CN206688549U - Chemical liquid feed system - Google Patents
Chemical liquid feed system Download PDFInfo
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- CN206688549U CN206688549U CN201720203169.6U CN201720203169U CN206688549U CN 206688549 U CN206688549 U CN 206688549U CN 201720203169 U CN201720203169 U CN 201720203169U CN 206688549 U CN206688549 U CN 206688549U
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- 239000007788 liquid Substances 0.000 title claims abstract description 313
- 239000000126 substance Substances 0.000 title claims abstract description 30
- 239000003814 drug Substances 0.000 claims abstract description 75
- 230000007246 mechanism Effects 0.000 claims abstract description 19
- 239000000203 mixture Substances 0.000 claims description 15
- 238000012544 monitoring process Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 description 10
- 239000000284 extract Substances 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000001802 infusion Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 230000001960 triggered effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005213 imbibition Methods 0.000 description 1
- 239000010808 liquid waste Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Abstract
The utility model provides a kind of chemical liquid feed system, including：Decoction mixing channel connects the decoction feed mechanism of decoction mixing channel with least two-way；The decoction feed mechanism includes original liquid box, liquid suction pipe, stoste transfer pipeline, delivery pump, flowmeter, temporary tank, stoste outlet pipeline；Liquid suction pipe, one end connection stoste transfer pipeline one end of liquid suction pipe, the other end connection temporary tank of stoste transfer pipeline are provided with original liquid box；Delivery pump and flowmeter are arranged on stoste transfer pipeline；Temporary tank is provided with the metering unit for being used for measuring temporary tank Chinese medicine liquid measure；Temporary trench bottom connects decoction mixing channel by stoste outlet pipeline；The stoste outlet pipeline of temporary tank is provided with valve；The utility model can not only avoid the suction air during decoction is conveyed from causing decoction mixed proportion inaccurate, and can improve decoction utilization rate, so as to reduce cost.
Description
Technical field
Technical field of semiconductors is the utility model is related to, especially a kind of chemical liquid feed system.
Background technology
Semicon industry needs to use many chemical solutions, belongs to the solution of strong acid, highly basic or severe corrosive mostly.Go out
In safety and the demand of production, conveyed again after the conveying or mixing of decoction are often carried out using liquid-supplying system.The medicine especially used
It is sent into mixed liquor accumulator tank, it is necessary to which multiple-medicinal-liquid is extracted from medicinal liquor barrel or liquid storing barrel etc. when liquid is mixed solution
Row decoction mixes.But when liquid level is relatively low in medicinal liquor barrel, each road decoction is possible to that sky can be sucked during decoction is extracted
Gas so that mixed liquid result is inaccurate, so as to cause production technology to malfunction.Sometimes for the relatively low suction air of liquid level is prevented, often
Just need to change new medicinal liquor barrel when liquid level is higher, cause the waste of decoction, increase cost.
A kind of our company previous chemical liquid feed system is as shown in figure 1, original liquid box 11, medical liquid B including decoction A
Original liquid box 21, decoction mixing channel 31；
The decoction A nearly bottom of original liquid box 11 in the side of original liquid box 11 is provided with original liquid box liquid level sensor 10, is provided with original liquid box 11
Liquid suction pipe 12, upper end connection stoste transfer pipeline one end of liquid suction pipe 12, the other end connection delivery pump 14 of stoste transfer pipeline,
Flowmeter 13 is arranged on stoste transfer pipeline；Delivery pump 14 connects decoction mixing channel 31 by stoste outlet pipeline 15；In medicine
The side of liquid mixing channel 31 is equipped with least two mixing channel liquid level sensors 30, respectively close at the top and bottom of decoction mixing channel, is used for
The high level and low liquid level of decoction mixing channel 31 are monitored respectively；Similarly, the side of original liquid box 21 of medical liquid B is close to the bottom of original liquid box 21
Provided with original liquid box liquid level sensor 20, liquid suction pipe 22, the upper end connection stoste transfer pipeline of liquid suction pipe 22 are provided with original liquid box 21
One end, the other end connection delivery pump 24 of stoste transfer pipeline, flowmeter 23 are arranged on stoste transfer pipeline；Delivery pump 24 is logical
