US11746397B2 - Palladium-copper-silver-ruthenium alloy - Google Patents

Palladium-copper-silver-ruthenium alloy Download PDF

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US11746397B2
US11746397B2 US17/446,209 US202117446209A US11746397B2 US 11746397 B2 US11746397 B2 US 11746397B2 US 202117446209 A US202117446209 A US 202117446209A US 11746397 B2 US11746397 B2 US 11746397B2
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palladium
copper
silver alloy
silver
ruthenium
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US20220064761A1 (en
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Jonas Fecher
Nicole Staudt
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Heraeus Deutschland GmbH and Co KG
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    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C5/00—Alloys based on noble metals
    • C22C5/04—Alloys based on a platinum group metal
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/02—Making non-ferrous alloys by melting
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C30/00—Alloys containing less than 50% by weight of each constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/14—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of noble metals or alloys based thereon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/02—Contacts characterised by the material thereof
    • H01H1/021—Composite material
    • H01H1/023—Composite material having a noble metal as the basic material

Definitions

  • the invention relates to a palladium-copper-silver alloy (PdCuAg alloy) and a wire, a strip or a probe needle made of such a palladium-copper-silver alloy and to the use of such a palladium-copper-silver alloy for testing electrical contacts or for making electrical contact or for producing a sliding contact.
  • PdCuAg alloy palladium-copper-silver alloy
  • wire, a strip or a probe needle made of such a palladium-copper-silver alloy
  • probe needles During chip production, wafers are contacted with probe needles immediately after processing in order to test the operability of integrated circuits (IC) in the unsawn state.
  • An array of probe needles tests the semiconductor wafer for functionality after the structuring of the individual chips.
  • the probe needles are fixed in a probe card which is matched to the design of the wafer.
  • the wafer is pressed onto the probe needles and contact is established between probe needles and the pads of the ICs, and in the case of aluminum pads is established through a passivation layer.
  • Various parameters are then tested, such as the contacting, the electrical characteristic values at high current density and the electrical behavior during temperature changes.
  • Probe needles are thus used in the production of power electronics, the contacting of chips and other electrical circuits for testing the quality of electrical contacts (see, for example, US 2014/0266278 A1 and US 2010/0194415 A1).
  • the key parameters of a good probe needle are high electrical conductivity, since in this case high electrical currents have to be transmitted, and a high degree of hardness in order to keep maintenance intervals short.
  • metals or alloys which have a high degree of electrical and thermal conductivity but also high degrees of hardness and tensile strength are used for so-called probe needles.
  • copper (Cu) and silver (Ag) cannot be used for these purposes since they are far too ductile and the probe needle would deform during use.
  • Typical materials for probe needles are precipitation-hardened palladium-silver alloys which can contain 10% gold and 10% platinum and are sold, for example, under the product names Paliney® 7, Hera 6321 and Hera 648. These alloys have a high degree of hardness of 400-500 HV. However, the electrical conductivity is rather low at 9-12% IACS. High conductivity is a crucial factor in probe needles. Probe needles made of the materials tungsten, tungsten carbide, palladium-copper-silver alloys and tungsten-rhenium are widely used for testing on aluminum pads. These are particularly hard, with aluminum pads being more robust than gold pads and being able to withstand a test with hard needles better than gold pads.
  • Alloys with higher electrical conductivity such as CuAg7 are less hard (about 320 HV1) and less heat-resistant than palladium-silver alloys or palladium-copper-silver alloys.
  • Palladium alloys such as Paliney® H3C from Deringer Ney or NewTec® from Advanced Probing, for example, are known for use on gold pads.
  • Suitable palladium-copper-silver-alloys are already known from U.S. Pat. No. 1,913,423 A and GB 354 216 A.
  • Palladium-copper-silver alloy can form a structure with a superlattice, which leads to an improvement in the electrical conductivity and the mechanical stability of the alloy. The atoms in the lattice are then no longer statistically randomly distributed, but rather are arranged in periodic structures, the superlattice.
  • US 2014/377129 A1 and U.S. Pat. No. 5,833,774A disclose hardened Ag—Pd—Cu alloys for electrical applications. Such palladium-copper-silver alloys have an electrical conductivity of about 9% to 12% IACS and a hardness of 400 to 500 HV1. A higher electrical conductivity would be desirable.
  • U.S. Pat. No. 10,385,424B2 discloses a palladium-copper-silver alloy additionally containing up to 5 wt % of rhenium. This palladium-copper-silver alloy is sold under the product name Paliney® 25. In this way, the electrical conductivity can be significantly increased and achieves values of more than 19.5% IACS.
