CN218445906U - RPSC power supply test system - Google Patents
RPSC power supply test system Download PDFInfo
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- CN218445906U CN218445906U CN202222479092.9U CN202222479092U CN218445906U CN 218445906 U CN218445906 U CN 218445906U CN 202222479092 U CN202222479092 U CN 202222479092U CN 218445906 U CN218445906 U CN 218445906U
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Abstract
The utility model relates to a RPSC power supply testing system, which comprises a RPSC power supply, a power input end, a gas supply end, a water flow supply end and an air extraction end; the power input end of the RPSC power supply is connected with a power input module; the air supply end of the RPSC power supply is connected with an air supply module; the water flow supply end of the RPSC power supply is connected with a water flow supply module; the air extraction end of the RPSC power supply is connected with an air extraction module.
Description
Technical Field
The utility model relates to a power testing system especially relates to a RPSC power testing system.
Background
The RPSC power source is named as remote plasma source, and is a device for electrolyzing and separating gas, and mainly comprises a gas reaction chamber and a peripheral auxiliary circuit. The RPSC power supply is mainly used for cleaning a semiconductor processing chamber, water for controlling the RPSC power supply can dissipate heat of electronic components, and the entering of air flow can influence the output of power.
In the semiconductor industry, the testing of the RPSC power supply relates to various aspects such as water, electricity and the like, and various problems exist in the testing process of the RPSC power supply, and how to more efficiently and comprehensively solve the various problems becomes a difficult problem of encumbrance of engineers. The main problems existing in the testing of RPSC power supplies are as follows:
1. a large amount of heat is generated in the process of dissociating gas by the RPSC power supply, and how to dissipate heat in time is achieved;
2. how to more conveniently input voltage and update the voltage value in real time;
3. how to control the speed and flow rate of gas inflow.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing a RPSC power supply testing system.
In order to achieve the above purpose, the utility model adopts the following technical proposal:
a RPSC power supply test system comprises a RPSC power supply, wherein the RPSC power supply also comprises a power supply input end, a gas supply end, a water flow supply end and a gas extraction end;
the power input end of the RPSC power supply is connected with a power input module, the power input module comprises an electric box, an alternating current contactor and a liquid crystal display, one end of the alternating current contactor is connected with the electric box, the other end of the alternating current contactor is connected with the power input end of the RPSC power supply, and the liquid crystal display is connected in parallel with two ends of the RPSC power supply;
the gas supply end of the RPSC power supply is connected with a gas supply module, the gas supply module comprises gas supply cylinders, gas supply pneumatic valves and flow meters, the gas supply cylinders are connected with the gas supply end of the RPSC power supply, gas supply valves are connected between the gas supply cylinders and between the RPSC power supply, and the flow meters are connected between the adjacent gas supply valves in series;
the water flow supply end of the RPSC power supply is connected with a water flow supply module, the water flow supply module comprises a drainage pneumatic valve, a water supply pneumatic valve, an ice water machine and a compressed air conveyor, the drainage pneumatic valve is connected with the compressed air conveyor to form a drainage module, the drainage module is connected with the water flow supply end of the RPSC power supply, and the water supply pneumatic valve is connected with the ice water machine to form a water supply module, and the water supply module is connected with the water flow supply end of the RPSC power supply;
the utility model discloses a vacuum pump, including RPSC power, including the end of bleeding, the module of bleeding is connected with the module of bleeding, the module of bleeding is including vacuum pressure gauge, butterfly valve, pneumatic valve and vacuum aspiration pump of bleeding, the one end of vacuum pressure gauge with the end of bleeding of RPSC power links to each other, the other end of vacuum pressure gauge with the butterfly valve links to each other, the other end of butterfly valve has been connected the pneumatic valve of bleeding, the other end of pneumatic valve of bleeding has been connected the vacuum aspiration pump.
Furthermore, two pairs of air supply pneumatic valves are further arranged in the air supply module, and an air supply gas cylinder and a flowmeter are further respectively arranged on the two pairs of air supply gas valves in a matched manner.
Furthermore, a third air supply line is further arranged in the air supply module, the third air supply line is formed by connecting one air supply cylinder and one air supply pneumatic valve, and the third air supply line is connected with the air supply end of the RPSC power supply.
Further, a filter is further arranged in the air supply module, and the filter is connected between the RPSC power supply and the air supply module in series.
Further, an air feeding pneumatic valve is connected in series between the filter and the RPSC power supply.
