CN111946602A - Rapid vacuum pumping system, and control method and device thereof - Google Patents
Rapid vacuum pumping system, and control method and device thereof Download PDFInfo
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- CN111946602A CN111946602A CN202010824608.1A CN202010824608A CN111946602A CN 111946602 A CN111946602 A CN 111946602A CN 202010824608 A CN202010824608 A CN 202010824608A CN 111946602 A CN111946602 A CN 111946602A
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- vacuum
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- vacuum pump
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention discloses a rapid vacuum-pumping system, a control method and a control device thereof, wherein the rapid vacuum-pumping system comprises a vacuum pumping system and a water circulation system, the vacuum pumping system comprises a pumped container, a high-vacuum gas circuit, a low-vacuum gas circuit and a medium-vacuum gas circuit, and a high-vacuum pump of the high-vacuum gas circuit, a first low-vacuum pump of the low-vacuum gas circuit, a second low-vacuum pump of the medium-vacuum gas circuit and the medium-vacuum pump jointly form the rapid vacuum-pumping system; in the technical scheme provided by the invention, the vacuum container is quickly vacuumized through the high-vacuum gas circuit, the low-vacuum gas circuit and the medium-vacuum gas circuit, and the vacuum containers with different vacuum requirements are quickly vacuumized, so that the quick and flexible vacuumizing of the low, medium and high vacuum requirements is realized; and the control operation is stable, the vacuum degree requirement of the vacuum container is effectively met, the heat insulation effect of the vacuum container is ensured, and the material loss in the vacuum container is reduced.
Description
Technical Field
The invention relates to the technical field of vacuum pumping of vacuum equipment, in particular to a rapid vacuum pumping system and a control method and device thereof.
Background
After long-term use of vacuum equipment such as a vacuum tube, a vacuum storage tank or a vacuum container, frost, sweat and ice can be generated on the inner wall of the vacuum equipment, so that the vaporization rate of liquid transported and stored by the vacuum equipment is high.
For example, oxygen, nitrogen and argon produced by an air separation oxygen production system need to be sent into a vacuum storage tank through a vacuum tube, the volume of the vacuum tube used on site is large, each vacuum tube is 6 meters long, and a conveying pipeline is long. In the past, when the vacuum tube needs to be vacuumized, the vacuum tube needs to be disassembled after stopping and is sent to a special vacuumizing department for vacuumizing, the disassembly, assembly and transportation are complex, time and labor are consumed, and the production is influenced.
Therefore, a rapid vacuum-pumping device needs to be designed, the device can rapidly and effectively vacuumize the vacuum equipment, can freely move, can be pushed to the side of the equipment needing vacuum-pumping to vacuumize as required, is flexible in vacuum-pumping operation, saves time and labor, and does not influence production.
Disclosure of Invention
The invention aims to provide a rapid vacuum pumping system, a control method and a control device thereof, and aims to solve the problems that the existing vacuum container is complex in disassembly, assembly and transportation, time-consuming and labor-consuming, and production is influenced.
In order to achieve the above object, the present invention provides a rapid vacuum pumping system, which comprises a vacuum pumping system and a water circulation system, wherein the vacuum pumping system comprises a pumped container, a high vacuum gas path, a low vacuum gas path and a medium vacuum gas path:
the high vacuum gas circuit comprises a high vacuum pump, a gas circuit pipe connected with the high vacuum pump in a closed circuit manner, and a plurality of pneumatic valves arranged on the gas circuit pipe, wherein the plurality of pneumatic valves comprise a high valve, a low valve and a pre-valve, the high valve and the low valve are correspondingly and respectively arranged on the gas circuit pipe connected with a gas inlet and a gas outlet of the high vacuum pump, the pre-valve is arranged between the high valve and the low valve, a pipe-removing inflation valve is arranged between the pre-valve and the high valve, and the pumped container is connected between the pre-valve and the high valve;
the low vacuum gas circuit comprises a first low vacuum pump and a gas circuit pipe connected with a gas inlet of the first low vacuum pump, and the gas circuit pipe is connected between the high vacuum pump and the low valve and is provided with a differential pressure valve;
the medium vacuum gas circuit comprises a second low vacuum pump, a medium vacuum pump, a gas inlet pipeline and a gas outlet pipeline, wherein the gas inlet pipeline and the gas outlet pipeline are connected with a gas inlet and a gas outlet of the medium vacuum pump, the gas inlet pipeline is connected between the low valve and the pre-valve, and the gas outlet pipeline is connected with the medium vacuum pump and the second low vacuum pump in series and is provided with an inflation valve.
