metalreflective film 12, and thus thescintillator 16 is formed (see FIG. 34D). Then, thescintillator 16 is covered by a polyparaxylylene moisture-proof organic film 18 (see FIG. 34E). Then, polyimide resin is painted over the moisture-prooforganic film 18 onto the side walls of thesubstrate 10 and thescintillator 16 and all of the intermediate parts therebetween, and caused to harden, thereby forming the frame-shaped second protectiveorganic film 19 and completing thescintillator panel 1 i as shown in FIG. 33. Similarly to the fourteenth embodiment, the second protectiveorganic film 19 may be formed by affixing resin molded into the form of a tape or film rather than by painting on the resin. - In this embodiment, since the
scintillator panel 1 j, including the moisture-prooforganic film 18, is covered by the protectiveorganic film 19, and is thus supported at the side wall parts, there is no danger of damage to the moisture-prooforganic film 18, and peeling caused by damage to the moisture-prooforganic film 18 can be suppressed. - Next, one example of supporting and fixing the scintillator panel according to the present invention will be explained. FIGS. 35 through 38 are views showing an eighteenth embodiment of the scintillator panel according to the present invention. FIG. 35 is a front view of this
scintillator panel 1 j seen from thescintillator 16 side, FIG. 36 is a back view seen from thesubstrate 10 side, and FIGS. 37 and 38 are sectional views on the XXXVII-XXXVII line and the XXXVIII-XXXVIII line of FIG. 35 respectively. - This
scintillator panel 1 j has the same basic structure as thescintillator panel 1 i of the sixteenth embodiment shown in FIG. 33, but differs therefrom in that the substrate surface and the width of the rear surface part of the second protectiveorganic film 19 j are comparatively larger. - In the
scintillator panel 1 j, the laminated structure of the metalreflective film 12, the first protectiveorganic film 14, and thescintillator 16 is formed in the central part of thesubstrate 10, providing space on the periphery of thescintillator 16. In the four corners of the substrate 10 (within this area of space on the periphery), throughholes 190 are provided through thesubstrate 10. These throughholes 190 are provided in thesubstrate 10 in advance, prior to the formation of thescintillator 16. - The
scintillator panel 1 j can be fixed by inserting and fixing bolts, screws or the like into these throughholes 190. Since the second protectiveorganic film 19 j protects thesubjacent substrate 10 and moisture-resistantorganic film 18, damage thereto during fixing can be suppressed. If the moisture-resistant film 18 were to lie exposed, the moisture-resistant film 18 would be damaged when screws and the like were inserted and tightened, allowing moisture to enter the interior through [the damaged area]. However, since the moisture-resistantorganic film 18 is protected by the second protective organic film 19 c, damage is unlikely to occur to the moisture-resistant organic film even when screws and the like are inserted and tightened. In FIG. 37, thescintillator 16 is depicted in a protruding state; however, the second protectiveorganic film 19 j maybe formed thicker than thescintillator 16 in order to strengthen its protecting function. - It is acceptable to form the second protective
organic film 19 j so as to cover the entire rear surface of thescintillator panel 1 j. However, in order to obtain a clearer output image, it is preferable not to form the second protectiveorganic film 19 j on the radiographic image input part. - In the above-described embodiments, CsI (Tl) is used as the
scintillator 16. However, the present invention is not limited to this, and CsI (Na), NaI (Ti), LiI (Eu), KI (Tl), or the like may be used. - In the above-described embodiments, the entire surfaces of the
scintillator 16 and substrate (the surface with the scintillator formed and a surface on the opposite side, i.e., the radiation incident surface) are covered with thepolyparaxylylene film 18, thereby making the scintillator completely resistant against water vapor. When thescintillator 16 and at least part of the surface of the substrate are covered with thepolyparaxylylene film 18, as shown in FIG. 13, the water-vapor resistance of the scintillator can be made higher than in a case wherein only the scintillator is covered. - Polyparaxylylene in the above-described embodiments includes, in addition to polyparaxylylene, polymonochloroparaxylylene, polydichloroparaxylylene, polytetrachloroparaxylylene, polyfluoroparaxylylene, polydimethylparaxylylene, polydiethylparaxylylene, and the like.
