TWM633357U - Heat dissipation rubber pad attaching device and equipment - Google Patents

Heat dissipation rubber pad attaching device and equipment Download PDF

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Publication number
TWM633357U
TWM633357U TW111205138U TW111205138U TWM633357U TW M633357 U TWM633357 U TW M633357U TW 111205138 U TW111205138 U TW 111205138U TW 111205138 U TW111205138 U TW 111205138U TW M633357 U TWM633357 U TW M633357U
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TW
Taiwan
Prior art keywords
heat dissipation
rubber pad
dissipation rubber
head
bonding
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TW111205138U
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Chinese (zh)
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蔡俊宏
王安田
程冠霖
李世民
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萬潤科技股份有限公司
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Priority to TW111205138U priority Critical patent/TWM633357U/en
Publication of TWM633357U publication Critical patent/TWM633357U/en

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Abstract

本創作提供一種散熱膠墊貼合裝置及設備,該散熱膠墊貼合設備包括:一輸送流路,供搬送一被貼物於;一料帶,設有間隔排列的散熱膠墊;一貼合裝置,設有一料帶輪設置該料帶,該料帶繞經一貼抵頭並以該貼抵頭為界形成一輸入側及一輸出側;該貼抵頭以一樞軸為旋轉中心,可偏擺至一工作部位;藉此使該散熱膠墊迅速地貼合於該被貼物上,可精簡製程、提升品質,具有較佳經濟效益。 This creation provides a heat dissipation rubber pad lamination device and equipment, the heat dissipation rubber pad lamination equipment includes: a conveying flow path for conveying an object to be pasted; a material belt with heat dissipation rubber pads arranged at intervals; The closing device is provided with a material pulley to set the material belt, and the material belt is wound around a sticking head and bounded by the sticking head to form an input side and an output side; the sticking head takes a pivot as the rotation center , can be deflected to a working position; thereby, the heat dissipation rubber pad can be quickly attached to the object to be attached, which can simplify the manufacturing process, improve the quality, and have better economic benefits.

Description

散熱膠墊貼合裝置及設備 Heat dissipation rubber pad bonding device and equipment

本創作是有關於一種貼合裝置及設備,特別是指一種將散熱膠墊以自動化方式貼覆在被貼物上的散熱膠墊貼合裝置及設備。 This creation relates to a laminating device and equipment, in particular to a heat-dissipating rubber pad laminating device and equipment for automatically pasting a heat-dissipating rubber pad on an object to be pasted.

按,一般的晶片封裝製程中,常會先在一基板上塗覆黏膠,再將一晶粒黏附在該基板上,而該晶粒的上方必須再塗覆一層散膠液,然後再將一散熱片黏附在該散熱膠液上,使該散熱片罩覆在該晶粒及該基板上方。近來該散熱膠液已逐漸被一種具有散熱功能的散熱膠墊取代,該散熱膠墊通常具有上、下兩表面呈雙面膠的狀態,每片該散熱膠墊的上、下表面各黏覆一層包膜。使用時,操作者先將其中一側面的該包膜撕下,再將已無該包膜的該散熱膠墊表面貼在該晶粒上表面,然後將另一側面的該包膜撕下,再將該散熱片貼在該散熱膠墊上方。 By the way, in the general chip packaging process, glue is often coated on a substrate first, and then a chip is adhered to the substrate, and a layer of glue must be coated on the top of the chip, and then a heat dissipation A sheet is adhered to the heat dissipation glue, so that the heat dissipation sheet covers the chip and the substrate. Recently, the heat dissipation glue has been gradually replaced by a heat dissipation rubber pad with heat dissipation function. The heat dissipation rubber pad usually has a double-sided adhesive on the upper and lower surfaces. The upper and lower surfaces of each piece of the heat dissipation rubber pad are respectively glued A layer of envelope. When in use, the operator first tears off the coating on one side, then sticks the surface of the heat dissipation rubber pad without the coating on the upper surface of the die, and then tears off the coating on the other side. Then paste the heat sink on the top of the heat dissipation rubber pad.

該先前技術以該散熱膠墊來取代該散熱膠液,雖然可以減少該散熱膠液的塗覆製程,但以人為方式進行每片該散熱膠墊的黏附,亦無法提昇製程的效益,且每片該散熱膠墊貼附的品質不一,在大量生產上不具經濟效益。有鑑於此,一種自動化的先將該 散熱膠墊黏附在該基板上的晶粒上表面,再於該基板上覆蓋該散熱片的方法及設備曾被採用,例如申請人所申請的公告號碼第I716906號「散熱膠墊貼合方法及設備」專利案,但該專利案雖能解決植放散熱片製程中的散熱膠墊自動貼合問題,惟其採用一貼抵頭被驅動以其桿狀的輪體滾動間接經由下表面黏附一散熱膠墊的一第二包膜接觸該散熱膠墊的方式,自該散熱膠墊相對一被貼物的另一側,由一固定導桿往一位移導桿方向移輥位移,使該散熱膠墊被黏附貼合於該被貼物上,在該散熱膠墊黏附貼合完成時,該貼抵頭被驅動由該位移導桿往該固定導桿方向回位,在該貼抵頭輥去又輥回之間等於走了兩次行程,工時相當浪費,在半導體製程技術講求工時效益的要求下,仍有可改進的空間。 In the prior art, the heat dissipation rubber pad is used to replace the heat dissipation glue, although the coating process of the heat dissipation glue can be reduced, but the artificial adhesion of each piece of the heat dissipation glue pad cannot improve the efficiency of the process, and every time The quality of the cooling rubber pad attached to each piece varies, and it is not economical in mass production. In view of this, an automated The heat dissipation rubber pad is adhered to the upper surface of the die on the substrate, and then the method and equipment for covering the heat sink on the substrate have been used, for example, the announcement number I716906 applied by the applicant "The method of attaching the heat dissipation rubber pad and "equipment" patent case, but although this patent case can solve the problem of automatic bonding of heat dissipation rubber pads in the process of planting heat sinks, it uses a sticking head driven by its rod-shaped wheel body to roll and indirectly adheres a heat dissipation pad through the lower surface A second envelope of the rubber pad contacts the heat dissipation rubber pad. From the opposite side of the heat dissipation rubber pad to an object, the roller is displaced from a fixed guide rod to a displacement guide rod, so that the heat dissipation rubber pad The pad is adhered to the object to be pasted. When the heat dissipation pad is adhered and pasted, the sticking head is driven from the displacement guide rod to return to the direction of the fixed guide rod, and the sticking head rolls Rolling back and forth is equivalent to two trips, which is a waste of man-hours. Under the requirement of man-hour efficiency in semiconductor process technology, there is still room for improvement.

爰是,本創作之目的,即在提供一種具有經濟效益的散熱膠墊貼合設備。 Yes, the purpose of this creation is to provide an economical heat dissipation pad bonding equipment.

本創作的另一目的,在於提供一種具有經濟效益的散熱膠墊貼合裝置。 Another purpose of the present invention is to provide an economical thermal pad bonding device.

本創作的又一目的,在於提供一種設有如所述散熱膠墊貼合裝置的散熱膠墊貼合設備。 Another purpose of the present invention is to provide a heat dissipation rubber pad laminating device provided with the heat dissipation rubber pad laminating device.

依據本創作目的之散熱膠墊貼合設備,包括:一輸送流路,供搬送一被貼物於;一料帶,設有間隔排列的散熱膠墊;一貼 合裝置,設有一料帶輪設置該料帶,該料帶繞經一貼抵頭並以該貼抵頭為界形成一輸入側及一輸出側;該貼抵頭以一樞軸為旋轉中心,可偏擺至一工作部位。 According to the purpose of this creation, the heat dissipation rubber pad bonding equipment includes: a conveying flow path for conveying an object to be pasted; a material belt with heat dissipation rubber pads arranged at intervals; The closing device is provided with a material pulley to set the material belt, and the material belt is wound around a sticking head and bounded by the sticking head to form an input side and an output side; the sticking head takes a pivot as the rotation center , can be deflected to a working position.

依據本創作目的之散熱膠墊貼合裝置,設有:一進位機構及設於該進位機構上受其驅動位移並執行一散熱膠墊貼合的一貼合機構,該貼合機構設有一設置一料帶的料帶輪,該料帶上設有該散熱膠墊,該料帶繞經一貼抵頭並以該貼抵頭為界形成一輸入側及一輸出側;該貼抵頭以一樞軸為旋轉中心偏擺至一工作部位。 According to the purpose of the invention, the heat dissipation rubber pad laminating device is provided with: a carrying mechanism and a laminating mechanism which is set on the carrying mechanism and is driven by it to move and perform a heat dissipation rubber pad lamination. The laminating mechanism is provided with a setting A material pulley of a material belt, the material belt is provided with the heat dissipation rubber pad, and the material belt is wound around a sticking head and bounded by the sticking head to form an input side and an output side; the sticking head is bounded by A pivot is pivoted to a working position by the center of rotation.

