TWM634127U - Material distributing rotary table structure of die bonder - Google Patents

Abstract

This work is a kind of material distributing turntable structure of crystal bonding machine. The material distributing turntable can absorb the crystal grains on the blue film wafer one by one and then rotate and transfer them to the downstream end for crystal bonding operation. Its structure includes: a fixed gas distribution base, A transmission shaft, a rotating distributing tray, and a plurality of suction nozzles capable of sucking and releasing crystal grains, wherein: the rotating distributing tray has an air distributing turntable that can intermittently communicate with the air distributing base, and a plurality of Support arms arranged radially at intervals around the gas distribution turntable. The outer end of each support arm can be provided with a set of suction nozzles, and at least two sets of suction nozzles are arranged between the suction nozzles and the corresponding support arms. The limiting shafts and perforations arranged in parallel and capable of relative displacement allow each suction nozzle to move up and down accurately and stably relative to the support arm, and achieve the purpose of light weight through the hollow bracket.

Description

The structure of the material distribution turntable of the solid crystal machine

This work is a kind of distributing technology in the grain manufacturing process. The technical content involves the weight reduction of the rotating distributing tray and the movement structure that the pick-up nozzle moves up and down accurately and stably through the two limit axes.

As we all know, the semiconductor/diode process is roughly completed by cutting the wafer (Wafer) into fine grains. In order to facilitate the subsequent inspection, packaging or die-bonding operations of the grains, blue film wafers must be used in the process. The carrier is used to carry multiple dies, and the follow-up processes such as material distribution, transportation, testing, packaging, and die bonding are carried out in the form of blue film wafers.

The author has participated in the R&D and manufacturing of automatic systems for material distribution, testing, packaging or die bonding of M467166, M474703, M497274 and other related chips. Among them, M467166 is about a material distribution system, as shown in the first picture, its structure is mainly in The edge 100 of a rotating disk is provided with a plurality of ring-shaped equidistantly arranged suction nozzles 200, which can move up and down relative to the rotating disk 100, and rotate with the rotating disk 100 to continuously absorb blue films one by one. After the die on the wafer 300 is removed, it is rotated and displaced to the downstream end for subsequent operations.

As shown in the second figure, a plurality of shaft holes 101 are axially arranged on the edge of the rotating disk 100, and the top of each suction nozzle 200 has a guide shaft 201 movably passing through each shaft hole 101, so that each A suction nozzle 200 moves up and down relative to the shaft hole 101 of the rotating disk 100 through the corresponding guide shaft 201 . In the process of sucking the crystal grains, the feeding nozzle first moves downward to absorb the crystal grains from the blue film wafer, then moves upward, and then rotates and moves to the downstream end, then the feeding nozzle moves downward and releases the negative pressure, so that The grains are separated from the feeding nozzle to complete the distributing operation.

After the above design is actually implemented, it can indeed improve the material distribution efficiency of the crystal grains, but the author found that the function of the rotating disk is to fix and drive the rotation of the multiple feeding nozzles, so if the rotating disk does not affect the multiple feeding nozzles Under the premise of operation, moderate weight reduction will help reduce material and manufacturing costs. In addition, when the pick-up nozzle moves up and down, the pick-up may be inaccurate due to the combined tolerance between the single-axis guide shaft and the shaft hole; in view of this, the creators focus on reducing weight and improving precision. The purpose is to further research and develop in order to make the material distribution system more perfect.

The purpose of this creation is to provide a material distribution turntable structure for a die-bonding machine, aiming at lightweight design of the rotating material distribution disk, and through two sets of limit shafts and perforations, each suction nozzle can be accurately and stably relative to the The rotating distribution tray moves up and down.