  • rhenium has a very high melting point of 3180° C. and therefore has to be alloyed in a complicated manner with the other metals.
  • the high density of rhenium (21 g/cm 3 ) also differs considerably from the densities of the other elements (palladium (Pd), copper (Cu) and silver (Ag)), which likewise complicates alloying with the other elements.
  • rhenium already oxidizes from temperatures above 400° C., which is close to the application temperature of probe needles. Oxides on the surface can limit the function of probe needles and sliding contacts.
  • a further increase in the electrical conductivity and/or the hardness of the alloy for use as a material for probe needles is also desirable.
  • an alloy and a wire, a strip or a probe needle are to be provided which have a high electrical conductivity and, at the same time, a high degree of hardness, but which are simultaneously simple to produce and have as high an oxidation resistance as possible on the surface.
  • the shaped body should be producible as cost-effectively as possible, relative to comparable alloys.
  • the alloy and the products are to be usable as probe needles for testing electrical contacts.
  • the aim of the invention is thus to find an alloy, such as the known palladium-copper-silver alloys, which combines the mechanical properties (hardness, yield strength, resilient properties) of a known palladium-copper-silver alloy with a higher electrical conductivity.
  • Palladium-copper-silver alloys of this type have a crucial technical advantage, in particular when used as material for probe needles.
  • a further problem addressed by the invention is that of providing a probe needle which satisfies the aforementioned properties.
  • a further problem can also be considered that of developing a wire for a sliding contact comprising a plurality of wires made of such an alloy.
  • a palladium-copper-silver alloy with palladium as the main component wherein the palladium-copper-silver alloy has a weight ratio of palladium to copper of at least 1.05 and at most 1.6 and has a weight ratio of palladium to silver of at least 3 and at most 6, and wherein the palladium-copper-silver alloy contains more than 1 wt % and up to a maximum of 6 wt % of ruthenium, rhodium or ruthenium and rhodium and contains, as the remainder, palladium, copper and silver and at most 1 wt % of other metallic elements including impurities.
  • a weight ratio of palladium to copper of at least 1.05 and at most 1.6 means that the palladium is contained in the palladium-copper-silver alloy with a weight of at least 105% and at most 160% of the weight of the copper contained in the palladium-copper-silver alloy.
  • a weight ratio of palladium to silver of at least 3 and at most 6 means that the palladium is contained in the palladium-copper-silver alloy with a weight of at least three times and at most six times the weight of the silver contained in the palladium-copper-silver alloy.
  • a mixture of a plurality of elements is preferably understood to mean a mixture in which at least 0.1 wt % of all of these elements is contained in the palladium-copper-silver alloy.
  • a main component is to be understood in the present case as meaning the element (in this case palladium) which is mainly, i.e. quantitatively, the largest constituent, i.e. in the present case more palladium is present in the palladium-copper-silver alloy than copper or silver.
  • An impurity is to be understood here as meaning an impurity caused by the presence of all the elements involved.
  • the palladium-copper-silver alloy is preferably suitable for producing probe needles and/or sliding contacts.
  • That the alloy contains more than 1 wt % and up to a maximum of 6 wt % of ruthenium and rhodium means that the sum of the proportions by weight of ruthenium and rhodium together make up more than 1 wt % and up to a maximum of 6 wt % of the weight of the entire alloy.
  • that the alloy contains more or less or exactly X wt % of ruthenium and rhodium means that the sum of the proportions by weight of ruthenium and rhodium together account for the corresponding percentage of X wt % of the weight of the entire alloy.
  • the alloy particularly preferably has 1.5 wt % of rhodium and ruthenium in the case of a mixture of ruthenium and rhodium.
  • the impurities in total have a proportion of at most 0.9 wt % in the palladium-copper-silver alloy, preferably of at most 0.1 wt %.
  • the palladium-copper-silver alloy contains up to 1 wt % of rhenium, wherein the palladium-copper-silver alloy preferably contains less than 0.1 wt % of rhodium, particularly preferably the palladium-copper-silver alloy contains more than 1 wt % and at most 2 wt % of ruthenium and between 0.1 wt % and 1 wt % of rhenium, very particularly preferably at least 1.1 wt % and at most 1.5 wt % of ruthenium and between 0.2 wt % and 0.8 wt % of rhenium, particularly preferably 1.1 wt % of ruthenium and 0.4 wt % of rhenium.
  • the palladium-copper-silver alloy contains preferably more than 1 wt % and at most 6 wt % of ruthenium.
