TWM667327U - Chemical dispensing systems - Google Patents

Abstract

A chemical distribution system includes a main distribution system and a test distribution system. The main distribution system has a first chemical. The test distribution system is connected to the main distribution system pipeline to output a second chemical to the main distribution system. The main distribution system is used to output the first chemical or the second chemical. Thus, the present application provides the test chemical to the main distribution system through the test distribution system, so that the test chemical is not directly applied to the main distribution system, which can reduce the situation where the main distribution system is contaminated by the test chemical.

Description

Chemical dispensing systems

This application relates to a dispensing system, particularly a chemical dispensing system.

The semiconductor manufacturing process can be roughly divided into thin film, diffusion, lithography, etching and chemical polishing stages. In different stages, chemicals are required to react. Various types of chemicals may have different degrees of toxicity to the human body. Therefore, the above processes are usually implemented in conjunction with various types of chemical dispensing machines.

In the semiconductor manufacturing process, the quality of chemicals is crucial and will directly affect the yield of the semiconductor manufacturing process. The quality of chemicals from different suppliers varies. Before officially using chemicals from a new supplier, the new chemicals must be tested to confirm the quality of the new chemicals. However, if the existing machine is directly tested with new chemicals, the new chemicals will directly contaminate all the pipes of the existing machine.

Therefore, how to provide a chemical dispensing system that can reduce machine pollution during testing is one of the problems that this field wants to solve.

In order to solve the above technical problems, the present application proposes a chemical distribution system, which provides test chemicals to the main distribution system through a test distribution system, so that the test chemicals are not directly applied to the main distribution system, thereby reducing the possibility of the main distribution system being contaminated by the test chemicals.

In order to achieve one of the above purposes, the present application proposes a chemical distribution system, which includes a main distribution system and a test distribution system. The main distribution system has a first chemical. The test distribution system is connected to the main distribution system pipeline to output a second chemical to the main distribution system. The main distribution system is used to output the first chemical or the second chemical.

In one embodiment, the main distribution system includes a pump, a buffer tank, a filter, a distribution valve, a switch valve and a nozzle. The buffer tank is connected to the pump pipeline to store the first chemical. The filter is connected to the buffer tank pipeline to receive the first chemical from the buffer tank. The distribution valve is connected to the filter and the test distribution system pipeline to receive the first chemical or the second chemical from the test distribution system. The switch valve is connected to the distribution valve pipeline. The nozzle is connected to the switch valve pipeline to output the first chemical or the second chemical.

In one embodiment, the main distribution system further includes a flow meter disposed between the buffer tank and the filter.

In one embodiment, the test distribution system includes a distribution tank and a test filter. The distribution tank stores a second chemical. The test filter is connected to the distribution tank and a main distribution system pipeline to output the second chemical.

In one embodiment, the test distribution system further includes a first pressure control module, a first exhaust valve, a tank cabinet, a first row of bubble valves and a second row of bubble valves. The first exhaust valve is connected to the first pressure control module pipeline. The tank cabinet is connected to the first exhaust valve and the distribution tank pipeline. The first row of bubble valves is connected to the distribution tank pipeline. The second row of bubble valves is connected to the test filter pipeline.

In one embodiment, the test distribution system further includes an empty tank sensor and a test flow meter. The empty tank sensor is arranged between the tank cabinet and the distribution tank. The test flow meter is arranged between the distribution tank and the test filter.

In one embodiment, the test dispensing system further includes a weight sensor disposed in the tank.

In one embodiment, the tank cabinet is connected to the first exhaust valve and the distribution tank pipeline through a connector.

In one embodiment, the connector is a quick-release connector.

In one embodiment, the test distribution system further includes a degassing module. The degassing module is connected to the distribution tank and the test filter pipeline and is arranged between the distribution tank and the test filter.

In one embodiment, the degassing module includes a gas extraction module, a second exhaust valve, a vacuum generator and a second pressure control module. The second exhaust valve is connected to the gas extraction module pipeline. The vacuum generator is connected to the second exhaust valve and the second exhaust end pipeline. The second pressure control module is connected to the vacuum generator pipeline.

In one embodiment, the degassing module further includes a vacuum gauge, which is disposed between the gas extraction module and the second exhaust valve.

In one embodiment, the first chemical and the second chemical are organic solvents or developers.

Based on the above content, the chemical distribution system of the present application is configured with a main distribution system and a test distribution system, and the test distribution system is connected to the main distribution system pipeline to output the second chemical to the main distribution system, so that the second chemical used for testing is not directly applied to the main distribution system, thereby achieving the purpose of reducing the contamination of the main distribution system by the second chemical.

