CN108405501A - Blowing pipeline device and process gas convey cleaning systems - Google Patents
Blowing pipeline device and process gas convey cleaning systems Download PDFInfo
- Publication number
- CN108405501A CN108405501A CN201810574914.7A CN201810574914A CN108405501A CN 108405501 A CN108405501 A CN 108405501A CN 201810574914 A CN201810574914 A CN 201810574914A CN 108405501 A CN108405501 A CN 108405501A
- Authority
- CN
- China
- Prior art keywords
- diaphragm valve
- pipeline
- valve
- pressure
- blowing pipeline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 38
- 238000007664 blowing Methods 0.000 title claims abstract description 30
- 238000004140 cleaning Methods 0.000 title claims abstract description 20
- 239000007789 gas Substances 0.000 claims abstract description 60
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 59
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 30
- 238000010926 purge Methods 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 8
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 8
- 239000012535 impurity Substances 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000005086 pumping Methods 0.000 abstract description 3
- 239000004020 conductor Substances 0.000 description 10
- 238000012360 testing method Methods 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 230000005611 electricity Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000004146 energy storage Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 210000002445 nipple Anatomy 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000004659 sterilization and disinfection Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- 208000033999 Device damage Diseases 0.000 description 1
- 229920002943 EPDM rubber Polymers 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005495 investment casting Methods 0.000 description 1
- 238000011169 microbiological contamination Methods 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
- B08B9/0328—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid by purging the pipe with a gas or a mixture of gas and liquid
Abstract
The invention discloses a kind of blowing pipeline devices and process gas to convey cleaning systems, belongs to pipe cleaning system technical field.Blowing pipeline device includes negative-pressure vacuum module, the module includes sequentially connected first non-return valve, first pressure gauge and the first diaphragm valve, it further include the branch line being connected between first pressure gauge and the first diaphragm valve, the second diaphragm valve is provided on branch line, the free end of branch line connects vacuum pump.The gas in equipment all can be discharged for the vacuum pumping to equipment for negative-pressure vacuum module.The device further includes positive pressure purging module, the module includes sequentially connected third diaphragm valve, second pressure gauge, surge tank, the 4th diaphragm valve and the second non-return valve, surge tank can store nitrogen, when nitrogen has sufficiently large impact force, can easily clean away residual impurity.The configuration of the present invention is simple, the cleaning time is short, and effect is good, and nitrogen consumption is few, and production cost is low.
Description
Technical field
The present invention relates to pipe cleaning system technical fields more particularly to a kind of blowing pipeline device and process gas to convey
Cleaning systems.
Background technology
It needs largely to use high-purity process gas in production process of semiconductor, such as：Chlorine, phosphine, hydrogen chloride etc. four
More than ten plant high-purity gas.With the continuous expansion of semiconductor production scale, need that a large amount of process gas pipeline is installed.Erector
The step of skill gas piping is：Site dimension is pressed first and carries out blanking, i.e.,：Segmentation cutting, is bent stainless steel pipeline；Then it carries out
The installation of stainless steel pipeline is connected between gas bomb cabinet, gas distributing valve case and production equipment board by argon arc welding；Then
Gas piping pressurize test is carried out, this is a very crucial step, and the purpose is to prove that this pipeline can be protected within the regular hour
The fixed pressure that keeps steady is constant, and usually to continue the pressure that 24 hours keep in pipeline is 150psi (psi：pound per
squreinch：A kind of pressure unit)；After pressurize test passes, helium leak test test is carried out, leak rate is less than 1.0X10-9mbar.l/
S is qualification.Then pipeline moisture content, oxygen, particle test are purged and carried out with high pure nitrogen, until meeting technology requirement, this
Pipeline can just come into operation.Since cleanliness factor is the principal element for influencing end product, so carrying out particle to process pipe
Technical testing continues with water oxygen content measuring if counting micro particles test passes.Purging can be discharged inside pipe fitting and accessory
All micro oil, moisture and particles.If these harmful substances, which enter process gas pipeline, will damage product.
