TWM611036U - Pixel structure - Google Patents
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本新型創作是有關於一種畫素結構,且特別是有關於一種用於半穿反顯示面板的畫素結構。This new creation is about a pixel structure, and especially about a pixel structure used for a half-through display panel.
在習知的半穿反顯示面板中,定義出穿透區的方式是藉由選出一塊特定區域以使反射電極、第一金屬層以及第二金屬層在此特定區域被移除而形成;然而,用於形成第一儲存電極的第一金屬層以及用於形成第二儲存電極的第二金屬層將因此種穿透區的定義方式而被移除而造成其面積縮減。因此,此穿透區的定義方式將造成顯示面板的一個畫素結構中的儲存電容降低,進而使顯示面板的電壓穩定性下降。In the conventional semi-transmissive display panel, the way to define the penetration area is to select a specific area so that the reflective electrode, the first metal layer, and the second metal layer are removed in the specific area; however, , The first metal layer used to form the first storage electrode and the second metal layer used to form the second storage electrode will be removed by this way of defining the penetration area, resulting in a reduction in their area. Therefore, the way of defining the penetrating area will cause the storage capacitance in a pixel structure of the display panel to be reduced, thereby reducing the voltage stability of the display panel.
本新型創作提供一種畫素結構,其具有的儲存電容經提升而可儲存具有較大的電壓,藉此具有良好的電性。The present invention provides a pixel structure, which has a storage capacitor that can be upgraded to store a larger voltage, thereby having good electrical properties.
本新型創作的一實施例的畫素結構,具有穿透區以及反射區,且包括基板、第一金屬層、第一絕緣層、第二金屬層、第二絕緣層、平坦層、畫素電極以及反射電極。第一金屬層設置於基板上且包括多個第一圖案化區域以及第一儲存電極。第一絕緣層設置於基板上且覆蓋第一金屬層。第二金屬層設置於第一絕緣層上且包括多個第二圖案化區域以及第二儲存電極。第二絕緣層設置於第一絕緣層上且覆蓋第二金屬層。平坦層設置於第二絕緣層上。畫素電極設置於平坦層上且藉由貫穿第二絕緣層與平坦層的接觸窗與第二金屬層電性連接。反射電極設置於畫素電極上且包括多個第三圖案化區域。多個第三圖案化部份在基板的法線方向上與多個第一圖案化區域和多個第二圖案化區域重疊的區域實質對應,以定義出穿透區。The pixel structure of an embodiment of the present invention has a penetration area and a reflection area, and includes a substrate, a first metal layer, a first insulating layer, a second metal layer, a second insulating layer, a flat layer, and a pixel electrode And the reflective electrode. The first metal layer is disposed on the substrate and includes a plurality of first patterned regions and first storage electrodes. The first insulating layer is disposed on the substrate and covers the first metal layer. The second metal layer is disposed on the first insulating layer and includes a plurality of second patterned regions and second storage electrodes. The second insulating layer is disposed on the first insulating layer and covers the second metal layer. The flat layer is disposed on the second insulating layer. The pixel electrode is disposed on the flat layer and is electrically connected to the second metal layer through a contact window penetrating the second insulating layer and the flat layer. The reflective electrode is disposed on the pixel electrode and includes a plurality of third patterned regions. The plurality of third patterned portions substantially correspond to the overlapping regions of the plurality of first patterned regions and the plurality of second patterned regions in the normal direction of the substrate, so as to define a penetration region.
在本新型創作的一實施例中,上述的穿透區由反射電極所定義出。In an embodiment of the present invention, the above-mentioned penetration area is defined by the reflective electrode.
在本新型創作的一實施例中,上述的穿透區由第一金屬層所定義出。In an embodiment of the present invention, the above-mentioned penetration area is defined by the first metal layer.
在本新型創作的一實施例中,上述的穿透區由第二金屬層所定義出。In an embodiment of the present invention, the above-mentioned penetration area is defined by the second metal layer.
在本新型創作的一實施例中,上述的畫素結構更包括設置於第二絕緣層與平坦層之間的第三金屬層,其中穿透區由第三金屬層所定義出。In an embodiment of the present invention, the above-mentioned pixel structure further includes a third metal layer disposed between the second insulating layer and the flat layer, wherein the penetration area is defined by the third metal layer.