Furthermore, the water flow supply module further comprises a second water flow supply line, and the two water flow supply lines have the same structure and are respectively connected with the RPSC power supply.
Furthermore, two air-extracting pneumatic valves are arranged in the air-extracting module, and are connected in parallel, and the directions of the air outlets are opposite.
Compared with the prior art, the beneficial effects of the utility model are that:
1. according to the invention, the water chiller is arranged outside the RPSC power supply, the water supply pneumatic valve is arranged between the water chiller and the RPSC power supply, and the water supply pneumatic valve corresponding to the water chiller is opened, so that ice water can enter the RPSC power supply to dissipate heat of the RPSC power supply;
2. according to the invention, the alternating current contactor is additionally arranged between the RPSC power supply and the electric box, and the voltage of the alternating current contactor can be input into the RPSC power supply by pressing down, so that the method is more convenient and faster compared with the prior input voltage;
the two ends of the RPSC power supply are also connected with a liquid crystal display in parallel, and when the power supply is successful, the liquid crystal display can update the current voltage value in real time;
4. the gas supply module is provided with the flowmeter and the gas supply pneumatic valve, the flowmeter can monitor the flow condition of gas in real time, the gas supply pneumatic valve is convenient to control whether to supply gas flow or not, the gas supply pneumatic valve can be opened to supply compressed air, and the gas supply pneumatic valve can be appropriately screwed or unscrewed if the numerical value displayed by the flowmeter is too large or too small.
Drawings
Fig. 1 is a structural diagram of the present invention.
In the figure: 1. air feeding pneumatic valve, 2, flowmeter, 3, filter, 4, AC contactor, 5, LCD, 6, vacuum pressure gauge, 7, butterfly valve, 8, RPSC power supply, 9, water discharging pneumatic valve, 10, water supplying pneumatic valve, 11, air pumping pneumatic valve, 12, electric box, 13, air feeding gas bottle, 14, water icing machine, 15, compressed air conveyer, 16, vacuum air pump.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
As shown in fig. 1.
A kind of RPSC power 8 test system, including RPSC power 8, RPSC power 8 also includes the power input end, air feed end, rivers supply end and air exhaust end; the power input end of the RPSC power supply 8 is connected with a power input module, the power input module comprises an electric box 12, an alternating current contactor 4 and a liquid crystal display 5, one end of the alternating current contactor 4 is connected with the electric box 12, the other end of the alternating current contactor 4 is connected with the power input end of the RPSC power supply 8, and the liquid crystal display 5 is connected with two ends of the RPSC power supply 8 in parallel; the gas supply end of the RPSC power supply 8 is connected with a gas supply module, the gas supply module comprises gas supply cylinders 13, gas supply pneumatic valves 1 and flow meters 2, the gas supply cylinders 13 are connected with the gas supply end of the RPSC power supply 8, gas supply valves are connected between the gas supply cylinders 13 and between the RPSC power supply 8, and the flow meters 2 are connected in series between adjacent gas supply valves; the water flow supply end of the RPSC power supply 8 is connected with a water flow supply module, the water flow supply module comprises a drainage pneumatic valve 9, a water supply pneumatic valve 10, an ice water machine 14 and a compressed air conveyor 15, the drainage pneumatic valve 9 is connected with the compressed air conveyor 15 to form a drainage module, the drainage module is connected with the water flow supply end of the RPSC power supply 8, and the water supply pneumatic valve 10 is connected with the ice water machine 14 to form a water supply module, and the water supply module is connected with the water flow supply end of the RPSC power supply 8; the end of bleeding of RPSC power 8 is connected with the module of bleeding, the module of bleeding is including vacuum pressure gauge 6, butterfly valve 7, pneumatic valve 11 and vacuum aspiration pump 16 bleed, the one end of vacuum pressure gauge 6 links to each other with the end of bleeding of RPSC power 8, the other end of vacuum pressure gauge 6 links to each other with butterfly valve 7, pneumatic valve 11 bleeds has been connected to the other end of butterfly valve 7, pneumatic valve 11's the other end of bleeding has connected vacuum aspiration pump 16.
Further, two pairs of air supply pneumatic valves 1 are further arranged in the air supply module, and air supply gas cylinders 13 and flow meters 2 are further respectively arranged in the two pairs of air supply gas valves in a matched manner, so that two mutually independent air supply lines are formed, the reliability of air supply is guaranteed, and the reliability of air supply quantity is also guaranteed.