Therefore, after semiconductor equipment factory is completed on special letter shoot road, after finishing air tightness test, to meet client
To the purity requirements of equipment pipeline, moisture, oxygen, granule content can be done to pipeline and is tested.The current way of factory is Dewar
Tank installs nitrogen purification device, nitrogen purification device outlet connection pressure reducing valve and pressure gauge as source purge gas on gas outlet.Connect again
It connects gas piping high pure nitrogen and persistently purges connection moisture, oxygen, grain analyser after two hours to it, when moisture, oxygen
Content is divided to be less than 10ppb, particle of the size less than 0.01um is qualified when being less than 1pcs/ft3.In general, to reach this standard, need
It continuously to purge 24 hours or more.Encounter pipeline it is longer when also need to purge the longer time, and to present in valve member some
Branch and turning can not clean up.The nitrogen amount not only consumed in this way is big, increases construction cost, and has delayed a large amount of treasured
The expensive time, influence job schedule.
Invention content
One of the objects of the present invention is to provide a kind of blowing pipeline devices and process gas to convey cleaning systems, to solve
Local branch and turning can not be cleaned in the prior art, are swept into requirement up to standard and are expended a large amount of nitrogen, and the cleaning time is long, increases
Substance and time cost.
To achieve the above object, following technical scheme is provided：
Blowing pipeline device provided by the invention, including negative-pressure vacuum module and positive pressure purge module；
The negative-pressure vacuum module include pass sequentially through the first pipeline head and the tail connection the first non-return valve, first pressure gauge and
First diaphragm valve further includes the branch line being connected between the first pressure gauge and first diaphragm valve, the branch
The second diaphragm valve is provided on pipeline, the free end of the branch line connects vacuum pump；
Positive pressure purging module include the third diaphragm valve for passing sequentially through the head and the tail connection of the second pipeline, second pressure gauge,
Surge tank, the 4th diaphragm valve and the second non-return valve.
Further, it is additionally provided with temperature control heating device in the surge tank.
Further, the first pressure gauge and the second pressure gauge are all made of pointer pressure.
Further, first diaphragm valve, second diaphragm valve, the third diaphragm valve and the 4th diaphragm valve
It is all made of manual diaphragm valve arrangement.
Further, further include first substrate and second substrate, the negative-pressure vacuum module setting is in the first substrate
On, the positive pressure purging module is arranged on the second substrate.
Further, first non-return valve and first diaphragm valve are connected by VCR connectors and first pipeline
It connects, second diaphragm valve is connect by VCR connectors with the branch line.
Further, the third diaphragm valve, the 4th diaphragm valve and second non-return valve by VCR connectors with
Second piping connection.
Further, first pipeline, second pipeline and the branch line are stainless steel pipes.
The present invention also provides a kind of process gas to convey cleaning systems, including process gas conveying equipment and above-mentioned technology
Scheme any one of them blowing pipeline device, the first pipeline in the blowing pipeline device is close to one end of the first non-return valve
It is connect with the gas outlet of the process gas conveying equipment；The second pipeline in the blowing pipeline device is close to third diaphragm valve
One end connect with Nitrogen source gases, the other end is connect with the air inlet of the process gas conveying equipment.
Further, the other end of first pipeline is connect with garbage collection tank.
Compared with prior art, blowing pipeline device and process gas provided by the invention convey cleaning systems, including negative
Vacuum module is pressed, negative-pressure vacuum module is used in the vacuum pumping to process gas conveying equipment before, until the first pressure
Pressure value on power table vacuumizes completions to -14.7psi, and process vacuumizing in this way, can will be in process gas conveying equipment
Gas is all discharged.The blowing pipeline device further includes positive pressure purging module, is provided with surge tank in positive pressure purging module, buffers
Tank has energy storage effect, then opens third diaphragm valve, so that the nitrogen in Nitrogen source gases is stored in surge tank, when in second pressure gauge
When pressure value reaches 80psi, the nitrogen in surge tank has sufficiently large impact force, open at this time the 4th diaphragm valve and first every
Film valve can easily clean away the residual impurity in process gas conveying equipment pipeline.The blowing pipeline of the present invention
Apparatus structure is simple, and the cleaning time is short, and effect is good, and nitrogen consumption greatly reduces, and production cost substantially reduces.In addition, buffering
Temperature control heating device is set in tank, the nitrogen in surge tank can be heated, hot nitrogen can be by impurity and moisture one
Secondary property is all removed, and is substantially reduced and is cleaned the time, reduces the loss of nitrogen.