依據本創作又一目的之散熱膠墊貼合設備,設有如所述散熱膠墊貼合裝置。 According to another object of the invention, the heat dissipation rubber pad bonding equipment is provided with the heat dissipation rubber pad bonding device as described above.

本創作實施例之散熱膠墊貼合裝置及設備,由於使該貼合裝置以該料帶輪設置該料帶,該料帶繞經該貼抵頭並以該貼抵頭為界形成該輸入側及該輸出側;使該貼抵頭以該樞軸為旋轉中心,偏擺至該工作部位,並使該散熱膠墊與該料帶分離而貼覆於該被貼物上,如此使該料帶在輸送過程中,該貼抵頭一次性將該散熱膠墊與該料帶分離而貼覆於該被貼物,無需該貼抵頭如先前技術般往復兩次位移輥動浪費工時,可增加貼合效率及經濟效益。 The heat dissipation rubber pad bonding device and equipment of the present creation embodiment, since the bonding device is provided with the material belt with the material pulley, the material belt passes through the sticking head and forms the input with the sticking head as a boundary. side and the output side; make the sticking head take the pivot as the rotation center, swing to the working position, and separate the heat dissipation rubber pad from the material tape and stick it on the object, so that the During the conveying process of the material tape, the sticking head separates the heat dissipation pad from the material tape at one time and sticks it on the object to be pasted. There is no need for the sticking head to reciprocate twice as in the prior art and waste man-hours. , can increase the bonding efficiency and economic benefits.