In order to achieve the above purpose, this work is a material distribution turntable structure of a crystal bonder, including: a gas distribution base fixed above a base and connected to a vacuum pump, a transmission shaft whose axis is perpendicular to the ground, and a stacked on the base. Above the top surface of the air distribution base and accepting the transmission of the transmission shaft, it is a rotating material distribution plate that rotates relative to the air distribution base. The negative pressure provided by the air base can absorb the crystal grains on the blue film wafer at the upstream end of the die bonder one by one, and then rotate and transfer to the downstream end for unloading. Among them: The rotating distribution tray has a gas distribution turntable that is superimposed on the top surface of the gas distribution base and communicates with the gas distribution base, and a hollow bracket fixed on the top of the gas distribution turntable, wherein the gas distribution turntable has a plurality of The through hole communicates intermittently with the air distribution base. The hollow bracket has a central turntable linked with the transmission shaft, and a plurality of support arms that extend outward from the edge of the central turntable and are radially arranged at intervals. Each support arm The outer end of the arm is provided with a group of said material-taking nozzles, and these material-taking nozzles communicate with one of the through holes on the air distribution turntable respectively, and at least Two sets of limit shafts and perforations are arranged in parallel, and the two limit shafts can be relatively displaced in the two perforations, so that each suction nozzle can move up and down accurately and stably relative to the support arm.

With the above structure, the rotating material distribution tray achieves the purpose of light weight through the hollow bracket, and there are at least two sets of limit shafts and Perforation, through the two sets of limit shafts and the perforation, each suction nozzle can move up and down stably relative to the support arm, so as to achieve the effect of precise material taking.

The implementation of each element is further described below:

During implementation, the outer ends of the support arms are respectively fixed with an extension arm for assembly of a suction nozzle for taking materials, and the two perforations are arranged at the outer ends of the extension arms; There is a set of joint arms on the bottom surface, one end of the two limit shafts is fixedly arranged on the joint arm, and the stopper end of the other end is respectively passed through the two through holes of the extension arm from bottom to top and protrudes from the extension arm of the top.

During implementation, a spring is sheathed on the top surface of the extension arm on the periphery of the two limiting shafts, and each spring is elastically held between the stop end of the corresponding limiting shaft and the top surface of the extension arm.

During implementation, the suction nozzles are respectively provided with a miniature spring that can provide buffer when sucking up the crystal grains.

During implementation, the gas distribution base is provided with a plurality of annularly arranged interfaces that communicate with the vacuum pump respectively, and the top of the gas distribution base is provided with a plurality of long arc-shaped and circular ports arranged at intervals in a ring, and each long arc Shaped and circular ports communicate with at least one port; the plurality of through holes of the gas distribution disc are intermittently aligned and dislocated with the plurality of long arc and circular ports when rotating, and each through hole is connected with a connecting pipe and One of the feeding suction nozzles is connected.

During implementation, the middle section of each connecting pipe is connected with an air filter which can filter dust impurities.

Compared with the previous technology, this creation achieves the purpose of light weight through the hollow bracket, and there are at least two sets of limit shafts and perforations arranged in parallel and capable of relative displacement between each support arm and the corresponding suction nozzle. Through the two sets of limit shafts and perforations, each suction nozzle can move up and down stably relative to the support arm to achieve the effect of accurate material picking, eliminating the possibility of single set of guide shafts and shaft holes in the known technology due to combination tolerances. Lead to the problem of inaccurate feeding.

Based on the technical means of this creation, the implementation methods suitable for this creation are listed below, and the description is as follows in conjunction with the drawings:

As shown in Figures 3 and 4, this work is a material distribution turntable structure for a die bonder. The material distribution turntable can absorb the crystal grains on the blue film wafer 1 at the upstream end of the die bonder one by one and then transfer them to the The downstream end carries out the crystal bonding operation. Its structure includes a fixed gas distribution base 10, a transmission shaft 20 whose axis is perpendicular to the ground, a superimposed on the top surface of the gas distribution base 10 and receives the transmission of the transmission shaft 20 and is relatively to the gas distribution base 10. Rotating rotary material distribution tray 2 and a plurality of suction nozzles 30 arranged on the edge of the rotary material distribution tray 2 .