Description of the drawings
Fig. 1 is the structural schematic diagram of the negative-pressure vacuum module in the embodiment of the present invention；
Fig. 2 is the structural schematic diagram of the positive pressure purging module in the embodiment of the present invention；
Fig. 3 is the structural schematic diagram of the process gas conveying cleaning systems in the embodiment of the present invention.
Reference numeral：The first pipelines of 1-；2- branch lines；The first non-return valves of 3-；4- first pressure gauges；The first diaphragms of 5-
Valve；The second diaphragm valves of 6-；7- vacuum pumps；The second pipelines of 8-；9- third diaphragm valves；10- second pressure gauges；11- surge tanks；12-
4th diaphragm valve；The second non-return valves of 13-；14- temperature control heating devices；15- process gas conveying equipments；16- Nitrogen source gases；17-
Garbage collection tank.
Specific implementation mode
Technical solution to further illustrate the present invention below with reference to the accompanying drawings and specific embodiments.
For make present invention solves the technical problem that, the technical solution that uses and the technique effect that reaches it is clearer, below
The technical solution of the embodiment of the present invention will be described in further detail in conjunction with attached drawing, it is clear that described embodiment is only
It is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those skilled in the art exist
The every other embodiment obtained under the premise of creative work is not made, shall fall within the protection scope of the present invention.
As shown in figure 3, present embodiments providing a kind of process gas conveying cleaning systems, including process gas conveying equipment
15 and blowing pipeline device, blowing pipeline device therein includes negative-pressure vacuum module and positive pressure purging module.Specifically, as schemed
1 to shown in Fig. 3, and negative-pressure vacuum module includes passing sequentially through the first non-return valve 3, the first pressure gauge 4 that the first pipeline 1 connects from beginning to end
Further include the branch line 2 being connected between first pressure gauge 4 and the first diaphragm valve 5 with the first diaphragm valve 5, on branch line 2
It is provided with the second diaphragm valve 6, the free end of branch line 2 connects vacuum pump 7.Negative-pressure vacuum module is used for before using to technique
The vacuum pumping of gas transportation facilities 15 vacuumizes completion until the pressure value in first pressure gauge 4 to -14.7psi, this
Sample the gas in process gas conveying equipment 15 all can be discharged, the easy to operate and used time is very short, saves by vacuumizing
Time cost.It includes passing sequentially through third diaphragm valve 9, the second pressure gauge that the second pipeline 8 connects from beginning to end that positive pressure, which purges module,
10, surge tank 11, the 4th diaphragm valve 12 and the second non-return valve 13.Surge tank 11 has energy storage effect, is opening third diaphragm valve 9
The nitrogen in Nitrogen source gases 16 is stored in surge tank 11 afterwards, when the pressure value in second pressure gauge 10 reaches 80psi, surge tank 11
Interior nitrogen has sufficiently large impact force, opens the 4th diaphragm valve 12 and the first diaphragm valve 5 at this time, can be easily by work
Residual impurity in 15 pipeline of skill gas transportation facilities cleans away.Further, temperature control heating is additionally provided in surge tank 11
Device 14 can heat the nitrogen in surge tank 11, and hot nitrogen disposably can all remove impurity and moisture,
It substantially reduces and cleans the time, reduce the loss of nitrogen.Further, the second pipeline 8 close to one end of third diaphragm valve 9 with
Nitrogen source gases 16 connect, and the other end is connect with the air inlet of process gas conveying equipment 15, and the first pipeline 1 is close to the first non-return valve
3 one end is connect with the gas outlet of process gas conveying equipment 15, defeated to process gas to constitute purge system pipe path
Equipment 15 is sent to be purged.In order to collect the discarded and impurity of discharge, avoid environmental pollution, the other end of the first pipeline 1 with it is useless
Expect that collecting tank 17 connects.
