US10557941B2 - Method and apparatus for inspecting positioning machine by laser tracking interferometer - Google Patents

Method and apparatus for inspecting positioning machine by laser tracking interferometer Download PDF

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US10557941B2
US10557941B2 US15/631,430 US201715631430A US10557941B2 US 10557941 B2 US10557941 B2 US 10557941B2 US 201715631430 A US201715631430 A US 201715631430A US 10557941 B2 US10557941 B2 US 10557941B2
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retroreflector
positioning machine
laser tracking
rotation center
distance
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US20180038960A1 (en
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Shinichirou Yanaka
Masayuki Nara
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Mitutoyo Corp
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Mitutoyo Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/4808—Evaluating distance, position or velocity data
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers

Definitions

  • the present invention relates to methods and apparatuses for inspecting a positioning machine by a laser tracking interferometer (also referred to as a laser tracker), and more particularly, to a method and an apparatus for inspecting a positioning machine by a laser tracking interferometer, the method and apparatus being suitably used for inspecting a machine having a positioning mechanism, such as a three-dimensional coordinate measuring machine (also referred to as the CMM), a machine tool, or a robot (collectively referred to as the positioning machine), by a laser tracking interferometer.
  • a laser tracking interferometer also referred to as a laser tracker
  • a laser tracking interferometer which is configured from: a laser interferometer on which an optical axis shift detection sensor for detecting the amount of shift in the optical axis of return light is mounted; a biaxial rotation mechanism for directing the laser interferometer in an arbitrary direction; and a retroreflector that is secured to an object to be measured (see Japanese Patent Application Laid-Open. No. Sho. 63-231286 (hereafter referred to as Patent Literature 1) and Japanese Patent Application Laid-Open No. 2007-57522 (hereafter referred to as Patent Literature 2)).
  • the retroreflector is an optical element for collimating incident and reflected beams of light, and capable of interference measurement in a given direction by controlling the biaxial rotation mechanism so as to reduce the amount of shift in the optical axis to zero on the basis of an output from the optical axis shift detection sensor.
  • German Patent No. DE 102007004934 B4 (hereafter referred to as Patent Literature 3) describes a method for inspecting a geometric error of a positioning machine provided with a retroreflector using a laser tracking interferometer for measuring a distance by a laser beam that is rotatable to track the retroreflector, like those described above.
  • Patent Literature 3 relates to a method for inspecting a geometric error of a positioning machine (herein, a CMM) 10 provided with a retroreflector 20 by a laser tracking interferometer 30 that measures a distance using a laser beam 32 rotatable to track the retroreflector 20 .
  • a positioning machine herein, a CMM
  • a laser tracking interferometer 30 that measures a distance using a laser beam 32 rotatable to track the retroreflector 20 .
  • FIG. 1 illustrates a base 12 of the positioning machine 10 , a gate type frame 14 that is movable in the back-and-forth direction of the figure with respect to the base 12 , a column 16 that is movable is the right-and-left direction along a horizontal beam 15 of the gate type frame 14 , a slider 18 that is movable in the up-and-down direction with respect to the column 16 , a personal computer (PC) 40 , and communication cables 42 and 44 .
  • the tip end (the lower end in the figure) of the slider 18 is provided with a probe (for measurement) or the retroreflector 20 (for inspection).
  • claim 1 of Patent Literature 3 includes: a step of determining the coordinates of the rotation center M of the laser tracking interferometer 30 positioned in a work space of the positioning machine 10 ; a step of positioning the retroreflector 20 at at least two positions p i that are substantially positioned on a straight line g k extending through the rotation center M of the laser tracking interferometer 30 , and detecting each of the coordinates of the retroreflector 20 by the positioning machine 10 ; a step of measuring, by the laser tracking interferometer 30 , at least one distance difference ⁇ d ij,L between distances d i from the at least two positions p i to the rotation center M, respectively; a step of computing at least one distance difference ⁇ d ij,C from each of the coordinates of the retroreflector 20 measured by the positioning machine 10 ; and a step of comparing the at least one measured distance difference ⁇ d ij,L with the at least one calculated distance difference ⁇ d
  • (B) a step of measuring the distance to the retroreflector 20 using the laser tracking interferometer 30 ;
  • (C) a step of repeatedly executing the steps (A) and (B) described above at other positions until the position (coordinate) vector r M of the rotation center M can be determined;
  • (D) a step of computing each coordinate vector r M of the rotation center M from the measurement value of a measured distance.