  • This palladium-copper-silver alloy has surprisingly shown in experiments a particularly high electrical conductivity of 28% IACS (11*10 6 S/m), simultaneously with a high hardness of 365 HV1. Ruthenium-rhenium precipitates at the grain boundaries of the palladium-copper-silver alloy are presumably responsible for this.
  • the palladium-copper-silver alloy contains at least 45 wt % and at most 55 wt % of palladium, at least 30 wt % and at most 45 wt % of copper and at least 8 wt % and at most 15 wt % of silver, preferably the palladium-copper-silver alloy contains at least 50 wt % and at most 53 wt % of palladium, at least 35 wt % and at most 38 wt % of copper and at least 9 wt % and at most 12 wt % of silver, and also at least 1.1 wt % up to a maximum of 3 wt % of ruthenium, rhodium or ruthenium and rhodium, particularly preferably the palladium-copper-silver alloy contains at least 51 wt % and at most 52 wt % of palladium, at least 36 wt % and at most 37
  • Palladium-copper-silver alloys with these compositions have a particularly high electrical conductivity on account of a superlattice formed in the alloy by a uniform order of the palladium and copper atoms in the crystal lattice instead of a random distribution of the palladium atoms and of the copper atoms in the crystal lattice.
  • this effect appears to be enhanced by the ruthenium or rhodium precipitates contained in the palladium-copper-silver alloy.
  • a high hardness is provided.
  • the palladium-copper-silver alloy is produced by melting metallurgy and is subsequently hardened by rolling and tempering, the palladium-copper-silver alloy preferably having a hardness of at least 350 HV1.
  • the hardness of the palladium-copper-silver alloy can be improved.
  • Palladium-copper-silver alloys according to the invention can also be characterized in that the palladium-copper-silver alloy has a hardness of at least 350 HV1.
  • the invention further relates to palladium-copper-silver alloys according to the invention, characterized in that the palladium-copper-silver alloy has an electrical conductivity of at least 19% IACS.
  • Palladium-copper-silver alloys according to the invention can also be characterized in that the palladium-copper-silver alloy has a breaking strength of at least 1300 MPa.
  • Palladium-copper-silver alloys with these physical properties are possible with the additions of ruthenium and rhodium according to the invention and are particularly suitable for the production of probe needles.
  • the palladium-copper-silver alloy contains precipitates of ruthenium, rhodium or a mixture of ruthenium and rhodium or a mixture of ruthenium and rhenium, wherein preferably at least 90 vol % of the precipitates are arranged at grain boundaries of the palladium-copper-silver alloy, particularly preferably at least 99 vol % of the precipitates are arranged at grain boundaries of the palladium-copper-silver alloy.
  • the mechanical properties such as the breaking strength and the deformation resistance, for example, are increased.
  • the palladium-copper-silver alloy is better usable as a probe needle.
  • the palladium-copper-silver alloy has a weight ratio of palladium to copper of at least 1.2 and at most 1.55, preferably has a weight ratio of palladium to copper of at least 1.3 and at most 1.5, particularly preferably has a weight ratio of palladium to copper of at least 1.35 and at most 1.45, very particularly preferably has a weight ratio of palladium to copper of 1.41.
  • weight ratios provide palladium-copper-silver alloys with particularly high electrical conductivity.
  • the palladium-copper-silver alloy has a weight ratio of palladium to silver of at least 3.5 and at most 5.5, preferably has a weight ratio of palladium to silver of at least 4 and at most 5.5, particularly preferably has a weight ratio of palladium to silver of at least 4.6 and at most 5.2, very particularly preferably has a weight ratio of palladium to silver of 4.9.
  • weight ratios also provide palladium-copper-silver alloys with particularly high electrical conductivity.
  • the palladium-copper-silver alloy contains at least 1.1 wt % of ruthenium, rhodium or ruthenium and rhodium.
  • the palladium-copper-silver alloy contains at most 5 wt % of ruthenium, rhodium or ruthenium and rhodium, preferably at most 4 wt % of ruthenium, rhodium or ruthenium and rhodium, particularly preferably at most 3 wt % of ruthenium, rhodium or ruthenium and rhodium, very particularly preferably at most 2 wt % of ruthenium, rhodium or tungsten, ruthenium and rhodium.
  • the palladium-copper-silver alloy contains more than 1 wt % and up to a maximum of 6 wt % of rhodium or ruthenium, preferably contains more than 1 wt % and up to a maximum of 3 wt % of rhodium or ruthenium, particularly preferably contains at least 1.1 wt % and up to a maximum of 2 wt % of rhodium or ruthenium, very particularly preferably 1.5 wt % of rhodium or 1.5 wt % of ruthenium.