Specifically, temperature control heating device 14 uses temp auto-controlled heat tape, which includes PTC conduction materials
Material, plain conductor and insulating sheath, PTC conductive materials are in parallel with plain conductor, and insulating sheath is led in PTC conductive materials with metal
Outside line." PTC " characteristic, that is, positive temperature coefficient effect refers to resistivity of material to be increased as temperature increases, and in a constant temperature
The characteristic that degree compartment resistivity increased dramatically.The positive and negative anodes of temp auto-controlled heat tape are correspondingly connected with the positive and negative anodes of power supply respectively,
Electric current flows into plain conductor and PTC conductive materials in temp auto-controlled heat tape from anode.PTC conductive materials are exactly continuous in parallel
Resistance heater between plain conductor, converts electrical energy into thermal energy, and heating and thermal insulation is carried out to surge tank 11.Temp auto-controlled electricity adds
The resistance in the torrid zone increases with temperature and gradually increases, and when having reached critical high resistance area, resistance levels off to infinity, and blocks electricity
Stream, electric current only pass through plain conductor.The temperature of temp auto-controlled heat tape just reaches maximum temperature and no longer increases at this time, realizes certainly
Dynamic limit temperature.When the resistance of PTC conductive materials is down to critical resistance area with its temperature, electric current is allowed to pass through, temp auto-controlled electricity adds at this time
Restart heat temperature raising in the torrid zone.
Further, for the pressure size in pipeline is clearly viewed, second pressure gauge 10 and first pressure gauge 4 are all made of
Pointer pressure.Third diaphragm valve 9, the 4th diaphragm valve 12, the first diaphragm valve 5 and the second diaphragm valve 6 are all made of manual diaphragm
The structure of valve, manual diaphragm valve be with end valve, with can disinfection function novel valve, also known as (handwheel) driving is straight manually
General formula shut-off valve.It is straight-through logical without dead angle including the stainless steel body of diaphragm, hot investment casting made of EPDM diaphragm materials, polishing
Road, and there is open and close limit and status display function.Such valve is acidproof, it is alkaline-resisting, without leakage, not microbiological contamination, easily disinfection and
It is easy to maintain.
Further, in order to make blowing pipeline device more securely be connected on process gas conveying equipment 15, and position
Properly, it occupies little space, blowing pipeline device further includes first substrate and second substrate, and first substrate and second substrate, which are fixed, to be connected
It is connected on the siding of process gas conveying equipment 15, negative-pressure vacuum module is detachably connected on first substrate, and positive pressure purges mould
Group is detachably connected on second substrate, in this way in the case where blowing pipeline device damages, can also be disassembled and be tieed up
It repaiies or replaces.
Further, third diaphragm valve 9, the 4th diaphragm valve 12 and the second non-return valve 13 are managed by VCR connectors and second
Road 8 connects, and the first non-return valve 3 and the first diaphragm valve 5 are connect by VCR connectors with the first pipeline 1, and the second diaphragm valve 6 also leads to
VCR connectors are crossed to connect with branch line 2.The full name in English of VCR is Vacuum Coupling Radius Seal, i.e. vacuum connects
Sagittal plane seal nipple is connect, VCR connectors are one kind of face seal nipple, and sealing element uses metal gasket.Pass through internal and external screw thread
It interlocks to oppress metal gasket, so that gasket is generated certain deformation, to achieve the effect that sealing.High (the group of VCR connectors cleanliness factor
Part is by the process such as electropolishing and cleaning), good airproof performance because using metallic seal element, the specified work of VCR connectors
It is relatively wider (using the VCR connectors of SUS316L gaskets, temperature rating is up to 537 DEG C) to make temperature range.VCR connectors are convenient for peace
Dress has minimum dismounting gap, (can be reinstalled after dismounting with repeated disassembled and assembled and need replacing new gasket).Second pipeline 8, first
Pipeline 1 and branch line 2 are stainless steel pipes.
The course of work of process gas conveying cleaning systems provided in this embodiment is as follows：
Third diaphragm valve 9 is first connected into 16 end of Nitrogen source gases, 13 Joining Technology gas transportation facilities 15 of the second non-return valve
Air inlet, negative pressure vacuumize the gas outlet of module Joining Technology gas transportation facilities 15.Before carrying out cleaning works, at all valves
In opening state, temp auto-controlled heat tape is opened.(a) third diaphragm valve 9 and the 4th diaphragm valve 12 are closed, the second diaphragm valve is opened
6, then start vacuum pump 7；(b) observe first pressure gauge 4 pressure value, when first pressure gauge 4 pressure value stabilization-
When 14.7psi, the second diaphragm valve 6 is first closed, it is rear to open third diaphragm valve 9, so that high pure nitrogen is filled with surge tank 11, temp auto-controlled electricity
Heating tape is in heated condition (30 DEG C of constant temperature).When the pressure value of second pressure gauge 10 reaches 80psi, third diaphragm is first closed
Valve 9, rear to open the 4th diaphragm valve 12 and the first diaphragm valve 5, the big flow nitrogen with thermal energy pours process gas conveying equipment
In 15 pipeline, moisture, oxygen and the impurity particle in pipeline are displaced.After continuously repeating (a) and (b) step 20-30 times, work
Gas outlet connection moisture, oxygen and the grain analyser of skill gas transportation facilities 15, are tested.