Cross stoste outlet pipeline 25 and connect decoction mixing channel 31；
The bottom of decoction mixing channel 31 or a side lower part connect circulating pump 33 by decoction suction line 32, and circulating pump 33 connects
Connect the first end of three-way valve 36, the second end of three-way valve 36 by circulation line 34 connect decoction mixing channel 31 top or
One upper lateral part；The mixture export pipeline 35 of the three-terminal link decoction mixing channel 31 of three-way valve 34；
The course of work of above-mentioned chemical liquid feed system is as follows：Original liquid box liquid level sensor can monitor liquid level in original liquid box
Too low, original liquid box herb liquid liquid level triggers low liquid level warning when too low；
Set decoction A and medical liquid B each drawing liquid amount in required ratio, then since the decoction of each original liquid box drawing liquid,
Each road decoction is squeezed into decoction mixing channel and mixed；When certain flowmeter all the way detects that amount of liquid medicine needed for the road has met
It is required that Ze Gai roads stop drawing liquid；When two-way amount of liquid medicine all meet demands, the delivery pump on two-way decoction pipeline all stops work
Make；Then the circulating pump 33 of decoction mixing channel is started working, and allows decoction fully to be mixed in decoction mixes liquid bath by circulation line 34
Close；Main engine bed is then connected to by the mixture export pipeline 35 of decoction mixing channel 31 after decoction is sufficiently mixed, during technique and carries out work
Make；The side of decoction mixing channel 31 is equipped with mixing channel liquid level sensor 30, when decoction mixing channel liquid level is too low, then triggers low liquid level report
It is alert, it is desirable to fluid infusion；When decoction mixing channel liquid level is too high, then high liquid level warning is triggered, two-way decoction stops feed liquor.
The liquid suction pipe of each original liquid box can typically use bellows, because with hard tube, then it is very not square change original liquid box
Just, when especially storing the narrow space of original liquid box.And when using the flexible pipe of bellows etc, then can when changing liquid incite somebody to action
Liquid suction pipe takes out, and then changes original liquid box again.But then there are problems that using bellows, such as the intake line of bellows
The bottommost of original liquid box has not necessarily been inserted into, or even has bent to ullage region, it is empty suction part may in imbibition
Gas, and flowmeter can not detect in the decoction of conveying whether air can be carried；Or it is that certain decoction institute expense surpasses
When crossing the medicine liquid volume of an original liquid box, then the suction of air is also resulted in during new medicinal liquor barrel is changed.Therefore it is final
Solution mixed proportion will have deviation, cause technique to malfunction.
The content of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, there is provided a kind of chemical liquid supply system
System, and the chemical liquid supply method implemented by the chemical liquid feed system；It can not only avoid in conveying decoction
During suction air cause decoction mixed proportion inaccurate, and decoction utilization rate can be improved, so as to reduce cost.This reality
Technical scheme with new use is：
A kind of chemical liquid feed system, including：The decoction that decoction mixing channel connects decoction mixing channel with least two-way supplies
To mechanism；
The decoction feed mechanism include original liquid box, liquid suction pipe, stoste transfer pipeline, delivery pump, flowmeter, temporary tank,
Stoste outlet pipeline；
Be provided with liquid suction pipe in original liquid box, one end connection stoste transfer pipeline one end of liquid suction pipe, stoste transfer pipeline it is another
One end connects temporary tank；Delivery pump and flowmeter are arranged on stoste transfer pipeline；Temporary tank, which is provided with, to be used to measure temporary tank
The metering unit of Chinese medicine liquid measure；Temporary trench bottom connects decoction mixing channel by stoste outlet pipeline；The stoste outlet of temporary tank
Pipeline is provided with valve；
The bottom of decoction mixing channel or a side lower part connect circulating pump, circulating pump connection triple valve by decoction suction line
The first end of door, the second end of three-way valve connect top or the upper lateral part of decoction mixing channel by circulation line；Triple valve
The mixture export pipeline of the three-terminal link decoction mixing channel of door.
Further, at the top of the other end connection temporary tank of stoste transfer pipeline.
Further, it is provided with air intlet at the top of temporary tank.
Further, the cross section of temporary tank lower part is less than the cross section of upper part.
