JPS6225319Y2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a grinding apparatus for grinding the outer periphery of a workpiece made of, for example, a wafer, a semiconductor material, a lens, or the like.

A conventional device of this type is constructed as shown in FIG.

That is, the workpiece M is held in a sandwiched state by a pair of upper and lower holders 1 and 2, and is configured to rotate together with these holders 1 and 2. The outer periphery of the workpiece M that rotates together with the holders 1 and 2 is ground by a grindstone 4 that rotates together with the rotating shaft 3. In addition, holders 1 and 2
A transport arm 6 having an air suction section 5 below is provided as a mechanism for carrying in and transporting the workpiece M, and the workpiece M is held under suction by the suction section 5 below the transport arm 6. transported by

However, in the conventional apparatus described above, it is necessary to make one reciprocation of the transfer arm 6 when carrying the unground workpiece M into the holders 1 and 2, and the ground workpiece M is transferred from the holders 1 and 2. When carrying out, the transfer arm 6 needs to make one more reciprocation. That is, in order to grind one workpiece M, the transfer arm 6 has to make two reciprocating movements, which has the drawback of poor working efficiency.

One possible way to improve the work efficiency is to speed up the rotation of the grindstone 4. However, if the rotation of the grindstone 4 is made faster than a certain speed, chipping will occur.

This invention was made in view of the above circumstances.
An object of the present invention is to provide a grinding device that can improve work efficiency without increasing the rotation speed of a grindstone by configuring the workpiece to be carried in and out of a holder in one reciprocating motion of a transfer arm. shall be.

Hereinafter, an embodiment of the grinding device according to the present invention will be described in detail with reference to FIGS. 2 and 3.

In FIG. 2, a plate-shaped workpiece M made of a wafer, a semiconductor material, a lens, etc. is held between a pair of upper and lower holders 11 and 12 and rotated. A pair of holders 11,1
2, the upper holder 11 holds the workpiece M.
A suction portion 11a is formed to suction and hold.
The suction portion 11a is composed of a hollow portion and a plurality of through holes communicating downward from the hollow portion. The hollow part of the suction part 11a is an air pipe 35.
The workpiece 1 is connected to a control section 34 by means of the control section 34, and is configured to suction and hold the workpiece 1 as appropriate through air pressure control by the control section 34.

Moreover, each holder 11, 12 has a rotating shaft 1, respectively.
3 and 14, and these rotating shafts 1
3 and 14 are supported by supports 15 and 16 so as to be rotatable and not to slide in the axial direction. Each of the holders 11 and 12 is configured to rotate together with rotating shafts 13 and 14 that are rotationally driven by a motor 17 serving as a driving means. That is, the rotational force of the motor 17 is transmitted through the gears 18 and 19, the rotation transmission shaft 20, and the pulleys 21 and 2.
2 and a belt 23 to the rotating shaft 11, and is also transmitted to the rotating shaft 12 via gears 18, 19, a rotation transmitting shaft 20, pulleys 24, 25, and a belt 26. Pulley 2
5 rotates integrally with the rotating shaft 14, but is configured to be slidable on the rotating shaft 14 in the axial direction.

Teeth 16a are formed along the vertical direction on one side of the support body 16, and a pinion 27 meshes with the teeth 16a. And pinion 27
A rack 28 meshes with the rack 28, and the rack 28 is configured to be moved up and down by an air cylinder 29 connected to a control unit 34 via an air pipe 36. Therefore, the lower retainer 12
When the rack 28 is lowered, the rotating shaft 14
and the upper holder 1 that rises together with the support 16
1, and as the rack 28 rises, it descends and is sufficiently separated from the holder 11 above.

The transfer arm 31 that carries the workpiece M into and out of the holders 11 and 12 is reciprocated by an arm drive unit 30 equipped with, for example, a motor or an air cylinder whose pneumatic pressure is controlled by a control unit 34. It is composed of A holding section 32 for holding the workpiece M is provided above the tip of the transfer arm 31, and a suction section 33 for holding the workpiece M by suction is provided below the tip. This suction portion 33 has a hollow portion and a plurality of through holes communicating downward from the hollow portion. The hollow portion of the suction section 33 is connected to a control section 34 by an air pipe 37, and is configured to appropriately suction and hold the workpiece M by controlling the air pressure by the control section 34.

As described above, the suction part 11a of the holder 11, the air cylinder 29, and the suction part 3 of the transfer arm 31
The control unit 34 that controls each of the air pressures of the air pumps 3 includes a compressor and a vacuum pump, and also includes a sequence circuit that controls the operating order of the entire device. Note that 38 is a grindstone that rotates together with the rotating shaft 39, and is used to grind the outer periphery of the workpiece M that rotates while being held between the holders 11 and 12.