Preferably, a baffle is arranged above the high-vacuum pump and used for blocking oil in the high-vacuum pump from entering the pumped container.
Preferably, an ionization gauge and a first resistance gauge are arranged between the pipe-removing inflation valve and the pre-valve, and a second resistance gauge is arranged on an air inlet pipeline of the medium vacuum pump.
Preferably, the high vacuum pump, the medium vacuum pump and the low vacuum pump are respectively provided as an oil diffusion pump, a roots pump and a rotary vane pump.
Preferably, the pumped container, the high vacuum gas circuit, the low vacuum gas circuit and the medium vacuum gas circuit are hermetically connected through corrugated pipes.
Preferably, the water circulation system comprises a water tank, an air-cooled cooler connected with the water tank, and a high-vacuum pump water line pipe, a medium-vacuum pump water line pipe and two low-vacuum pump water line pipes which are respectively connected with the water tank through galvanized pipes, wherein each water line pipe is provided with a single control valve, the port of each galvanized pipe is connected into the water tank through a hose, and the hose is provided with a master control valve.
In order to achieve the above object, the present invention further provides a control method using the above fast vacuum pumping system, including a control method of low vacuum pumping, a control method of medium vacuum pumping, and a control method of high vacuum pumping:
the control method for vacuumizing the vacuum chamber comprises the following steps: the pumped container is connected through a special connecting valve, a vacuum pumping port is opened, a power supply and an air source are connected, cooling water is introduced, and all valves are in a closed state; opening a differential pressure valve, opening a low valve, opening a pre-valve, starting a first low vacuum pump to pump air to the pumped container until the required vacuum degree is met, screwing a valve rod of a special connecting valve, closing a vacuum pumping port, opening a pipe-off inflation valve, and disconnecting the special connecting valve from a vacuum pipe of the pumped container;
the control method of the vacuum pumping comprises the following steps: the pumped container is connected through a special connecting valve, a vacuum pumping port is opened, a power supply and an air source are connected, cooling water is introduced, and all valves are in a closed state; opening an inflation valve, opening a pre-valve, starting a second low vacuum pump to pre-pump the pumped container, starting a middle vacuum pump when the pressure is less than 3000Pa until the vacuum degree is less than or equal to 1Pa until the required vacuum degree requirement is met, screwing a valve rod of a special connection valve, closing a vacuum pumping port, opening a tube-off inflation valve, and disconnecting the special connection valve from a vacuum tube of the pumped container;
the control method for high vacuum pumping comprises the following steps: the pumped container is connected through a special connecting valve, a vacuum pumping port is opened, a power supply and an air source are connected, cooling water is introduced, and all valves are in a closed state; opening a differential pressure valve, starting a first low vacuum pump to pre-pump the high vacuum pump, and starting the high vacuum pump to pre-heat after about 10 minutes; opening an inflation valve, opening a pre-valve, starting a second low vacuum pump to pre-pump the pumped container, and starting a middle vacuum pump when the pressure is less than 3000Pa until the vacuum degree is less than or equal to 1 Pa; closing the pre-valve, opening the low valve, closing the first low vacuum pump, closing the differential pressure valve, opening the high valve, using the high vacuum pump to pump air to the pumped container until reaching the required vacuum degree, screwing the valve rod of the special connection valve, closing the vacuum pumping port, opening the pipe-removing inflation valve, and removing the special connection valve from the vacuum pipe of the pumped container.
In order to achieve the purpose, the invention further provides a device applying the rapid vacuum pumping system, which comprises a base, a rack arranged on the base, and a diffusion pump, a first rotary vane pump, a roots pump and a second rotary vane pump which are sequentially and transversely arranged on the base and mounted on the rack, wherein a water-cooling trap baffle, a pneumatic high-vacuum baffle valve, two pneumatic high-vacuum butterfly valves and an electromagnetic high-vacuum inflation valve are arranged on a vacuum pumping pipeline of the diffusion pump, an electromagnetic high-vacuum differential pressure valve is arranged on the vacuum pumping pipeline of the first rotary vane pump, electromagnetic vacuum inflation valves are arranged on the vacuum pumping pipelines of the roots pump and the second rotary vane pump, the vacuum pumping pipelines of the diffusion pump, the first rotary vane pump, the roots pump and the second rotary vane pump are connected in a gas-tight manner through corrugated pipes, and a plurality of rollers are arranged on the base.