  • claim 2 of Patent Literature 3 further specifies the method according to claim 1 .
  • the method is characterized in that the retroreflector 20 is moved to at least three positions and particularly, to four positions P i , and the step (B) includes a step of using the laser tracking interferometer 30 , when the retroreflector 20 is moved from one position P i to another position P i , to measure the distances from the rotation center M to the at least three positions P i and measure a difference ⁇ d ij,L between the measurement values, so that each coordinate vector r M of the rotation center M is determined by each measured distance difference ⁇ d ij,L and the coordinate vector P i measured by the positioning machine 10 .
  • Equation 1 the distance difference ⁇ d ij,C between two measurement points pi (here, expressed as p i and p j ), measured by the positioning machine 10 , with the rotation center M at the origin.
  • ⁇ d ij,C
  • the inspection is carried out with no problem by Equations 1 to 3.
  • the measurement points p i and p j are set on the straight line g k , the measurement points may not be positioned precisely on the straight line g k .
  • the present invention has been made to address the aforementioned conventional problems and provide improved accuracy of inspection of a positioning machine by a laser tracking interferometer.
  • the present invention addresses the aforementioned problems by a method for inspecting a positioning machine by a laser tracking interferometer that tracks a retroreflector using a laser beam.
  • the method includes the steps of: mounting the retroreflector on the positioning machine; determining a position vector r M of a rotation center M of the laser tracking interferometer positioned in a work space of the positioning machine; positioning the retroreflector at at least two positions p i located in a vicinity of one straight line g k extending through the rotation center M of the laser tracking interferometer, and detecting each of position vectors p i of the retroreflector by the positioning machine; measuring a distance d i,L from each of the at least two positions p i to the rotation center M using the laser tracking interferometer and computing at least one distance difference ⁇ d ij,L from a difference between the at least two distances d i,L ; performing coordinate transformation of each of the position vectors p i of the retroreflector to a position
  • the step of determining the position vector r M of the rotation center M includes the steps of: (a) moving the retroreflector to a desired position P i ; (b) measuring a position vector P i of the retroreflector by the positioning machine; (c) measuring the distance d i,L to the retroreflector by the laser tracking interferometer; and (d) repeating the steps (a) to (c) at at least a total of four positions until the position P i of the retroreflector is changed and then the position vector r M of the rotation center M of the laser tracking interferometer can be computed, so that the position vector r M of the rotation center M of the laser tracking interferometer can be determined from the distance d i,L and the position vector P i which have been measured.
  • the present invention also addresses the aforementioned problems by an apparatus for inspecting a positioning machine, to which a retroreflector is mounted, by a laser tracking interferometer for tracking the retroreflector using a laser beam.
  • the apparatus includes: a circuit for determining a position vector r M of a rotation center M of the laser tracking interferometer positioned in a work space of the positioning machine; a circuit for positioning the retroreflector at at least two positions p i located in a vicinity of one straight line g k extending through the rotation center M of the laser tracking interferometer, and detecting each of position vectors p i of the retroreflector by the positioning machine; a circuit for measuring a distance d i,L from each of the at least two positions p i to the rotation center M using the laser tracking interferometer and computing at least one distance difference ⁇ d ij,L from a difference between the at least two distances d i,L ; a circuit for performing coordinate transformation of each of the position vectors
  • the circuit for determining the position vector r M of the rotation center M includes: (a) a circuit for moving the retroreflector to a desired position P i ; (b) a circuit for measuring a position vector P i of the retroreflector by the positioning machine; (c) a circuit for measuring the distance d i,L to the retroreflector by the laser tracking interferometer; and (d) a circuit for repeating the steps (a) to (c) at at least a total of four positions until the position P i of the retroreflector is changed and then the position vector r M of the rotation center M of the laser tracking interferometer can be computed, so that the position vector r M of the rotation center M of the laser tracking interferometer can be determined from the distance d i,L and the position vector P i which have been measured.
