TWM629199U - Suck-to-attach rotatable platform - Google Patents

Abstract

An adsorption-type rotary stage is used for a substrate to be placed flat on it, comprising a processing table and a rotary assembly supporting the processing table. An air-tight groove is provided, and an air channel for providing negative pressure is arranged in the rotating assembly, and the air channel is communicated with the air-tight groove; wherein, an adsorption member for adsorbing the substrate is arranged on the processing table, and a processing surface is formed with a The annular groove is used for the suction part to be inserted into the annular groove and partially exposed on the processing surface; thereby, the suction part can be sleeved on the rotating stage with better structural strength.

Description

Adsorption type rotary stage

This creation is related to a semiconductor device, especially a suction-type rotating stage.

Press, currently used in the semiconductor manufacturing process, such as processing equipment for substrates such as wafers, mainly through the equipment's carrier to adsorb the bottom surface of the substrate, and then drive the carrier to rotate, so that the carrier is adsorbed on the carrier. The upper substrates can be spun together to perform semiconductor processing processes such as wet processes.

However, in order to avoid the direct contact between the substrate and the hard stage when the above-mentioned equipment adsorbs the substrate, a buffer material such as a suction cup is usually used for indirect contact; however, although the buffer material such as the suction cup provides better contact with the substrate However, if there is not enough strength support, it is easy to be unable to maintain the adsorption force due to factors such as centrifugal force when it is subjected to rotation, and even cause it to fall off from the substrate.

In view of this, in order to improve and solve the above-mentioned deficiencies, the author of this book has devoted himself to research and the application of academic principles, and finally proposed a book with a reasonable design and effective improvement of the above deficiencies.

The main purpose of the present invention is to provide an adsorption-type rotary stage, which can be sleeved on the rotary stage with better structural strength for adsorption members such as suction cups.

Another object of the present invention is to provide an adsorption-type rotary stage, which further ensures that the substrate can be adsorbed on the rotary stage more stably under the aforementioned better structural strength.

In order to achieve the above-mentioned main purpose, the present invention provides an adsorption-type rotary stage for a substrate to be flatly placed thereon, including a processing table and a rotating component supporting the processing table, the processing table has a flat plate for the substrate The processing surface is placed on the processing surface, and an air-tight groove is recessed on the processing surface, and an air channel for providing negative pressure is arranged in the rotating component, and the air channel is connected with the air-tight groove; wherein, the processing table is provided with an air-tight groove for adsorbing the substrate. and an annular groove is formed on the processing surface, so that the suction member can be inserted into the annular groove and partially exposed on the processing surface.

In order to achieve the above-mentioned other object, the present invention provides an adsorption-type rotary stage. The adsorption member has a set of collar portions disposed in the annular grooves, and a collar portion extending outwardly and exposed to processing. The suction cup part on the surface, and the annular groove is formed with a accommodating part that is gradually expanding from the inside to the outside at its radial periphery, and the accommodating part is relative to the lower part of the suction cup part; The suction cup part of the part is deformed and closely attached to the base plate, so as to achieve the aforementioned purpose and effect.

In order to further disclose the features and technical content of this creation, please refer to the following detailed description and accompanying drawings of this creation. However, the accompanying drawings are only for reference and description, and are not intended to limit this creation.

Please refer to Figure 1, which is a three-dimensional exploded schematic diagram of this creation. The present invention provides an adsorption-type rotary stage, which is suitable for use in a semiconductor device and on which a substrate 3 is placed. The substrate 3 can be a wafer; and the rotary stage includes a processing table 1. and a rotating assembly 2 supporting the processing table 1; wherein:

The processing table 1 has a processing surface 10 for forming the substrate 3, and an airtight groove 11 is recessed on the processing surface 10; The groove 11 has a notch 110 on the processing surface 10, at least one first channel 111 concentrically surrounding the notch 110, and at least one connecting the notch 110 and the first groove The second channel 112 of the channel 111 . The first channels 111 can also be plural and arranged in concentric circles on the processing surface 10 , while the second channels 112 can be radially extended from the notch 110 to connect the first channels 111 , or to connect Between any two concentric first grooves 111 , the airtight grooves 11 recessed on the processing surface 10 can form a communication state.

As shown in FIG. 2 , the rotating assembly 2 is arranged below the processing table 1 to support the processing table 1 in the semiconductor equipment for rotation, and the rotating assembly 2 is provided with an air-tight groove 11 connected to the inside of the rotating assembly 2 . Airway 20, the airway 20 can extend downward along the axial direction of the rotating component 2, and is used to connect a suction device (not shown in the figure) to provide negative pressure; and in the embodiment of the present invention, the rotating component 2. A connecting element 21 penetrates through the processing table 1 and is fixed on the rotating assembly 2. The connecting element 21 can be a bolt and has a through hole 210 passing through the screw head and the screw part. The through hole 210 The screw portion is connected to the air passage 20 , and the through hole 210 forms an opening 211 at the screw head portion to communicate with the slot 110 corresponding to the airtight groove 11 .