A kind of chemical liquid supply method, implemented by a kind of chemical liquid feed system,
The chemical liquid feed system includes the decoction supply that decoction mixing channel connects decoction mixing channel with least two-way
Mechanism；
The decoction feed mechanism include original liquid box, liquid suction pipe, stoste transfer pipeline, delivery pump, flowmeter, temporary tank,
Stoste outlet pipeline；
Be provided with liquid suction pipe in original liquid box, upper end connection stoste transfer pipeline one end of liquid suction pipe, stoste transfer pipeline it is another
At the top of one end connection temporary tank；Delivery pump and flowmeter are arranged on stoste transfer pipeline；Temporary tank, which is provided with, to be used to measure temporarily
Deposit the metering unit of groove Chinese medicine liquid measure；Temporary trench bottom connects decoction mixing channel by stoste outlet pipeline；Set at the top of temporary tank
There is air intlet；The stoste outlet pipeline of temporary tank is provided with valve；
The bottom of decoction mixing channel or a side lower part connect circulating pump, circulating pump connection triple valve by decoction suction line
The first end of door, the second end of three-way valve connect top or the upper lateral part of decoction mixing channel by circulation line；Triple valve
The mixture export pipeline of the three-terminal link decoction mixing channel of door；
The drawing liquid amount of each decoction is set according to required ratio, then starts to carry out drawing liquid from each original liquid box, decoction extracts
Using equivalent principle, it is necessary to how much take out how many；In each road decoction feed mechanism first by the decoction extracted squeeze into it is respective temporarily
Deposit in groove；When certain flowmeter all the way detects that amount of liquid medicine needed for the road has met to require, Ze Gai roads stop drawing liquid；When each road
When the amount of liquid medicine of extraction all meets to require, the delivery pump on each stoste transfer pipeline is all stopped；Then each temporary tank is to pump
The amount of liquid medicine entered is detected, if the amount of liquid medicine and required amount of liquid medicine in discovery temporary tank have deviation, provides alarm, it is desirable to
Continue to extract decoction from original liquid box to temporary tank up to the temporary tank Chinese medicine liquid measure is equal to required amount of liquid medicine；Then stoste is opened
Valve on export pipeline, compressed air is passed through by the air intlet at the top of each temporary tank, compressed air is to temporary tank Chinese medicine
The conveying of liquid forms a normal pressure, and the decoction in each temporary tank is all sent into decoction mixing channel；
After the decoction of each road temporary tank is all sent into decoction mixing channel, circulating pump is started working, and allows decoction to pass through circulation
Pipeline is circulated, and is sufficiently mixed in decoction mixing channel, and the decoction after being sufficiently mixed is sent out by mixture export pipeline.
The utility model also provides to supply with the similar another chemical liquid of the first chemical liquid feed system
System, including：Decoction mixing channel connects the decoction feed mechanism of decoction mixing channel with least two-way；
The decoction feed mechanism include original liquid box, liquid suction pipe, stoste transfer pipeline, the first delivery pump, first flowmeter,
Temporary tank, stoste outlet pipeline, the second delivery pump, second flowmeter；
Be provided with liquid suction pipe in original liquid box, one end connection stoste transfer pipeline one end of liquid suction pipe, stoste transfer pipeline it is another
One end connects temporary tank；First delivery pump and first flowmeter are arranged on stoste transfer pipeline；Temporary tank is provided with based on
Measure the metering unit of temporary tank Chinese medicine liquid measure；Temporary trench bottom connects decoction mixing channel by stoste outlet pipeline；Second conveying
Pump and second flowmeter are arranged on stoste outlet pipeline；
The bottom of decoction mixing channel or a side lower part connect circulating pump, circulating pump connection triple valve by decoction suction line
The first end of door, the second end of three-way valve connect top or the upper lateral part of decoction mixing channel by circulation line；Triple valve
The mixture export pipeline of the three-terminal link decoction mixing channel of door.
Further, at the top of the other end connection temporary tank of stoste transfer pipeline.
Further, at least two mixing channel liquid level sensors are housed by decoction mixing channel, mixed respectively close to decoction
At the top and bottom of groove, for monitoring the high level and low liquid level of decoction mixing channel respectively.
Further, the cross section of temporary tank lower part is less than the cross section of upper part.