- According to the scintillator panel of the present invention, any change in properties of the reflective metal thin film based on water contained in the scintillator in a small amount can be prevented, and the function of the reflective metal thin film as a reflecting film can be prevented from degrading. Hence, an increased optical output of the scintillator panel can be maintained. When a glass substrate is used, even a scintillator panel having a large area can keep its performance high.
- In addition, according to the radiation image sensor of the present invention, since the scintillator panel can maintain an increased optical output, the output of the radiation image sensor can be maintained. When a glass substrate is used, even a radiation image sensor having a large area can keep its performance high.
- From the invention thus described, it will be obvious that the invention may be varied in many ways. Such variations are not to be regarded as a departure from the spirit and scope of the invention, and all such modifications as would be obvious to one skilled in the art are intended for inclusion within the scope of the following claims.
Claims (66)
1. A scintillator panel comprising:
a radiation-transmitting substrate;
a reflective metal thin film disposed on said substrate;
a protective film covering an entire surface of said reflective metal thin film; and
a scintillator deposited on said protective film,
and wherein said protective film has a function to protect said reflective metal thin film against said scintillator.
2. A scintillator panel according to claim 1 , wherein said reflective metal thin film is directly disposed on said substrate.
3. A scintillator panel according to claim 1 , wherein said reflective metal thin film is substantially made of a material containing a substance selected from the group consisting of Al, Ag, Cr, Cu, Ni, Ti, Mg, Rh, Pt, and Au.
4. A scintillator panel according to claim 1 , wherein said protective film is an inorganic film.
5. A scintillator panel according to claim 4 , wherein said protective film is substantially made of a material containing a substance selected for the group consisting of LiF, MgF2, SiO2, TiO2, Al2O3, MgO and SiN.
6. A scintillator panel according to claim 1 , wherein said protective film is an organic film.
7. A scintillator panel according to claim 6 , wherein said protective film is substantially made of polyimide.
8. A scintillator panel according to claim 4 , wherein said protective film is a metal oxide film.
9. A scintillator panel according to claim 8 , wherein said protective film is an oxidized material of said reflective metal thin film.
10. A scintillator panel according to claim 1 , wherein said protective film includes an inorganic film and an organic film.
11. A scintillator panel according to claim 1 , further comprised of an organic film covered said scintillator.
12. A scintillator panel according to claim 11 , wherein said organic film further covers at least an outer periphery of said protective film.
13. A scintillator panel according to claim 12 , wherein said organic film further covers an entire surface of said substrate.
14. A radiation image sensor characterized in that an image sensing element is arranged to face said scintillator of said scintillator panel of claim 1 .
15. A scintillator panel characterized by comprising:
a radiation-transmitting substrate;
a reflective metal thin film disposed on said substrate;
a protective film disposed on said reflective metal thin film; and
a scintillator deposited on said protective film at a position except an edge portion thereof,
wherein said reflective metal thin film transmits radiation and reflects light irradiated from said scintillator,
and wherein said protective film has a function to protect said reflective metal thin film against said scintillator.
16. A scintillator panel according to claim 15 , wherein said reflective metal thin film is directly disposed on said substrate.
17. A scintillator panel according to claim 15 , wherein said reflective metal thin film is substantially made of a material containing a substance selected from the group consisting of Al, Ag, Cr, Cu, Ni, Ti, Mg, Rh, Pt, and Au.
18. A scintillator panel according to claim 15 , wherein said protective film is an inorganic film.
19. A scintillator panel according to claim 18 , wherein said protective film is substantially made of a material containing a substance selected for the group consisting of LiF, MgF2, SiO2, TiO2, Al2O3, MgO and SiN.
20. A scintillator panel according to claim 14 , wherein said protective film is an organic film.
21. A scintillator panel according to claim 20 , wherein said protective film is substantially made of polyimide.
22. A scintillator panel according to claim 18 , wherein said protective film is a metal oxide film.
23. A scintillator panel according to claim 22 , wherein said protective film is an oxidized material of said reflective metal thin film.
24. A scintillator panel according to claim 15 , wherein said protective film includes an inorganic film and an organic film.
25. A scintillator panel according to claim 15 , further comprised of an organic film covered said scintillator.
26. A scintillator panel according to claim 25 , wherein said organic film further covers at least part of a surface of said substrate.