在本新型創作的一實施例中,上述的穿透區由反射電極以及第一金屬層所定義出。In an embodiment of the present invention, the above-mentioned penetration area is defined by the reflective electrode and the first metal layer.
在本新型創作的一實施例中,上述的穿透區由反射電極以及第二金屬層所定義出。In an embodiment of the present invention, the above-mentioned penetration area is defined by the reflective electrode and the second metal layer.
在本新型創作的一實施例中,上述的穿透區由反射電極、第一金屬層、第二金屬層以及第三金屬層所定義出。In an embodiment of the present invention, the above-mentioned penetrating area is defined by the reflective electrode, the first metal layer, the second metal layer, and the third metal layer.
在本新型創作的一實施例中,上述的畫素結構具有第一灰階顯示區以及第二灰階顯示區,第一灰階顯示區包括一個第一顯示區塊,且第二灰階顯示區包括兩個第二顯示區塊。In an embodiment of the present invention, the above-mentioned pixel structure has a first gray-scale display area and a second gray-scale display area, the first gray-scale display area includes a first display area, and the second gray-scale display area The area includes two second display areas.
在本新型創作的一實施例中,上述的在定義出多個第一圖案化區域時用作第一儲存電極的第一金屬層未有其他區域被移除,且在定義出多個第二圖案化區域時用作第二儲存電極的第二金屬層未有其他區域被移除。In an embodiment of the present invention, no other areas of the first metal layer used as the first storage electrode are removed when a plurality of first patterned regions are defined, and a plurality of second patterned regions are defined. No other areas of the second metal layer used as the second storage electrode are removed when the area is patterned.
基於上述,本新型創作的畫素結構藉由使在定義出多個第一圖案化區域時用作第一儲存電極的第一金屬層未有其他區域被移除,且在定義出多個第二圖案化區域時用作第二儲存電極的第二金屬層未有其他區域被移除,本新型創作的畫素結構可不縮減用於形成第一儲存電極的第一金屬層以及用於形成第二儲存電極的第二金屬層的面積以作為穿透區。在此情況下,本新型創作的顯示面板的一個畫素結構中具有的儲存電容可提升而可儲存具有較大的電壓,藉此具有良好的電性。Based on the above, the pixel structure created by the present invention prevents other areas of the first metal layer used as the first storage electrode from being removed when defining multiple first patterned areas, and defines multiple first patterned areas. In the second patterning area, the second metal layer used as the second storage electrode is not removed from other areas. The pixel structure created by the present invention does not reduce the first metal layer used to form the first storage electrode and the first metal layer used to form the second storage electrode. The area of the second metal layer of the two storage electrodes serves as a penetration area. In this case, the storage capacitor in one pixel structure of the display panel created by the present invention can be increased to store a larger voltage, thereby having good electrical properties.
以下將參照本實施例之圖式以更全面地闡述本新型創作。然而,本新型創作亦可以各種不同的形式體現,而不應限於本文中所述之實施例。圖式中的層與區域的厚度會為了清楚起見而放大。相同或相似之參考號碼表示相同或相似之元件,以下段落將不再一一贅述。另外,實施例中所提到的方向用語,例如:上、下、左、右、前或後等,僅是參考附加圖式的方向。因此,使用的方向用語是用來說明並非用來限制本新型創作。The following will describe the creation of the new type more comprehensively with reference to the drawings of this embodiment. However, the new creation can also be embodied in a variety of different forms, and should not be limited to the embodiments described herein. The thickness of the layers and regions in the drawing will be exaggerated for clarity. The same or similar reference numbers indicate the same or similar elements, and the following paragraphs will not repeat them one by one. In addition, the directional terms mentioned in the embodiments, for example: up, down, left, right, front or back, etc., are only directions for referring to the attached drawings. Therefore, the directional terms used are used to illustrate and not to limit the creation of the new model.
圖1A為本新型創作的第一實施例的畫素結構的俯視示意圖。圖1B為圖1A中的剖線A-A’的剖面示意圖。圖1C為本新型創作的第一實施例的畫素結構的穿透區與反射區的示意圖。FIG. 1A is a schematic top view of the pixel structure of the first embodiment of the new creation. Fig. 1B is a schematic cross-sectional view of the section line A-A' in Fig. 1A. FIG. 1C is a schematic diagram of the penetration area and the reflection area of the pixel structure of the first embodiment of the new creation.