The gas distribution base 10 is fixed above a pedestal (not shown in the figure), and a plurality of annularly arranged ports 11 are arranged around the gas distribution base 10 and respectively communicated with a vacuum pump (not shown in the figure), and the top of the gas distribution base 10 is A plurality of arc-shaped and circular openings 12 arranged at intervals in a ring are provided, and each of the arc-shaped and circular openings 12 communicates with at least one interface 11 .

The rotating distribution disc 2 has an air distribution turntable 40 linked with the transmission shaft 20 , and a hollow bracket 50 fixed above the air distribution turntable 40 . The gas distribution turntable 40 is rotatably stacked on the top surface of the gas distribution base 10 , and has a plurality of through holes 41 intermittently communicated with the long arc and circular openings 12 of the gas distribution base 10 .

The hollow bracket 50 has a central turntable 51 linked with the transmission shaft 20, and a plurality of support arms 52 extending outward from the edge of the central turntable 51 and arranged radially at intervals, and each support arm 52 is provided with a Group the above-mentioned feeding suction nozzles 30, and these feeding suction nozzles 30 are respectively connected to a connecting pipe 31 (refer to the sixth figure) to communicate with one of the through holes 41 on the gas distribution turntable 40, the middle section of the connecting pipe 31 Connect an air filter 34 to filter dust impurities and avoid inhalation of foreign matter.

As shown in the fifth to seventh figures, at least two sets of limit shafts 60 and perforations 61 arranged in parallel are provided between each support arm 52 and the corresponding suction nozzle 30, and the two limit shafts 60 can be positioned at two positions respectively. The relative displacement in the perforation 61 allows each suction nozzle 30 to move up and down accurately and stably relative to the support arm 52 .

With the above structure, when the gas distribution dial 40 is rotated by the drive shaft 20, its multiple through holes 41 can be intermittently aligned and dislocated with the multiple long arc and circular ports 12 of the gas distribution base 10, thereby providing The negative pressure allows the pick-up suction nozzles 30 to suck up the blue film wafers 1 at the upstream end of the die bonder one by one through the corresponding connecting pipe 31 and through hole 41, and then rotate and transfer to the downstream end for unloading.

Furthermore, each pick-up nozzle 30 passes through the corresponding two sets of limit shafts 60 and perforations 61, so that the pick-up nozzle 30 can move up and down stably relative to the support arm 52 when picking up and releasing the die, so as to achieve precise pick-up. It eliminates the problem of inaccurate material retrieving due to the combination tolerance of a single set of guide shafts and shaft holes in the known technology. In practice, the pick-up nozzles 30 are respectively provided with a miniature spring 33, which can provide buffer when picking up the die, and avoid damage caused by pressing against the die when the pick-up nozzle 30 moves downward.

In addition, the outer ends of the support arms 52 are respectively fixed with an extension arm 53 for assembly of a group of the suction nozzles 30, thereby enlarging the turning radius of the rotating distribution tray. The two through holes 61 are disposed on the outer end of the extension arm 53 , and the inner end of the extension arm 53 is superimposed on the bottom surface of the support arm 52 .

Each feeding suction nozzle 30 has a set of joint arms 32 facing the bottom surface of the corresponding extension arm 53, one end of the two limit shafts 60 is fixedly arranged on the joint arm 32, and the other end stops 61 from the bottom respectively. The upper portion passes through the two through holes 61 of the extension arm 53 and protrudes from the top surface of the extension arm 53 . The outer periphery of the two limit shafts 60 is respectively sleeved with a spring 62 relative to the top surface of the extension arm 53 , and each spring 62 is elastically supported between the stop end 61 of the corresponding limit shaft 60 and the top surface of the extension arm 53 Between, can provide the function of cushioning when each suction nozzle 30 moves up and down relative to the support arm 52 .

The descriptions and diagrams of the above embodiments are only examples to illustrate the preferred embodiments of this creation, and are not intended to limit the scope of this creation; all those that are similar or identical to the purpose, structure, device, and features of this creation shall belong to The patent scope of this creation.

