CN218883669U - Full-automatic integrated gas supply system cabinet - Google Patents
Full-automatic integrated gas supply system cabinet Download PDFInfo
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- CN218883669U CN218883669U CN202223410206.0U CN202223410206U CN218883669U CN 218883669 U CN218883669 U CN 218883669U CN 202223410206 U CN202223410206 U CN 202223410206U CN 218883669 U CN218883669 U CN 218883669U
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Abstract
The utility model discloses a full-automatic integrated gas supply system cabinet, including air feed subassembly and shunt valve subassembly, the air feed subassembly passes through the pipe connection with the shunt valve subassembly, the air feed subassembly includes first gas supply way, second gas supply way, first gas supply way, second gas supply way are established in parallel, control through first valves and supply gas for the shunt valve subassembly in turn; further comprising: the device comprises a first air supply purging component and a second air supply purging component. The utility model discloses, through supplying gas circuit and shunt valve subassembly integration in an equipment cabinet, when the many equipment of solution that can be fine use, with high costs, the risk is big, the maintenance point is many drawbacks to adopt two gas supply modes of supplying the gas circuit (first gas circuit, second gas circuit of supplying) alternate use, can realize incessant air feed, make equipment have higher performance.
Description
Technical Field
The utility model relates to a gas supply technical field especially relates to full-automatic integrated gas supply system cabinet.
Background
The gas supply system is a set of equipment necessary for production and manufacturing workshops of semiconductors, liquid crystal displays, photovoltaic manufacturing, medicines and the like, supplies gas to the equipment in the workshops, and has various types of gases, such as hydrogen gas, natural gas, mixed gas and the like.
The gaseous supply apparatus that uses in the industry of present is the supply of many equipment sectional types, comprises two kinds of equipment of gas holder and diverter valve case, and this supply mode exists with high costs, the risk is big, the maintenance point is many etc. drawback, for this reason the utility model provides a full-automatic integrated gas supply system cabinet.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing a full-automatic integrated gas supply system cabinet.
In order to realize the purpose, the utility model adopts the following technical scheme: the full-automatic integrated gas supply system cabinet comprises a gas supply assembly and a shunt valve assembly, wherein the gas supply assembly is connected with the shunt valve assembly through a pipeline, the gas supply assembly comprises a first gas supply path and a second gas supply path, the first gas supply path and the second gas supply path are arranged in parallel, and the gas supply for the shunt valve assembly is alternatively controlled by a first valve group; further comprising:
the gas supply purging assembly I is provided with a high-pressure nitrogen gas inlet D and a low-pressure nitrogen gas inlet C, a gas outlet of the gas supply purging assembly I is connected with a gas inlet of the first gas supply circuit and a gas inlet of the second gas supply circuit, and the on-off of the two paths is independently controlled through a second valve group;
the second gas supply sweeping component is provided with a nitrogen inlet E and a nitrogen outlet F, a first branch is led out of the second gas supply sweeping component through a three-way diaphragm valve VG1L, and the first branch is connected with a first gas supply path and a second gas supply path;
the first branch is connected with both an air inlet and an air supply port of the first air supply path, and the connection and disconnection of the two paths are controlled independently through a third valve group;
the first branch is connected with the air inlet and the air supply port of the second air supply path, and the on-off of the two paths is controlled independently through the fourth valve group.
As a further description of the above technical solution:
the diverter valve assembly includes:
each group of air supply paths are provided with an overpressure tripping unit MV2, a pneumatic diaphragm valve AV1A, a mechanical pressure gauge PG2A and an overpressure tripping unit MV5A;
the shunt purging assembly is connected with a plurality of groups of gas supply lines connected in parallel through first parallel gas paths and is provided with a nitrogen inlet and a nitrogen outlet;
and the backflow gas path is connected with the plurality of groups of gas supply paths connected in parallel through a second parallel gas path, and one end of the backflow gas path is connected with a check valve TEST.