Preferably, the air-cooled diffusion pump further comprises a water tank and a cooler which are arranged on the base, the water tank is connected to the diffusion pump, the first rotary vane pump, the roots pump and the second rotary vane pump through a hose and a galvanized pipe, the water tank is arranged at the tail end of the second rotary vane pump, and the air-cooled cooler is arranged above the second rotary vane pump.
Preferably, the part of the machine frame on which the diffusion pump is arranged is provided with an electric cabinet and a vacuum gauge, and a panel of the electric cabinet is provided with a plurality of operating buttons and an acoustic alarm.
According to the technical scheme provided by the invention, the rapid vacuum pumping system comprises a vacuum pumping system and a water circulation system, wherein the vacuum pumping system comprises a pumped container, a high-vacuum gas path, a low-vacuum gas path and a medium-vacuum gas path, and a high-vacuum pump of the high-vacuum gas path, a first low-vacuum pump of the low-vacuum gas path, a second low-vacuum pump of the medium-vacuum gas path and the medium-vacuum pump jointly form the rapid vacuum pumping system; and the control operation is stable, the vacuum degree requirement of the vacuum container is effectively met, the heat insulation effect of the vacuum container is ensured, and the material loss in the vacuum container is reduced.
The rapid vacuum-pumping system, the control method and the device thereof have the following beneficial effects:
(1) the system can realize the quick vacuum pumping of the vacuum container, and the vacuum container with different vacuum requirements can be quickly pumped, so that the quick, flexible and stable vacuum pumping of the low, medium and high vacuum requirements can be realized;
(2) the rapid vacuum-pumping system effectively improves the vacuum-pumping efficiency of a vacuum pipeline or vacuum equipment, so that the vacuum degree of a vacuum tube of 6 meters can be qualified only in a few minutes in the common vacuum-pumping process of several hours, and the vacuum-pumping efficiency is greatly improved;
(3) the rapid vacuumizing device is convenient to move, can repeatedly vacuumize for many times at any time, is flexible and convenient, and has good operability;
(4) the water circulation system of the rapid vacuum pumping device recycles the cooling water, thereby effectively saving water, and the water is saved by about 350 liters per minute.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic view of an embodiment of a rapid vacuum pumping system according to the present invention;
FIG. 2 is a schematic view of the water circulation system of FIG. 1;
FIG. 3 is a schematic view of an embodiment of a device of the rapid vacuum pumping system according to the present invention;
FIG. 4 is a schematic front view of FIG. 3;
FIG. 5 is a top view of FIG. 3;
fig. 6 is a left side view of fig. 3.
The reference numbers illustrate: 1-pumped container, 2-high vacuum gas circuit, 21-high vacuum pump, 22-high valve, 23-low valve, 24-pre-valve, 25-de-pipe gas charging valve, 26-baffle, 27-ionization gauge, 28-first resistance gauge, 3-low vacuum gas circuit, 31-first low vacuum pump, 32-differential pressure valve, 4-medium vacuum gas circuit, 41-second low vacuum pump, 42-medium vacuum pump, 43-gas charging valve, 44-second resistance gauge, 5-water tank, 6-air cooling cooler, 7-single control valve, 8-master control valve; 100-a device of a rapid vacuum pumping system, 101-a base, 102-a frame, 103-a diffusion pump, 104-a first rotary vane pump, 105-a roots pump, 106-a second rotary vane pump, 107-a water-cooling trap baffle, 108-a pneumatic high vacuum baffle valve, 109-a pneumatic high vacuum butterfly valve, 110-an electromagnetic high vacuum inflation valve, 111-an electromagnetic high vacuum differential pressure valve, 112-an electromagnetic vacuum inflation valve, 113-a corrugated pipe, 114-a roller, 115-an electric cabinet and 116-a vacuum gauge.
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated.
Fig. 1 and 2 show an embodiment of a rapid vacuum pumping system according to the present invention.