The blowing pipeline apparatus structure of the present embodiment is simple, and the cleaning time is short, and effect is good, and nitrogen consumption greatly reduces,
Production cost substantially reduces.
Note that above are only presently preferred embodiments of the present invention and institute's application technology principle.It will be appreciated by those skilled in the art that
The present invention is not limited to specific embodiments described here, can carry out for a person skilled in the art it is various it is apparent variation,
It readjusts and substitutes without departing from protection scope of the present invention.Therefore, although being carried out to the present invention by above example
It is described in further detail, but the present invention is not limited only to above example, without departing from the inventive concept, also
May include other more equivalent embodiments, and the scope of the present invention is determined by scope of the appended claims.
Claims (10)
1. a kind of blowing pipeline device, which is characterized in that module is purged including negative-pressure vacuum module and positive pressure,
The negative-pressure vacuum module includes the first non-return valve (3) for passing sequentially through the first pipeline (1) head and the tail connection, first pressure gauge
(4) and the first diaphragm valve (5) further include, the branch being connected between the first pressure gauge (4) and first diaphragm valve (5)
Pipeline (2), the second diaphragm valve (6) is provided on the branch line (2), and the free end of the branch line (2) connects vacuum
It pumps (7)；
The positive pressure purging module includes the third diaphragm valve (9) for passing sequentially through the second pipeline (8) head and the tail connection, second pressure gauge
(10), surge tank (11), the 4th diaphragm valve (12) and the second non-return valve (13).
2. blowing pipeline device according to claim 1, which is characterized in that be additionally provided with temperature control in the surge tank (11)
Heating device (14).
3. blowing pipeline device according to claim 1, which is characterized in that the first pressure gauge (4) and described second
Pressure gauge (10) is all made of pointer pressure.
4. blowing pipeline device according to claim 1, which is characterized in that first diaphragm valve (5), described second every
Film valve (6), the third diaphragm valve (9) and the 4th diaphragm valve (12) are all made of manual diaphragm valve arrangement.
5. blowing pipeline device according to claim 1, which is characterized in that further include first substrate and second substrate, institute
It states negative-pressure vacuum module to be arranged on the first substrate, the positive pressure purging module is arranged on the second substrate.
6. blowing pipeline device according to claim 1, which is characterized in that first non-return valve (3) and described first
Diaphragm valve (5) is connect by VCR connectors with first pipeline (1), and second diaphragm valve (6) passes through VCR connectors and institute
State branch line (2) connection.
7. blowing pipeline device according to claim 1, which is characterized in that the third diaphragm valve (9), the described 4th every
Film valve (12) and second non-return valve (13) are connect by VCR connectors with second pipeline (8).
8. blowing pipeline device according to claim 1, which is characterized in that first pipeline (1), second pipeline
(8) and the branch line (2) is stainless steel pipes.
9. a kind of process gas conveys cleaning systems, which is characterized in that including process gas conveying equipment (15) and as right is wanted
1-8 any one of them blowing pipeline devices are sought, the first pipeline (1) in the blowing pipeline device is close to the first non-return valve
(3) one end is connect with the gas outlet of the process gas conveying equipment (15)；The second pipeline in the blowing pipeline device
(8) it is connect with Nitrogen source gases (16) close to one end of third diaphragm valve (9), the other end and the process gas conveying equipment (15)
Air inlet connection.