A:被貼物 A: Stickers

A1:晶圓 A1: Wafer

A2:膜層 A2: film layer

A3:邊框 A3: border

A4:散熱膠墊 A4: Thermal pad

A41:料帶 A41: Tape

A411:針孔 A411: Pinhole

A412:輸入側 A412: Input side

A413:輸出側 A413: Output side

A42:包膜 A42: Envelope

A43:套筒 A43: Sleeve

A431:軸孔 A431: shaft hole

A44:料捲 A44: Roll

B:機台 B: machine

C:輸送流路 C: delivery flow path

C1:第一軌架 C1: The first rail frame

C11:治具 C11: Jigs

C111:吸附部 C111: adsorption part

C112:側架 C112: side frame

C113:皮帶 C113: belt

C114:軌道 C114: track

C12:加熱元件 C12: heating element

C13:底座 C13: base

C131:間隔件 C131: spacer

C14:連動件 C14: linkage

C141:樞桿 C141: Pivot

C15:固定件 C15:Fixer

C151:樞套 C151: Pivot sleeve

C16:固定座 C16: Fixing seat

C161:支撐件 C161: Supports

C17:驅動件 C17: Driver

C171:轉軸 C171: Shaft

D:移送機構 D: transfer mechanism

D1:龍門軌架 D1: Gantry rail frame

D11:立柱 D11: column

D12:橫樑 D12: Beam

D13:Y軸向驅動件 D13: Y-axis driving part

D2:懸臂 D2: cantilever

D21:X軸向驅動件 D21: X-axis driving part

E:貼合裝置 E: Fitting device

E1:進位機構 E1: carry mechanism

E11:載座 E11: carrier

E111:滑軌 E111: slide rail

E112:驅動件 E112: Driver

E113:螺桿 E113: screw

E114:操作區間 E114: Operating range

E115:扶架 E115: support frame

E1151:樞轉座 E1151: pivot seat

E1152:樞轉軸 E1152: Pivot shaft

E116:上檢視單元 E116: Upper viewing unit

E1161:取像器 E1161: Viewfinder

E1162:光源 E1162: light source

E12:軌座 E12: rail seat

E121:滑軌 E121: slide rail

E122:驅動件 E122: Driver

E123:滑座 E123: sliding seat

E124:固定座 E124: Fixing seat

E13:捲收機構 E13: retracting mechanism

E131:承載件 E131: Carrier

E132:第一捲收輪 E132: The first reel

E133:第二捲收輪 E133: The second winding wheel

E134:驅動件 E134: Driver

E1341:缸桿 E1341: cylinder rod

E135:懸吊件 E135: Suspension

E14:偏轉機構 E14: deflection mechanism

E141:驅動件 E141: Driver

E142:連桿機構 E142: Linkage

E1421:固定連桿 E1421: fixed link

E1422:活動連桿 E1422: Movable connecting rod

E1423:軸孔 E1423: shaft hole

E143:固定件 E143: Fixing parts

E2:貼合機構 E2: Fitting mechanism

E21:承載座 E21: Bearing seat

E211:微調件 E211: Trimmer

E22:料帶輪 E22: material pulley

E221:樞軸 E221: Pivot

E23:固定座 E23: Fixed seat

E24:撥桿 E24: Lever

E241:驅動件 E241: Driver

E25:載架 E25: carrier

E251:輸入流路 E251: Input flow path

E252:輸出流路 E252: Output flow path

E253:轉向輪 E253: Steering wheel

E254:轉向輪 E254: Steering wheel

E255:傳送間距 E255: Transmission distance

E256:側架 E256: side frame

E257:聯結件 E257: Couplings

E2571:扣座 E2571: buckle seat

E2572:扣接座 E2572: Button seat

E26:導輪 E26: guide wheel

E261:滾針部 E261: Needle roller

E262:滾貼部 E262: Rolling and pasting department

E263:驅動件 E263: Driver

E27:靠架 E27: by frame

E271:輪體 E271: wheel body

E272:導軸 E272: guide shaft

E273:靠軸 E273: Shaft

E274:聯動件 E274: linkage

E275:滑軌 E275: slide rail

E276:滑座 E276: sliding seat

E277:栓銷 E277: Pin

E278:定位孔 E278: positioning hole

E28:導架 E28: guide frame

E281:貼抵頭 E281: stick to the head

E282:工作部位 E282: Working parts

E283:貼合部位 E283: Fitting parts

F:下檢視單元 F: Bottom viewing unit

F1:光源 F1: light source

F2:基準座 F2: base seat

G:料帶 G: Tape

G1:驅動件 G1: Driver

G2:壓抵件 G2: pressing parts

G21:輥輪 G21: roller

G3:導引件 G3: guide

G31:導引道 G31: Guideway

H1:基板 H1: Substrate

H2:晶粒 H2: grain

K:機台台面 K: Machine table

K1:輸送流路 K1: delivery flow path

K11:軌架 K11: rail frame

K111:側架 K111: side frame

K112:皮帶 K112: belt

K113:軌道 K113: track

K114:搬送流路 K114: Transport flow path

K12:治具 K12: Jigs

K13:吸附部 K13: adsorption part

K14:軌座 K14: rail seat

K15:活動軌架 K15: movable rail frame

K151:側架 K151: side frame

K152:皮帶 K152: belt

K153:軌道 K153: track

K154:搬送流路 K154: Transport flow path

L:軸線 L: axis

Z:軸線 Z: axis

θ:角度 θ: angle

本創作之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中: 圖1係本創作第一實施例中一被貼物位於一膜層的示意圖;圖2係本創作第一實施例中該被貼物貼附於一散熱膠墊的分解示意圖;圖3係本創作第一實施例中設有該散熱膠墊的一料帶形成一料捲之立體示意圖;圖4係本創作第一實施例中一散熱膠墊貼合設備的立體示意圖;圖5係本創作第一實施例中一治具與下方機構示意圖;圖6係本創作第一實施例中一進給機構與一貼合機構的立體分解示意圖;圖7係本創作第一實施例中該進給機構的立體分解示意圖;圖8係本創作第一實施例中該貼合機構的立體示意圖;圖9係本創作第一實施例該貼合機構另一側面的立體示意圖;圖10係本創作第一實施例中該貼合機構的部份立體示意圖;圖11係本創作第一實施例中該貼合機構捲繞該料帶的立體示意圖;圖12係本創作第一實施例中該貼合機構捲繞該料帶的前側示意圖;圖13係本創作第一實施例中該料帶的一輸入流路及一輸出流路示意圖; 圖14係本創作第一實施例中一撥桿撥推該料帶示意圖;圖15係本創作第二實施例中一擋件以輥輪壓抵繞經一滾貼部的該料帶的示意圖;圖16係本創作第二實施例中該料帶受一導引件導引的示意圖;及圖17係本創作第三實施例中另一散熱膠墊貼合設備的立體示意圖。 Other characteristics and functions of this creation will be clearly presented in the implementation manner with reference to the drawings, wherein: Fig. 1 is a schematic diagram of an object to be attached to a film layer in the first embodiment of the invention; Fig. 2 is an exploded schematic diagram of the object attached to a thermal pad in the first embodiment of the invention; Fig. 3 is the original In the first embodiment of creation, there is a three-dimensional schematic diagram of a material strip formed by the heat dissipation rubber pad to form a three-dimensional schematic diagram; Fig. 4 is a three-dimensional schematic diagram of a heat dissipation rubber pad bonding equipment in the first embodiment of this creation; Fig. 5 is this creation A schematic diagram of a jig and the lower mechanism in the first embodiment; Figure 6 is a three-dimensional exploded schematic diagram of a feed mechanism and a bonding mechanism in the first embodiment of the invention; Figure 7 is the feed in the first embodiment of the invention The three-dimensional exploded schematic diagram of the mechanism; Fig. 8 is the three-dimensional schematic diagram of the bonding mechanism in the first embodiment of the creation; Fig. 9 is the perspective schematic diagram of the other side of the bonding mechanism in the first embodiment of the present creation; Fig. 10 is the first embodiment of the creation A partial perspective view of the bonding mechanism in an embodiment; Figure 11 is a perspective view of the bonding mechanism winding the tape in the first embodiment of the invention; Figure 12 is the bonding mechanism in the first embodiment of the invention The schematic diagram of the front side of the mechanism winding the material tape; Figure 13 is a schematic diagram of an input flow path and an output flow path of the material tape in the first embodiment of the invention; Fig. 14 is a schematic diagram of a driving lever pushing the material tape in the first embodiment of the invention; Fig. 15 is a schematic diagram of a stopper in the second embodiment of the invention pressing against the material tape wound through a rolling part in the second embodiment of the invention ; Figure 16 is a schematic diagram of the tape being guided by a guide in the second embodiment of the invention;

在本創作被詳細描述之前,應當注意在以下的說明內容中,類似的元件是以相同的編號來表示。 Before the present invention is described in detail, it should be noted that in the following description, like elements are denoted by the same numerals.

請參閱圖1,本創作第一實施例中,一被貼物A例如圖中所示是以一晶圓A1上的一晶粒為例來說明,但實施上不以此為限。該晶圓A1位於一膜層A2上,該膜層A2外周緣設有一框片狀的邊框A3,該被貼物A被規劃在該晶圓A1上並已被切割成單獨個體,各被貼物A呈矩陣排列於該晶圓A1上,呈多數個共同拼靠且呈平面狀地相鄰鋪設;在進行本創作散熱膠墊貼合時,將如圖2所示地在該被貼物A上方各貼覆一片散熱膠墊A4。 Please refer to FIG. 1 . In the first embodiment of the present invention, an object A to be attached is, for example, a die on a wafer A1 as shown in the figure for illustration, but the implementation is not limited thereto. The wafer A1 is located on a film layer A2, and the outer periphery of the film layer A2 is provided with a frame-shaped frame A3. The objects A are arranged in a matrix on the wafer A1, and several pieces are co-joined and laid adjacent to each other in a planar manner; when the heat dissipation rubber pad of this invention is pasted, it will be placed on the object as shown in Figure 2 A piece of thermal pad A4 is pasted on top of A respectively.

請參閱圖3,本創作第一實施例之散熱膠墊貼合方法,將使該散熱膠墊A4設於長條帶狀的一料帶A41上,並以一包膜A42覆蓋在該散熱膠墊A4上,該料帶A41與該包膜A42共同將 該散熱膠墊A4包覆,複數個該散熱膠墊A4在該料帶A41上被依序等間隔連續排列,各該散熱膠墊A4上、下兩面各具黏性而分別與該料帶A41與該包膜A42內層黏附,其中,該料帶A41的兩側各具有一排等間隔連續排列的複數個針孔A411,兩排針孔A411間相隔一間距,該間距大於該散熱膠墊A4的寬度並供該散熱膠墊A4黏置其中,該料帶A41可供捲在一設有一軸孔A431的套筒A43外周上而成一環捲狀的料捲A44。 Please refer to Fig. 3, the bonding method of the heat dissipation rubber pad in the first embodiment of the present invention will make the heat dissipation rubber pad A4 be arranged on a strip A41 in the shape of a strip, and cover the heat dissipation rubber with an envelope A42 On the pad A4, the strip A41 and the envelope A42 will jointly Covered by the heat dissipation rubber pad A4, a plurality of the heat dissipation rubber pads A4 are sequentially and continuously arranged at equal intervals on the material tape A41. It is adhered to the inner layer of the envelope A42, wherein, both sides of the material tape A41 have a row of a plurality of pinholes A411 arranged continuously at equal intervals, and there is a distance between the two rows of pinholes A411, which is larger than that of the heat dissipation rubber pad. The width of A4 is used for sticking the cooling rubber pad A4 therein, and the material tape A41 can be rolled on the outer periphery of a sleeve A43 with a shaft hole A431 to form a ring-shaped material roll A44.

請參閱圖4,本創作第一實施例之散熱膠墊貼合設備可以如圖所示,其在一機台B上設有:一輸送流路C、一移送機構D、一貼合裝置E,及一下檢視單元F。 Please refer to Fig. 4, the thermal pad bonding equipment of the first embodiment of the present invention can be shown in the figure, and it is provided on a machine B: a conveying flow path C, a transfer mechanism D, and a bonding device E , and look at cell F.

該輸送流路C由一第一軌架C1所構成;該第一軌架C1中設有一治具C11,該治具C11上設有複數個同心排列的圓形凹溝狀的吸附部C111,每一吸附部C111各提供負壓的吸力;該第一軌架C1上設有由相間隔間距的兩個側架C112及二條分別各靠置兩個該側架C112相對之內側的皮帶C113上方所構成的軌道C114,二個該軌道C114間形成所述輸送流路C,並可受驅動使如圖1所示的具有該邊框A3且由該被貼物A構成的該晶圓A1,於所述軌道C114中作X軸向直線位移搬送或定位在該治具C11上方;該治具C11可作上下昇降使其上的吸附部C111對該被貼物A吸附作上頂或下降操作。 The conveying flow path C is formed by a first rail frame C1; a fixture C11 is provided in the first rail frame C1, and a plurality of concentrically arranged circular groove-shaped adsorption parts C111 are arranged on the fixture C11. Each suction portion C111 provides negative pressure suction; the first rail frame C1 is provided with two side frames C112 spaced apart from each other and two belts C113 that are placed on the opposite inner sides of the two side frames C112 respectively. The formed track C114 forms the conveying channel C between the two tracks C114, and can be driven so that the wafer A1 having the frame A3 and being composed of the object A shown in FIG. The track C114 is used for X-axis linear displacement to transport or locate above the jig C11; the jig C11 can be lifted up and down so that the adsorption part C111 on the sticking object A can be sucked up or down.

該移送機構D設有相隔間距分別各跨於該輸送流路C上方的二個龍門軌架D1,每一該龍門軌架D1包括分別各位於該輸送流路C兩側的Z軸向的二立柱D11,及位於該二立柱D11上方呈水平Y軸向橫設的一橫樑D12,各橫樑D12上分別各設有例如線碼的一Y軸向驅動件D13;該二個龍門軌架D1的該二個橫樑D12上共同跨設X軸向的一懸臂D2,該懸臂D2兩端並受該Y軸向驅動件D13所驅動可作Y軸向位移,該懸臂D2上設有例如線碼的一X軸向驅動件D21。 The transfer mechanism D is provided with two gantry rail frames D1 respectively spanning above the conveying flow path C at intervals. Column D11, and a crossbeam D12 horizontally arranged horizontally on the Y axis above the two pillars D11, each beam D12 is respectively provided with a Y axis drive member D13 such as a line code; the two gantry rail frames D1 A cantilever D2 in the X-axis is arranged on the two beams D12. Both ends of the cantilever D2 are driven by the Y-axis driving member D13 to move in the Y-axis. An X-axis drive member D21.

該貼合裝置E設於該輸送流路C的該第一軌架C1上方,並位於該移送機構D的該懸臂D2上,並可受該X軸向驅動件D21所驅動,可作X軸向位移以執行該散熱膠墊A4貼合。 The bonding device E is set above the first rail frame C1 of the conveying flow path C, and is located on the cantilever D2 of the transfer mechanism D, and can be driven by the X-axis driving member D21, and can be used as an X-axis To the displacement to perform the thermal pad A4 paste.

該下檢視單元F設有由下往上進行檢視的一CCD鏡頭構成的取像器F1,及所對應設置的一光源F2。 The lower inspection unit F is provided with an image picker F1 composed of a CCD lens for inspection from bottom to top, and a corresponding light source F2.