Referring to fig. 1, the rapid vacuum pumping system includes a vacuum pumping system and a water circulation system, the vacuum pumping system includes a pumped container 1, a high vacuum gas circuit 2, a low vacuum gas circuit 3 and a medium vacuum gas circuit 4, the high vacuum gas circuit 2 includes a high vacuum pump 21, a gas circuit pipe connected to the high vacuum pump 21 in a closed circuit, and a plurality of pneumatic valves arranged on the gas circuit pipe, the pneumatic valves include a high valve 22, a low valve 23 and a pre-valve 24, the high valve 22 and the low valve 23 are correspondingly arranged on the gas circuit pipe connected to an inlet and an outlet of the high vacuum pump 21, the pre-valve 24 is arranged between the high valve 22 and the low valve 23, a pipe-removing gas-filling valve 25 is arranged between the pre-valve 24 and the high valve 22, and the pumped container 1 is connected between the pre-valve 24 and the high valve 22;
the low vacuum gas circuit 3 comprises a first low vacuum pump 31 and a gas circuit pipe connected with a gas inlet of the first low vacuum pump 31, wherein the gas circuit pipe is connected between the high vacuum pump 21 and the low valve 23 and is provided with a differential pressure valve 32;
the medium vacuum gas circuit 4 comprises a second low vacuum pump 41, a medium vacuum pump 42, and a gas inlet pipeline and a gas outlet pipeline which are connected with gas inlets and gas outlets of the medium vacuum pump 42, wherein the gas inlet pipeline is connected between the low valve 23 and the pre-valve 24, and the gas outlet pipeline is connected with the medium vacuum pump 42 and the second low vacuum pump 41 in series and is provided with a gas charging valve 43.
In the technical scheme provided by the invention, the rapid vacuum-pumping system comprises a vacuum pumping system and a water circulation system, wherein the vacuum pumping system comprises a pumped container 1, a high-vacuum gas path 2, a low-vacuum gas path 3 and a medium-vacuum gas path 4, and a high-vacuum pump 21 of the high-vacuum gas path 2, a first low-vacuum pump 31 of the low-vacuum gas path 3, a second low-vacuum pump 41 of the medium-vacuum gas path 4 and a medium-vacuum pump 42 jointly form the rapid vacuum-pumping system, so that the rapid vacuum-pumping of the vacuum container can be realized, and the rapid vacuum-pumping of the vacuum containers with different vacuum requirements can be realized, thereby realizing the rapid and flexible vacuum-pumping of the low, medium and high vacuum requirements; and the control operation is stable, the vacuum degree requirement of the vacuum container is effectively met, the heat insulation effect of the vacuum container is ensured, and the material loss in the vacuum container is reduced.
In this embodiment, referring to fig. 1, a baffle 26 is disposed above the high-vacuum pump 21, and the baffle 26 is used for blocking oil in the high-vacuum pump 21 from entering into the pumped container 1.
In this embodiment, referring to fig. 1, an ionization gauge 27 and a first resistance gauge 28 are disposed between the tube-removing gas-filling valve 25 and the pre-valve 24, and a second resistance gauge 44 is disposed on an air inlet pipeline of the medium vacuum pump 42. The ionization gauge 27, the first resistance gauge 28 and the second resistance gauge 44 are used for measuring the vacuum degrees on the high vacuum gas circuit 2, the low vacuum gas circuit 3 and the medium vacuum gas circuit 4.
In this embodiment, referring to fig. 1, the high vacuum pump 21, the medium vacuum pump 42 and the low vacuum pump are respectively configured as an oil diffusion pump 103, a roots pump 105 and a vane pump. The oil diffusion pump 103, the roots pump 105 and the two rotary vane pumps are combined for use, so that vacuum degree extraction with different levels of low, medium and high vacuum degrees can be realized.
In this embodiment, all through bellows 113 airtight connection between being taken out container 1, high vacuum gas circuit 2, low vacuum gas circuit 3 and the well vacuum gas circuit 4, the bellows passes through snap ring and sealing washer sealing connection, and scribbles on the contact surface of bellows and sealing washer and has smeared vacuum silica gel to the gas leakage phenomenon appears in the pipeline of avoiding connecting the container.