1: blue film disc 2: Rotating distribution tray 10: Gas distribution base 11: Interface 12: Long arc and round ports 20: drive shaft 30: Feed suction nozzle 31: connecting pipe 32: Assembly arm 33: micro spring 34: Air filter 40: Gas distribution turntable 41: Through hole 50: hollow bracket 51: Central turntable 52: Support arm 53: Extension arm 60: limit shaft 61: perforation 62: Spring

The first picture: the three-dimensional appearance diagram of the known material distribution system. The second figure: a structural sectional view of a known distribution system. The third picture: the three-dimensional appearance picture of this creation. Figure 4: The three-dimensional exploded view of this creation. Figure 5: The three-dimensional exploded view of the support arm, extension arm and suction nozzle of this creation. Figure 6: Schematic diagram of the structure of this creation. Figure 7: A schematic diagram of the movement of the suction nozzle of this creation.

1: blue film disc

2: Rotating distribution tray

20: drive shaft

30: Feed suction nozzle

Claims (6)

A material distributing turntable structure of a solid crystal machine, comprising: a gas distribution base fixed above a base and connected to a vacuum pump, a transmission shaft whose axis is perpendicular to the ground, a superimposed on the top surface of the gas distribution base and receiving The transmission shaft drives the rotary material distribution plate that rotates relative to the air distribution base. The edge of the rotary material distribution plate has a plurality of groups of suction nozzles. The suction nozzles can be powered by the negative pressure provided by the air distribution base. The crystal grains on the blue film wafer at the upstream end of the die bonder are sucked one by one, then rotated and transferred to the downstream end and then unloaded, wherein: The rotating distribution tray has a gas distribution turntable that is superimposed on the top surface of the gas distribution base and communicates with the gas distribution base, and a hollow bracket fixed on the top of the gas distribution turntable, wherein the gas distribution turntable has a plurality of The through hole communicates intermittently with the air distribution base. The hollow bracket has a central turntable linked with the transmission shaft, and a plurality of support arms that extend outward from the edge of the central turntable and are radially arranged at intervals. Each support arm The outer end of the arm is provided with a group of said material-taking nozzles, and these material-taking nozzles communicate with one of the through holes on the air distribution turntable respectively, and at least Two sets of limit shafts and perforations are arranged in parallel, and the two limit shafts can be relatively displaced in the two perforations, so that each suction nozzle can move up and down accurately and stably relative to the support arm. The structure of the distributing turntable of the crystal bonder as described in claim 1, wherein, the outer ends of the support arms are respectively fixed with an extension arm for a pick-up nozzle assembly, and the two perforations are arranged on the outer side of the extension arm end; the suction nozzle has a set of joint arms facing the bottom surface of the corresponding extension arm, one end of the two limit shafts is fixed on the joint arm, and the other end of the stopper end is respectively passed through the joint arm from bottom to top. The two through holes of the extension arm protrude from the top surface of the extension arm. According to claim 2, the structure of the distributing turntable of the crystal bonding machine, wherein, the outer periphery of the two limit shafts is respectively sleeved with a spring relative to the top surface of the extension arm, and each spring is elastically held against the stop of the corresponding limit shaft. between the stop end and the top surface of the extension arm. According to claim 1, the structure of the distributing turntable of the die bonder, wherein each of the pick-up nozzles is provided with a miniature spring that can provide cushioning when picking up the die. The material distribution turntable structure of the crystal bonder as described in any one of claims 1 to 4, wherein a plurality of circularly arranged ports are arranged around the gas distribution base and communicate with the vacuum pump respectively, and a plurality of interfaces are arranged on the top of the gas distribution base. Long arc and circular ports arranged at intervals in a ring, and each long arc and circular port communicates with at least one port; the plurality of through holes of the gas distribution disc connects with the plurality of long arc and circular ports when rotating The ports are aligned and dislocated intermittently, and each through hole is connected with a communication pipe to communicate with one of the suction nozzles. According to claim 5, the material distributing turntable structure of the crystal bonder, wherein, the middle section of each connecting pipe is connected with an air filter capable of filtering dust and impurities.

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