  • the value of the position vector P i it is possible to employ a pre-specified command value in place of a measurement value by the positioning machine.
  • At least one position may be a position that is not present on the same plane.
  • the distance difference ⁇ d ij,C may be computed by orthogonal projection of a vector of a difference between the respective position vectors p′ i of the retroreflector to the unit direction vector g k of the straight line g k .
  • the position vector p i or P i of the retroreflector may be measured by the positioning machine while the retroreflector is being moved.
  • the positioning machine may be a three-dimensional coordinate measuring machine (CMM).
  • CCM three-dimensional coordinate measuring machine
  • the present invention allows a geometric accuracy inspection of a positioning machine to be performed with high accuracy along a straight line g k , even when measurement points p i are not exactly disposed on the straight line g k .
  • This is implemented by comparing a distance ⁇ d ij,C with a distance ⁇ d ij,L measured by a laser tracking interferometer, the distance ⁇ d ij,C having been acquired by orthogonal projection of a position vector p i of a measurement point measured by the positioning machine to the straight line g k passing through the rotation center M of the laser tracking interferometer.
  • FIG. 1 is an explanatory schematic perspective view illustrating the inspecting method disclosed in Patent Literature 3 and an applicable target of an embodiment of the present invention
  • FIG. 2 is a view illustrating a method for computing an error in the inspecting method disclosed in Patent Literature 3;
  • FIG. 3 is a view illustrating a problem of the aforementioned method for computing an error
  • FIG. 4 is a flowchart of the entire procedure is an embodiment of the present invention.
  • FIG. 5 is a flowchart of the procedure for computing a position vector of the rotation center of the laser tracking interferometer in the embodiment of the present invention
  • FIG. 6 is a view schematically illustrating measurement points in the embodiment of the present invention.
  • FIG. 7 is a view schematically illustrating as operation of the embodiment of the present invention.
  • FIG. 8 is a view schematically illustrating an example to which the present invention is effective.
  • the applicable target of the embodiment of the present invention is the same as that of the conventional technique disclosed in Patent Literature 3. That is, as shown in FIG. 1 , an apparatus is used in which a laser tracking interferometer 30 is positioned within the work space of a positioning machine (OEM) 10 on which the retroreflector 20 is mounted (the range in which a slider 18 on a base 12 is operated, and the surrounding thereof); to acquire a position vector p i of the retroreflector 20 measured by the positioning machine 10 into a PC 40 , the PC 40 and the positioning machine 10 are connected together by a communication cable 42 such as a USB or LAN; and to acquire a distance d i,L to the retroreflector 20 measured by the laser tracking interferometer 30 into the PC 40 , the PC 40 and the laser tracking interferometer 30 are connected together by a communication cable 44 such as a USB or LAN.
  • OEM positioning machine
  • the PC 40 includes a data storage device (not shown) in which measurement results or a program for controlling the CMM 10 are stored.
  • Steps 1 to 9 below will be followed to inspect the geometric accuracy of the positioning machine 10 .
  • Step 1 As the procedure is shown in FIG. 5 , Steps 1 A to 1 E below will be followed to compute a position vector r M of the rotation center M of the laser tracking interferometer 30 .
  • Step 1 A As illustrated in FIG. 6 , the retroreflector 20 is first positioned at a desired position P i .
  • Step 1 B Subsequently, the laser tracking interferometer 30 is used to measure the distance d i,L from the rotation center M of the laser tracking interferometer 30 to the position P i .
  • Step 1 C The positioning machine 10 is used to measure the position vector P i of the retroreflector 20 .
  • Step 1 D Step 1 A to Step 1 D are repeatedly carried out for at least a total of four positions P i while the position P i of the retroreflector 20 is being varied, until the position vector r M of the rotation center M can be computed.
