UA76987C2 - Method and apparatus for tightening gaskets through chemical infiltration in gaseous phase - Google Patents
Method and apparatus for tightening gaskets through chemical infiltration in gaseous phase Download PDFInfo
- Publication number
- UA76987C2 UA76987C2 UA20031211542A UA20031211542A UA76987C2 UA 76987 C2 UA76987 C2 UA 76987C2 UA 20031211542 A UA20031211542 A UA 20031211542A UA 20031211542 A UA20031211542 A UA 20031211542A UA 76987 C2 UA76987 C2 UA 76987C2
- Authority
- UA
- Ukraine
- Prior art keywords
- chamber
- pipeline
- reagent gas
- gas
- loading zone
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 19
- 239000000126 substance Substances 0.000 title claims description 11
- 230000008595 infiltration Effects 0.000 title claims description 10
- 238000001764 infiltration Methods 0.000 title claims description 10
- 239000007792 gaseous phase Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 238000010438 heat treatment Methods 0.000 claims abstract description 9
- 239000003153 chemical reaction reagent Substances 0.000 claims description 58
- 238000009434 installation Methods 0.000 claims description 27
- 238000005056 compaction Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 6
- 238000000280 densification Methods 0.000 abstract description 2
- 238000001564 chemical vapour infiltration Methods 0.000 abstract 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- 239000002131 composite material Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 239000002296 pyrolytic carbon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/71—Ceramic products containing macroscopic reinforcing agents
- C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
- C04B35/80—Fibres, filaments, whiskers, platelets, or the like
- C04B35/83—Carbon fibres in a carbon matrix
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45578—Elongated nozzles, tubes with holes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S427/00—Coating processes
- Y10S427/10—Chemical vapor infiltration, i.e. CVI
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Ceramic Engineering (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Composite Materials (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Devices For Use In Laboratory Experiments (AREA)
- Braking Arrangements (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Reinforced Plastic Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0200412A FR2834713B1 (fr) | 2002-01-15 | 2002-01-15 | Procede et installation pour la densification de substrats par infiltration chimique en phase vapeur |
| PCT/FR2003/000097 WO2003060183A1 (fr) | 2002-01-15 | 2003-01-14 | Procede et installation pour la densification de substrats par infiltration chimique en phase vapeur |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| UA76987C2 true UA76987C2 (en) | 2006-10-16 |
Family
ID=8871284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| UA20031211542A UA76987C2 (en) | 2002-01-15 | 2003-01-14 | Method and apparatus for tightening gaskets through chemical infiltration in gaseous phase |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US7691440B2 (it) |
| EP (1) | EP1466031B1 (it) |
| JP (1) | JP4495970B2 (it) |
| KR (1) | KR100985377B1 (it) |
| CN (1) | CN1244714C (it) |
| AT (1) | ATE488616T1 (it) |
| AU (1) | AU2003216719A1 (it) |
| CA (1) | CA2445501A1 (it) |
| DE (1) | DE60334970D1 (it) |
| FR (1) | FR2834713B1 (it) |
| RU (1) | RU2293795C2 (it) |
| UA (1) | UA76987C2 (it) |
| WO (1) | WO2003060183A1 (it) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2881145B1 (fr) * | 2005-01-24 | 2007-11-23 | Snecma Propulsion Solide Sa | Procede d'infiltration chimique en phase gazeuse pour la densification de substrats poreux par du carbone pyrolytique |