In this embodiment, referring to fig. 2, the water circulation system includes a water tank 5, an air-cooled cooler 6 connected to the water tank 5, and a high vacuum pump 21 water pipe, a medium vacuum pump 42 water pipe, and two low vacuum pump water pipes which are connected to the water tank 5 through a galvanized pipe, respectively, each water pipe is provided with a single control valve 7, a port of the galvanized pipe is connected to the inside of the water tank 5 through a hose, and the hose is provided with a master control valve 8. Through the combination setting of total control valve 8 and four single control valves 7, can control the flexibility of high vacuum pump 21 water route pipe, well vacuum pump 42 water route pipe, two low vacuum pump water route pipes to open and close in a flexible way.
The invention also provides a control method applying the rapid vacuum pumping system, which comprises a low vacuum pumping control method, a medium vacuum pumping control method and a high vacuum pumping control method:
the control method for vacuumizing the vacuum chamber comprises the following steps: the pumped container 1 is connected through a special connecting valve, a vacuum pumping port is opened, a power supply and an air source are connected, cooling water is introduced, and all valves are in a closed state; opening a differential pressure valve 32, opening a low valve 23, opening a pre-valve 24, starting a first low vacuum pump 31 to pump air to the pumped container 1 until the required vacuum degree is reached, screwing a valve rod of a special connecting valve, closing a vacuum pumping port, opening a pipe-disconnecting inflation valve 25, and disconnecting the special connecting valve from a vacuum pipe of the pumped container 1;
the control method of the vacuum pumping comprises the following steps: the pumped container 1 is connected through a special connecting valve, a vacuum pumping port is opened, a power supply and an air source are connected, cooling water is introduced, and all valves are in a closed state; opening an inflation valve 43, opening a pre-valve 24, starting a second low vacuum pump 41 to pre-pump the pumped container 1, starting a middle vacuum pump 42 when the pressure is less than 3000Pa until the vacuum degree is less than or equal to 1Pa until the required vacuum degree is reached, screwing a valve rod of a special connection valve, closing a vacuum pumping port, opening a tube-off inflation valve 25, and disconnecting the special connection valve from a vacuum tube of the pumped container 1;
the control method for high vacuum pumping comprises the following steps: the pumped container 1 is connected through a special connecting valve, a vacuum pumping port is opened, a power supply and an air source are connected, cooling water is introduced, and all valves are in a closed state; opening a differential pressure valve 32, starting a first low vacuum pump 31 to pre-pump the high vacuum pump 21, and starting the high vacuum pump 21 to pre-heat after about 10 minutes; opening the inflation valve 43, opening the pre-valve 24, starting the second low vacuum pump 41 to pre-pump the pumped container 1, and starting the middle vacuum pump 42 until the vacuum degree is less than or equal to 1Pa when the pressure is less than 3000 Pa; closing the pre-valve 24, opening the low valve 23, closing the first low vacuum pump 31, closing the differential pressure valve 32, opening the high valve 22, using the high vacuum pump 21 to pump the pumped container 1 until the required vacuum degree is achieved, screwing the valve rod of the special connecting valve, closing the vacuum pumping port, opening the pipe-disconnecting inflation valve 25, and disconnecting the special connecting valve from the vacuum pipe of the pumped container 1.
It should be noted that, after the pumped container 1 is pumped to high vacuum, the first roughing pump 31 is turned on to maintain the vacuum degree in the vacuum gas path, so that the vacuum degree in the rapid pumping system can be maintained when the pumped container 1 needs to be replaced, the number of times of pre-pumping is reduced, and rapid vacuum pumping of the pumped container 1 is realized.
The invention further provides a device 100 applying the above-mentioned rapid vacuum pumping system, please refer to fig. 3 to fig. 6, the device 100 of the rapid vacuum pumping system comprises a base 101, a frame 102 disposed on the base 101, and a diffusion pump 103, a first rotary vane pump 104, a roots pump 105 and a second rotary vane pump 106 which are sequentially and transversely arranged on the base 101 and mounted on the frame 102, a vacuum pumping pipeline of the diffusion pump 103 is provided with a water-cooled trap baffle 26, a pneumatic high vacuum baffle 108, two pneumatic high vacuum butterfly valves 109 and an electromagnetic high vacuum inflation valve 110, a vacuum pumping pipeline of the first rotary vane pump 104 is provided with an electromagnetic high vacuum differential pressure valve 111, vacuum pumping pipelines of the roots pump 105 and the second rotary vane pump 106 are provided with an electromagnetic vacuum inflation valve 112, vacuum pumping pipelines of the diffusion pump 103, the first rotary vane pump 104, the roots pump 105 and the second rotary vane pump 106 are hermetically connected through a bellows 113, a plurality of rollers 114 are disposed on the base 101.