As a further description of the above technical solution:
the first air supply path is provided with a first air supply bottle, a pressure sensor PT1R, a pneumatic valve GF1R, a pneumatic diaphragm valve AV2R, a first throttle valve, a pressure relief valve PRV1R, a pressure sensor PT2R, a pneumatic diaphragm valve AV3R, a pneumatic valve GF2R and an overvoltage tripping unit MV8R;
the second air supply path is provided with a second air supply bottle, a pressure sensor PT1L, a pneumatic valve GF1L, a pneumatic diaphragm valve AV2L, a second throttle valve, a pressure relief valve PRV1L, a pressure sensor PT2L, a pneumatic diaphragm valve AV3L, a pneumatic valve GF2L and an overvoltage tripping unit MV8L.
As a further description of the above technical solution:
a pipeline between a high-pressure nitrogen inlet D and a low-pressure nitrogen inlet C of the first air supply sweeping component is sequentially provided with a pneumatic diaphragm valve AV1H, a pneumatic valve GF2H, a pneumatic valve GF1N, a control valve CV1N, a pneumatic diaphragm valve AV2N and a pneumatic diaphragm valve AV1N;
and the air outlet of the first air supply purging assembly is arranged on a pipeline between the pneumatic valve GF2H and the pneumatic valve GF 1N.
As a further description of the above technical solution:
the air outlet of the first air supply purging assembly is connected with the first air outlet channel and the second air outlet channel through a three-way pipe; the second valve group includes:
a control valve CV1L and a pneumatic diaphragm valve AV7L are arranged on the first air outlet path;
and a control valve CV1R and a pneumatic diaphragm valve AV7R are arranged on the second air outlet path.
As a further description of the above technical solution:
and a pipeline between a nitrogen inlet E and a nitrogen outlet F of the air supply sweeping component II is sequentially provided with a pneumatic diaphragm valve AV6L, a control valve CV3L and a three-way diaphragm valve VG1L, one end of the first branch is connected with an interface of the three-way diaphragm valve VG1L, and the first branch is provided with an overpressure tripping unit MV9L and a pressure sensor PT3L.
As a further description of the above technical solution:
the third valve block includes:
the pneumatic diaphragm valve AV4L is arranged on a branch pipeline where the air inlets of the first branch and the first air supply channel are located;
the control valve CV2L and the pneumatic diaphragm valve AV5L are arranged on a branch pipeline where the air outlets of the first branch and the first air supply channel are arranged;
the pneumatic diaphragm valve AV4R is arranged on a branch pipeline where the air inlets of the first branch and the second air supply circuit are arranged;
and the control valve CV2R and the pneumatic diaphragm valve AV5R are arranged on a branch pipeline where the air outlets of the first branch and the second air supply channel are arranged.
As a further description of the above technical solution:
and an overvoltage tripping unit MV10L is arranged on the first branch.
As a further description of the above technical solution:
an air pressure switch is connected to the shell of the system cabinet, an air outlet of the air pressure switch is connected with a fan through a pipeline, and an air outlet of the fan is connected with an absorption tower.
As a further description of the above technical solution:
a smoke alarm is arranged in the system cabinet.
The utility model discloses following beneficial effect has:
1. compared with the prior art, the full-automatic integrated gas supply system cabinet integrates the gas supply circuit and the shunt valve component in one equipment cabinet, can well solve the defects of high cost, large risk and multiple maintenance points when multiple devices are used, and can realize uninterrupted gas supply by adopting a gas supply mode of alternately using two gas supply circuits (a first gas supply circuit and a second gas supply circuit) so that the devices have higher performance.
2. Compared with the prior art, this full-automatic integrated gas supply system cabinet sweeps subassembly one, air feed through setting up the air feed and sweeps subassembly two, and its cooperation is used, and realization that can be quick sweeps the residual gas in the pipe-line system, is convenient for change the air feed bottle (first air feed bottle, second air feed bottle change in turn).