請參閱圖4、5,該治具C11設有一加熱元件C12,該加熱元件C12可間接加熱置於該治具C11上的所述被貼物A(見圖1),該治具C11受一底座C13上的複數個間隔件C131架高在一適當高度,該底座C13受該機台B台面下一連動件C14上複數支樞桿C141所支撐連動,該機台B台面設一固定件C15,該固定件C15設有複數個分別供所述樞桿C141樞設的樞套C151,該固定件C15下方同時以複數支撐件C161設一固定座C16,並在該 固定座C16下方設一例如馬達之驅動件C17,該驅動件C17以旋轉的驅力經一具有螺紋的轉軸C171連動該連動件C14,以連動該底座C13托頂該治具C11作上下位移。 Please refer to Fig. 4, 5, this jig C11 is provided with a heating element C12, and this heating element C12 can indirectly heat the described object A (see Fig. 1) that is placed on this jig C11, and this jig C11 is subjected to a A plurality of spacers C131 on the base C13 are erected at an appropriate height, and the base C13 is supported by a plurality of pivot rods C141 on the next linkage C14 on the table B of the machine, and a fixed piece C15 is provided on the table B of the machine , the fixing part C15 is provided with a plurality of pivot sleeves C151 respectively for the pivoting rods C141 to pivot, and a fixing seat C16 is provided with a plurality of support parts C161 under the fixing part C15, and on the A drive member C17 such as a motor is arranged below the fixed seat C16. The drive member C17 uses a rotating driving force to drive the link C14 through a threaded shaft C171 to move the base C13 to support the jig C11 to move up and down.

請參閱圖6,該貼合裝置E設有一進位機構E1,及設於該進位機構E1上受其驅動位移並執行該散熱膠墊A4貼合的一貼合機構E2。 Please refer to FIG. 6 , the laminating device E is provided with a carry mechanism E1 and a lamination mechanism E2 disposed on the carry mechanism E1 and driven and displaced by it to carry out lamination of the heat dissipation pad A4.

請參閱圖6、7,該進位機構E1設有板狀的一載座E11、一提供該載座E11作垂直上、下的Z軸向位移的一軌座E12、設於該載座E11上可受驅動作X軸向位移的一捲收機構E13、及設於該載座E11上可驅動該載座E11相對該軌座E12作偏轉的一偏轉機構E14。 Please refer to Figures 6 and 7, the carry mechanism E1 is provided with a plate-shaped carrier E11, a rail seat E12 that provides the carrier E11 for vertical upward and downward Z-axis displacement, and is located on the carrier E11 A retracting mechanism E13 that can be driven for X-axis displacement, and a deflection mechanism E14 that is arranged on the carrier E11 and can drive the carrier E11 to deflect relative to the rail seat E12.

該載座E11設有供該捲收機構E13設置之上下相隔間距並相互平行的一組X軸向的滑軌E111,及位於該滑軌E111上下之間受一驅動件E112驅動的一螺桿E113;該載座E11並設有一鏤空的操作區間E114,該操作區間E114一側設有一扶架E115,該扶架E115於該操作區間E114上、下側分別各固設有一個向該載座E11一側面凸伸的樞轉座E1151,並於二個該樞轉座E1151上下間樞設一樞轉軸E1152;該載座E11上另設有由上往下進行檢視的一上檢視單元E116,該上檢視單元E116設有由一CCD鏡頭構成的取像器E1161,及其下方所對應設置的一光源E1162。 The seat E11 is provided with a set of sliding rails E111 in the X-axis direction spaced above and below and parallel to each other for the retracting mechanism E13, and a screw rod E113 located between the upper and lower sides of the sliding rails E111 and driven by a driving member E112 The carrier E11 is also provided with a hollowed-out operating section E114, one side of the operating section E114 is provided with a support frame E115, and the support frame E115 is respectively fixed on the upper and lower sides of the operating section E114. A side protruding pivot seat E1151, and a pivot shaft E1152 is pivoted between the two pivot seats E1151 up and down; the carrier seat E11 is also provided with an upper inspection unit E116 for viewing from top to bottom. The upper viewing unit E116 is provided with an image picker E1161 composed of a CCD lens, and a light source E1162 correspondingly arranged below it.

該軌座E12設於圖4中該移送機構D的該懸臂D2上,其上設有Z軸向的二滑軌E121,該二滑軌E121上設有受馬達構成的一驅動件E122驅動而可作Z軸向上下位移的一滑座E123,該滑座E123上設置向一側凸伸的一固定座E124,該固定座E124可伸經該載座E11的該操作區間E114,並位於該扶架E115上、下側的二個該樞轉座E1151間受該樞轉軸E1152所樞設,藉此使該載座E11受該軌座E12承載並驅動作垂直上、下的Z軸向位移。 The rail seat E12 is arranged on the cantilever D2 of the transfer mechanism D in FIG. A sliding seat E123 that can be used for Z-axis up and down displacement, a fixed seat E124 protruding to one side is provided on the sliding seat E123, the fixed seat E124 can extend through the operating area E114 of the carrier E11, and is located at the The two pivot seats E1151 on the upper and lower sides of the support frame E115 are pivoted by the pivot shaft E1152, so that the carrier E11 is carried by the rail seat E12 and driven to vertically move upward and downward in the Z direction .

該捲收機構E13設有板狀的一承載件E131,並以該承載件E131的一側設於該載座E11的該滑軌E111上,並受該驅動件E112驅動該螺桿E113所連動而可作X軸向的位移;該承載件E131上設有可受驅動進行旋轉捲收的一第一捲收輪E132及一第二捲收輪E133;其中,該第一捲收輪E132用以捲收圖3中該料帶A41,該第二捲收輪E133用以捲收圖3中該包膜A42;該承載件E131上設有由汽壓缸所構成由上往下伸設缸桿的一驅動件E134,及由彈簧構成具有彈性的一懸吊件E135。 The retracting mechanism E13 is provided with a plate-shaped supporting part E131, and one side of the supporting part E131 is set on the slide rail E111 of the carrier E11, and is driven by the driving part E112 to drive the screw E113 to move. It can be used for X-axis displacement; the carrier E131 is provided with a first retracting wheel E132 and a second retracting wheel E133 that can be driven to rotate and retract; wherein, the first retracting wheel E132 is used for The material tape A41 in Fig. 3 is retracted, and the second retracting wheel E133 is used to retract the envelope A42 in Fig. 3; the carrier E131 is provided with a cylinder rod formed by a gas pressure cylinder extending from top to bottom. A driver E134, and an elastic suspension E135 formed by a spring.

該偏轉機構E14設有由馬達構成的一驅動件E141,及受該驅動件E141驅動而可作扭動位移的連桿機構E142,該連桿機構E142由呈矩形樞設圍成的四個連桿構成,其中一固定連桿E1421與該驅動件E141的輸出端固設連動,與該固定連桿E1421平行對應的一活動連桿E1422以一軸孔E1423樞設於該載座E11 的該樞轉座E1151上端的該樞轉軸E1152上,並以分別各設於該驅動件E141兩側的二固定件E143,分別各固設於該軌座E12上該固定座E124兩側並與其連動。 The deflection mechanism E14 is provided with a driving part E141 composed of a motor, and a link mechanism E142 which is driven by the driving part E141 and can be twisted and displaced. Rod structure, wherein a fixed connecting rod E1421 is fixedly connected with the output end of the driving part E141, and a movable connecting rod E1422 corresponding to the fixed connecting rod E1421 is pivoted on the carrier E11 through a shaft hole E1423 On the pivot shaft E1152 at the upper end of the pivot seat E1151, and with two fixing parts E143 respectively arranged on both sides of the driving part E141, respectively fixed on both sides of the fixing seat E124 on the rail seat E12 and together with them Gearing.