  • Step 1 E The position vector r M of the rotation center M is computed from the distance d i,L and the position vector P i which have been measured.
  • the positions P i of the retroreflector 20 it is necessary to select at least one point that is a position not on the same plane because the position vector r M of the rotation center M cannot be computed if all the positions P i are on the same plane.
  • Step 1 E of FIG. 5 After Step 1 E of FIG. 5 is ended, the process returns to Step 2 of FIG. 4 and executes Steps 2 to 9 below.
  • Step 2 the process computes the unit direction vector g k of one straight line g k that extends, in a direction in which the inspection is to be carried out, through the rotation center M of which position vector r M was computed in Step 1 , and then the retroreflector 20 is positioned at the position p i in the vicinity of the straight, line g k .
  • Step 3 The position vector p i of the retroreflector 20 is measured by the positioning machine 10 , and the laser tracking interferometer 30 is used to measure the distance d i,L from the rotation center M to the position p i of the retroreflector 20 .
  • Step 4 The retroreflector 20 is moved to another position in the vicinity of the straight line g k , and then the process conducts Steps 2 to 3 again.
  • the retroreflector 20 is moved and measured repeatedly for a required number of times.
  • Step 5 At least two position vectors p i measured by the positioning machine 10 are each changed by coordinate transformation to the position vector p′ i with the rotation center M at the origin.
  • Step 6 The process calculates distances d i,C , acquired by orthogonal projection of the at least two positon vectors p′ i to the unit direction vectors g k of the straight line g k for the respective position vectors p′ i .
  • d i,C ⁇ right arrow over (p) ⁇ ′ i ⁇ right arrow over (g) ⁇ k (Equation 5)
  • Step 7 The process computes at least one distance difference ⁇ d ij,C from the difference between the at least two distances d i,C and d ij,C .
  • ⁇ d ij,C d i,C ⁇ d j,C (Equation 6)
  • Step 8 The process computes at least one distance difference ⁇ d ij,L from the difference between the at least two distances d i,L and d j,L measured in step 3 using the laser tracking interferometer 30 .
  • Step 9 The process compares the at least one distance difference ⁇ d ij,C measured by the positioning machine 10 with the at least one distance difference ⁇ d ij,L measured using the laser tracking interferometer 30 , thereby evaluating the positioning accuracy of the positioning machine 10 .
  • a laser interferometer to be mounted on the laser tracking interferometer 30 may be of either the incremental type or the absolute type.
  • Step 1 the position vector P i employs a value measured by the positioning machine 10 .
  • the measurement of the position vector p i by the positioning machine 10 in Step 2 may be performed in synchronism with the measurement of the distance d i,L by the laser tracking interferometer 30 in Step 3 , thereby performing these measurements while the retroreflector 20 is being moved.
  • a plane mirror may be used to change the direction of a laser beam 32 emitted from the laser tracking interferometer 30 for inspection.
  • the distance difference ⁇ d ij,L may be directly measured.
  • the distance difference ⁇ d ij,C is computed from the distances d i,C that are acquired by orthogonal projection of the position vectors p′ i to the unit direction vectors g k of the straight line g k .
  • the distance difference ⁇ d ij,C may be computed by computing the vector ⁇ p′ ij of the difference between the position vectors of two points and subjecting it to the orthogonal projection to the unit direction vector g k .
  • the vectors p 1 to p 2 , p 2 to p 3 , and . . . have a high gradient to the straight line g k , and thus the present invention provides significant effects.
  • the positioning machine 10 was a CMM having a gate type frame.
  • the type of the positioning machine is not limited thereto, and may also be another type of CMM having a cantilever type frame, a machine tool, a robot, or the like.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
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US11366448B2 (en) * 2017-12-14 2022-06-21 Mitutoyo Corporation Spatial accuracy correction method and apparatus

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CN116149339B (zh) * 2023-04-21 2023-07-18 武汉奋进智能机器有限公司 轨道设备的行走纠偏方法、设备、介质及轨道设备系统

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DE102017213444B4 (de) 2023-07-27
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