  • HV1 high mechanical hardness
  • the palladium-copper-silver alloy contains more than 1 wt % and up to a maximum of 6 wt % of ruthenium and rhenium, preferably contains at least 1.1 wt % and up to a maximum of 3 wt % of ruthenium and rhenium, particularly preferably contains at least 1.1 wt % and up to a maximum of 2 wt % of ruthenium and rhenium, very particularly preferably 1.1 wt % of ruthenium and 0.4 wt % of rhenium.
  • Palladium-copper-silver alloys of this type are characterized by a particularly high electrical conductivity.
  • a wire, a strip or a probe needle consisting of or having a palladium-copper-silver alloy according to the invention, wherein preferably at least one inner core of the wire, the strip or the probe needle consists of the palladium-copper-silver alloy.
  • Wires, strips and probe needles made of such palladium-copper-silver alloys are particularly well suited for electrical contact measurements due to their high hardness, elasticity and electrical conductivity.
  • the problems addressed by the present invention are also solved by the use of a palladium-copper-silver alloy according to the invention or the use of a wire or strip according to the invention or the use of a probe needle according to the invention for testing electrical contacts or for electrical contacting or for producing a sliding contact.
  • the palladium-copper-silver alloy and the wires, strips and probe needles produced therefrom are particularly well suited for these applications.
  • the invention is based on the surprising finding that the palladium-copper-silver alloys according to the invention combine a high electrical conductivity with a high hardness and breaking strength and are, at the same time, uncomplicated to produce and/or are particularly hard.
  • the density of ruthenium (12.4 g/cm 3 ) and rhodium (12 g/cm 3 ) and the melting points of these metals (2334° C. for ruthenium and 1964° C. for rhodium) are considerably closer to those of palladium, copper and silver and can therefore be more easily alloyed with these metals than metals which have more widely differing densities and melting points, such as rhenium, for example.
  • the surface of the palladium-copper-silver alloys is oxidation-resistant even at high temperatures around 400° C. Ruthenium and rhodium form oxides only from about 700° C.
  • the wires, strips and probe needles produced from the alloys according to the invention have the corresponding advantageous properties. Even electrical conductivities of 27% and 28% IACS could be achieved if a palladium-copper-silver alloy with ruthenium or ruthenium and rhenium is measured. A surprisingly high hardness could be achieved with a palladium-copper-silver alloy containing rhodium.
  • IACS Electrical conductivities of 23% IACS or even more are possible with the present invention. 100% IACS corresponds to 58 m/( ⁇ mm 2 ).
  • Rhodium and ruthenium are platinum group metals, whereas rhenium belongs to the same group as manganese, and so no similarity in properties is expectable. Rhenium has a hexagonal crystal structure, whereas rhodium has a face-centered cubic structure.
  • Ruthenium has lower solubility in silver than rhenium (2.65 ⁇ 10 ⁇ 4 for ruthenium, compared with 1.44 ⁇ 10 ⁇ 3 for rhenium). This should have a positive effect on the electrical conductivity of the palladium-copper-silver alloy according to the invention.
  • ruthenium precipitates have been found at the grain boundaries in palladium-copper-silver alloys containing 1.1 wt % to 1.5 wt % of ruthenium. These can lead to a greater hardness of the palladium-copper-silver alloy by precipitation hardening.
  • the palladium-copper-silver alloy according to the invention is characterized by a high hardness, good resilient properties and, at the same time, good electrical conductivity. It is therefore ideally suited for use as a material for producing probe needles.
  • an ordered superstructure in the crystal lattice (also referred to as a superlattice) can be set by appropriate heat treatment.
  • the regular arrangement of the palladium and copper atoms results in both the hardness and the electrical conductivity of the palladium-copper-silver alloy increasing.
  • the alloying of silver in a ratio of palladium to silver between 3 and 6 permits an additional increase in strength by precipitation hardening.
  • the alloying of ruthenium, rhodium or ruthenium and rhodium in the range of 1 wt % to 6 wt % surprisingly contributes to the formation of fine grains, which positively influences the hardness and formability of the palladium-copper-silver alloy.
  • the ruthenium, rhodium or the mixture thereof which are presumably arranged preferably at the grain boundaries, prevents grain growth and creep at the operating temperature. This results in a greater durability of probe needles produced therefrom. Up to 1 wt % of rhenium can be alloyed with the ruthenium.
  • the electrical conductivity achieved at 27% to 30% IACS with a hardness of more than 400 HV is particularly suitable for use as a probe needle.
  • the physical properties of the palladium-copper-silver alloy according to the invention with ruthenium in respect of electrical conductivity and hardness are also better than that of Paliney® 25.