請參閱圖8~圖9,該貼合機構E2設有板狀的一承載座E21,並在該承載座E21的一側面上設有一料帶輪E22,該料帶輪E22的一樞軸E221穿經該承載座E21而樞設於該承載座E21另一側的一固定座E23上,並受該固定座E23一側所設的馬達構成的驅動件E231所驅動可作間歇性旋轉,該貼合機構E2並藉該承載座E21以該固定座E23固設於圖7中該捲收機構E13的該承載件E131底側後方並受其連動可作X軸向位移,該承載座E21可以該料帶輪E22的樞軸E221為旋轉中心相對該固定座E23及圖7中該承載件E131作擺動位移,使該承載座E21可相對該承載件E131作相對位移,但該第一捲收輪E132及該第二捲收輪E133不會與該料帶輪E22作相對靠近或遠離的位移;該承載座E21下方設有一撥桿E24(圖9),該撥桿E24呈Y軸向水平伸設地由該承載座E21的一側前伸至與該料帶輪E22相同的一側,該撥桿E24並受該承載座E21相對該料帶輪E22另一側的一汽壓缸構成的驅動件E241所驅動而可作上下位移;該承載座E21一側設有由下往上螺設的具有外螺紋的微調件E211;該承載座E21上在與該料帶輪E22同側設有一載架E25。 Please refer to Fig. 8~Fig. 9, the bonding mechanism E2 is provided with a plate-shaped bearing seat E21, and a material pulley E22 is arranged on one side of the bearing seat E21, and a pivot E221 of the material belt pulley E22 Pass through the bearing seat E21 and pivot on a fixed seat E23 on the other side of the bearing seat E21, and be driven by the drive member E231 formed by the motor on the side of the fixed seat E23 to rotate intermittently. The attachment mechanism E2 is fixed on the rear of the bottom side of the bearing part E131 of the retracting mechanism E13 in FIG. The pivot E221 of the material pulley E22 is the center of rotation for swinging displacement relative to the fixed seat E23 and the bearing part E131 in FIG. The wheel E132 and the second take-up wheel E133 will not move relatively close to or away from the material pulley E22; a driving lever E24 (Fig. 9) is arranged under the bearing seat E21, and the driving lever E24 is horizontal in the Y-axis Extending from one side of the bearing seat E21 to the same side as the material pulley E22, the driving lever E24 is formed by a steam pressure cylinder on the other side of the bearing seat E21 opposite to the material pulley E22. Driven by the driving part E241, it can move up and down; the side of the bearing seat E21 is provided with a fine-tuning member E211 with external threads screwed from bottom to top; the bearing seat E21 is provided with a Carrier E25.

請參閱圖10,該載架E25下側提供圖3中該料帶A41一輸入流路E251,上側提供該料帶A41一輸出流路E252;該載架E25在該輸入流路E251路徑上設有複數個轉向輪E253,在該輸出流路E252上設有一轉向輪E254;該輸出流路E252路徑另設有自該承載座E21作Y軸向伸設的一導輪E26,該導輪E26兩端周緣各設有複數個輻射狀彼此相隔間距的凸體所構成的一滾針部E261,兩端的所述滾針部E261間設有一段周緣呈圓滑周面的滾貼部E262,該導輪E26可受例如馬達的一驅動件E263所驅動而作間歇轉動,該導輪E26一側設有一靠架E27,該靠架E27約略呈矩形,其中央設有一導軸E272,及設在該導軸E272上與所述滾針部E261對應的二輪體E271,並在該導軸E272兩側設有呈Y軸向並相互平行的二靠軸E273,在兩端分別各設有一聯動件E274,在其中靠近該承載座E21一端的該聯動件E274外側固設於一滑座E276上,該滑座E276可滑動地設置在相隔間距並相互平行的二滑軌E275上,使該靠架E27可相對該導輪E26被撥推作徑向滑動遠離或靠近,靠近該承載座E21一端的該聯動件E274內側並設有一栓銷E277,該栓銷E277具有彈性驅力地朝該聯動件E274外側嵌插入該二滑軌E275間的一定位孔E278,而使該靠架E27獲得定位在靠近該導輪E26的位置。 Please refer to Fig. 10, the lower side of the carrier E25 provides the material tape A41-input flow path E251 in Fig. 3, and the upper side provides the material tape A41-output flow path E252; the carrier E25 is set on the path of the input flow path E251 There are a plurality of steering wheels E253, and a steering wheel E254 is provided on the output flow path E252; the path of the output flow path E252 is also provided with a guide wheel E26 extending from the bearing seat E21 in the Y-axis direction, and the guide wheel E26 A needle roller part E261 formed by a plurality of radial protrusions spaced apart from each other is provided on the peripheral edges of both ends, and a section of rolling part E262 with a smooth peripheral surface is provided between the needle roller parts E261 at both ends. The wheel E26 can be driven by a driving part E263 such as a motor to rotate intermittently. One side of the guide wheel E26 is provided with a frame E27. The frame E27 is roughly rectangular. On the guide shaft E272 is the second wheel body E271 corresponding to the needle part E261, and on both sides of the guide shaft E272, there are two supporting shafts E273 in the Y-axis and parallel to each other, and a linkage E274 is respectively provided at both ends , the outer side of the linkage E274 close to one end of the bearing seat E21 is fixed on a sliding seat E276, and the sliding seat E276 is slidably arranged on two sliding rails E275 spaced apart and parallel to each other, so that the support E27 The guide wheel E26 can be dialed and pushed to slide away or approach radially. A pin E277 is arranged on the inner side of the link E274 near one end of the bearing seat E21, and the pin E277 is elastically driven toward the link E274. The outer side is inserted into a positioning hole E278 between the two slide rails E275, so that the support E27 is positioned close to the guide wheel E26.

該載架E25設有與該承載座E21相隔一傳送間距 E255的一側架E256,該側架E256與該承載座E21間上、下各設有複數個桿狀的聯結件E257及所述轉向輪軸E253,圖7中該捲收機構E13中的該驅動件E134由上往下伸設一缸桿E1341的一端與該載架E25位於最上端的該聯結件E257上的一扣座E2571聯結並連動,並藉此使該捲收機構E13與該貼合機構E2間聯結並連動;圖7中該懸吊件E135的另一端與位於最上端的該聯結件E257上的一扣接座E2572聯結並連動,並藉此使該捲收機構E13與該貼合機構E2間聯結並連動;該載架E25相對該料帶輪E22(見圖8)的另一端固設有一導架E28,該導架E28上設有一Y軸向圓桿狀的軸輪所構成的一貼抵頭E281,該貼抵頭E281對應位於該傳送間距E255中,該貼抵頭E281位於該載架E25下側該輸入流路E251的末端與上側該輸出流路E252的起始端的轉折交匯處,該輸入流路E251與該輸出流路E252間的夾角為小於九十度的銳角。 The carrier E25 is provided with a transmission distance from the carrier E21 The side frame E256 of E255, the side frame E256 and the bearing seat E21 are respectively provided with a plurality of rod-shaped couplings E257 and the steering wheel shaft E253 on the upper and lower sides, the drive in the retracting mechanism E13 in Figure 7 One end of a cylinder rod E1341 extending from the top to the bottom of the part E134 is connected and interlocked with a button seat E2571 on the uppermost coupling part E257 of the carrier E25, thereby making the retracting mechanism E13 and the bonding mechanism E2 are connected and interlocked; in Fig. 7, the other end of the suspension E135 is connected and interlocked with a fastening seat E2572 on the uppermost coupling E257, thereby making the retracting mechanism E13 and the fitting mechanism E2 is connected and interlocked; the other end of the carrier E25 relative to the material pulley E22 (see Figure 8) is fixed with a guide frame E28, and the guide frame E28 is provided with a shaft wheel formed by a Y-axis round rod. A sticking head E281, the sticking head E281 is correspondingly located in the transmission distance E255, and the sticking head E281 is located at the turning point between the end of the input flow path E251 on the lower side of the carrier E25 and the beginning end of the output flow path E252 on the upper side At the junction, the included angle between the input channel E251 and the output channel E252 is an acute angle less than 90 degrees.

請參閱圖11~13,該貼合機構E2以該料帶輪E22的樞軸E221為旋轉中心可以作擺動,在常態時,與該樞軸E221相隔一段間距的該貼抵頭E281被朝下偏擺至順時針旋轉路徑過該樞軸E221垂直的Z軸向偏左的部位,使該貼抵頭E281與該樞軸E221連接的一軸線L與垂直的Z軸向之一軸線Z形成一個角度θ,該角度θ最佳為大於四十五度但小於九十度;該驅動件E134 的缸桿E1341由上往下在距該樞軸E221一段距離下推抵,等同對該貼合機構E2及該貼抵頭E281以該樞軸E221為旋轉中心施予一朝下且呈逆時針的力矩,視為一第一方向的力矩,使該微調件E211上方抵於該捲收機構E13的該承載件E131下緣,此時該貼抵頭E281所處的位置係仍以該料帶輪E22的樞軸E221為旋轉中心,順時針向下旋轉偏擺至一工作部位E282,此時該彈簧構成的該懸吊件E135支撐該貼合機構E2部份重量,等同對該貼合機構E2及該貼抵頭E281以樞軸E221為旋轉中心施予一朝上且呈順時針的力矩,視為一第二方向的力矩;該第一方向的力矩與第二方向的力矩方向相反,該第一方向的力矩對該貼抵頭E281產生的位移量,即決定該工作部位E282的高低位置,其可受該微調件E211微調。 Please refer to Figures 11-13, the fitting mechanism E2 can swing around the pivot E221 of the material pulley E22 as the center of rotation, and under normal conditions, the sticking head E281 separated from the pivot E221 by a certain distance is directed downward Swing to the clockwise rotation path through the leftward part of the Z axis perpendicular to the pivot E221, so that an axis L connecting the contact head E281 with the pivot E221 and an axis Z perpendicular to the Z axis form a Angle θ, the optimal angle θ is greater than forty-five degrees but less than ninety degrees; the driver E134 The cylinder rod E1341 pushes from top to bottom at a distance from the pivot E221, which is equivalent to applying a downward and counterclockwise rotation to the fitting mechanism E2 and the fitting head E281 with the pivot E221 as the center of rotation. The torque in the first direction is regarded as a torque in the first direction, so that the top of the fine-tuning part E211 abuts against the lower edge of the bearing part E131 of the retracting mechanism E13. The pivot E221 of the wheel E22 is the center of rotation, and it rotates clockwise and deflects to a working position E282. At this time, the suspension part E135 formed by the spring supports part of the weight of the fitting mechanism E2, which is equivalent to the weight of the fitting mechanism. E2 and the sticking head E281 apply an upward and clockwise moment with the pivot E221 as the center of rotation, which is regarded as a moment in the second direction; the moment in the first direction is opposite to the moment in the second direction, The displacement generated by the torque in the first direction to the abutting head E281 determines the height of the working part E282, which can be fine-tuned by the fine-tuning member E211.