Next, the operation of the above grinding device will be explained with reference to FIGS. 2 and 3.

First, as shown in FIG. 3A, the first workpiece _M1 is placed on the holder 32 of the transport arm 31 and carried to a position between the holders 11 and 12 which are separated from each other. As shown in FIG. 3B, the carried workpiece M ₁ is suctioned and held on the upper holder 11 by the suction part 11a, and then transferred to the transport arm 31.
returns to its original position. And air cylinder 29
When the rack 28 is lowered, the lower holder 12 is raised, and the workpiece _M1 is held between the upper and lower holders 11 and 12 and sucked as shown in FIG. The suction by the portion 11a is released. In this state, the workpiece M ₁ rotates together with the holders 11 and 12, and its outer periphery is ground by the grindstone 38.

When the grinding is completed, as shown in FIG. 3D, the first workpiece _M1 is sucked and held by the suction part 11a again on the upper holder 11, and the rack 28 is raised by the air cylinder 29, so that the first workpiece M1 is moved downward. The holder 12 is separated from the holder 11 above. At the same time, the second workpiece M ₂ is suction-held by the suction portion 33 of the transport arm 31 and carried between the holders 11 and 12. Then, as shown in FIG. 3E, the suction of the first workpiece M1 by the suction part _11a of the holder 11 and the suction of the second workpiece M2 by the suction part ₃₃ of the transfer arm 31 are both released. be done. As a result, the first workpiece M ₁ is transferred to the holding part 3 of the transfer arm 31
2 and carried out, the second workpiece
M ₂ is placed on the lower holder 12 and rises together with the holder 12, and is held between it and the upper holder 11 and ground.

When the grinding of the second workpiece M ₂ is completed, the lower holder 12 is lowered as shown in FIG. 3F, and the transfer arm 31 holds the third workpiece M ₃ on the holder 32. It is carried in between the tools 11 and 12. The third workpiece M ₃ is sucked and held by the upper holder 11 by the suction part 11 a, and the second workpiece M ₂ is held by the suction part 33 by the transfer arm 31. It will be carried out. The third workpiece M ₃ is held by suction on the upper holder by the suction part 11a.
As the lower holder 12 rises, the holder 11,
It is ground while being held between 12.

Thereafter, by sequentially grinding the workpieces M in the same manner, the desired number of workpieces M
Grinding is completed.

In addition, in the above embodiment, the upper holder 1
Although the suction parts 11a and 33 for the workpiece M are provided only on the lower side of the lower holder 12 and the transport arm 31, that is, on the upper side of the lower holder 12 and the transport arm 31, that is, on the holding part 32, they are also provided on the lower side of the holder 12 and the transport arm 31, that is, on the holding part It can also be configured to hold M more reliably.

In the grinding device according to the present invention, as described above, of the pair of upper and lower holders 11 and 12, the upper holder 11 is provided with the suction part 11a for suctioning and holding the workpiece M, and furthermore, the upper part of the transport arm 31 is provided with the suction part 11a for holding the workpiece M. A holding section 32 for holding the piece M is provided, and a suction section 33 for holding the workpiece M by suction is provided below. Therefore, the workpiece M can be loaded and unloaded into and out of the holders 11 and 12 at the same time in one reciprocating motion of the transport arm 31, so that work efficiency can be improved without increasing the rotation speed of the grindstone 38. .

[Brief explanation of the drawing]

Figure 1 shows the main parts of a conventional grinding device, Figure 2 shows the main parts of a conventional grinding device.
The figure and FIG. 3 show an embodiment of the present invention.
Figure 2 shows the entire grinding device, Figure 3 A to F
FIG. 2 is a schematic diagram of main parts showing an operating state. 11, 12...Holder, 10a, 33...Adsorption part, 17...Motor, 31...Transport arm, 32
...Holding part, 38... Grindstone, M... Workpiece.

Claims (1)

[Scope of utility model registration request] A pair of upper and lower holders that clamp and hold a workpiece, a drive means that rotates the holders, a grindstone that grinds the outer periphery of the rotating workpiece, and a workpiece that is carried into and out of the holders. In the grinding apparatus, the upper holder is provided with a suction part that holds the workpiece by suction, and the upper part of the transport arm is provided with a holding part that holds the workpiece. A grinding device characterized in that a suction section is provided below to suction and hold a workpiece.