Please refer to FIG. 1 and FIG. 2 together. In the present invention, a suction member 12 for sucking the substrate 3 is installed on the processing surface 10 , and a concave annular groove is formed on the processing surface 10 . 100 , so that the adsorption member 12 is inserted into the annular groove 100 and partially exposed on the processing surface 10 . As shown in FIG. 3 , the suction member 12 can be made of a soft material such as silicone or rubber, and has a collar portion 120 and a suction cup extending outward from the collar portion 120 and exposed on the processing surface 10 The collar part 120 is used to be sleeved in the annular groove 100, and a concave edge 100a can be further recessed in the annular groove 100, and the collar part 120 is protrudingly provided with embedded in the concave edge 100a The inner flange 120a is used for the collar portion 120 of the adsorption member 12 to be more tightly fixed in the annular groove 100 .

Continuing the above, as shown in FIG. 4 and FIG. 5 , in the present invention, the annular groove 100 is further formed with a accommodating portion 100b at its radial periphery that is gradually expanding from the inside to the outside. The accommodating portion 100b 100b is opposite to the lower part of the suction cup portion 121 of the above-mentioned suction member 12; accordingly, when the substrate 3 is placed on the processing surface 10, the air passage 20 of the rotating assembly 2 is negatively pressured to the airtight groove 11 on the processing surface 10 The suction force is generated, so that the substrate 3 can be closely attached to the processing surface 10; at the same time, since the suction member 12 is made of a soft material, it can be deformed by the aforementioned suction force, so as to be closely attached to the substrate 3, and due to the deformation Squeeze into the accommodating portion 100b, so as to further maintain its deformed shape through the accommodating portion 100b under the aforementioned premise of being tightly fixed in the annular groove 100, so as to ensure that the substrate 3 can be more stably is adsorbed on the processing surface 10 .

Therefore, with the above-mentioned structure, the adsorption-type rotary stage of the present invention can be obtained.

To sum up, this creation is a rare new creation product, it can indeed achieve the intended purpose of use, and solve the lack of conventional knowledge, and because it is very novel and progressive, it fully meets the requirements for a new type of patent application. If you file an application in accordance with the Patent Law, please check carefully and grant the patent in this case to protect the rights of the creator.

However, the above descriptions are only the preferred feasible embodiments of this creation, and therefore the scope of the patent of this creation is limited. Therefore, any equivalent structural changes made by using the contents of the description and drawings of this creation are similarly included in this publication. Within the scope of creation, I agree to Chen Ming.

＜This creation＞ 1: Processing table 10: Machined surface 100: Annular groove 100a: concave edge 100b: accommodating part 11: Airtight groove 110: Notch 111: The first channel 112: Second channel 12: Adsorber 120: Collar Department 120a: Flange 121: Suction cup part 2: Rotary components 20: Airway 21: Coupling elements 210: Through hole 211: Opening 3: Substrate

Figure 1 is a three-dimensional exploded schematic diagram of this creation.

FIG. 2 is a partial cross-sectional schematic diagram of the non-adsorbed substrate of the present invention.

FIG. 3 is an enlarged detailed view of part A of FIG. 2 .

FIG. 4 is a partial cross-sectional schematic diagram of the adsorption substrate of the present invention.

FIG. 5 is an enlarged detailed view of part A of FIG. 4 .

1: Processing table

100: Annular groove

110: Notch

12: Adsorber

2: Rotary components

20: Airway

21: Coupling elements

210: Through hole

211: Opening

3: Substrate

Claims (10)

An adsorption-type rotating stage for placing a substrate on it, comprising: a processing table, which has a processing surface on which the substrate is placed flat, and an air-tight groove is recessed on the processing surface; and a rotating component supporting the processing table for rotation, and an air channel for providing negative pressure is arranged in the rotating component, and the air channel is communicated with the airtight groove; Wherein, the processing table is provided with a suction member for suctioning the substrate, and an annular groove is formed on the processing surface, so that the suction member can be inserted into the annular groove and partially exposed on the processing surface . The suction-type rotary stage according to claim 1, wherein the airtight groove has a notch on the processing surface, at least one first groove surrounding the notch as a center, and at least a second channel connecting the slot and the first channel. The suction-type rotary stage of claim 2, wherein the second channel extends radially from the slot to connect with the first channel. The suction-type rotary stage according to claim 2 or 3, wherein the first grooves are plural and arranged in concentric circles on the processing surface. The suction-type rotary stage according to claim 4, wherein the second channel is connected between any two of the first channels. The suction-type rotary stage as claimed in claim 1, wherein the rotary assembly penetrates the processing table with a coupling element and is fixed on the rotary assembly. The adsorption-type rotary stage according to claim 6, wherein the coupling element is a bolt, and has a through hole through the screw head and the screw part, the through hole communicates with the air passage from the screw part, and The through hole forms an opening at the screw head portion to communicate with the airtight groove. The suction-type rotary stage as claimed in claim 1, wherein the suction member has a set of collar parts disposed in the annular groove, and a collar part extending outward from the collar part and exposed on the processing surface the suction cup part. The suction-type rotary stage as claimed in claim 8, wherein a accommodating portion that is gradually expanded from the inside to the outside is formed at the radial periphery of the annular groove, and the accommodating portion is opposite to the suction cup portion. below. The suction-type rotary stage according to claim 8 or 9, wherein a concave edge is recessed in the annular groove, and a flange embedded in the concave edge is protruded on the collar portion.

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