Drawings
FIG. 1 is a schematic overall view of a fully automated integrated gas supply system cabinet;
FIG. 2 is a schematic view of a diverter valve assembly of a fully automated integrated gas supply system cabinet;
FIG. 3 is a schematic of one gas supply circuit of the split flow purge assembly;
FIG. 4 is a schematic view of a split purge assembly;
FIG. 5 is a schematic view of a return gas path;
FIG. 6 is an enlarged view of a portion of FIG. 1 at A;
FIG. 7 is a schematic view of a gas supply assembly;
FIG. 8 is a schematic view of a second gas supply circuit;
FIG. 9 is a schematic view of a first gas supply circuit;
FIG. 10 is a schematic view of a second gas supply purge assembly;
FIG. 11 is a schematic view of a gas supply purge assembly.
Illustration of the drawings:
1. a first gas supply path; 2. a second gas supply path; 3. a diverter valve assembly; 301. a split flow purge module; 302. a gas circuit is refluxed; 303. a first parallel gas path; 304. a second parallel gas path; 4. a first gas supply purging component; 5. a second gas supply purging component; 6. a fan; 7. an absorption tower.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1, the utility model provides a full-automatic integrated gas supply system cabinet: including air feed subassembly and flow divider subassembly 3, the air feed subassembly passes through the pipe connection with flow divider subassembly 3, and the air feed subassembly includes first confession gas circuit 1, second confession gas circuit 2, and first confession gas circuit 1, second confession gas circuit 2 are established, are flow divider subassembly 3 air feeds in turn through the control of first valves.
When one of the air pressure is lower than the preset value, the first valve group is used for controlling the first air supply path 1 and the second air supply path 2 to supply air for the flow dividing valve assembly 3, so that the air supply path without air is in an idle state, the operation is convenient, the air tank is purged and replaced by a new air tank, and the uninterrupted long-time use is realized.
Specifically, still include: the air supply purging assembly 4 is provided with a high-pressure nitrogen inlet D and a low-pressure nitrogen inlet C, an air outlet of the air supply purging assembly 4 is connected with an air inlet of the first air supply path 1 and an air inlet of the second air supply path 2, and the two paths of on-off are independently controlled through the second valve group.
The second air supply sweeping component 5 is provided with a nitrogen inlet E and a nitrogen outlet F, the second air supply sweeping component 5 is led out of a first branch through a three-way diaphragm valve VG1L, and the first branch is connected with the first air supply path 1 and the second air supply path 2.
The first branch is connected with the air inlet and the air supply port of the first air supply path 1, and the on-off of the two paths is controlled independently through the third valve group.
The first branch is connected with the air inlet and the air supply port of the second air supply path 2, and the on-off of the two paths is controlled independently through a fourth valve group.
The first gas supply purging component 4 and the second gas supply purging component 5 are matched for use to purge the pipeline, specifically, nitrogen is filled into the nitrogen inlet E and is discharged from the nitrogen outlet F, negative pressure is generated in the first branch where the first branch is located, residual gas in the pipeline is pumped away and is discharged from the nitrogen outlet F together with the nitrogen, and primary negative pressure purging is realized.
And (3) high-purity nitrogen is introduced from the low-pressure nitrogen inlet C, when the pressure reaches about 80psi, the second valve group, the third valve group and the fourth valve group are controlled, the gas is discharged through the F port, the operation is circulated, the gas participating in the inside of the pipeline is diluted, and finally, negative pressure purging is performed again.
Referring to fig. 2, the flow dividing valve assembly 3 includes: and a plurality of groups of gas supply channels and shunt purging assemblies 301 connected in parallel return gas channels 302.
Referring to fig. 2, each air supply path set is provided with an overpressure trip unit MV2, a pneumatic diaphragm valve AV1A, a mechanical pressure gauge PG2A, and an overpressure trip unit MV5A. Specifically, what this embodiment provided is 5 groups supply the gas circuit, and it sets up side by side, according to different user demands, with wherein be connected with equipment all the way, realizes the air feed.
Referring to fig. 4, the split purging assembly 301 is connected to a plurality of sets of parallel gas supply lines through a first parallel gas path 303, and the split purging assembly 301 has a nitrogen inlet and a nitrogen outlet.