10. process gas according to claim 9 conveys cleaning systems, which is characterized in that first pipeline (1) it is another
One end is connect with garbage collection tank (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810574914.7A CN108405501A (en) | 2018-06-06 | 2018-06-06 | Blowing pipeline device and process gas convey cleaning systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810574914.7A CN108405501A (en) | 2018-06-06 | 2018-06-06 | Blowing pipeline device and process gas convey cleaning systems |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108405501A true CN108405501A (en) | 2018-08-17 |
Family
ID=63141468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810574914.7A Pending CN108405501A (en) | 2018-06-06 | 2018-06-06 | Blowing pipeline device and process gas convey cleaning systems |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108405501A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109737032A (en) * | 2018-12-29 | 2019-05-10 | 通威太阳能（成都）有限公司 | A kind of novel vacuum pump restarts anti-jamming method after stopping |
| CN109848165A (en) * | 2019-01-16 | 2019-06-07 | 北京智博高科生物技术有限公司 | A kind of clearing apparatus for sealed seed source protective housing |
| CN110187067A (en) * | 2019-06-21 | 2019-08-30 | 至砾机电设备（上海）有限公司 | A kind of water oxygen particle automatic analysis system and its analysis method |
| CN111135680A (en) * | 2019-12-30 | 2020-05-12 | 中船重工（邯郸）派瑞特种气体有限公司 | Water removal method and system suitable for high-purity electronic grade gas production system |
| CN112409122A (en) * | 2020-11-29 | 2021-02-26 | 山东高端化工研究院有限公司 | Four raw materials preprocessing device of carbon behind ether |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100863941B1 (en) * | 2007-05-17 | 2008-10-16 | 주식회사 아토 | Purge system and method of gas supply device |
| CN202188978U (en) * | 2011-08-10 | 2012-04-11 | 中华人民共和国南通出入境检验检疫局 | Pretreatment device of clamping type gas sampling tank |
| CN203018407U (en) * | 2012-12-14 | 2013-06-26 | 中国测试技术研究院化学研究所 | Gas cylinder automatic cleaning device of gas standard substance configuration system |
| CN203477858U (en) * | 2013-09-05 | 2014-03-12 | 鞍钢股份有限公司 | Lubricating oil sweeping device of rolling mill back-up roll bearing box |
| CN104062153A (en) * | 2014-06-17 | 2014-09-24 | 中国船舶重工集团公司第七一八研究所 | Blowing sampling system and blowing sampling method for analysis of content of impurities gas |
| CN203929315U (en) * | 2014-05-20 | 2014-11-05 | 西安京兆电力科技有限公司 | A kind of gun barrel formula Antichoking blast pressure sampling control system |
| CN104155417A (en) * | 2014-08-22 | 2014-11-19 | 中国计量科学研究院 | Pre-processing system and pre-processing method of trace moisture analysis in ultrahigh-purity gas |
| CN204891531U (en) * | 2015-06-16 | 2015-12-23 | 武汉旭日华科技发展有限公司 | A equipment for organic waste gas desorption |
| CN205331808U (en) * | 2016-02-02 | 2016-06-22 | 广东华特气体股份有限公司 | Safe efficient gas distribution system |
| CN205677733U (en) * | 2015-06-01 | 2016-11-09 | 卡特彼勒公司 | Purging system for engine system |
| CN206818664U (en) * | 2017-03-29 | 2017-12-29 | 洛阳黎明大成氟化工有限公司 | A kind of water analysis system of electron level gas of nitrogen trifluoride |
| CN207204785U (en) * | 2017-09-12 | 2018-04-10 | 杭州贝斯特气体有限公司 | A kind of gas circuit purging system |
| CN208495250U (en) * | 2018-06-06 | 2019-02-15 | 上海正帆科技股份有限公司 | Blowing pipeline device and process gas convey cleaning systems |
-
2018
- 2018-06-06 CN CN201810574914.7A patent/CN108405501A/en active Pending
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100863941B1 (en) * | 2007-05-17 | 2008-10-16 | 주식회사 아토 | Purge system and method of gas supply device |
| CN202188978U (en) * | 2011-08-10 | 2012-04-11 | 中华人民共和国南通出入境检验检疫局 | Pretreatment device of clamping type gas sampling tank |
| CN203018407U (en) * | 2012-12-14 | 2013-06-26 | 中国测试技术研究院化学研究所 | Gas cylinder automatic cleaning device of gas standard substance configuration system |
| CN203477858U (en) * | 2013-09-05 | 2014-03-12 | 鞍钢股份有限公司 | Lubricating oil sweeping device of rolling mill back-up roll bearing box |
| CN203929315U (en) * | 2014-05-20 | 2014-11-05 | 西安京兆电力科技有限公司 | A kind of gun barrel formula Antichoking blast pressure sampling control system |