Furthermore, a third air supply line is arranged in the air supply module, the third air supply line is formed by connecting an air supply air bottle 13 and an air supply pneumatic valve 1, the third air supply line is connected with the air supply end of the RPSC power supply 8, the third air supply line is a standby air supply line, and the third air supply line is independent of the previous two air supply lines, so that the reliability of air supply is further ensured.
Further, the air supply module is also provided with a filter 3, the filter 3 is connected between the RPSC power supply 8 and the air supply module in series, and the filter 3 is arranged between the air supply module and the RPSC power supply 8, so that impurities in the compressed air can be filtered, and the compressed air entering the RPSC power supply 8 is ensured to be clean air.
Further, a gas-feeding air-operated valve 1 is connected in series between the filter 3 and the RPSC power supply 8, and this gas-feeding air-operated valve 1 further ensures that no gas flows into the RPSC power supply 8 when no gas is required by the RPSC power supply 8.
Furthermore, the water flow supply module also comprises a second water flow supply line, the two water flow supply lines have the same structure and are respectively connected with the RPSC power supply 8, the two water flow supply lines are mutually independent, water can be supplied simultaneously and can be pumped simultaneously, on one hand, the cooling effect can be improved, on the other hand, the water flow supply module can be mutually used as a standby, and when one of the water flow supply lines is damaged, the other water flow supply line can be used.
Further, be provided with two pneumatic valves 11 of bleeding in the module of bleeding, two pneumatic valves 11 of bleeding are parallelly connected each other and the opposite direction of gas outlet, and the opposite direction of gas outlet can disperse the air current of effluvium when bleeding, reduces the pressure of aspiration pump and other parts, and the air current opposite direction and tolerance of two simultaneously giving vent to anger are equivalent, can offset each other, and is mutually balanced, also has not little effect to the stability of the circuit of bleeding.
Further, the water chiller 14 is arranged outside the RPSC power supply 8, the water supply pneumatic valve 10 is arranged between the water chiller 14 and the RPSC power supply 8, and when the water supply pneumatic valve 10 corresponding to the water chiller 14 is opened, ice water can enter the RPSC power supply 8 to dissipate heat of the RPSC power supply 8.
Furthermore, the alternating current contactor 4 is additionally arranged between the RPSC power supply 8 and the electric box 12, and the voltage of the alternating current contactor 4 can be input into the RPSC power supply 8 by pressing down, so that the method is more convenient and quicker compared with the prior input voltage;
furthermore, two ends of the RPSC power supply 8 are connected with a liquid crystal display in parallel, and when power supply is successful, the liquid crystal display can update the current voltage value in real time;
furthermore, the gas supply module is provided with the flowmeter 2 and the gas supply pneumatic valve 1, the flowmeter 2 can monitor the flow condition of gas in real time, the gas supply pneumatic valve 1 is convenient to control whether to supply gas flow, the gas supply pneumatic valve 1 can be opened to convey compressed air, and if the numerical value displayed by the flowmeter 2 is too large or too small, the gas supply pneumatic valve can be appropriately screwed or unscrewed.
Further, the utility model provides an air feed pneumatic valve 1, drainage pneumatic valve 9, water supply pneumatic valve 10 and the pneumatic valve 11 of bleeding are the pneumatic valve, and for the convenience of description in the here, distinguish it according to the effect of difference, and the pneumatic valve in the here is the common pneumatic valve on the market, and the technical staff can select different kinds of pneumatic valves according to actual demand when specifically implementing, belongs to prior art, and the model and the structure about the pneumatic valve are not repeated here.
When in use:
s1: connecting an electric box 12, opening an alternating current contactor 4, transmitting 208V alternating current to the alternating current contactor 4 by the electric box 12, transmitting the alternating current to an RPSC power supply 8 by the alternating current contactor 4, and successfully supplying voltage to the RPSC power supply 8 for testing; when the 208V ac power is successfully supplied, the lcd 5 will update the current voltage value in real time.
S2: the gas bottle is opened, the gas feeding pneumatic valve 1 is opened in sequence, the gas flows through the flowmeter 2 to display the gas flow, impurities are filtered through the filter 3, the gas is introduced into the RPSC power supply 8, and the RPSC power supply 8 starts to electrolyze the gas.
S3: the water chiller 14 is turned on, the water supply pneumatic valve 10 is turned on, and water is introduced into the RPSC power supply 8 for heat dissipation.
S4: after the RPSC power supply 8 is operated, the compressed air conveyor 15 is opened, the water discharge pneumatic valve 9 is opened, compressed air is gushed into the cooling channel, cooling water in the channel is extruded out of the cooling channel, and therefore the water is discharged out of the RPSC power supply 8.