Specifically, the shunting sweeps and is provided with tee bend diaphragm valve VG1, control valve CV2, excessive pressure on the subassembly 301 and takes off a mouthful unit MV6, and tee bend diaphragm valve VG 1's one end is connected with first parallel gas circuit 303, is provided with mechanical pressure table on the total gas circuit that first parallel gas circuit 303 is connected, and first parallel gas circuit 303 divides 5 ways of dividing, with 5 gas supply circuit one-to-ones, and be provided with excessive pressure on the way of dividing and take off a mouthful unit MV4.
When the device is used, nitrogen enters from the nitrogen inlet and is discharged from the nitrogen outlet, so that the first parallel gas circuit 303 forms negative pressure, the gas participating in each gas supply circuit is extracted, and the shunt valve assembly 3 can be cleaned.
Referring to fig. 5, the backflow gas path 302 is connected to a plurality of groups of parallel gas supply paths through a second parallel gas path 304, and one end of the backflow gas path 302 is connected to a check valve TEST.
The backflow gas circuit 302 is further provided with an overpressure relief unit MV7, a control valve CV1, a mechanical pressure gauge PG1 and a check valve TEST at the bottom end, the second parallel gas circuit 304 is connected in a pipeline between the mechanical pressure gauge PG1 and the check valve TEST, the second parallel gas circuit 304 is divided into 5 paths which are in one-to-one correspondence with the 5 groups of gas supply paths, and the divided paths are provided with overpressure relief units MV3.
Referring to fig. 7 and 9, the first air supply path 1 is provided with a first air supply bottle, a pressure sensor PT1R, an air-operated valve GF1R, a pneumatic diaphragm valve AV2R, a first throttle valve, a pressure relief valve PRV1R, a pressure sensor PT2R, a pneumatic diaphragm valve AV3R, an air-operated valve GF2R, and an overpressure tripping unit MV8R;
referring to fig. 7 and 8, the second air supply path 2 is provided with a second air supply bottle, a pressure sensor PT1L, an air-operated valve GF1L, a pneumatic diaphragm valve AV2L, a second throttle valve, a pressure relief valve PRV1L, a pressure sensor PT2L, a pneumatic diaphragm valve AV3L, an air-operated valve GF2L, and an overpressure trip unit MV8L.
Referring to fig. 11, a pneumatic diaphragm valve AV1H, a pneumatic valve GF2H, a pneumatic valve GF1N, a control valve CV1N, a pneumatic diaphragm valve AV2N, and a pneumatic diaphragm valve AV1N are sequentially disposed on a pipeline between a high-pressure nitrogen inlet D and a low-pressure nitrogen inlet C of the first air supply purge assembly 4; the air outlet of the first air supply purging assembly 4 is arranged on a pipeline between the pneumatic valve GF2H and the pneumatic valve GF 1N.
Referring to fig. 11, a gas outlet of the first gas supply purging assembly 4 is connected with a first gas outlet path and a second gas outlet path through a three-way pipe; the second valve group includes:
and a control valve CV1L and a pneumatic diaphragm valve AV7L are arranged on the first air outlet path.
And a control valve CV1R and a pneumatic diaphragm valve AV7R are arranged on the second air outlet path.
Referring to fig. 10, a pneumatic diaphragm valve AV6L, a control valve CV3L, and a three-way diaphragm valve VG1L are sequentially disposed on a pipeline between a nitrogen inlet E and a nitrogen outlet F of the air supply purging assembly two 5, one end of the first branch is connected to one interface of the three-way diaphragm valve VG1L, and an overvoltage tripping unit MV9L and a pressure sensor PT3L are disposed on the first branch.
Referring to fig. 7, the third valve group includes:
and the pneumatic diaphragm valve AV4L is arranged on a branch pipeline where the air inlets of the first branch and the first air supply channel 1 are located. The control valve CV2L and the pneumatic diaphragm valve AV5L are arranged on a branch pipeline where the air outlets of the first branch and the first air supply channel 1 are located.
And the pneumatic diaphragm valves AV4R are arranged on branch pipelines where the air inlets of the first branch and the second air supply circuit 2 are located.
The control valve CV2R and the pneumatic diaphragm valve AV5R are arranged on a branch pipeline where the air outlets of the first branch and the second air supply channel 2 are located.
Referring to fig. 10, an overvoltage trip unit MV10L is disposed on the first branch.
