TWM628921U - Wafer carrier transportation device - Google Patents

Abstract

The present invention relates to a wafer carrier carrying device. The main structure includes a main body, and the main body is provided with a moving component, a carrier handling component, a carrying platform, a control module, and a navigation module, and the carrying platform is provided with a A suction connector and an inflatable connector. In this way, the user can place the main body in the wafer carrier storage area, and through the navigation module, the main body can be automatically moved to a designated position through the moving component, and cooperate with the control module to control the carrier handling component to When the wafer carrier is placed in a designated area or moved to the carrier platform, the handling action and suction action can be performed, and the effect of multi-functional automation can be achieved.

Description

Wafer Carrier Carrier

The present invention provides a wafer carrier carrier device, especially a wafer carrier carrier device with more complete automation.

According to the press, the wafer carrier is mainly used to store wafers, and because the wafer requirements are quite strict, the requirements for the manufacturing environment and storage environment are also quite high.

Generally, wafer carriers are placed in places that are less prone to chemical changes or cleaner, such as clean rooms. And when it is to be stored, an inert gas will be introduced into the wafer carrier to reduce the possibility of chemical reactions.

Also because the wafer carrier has high requirements for storage and movement, related equipment is used to assist, such as a device for extracting the gas in the wafer carrier, a device for assisting the handling of the wafer carrier, or a device for driving the wafer carrier. A device for the movement of a circular carrier. However, no matter what type of device it is, the function will be relatively single, so when using it, it is necessary to prepare multiple devices for use, which will be troublesome and inconvenient to use.

Therefore, how to solve the above-mentioned conventional problems and deficiencies is the direction that the applicant of the present invention and the relevant manufacturers engaged in this industry are eager to research and improve.

Therefore, in view of the above-mentioned deficiencies, the applicant of this new model has collected relevant information, evaluated and considered from various parties, and based on years of experience accumulated in this industry, through continuous trials and revisions, to design this kind of multi-functional product. Patent holder for a new type of wafer carrier carrier.

The main purpose of the new type is to have the functions of carrying, moving, suction, and automatic navigation at the same time, so as to achieve the effect of multiple functions and improve the convenience of use.

In order to achieve the above purpose, the main structure of the present invention includes: a main body, a a moving component on the main body, a carrier handling component on the main body, a carrying platform on the main body and located at one side of the carrier handling component, a suction connector on the carrying platform, a An inflatable connector on the carrying platform, a control module installed on the main body and connected to the carrier handling component, the air extraction connector, and the inflatable connector, and a navigation device installed on the main body and connected to the moving component module.

With the above structure, the user can place the main body in the storage area of the wafer carrier, and can control the moving component through the navigation module to drive the main body to move, thereby automatically moving to the set position through an automated method, and When reaching this position, the control module will control the carrier transport component to move the wafer carrier, and can place the wafer carrier in the wafer carrier storage area according to the set action, or place the wafer carrier in the wafer carrier storage area. on the carrier platform.

The wafer carrier placed on the carrier platform can extract the internal gas through the gas extraction connector, and then use the gas-filled connector to supplement the inert gas into the wafer carrier to reduce the possibility of chemical changes in the wafer carrier. .

And because the above actions are all achieved by using the control module and the navigation module, it can have various types of use effects in an automated state, so as to improve the convenience and efficiency of use.

With the above-mentioned technology, a breakthrough can be made to solve the problem that the functions of conventional wafer carrier-related devices are relatively single, and the practical progress of the above-mentioned advantages can be achieved.

1, 1a, 1b: main body

11: Intake part

12: Exhaust part

13: Control Department

2, 2a: mobile components

21: Wheel body

22: Power parts

23a: Powertrain

24a: Drive the rod

3: Carrier handling components

31: Vertical drive mechanism

32: Rotate the drive arm

33: Carrier carrier

4: Bearing platform

41: Inflatable connector

42: Exhaust connection

5, 5b: control module

6, 6b: Navigation module

61: Positioning components

62: Control elements

7, 7a: Wafer carrier storage area

8: Wafer carrier

The first figure is a three-dimensional perspective view of the preferred embodiment of the new type.

The second figure is a side view of the new preferred embodiment.

The third figure is a schematic diagram of the movement of the new preferred embodiment.

The fourth figure is a schematic view of the handling of the new preferred embodiment.

The fifth figure is a schematic diagram of the suction gas of the new preferred embodiment.

The sixth figure is a schematic diagram of the placement of the new preferred embodiment.

Fig. 7 is a side view of yet another preferred embodiment of the new model.

Figure 8 is a schematic diagram of the movement of another preferred embodiment of the new model.