在將該料捲A44套裝於該料帶輪E22時,該包膜A42被剝離並捲繞至該第二捲收輪E133,該料帶A41以該散熱膠墊A4朝下的方式被牽引經該載架E25下側該輸入流路E251的轉向輪E253,並經繞轉經該貼抵頭E281後,轉折循該輸出流路E252繞經該導輪E26的所述滾針部E261,而被該第一捲收輪E132所捲收;該料帶A41繞經該導輪E26時,被如圖10所示之該靠架E27兩側的該靠軸E273所覆靠。 When the material roll A44 is set on the material pulley E22, the envelope A42 is peeled off and wound up to the second take-up wheel E133, and the material belt A41 is pulled through with the cooling rubber pad A4 facing down. The steering wheel E253 of the input flow path E251 on the lower side of the carrier E25, after turning around and passing the sticking head E281, turns around the output flow path E252 and passes the needle part E261 of the guide wheel E26, and It is rolled up by the first take-up wheel E132; when the strip A41 winds around the guide wheel E26, it is covered by the axles E273 on both sides of the frame E27 as shown in Figure 10 .

請參閱圖4、12、13,在進行貼合時,該貼合裝置E先 以該上檢視單元E116由上往下對該被貼物A取像,再位移至該下檢視單元F處,使該下檢視單元F由下往上進行檢視該料帶A41下方之該散熱膠墊A4,在進行該散熱膠墊A4的取像時,如圖14所示,該撥桿E24將被驅動向下位移於該料帶輪E22與該貼抵頭E281間,而撥推位於該輸入流路E251的該料帶A41向下位移,使在該撥桿E24與該貼抵頭E281間的該料帶A41由一傾斜狀態形成水平狀態,以使該下檢視單元F檢視取得一精準的該散熱膠墊A4方位,然後該撥桿E24再被驅動上移回復至原定位,使該料帶A41恢復原右上左下的傾斜狀態(在特定該被貼物A許可的情況下,該料帶A41可維持該水平狀態);在該上檢視單元E116與該下檢視單元F所檢測出的該被貼物A與該散熱膠墊A4的方位有偏移誤差時,該偏轉機構E14將驅動使該載座E11相對該軌座E12作偏轉,藉以連動該貼抵頭E281作偏轉,使該被貼物A與該散熱膠墊A4的方位對應。 Please refer to Figures 4, 12, and 13. When laminating, the laminating device E first Use the upper inspection unit E116 to take an image of the object A from top to bottom, and then move to the lower inspection unit F, so that the lower inspection unit F can inspect the heat dissipation adhesive under the tape A41 from bottom to top Pad A4, when taking the image of the heat dissipation rubber pad A4, as shown in Figure 14, the driving lever E24 will be driven to move downward between the material pulley E22 and the abutting head E281, and the pushing is located at the The material belt A41 of the input flow path E251 is displaced downward, so that the material belt A41 between the driving rod E24 and the abutting head E281 is formed into a horizontal state from an inclined state, so that the lower inspection unit F can obtain an accurate inspection. The orientation of the cooling rubber pad A4, and then the lever E24 is driven up to return to the original position, so that the material belt A41 returns to the original inclined state of the upper right and lower left (in the case that the specific object A permits, the material The belt A41 can maintain the horizontal state); when there is an offset error between the orientation of the object A and the thermal pad A4 detected by the upper inspection unit E116 and the lower inspection unit F, the deflection mechanism E14 will drive The carrier E11 is deflected relative to the rail seat E12, so as to drive the abutting head E281 to deflect, so that the affixed object A corresponds to the orientation of the thermal pad A4.

請參閱圖12、13,隨後,該貼合裝置E以該進位機構E1的該軌座E12驅動該載座E11,以連動該捲收機構E13及貼合機構E2下移至該被貼物A上方預設定位,此時該料帶A41恰被驅動使該散熱膠墊A4的一側恰對應鄰抵於位於該工作部位E282處的該貼抵頭E281底端下方,該貼抵頭E281間隔該料帶A41及該散熱膠墊A4壓抵至該被貼物A的反作用力,使該驅動件E134 的缸桿E1341微作上移回昇,以緩衝下降的壓力,相對的使該貼抵頭E281以該料帶輪E22的樞軸E221為旋轉中心,由該工作部位E282順時針向上旋轉偏擺至使該貼抵頭E281微上昇位移至一貼合部位E283,此時該微調件E211上方與該捲收機構E13的該承載件E131下緣分離;而該料帶A41繞經貼抵頭E281並以貼抵頭E281為界形成該輸入流路E251側的一輸入側及該輸出流路E252側的一輸出側;在該輸入流路E251側的該料帶A41不受驅動位移前進下,續由該捲收機構E13以該承載件E131被驅動於圖7中該滑軌E111作X軸向的位移,連動該承載件E131上該第一捲收輪E132、該第二捲收輪E133及該貼合機構E2作位移,使該貼抵頭E281自該料帶A41上方間接輥壓該料帶A41下方的該散熱膠墊A4,而由該輸出流路E252的一側往另一側的該輸入流路E251側輥動位移,此時位於該輸出流路E252側的該導輪E26及該第一捲收輪E132將被驅動捲收該料帶A41,使該散熱膠墊A4被帶經該貼抵頭E281底端而在由該輸入流路E251轉折進入該輸出流路E252時,被以同時剝離、貼覆過程下往另一側使與該料帶A41分離並貼覆於該被貼物A上。 Please refer to Figures 12 and 13. Subsequently, the pasting device E drives the carrier E11 with the rail seat E12 of the carrying mechanism E1 to move down to the object A in conjunction with the retracting mechanism E13 and the pasting mechanism E2 The upper part is pre-positioned. At this time, the material tape A41 is just driven so that one side of the heat dissipation rubber pad A4 is just adjacent to the bottom of the sticking head E281 at the working position E282, and the sticking head E281 is spaced apart The tape A41 and the thermal pad A4 are pressed against the reaction force of the object A, so that the driving part E134 The cylinder rod E1341 slightly moves up and rises to buffer the falling pressure. Relatively, the sticking head E281 takes the pivot E221 of the pulley E22 as the center of rotation, and rotates clockwise from the working part E282 to Make the sticking head E281 move up slightly to a sticking part E283, at this time, the upper part of the trimming part E211 is separated from the lower edge of the bearing part E131 of the retracting mechanism E13; and the material tape A41 is wrapped around the sticking head E281 and An input side on the side of the input flow path E251 and an output side on the side of the output flow path E252 are formed with the abutment head E281 as a boundary; the material belt A41 on the side of the input flow path E251 is not driven and moved forward, continued The carrier E131 is driven by the retracting mechanism E13 to move the slide rail E111 in FIG. The bonding mechanism E2 is displaced so that the bonding head E281 indirectly rolls the heat dissipation pad A4 below the material tape A41 from above the material tape A41, and from one side of the output flow path E252 to the other side. The roller on the side of the input flow path E251 moves and shifts. At this time, the guide wheel E26 and the first take-up wheel E132 on the side of the output flow path E252 will be driven to wind up the material tape A41, so that the heat dissipation rubber pad A4 is taken up. When passing through the bottom of the sticking head E281 and turning from the input flow path E251 into the output flow path E252, it is simultaneously peeled off and pasted to the other side to separate from the material tape A41 and pasted on the On sticker A.

請參閱圖15、16,本創作第二實施例之構造大致相同於該第一實施例,在前述第一實施例圖3中該料帶A41可能與該 散熱膠墊A4為一個特定規格,其可能寬度較窄,此時該料帶A41與該包膜A42寬度也會選用兩側無複數個針孔A411,而如圖15中所示第二實施例中較窄規格的料帶G,則此時該導輪E26一側可設置固設於該承載座E21上例如汽壓缸的一驅動件G1,以驅動一壓抵件G2以所設的輥輪G21壓抵繞經該滾貼部E262的料帶G,並如圖16所示在該輸出流路E252中的該導架E28上設置一導引件G3,該導引件G3設有一導引道G31,該導引道G31引導由該輸入流路E251經該貼抵頭E281底端轉折進入該輸出流路E252的該料帶G。 Please refer to Fig. 15, 16, the structure of the second embodiment of the present invention is roughly the same as the first embodiment, and in the foregoing first embodiment Fig. 3, the strip A41 may be the same as the first embodiment The cooling rubber pad A4 is a specific specification, and its width may be relatively narrow. At this time, the width of the material strip A41 and the envelope A42 will also be selected without multiple pinholes A411 on both sides, and the second embodiment shown in FIG. 15 For the material strip G with a narrower specification, at this time, one side of the guide wheel E26 can be provided with a driving member G1 fixed on the bearing seat E21, such as a pneumatic cylinder, to drive a pressing member G2 and the set roller The wheel G21 presses against the material tape G that goes around the rolling portion E262, and as shown in FIG. The guideway G31 guides the material strip G that turns from the input channel E251 to the output channel E252 through the bottom end of the affixing head E281.

請參閱圖17,本創作第三實施例之構造大致相同於該第一實施例,其差別在於:本創作並不限於僅能對圖1中尚在該膜層A2上該晶圓A1的晶粒作散熱膠墊A4的貼合,相同的該貼合裝置E及貼合方法亦可應用於如圖17中本創作第三實施例對已放置在基板H1上的晶粒H2作貼合,此時該散熱膠墊貼合設備除圖4中第一實施例該移送機構D、該貼合裝置E相同外(以下不作贅述),該機台台面K上的一輸送流路K1可以二個相隔間距併列平行設置的軌架K11構成;每一該軌架K11中設有一治具K12,該治具K12上設有複數個矩形的吸附部K13,每一吸附部K13各提供負壓的吸力;每一該軌架K11上設有由相間隔的兩個側架K111及二條分別各靠置兩個該側架K111相對之內側的皮帶K112上方 所構成的軌道K113,二個該軌道K113間分別各形成Y軸向的一搬送流路K114,並可受驅動盛載具有晶粒H2的基板H1所構成的該被貼物H於所述軌道K113中作位移搬送或定位在該治具K12上方;該治具K12可作上下昇降使其上的吸附部K13對該被貼物H吸附作上頂或下降操作;二個該軌架K11所構成的二個該搬送流路K114在相同的一端,對應設有可在X軸向一軌座K14上作位移的一活動軌架K15,該活動軌架K15上設有由相間隔的兩個側架K151及二條分別各靠置兩個該側架K151相對之內側的皮帶K152上方所構成的軌道K153,二個該軌道K153間分別各形成Y軸向的一搬送流路K154可在該活動軌架K15位移時選擇性對應任一個該軌架K11;而該下檢視單元F可位於二個該軌架K11所構成的二個該搬送流路K114間,並設置可作選擇性位移對應該光源F1上方的一基準座F2,供該上檢視單元E116與該下檢視單元F作對位校準。 Please refer to Fig. 17, the structure of the third embodiment of the present invention is roughly the same as that of the first embodiment, the difference is that the present invention is not limited to the wafer A1 which is still on the film layer A2 in Fig. 1 The lamination of the heat dissipation rubber pad A4, the same lamination device E and lamination method can also be applied to lamination of the crystal grain H2 placed on the substrate H1 in the third embodiment of the present invention as shown in Figure 17, At this moment, except that the transfer mechanism D and the bonding device E of the first embodiment in FIG. It is composed of rail frames K11 arranged side by side at intervals; each rail frame K11 is provided with a jig K12, and the jig K12 is provided with a plurality of rectangular adsorption parts K13, and each adsorption part K13 provides negative pressure suction ; Each rail frame K11 is provided with two side frames K111 spaced apart from each other and two belts K112 that are placed on the opposite sides of the side frames K111 respectively. The formed track K113, each of the two tracks K113 forms a conveying channel K114 in the Y-axis direction, and can be driven to carry the object H composed of the substrate H1 with the crystal grain H2 on the track K113 is used for displacement transfer or positioning above the jig K12; the jig K12 can be lifted up and down so that the adsorption part K13 on it can adsorb the object H for upward or downward operation; the two rail frames K11 The two conveying channels K114 constituted are at the same end, correspondingly provided with a movable rail frame K15 that can be displaced on a rail seat K14 in the X-axis, and the movable rail frame K15 is provided with two spaced apart The side frame K151 and two rails K153 formed above the belts K152 on the opposite inner side of the side frame K151 respectively. The two rails K153 respectively form a conveying channel K154 in the Y-axis. When the rail frame K15 is displaced, it selectively corresponds to any one of the rail frames K11; and the lower inspection unit F can be located between the two conveying channels K114 formed by the two rail frames K11, and can be selectively displaced to correspond to the A reference seat F2 above the light source F1 is used for aligning and calibrating the upper viewing unit E116 and the lower viewing unit F.

本創作實施例之散熱膠墊貼合裝置及設備,由於使該貼合裝置E以該料帶輪E22設置該料帶A41,該料帶A41繞經該貼抵頭E281並以該貼抵頭E281為界形成該輸入側及該輸出側;使該貼抵頭E281以該樞軸E221為旋轉中心,偏擺至該工作部位E282,並使該散熱膠墊A4與該料帶A41分離而貼覆於該被貼物A上,如此使該料帶A41在輸送過程中,該貼抵頭E281一次性將 該散熱膠墊A4與該料帶A41分離而貼覆於該被貼物A,無需該貼抵頭E281如先前技術般往復兩次位移輥動浪費工時,可增加貼合效率及經濟效益。 The heat dissipation rubber pad bonding device and equipment of the present creation embodiment, since the bonding device E is provided with the material belt A41 with the material pulley E22, the material belt A41 is wound around the sticking head E281 and passed through the sticking head E281 The input side and the output side are formed by E281 as the boundary; the sticking head E281 is swung to the working part E282 with the pivot E221 as the center of rotation, and the heat dissipation rubber pad A4 is separated from the material tape A41 for sticking Overlay on the object A, so that during the conveying process of the material tape A41, the sticking head E281 will The heat-dissipating rubber pad A4 is separated from the material tape A41 and applied to the object A, which eliminates the need for the affixing head E281 to reciprocate and move twice to waste man-hours as in the prior art, thereby increasing the affixing efficiency and economic benefits.

惟以上所述者,僅為本創作之實施例而已,當不能以此限定本創作實施之範圍,凡是依本創作申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本創作專利涵蓋之範圍內。 However, the above is only an embodiment of this creation, and should not limit the scope of implementation of this creation. All simple equivalent changes and modifications made according to the patent scope of this creation and the contents of the patent specification are still considered to be Within the scope covered by this creation patent.

A4:散熱膠墊 A4: Thermal pad

A41:料帶 A41: Tape

A42:包膜 A42: Envelope

A44:料捲 A44: Roll

E:貼合裝置 E: Fitting device

E1:進位機構 E1: carry mechanism

E11:載座 E11: carrier

E116:上檢視單元 E116: Upper viewing unit

E12:軌座 E12: rail seat

E13:捲收機構 E13: retracting mechanism

E131:承載件 E131: Carrier

E132:第一捲收輪 E132: The first reel

E133:第二捲收輪 E133: The second winding wheel

E134:驅動件 E134: Driver

E1341:缸桿 E1341: cylinder rod

E135:懸吊件 E135: Suspension

E14:偏轉機構 E14: deflection mechanism

E2:貼合機構 E2: Fitting mechanism

E211:微調件 E211: Trimmer

E22:料帶輪 E22: material pulley

E221:樞軸 E221: Pivot

E25:載架 E25: carrier

E253:轉向輪 E253: Steering wheel

E26:導輪 E26: guide wheel

E261:滾針部 E261: Needle roller

E281:貼抵頭 E281: stick to the head

L:軸線 L: axis

Z:軸線 Z: axis

θ:角度 θ: angle

Claims (16)