27. A scintillator panel according to claim 26 , wherein said organic film further covers an entire surface of said substrate.
28. A radiation image sensor characterized in that an image sensing element is arranged to face said scintillator of said scintillator panel of claim 15 .
29. A scintillator panel comprising: a radiation-transmitting substrate; a metal thin film formed on said substrate, which is a radiation-transmittable and reflects light of a predetermined wavelength; a protective film formed on said metal thin film; and a scintillator comprising a large number of columnar crystals which are deposited on said protective film and which convert radiation into light of wavelengths that can be reflected by said metal thin film, said protective film preventing contact between said metal thin film and said scintillator, further comprised of:
an intermediate film disposed between said substrate and said metal thin film to adhere said substrate and said metal thin film.
30. A scintillator panel according to claim 29 , wherein said substrate is any one of a glass substrate, an aluminum substrate, or a substrate which has carbon as a main component.
31. A scintillator panel according to claim 29 , wherein said substrate is a conductive substrate, and said intermediate film prevents contact between said substrate and said metal thin film.
32. A scintillator panel according to claim 31 , wherein said conductive substrate is either an aluminum substrate or a substrate that has carbon as a main component.
33. A scintillator panel according to claim 30 , wherein said substrate that has carbon as a main component contains amorphous carbon.
34. A scintillator panel according to claim 29 , wherein said metal thin film is made of material containing a substance selected from the group consisting of Al, Ag, Cr, Cu, Ni, Ti, Mg, Rh, Pt, and Au.
35. A scintillator panel according to claim 29 , wherein said protective film comprises an inorganic film.
36. A scintillator panel according to claim 35 , wherein said inorganic film is made of material containing a substance selected from the group consisting of LiF, MgF2, SiO2, TiO2, Al2O3, MgO, and SiN.
37. A scintillator panel according to claim 35 , wherein said inorganic film is made of material containing a substance selected from the group consisting of Al, Ag, Cr, Cu, Ni, Ti, Mg, Rh, and Pt.
38. A scintillator panel according to claim 29 , wherein said protective film comprises an organic film.
39. A scintillator panel according to claim 38 , wherein said organic film is made of material containing a substance selected from the group consisting of polyimide and xylylene-type materials.
40. A scintillator panel according to claim 29 , wherein said protective film is formed from an inorganic film and an organic film.
41. A scintillator panel according to claim 29 , wherein said scintillator is covered by an organic film.
42. A scintillator panel according to claim 41 , wherein said organic film furthermore extends to at least one part of the surface of said substrate.
43. A scintillator panel according to claim 42 , wherein said organic film covers substantially the entire surface of said substrate.
44. A scintillator panel according to claim 29 , wherein said intermediate film comprises either an organic film or an inorganic film, or a combination of the two.
45. A scintillator panel according to claim 29 , wherein said metal thin film is adhered to said intermediate film and said protective film and sealed by both.
46. A scintillator panel according to claim 45 , wherein said intermediate film substantially envelops said substrate.
47. A scintillator panel according to claim 45 , wherein said intermediate film is a film formed on the substrate by CVD.
48. A scintillator panel according to claim 45 , wherein said intermediate film is a xylylene-type film.
49. A scintillator panel comprising:
a radiation-transmitting substrate; a metal thin film formed on said substrate, which is radiation-transmittable and reflects light of a predetermined wavelength;
a protective film formed on said metal thin film; and
a scintillator comprising a large number of columnar crystals which are deposited on said protective film and which convert radiation into light of wavelengths that can be reflected by said metal thin film,
wherein said protective film prevents contact between said metal thin film and said scintillator, and said scintillator panel further comprises of an intermediate film disposed between said substrate and said metal thin film for improving the adhesion between said substrate and said metal thin film.
50. A radiation image sensor comprising:
the scintillator panel according to claim 29; and
an image-sensing element for capturing optical images obtained by converting radiation which is outputted from a surface opposite to said substrate of said scintillator panel.
51. A radiation image sensor according to claim 50 , wherein said image-sensing element is disposed facing the scintillator side of said scintillator panel.