| CN104062153A (en) * | 2014-06-17 | 2014-09-24 | 中国船舶重工集团公司第七一八研究所 | Blowing sampling system and blowing sampling method for analysis of content of impurities gas |
| CN104155417A (en) * | 2014-08-22 | 2014-11-19 | 中国计量科学研究院 | Pre-processing system and pre-processing method of trace moisture analysis in ultrahigh-purity gas |
| CN205677733U (en) * | 2015-06-01 | 2016-11-09 | 卡特彼勒公司 | Purging system for engine system |
| CN204891531U (en) * | 2015-06-16 | 2015-12-23 | 武汉旭日华科技发展有限公司 | A equipment for organic waste gas desorption |
| CN205331808U (en) * | 2016-02-02 | 2016-06-22 | 广东华特气体股份有限公司 | Safe efficient gas distribution system |
| CN206818664U (en) * | 2017-03-29 | 2017-12-29 | 洛阳黎明大成氟化工有限公司 | A kind of water analysis system of electron level gas of nitrogen trifluoride |
| CN207204785U (en) * | 2017-09-12 | 2018-04-10 | 杭州贝斯特气体有限公司 | A kind of gas circuit purging system |
| CN208495250U (en) * | 2018-06-06 | 2019-02-15 | 上海正帆科技股份有限公司 | Blowing pipeline device and process gas convey cleaning systems |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109737032A (en) * | 2018-12-29 | 2019-05-10 | 通威太阳能（成都）有限公司 | A kind of novel vacuum pump restarts anti-jamming method after stopping |
| CN109848165A (en) * | 2019-01-16 | 2019-06-07 | 北京智博高科生物技术有限公司 | A kind of clearing apparatus for sealed seed source protective housing |
| CN110187067A (en) * | 2019-06-21 | 2019-08-30 | 至砾机电设备（上海）有限公司 | A kind of water oxygen particle automatic analysis system and its analysis method |
| CN110187067B (en) * | 2019-06-21 | 2024-03-22 | 上海至纯系统集成有限公司 | Water-oxygen particle automatic analysis system and analysis method thereof |
| CN111135680A (en) * | 2019-12-30 | 2020-05-12 | 中船重工（邯郸）派瑞特种气体有限公司 | Water removal method and system suitable for high-purity electronic grade gas production system |
| CN112409122A (en) * | 2020-11-29 | 2021-02-26 | 山东高端化工研究院有限公司 | Four raw materials preprocessing device of carbon behind ether |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108405501A (en) | Blowing pipeline device and process gas convey cleaning systems | |
| CN102654241B (en) | Gas decompression supplier, the gas cabinet with this gas decompression supplier, clack box and substrate board treatment | |
| CN208495250U (en) | Blowing pipeline device and process gas convey cleaning systems | |
| WO1990001569A1 (en) | Metal oxidation apparatus and method | |
| CN101276732A (en) | System for sweeping microelectron air supply cabinet | |
| CN110966518B (en) | Gas filling system and filling method | |
| CN104455722A (en) | Installing construction method for semiconductor manufacture procedure gas conveying pipelines | |
| CN201282131Y (en) | Microelectron air source cabinet purging system | |
| JP3289190B2 (en) | Semiconductor process gas supply system | |
| CN212842913U (en) | Atmosphere furnace cooling pipeline system | |
| JP3607998B2 (en) | Container valve with decompression function | |
| CN115215327A (en) | Device and method for purifying carbon nano tube | |
| CN115493082A (en) | Electronic-grade chlorine trifluoride feeding system and method and material receiving system and method | |
| CN210051496U (en) | Accurate leakage detection equipment for electrolytic cell based on helium | |
| CN209511589U (en) | Nitrogen leak recovery system | |
| CN217176999U (en) | Jet pump for recovering low-pressure steam waste heat of second circulating water system | |
| CN211821749U (en) | Liquid nitrogen storage device, system and air separation system | |
| CN111946602A (en) | Rapid vacuum pumping system, and control method and device thereof | |
| CN116119630B (en) | Normal-pressure helium recovery system and method | |
| CN212674857U (en) | Dynamic ablation test device for thermal protection material with stable gas source | |
| CN207394376U (en) | Nitrogen Station | |
| JP2004244724A (en) | Molten salt electrolytic device | |
| CN218409526U (en) | Carbon dioxide fills dress device | |
| CN218494766U (en) | Inflation device for pressure sealing test of liquid-immersed distribution transformer | |
| CN112090821B (en) | Ultrahigh-pressure cleaning device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |