TWI815192B - Wafer carrier carrier - Google Patents

Abstract

The invention relates to a wafer carrier carrying device. The main structure includes a main body. The main body is provided with a moving component, a carrier transporting component, a carrying platform, a control module, and a navigation module. The carrying platform is provided with a A suction connecting piece and an inflating connecting piece. With this, the user can place the main body in the wafer carrier storage area, and use the navigation module to allow the main body to automatically move to a designated position through the moving component, and cooperate with the control module to control the carrier handling component to move the wafer carrier. The wafer carrier is placed in a designated area or moved to the carrying platform, and can carry out transportation and air suction actions, thereby achieving multi-functional automation effects.

Description

Wafer carrier carrier

The present invention provides a wafer carrier carrying device, in particular, a more automated and complete wafer carrier carrying device.

According to reports, wafer carriers are mainly used to store wafers. Since the requirements for wafers are quite strict, the requirements for the manufacturing environment and storage environment are also quite high.

Generally speaking, the wafer carrier is placed in a place that is less prone to chemical changes or is relatively clean, such as a clean room. And when it is stored, inert gas will be introduced into the wafer carrier to reduce the possibility of chemical reactions.

Because wafer carriers have high requirements for storage and movement, relevant equipment is used to assist, such as devices for extracting gas from the wafer carrier, devices for assisting in transporting the wafer carrier, or devices for driving the wafer carrier. A device for moving circular carriers. However, no matter what type of device it is, its function will be relatively single. Therefore, when using it, you need to prepare multiple devices for use, which will be more troublesome and inconvenient to use.

Therefore, how to solve the above conventional problems and deficiencies is an urgent research and improvement direction that the applicant of the present invention and related manufacturers engaged in this industry want to research and improve.

Therefore, in view of the above shortcomings, the inventor of the present invention collected relevant information, evaluated and considered many aspects, and used his many years of experience in this industry to design such a device with diversified functions through continuous trials and modifications. Inventor and patentee of wafer carrier carrying device.

The main purpose of the present invention is to simultaneously have the technology of carrying, moving, pumping air, and automatic navigation to achieve multi-functional effects and improve the convenience of use.

In order to achieve the above object, the main structure of the present invention includes: a main body, a a moving component on the main body, a carrier handling component provided on the main body, a carrying platform provided on the main body and located on one side of the carrier carrying component, an air extraction connector provided on the carrying platform, and a An inflatable connector on the carrying platform, a control module located on the main body and connected to the vehicle handling component, the air extraction connector, and the inflatable connector, and a navigation module located on the main body and connected to the moving component Mods.

With the above structure, the user can place the main body in the wafer carrier storage area, and can use the navigation module to control the mobile component to drive the main body to move, thereby automatically moving to the set position, and When reaching this position, the control module will control the carrier transport component to move the wafer carrier. It can place the wafer carrier in the wafer carrier storage area according to the set action, or place the wafer carrier in the wafer carrier storage area. on the carrying platform.

The wafer carrier placed on the carrying platform can extract the internal gas through the air extraction connector, and then use the inflatable connector to supplement the inert gas into the wafer carrier to reduce the possibility of chemical changes in the wafer carrier. .

And since the above-mentioned actions are all achieved by the control module and the navigation module, it can have various types of use effects in an automated state to improve the convenience and efficiency of use.

Through the above-mentioned technology, it is possible to overcome the problem of relatively single functionality of conventional wafer carrier-related devices and achieve the practical advancement of the above-mentioned advantages.

1, 1a, 1b: Subject

11: Air intake part

12:Exhaust part

13:Control Department

2. 2a: Mobile components

21: Wheel body

22: Power parts

23a: Power mechanism

24a: Drive the rod body

3: Vehicle handling components

31: Vertical driving mechanism

32: Rotating drive arm

33:Vehicle carrying parts

4: Bearing platform

41:Inflatable connector

42:Exhaust connection piece

5. 5b: Control module

6, 6b: Navigation module

61: Positioning component

62:Control components

7. 7a: Wafer carrier storage area

8:Wafer carrier

The first figure is a three-dimensional perspective view of a preferred embodiment of the present invention.

The second figure is a side view of a preferred embodiment of the present invention.

The third figure is a schematic diagram of the movement of the preferred embodiment of the present invention.

The fourth figure is a schematic diagram of the transportation of the preferred embodiment of the present invention.

The fifth figure is a schematic diagram of air suction in a preferred embodiment of the present invention.

Figure 6 is a schematic diagram of the placement of the preferred embodiment of the present invention.

The seventh figure is a side view of yet another preferred embodiment of the present invention.

Figure 8 is a schematic diagram of movement of yet another preferred embodiment of the present invention.

Figure 9 is a three-dimensional perspective view of another preferred embodiment of the present invention.

In order to achieve the above-mentioned objects and effects, the technical means and structures adopted by the present invention are described in detail below with respect to the preferred embodiments of the present invention, so as to facilitate a complete understanding.

Please refer to the first and second figures, which are three-dimensional perspective views and side views of the preferred embodiment of the present invention. It can be clearly seen from the figures that the present invention includes:

a subject 1;

A moving component 2 provided on the main body 1. The moving component 2 in this embodiment has a plurality of wheel bodies 21 connected to the main body 1, and power parts 22 that drive the wheel bodies 21 to rotate;

A carrier handling assembly 3 is provided on the main body 1. The carrier handling assembly 3 has a vertical driving mechanism 31, a rotating driving arm 32 connected to the vertical driving mechanism 31, and a carrier provided on the rotating driving arm 32. Bearing member 33;

A carrying platform 4 provided on the main body 1 and located on one side of the carrier handling assembly 3;

An air extraction connector 42 is provided on the bearing platform 4. In this embodiment, the air extraction connector 42 is two connectors provided on the bearing platform 4 and an air extraction port connecting the connectors. Pu, and will be connected to an exhaust part 12 provided on the main body 1;

An inflatable connector 41 provided on the load-bearing platform 4. In this embodiment, the inflatable connector 41 is an inflatable pump with two connectors and connecting connectors provided on the load-bearing platform 4, and It will be connected to an air inlet 11 provided on the main body 1;

A control module 5 provided on the main body 1, the control module 5 will be connected to the vehicle handling component 3, the air extraction connector 42, and the inflation connector 41;

A navigation module 6 provided on the main body 1 and connected to the mobile component 2. In this embodiment, the navigation module 6 has a positioning element 61 and a control element 62; and

A control unit 13 is provided on the main body 1 and connected to the control module 5 and the navigation module 6 .

Through the above description, the structure of this technology can be understood, and according to the corresponding cooperation of this structure, it can have the advantage of diversified use effects, and the detailed explanation will be explained below.

Please also refer to the first to sixth figures, which are three-dimensional perspective views and placement diagrams of the preferred embodiments of the present invention. When assembled by the above components, it can be clearly seen from the figures that the user can The main body 1 moves to a wafer carrier storage area 7 where multiple wafer carriers 8 are placed. The user can control the main body 1 through the control unit 13, or directly set the walking route and actions in the computer. The method is input into the control module 5 and the navigation module 6, so that the main body 1 can move on its own through preset actions.

When the action is to be started, the moving component 2 is controlled through the navigation module 6 to move the main body 1. The movement method is to rotate the wheel body 21 through the power given by the power component 22 (a motor is used as an example in this embodiment) to rotate the wheel. The body 21 continues to rotate, thereby allowing the main body 1 to move and stop the power given by the power component 22 at a designated area. In the navigation module 6, the position of the main body 1 will be confirmed through the positioning element 61 to control the The component 62 (this embodiment takes the control chip provided on the main body 1 as an example) controls whether the power component 22 is activated. In this embodiment, the positioning element 61 is a receiver that can receive infrared rays emitted by the infrared ray emitters at each position of the wafer carrier storage area 7 . In this way, an infrared ray transmitter can be provided at each storage point of the wafer carrier 8 When the positioning component 61 receives one of the infrared emitters, it stops the power component 22 through the control component 62 to achieve an automatic navigation control method. This positioning method is only an example and is not limiting.

When the positioning is reached, the control module 5 will control the movement of the carrier handling assembly 3. The vertical driving mechanism 31 in the carrier handling assembly 3 will first drive the rotating driving arm 32 to move vertically to the corresponding position, so as to pass the rotating driving arm 32 The carrier carrier 33 is driven to move, thereby moving the wafer carrier 8 to a set position, for example, to the storage area in the wafer carrier storage area 7, or to the carrier platform 4. Let main body 1 perform the carrying action.

In this embodiment, for example, the wafer carrier 8 is first placed on the carrying platform 4 through the carrier transport assembly 3, and then the main body 1 is moved to another placement area. And after moving to a fixed position, the gas in the wafer carrier 8 will be extracted through the air extraction connector 42 and discharged from the exhaust part 12, and then the gas will be replenished into the wafer carrier 8 through the inflation connector 41, and The gas replenished into the wafer carrier 8 can be selected from the inert gas originally stored in the main body 1 or the gas introduced from the outside through the air inlet 11 into the wafer carrier 8 . When moving to the storage position, the carrier transport assembly 3 will move the wafer carrier 8 to the storage area to perform the storage operation.

Through the above-mentioned actions, the wafer carrier 8 can be transported in a fully automated manner through the control module 5 and the navigation module 6, and has the function of exhausting the air after being transported to the main body 1, so as to achieve a fully automated operation. Automated multi-functional effects, thereby increasing efficiency in use.

Please refer to the seventh and eighth figures at the same time, which are side views and movement diagrams of yet another preferred embodiment of the present invention. It can be clearly seen from the figures that this embodiment is similar to the above-mentioned embodiment. In this embodiment only, the moving component 2a has a plurality of power units connected to the main body 1a. mechanism 23a, and a driving rod 24a connected to the power mechanism 23a, and the driving rod 24a is a sliding rod provided on the upper side of the wafer carrier storage area 7a, and the power mechanism 23a is a rotating wheel set connected to the sliding rod, and in In this embodiment, when the main body 1a needs to be moved, the roller in the power mechanism 23a will rotate, thereby driving the power mechanism 23a to move directly on the driving rod 24a, and at the same time driving the main body 1a to move, so that the power mechanism 23a can be moved through this The moving component 2a is used to drive the main body 1a to move, indicating that the type of the moving component 2a is not limited.

Please also refer to the ninth figure, which is a three-dimensional perspective view of another preferred embodiment of the present invention. It can be clearly seen from the figure that this embodiment is similar to the above-mentioned embodiment, only in this embodiment , the structure of the control part on the main body 1b is cancelled, and the user can directly enter the work requiring walking and movement into the control module 5b and the navigation module 6b through remote connection, and then suck out the wafer carrier. of gas to achieve the function of automatically running to a fixed position for air extraction, and indicates that there is no limit to the shape of the main body 1b.

However, the above descriptions are only preferred embodiments of the present invention, and do not limit the patent scope of the present invention. Therefore, any simple modifications and equivalent structural changes made by using the description and drawings of the present invention should be treated in the same way. It is included in the patent scope of the present invention and is hereby stated.

To sum up, the wafer carrier carrying device of the present invention can indeed achieve its effect and purpose when used. Therefore, the present invention is an invention with excellent practicality and meets the application requirements for an invention patent. The application should be filed in accordance with the law. , I hope that the review committee will approve the invention as soon as possible to protect the inventor's hard work. If the review committee of the Jun Bureau has any doubts, please feel free to send a letter for instructions. The inventor will try his best to cooperate, which will be greatly appreciated.

1:Subject

13:Control Department

2:Mobile components

31: Vertical driving mechanism

32: Rotating drive arm

33:Vehicle carrying parts

4: Bearing platform

41:Inflatable connector

42:Exhaust connection piece

5:Control module

6: Navigation module

61: Positioning component

62:Control components

Claims (9)

A wafer carrier carrying device mainly includes: a subject; A moving component, which is provided on the main body and is used for moving the main body; A carrier handling component, the carrier handling component is provided on the main body for moving the wafer carrier; A load-bearing platform, the load-bearing platform is provided on the main body and located on one side of the vehicle handling component; An air extraction connector, the air extraction connector is provided on the carrying platform for absorbing gas in the wafer carrier on the carrying platform; An inflatable connector, the inflatable connector is provided on the carrying platform to allow supplementary gas to enter the wafer carrier on the carrying platform; A control module located on the main body and connected to the vehicle handling component, the air extraction connector, and the inflatable connector; and A navigation module is provided on the main body and connected with the mobile component. For example, in the wafer carrier carrying device described in item 1 of the patent application, the moving component has a plurality of wheels connected to the main body and a power component that drives the wheels to rotate. In the wafer carrier carrying device described in item 1 of the patent application, the moving component has a plurality of power mechanisms connected to the main body and a driving rod connected to the power mechanisms. The wafer carrier carrying device described in item 1 of the patent application, wherein the carrier carrying component has a vertical driving mechanism, a rotating driving arm connected to the vertical driving mechanism, and a rotating driving arm provided on the rotating driving arm. Vehicle carrier. For the wafer carrier carrying device described in item 1 of the patent application, the main body is located in a wafer carrier storage area. For the wafer carrier carrying device described in item 1 of the patent application, the navigation module has a positioning element and a control element connected to the positioning element. For example, in the wafer carrier carrying device described in item 1 of the patent application, the air extraction connector is connected to an exhaust part. For the wafer carrier carrying device described in item 1 of the patent application, the inflatable connector is connected to an air inlet. For the wafer carrier carrying device described in item 1 of the patent application, the main body is provided with a control part.

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