請同時參照圖1A、圖1B以及圖1C,本實施例的畫素結構10包括基板SB、第一金屬層M1、第一絕緣層IL1、第二金屬層M2、第二絕緣層IL2、畫素電極PE以及反射電極RE。基板SB例如為可撓性基板,其可為聚合物基板或塑膠基板,但本新型創作不限於此。在其他實施例中,基板SB也可例如為剛性基板,其可為玻璃基板、石英基板或矽基板。1A, 1B and 1C, the
第一金屬層M1例如設置於基板SB上。第一金屬層M1的形成方法例如是利用物理氣相沉積法或金屬化學氣相沉積法後再進行微影蝕刻製程而形成。舉例來說,可先利用物理氣相沉積法或金屬化學氣相沉積法於基板SB上形成第一金屬材料層(未繪示)。接著,於第一金屬材料層上形成圖案化光阻層(未繪示)。之後,以圖案化光阻層為罩幕,對第一金屬材料層進行蝕刻製程,以形成第一金屬層M1。The first metal layer M1 is provided on the substrate SB, for example. The first metal layer M1 is formed by, for example, using a physical vapor deposition method or a metal chemical vapor deposition method and then performing a photolithographic etching process. For example, a first metal material layer (not shown) can be formed on the substrate SB by using a physical vapor deposition method or a metal chemical vapor deposition method. Then, a patterned photoresist layer (not shown) is formed on the first metal material layer. Afterwards, using the patterned photoresist layer as a mask, an etching process is performed on the first metal material layer to form the first metal layer M1.
第一金屬層M1可例如包括閘極G、掃描線SL、共用電極線CVL以及第一儲存電極SE1。掃描線SL以及共用電極線CVL例如朝第一方向e1延伸。閘極G例如與對應的掃描線SL電性連接以接收相應的閘極訊號。第一儲存電極SE1可例如與後續將介紹的第二金屬層M2與介於上述兩之間的第一絕緣層IL1構成儲存電容Cst1。共用電極線CVL可例如用於供應共用電壓。儲存電容Cst1可電性連接於共用電極線CVL,而接收經由共用電極線CVL供應的共用電壓。The first metal layer M1 may, for example, include a gate electrode G, a scan line SL, a common electrode line CVL, and a first storage electrode SE1. The scan line SL and the common electrode line CVL extend in the first direction e1, for example. The gate G, for example, is electrically connected to the corresponding scan line SL to receive the corresponding gate signal. The first storage electrode SE1 can, for example, form a storage capacitor Cst1 with the second metal layer M2 described later and the first insulating layer IL1 between the two. The common electrode line CVL can be used to supply a common voltage, for example. The storage capacitor Cst1 may be electrically connected to the common electrode line CVL, and receive the common voltage supplied through the common electrode line CVL.
在本實施例中,第一金屬層M1在形成的過程中會歷經微影蝕刻製程,因此形成後的第一金屬層M1會包括多個第一圖案化部分P1。多個第一圖案化部分P1於此意指第一金屬材料層被蝕刻掉的部分,即,未設置有閘極G、掃描線SL、共用電極線CVL以及第一儲存電極SE1的任一者的區域。值得一提的是,在定義出多個第一圖案化部分P1時,用作第一儲存電極SE1的第一金屬層M1未有其他區域被移除,此原因為後續的反射電極RE具有的圖案化部分將會部份地對應第一金屬層M1具有的多個第一圖案化部分P1,使得本實施例無需刻意地移除用作第一儲存電極SE1的第一金屬層M1的其他區域。In this embodiment, the first metal layer M1 undergoes a lithographic etching process during the formation process, so the formed first metal layer M1 will include a plurality of first patterned portions P1. The plurality of first patterned portions P1 here means the portion where the first metal material layer is etched away, that is, no one of the gate G, the scan line SL, the common electrode line CVL, and the first storage electrode SE1 is provided Area. It is worth mentioning that when a plurality of first patterned portions P1 are defined, no other regions of the first metal layer M1 used as the first storage electrode SE1 are removed. This is because the subsequent reflective electrode RE has The patterned portion will partially correspond to the plurality of first patterned portions P1 of the first metal layer M1, so that this embodiment does not need to deliberately remove other regions of the first metal layer M1 used as the first storage electrode SE1 .