| FR2882064B1 (fr) | 2005-02-17 | 2007-05-11 | Snecma Propulsion Solide Sa | Procede de densification de substrats poreux minces par infiltration chimique en phase vapeur et dispositif de chargement de tels substrats |
| CN1304912C (zh) * | 2005-02-21 | 2007-03-14 | 西北工业大学 | 碳/碳复合材料热梯度化学气相渗透过程温度自动控制器 |
| CN101671189B (zh) * | 2009-09-23 | 2012-07-18 | 北京航空航天大学 | 国产炭纤维快速定向渗积制备高性能炭基复合材料的方法 |
| CN102953049B (zh) * | 2011-08-25 | 2015-07-08 | 沈阳金研机床工具有限公司 | 化学气相沉积法涂层装置 |
| FR2980486B1 (fr) | 2011-09-28 | 2013-10-11 | Snecma Propulsion Solide | Dispositif de chargement pour la densification par infiltration chimique en phase vapeur en flux dirige de substrats poreux de forme tridimensionnelle |
| FR2993044B1 (fr) * | 2012-07-04 | 2014-08-08 | Herakles | Dispositif de chargement et installation pour la densification de preformes poreuses tronconiques et empilables |
| FR2993555B1 (fr) | 2012-07-19 | 2015-02-20 | Herakles | Installation d'infiltration chimique en phase vapeur a haute capacite de chargement |
| CN102964144B (zh) * | 2012-11-19 | 2014-04-02 | 西北工业大学 | 一种提高碳/碳复合材料表面涂层抗氧化性能的方法 |
| FR3004732B1 (fr) * | 2013-04-18 | 2015-05-08 | Herakles | Outillage de maintien, chargement et installation pour la densification de preformes poreuses de revolution |
| KR101589965B1 (ko) * | 2014-02-26 | 2016-02-05 | (주) 데크카본 | 밀도화 장비 |
| FR3018526B1 (fr) * | 2014-03-14 | 2021-06-11 | Herakles | Installation de densification cvi comprenant une zone de prechauffage a forte capacite |
| US9834842B2 (en) | 2015-05-15 | 2017-12-05 | Goodrich Corporation | Slotted seal plates and slotted preforms for chemical vapor deposition densification |
| WO2017033053A1 (en) | 2015-08-21 | 2017-03-02 | Flisom Ag | Homogeneous linear evaporation source |
| TWI624554B (zh) * | 2015-08-21 | 2018-05-21 | 弗里松股份有限公司 | 蒸發源 |
| US10407769B2 (en) * | 2016-03-18 | 2019-09-10 | Goodrich Corporation | Method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces |
| CN108088247B (zh) * | 2017-12-28 | 2019-08-13 | 德淮半导体有限公司 | 炉管装置 |
| US10731252B2 (en) * | 2018-05-25 | 2020-08-04 | Rolls-Royce High Temperature Composites | Apparatus and method for coating specimens |
| FR3083229B1 (fr) | 2018-06-27 | 2020-09-11 | Safran Ceram | Procede de densification par infiltration chimique en phase gazeuse de substrats annulaires poreux |
| FR3084672B1 (fr) | 2018-08-03 | 2020-10-16 | Safran Ceram | Procede de densification par infiltration chimique en phase gazeuse de substrats annulaires poreux |
| FR3084892B1 (fr) * | 2018-08-10 | 2020-11-06 | Safran Ceram | Procede de densification par infiltration chimique en phase gazeuse de substrats annulaire poreux |
| FR3095213B1 (fr) * | 2019-04-19 | 2022-12-23 | Safran Ceram | Installation de densification CVI |
| FR3129954B1 (fr) * | 2021-12-06 | 2023-12-15 | Safran Ceram | Installation d’infiltration chimique en phase gazeuse à double chambre de réaction |
| US12000046B1 (en) * | 2021-12-29 | 2024-06-04 | Rolls-Royce High Temperature Composites, Inc. | Load assemblies for loading parts in a furnace |
| US11932941B1 (en) | 2021-12-29 | 2024-03-19 | Rolls-Royce High Temperature Composites, Inc. | Load assemblies for loading parts in a furnace |
| US12078417B1 (en) | 2021-12-29 | 2024-09-03 | Rolls-Royce High Temperature Composites, Inc. | Load assemblies for loading parts in a furnace |
| FR3132718A1 (fr) | 2022-02-16 | 2023-08-18 | Safran Landing Systems | Procédé de densification par infiltration chimique en phase gazeuse avec des plateaux monopiles pour un flux semi-forcé |