A kind of chemical liquid supply method, implemented by another chemical liquid feed system provided by the utility model,
The chemical liquid feed system includes：Decoction mixing channel connects the decoction supply of decoction mixing channel with least two-way
Mechanism；
The decoction feed mechanism include original liquid box, liquid suction pipe, stoste transfer pipeline, the first delivery pump, first flowmeter,
Temporary tank, stoste outlet pipeline, the second delivery pump, second flowmeter；
Be provided with liquid suction pipe in original liquid box, one end connection stoste transfer pipeline one end of liquid suction pipe, stoste transfer pipeline it is another
At the top of one end connection temporary tank；First delivery pump and first flowmeter are arranged on stoste transfer pipeline；Temporary tank, which is provided with, to be used
In the metering unit of metering temporary tank Chinese medicine liquid measure；Temporary trench bottom connects decoction mixing channel by stoste outlet pipeline；Second
Delivery pump and second flowmeter are arranged on stoste outlet pipeline；
The bottom of decoction mixing channel or a side lower part connect circulating pump, circulating pump connection triple valve by decoction suction line
The first end of door, the second end of three-way valve connect top or the upper lateral part of decoction mixing channel by circulation line；Triple valve
The mixture export pipeline of the three-terminal link decoction mixing channel of door；
The drawing liquid amount of each decoction is set according to required ratio, is then started by the first delivery pump from each decoction original liquid box
Drawing liquid is carried out, decoction extracts and takes volume principle, i.e., the amount of liquid medicine extracted out from original liquid box is more than actually required amount of liquid medicine,
The decoction extracted in each road decoction feed mechanism from original liquid box is squeezed into temporary tank；When certain first flowmeter all the way detects this
The amount of liquid medicine that road is extracted from original liquid box has met that requirement i.e. first flowmeter detects the amount of liquid medicine of extraction than actually required medicine
Liquid measure is more, and Ze Gai roads stop drawing liquid；When the first flowmeter on each road detects that the amount of liquid medicine of extraction is satisfied by requiring, each stoste
The first delivery pump on transfer pipeline is all stopped；
Then the amount of liquid medicine in each temporary tank is detected, detects each temporary tank Chinese medicine liquid measure institute whether actual than mixed liquid
The amount of liquid medicine needed is more, if amount of liquid medicine is inadequate, continues through the first delivery pump from original liquid box drawing liquid to temporary tank, until each temporary
The groove Chinese medicine liquid measure amount of liquid medicine more actually required than mixed liquid is more；
Then respective drawing liquid amount of each decoction from temporary tank is set according to ratio needed for actual mixed liquid, it is then defeated by second
Pump is sent to start to carry out drawing liquid from each temporary tank；
After required amount of liquid medicine is squeezed into decoction mixing channel by the metering of each second flowmeter from each temporary tank, circulation
Pump is started working, and is allowed decoction to be circulated by circulation line, is sufficiently mixed in decoction mixing channel, the decoction after being sufficiently mixed
Sent out by mixture export pipeline.
The utility model has the advantage of：
1）It can avoid sucking air during decoction is extracted so that mixed liquid result is very accurate.
2）, can be as much as possible in original liquid box decoction when can facilitate the original liquid box that more renewed, and change original liquid box
Use up, changed when liquid level is relatively low soon, avoid liquid waste.
Brief description of the drawings
Fig. 1 is the structure composition schematic diagram of existing chemical liquid feed system.
Fig. 2 is the structural representation of embodiment one of the present utility model.
Fig. 3 is the structural representation of embodiment two of the present utility model.
Fig. 4 is the first temporary tank schematic diagram of the present utility model.
Fig. 5 is second of temporary tank schematic diagram of the present utility model.
Embodiment
With reference to specific drawings and examples, the utility model is described in further detail.