第一絕緣層IL1例如設置於基板SB上且覆蓋第一金屬層M1。亦即,第一絕緣層IL1可覆蓋閘極G、掃描線SL、共用電極線CVL以及第一儲存電極SE1。第一絕緣層IL1的形成方法例如是利用物理氣相沉積法或化學氣相沉積法而形成。在本實施例中,第一絕緣層IL1的材料可為無機材料(例如:氧化矽、氮化矽、氮氧化矽或上述至少二種材料的堆疊層)、有機材料(例如:聚醯亞胺系樹脂、環氧系樹脂或壓克力系樹脂)或上述之組合,但本新型創作不限於此。第一絕緣層IL1可為單層結構,但本新型創作不限於此。在其他實施例中,第一絕緣層IL1也可為多層結構。The first insulating layer IL1 is, for example, disposed on the substrate SB and covers the first metal layer M1. That is, the first insulating layer IL1 may cover the gate electrode G, the scan line SL, the common electrode line CVL, and the first storage electrode SE1. The method of forming the first insulating layer IL1 is, for example, by using a physical vapor deposition method or a chemical vapor deposition method. In this embodiment, the material of the first insulating layer IL1 can be an inorganic material (for example: silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), an organic material (for example: polyimide) Resin, epoxy resin or acrylic resin) or a combination of the above, but the invention is not limited to this. The first insulating layer IL1 may have a single-layer structure, but the invention is not limited to this. In other embodiments, the first insulating layer IL1 may also have a multilayer structure.
第二金屬層M2例如設置於第一絕緣層IL1上。第二金屬層M2的形成方法例如是利用物理氣相沉積法或金屬化學氣相沉積法後再進行微影蝕刻製程而形成。舉例來說,可先利用物理氣相沉積法或金屬化學氣相沉積法於第一絕緣層IL1上形成第二金屬材料層(未繪示)。接著,於第二金屬材料層上形成圖案化光阻層(未繪示)。之後,以圖案化光阻層為罩幕,對第二金屬材料層進行蝕刻製程,以形成第二金屬層M2。The second metal layer M2 is, for example, disposed on the first insulating layer IL1. The method for forming the second metal layer M2 is, for example, a physical vapor deposition method or a metal chemical vapor deposition method followed by a photolithographic etching process. For example, a physical vapor deposition method or a metal chemical vapor deposition method may be used to form a second metal material layer (not shown) on the first insulating layer IL1. Then, a patterned photoresist layer (not shown) is formed on the second metal material layer. After that, using the patterned photoresist layer as a mask, an etching process is performed on the second metal material layer to form the second metal layer M2.
第二金屬層M2可例如包括資料線DL、源極S、汲極D以及第二儲存電極SE2。資料線DL例如朝與第一方向e1正交的第二方向e2延伸。源極S例如與對應的資料線DL電性連接以接收相應的資料訊號。第二儲存電極SE2例如與第一儲存電極SE1以及位於第一儲存電極SE1與第二儲存電極SE2之間的第一絕緣層IL1形成儲存電容Cst1。儲存電容Cst1可用於儲存電壓,其儲存的電壓大小可影響液晶分子(未繪示)的偏轉狀態。The second metal layer M2 may, for example, include a data line DL, a source electrode S, a drain electrode D, and a second storage electrode SE2. The data line DL extends, for example, in a second direction e2 orthogonal to the first direction e1. The source S is, for example, electrically connected to the corresponding data line DL to receive the corresponding data signal. The second storage electrode SE2, for example, the first storage electrode SE1 and the first insulating layer IL1 located between the first storage electrode SE1 and the second storage electrode SE2 form a storage capacitor Cst1. The storage capacitor Cst1 can be used to store voltage, and the magnitude of the stored voltage can affect the deflection state of the liquid crystal molecules (not shown).