| FR3132717B1 (fr) | 2022-02-16 | 2024-02-16 | Safran Landing Systems | Outillage des plateaux multipiles pour un flux semi-forcé |
| US20240110281A1 (en) * | 2022-09-30 | 2024-04-04 | Raytheon Technologies Corporation | Stacking tool fixture for forced flow chemical vapor infiltration |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2729190A (en) * | 1951-10-08 | 1956-01-03 | Pawlyk Peter | Apparatus for plating the interior of hollow objects |
| US4580524A (en) * | 1984-09-07 | 1986-04-08 | The United States Of America As Represented By The United States Department Of Energy | Process for the preparation of fiber-reinforced ceramic composites by chemical vapor deposition |
| JP2839621B2 (ja) * | 1990-02-13 | 1998-12-16 | 株式会社東芝 | 半導体製造用熱拡散装置 |
| US6022414A (en) * | 1994-07-18 | 2000-02-08 | Semiconductor Equipment Group, Llc | Single body injector and method for delivering gases to a surface |
| KR100389502B1 (ko) * | 1994-11-16 | 2003-10-22 | 굿리치 코포레이션 | 압력구배화학기상침투및화학기상증착장치,방법및이에의한생성물 |
| US5480678A (en) | 1994-11-16 | 1996-01-02 | The B. F. Goodrich Company | Apparatus for use with CVI/CVD processes |
| FR2733254B1 (fr) * | 1995-04-18 | 1997-07-18 | Europ Propulsion | Procede d'infiltration chimique en phase vapeur pour la densification de substrats poreux disposes en piles annulaires |
| FR2754813B1 (fr) * | 1996-10-18 | 1999-01-15 | Europ Propulsion | Densification de substrats poreux disposes en piles annulaires par infiltration chimique en phase vapeur a gradient de temperature |
| KR100360401B1 (ko) * | 2000-03-17 | 2002-11-13 | 삼성전자 주식회사 | 슬릿형 공정가스 인입부와 다공구조의 폐가스 배출부를포함하는 공정튜브 및 반도체 소자 제조장치 |
| FR2818291B1 (fr) * | 2000-12-19 | 2003-11-07 | Snecma Moteurs | Densification de substrats poreux creux par infiltration chimique en phase vapeur |
| US6953605B2 (en) * | 2001-12-26 | 2005-10-11 | Messier-Bugatti | Method for densifying porous substrates by chemical vapour infiltration with preheated gas |
-
2002
- 2002-01-15 FR FR0200412A patent/FR2834713B1/fr not_active Expired - Fee Related
-
2003
- 2003-01-14 JP JP2003560261A patent/JP4495970B2/ja not_active Expired - Lifetime
- 2003-01-14 UA UA20031211542A patent/UA76987C2/uk unknown
- 2003-01-14 AU AU2003216719A patent/AU2003216719A1/en not_active Abandoned
- 2003-01-14 DE DE60334970T patent/DE60334970D1/de not_active Expired - Lifetime
- 2003-01-14 WO PCT/FR2003/000097 patent/WO2003060183A1/fr active Application Filing
- 2003-01-14 US US10/475,464 patent/US7691440B2/en not_active Expired - Fee Related
- 2003-01-14 EP EP03712238A patent/EP1466031B1/fr not_active Expired - Lifetime
- 2003-01-14 RU RU2003131510/02A patent/RU2293795C2/ru not_active IP Right Cessation
- 2003-01-14 AT AT03712238T patent/ATE488616T1/de active
- 2003-01-14 KR KR1020037014158A patent/KR100985377B1/ko active IP Right Grant
- 2003-01-14 CN CNB038002973A patent/CN1244714C/zh not_active Expired - Fee Related
- 2003-01-14 CA CA002445501A patent/CA2445501A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| KR100985377B1 (ko) | 2010-10-04 |
| CN1244714C (zh) | 2006-03-08 |
| ATE488616T1 (de) | 2010-12-15 |
| US7691440B2 (en) | 2010-04-06 |
| JP2005514524A (ja) | 2005-05-19 |
| EP1466031B1 (fr) | 2010-11-17 |
| DE60334970D1 (de) | 2010-12-30 |
| CN1511198A (zh) | 2004-07-07 |
| AU2003216719A1 (en) | 2003-07-30 |
| KR20040095145A (ko) | 2004-11-12 |
| CA2445501A1 (en) | 2003-07-24 |
| FR2834713B1 (fr) | 2004-04-02 |
| RU2293795C2 (ru) | 2007-02-20 |
| RU2003131510A (ru) | 2005-04-20 |
| WO2003060183A1 (fr) | 2003-07-24 |
| JP4495970B2 (ja) | 2010-07-07 |
| EP1466031A1 (fr) | 2004-10-13 |
| US20040237898A1 (en) | 2004-12-02 |
| FR2834713A1 (fr) | 2003-07-18 |
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