The ninth figure is a perspective perspective view of another preferred embodiment of the present invention.

In order to achieve the above purpose and effect, the technical means and structure adopted by the present invention are described in detail with reference to the preferred embodiment of the present invention and its features and functions are as follows, so as to be fully understood.

Please refer to the first and second figures, which are three-dimensional perspective views and side views of the preferred embodiment of the new model. It can be clearly seen from the figures that the new model includes:

a subject 1;

A moving assembly 2 disposed on the main body 1, the moving assembly 2 in this embodiment has a plurality of wheel bodies 21 connected to the main body 1, and a power member 22 that drives the wheel bodies 21 to rotate;

A carrier carrying assembly 3 disposed on the main body 1 , the carrier carrying assembly 3 has a vertical driving mechanism 31 , a rotary driving arm 32 connected to the vertical driving mechanism 31 , and a carrier disposed on the rotary driving arm 32 carrier 33;

a carrying platform 4 arranged on the main body 1 and located at one side of the carrier handling assembly 3;

A suction connector 42 disposed on the carrying platform 4, in this embodiment, the suction connector 42 is the two connecting heads on the carrying platform 4 and the suction gang connecting the connecting heads in this embodiment PU, and will be connected to an exhaust part 12 set on the main body 1;

An inflatable connector 41 provided on the carrying platform 4, in this embodiment, the inflatable connector 41 in this embodiment is the two connecting heads on the carrying platform 4 and the inflatable pump connecting the connecting heads, and will be connected to an air intake 11 provided on the main body 1;

a control module 5 disposed on the main body 1, the control module 5 will be connected with the carrier transport assembly 3, the air extraction connector 42, and the inflation connector 41;

a navigation module 6 disposed on the main body 1 and connected to the mobile component 2, the navigation module 6 has a positioning element 61 and a manipulation element 62 in this embodiment; and

A control part 13 is arranged on the main body 1 and connected with the control module 5 and the navigation module 6 .

Through the above description, the structure of the present technology can be understood, and according to the corresponding cooperation of the structure, the advantages of various application effects can be obtained, and the detailed explanation will be described below.

Please also refer to the first to sixth figures, which are three-dimensional perspective views to placement schematic diagrams of the preferred embodiment of the present invention. The main body 1 moves to a wafer carrier storage area 7 where a plurality of wafer carriers 8 are placed. The user can control the main body 1 through the control unit 13, or directly set the walking route and action in the computer The method is input into the control module 5 and the navigation module 6, so that the main body 1 can operate on its own through the actions set in advance.

When the action is to be started, the navigation module 6 controls the moving component 2 to move the main body 1. The moving method is to rotate the wheel body 21 through the power given by the power member 22 (in this embodiment, a motor is used as an example) to rotate the wheel. The body 21 continues to rotate, thereby allowing the body 1 to move, and stops the power given by the power element 22 at the designated area. In the navigation module 6, the positioning element 61 is used to confirm the position of the body 1, so as to control the position of the body 1 The element 62 (in this embodiment, the control chip provided on the main body 1 is used as an example) controls whether the power element 22 is actuated. In this embodiment, the positioning element 61 is a receiver capable of receiving infrared rays emitted by infrared transmitters at various positions in the wafer carrier storage area 7 , so that an infrared transmitter can be set at each storage point of the wafer carrier 8 . When the positioning element 61 receives one of the infrared transmitters, the operation of the power element 22 is stopped through the control element 62 to achieve the control method of automatic navigation. This positioning method is only an example and not limited.

When the positioning is reached, the control module 5 will control the operation of the carrier handling assembly 3, and the vertical driving mechanism 31 in the carrier handling assembly 3 will first drive the rotating driving arm 32 to move vertically to the corresponding position, so as to rotate the driving arm 32 Drive the carrier carrier 33 to move, thereby moving the wafer carrier 8 to a set position, for example, to the storage area in the wafer carrier storage area 7, or to the carrier platform 4, to Let the main body 1 carry out the conveying operation.

In this embodiment, the wafer carrier 8 is first placed on the carrier platform 4 via the carrier transport assembly 3 to move the main body 1 to another placement area as an example. And after moving to a fixed position, the gas in the wafer carrier 8 will be extracted through the gas extraction connector 42 and discharged at the exhaust part 12, and then the gas will be replenished into the wafer carrier 8 through the gas filling connector 41, and The gas supplemented into the wafer carrier 8 can be selected from the inert gas originally stored in the main body 1 or the gas introduced into the wafer carrier 8 through the air inlet 11 to the outside. When moving to the storage position, the carrier handling assembly 3 will move the wafer carrier 8 to the storage area to perform the storage operation.