In this embodiment, the air-cooled water dispenser further includes a water tank 5 and a cooler which are disposed on the base 101, the water tank 5 is connected to the diffusion pump 103, the first vane pump 104, the roots pump 105 and the second vane pump 106 through a hose and a galvanized pipe, the water tank 5 is disposed at a terminal of the second vane pump 106, and the air-cooled cooler 6 is disposed above the second vane pump 106.
In this embodiment, referring to fig. 3 to 6, an electric cabinet 115 and a vacuum gauge 116 are installed on a portion of the frame 102 where the diffusion pump 103 is installed, and a panel of the electric cabinet 115 is provided with a plurality of operation buttons and an acoustic alarm. The vacuum gauge 116 is used for detecting the vacuum degrees on the high vacuum gas circuit 2, the low vacuum gas circuit 3 and the medium vacuum gas circuit 4 of the vacuum pumping system, the plurality of operation buttons comprise the start-stop buttons of the diffusion pump 103, the first rotary vane pump 104, the roots pump 105 and the second rotary vane pump 106, and the acoustic alarm is used for alarming the water shortage state of the water circulation system.
The device 100 of the rapid vacuum pumping system rapidly pumps vacuum containers with different vacuum requirements, wherein the absolute vacuum degree of low vacuum is 101325-1333 Pa; the absolute vacuum degree of the medium vacuum is 1333-1.33 x 10-1Pa; the absolute degree of vacuum of the high vacuum is 1.33X 10-1～10-6Pa, the control method of vacuumizing comprises a control method of vacuumizing low, a control method of vacuumizing medium and a control method of vacuumizing high:
the control method of the low vacuum pumping comprises the steps of connecting a pumped container 1 through a special connecting valve, opening a vacuum pumping port, switching on a power supply and an air source, and introducing cooling water, wherein all valves are in a closed state; opening a DYC-JQ40 type electromagnetic high vacuum differential pressure valve 111, opening a low valve 23GIQ-100 type pneumatic high vacuum butterfly valve 109, opening a pre-valve 24GIQ-100 type pneumatic high vacuum butterfly valve 109, starting a 2X-15 type rotary vane pump to pump air to the container 1 to be pumped, maintaining the vacuum degree measurement display values of a first resistance gauge 28 and a second resistance gauge 44 for more than half an hour when the vacuum degree measurement display values are less than 3000Pa, screwing a valve rod of a special connecting valve until the vacuum degree requirement of 101325-1333 Pa is met, closing a vacuum pumping port, opening a GQC-4A type electromagnetic high vacuum inflation valve 110, filling a little air, and disconnecting the special connecting valve from a vacuum tube of the container 1 to be pumped;
the control method of the vacuumizing comprises the following steps: through specialConnecting the pumped container 1 by using a connecting valve, opening a vacuum pumping port, switching on a power supply and an air source, and introducing cooling water, wherein all valves are in a closed state; opening a DDC-JQ80 electromagnetic vacuum inflation valve 112, opening a pre-valve 24GIQ-100 type pneumatic high-vacuum butterfly valve 109, starting a 2X-70 type rotary vane pump to pre-pump the pumped container 1, starting a ZJP-300 type Roots pump 105 when the vacuum degree measurement display values of a first resistance gauge 28 and a second resistance gauge 44 are less than 3000Pa, and maintaining the vacuum degree measurement display values of the first resistance gauge 28 and the second resistance gauge 44 for more than half an hour until reaching 1333-1.33 multiplied by 10-1The vacuum degree requirement Pa, the valve rod of the special connecting valve is screwed, the vacuum pumping port is closed, the GQC-4A type electromagnetic high vacuum inflation valve 110 is opened, a little air is inflated, and the special connecting valve is disengaged from the vacuum tube of the pumped container 1;
