FR3083229B1 - Procede de densification par infiltration chimique en phase gazeuse de substrats annulaires poreux - Google Patents

Procede de densification par infiltration chimique en phase gazeuse de substrats annulaires poreux Download PDF

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Publication number
FR3083229B1
FR3083229B1 FR1855809A FR1855809A FR3083229B1 FR 3083229 B1 FR3083229 B1 FR 3083229B1 FR 1855809 A FR1855809 A FR 1855809A FR 1855809 A FR1855809 A FR 1855809A FR 3083229 B1 FR3083229 B1 FR 3083229B1
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France
Prior art keywords
substrates
stack
densification
gaseous phase
porous annular
Prior art date
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Active
Application number
FR1855809A
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English (en)
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FR3083229A1 (fr
Inventor
Stephane Goujard
Jean-Francois Potin
Franck Lamouroux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Ceramics SA
Original Assignee
Safran Ceramics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Safran Ceramics SA filed Critical Safran Ceramics SA
Priority to FR1855809A priority Critical patent/FR3083229B1/fr
Priority to PCT/FR2019/051584 priority patent/WO2020002841A1/fr
Publication of FR3083229A1 publication Critical patent/FR3083229A1/fr
Application granted granted Critical
Publication of FR3083229B1 publication Critical patent/FR3083229B1/fr
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45502—Flow conditions in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/614—Gas infiltration of green bodies or pre-forms
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
    • C04B2235/9623—Ceramic setters properties
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D2250/00—Manufacturing; Assembly
    • F16D2250/0092—Tools or machines for producing linings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D65/00—Parts or details
    • F16D65/02—Braking members; Mounting thereof
    • F16D65/12—Discs; Drums for disc brakes
    • F16D65/125—Discs; Drums for disc brakes characterised by the material used for the disc body

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

L'invention concerne un procédé de densification par infiltration chimique en phase gazeuse de substrats annulaires poreux (20) présentant un passage central, les substrats étant disposés dans une enceinte (10) délimitée par une paroi chauffée (10a) et agencés en au moins une première et une deuxième pile de substrats, chaque pile de substrats définissant un volume interne (21) formé par les passages centraux des substrats empilés, la première pile étant plus proche de la paroi que la deuxième pile, le procédé comprenant au moins une étape d'injection dans le volume interne de chaque pile de substrats d'une phase gazeuse comprenant un précurseur gazeux d'un matériau de matrice à déposer au sein de la porosité des substrats, et la quantité de matière de précurseur gazeux injectée par unité de temps dans la deuxième pile est supérieure à la quantité de matière de précurseur gazeux injectée par unité de temps dans la première pile.
FR1855809A 2018-06-27 2018-06-27 Procede de densification par infiltration chimique en phase gazeuse de substrats annulaires poreux Active FR3083229B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1855809A FR3083229B1 (fr) 2018-06-27 2018-06-27 Procede de densification par infiltration chimique en phase gazeuse de substrats annulaires poreux
PCT/FR2019/051584 WO2020002841A1 (fr) 2018-06-27 2019-06-27 Procede de densification par infiltration chimique en phase gazeuse de substrats annulaires poreux

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1855809 2018-06-27
FR1855809A FR3083229B1 (fr) 2018-06-27 2018-06-27 Procede de densification par infiltration chimique en phase gazeuse de substrats annulaires poreux

Publications (2)

Publication Number Publication Date
FR3083229A1 FR3083229A1 (fr) 2020-01-03
FR3083229B1 true FR3083229B1 (fr) 2020-09-11

Family

ID=63896305

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1855809A Active FR3083229B1 (fr) 2018-06-27 2018-06-27 Procede de densification par infiltration chimique en phase gazeuse de substrats annulaires poreux

Country Status (2)

Country Link
FR (1) FR3083229B1 (fr)
WO (1) WO2020002841A1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996015285A1 (fr) * 1994-11-16 1996-05-23 The B.F. Goodrich Company Produit, procede et appareil d'infiltration/depot chimique en phase vapeur a gradient de pression
FR2733254B1 (fr) * 1995-04-18 1997-07-18 Europ Propulsion Procede d'infiltration chimique en phase vapeur pour la densification de substrats poreux disposes en piles annulaires
US7476419B2 (en) * 1998-10-23 2009-01-13 Goodrich Corporation Method for measurement of weight during a CVI/CVD process
FR2821859B1 (fr) 2001-03-06 2004-05-14 Snecma Moteurs Procede pour la densification par infiltration chimique en phase vapeur de substrats poreux ayant un passage central
FR2834713B1 (fr) 2002-01-15 2004-04-02 Snecma Moteurs Procede et installation pour la densification de substrats par infiltration chimique en phase vapeur

Also Published As

Publication number Publication date
FR3083229A1 (fr) 2020-01-03
WO2020002841A1 (fr) 2020-01-02

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