In this way, through the above-mentioned actions, the wafer carrier 8 can be transported in a fully automated manner through the control module 5 and the navigation module 6, and after being transported to the main body 1, the wafer carrier 8 has the function of exhausting gas, so as to achieve full Automatic multi-function effects, thereby increasing the efficiency of use.

Please also refer to Figure 7 and Figure 8 together, which are a side view and a moving schematic diagram of another preferred embodiment of the new model. It can be clearly seen from the figures that this embodiment is similar to the above-mentioned embodiment. Only in this embodiment, the moving component 2a has a plurality of powers connected to the main body 1a The mechanism 23a and the driving rod body 24a connected to the power mechanism 23a, and the driving rod body 24a is a sliding rod disposed on the upper side of the wafer carrier storage area 7a, and the power mechanism 23a is a rotating wheel set connected to the sliding rod, and is In this embodiment, when the main body 1a needs to be moved, the rollers in the power mechanism 23a will rotate, thereby driving the power mechanism 23a to directly move the driving rod body 24a, and at the same time driving the main body 1a to move. The main body 1a is driven to move by the moving component 2a in the same manner, which means that the type of the moving component 2a is not limited.

Please also refer to the ninth figure, which is a three-dimensional perspective view of another preferred embodiment of the new model. It can be clearly seen from the figure that this embodiment is similar to the above-mentioned embodiment, and only in this embodiment , the structure of the control part on the main body 1b is canceled, and the user can directly input the work that needs to be walked and actuated into the control module 5b and the navigation module 6b through the remote connection, and suck out the wafer carrier. to achieve the function of automatically running to the fixed position to perform the action of pumping and ventilating, and the shape of the main body 1b is not limited.

However, the above descriptions are only the preferred embodiments of the present invention, and therefore limit the scope of the patent of the present invention. Therefore, any simple modifications and equivalent structural changes made by using the contents of the description and drawings of the present invention shall be the same. Included in the scope of the patent of this new model, it is hereby stated.

To sum up, in order to achieve the function and purpose of the wafer carrier carrier device of the present invention, the present invention is a creation with excellent practicability. In order to meet the application requirements for a new patent, an application shall be filed in accordance with the law. , I hope that the review committee will approve this new model as soon as possible to protect the hard work of the creators. If the review committee has any doubts, please do not hesitate to send a letter for instructions, and the creators will do their best to cooperate.

1: main body

13: Control Department

2: Mobile Components

31: Vertical drive mechanism

32: Rotate the drive arm

33: Carrier carrier

4: Bearing platform

41: Inflatable connector

42: Exhaust connection

5: Control module

6: Navigation module

61: Positioning components

62: Control elements

Claims (9)

A wafer carrier carrying device mainly includes: a subject; a moving component, which is arranged on the main body and is used for moving the main body; a carrier handling component, the carrier handling component is arranged on the main body for moving the wafer carrier; a carrying platform, the carrying platform is arranged on the main body and is located at one side of the carrier handling assembly; an air extraction connector, the air extraction connector is arranged on the carrier platform for sucking gas in the wafer carrier on the carrier platform; a gas-filled connecting piece, the gas-filled connecting piece is arranged on the carrying platform for the supplementary gas to enter into the wafer carrier on the carrying platform; a control module, the control module is arranged on the main body, and is connected with the carrier handling assembly, the air extraction connector, and the inflation connector; and a navigation module, which is arranged on the main body and connected with the moving component. The wafer carrier carrying device as described in claim 1, wherein the moving component has a plurality of wheel bodies connected to the main body, and a power element for driving the wheel bodies to rotate. The wafer carrier carrying device as described in claim 1, wherein the moving component has a plurality of power mechanisms connected to the main body, and a driving rod body connected to the power mechanism. The wafer carrier carrying device as described in claim 1, wherein the carrier carrying assembly has a vertical driving mechanism, a rotary driving arm connected to the vertical driving mechanism, and a rotary driving arm disposed on the rotary driving arm Carrier carrier. The wafer carrier carrying device as described in claim 1, wherein the main body is disposed in a wafer carrier storage area. The wafer carrier carrying device as described in claim 1, wherein the navigation module has a positioning element and a manipulation element connected to the positioning element. The wafer carrier carrying device as described in claim 1, wherein the air exhaust connection member is connected with an air exhaust portion. The wafer carrier carrying device as described in claim 1, wherein the gas-filled connecting member is connected with an air inlet. The wafer carrier carrying device as described in claim 1, wherein the main body is provided with a control part.

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