52. A scintillator panel comprising:
a radiation-transmitting substrate;
a metal reflective film formed on one surface of said substrate;
a protective organic film which covers said metal reflective film and which also covers at least the side walls of said substrate;
an alkali halide-type scintillator which is formed as a large number of needle crystals by deposition on said protective organic film over said metal reflective film; and
a moisture-proof organic film covering said scintilltor;
wherein said protective organic film prevents scintillator components from becoming attached to said substrate and said metal reflective film during the deposition of said scintillator, and said moisture-proof organic film covers the scintillator including the scintillator components which are attached to said protective organic film.
53. A scintillator panel according to claim 52 , wherein said protective organic film substantially further covers the other surface of said substrate.
54. A scintillator panel according to claim 52 , wherein said protective organic film is an organic film formed by vapor phase epitaxy.
55. A scintillator panel according to claim 52 , wherein said protective organic film comprises a first protective organic film on said metal reflective film side and a second protective organic film on said substrate side, the peripheral edges of said first protective organic film being laminated to said second protective organic film on the peripheral edges or in the area outside these peripheral edges of said metal reflective film.
56. A making method for a scintillator panel, comprising the steps of:
forming a metal reflective film on one surface of a radiation-transmitting substrate;
forming a protective organic film which covers an area extending from at least one surface of said substrate, including said metal reflective film, to the side walls of said substrate;
forming a scintillator through the growth of a large number of needle crystals by depositing alkali halide-type scintillator components on only a predetermined part of the surface of said protective organic film which is substantially on said metal reflective film, while preventing the scintillator components from becoming attached to said metal reflective film and said substrate using said protective organic film; and
forming a moisture-proof organic film covering said scintillator including the scintillator components which have become attached to outside of said predetermined part.
57. A making method for a scintillator panel according to claim 56 , wherein the step of forming said protective organic film is performed using vapor phase epitaxy.
58. A making method for a scintillator panel according to claim 56 , wherein the step of forming said protective organic film comprises the steps of:
forming a first protective organic film which covers said metal reflective film, and also covers at least the exposed surfaces of said substrate on the periphery of said metal reflective film; and
forming a second protective organic film in a frame shape, covering an area extending from the peripheral edges of said first protective organic film to the side walls of said substrate.
59. A making method for a scintillator panel according to claim 52 , wherein the step of forming said protective organic film comprises the steps of:
forming a second protective organic film in a frame shape, covering an area extending from the side walls of said substrate to the peripheral edges of said metal reflective film; and
forming a first protective organic film which covers said metal reflective film, and which is laminated to said second protective organic film at the peripheral edges of said metal reflective film.
60. A scintillator panel comprising:
a radiation-transmitting substrate;
a metal reflective film formed on one surface of said substrate;
a first protective organic film covering said metal reflective film;
an alkali halide-type scintillator formed as a large number of needle crystals by deposition on the part of said first protective organic film covering said metal reflective film;
a frame-shaped second protective organic film covering an area extending from the side walls of said scintillator to at least the side wall parts of said substrate; and
a moisture-proof organic film covering said scintillator and the surface of said second protective organic film.
61. A scintillator panel comprising:
a radiation-transmitting substrate;
a metal reflective film formed on one surface of said substrate;
a first protective organic film covering said metal reflective film;
an alkali halide-type scintillator formed as a large number of needle crystals by deposition on the part of said first protective organic film covering said metal reflective film;
a moisture-proof organic film covering an area extending from said scintillator to at least the side walls of said substrate; and
a frame-shaped second protective organic film covering an area extending from the side walls of said scintillator to at least the side wall parts of said substrate.
62. A scintillator panel according to claim 61 , wherein said second protective organic film extends to a surface opposite the scintillator formation surface of said substrate.
63. A scintillator panel according to claim 60 , wherein a plurality of through holes is formed in a section on the outside of the scintillator formation area of said substrate, and which is covered by said second protective organic film.
64. A scintillator panel according to claim 60 , wherein said second protective organic film is opaque in respect of at least light generated by said scintillator.
65. A making method for a scintillator panel, comprising the steps of:
forming a metal reflective film on one surface of a radiation-transmitting substrate;
forming a first protective organic film on said metal reflective film;
forming a scintillator through the growth of a large number of needle crystals by depositing alkali halide-type scintillator components on the part of said first protective organic film covering said metal reflective film;
forming a second protective organic film covering an area extending from the side walls of said scintillator to at least the side walls of said substrate; and
forming a moisture-proof organic film covering said scintillator and also the surface of said second protective organic film.