S5: and (3) opening the vacuum air pump 16, then opening the air exhaust pneumatic valve 11, then opening the butterfly valve 7, communicating the RPSC power supply 8 with the vacuum air pump 16, after several seconds, closing the vacuum air pump 16, the air exhaust pneumatic valve 11 and the butterfly valve 7 in sequence until the vacuum pressure gauge 6 displays a numerical value of 0, and thus completely exhausting the air in the RPSC power supply 8.
In the description herein, references to the description of the terms "one embodiment," "certain embodiments," "an illustrative embodiment," "an example," "a specific example" or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, so that the scope of the present invention shall be determined by the scope of the appended claims.
Claims (7)
1. An RPSC power supply test system is characterized in that: the RPSC power supply also comprises a power supply input end, an air supply end, a water flow supply end and an air extraction end;
the power input end of the RPSC power supply is connected with a power input module, the power input module comprises an electric box, an alternating current contactor and a liquid crystal display, one end of the alternating current contactor is connected with the electric box, the other end of the alternating current contactor is connected with the power input end of the RPSC power supply, and the liquid crystal display is connected in parallel with two ends of the RPSC power supply;
the RPSC power supply is characterized in that the gas supply end of the RPSC power supply is connected with a gas supply module, the gas supply module comprises gas supply cylinders, gas supply pneumatic valves and flow meters, the gas supply cylinders are connected with the gas supply end of the RPSC power supply, gas supply valves are also connected between the gas supply cylinders and between the RPSC power supplies, and the flow meters are also connected between the adjacent gas supply valves in series;
the water flow supply end of the RPSC power supply is connected with a water flow supply module, the water flow supply module comprises a drainage pneumatic valve, a water supply pneumatic valve, an ice water machine and a compressed air conveyor, the drainage pneumatic valve is connected with the compressed air conveyor to form a drainage module, the drainage module is connected with the water flow supply end of the RPSC power supply, and the water supply pneumatic valve is connected with the ice water machine to form a water supply module, and the water supply module is connected with the water flow supply end of the RPSC power supply;
the utility model discloses a vacuum pump, including RPSC power, including the end of bleeding, the module of bleeding is connected with the module of bleeding, the module of bleeding is including vacuum pressure gauge, butterfly valve, pneumatic valve and vacuum aspiration pump of bleeding, the one end of vacuum pressure gauge with the end of bleeding of RPSC power links to each other, the other end of vacuum pressure gauge with the butterfly valve links to each other, the other end of butterfly valve has been connected the pneumatic valve of bleeding, the other end of pneumatic valve of bleeding has been connected the vacuum aspiration pump.
2. The RPSC power supply test system according to claim 1, wherein: and the gas supply module is also internally provided with two pairs of gas supply pneumatic valves, and the two pairs of gas supply pneumatic valves are also respectively provided with a gas supply cylinder and a flowmeter in a matched manner.
3. The RPSC power supply test system according to claim 2, wherein: and a third air supply line is also arranged in the air supply module, the third air supply line is formed by connecting one air supply cylinder and one air supply pneumatic valve, and the third air supply line is connected with the air supply end of the RPSC power supply.
4. The RPSC power supply test system according to claim 3, wherein: the gas supply module is also provided with a filter, and the filter is connected in series between the RPSC power supply and the gas supply module.
5. The RPSC power supply testing system according to claim 4, wherein: an air feeding pneumatic valve is also connected in series between the filter and the RPSC power supply.
6. The RPSC power supply test system according to claim 1, wherein: the water flow supply module also comprises a second water flow supply line, and the two water flow supply lines have the same structure and are respectively connected with the RPSC power supply.
7. The RPSC power supply test system according to claim 1, wherein: two air-extracting pneumatic valves are arranged in the air-extracting module, and are connected in parallel, and the directions of the air outlets are opposite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222479092.9U CN218445906U (en) | 2022-09-19 | 2022-09-19 | RPSC power supply test system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222479092.9U CN218445906U (en) | 2022-09-19 | 2022-09-19 | RPSC power supply test system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218445906U true CN218445906U (en) | 2023-02-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222479092.9U Active CN218445906U (en) | 2022-09-19 | 2022-09-19 | RPSC power supply test system |
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| Country | Link |
|---|---|
| CN (1) | CN218445906U (en) |
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- 2022-09-19 CN CN202222479092.9U patent/CN218445906U/en active Active
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