在本實施例中,第二金屬層M2在形成的過程中會歷經微影蝕刻製程,因此形成後的第二金屬層M2會包括多個第二圖案化部分P2。多個第二圖案化部分P2於此意指第二金屬材料層被蝕刻掉的部分,即,未設置有資料線DL、源極S、汲極D以及第二儲存電極SE2的任一者的區域。值得一提的是,在定義出多個第二圖案化部分P2時,用作第二儲存電極SE2的第二金屬層M2未有其他區域被移除,此原因為後續的反射電極RE具有的圖案化部分將會部份地對應第二金屬層M2具有的多個第二圖案化部分P2,使得本實施例無需刻意地移除用作第二儲存電極SE2的第二金屬層M2的其他區域。In this embodiment, the second metal layer M2 undergoes a lithographic etching process during the formation process, so the formed second metal layer M2 will include a plurality of second patterned portions P2. The plurality of second patterned portions P2 here means the portion where the second metal material layer is etched away, that is, the portion that is not provided with any one of the data line DL, the source electrode S, the drain electrode D, and the second storage electrode SE2 area. It is worth mentioning that when a plurality of second patterned portions P2 are defined, no other regions of the second metal layer M2 used as the second storage electrode SE2 are removed. This is because the subsequent reflective electrode RE has The patterned portion will partially correspond to the plurality of second patterned portions P2 of the second metal layer M2, so that this embodiment does not need to deliberately remove other regions of the second metal layer M2 used as the second storage electrode SE2 .
在一實施例中,畫素結構10可更包括半導體層CH。半導體層CH可例如在形成第一絕緣層IL1後形成。亦即,半導體層CH例如設置於第一絕緣層IL1上。In an embodiment, the
半導體層CH的形成方法例如是利用微影蝕刻製程而形成。舉例來說,可先利用物理氣相沉積法或金屬化學氣相沉積法於第一絕緣層IL1上形成半導體材料層(未繪示)。接著,於半導體材料層上形成圖案化光阻層(未繪示)。之後,以圖案化光阻層為罩幕,對半導體材料層進行蝕刻製程,以形成半導體層CH。半導體層CH的材料可例如為非晶矽,但本新型創作不以此為限。半導體層CH的材料亦可例如為多晶矽、微晶矽、單晶矽、奈米晶矽或其它具有不同晶格排列之半導體材料或金屬氧化物半導體材料。The method for forming the semiconductor layer CH is, for example, using a photolithographic etching process. For example, a physical vapor deposition method or a metal chemical vapor deposition method may be used to form a semiconductor material layer (not shown) on the first insulating layer IL1. Next, a patterned photoresist layer (not shown) is formed on the semiconductor material layer. After that, using the patterned photoresist layer as a mask, an etching process is performed on the semiconductor material layer to form the semiconductor layer CH. The material of the semiconductor layer CH can be, for example, amorphous silicon, but the invention is not limited to this. The material of the semiconductor layer CH can also be, for example, polycrystalline silicon, microcrystalline silicon, single crystal silicon, nanocrystalline silicon, or other semiconductor materials or metal oxide semiconductor materials with different lattice arrangements.
在本實施例中,閘極G、源極S、汲極D以及半導體層CH可構成主動元件T。半導體層CH例如可與閘極G對應地設置,且被源極S以及汲極D部分地覆蓋。未被源極S以及汲極D覆蓋的半導體層CH可作為主動元件T的通道層。主動元件T例如為所屬領域中具有通常知識者所周知的任一種底部閘極型薄膜電晶體。然而,本實施例雖然是以底部閘極型薄膜電晶體為例,但本新型創作不限於此。在其他實施例中,主動元件T也例如為頂部閘極型薄膜電晶體或是其它合適類型的薄膜電晶體。In this embodiment, the gate electrode G, the source electrode S, the drain electrode D, and the semiconductor layer CH can constitute the active device T. The semiconductor layer CH may be provided corresponding to the gate electrode G, and partially covered by the source electrode S and the drain electrode D, for example. The semiconductor layer CH that is not covered by the source electrode S and the drain electrode D can be used as the channel layer of the active device T. The active device T is, for example, any bottom gate type thin film transistor well known to those skilled in the art. However, although this embodiment takes the bottom gate type thin film transistor as an example, the invention of the present invention is not limited to this. In other embodiments, the active device T is, for example, a top gate type thin film transistor or other suitable types of thin film transistors.