the control method of high vacuum pumping is characterized in that a pumped container 1 is connected through a special connecting valve, a vacuum pumping port is opened, a power supply and an air source are switched on, cooling water is introduced, and all valves are in a closed state; opening a DYC-JQ40 type electromagnetic high-vacuum differential pressure valve 111, starting a 2X-15 type rotary vane pump to pre-pump the KT-400 type diffusion pump 103, and starting the KT-400 type diffusion pump 103 to preheat after about 10 minutes; opening a DDC-JQ80 electromagnetic vacuum inflation valve 112, opening a second GIQ-100 type pneumatic high-vacuum butterfly valve 109, starting a 2X-70 type vane pump to pre-pump the pumped container 1, starting a model ZJP-300 type Roots pump 105 when the vacuum degree measurement display values of a first resistance gauge 28 and a second resistance gauge 44 are less than 3000Pa, and stopping the model ZJP-300 type Roots pump 105 when the vacuum degree measurement display values of an ionization gauge 27 and the second resistance gauge 44 are less than or equal to 1 Pa; closing the second GIQ-100 type pneumatic high vacuum butterfly valve 109, opening the first GIQ-100 type pneumatic high vacuum butterfly valve 109, closing the 2X-15 type rotary vane pump, closing the DYC-JQ40 type electromagnetic high vacuum differential pressure valve 111, opening the GDQ-S400 type pneumatic high vacuum flapper valve 108, using the KT-400 type diffusion pump 103 to pump the pumped container 1, and maintaining the state for more than half an hour until reaching 1.33X 10-1～10-6Pa vacuum degree requirement, disconnecting the special connecting valve from the vacuum tube of the pumped container 1, opening a GQC-4A type electromagnetic high vacuum inflation valve 110, inflating a little air, and disconnecting the special connecting valve from the vacuum tube of the pumped container 1.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A quick vacuum pumping system is characterized in that: including vacuum pumping system and water circulating system, vacuum pumping system is including being taken out container, high vacuum gas circuit, low vacuum gas circuit and well vacuum gas circuit:
the high vacuum gas circuit comprises a high vacuum pump, a gas circuit pipe connected with the high vacuum pump in a closed circuit manner, and a plurality of pneumatic valves arranged on the gas circuit pipe, wherein the plurality of pneumatic valves comprise a high valve, a low valve and a pre-valve, the high valve and the low valve are correspondingly and respectively arranged on the gas circuit pipe connected with a gas inlet and a gas outlet of the high vacuum pump, the pre-valve is arranged between the high valve and the low valve, a pipe-removing inflation valve is arranged between the pre-valve and the high valve, and the pumped container is connected between the pre-valve and the high valve;
the low vacuum gas circuit comprises a first low vacuum pump and a gas circuit pipe connected with a gas inlet of the first low vacuum pump, and the gas circuit pipe is connected between the high vacuum pump and the low valve and is provided with a differential pressure valve;
the medium vacuum gas circuit comprises a second low vacuum pump, a medium vacuum pump, a gas inlet pipeline and a gas outlet pipeline, wherein the gas inlet pipeline and the gas outlet pipeline are connected with a gas inlet and a gas outlet of the medium vacuum pump, the gas inlet pipeline is connected between the low valve and the pre-valve, and the gas outlet pipeline is connected with the medium vacuum pump and the second low vacuum pump in series and is provided with an inflation valve.
2. A rapid evacuation system according to claim 1, wherein: and a baffle is arranged above the high-vacuum pump.
3. A rapid evacuation system according to claim 1, wherein: an ionization gauge and a first resistance gauge are arranged between the pipe-removing inflation valve and the pre-valve, and a second resistance gauge is arranged on an air inlet pipeline of the medium vacuum pump.
4. A rapid evacuation system according to claim 1, wherein: the high vacuum pump, the medium vacuum pump and the low vacuum pump are correspondingly arranged as an oil diffusion pump, a roots pump and a rotary vane pump.
5. A rapid evacuation system according to claim 1, wherein: the pumped container, the high vacuum gas circuit, the low vacuum gas circuit and the medium vacuum gas circuit are all connected through a bellows in a gas sealing mode.