Please refer to FIG. 1, which is a schematic diagram of an embodiment of the chemical dispensing system of the present application. The chemical dispensing system 1 includes a main dispensing system 100 and a test dispensing system 200. The main dispensing system 100 has a first chemical. The test dispensing system 200 is connected to the main dispensing system 100 by a pipeline to output a second chemical to the main dispensing system 100. In this embodiment, the main dispensing system 100 is, for example, a chemical dispensing machine, and the test dispensing system 200 is, for example, a chemical filling system (PUMP CART). In this embodiment, the first chemical and the second chemical are, for example, organic solvents or developers, and the present application is not limited thereto.

The main distribution system 100 includes a pump 110, a buffer tank 120, a filter 130, a distribution valve 140, a switch valve 150, and a nozzle 160. The pump 110 pushes the gas in the pipeline to the buffer tank 120 to pressurize the buffer tank 120 through the gas. The buffer tank 120 is connected to the pump 110 and the filter 130 by a pipeline. The buffer tank 120 is used to store the first chemical. The buffer tank 120 provides the first chemical to the filter 130 based on the pressurization of the pump 110. The filter 130 is connected to the buffer tank 120 and the distribution valve 140 through a pipeline, and is used to receive the first chemical from the buffer tank 120 and filter out impurities of the first chemical, and provide the filtered first chemical to the distribution valve 140. The distribution valve 140 is connected to the filter 130 and the test distribution system 200 through a pipeline. The distribution valve 140 is used to selectively receive the first chemical or the second chemical from the test distribution system 200 to provide the first chemical or the second chemical to the switch valve 150. When the main distribution system 100 operates in the working stage, the distribution valve 140 outputs the first chemical to the switch valve 150. When the main distribution system 100 operates in the test phase, the distribution valve 140 outputs the second chemical to the switch valve 150. The switch valve 150 is connected to the distribution valve 140 and the nozzle 160 by a pipeline. The switch valve 150 outputs the first chemical or the second chemical based on a preset flow rate. The nozzle 160 is connected to the switch valve 150 pipeline to output the received first chemical or the second chemical. In one embodiment, the main distribution system 100 further includes a flow meter 170. The flow meter 170 is disposed between the buffer tank 120 and the filter 130. The flow meter 170 is used to monitor the flow of the first chemical between the buffer tank 120 and the filter 130.

In the present application embodiment, the main distribution system 100 includes a distribution valve 140. Therefore, when testing the second chemical, the distribution valve 140 can selectively receive the second chemical, so that the main distribution system 100 can output the second chemical to test the quality of the second chemical. At the same time, since the second chemical is introduced into the pipeline of the main distribution system 100 through the distribution valve 140, the buffer tank 120, the filter 130 and the pipeline therebetween of the main distribution system 100 are isolated from the second chemical through the distribution valve 140, and the buffer tank 120, the filter 130 and the pipeline therebetween of the main distribution system 100 are not affected by the second chemical and contaminated. In this way, the purpose of reducing the contamination of the main distribution system 100 by the second chemical is achieved.

The test distribution system 200 includes a tank 210, a distribution tank 220 and a test filter 230. The tank 210 is connected to the distribution tank 220 by a pipeline. The tank 210 stores a second chemical. The distribution tank 220 is connected to the tank 210 and the test filter 230 by a pipeline. The distribution tank 220 receives the second chemical from the tank 210 and temporarily stores the second chemical. Through the setting of the distribution tank 220, the test distribution system 200 can determine whether there is enough second chemical by detecting the second chemical inventory in the distribution tank 220, and remove air or bubbles in the pipeline through the distribution tank 220. The test filter 230 is connected to the distribution tank 220 and the distribution valve 140 of the main distribution system 100 by a pipeline. The test filter 230 is used to receive the second chemical from the distribution tank 220 and filter out impurities of the second chemical, and provide the filtered second chemical to the distribution valve 140. In one embodiment, the test distribution system 200 further includes a test flow meter 240. The test flow meter 240 is disposed between the distribution tank 220 and the test filter 230. The test flow meter 240 is used to monitor the flow of the second chemical between the distribution tank 220 and the test filter 230. In one embodiment, the test flow meter 240 can be communicatively connected to the main distribution system 100. The host system of the main distribution system 100 can directly monitor the flow sensed by the test flow meter 240.

Please refer to Figures 1 and 2, Figure 2 is a schematic diagram of an embodiment of a test distribution system 200. In this embodiment, the second chemical can be implemented by an organic solvent, and the present application is not limited to this. The test distribution system 200 includes a first pressure control module 250, a first exhaust valve 260, a tank cabinet 210, a distribution tank 220, a test filter 230, a test flow meter 240, a first row of bubble valves 271 and a second row of bubble valves 272. The first pressure control module 250 is used to receive a first gas and pressurize the first gas. The first pressure control module 250 includes a pressure gauge and a pressure regulating valve, and the present application is not limited to this. The first gas is, for example, nitrogen. The first exhaust valve 260 is connected to the first pressure control module 250 and the tank 210 pipeline. In one embodiment, the first gas is provided to the tank 210 through the first exhaust valve 260. In another embodiment, when the tank 210 needs to be replaced, the gas pressure in the tank 210 can be discharged from the cabinet through the first exhaust valve 260. The exhausted tank 210 can be separated from the test distribution system 200. The tank 210 provides the second chemical to the distribution tank 220 based on the pressurized first gas. The distribution tank 220 receives the second chemical from the tank 210 and stores the second chemical. The first row of bubble valves 271 is connected to the distribution tank 220 pipeline, and the first row of bubble valves 271 is used to discharge air or bubbles in the distribution tank 220 and/or the pipeline. The test distribution system 200 can define at least one output module, and at least one output module is connected to the distribution valve 140 pipeline. Each output module includes a test flow meter 240, a test filter 230, and a second row of bubble valves 272. In one embodiment, the second chemical filtered by the test filter 230 is provided to the distribution valve 140. In one embodiment, the second chemical filtered by the test filter 230 is provided to the second row of bubble valves 272. In this embodiment, the second row of bubble valves 272 is connected to the test filter 230 pipeline. The second row of bubble valves 272 is used to discharge air or bubbles in the pipeline. In one embodiment, the test distribution system 200 can be configured with a plurality of output modules corresponding to the distribution valves 140 of the main distribution system 100. Thereby, the test distribution system 200 can be flexibly configured to meet the needs of the main distribution system 100.

In one embodiment, the test dispensing system 200 further includes a connector 280. The tank cabinet 210 is connected to the first exhaust valve 260 and the distribution tank 220 pipeline respectively through the connector 280. The connector 280 is, for example, a quick-release connector. Thereby, the tank cabinet 210 can be separated from the test dispensing system 200 through the quick-release connector, thereby improving the convenience of replacing the tank cabinet 210. In one embodiment, the test dispensing system 200 further includes an empty tank sensor 290. The empty tank sensor 290 is used to detect the remaining amount of the second chemical in the distribution tank 220 to determine whether there is enough second chemical in the test dispensing system 200. In one embodiment, the test dispensing system 200 further includes a weight sensor 211. The weight sensor 211 is disposed in the tank 210. The weight sensor 211 is used to sense the weight of the tank 210 to monitor the remaining amount of the second chemical. In this embodiment, by providing the empty tank sensor 290 and the weight sensor 211, the total amount of the second chemical can be accurately grasped. When one of the empty tank sensor 290 or the weight sensor 211 fails, the sensor that has not failed can be used to grasp the total amount of the second chemical to avoid the occurrence of insufficient second chemical.

Please refer to Figures 1 to 3, Figure 3 is a schematic diagram of an embodiment of the test distribution system 200. In this embodiment, the second chemical can be implemented by a developer, and the present application is not limited to this. The difference between Figure 3 and Figure 2 is that the test distribution system 200 further includes a degassing module 300. The degassing module 300 is connected to the distribution tank 220 and the test filter 230 by pipelines. The degassing module 300 is arranged between the distribution tank 220 and the test filter 230. The degassing module 300 includes a gas extraction module 310, a second exhaust valve 320, a vacuum generator 330 and a second pressure control module 340. The gas extraction module 310 is connected to the distribution tank 220, the test filter 230 and the second exhaust valve 320 by pipelines. The gas of the second chemical flowing through the gas extraction module 310 flows toward the second exhaust valve 320 according to Bernoulli's law. The second pressure control module 340 is used to receive the second gas and pressurize the second gas. The second pressure control module 340 includes a pressure gauge and a pressure regulating valve, and the present application is not limited to this. The second gas is, for example, compressed air (Clean Dry Air, CDA), and the present application is not limited to this. The vacuum generator 330 is connected to the second pressure control module 340 and the second exhaust valve 320 by pipeline. The vacuum generator 330 is used to generate a vacuum state, and the air flow between the gas extraction module 310, the second exhaust valve 320 and the vacuum generator 330 automatically flows to the vacuum generator 330 due to the vacuum state. Thereby, the gas in the second chemical is separated from the second chemical and discharged from the test dispensing system 200. In one embodiment, the degassing module 300 further includes a vacuum meter 350. The vacuum meter 350 is disposed between the gas extraction module 310 and the second exhaust valve 320. The vacuum meter 350 is used to detect the vacuum degree of the pipeline between the gas extraction module 310 and the second exhaust valve 320.

In summary, the chemical distribution system of the present application is configured with a main distribution system and a test distribution system, and the test distribution system is connected to the main distribution system pipeline to output the second chemical to the main distribution system, so that the second chemical used for testing is not directly applied to the main distribution system, thereby achieving the purpose of reducing the contamination of the main distribution system by the second chemical.

1: Chemical distribution system

100: Main distribution system

110: Pump

120: Buffer slot

130:Filter

140:Distribution valve

150:Switch valve

160: Nozzle

170:Flow meter

200:Test distribution system

210: Cabinet

211:Weight sensor

220: Allocation slot

230: Testing the filter

240: Test flow meter

250: Pressure control module

260:1st exhaust valve

271: First row of bubble valves

272: Second row of bubble valve

280: Connector

290: Empty slot sensor

300: Degassing module

310: Gas extraction module

320: Second exhaust valve

330: Vacuum generator

340: Second pressure control module

FIG1 is a schematic diagram of an embodiment of a chemical dispensing system according to an embodiment of the present application.

FIG2 is a schematic diagram of an embodiment of a test distribution system according to an embodiment of the present application.

FIG3 is a schematic diagram of an embodiment of a test distribution system according to an embodiment of the present application.

1: Chemical distribution system

100: Main distribution system

110: Pumping

120: Buffer slot

130:Filter

140: Distribution valve

150:Switch valve

160: Nozzle

170: Flow meter

200:Test distribution system

210: Trough

220: Allocation slot

230: Testing filter

240: Test flow meter

Claims (13)

A chemical distribution system, comprising: a main distribution system having a first chemical; and a test distribution system connected to the main distribution system pipeline for outputting a second chemical to the main distribution system; wherein the main distribution system is used to output the first chemical or the second chemical. A chemical dispensing system as described in claim 1, wherein the main dispensing system comprises: a pump; a buffer tank connected to the pump pipeline to store the first chemical; a filter connected to the buffer tank pipeline to receive the first chemical from the buffer tank; a dispensing valve connected to the filter and the test dispensing system pipeline to receive the first chemical or the second chemical from the test dispensing system; a switch valve connected to the dispensing valve pipeline; and a nozzle connected to the switch valve pipeline to output the first chemical or the second chemical. A chemical distribution system as described in claim 2, wherein the main distribution system further comprises: A flow meter disposed between the buffer tank and the filter. A chemical dispensing system as described in claim 1, wherein the test dispensing system comprises: a dispensing tank storing the second chemical; and a test filter connected to the dispensing tank and the main dispensing system pipeline for outputting the second chemical. A chemical dispensing system as described in claim 4, wherein the test dispensing system further comprises: a first pressure control module; a first exhaust valve connected to the first pressure control module pipeline; a tank cabinet connected to the first exhaust valve and the distribution tank pipeline; a first row of bubble valves connected to the distribution tank pipeline; and a second row of bubble valves connected to the test filter pipeline. The chemical dispensing system as described in claim 5, wherein the test dispensing system further comprises: an empty tank sensor disposed between the tank cabinet and the dispensing tank; and a test flow meter disposed between the dispensing tank and the test filter. A chemical dispensing system as described in claim 5, wherein the test dispensing system further comprises: a weight sensor disposed in the tank. A chemical dispensing system as described in claim 5, wherein the tank cabinet is connected to the first exhaust valve and the distribution tank pipeline through a connecting head. A chemical dispensing system as described in claim 8, wherein the connector is a quick-release connector. The chemical dispensing system as described in claim 4, wherein the test dispensing system further comprises: A degassing module connected to the dispensing tank and the test filter pipeline and disposed between the dispensing tank and the test filter. A chemical dispensing system as described in claim 10, wherein the degassing module comprises: a gas extraction module; a second exhaust valve connected to the gas extraction module pipeline; a vacuum generator connected to the second exhaust valve and a second exhaust end pipeline; a second pressure control module connected to the vacuum generator pipeline. A chemical dispensing system as described in claim 11, wherein the degassing module further comprises: a vacuum gauge disposed between the gas extraction module and the second exhaust valve. The chemical dispensing system of claim 1, wherein the first chemical and the second chemical are an organic solvent or a developer.

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