An air pressure switch is connected to the shell of the system cabinet, an air outlet of the air pressure switch is connected with a fan 6 through a pipeline, an air outlet of the fan 6 is connected with an absorption tower 7, and a smoke alarm is arranged inside the system cabinet.
The purging process comprises the following steps: for example, when the first gas cylinder is replaced, nitrogen is introduced through the port E to enable VG1L to work to generate vacuum, meanwhile, the pneumatic diaphragm valves AV6L/AV5L/AV4L/AV2L are opened, AV3L and AV7L are in a closed state, and residual gas in the disk surface pipeline is discharged from the port F through vacuum and can be discharged to a tail gas processor for processing. And closing the AV4 valve and the AV5 valve, then introducing high-purity nitrogen from the port C, introducing the high-purity nitrogen into a second air system by opening pneumatic diaphragm valves AV1N, AV2N and AV7L, enabling the high-purity nitrogen to enter a pressure maintaining process after the pressure reaches a set value and closing the AV1N valve and the AV2N valve after the pressure reaches the set value, then opening the AV5L to enable gas to be discharged through the port F, circulating the program to reach the set value and enter a pressure maintaining process, introducing the high-pressure high-purity nitrogen through the port D, opening the AV1H valve, the AV7L valve and the AV2L valve to enable the gas to enter, enabling the AV3L valve, the AV4L valve and the AV5L valve to be in a closed state, and after the pressure maintaining is finished, opening the AV5L to enable the gas to be discharged. And then entering a post-purging program, keeping the interior of the disk surface pipeline in a negative pressure state by using VG1L after the completion, closing the AV5L valve, and completing the bottle changing, purging and pressure maintaining process, wherein the disk surface is in a standby state and can be switched for use at any time.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions on some technical features, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (10)
1. Full-automatic integrated gas supply system cabinet, including air feed subassembly and flow divider subassembly (3), the air feed subassembly passes through pipe connection, its characterized in that with flow divider subassembly (3): the gas supply assembly comprises a first gas supply path (1) and a second gas supply path (2), the first gas supply path (1) and the second gas supply path (2) are arranged in parallel, and the first valve bank controls the first valve bank to alternately supply gas to the flow divider assembly (3); further comprising:
the gas supply purging assembly (4) is provided with a high-pressure nitrogen inlet D and a low-pressure nitrogen inlet C, a gas outlet of the gas supply purging assembly (4) is connected with a gas inlet of the first gas supply circuit (1) and a gas inlet of the second gas supply circuit (2), and the on-off of the two circuits is independently controlled through a second valve group;
the gas supply purging component II (5) is provided with a nitrogen inlet E and a nitrogen outlet F, the gas supply purging component II (5) is led out of a first branch through a three-way diaphragm valve VG1L, and the first branch is connected with the first gas supply path (1) and the second gas supply path (2);
the first branch is connected with both an air inlet and an air supply port of the first air supply path (1), and the connection and disconnection of the two paths are controlled independently through a third valve group;
the first branch is connected with an air inlet and an air supply port of the second air supply path (2), and the on-off of the two paths is controlled independently through a fourth valve group.
2. The fully automated integrated gas supply system cabinet according to claim 1, wherein: the diverter valve assembly (3) comprises:
each group of air supply paths are provided with an overpressure tripping unit MV2, a pneumatic diaphragm valve AV1A, a mechanical pressure gauge PG2A and an overpressure tripping unit MV5A;
the flow dividing and purging assembly (301) is connected with a plurality of groups of gas supply lines in parallel through first parallel gas paths (303), and the flow dividing and purging assembly (301) is provided with a nitrogen inlet and a nitrogen outlet;
the gas circuit (302) of backward flow, the gas circuit (302) of backward flow all is connected with the parallelly connected air feed way of multiunit through the parallelly connected gas circuit of second (304), the one end of gas circuit (302) of backward flow is connected with the inspection valve TEST.