Embodiment one, as shown in Fig. 2
Chemical liquid feed system, including the original liquid box 201 of decoction A original liquid box 101, medical liquid B, decoction mixing channel 301；
The decoction A nearly bottom of original liquid box 101 in the side of original liquid box 101 is provided with original liquid box liquid level sensor 100, in original liquid box 101
Provided with liquid suction pipe 102, upper end connection stoste transfer pipeline one end of liquid suction pipe 102, the other end connection medicine of stoste transfer pipeline
Liquid A temporary tank 105, it is preferably connected to the top of temporary tank 105；Delivery pump 103 and flowmeter 104 are arranged on stoste transfer pipeline
On；In temporary tank 105 or side is provided with temporary tank liquid level sensor 106, for measuring the amount of liquid medicine in temporary tank, keeps in tank liquor
Level sensor 106 must use high-precision liquid level sensor, such as precision 1ml；In order to measure the amount of liquid medicine in temporary tank, also
Electronic weigher can be used, temporary tank 105 and temporary tank inner liquid medicine are calculated the weight, subtract the weight of temporary tank, i.e.,
Temporary tank inner liquid medicine weight is can obtain, then is converted into amount of liquid medicine（Volume）；The bottom of temporary tank 105 is connected by stoste outlet pipeline
Decoction mixing channel 301；Valve, such as electric control valve are additionally provided with the stoste outlet pipeline of temporary tank 105, is not drawn into figure；On
State structure and form the decoction feed mechanism for connecting decoction mixing channel all the way；Similarly,
The nearly bottom of original liquid box 201 in the side of original liquid box 201 of medical liquid B is provided with original liquid box liquid level sensor 200, in original liquid box 201
Provided with liquid suction pipe 202, upper end connection stoste transfer pipeline one end of liquid suction pipe 202, the other end connection medicine of stoste transfer pipeline
Liquid B temporary tank 205, it is preferably connected to the top of temporary tank 205；Delivery pump 203 and flowmeter 204 are arranged on stoste transfer pipeline
On；In temporary tank 205 or side is provided with temporary tank liquid level sensor 206, for measuring the amount of liquid medicine in temporary tank；Temporary tank
205 bottoms connect decoction mixing channel 301 by stoste outlet pipeline；Valve is additionally provided with the stoste outlet pipeline of temporary tank 205；
In addition air intlet 107,207 is further respectively had at the top of temporary tank 105,205；Air intlet can be by one section of connection
Compressed air inlet pipe at the top of temporary tank provides；
Liquid suction pipe 102,202 can use bellows or other flexible pipes；Delivery pump is used for drawing liquid, the measurable process of flowmeter
Amount of liquid medicine；
Fig. 4, Fig. 5 show two kinds of structures of temporary tank, and the cross section of its underpart is less than the cross section of upper part, so as to
Be advantageous to decoction to flow to temporary tank outlet at bottom direction；
At least two mixing channel liquid level sensors 300 are housed on the side of decoction mixing channel 301, groove top is mixed respectively close to decoction
Portion and bottom, for monitoring the high level and low liquid level of decoction mixing channel 301 respectively；The bottom or side of decoction mixing channel 301
Bottom connects circulating pump 303 by decoction suction line 302, and circulating pump 303 connects the first end of three-way valve 306, triple valve
Second end of door 306 connects top or a upper lateral part for decoction mixing channel 301 by circulation line 304；The of three-way valve 304
The mixture export pipeline 305 of three-terminal link decoction mixing channel 301；
For Fig. 2, specific implementation process of the present utility model is as follows：The each of decoction A and medical liquid B is set according to required ratio
From drawing liquid amount, then start to carry out drawing liquid from each original liquid box（Drawing liquid is carried out especially by delivery pump）；Decoction extracts use etc.
Principle is measured, that is, needs how much to take out how many；The decoction extracted is first squeezed into respective temporary tank in each road decoction feed mechanism
In；When certain flowmeter all the way detects that amount of liquid medicine needed for the road has met to require, Ze Gai roads stop drawing liquid；When two-way extracts
Amount of liquid medicine when all meeting to require, the delivery pump on two-way stoste transfer pipeline is stopped；Then each temporary tank is to being pumped into
Amount of liquid medicine is detected, if the amount of liquid medicine and required amount of liquid medicine in discovery temporary tank have deviation, provides alarm, it is desirable to continue
Decoction is extracted from original liquid box to temporary tank up to the temporary tank Chinese medicine liquid measure is equal to required amount of liquid medicine；Then stoste outlet is opened
Valve on pipeline, compressed air is passed through by the air intlet at the top of each temporary tank, compressed air is to temporary tank herb liquid
Conveying forms a normal pressure, and the decoction in each temporary tank is all sent into decoction mixing channel；Additionally, due to temporary tank bottom
The cross section divided is smaller than upper part, and liquid can all flow to the position of temporary trench bottom medicine liquid outlet, avoid liquor residue temporary
Deposit trench bottom and can not flow into decoction mixing channel；
After the decoction of two-way temporary tank is all sent into decoction mixing channel, circulating pump is started working, and allows decoction to pass through circulation
Pipeline circulates, and is sufficiently mixed in decoction mixing channel, then passes through mixture export pipeline after decoction is sufficiently mixed, during technique
Main engine bed is connected to be operated；At least two mixing channel liquid level sensors are housed by decoction mixing channel, mixed respectively close to decoction
Close at the top and bottom of groove, when mixed decoction conjunction tank liquor position is too low, then trigger low liquid level warning, it is desirable to fluid infusion；When decoction mixing channel
When liquid level is too high, high liquid level warning can be triggered, two-way temporary tank then stops to decoction mixing channel feed liquor.