  • the palladium-copper-silver alloys described below were produced by first producing master alloys by induction melting. Palladium-ruthenium, palladium-rhenium and palladium-rhodium master alloys were produced as master alloys. Because of the melting temperatures and densities of the elements palladium, ruthenium and rhodium, which are not very different from one another, the production of the master alloys is straightforward and cost-effective without great effort.
  • the shaped bodies thus melted are then shaped and hardened by heat treatments and rolling.
  • the shaped bodies were tempered at 900° C. for 120 minutes and quenched. They were rolled at room temperature with several intermediate annealing operations at 900° C. and for 120 minutes at 0.4 mm and then kept at 380° C. for 1.5 hours, as a result of which a hardening effect occurs.
  • the electrical conductivity was then determined using four-point measurement.
  • the four-point measurement method also four-terminal sensing, four-wire sensing or Kelvin sensing, is a method for determining sheet resistance, i.e. the electrical resistance of a surface or thin layer.
  • four measuring points are placed in a row on the surface of the film, wherein a known current flows via the two outer measuring points and the potential difference, i.e. the electrical voltage between two inner measuring points, is measured using these two inner measuring points. Since the method is based on the principle of four-wire measurement, it is largely independent of the contact resistance between the measuring points and the surface (Thomson bridge principle). Adjacent measuring points each have the same spacing.
  • the sheet resistance R is calculated from the measured voltage U and the current I according to the formula:
  • the electrical conductivity follows from the inverse of the specific resistance.
  • HV1 Vickers hardness test according to DIN EN ISO 6507-1:2018 to ⁇ 4:2018 with a test force of 9.81 N (1 kilopond)
  • the strength was examined by means of tensile tests and the microstructure was examined by means of metallographic sections.
  • the data always refer to percent by weight (wt %) in the alloy.
  • the alloys contain conventional impurities with a concentration of less than 0.1 wt %.
  • a palladium-copper-silver alloy by the product name Hera 6321 with a composition of 39 wt % of Pd, 31 wt % of Cu, 29 wt % of Ag, 0.9 wt % of Zn and 0.1 wt % of B was also examined.
  • the measurements of the PdCuAgRu alloy, the PdCuAgRuRe alloy and the PdCuAgRh alloy were carried out on metal sheets having a thickness of 0.4 mm.
  • the Hera-6321 alloy was measured on a metal sheet with a thickness of 54 ⁇ m.
  • FIG. 1 shows a microstructure image of the examined Hera-6321 alloy
  • FIG. 2 shows a microstructure image of the examined PdCuAgRu alloy
  • FIG. 3 shows a microstructure image of the examined PdCuAgRuRe alloy
  • FIG. 4 shows a microstructure image of the examined PdCuAgRh alloy.
  • FIGS. 1 to 4 show the alloys in the precipitation-hardened state.
  • the images were taken by imaging sections through the alloys using a light microscope (reflected light microscope, bright field).
  • the surfaces were prepared with microstructure etches to make the precipitates more visible.
  • the precipitates are shown in the alloys as dark contrasts in the bright matrix of the precious metal alloy.
  • the silver precipitates in the alloy can be seen as bright contrasts in the dark matrix.
  • the precipitates are smaller and more dispersed in the PdCuAgRuRe alloy than in the PdCuAgRu alloy.
  • the PdCuAgRh alloy has the smallest precipitates.
  • the size of the precipitates is not a measure of the quality of the alloys.
  • the measurements show the high electrical conductivity of the palladium-copper-silver alloys according to the invention, which contain more than 1 wt % of ruthenium, rhodium or ruthenium and rhodium, compared to Hera 6321 (between 2.3 times and 3 times as high).
  • the hardness of the palladium-copper-silver alloys with ruthenium or rhodium is only slightly (about 10%) less than the hardness of Hera 6321.
  • the palladium-copper-silver alloys containing ruthenium even have a somewhat higher electrical conductivity than the palladium-copper-silver alloys according to U.S. Ser. No. 10/385,424 B1.
  • the palladium-copper-silver alloys containing rhodium are characterized by a higher hardness.

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EP20193903.0A EP3960890A1 (de) 2020-09-01 2020-09-01 Palladium-kupfer-silber-ruthenium-legierung

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EP4325227A1 (de) 2022-08-16 2024-02-21 Heraeus Precious Metals GmbH & Co. KG Bandförmiger verbundwerkstoff für prüfnadeln
CN117026055B (zh) * 2023-10-09 2024-01-12 浙江金连接科技股份有限公司 一种半导体芯片测试探针用钯合金及其制备方法

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