3. The fully automated integrated gas supply system cabinet of claim 2, wherein: the first air supply path (1) is provided with a first air supply bottle, a pressure sensor PT1R, a pneumatic valve GF1R, a pneumatic diaphragm valve AV2R, a first throttle valve, a pressure relief valve PRV1R, a pressure sensor PT2R, a pneumatic diaphragm valve AV3R, a pneumatic valve GF2R and an overvoltage tripping unit MV8R;
the second air supply circuit (2) is provided with a second air supply bottle, a pressure sensor PT1L, an air-operated valve GF1L, a pneumatic diaphragm valve AV2L, a second throttle valve, a pressure relief valve PRV1L, a pressure sensor PT2L, a pneumatic diaphragm valve AV3L, an air-operated valve GF2L and an overvoltage tripping unit MV8L.
4. The fully automated integrated gas supply system cabinet of claim 1, wherein: a pipeline between a high-pressure nitrogen gas inlet D and a low-pressure nitrogen gas inlet C of the first gas supply sweeping component (4) is sequentially provided with a pneumatic diaphragm valve AV1H, a pneumatic valve GF2H, a pneumatic valve GF1N, a control valve CV1N, a pneumatic diaphragm valve AV2N and a pneumatic diaphragm valve AV1N;
and the air outlet of the air supply purging assembly I (4) is arranged on a pipeline between the pneumatic valve GF2H and the pneumatic valve GF 1N.
5. The fully automated integrated gas supply system cabinet of claim 4, wherein: the gas outlet of the first gas supply purging component (4) is connected with a first gas outlet channel and a second gas outlet channel through a three-way pipe; the second valve group includes:
a control valve CV1L and a pneumatic diaphragm valve AV7L are arranged on the first air outlet path;
and a control valve CV1R and a pneumatic diaphragm valve AV7R are arranged on the second air outlet path.
6. The fully automated integrated gas supply system cabinet of claim 1, wherein: the pipeline between the nitrogen inlet E and the nitrogen outlet F of the air supply sweeping component II (5) is sequentially provided with a pneumatic diaphragm valve AV6L, a control valve CV3L and a three-way diaphragm valve VG1L, one end of a first branch is connected with an interface of the three-way diaphragm valve VG1L, and the first branch is provided with an overpressure tripping unit MV9L and a pressure sensor PT3L.
7. The fully automated integrated gas supply system cabinet according to claim 6, wherein the third valve bank comprises:
the pneumatic diaphragm valve AV4L is arranged on a branch pipeline where the air inlets of the first branch circuit and the first air supply circuit (1) are arranged;
a control valve CV2L and a pneumatic diaphragm valve AV5L are arranged on a branch pipeline where the air outlets of the first branch and the first air supply channel (1) are arranged;
the pneumatic diaphragm valve AV4R is arranged on a branch pipeline where the air inlets of the first branch and the second air supply circuit (2) are arranged;
and the control valve CV2R and the pneumatic diaphragm valve AV5R are arranged on a branch pipeline where the air outlets of the first branch and the second air supply pipeline (2) are arranged.
8. The fully automated integrated gas supply system cabinet according to claim 1, wherein: and an overvoltage tripping unit MV10L is arranged on the first branch.
9. The fully automated integrated gas supply system cabinet according to claim 1, wherein: an air pressure switch is connected to the shell of the system cabinet, an air outlet of the air pressure switch is connected with a fan (6) through a pipeline, and an air outlet of the fan (6) is connected with an absorption tower (7).
10. The fully automated integrated gas supply system cabinet according to claim 1, wherein: a smoke alarm is arranged in the system cabinet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223410206.0U CN218883669U (en) | 2022-12-15 | 2022-12-15 | Full-automatic integrated gas supply system cabinet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223410206.0U CN218883669U (en) | 2022-12-15 | 2022-12-15 | Full-automatic integrated gas supply system cabinet |
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| Publication Number | Publication Date |
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| CN218883669U true CN218883669U (en) | 2023-04-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223410206.0U Active CN218883669U (en) | 2022-12-15 | 2022-12-15 | Full-automatic integrated gas supply system cabinet |
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| Country | Link |
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| CN (1) | CN218883669U (en) |
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- 2022-12-15 CN CN202223410206.0U patent/CN218883669U/en active Active
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