It should be noted that the implication of the utility model bracket groove is the implication of container, temporary tank, decoction mixing channel are only
The Essential Terms of this area, do not limit the concrete shape of temporary tank and decoction mixing channel；
Embodiment two, as shown in figure 3,
Chemical liquid feed system, including the original liquid box 201 of decoction A original liquid box 101, medical liquid B, decoction mixing channel 301；
The decoction A nearly bottom of original liquid box 101 in the side of original liquid box 101 is provided with original liquid box liquid level sensor 100, in original liquid box 101
Provided with liquid suction pipe 102, upper end connection stoste transfer pipeline one end of liquid suction pipe 102, the other end connection medicine of stoste transfer pipeline
Liquid A temporary tank 105, it is preferably connected to the top of temporary tank 105；First delivery pump 103 and first flowmeter 104 are arranged on stoste
On transfer pipeline；In temporary tank 105 or side is provided with temporary tank liquid level sensor 106, for measuring the amount of liquid medicine in temporary tank,
Temporary tank liquid level sensor 106 must use high-precision liquid level sensor, such as precision 1ml；In order to measure in temporary tank
Amount of liquid medicine, electronic weigher can also be used, temporary tank 105 and temporary tank inner liquid medicine are calculated the weight, subtract temporary tank
Weight, you can obtain temporary tank inner liquid medicine weight, then be converted into amount of liquid medicine（Volume）；The bottom of temporary tank 105 is gone out by stoste
Mouth pipeline connection decoction mixing channel 301；Second delivery pump 108 and second flowmeter 109 are arranged on stoste outlet pipeline；It is above-mentioned
Structure forms the decoction feed mechanism for connecting decoction mixing channel all the way；Similarly,
The nearly bottom of original liquid box 201 in the side of original liquid box 201 of medical liquid B is provided with original liquid box liquid level sensor 200, in original liquid box 201
Provided with liquid suction pipe 202, upper end connection stoste transfer pipeline one end of liquid suction pipe 202, the other end connection medicine of stoste transfer pipeline
Liquid B temporary tank 205, it is preferably connected to the top of temporary tank 205；First delivery pump 203 and first flowmeter 204 are arranged on stoste
On transfer pipeline；In temporary tank 205 or side is provided with temporary tank liquid level sensor 206, for measuring the amount of liquid medicine in temporary tank,
Temporary tank liquid level sensor 206 must use high-precision liquid level sensor, such as precision 1ml；The bottom of temporary tank 205 passes through original
Liquid export pipeline connection decoction mixing channel 301；Second delivery pump 208 and second flowmeter 209 are arranged on stoste outlet pipeline；
Liquid suction pipe 102,202 can use bellows or other flexible pipes；Each delivery pump is used for drawing liquid, each measurable warp of flowmeter
The amount of liquid medicine crossed；Second delivery pump 108,208 can block stoste outlet pipeline when closing；
Fig. 4 show two kinds of structures of temporary tank, and the cross section of its underpart is less than the cross section of upper part, so as to favourable
Flowed in decoction to temporary tank outlet at bottom direction；
At least two mixing channel liquid level sensors 300 are housed on the side of decoction mixing channel 301, groove top is mixed respectively close to decoction
Portion and bottom, for monitoring the high level and low liquid level of decoction mixing channel 301 respectively；The bottom or side of decoction mixing channel 301
Bottom connects circulating pump 303 by decoction suction line 302, and circulating pump 303 connects the first end of three-way valve 306, triple valve
Second end of door 306 connects top or a upper lateral part for decoction mixing channel 301 by circulation line 304；The of three-way valve 304
The mixture export pipeline 305 of three-terminal link decoction mixing channel 301；
For Fig. 3, specific implementation process of the present utility model is as follows：The each of decoction A and medical liquid B is set according to required ratio
From drawing liquid amount, then starting to carry out drawing liquid from each decoction original liquid box by the first delivery pump, decoction extracts and takes volume principle,
The amount of liquid medicine extracted out from original liquid box is more than actually required amount of liquid medicine, such as according to 1:1.2 or other ratios squeeze into it is temporary