6. A rapid evacuation system according to claim 1, wherein: the water circulation system comprises a water tank, an air cooling cooler connected with the water tank, a high-vacuum pump water path pipe, a medium-vacuum pump water path pipe and two low-vacuum pump water path pipes, wherein the high-vacuum pump water path pipe, the medium-vacuum pump water path pipe and the two low-vacuum pump water path pipes are respectively connected with the water tank through galvanized pipes, a single control valve is arranged on each water path pipe, the port of each galvanized pipe is connected into the water tank through a hose, and a master control valve is arranged on each.
7. A control method of a rapid vacuum pumping system according to any one of claims 1 to 6, characterized in that: the method comprises a control method for vacuumizing low, a control method for vacuumizing medium and a control method for vacuumizing high:
the control method for vacuumizing the vacuum chamber comprises the following steps: the pumped container is connected through a special connecting valve, a vacuum pumping port is opened, a power supply and an air source are connected, cooling water is introduced, and all valves are in a closed state; opening a differential pressure valve, opening a low valve, opening a pre-valve, starting a first low vacuum pump to pump air to the pumped container until the required vacuum degree is met, screwing a valve rod of a special connecting valve, closing a vacuum pumping port, opening a pipe-off inflation valve, and disconnecting the special connecting valve from a vacuum pipe of the pumped container;
the control method of the vacuum pumping comprises the following steps: the pumped container is connected through a special connecting valve, a vacuum pumping port is opened, a power supply and an air source are connected, cooling water is introduced, and all valves are in a closed state; opening an inflation valve, opening a pre-valve, starting a second low vacuum pump to pre-pump the pumped container, starting a middle vacuum pump when the pressure is less than 3000Pa until the vacuum degree is less than or equal to 1Pa until the required vacuum degree requirement is met, screwing a valve rod of a special connection valve, closing a vacuum pumping port, opening a tube-off inflation valve, and disconnecting the special connection valve from a vacuum tube of the pumped container;
the control method for high vacuum pumping comprises the following steps: the pumped container is connected through a special connecting valve, a vacuum pumping port is opened, a power supply and an air source are connected, cooling water is introduced, and all valves are in a closed state; opening a differential pressure valve, starting a first low vacuum pump to pre-pump the high vacuum pump, and starting the high vacuum pump to pre-heat after about 10 minutes; opening an inflation valve, opening a pre-valve, starting a second low vacuum pump to pre-pump the pumped container, and starting a middle vacuum pump when the pressure is less than 3000Pa until the vacuum degree is less than or equal to 1 Pa; closing the pre-valve, opening the low valve, closing the first low vacuum pump, closing the differential pressure valve, opening the high valve, using the high vacuum pump to pump air to the pumped container until reaching the required vacuum degree, screwing the valve rod of the special connection valve, closing the vacuum pumping port, opening the pipe-removing inflation valve, and removing the special connection valve from the vacuum pipe of the pumped container.
8. An apparatus using the rapid vacuum pumping system according to any one of claims 1 to 6, wherein: the vacuum pump comprises a base, a frame arranged on the base, and a diffusion pump, a first rotary vane pump, a roots pump and a second rotary vane pump which are sequentially and transversely arranged on the base and installed on the frame, wherein a water-cooling trap baffle, a pneumatic high-vacuum baffle valve, two pneumatic high-vacuum butterfly valves and an electromagnetic high-vacuum inflation valve are arranged on a vacuumizing pipeline of the diffusion pump, an electromagnetic high-vacuum differential pressure valve is arranged on the vacuumizing pipeline of the first rotary vane pump, the electromagnetic vacuum inflation valve is arranged on the vacuumizing pipelines of the roots pump and the second rotary vane pump, the vacuumizing pipelines of the diffusion pump, the first rotary vane pump, the roots pump and the second rotary vane pump are connected through a corrugated pipe in an airtight manner, and a plurality of rollers are arranged on the base.
9. The apparatus of claim 8, wherein: the water tank is connected to the diffusion pump, the first rotary vane pump, the roots pump and the second rotary vane pump through a hose and a galvanized pipe, the water tank is arranged at the tail end of the second rotary vane pump, and the air-cooled cooler is arranged above the second rotary vane pump.
10. The apparatus of claim 8, wherein: the part of the frame on which the diffusion pump is arranged is provided with an electric cabinet and a vacuum gauge, and a panel of the electric cabinet is provided with a plurality of operating buttons and an acoustic alarm.
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