一種散熱膠墊貼合設備,包括:一輸送流路,供搬送一被貼物於;一料帶,設有間隔排列的散熱膠墊;一貼合裝置,設於該輸送流路上方,設有一料帶輪設置該料帶,該料帶繞經一貼抵頭並以該貼抵頭為界形成一輸入側及一輸出側;該貼抵頭以一樞軸為旋轉中心,可偏擺至一工作部位。 A heat dissipation rubber pad bonding equipment, including: a conveying flow path for conveying an object to be pasted; a material belt provided with heat dissipation rubber pads arranged at intervals; a laminating device arranged above the conveying flow path, set There is a material pulley for setting the material belt, the material belt is wound around a sticking head and bounded by the sticking head to form an input side and an output side; the sticking head takes a pivot as the rotation center and can be swung to a working site. 如請求項1所述散熱膠墊貼合設備,其中,該樞軸設於該料帶輪中心,該貼抵頭壓抵至該被貼物時,該貼抵頭以該料帶輪的樞軸為旋轉中心可偏擺至一貼合部位。 According to claim 1, the heat dissipation rubber pad bonding equipment, wherein, the pivot is arranged at the center of the material pulley, and when the abutting head is pressed against the object, the abutting head is pressed by the pivot of the material pulley. The shaft is the center of rotation and can be swung to a fitting position. 如請求項1所述散熱膠墊貼合設備,其中,該貼合設備設有對該散熱膠墊取像的一下檢視單元。 According to claim 1, the laminating equipment for heat dissipation rubber pads, wherein the laminating equipment is provided with a lower inspection unit for capturing images of the heat dissipation rubber pads. 如請求項1所述散熱膠墊貼合設備,其中,該貼抵頭以該樞軸為旋轉中心受有一第一方向的力矩及一第二方向的力矩,該第一方向的力矩與該第二方向的力矩方向相反。 According to claim 1, the heat dissipation rubber pad laminating equipment, wherein, the affixing head receives a moment in a first direction and a moment in a second direction with the pivot as the center of rotation, and the moment in the first direction is the same as the moment in the second direction. The torques in the two directions are in opposite directions. 如請求項4所述散熱膠墊貼合設備,其中,該第一方向的力矩對該貼抵頭產生的位移量可受微調。 According to claim 4, the heat dissipation rubber pad attaching device, wherein the displacement generated by the moment in the first direction to the abutting head can be finely adjusted. 如請求項1所述散熱膠墊貼合設備,其中,該貼抵頭由圓桿狀的軸輪所構成,其位於下側該料帶一輸入流路的末端及上側該料帶一輸出流路的起始端的轉折交匯處,該輸入流路與該輸出流路間的夾角為小於九十度的銳角。 According to claim item 1, the heat dissipation rubber pad bonding equipment, wherein, the bonding head is composed of a round rod-shaped axle wheel, which is located at the end of the material belt-input flow path on the lower side and the material belt-output flow path on the upper side At the turning intersection at the beginning of the path, the angle between the input flow path and the output flow path is an acute angle less than 90 degrees. 如請求項1所述散熱膠墊貼合設備,其中,該貼抵頭與該樞軸連接的一軸線與垂直軸向之一軸線形成一個角度,該 角度大於四十五度但小於九十度。 According to claim 1, the thermal pad bonding equipment, wherein, an axis connecting the abutting head and the pivot forms an angle with an axis of the vertical axis, and the The angle is greater than forty-five degrees but less than ninety degrees. 如請求項1所述散熱膠墊貼合設備,其中,該貼抵頭朝該料帶的該輸入側位移,而使該散熱膠墊在自一側從該料帶以同時剝離、貼覆過程下往另一側被完全貼覆至該被貼物上表面。 According to claim item 1, the heat dissipation rubber pad bonding equipment, wherein, the abutment head is displaced toward the input side of the tape, so that the heat radiation pad is peeled off from the material tape from one side and applied simultaneously. Down to the other side, it is completely attached to the upper surface of the pasted object. 一種散熱膠墊貼合裝置,設有:一進位機構,及設於該進位機構上受其驅動位移並執行一散熱膠墊貼合的一貼合機構,該貼合機構設有一設置一料帶的料帶輪,該料帶上設有該散熱膠墊,該料帶繞經一貼抵頭並以該貼抵頭為界形成一輸入側及一輸出側;該貼抵頭以一樞軸為旋轉中心偏擺至一工作部位。 A heat dissipation rubber pad bonding device is provided with: a carrying mechanism, and a bonding mechanism arranged on the carrying mechanism and driven by the carrying mechanism to perform a heat dissipation rubber pad bonding, the bonding mechanism is provided with a material belt The material belt wheel is provided with the heat dissipation rubber pad on the material belt, and the material belt is wound around a sticking head and bounded by the sticking head to form an input side and an output side; the sticking head is pivoted It deflects to a working position for the center of rotation. 如請求項9所述散熱膠墊貼合裝置,其中,該樞軸設於該料帶輪中心,該料帶輪設於該貼合機構的一承載座,該料帶輪的樞軸穿經該承載座而樞設於該承載座另一側的一固定座上,並受該固定座一側所設的一驅動件所驅動可作間歇性旋轉,該貼合機構並藉該承載座以該固定座固設於一捲收機構的一承載件並受其連動可作位移。 As described in Claim 9, the heat dissipation rubber pad bonding device, wherein, the pivot is arranged at the center of the material pulley, and the material pulley is arranged on a bearing seat of the bonding mechanism, and the pivot of the material pulley passes through The bearing base is pivotally arranged on a fixing base on the other side of the bearing base, and is driven by a driving member provided on one side of the fixing base to rotate intermittently. The laminating mechanism uses the bearing base to The fixing seat is fixed on a bearing part of a retracting mechanism and can be displaced by its linkage. 如請求項9所述散熱膠墊貼合裝置,其中,該進位機構設有一捲收機構,該捲收機構設有一承載件,該承載件上設有可受驅動進行旋轉捲收該料帶的一第一捲收輪及捲收一包膜的一第二捲收輪;該貼合機構設有一承載座,並在該承載座上設有該料帶輪;該承載座可相對該承載件作相對位移,但該第一捲收輪及該第二捲收輪不會與該料帶輪作相對靠近或遠離的位移。 As described in Claim 9, the heat dissipation rubber pad lamination device, wherein, the carrying mechanism is provided with a retracting mechanism, and the retracting mechanism is provided with a carrier, and the carrier is provided with a mechanism that can be driven to rotate and retract the material tape. A first take-up wheel and a second take-up wheel that takes up a coating; the bonding mechanism is provided with a bearing seat, and the material pulley is arranged on the bearing seat; the bearing seat can be opposite to the bearing member Relatively displaced, but the first take-up wheel and the second take-up wheel will not move closer or farther away from the material pulley. 如請求項11所述散熱膠墊貼合裝置,其中,該捲收機構與該貼合機構間以一驅動件聯結並連動。 According to claim 11, the heat dissipation rubber pad attaching device, wherein, the retracting mechanism and the attaching mechanism are connected and interlocked by a driving member. 如請求項11所述散熱膠墊貼合裝置,其中,該捲收機構與該貼合機構間以一具有彈性的一懸吊件聯結並連動。 According to claim 11, the heat dissipation rubber pad laminating device, wherein, the retracting mechanism and the laminating mechanism are connected and interlocked by an elastic suspension member. 如請求項9所述散熱膠墊貼合裝置,其中,該貼合機構設有受一驅動件所驅動而位移於該料帶輪與該貼抵頭間撥推該料帶位移的一撥桿。 As described in claim 9, the heat dissipation rubber pad laminating device, wherein, the laminating mechanism is provided with a driving lever that is driven by a driving member and is displaced between the material pulley and the abutting head to push the displacement of the material tape . 如請求項9所述散熱膠墊貼合裝置,其中,該進位機構設有一載座,及設於該載座上而可受驅動作位移的一捲收機構。 As described in Claim 9, the heat dissipation rubber pad laminating device, wherein the carrying mechanism is provided with a carrier, and a retracting mechanism arranged on the carrier and capable of being driven for displacement. 一種散熱膠墊貼合設備,設有如請求項9至15中任一項所述散熱膠墊貼合裝置。 A heat dissipation rubber pad laminating device is provided with a heat dissipation rubber pad laminating device as described in any one of claims 9 to 15.
TW111205138U 2022-03-18 2022-03-18 Heat dissipation rubber pad attaching device and equipment TWM633357U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI806502B (en) * 2022-03-18 2023-06-21 萬潤科技股份有限公司 Laminating method, device and equipment for heat dissipation rubber pad

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI806502B (en) * 2022-03-18 2023-06-21 萬潤科技股份有限公司 Laminating method, device and equipment for heat dissipation rubber pad

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004