In groove；When certain first flowmeter all the way detects that the amount of liquid medicine that the road is extracted from original liquid box has met to require（That is first flow
Meter detects that the amount of liquid medicine of extraction is more than actually required amount of liquid medicine）, Ze Gai roads stop drawing liquid；When the first flowmeter of two-way is examined
When measuring the amount of liquid medicine of extraction and being satisfied by requiring, the first delivery pump on each stoste transfer pipeline is all stopped；Then pass through
Temporary tank liquid level sensor detects to the amount of liquid medicine in each temporary tank, whether more real than mixed liquid detects each temporary tank Chinese medicine liquid measure
Amount of liquid medicine needed for border is more, if amount of liquid medicine is inadequate, continues through the first delivery pump from original liquid box drawing liquid to temporary tank, until each
The temporary tank Chinese medicine liquid measure amount of liquid medicine more actually required than mixed liquid is more；Due to the outlet that each decoction stoste is led to and corresponding temporary tank
Top be connected, also can gas-liquid point in temporary tank even if a large amount of bubbles be present during the course of conveying of temporary tank is led to from stoste
Leave, i.e. liquid is in temporary trench bottom, and gas is then at top, and the amount of liquid medicine of temporary tank is all the time than the demand of actual mixed liquid
Amount is big, therefore enters temporary tank to final mixed liquid result also without influence even if some air are mixed into；
Then the respective drawing liquid amount of decoction A temporary tank and the temporary tank of medical liquid B is set according to ratio needed for actual mixed liquid,
Then start to carry out drawing liquid from each temporary tank by the second delivery pump；Because the cross section of temporary tank lower part is than upper part
Small, medicine liquid outlet can all flow to the position of medicine liquid outlet in the bottom of temporary tank, liquid, so as to avoid sucking air；
After required amount of liquid medicine is squeezed into decoction mixing channel by the metering of each second flowmeter from each temporary tank, circulation
Pump is started working, and is allowed decoction to be circulated by circulation line, is sufficiently mixed in decoction mixing channel, after decoction is sufficiently mixed,
Then main engine bed is connected to during technique by mixture export pipeline to be operated；At least two mixing channels are housed by decoction mixing channel
Liquid level sensor, respectively close at the top and bottom of decoction mixing channel, when mixed decoction conjunction tank liquor position is too low, then trigger low liquid level report
It is alert, it is desirable to fluid infusion；When decoction mixing channel liquid level is too high, high liquid level warning can be triggered, two-way temporary tank then stops mixing to decoction
Close groove feed liquor.
Claims (8)
- A kind of 1. chemical liquid feed system, it is characterised in that including：Decoction mixing channel connects decoction mixing channel with least two-way Decoction feed mechanism；The decoction feed mechanism includes original liquid box, liquid suction pipe, stoste transfer pipeline, delivery pump, flowmeter, temporary tank, stoste Export pipeline；Liquid suction pipe, one end connection stoste transfer pipeline one end of liquid suction pipe, the other end of stoste transfer pipeline are provided with original liquid box Connect temporary tank；Delivery pump and flowmeter are arranged on stoste transfer pipeline；Temporary tank, which is provided with, to be used to measure temporary tank Chinese medicine The metering unit of liquid measure；Temporary trench bottom connects decoction mixing channel by stoste outlet pipeline；The stoste outlet pipeline of temporary tank It is provided with valve；The bottom of decoction mixing channel or a side lower part connect circulating pump by decoction suction line, circulating pump connection three-way valve First end, the second end of three-way valve connect top or the upper lateral part of decoction mixing channel by circulation line；Three-way valve The mixture export pipeline of three-terminal link decoction mixing channel.
- 2. chemical liquid feed system as claimed in claim 1, it is characterised in thatAt the top of the other end connection temporary tank of stoste transfer pipeline.
- 3. chemical liquid feed system as claimed in claim 1, it is characterised in thatAir intlet is provided with the top of temporary tank.
- 4. chemical liquid feed system as claimed in claim 1, it is characterised in thatThe cross section of temporary tank lower part is less than the cross section of upper part.
