UA111705C2 - Контроль температури підкладки при осадженні покриття - Google Patents

Контроль температури підкладки при осадженні покриття

Info

Publication number
UA111705C2
UA111705C2 UAA201203043A UAA201203043A UA111705C2 UA 111705 C2 UA111705 C2 UA 111705C2 UA A201203043 A UAA201203043 A UA A201203043A UA A201203043 A UAA201203043 A UA A201203043A UA 111705 C2 UA111705 C2 UA 111705C2
Authority
UA
Ukraine
Prior art keywords
covering
bias voltage
data processor
temperature
temperature control
Prior art date
Application number
UAA201203043A
Other languages
English (en)
Inventor
Річард С. Маллін
Анатолій Іванович Кузмічов
Ігор Володимирович Білоусов
Юрій Григорович Кононенко
Олег Георгійович Панков
Дмитро Дмитрович Рижиков
Original Assignee
Юнайтед Текнолоджіз Корпорейшн
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Юнайтед Текнолоджіз Корпорейшн filed Critical Юнайтед Текнолоджіз Корпорейшн
Publication of UA111705C2 publication Critical patent/UA111705C2/uk

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02—Means for indicating or recording specially adapted for thermometers
    • G01K1/026—Means for indicating or recording specially adapted for thermometers arrangements for monitoring a plurality of temperatures, e.g. by multiplexing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)

Abstract

Винахід забезпечує пристрій для осадження покриття на одну або більше деталей (21). Пристрій має: камеру (22), тримач деталей (64) для утримування деталі (деталей), джерело напруги зміщення (94), сполучене з деталлю (деталями) для прикладання напруги зміщення на деталь (деталі), джерело (34) матеріалу покриття, множину датчиків температури (76), та множину дротів (90), що передають вивід температурних датчиків назовні камери. Система контролю температури (150) має процесор температурних даних (300). Щонайменше одна оптоволоконна лінія (223) з'єднує процесор температурних даних з датчиками температури, так щоб електрично ізолювати процесор температурних даних від напруги зміщення.
UAA201203043A 2011-03-24 2012-03-15 Контроль температури підкладки при осадженні покриття UA111705C2 (uk)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/070,846 US20120244290A1 (en) 2011-03-24 2011-03-24 Deposition Substrate Temperature and Monitoring

Publications (1)

Publication Number Publication Date
UA111705C2 true UA111705C2 (uk) 2016-06-10

Family

ID=46026616

Family Applications (1)

Application Number Title Priority Date Filing Date
UAA201203043A UA111705C2 (uk) 2011-03-24 2012-03-15 Контроль температури підкладки при осадженні покриття

Country Status (3)

Country Link
US (2) US20120244290A1 (uk)
EP (1) EP2503021B1 (uk)
UA (1) UA111705C2 (uk)

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US10927449B2 (en) * 2017-01-25 2021-02-23 Applied Materials, Inc. Extension of PVD chamber with multiple reaction gases, high bias power, and high power impulse source for deposition, implantation, and treatment
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Also Published As

Publication number Publication date
US20140199490A1 (en) 2014-07-17
EP2503021A1 (en) 2012-09-26
EP2503021B1 (en) 2016-03-16
US9464350B2 (en) 2016-10-11
US20120244290A1 (en) 2012-09-27

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