66. A making method for a scintillator panel, comprising the steps of:
forming a metal reflective film on one surface of a radiation-transmitting substrate;
forming a first protective organic film on said metal reflective film;
forming a scintillator through the growth of a large number of needle crystals by depositing alkali halide-type scintillator components on the part of said first protective organic film covering said metal reflective film;
forming a moisture-proof organic film covering an area extending from said scintillator to at least the side walls of said substrate; and
forming a second protective organic film over said moisture-proof organic film, covering an area extending from the side walls of said scintillator to at least the side wall parts of said substrate.
Priority Applications (3)
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US10/217,628 US7034306B2 (en) | 1998-06-18 | 2002-08-14 | Scintillator panel and radiation image sensor |
US11/366,492 US7408177B2 (en) | 1998-06-18 | 2006-03-03 | Scintillator panel and radiation image sensor |
US12/213,170 US7705315B2 (en) | 1998-06-18 | 2008-06-16 | Scintillator panel and radiation image sensor |
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JP17119198 | 1998-06-18 | ||
JPP1998-171191 | 1998-06-18 | ||
JP10963599 | 1999-04-16 | ||
JPP1999-109635 | 1999-04-16 | ||
PCT/JP1999/003264 WO1999066348A1 (en) | 1998-06-18 | 1999-06-18 | Scintillator panel, radiation image sensor, and method for producing the same |
PCT/JP2000/002422 WO2000063722A1 (en) | 1999-04-16 | 2000-04-13 | Scintillator panel and radiation image sensor |
US09/737,819 US6469307B2 (en) | 1998-06-18 | 2000-12-18 | Scintillator panel, radiation image sensor, and methods of making the same |
US09/971,943 US20020017613A1 (en) | 1999-04-16 | 2001-10-09 | Scintillator panel and radiation image sensor |
JP2001339741 | 2001-11-05 | ||
JPP2001-339741 | 2001-11-05 | ||
WOPCT/JP02/00732 | 2002-01-30 | ||
PCT/JP2002/000732 WO2002061459A1 (en) | 2001-01-30 | 2002-01-30 | Scintillator panel and radiation image sensor |
JPPCT/JP02/00732 | 2002-01-30 | ||
JPP2002-062435 | 2002-03-07 | ||
JPP2002-062468 | 2002-03-07 | ||
JP2002062468A JP4102084B2 (en) | 2002-03-07 | 2002-03-07 | Scintillator panel and manufacturing method thereof |
JP2002062435A JP4057316B2 (en) | 2002-03-07 | 2002-03-07 | Scintillator panel and manufacturing method thereof |
US10/217,628 US7034306B2 (en) | 1998-06-18 | 2002-08-14 | Scintillator panel and radiation image sensor |
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US09/971,943 Continuation-In-Part US20020017613A1 (en) | 1998-06-18 | 2001-10-09 | Scintillator panel and radiation image sensor |
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US11/366,492 Continuation US7408177B2 (en) | 1998-06-18 | 2006-03-03 | Scintillator panel and radiation image sensor |
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US20060038131A9 US20060038131A9 (en) | 2006-02-23 |
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US11/366,492 Expired - Fee Related US7408177B2 (en) | 1998-06-18 | 2006-03-03 | Scintillator panel and radiation image sensor |
US12/213,170 Expired - Fee Related US7705315B2 (en) | 1998-06-18 | 2008-06-16 | Scintillator panel and radiation image sensor |
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US11/366,492 Expired - Fee Related US7408177B2 (en) | 1998-06-18 | 2006-03-03 | Scintillator panel and radiation image sensor |
US12/213,170 Expired - Fee Related US7705315B2 (en) | 1998-06-18 | 2008-06-16 | Scintillator panel and radiation image sensor |
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Also Published As
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US7705315B2 (en) | 2010-04-27 |
US7408177B2 (en) | 2008-08-05 |
US20060261286A1 (en) | 2006-11-23 |
US7034306B2 (en) | 2006-04-25 |
US20080272314A1 (en) | 2008-11-06 |
US20060038131A9 (en) | 2006-02-23 |
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