- A kind of 5. chemical liquid feed system, it is characterised in that including：Decoction mixing channel connects decoction mixing channel with least two-way Decoction feed mechanism；The decoction feed mechanism includes original liquid box, liquid suction pipe, stoste transfer pipeline, the first delivery pump, first flowmeter, temporary Groove, stoste outlet pipeline, the second delivery pump, second flowmeter；Liquid suction pipe, one end connection stoste transfer pipeline one end of liquid suction pipe, the other end of stoste transfer pipeline are provided with original liquid box Connect temporary tank；First delivery pump and first flowmeter are arranged on stoste transfer pipeline；Temporary tank, which is provided with, to be used to measure temporarily Deposit the metering unit of groove Chinese medicine liquid measure；Temporary trench bottom connects decoction mixing channel by stoste outlet pipeline；Second delivery pump and Second flowmeter is arranged on stoste outlet pipeline；The bottom of decoction mixing channel or a side lower part connect circulating pump by decoction suction line, circulating pump connection three-way valve First end, the second end of three-way valve connect top or the upper lateral part of decoction mixing channel by circulation line；Three-way valve The mixture export pipeline of three-terminal link decoction mixing channel.
- 6. chemical liquid feed system as claimed in claim 5, it is characterised in thatAt the top of the other end connection temporary tank of stoste transfer pipeline.
- 7. chemical liquid feed system as claimed in claim 5, it is characterised in thatAt least two mixing channel liquid level sensors are housed by decoction mixing channel, respectively close at the top and bottom of decoction mixing channel, For monitoring the high level and low liquid level of decoction mixing channel respectively.
- 8. chemical liquid feed system as claimed in claim 5, it is characterised in thatThe cross section of temporary tank lower part is less than the cross section of upper part.
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| CN201720203169.6U CN206688549U (en) | 2017-03-03 | 2017-03-03 | Chemical liquid feed system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720203169.6U CN206688549U (en) | 2017-03-03 | 2017-03-03 | Chemical liquid feed system |
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| CN206688549U true CN206688549U (en) | 2017-12-01 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106861485A (en) * | 2017-03-03 | 2017-06-20 | 吉姆西半导体科技（无锡）有限公司 | Chemical liquid feed system and supply method |
| CN108854714A (en) * | 2018-06-27 | 2018-11-23 | 郑州源冉生物技术有限公司 | A kind of solution mixing arrangement facilitating sampling based on biotechnology research and development |
| CN108889153A (en) * | 2018-07-23 | 2018-11-27 | 芜湖佩林郁松计量科技有限公司 | A kind of dosing device with function of measuring |
| CN109701945A (en) * | 2018-12-13 | 2019-05-03 | 彩虹（合肥）液晶玻璃有限公司 | A kind of medical fluid addition control device and glass substrate production line |
| CN110055701A (en) * | 2019-04-15 | 2019-07-26 | 嘉兴市春达纺织有限公司 | A kind of sizing machine of real-time proportion slurries |
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2017
- 2017-03-03 CN CN201720203169.6U patent/CN206688549U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106861485A (en) * | 2017-03-03 | 2017-06-20 | 吉姆西半导体科技（无锡）有限公司 | Chemical liquid feed system and supply method |
| CN108854714A (en) * | 2018-06-27 | 2018-11-23 | 郑州源冉生物技术有限公司 | A kind of solution mixing arrangement facilitating sampling based on biotechnology research and development |
| CN108889153A (en) * | 2018-07-23 | 2018-11-27 | 芜湖佩林郁松计量科技有限公司 | A kind of dosing device with function of measuring |
| CN109701945A (en) * | 2018-12-13 | 2019-05-03 | 彩虹（合肥）液晶玻璃有限公司 | A kind of medical fluid addition control device and glass substrate production line |
| CN110055701A (en) * | 2019-04-15 | 2019-07-26 | 嘉兴市春达纺织有限公司 | A kind of sizing machine of real-time proportion slurries |
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Address after: No. 1 Jingxiang Road, Xibei Town, Xishan District, Wuxi City, Jiangsu Province, 214000 Patentee after: Jimsi Semiconductor Technology (Wuxi) Co.,Ltd. Address before: No. 45, Yougu Enterprise Park, 58 Jinghong Road, Xibei Town, Xishan District, Wuxi City, Jiangsu Province Patentee before: GMC SEMITECH Co.,Ltd. |