第二絕緣層IL2例如設置於第一絕緣層IL1上且覆蓋第二金屬層M2。亦即,第二絕緣層IL2可覆蓋資料線DL、源極S、汲極D以及第二儲存電極SE2。第二絕緣層IL2的形成方法例如是利用物理氣相沉積法或化學氣相沉積法而形成。在本實施例中,第二絕緣層IL2的材料可為無機材料(例如:氧化矽、氮化矽、氮氧化矽或上述至少二種材料的堆疊層)、有機材料(例如:聚醯亞胺系樹脂、環氧系樹脂或壓克力系樹脂)或上述之組合,但本新型創作不限於此。第二絕緣層IL2可為單層結構,但本新型創作不限於此。在其他實施例中,第二絕緣層IL2也可為多層結構。The second insulating layer IL2 is, for example, disposed on the first insulating layer IL1 and covers the second metal layer M2. That is, the second insulating layer IL2 can cover the data line DL, the source S, the drain D, and the second storage electrode SE2. The method for forming the second insulating layer IL2 is, for example, by using a physical vapor deposition method or a chemical vapor deposition method. In this embodiment, the material of the second insulating layer IL2 can be an inorganic material (for example: silicon oxide, silicon nitride, silicon oxynitride or a stacked layer of at least two of the above materials), an organic material (for example: polyimide) Resin, epoxy resin or acrylic resin) or a combination of the above, but the invention is not limited to this. The second insulating layer IL2 may have a single-layer structure, but the invention is not limited to this. In other embodiments, the second insulating layer IL2 may also have a multilayer structure.
平坦層PL例如設置於第二絕緣層IL2上。平坦層PL的形成方法例如是利用物理氣相沉積法或化學氣相沉積法而形成。在本實施例中,平坦層PL的材料可為無機材料(例如:氧化矽、氮化矽、氮氧化矽或上述至少二種材料的堆疊層)、有機材料(例如:聚醯亞胺系樹脂、環氧系樹脂或壓克力系樹脂)或上述之組合,但本新型創作不限於此。平坦層PL可為單層結構,但本新型創作不限於此。在其他實施例中,平坦層PL也可為多層結構。平坦層PL可使得後續形成於其上的膜層具有良好的穩定性。The flat layer PL is provided on the second insulating layer IL2, for example. The method of forming the flat layer PL is, for example, by using a physical vapor deposition method or a chemical vapor deposition method. In this embodiment, the material of the flat layer PL can be inorganic materials (for example: silicon oxide, silicon nitride, silicon oxynitride or a stacked layer of at least two of the above materials), organic materials (for example: polyimide resin , Epoxy resin or acrylic resin) or a combination of the above, but the invention is not limited to this. The flat layer PL may have a single-layer structure, but the invention is not limited to this. In other embodiments, the flat layer PL may also have a multilayer structure. The flat layer PL can make the film layer subsequently formed thereon have good stability.
畫素電極PE例如設置於平坦層PL上。畫素電極PE的形成方法例如是利用物理氣相沉積法或金屬化學氣相沉積法後再進行微影蝕刻製程而形成。舉例來說,可先利用物理氣相沉積法或金屬化學氣相沉積法於平坦層PL上形成畫素電極材料層(未繪示)。接著,於畫素電極材料層上形成圖案化光阻層(未繪示)。之後,以圖案化光阻層為罩幕,對畫素電極材料層進行蝕刻製程,以形成畫素電極PE。畫素電極PE的材料可例如是金屬氧化物導電材料(例如:銦錫氧化物、銦鋅氧化物、鋁錫氧化物、鋁鋅氧化物、銦鍺鋅氧化物)。在一實施例中,畫素電極PE藉由貫穿第二絕緣層IL2以及平坦層PL的接觸窗H與第二金屬層M2電性連接。詳細地說,畫素電極PE例如與主動元件T的汲極D電性連接。The pixel electrode PE is provided on the flat layer PL, for example. The pixel electrode PE is formed by, for example, using a physical vapor deposition method or a metal chemical vapor deposition method followed by a photolithographic etching process. For example, a physical vapor deposition method or a metal chemical vapor deposition method may be used to form a pixel electrode material layer (not shown) on the flat layer PL. Next, a patterned photoresist layer (not shown) is formed on the pixel electrode material layer. After that, using the patterned photoresist layer as a mask, an etching process is performed on the pixel electrode material layer to form the pixel electrode PE. The material of the pixel electrode PE may be, for example, a metal oxide conductive material (for example: indium tin oxide, indium zinc oxide, aluminum tin oxide, aluminum zinc oxide, indium germanium zinc oxide). In one embodiment, the pixel electrode PE is electrically connected to the second metal layer M2 through the contact window H penetrating the second insulating layer IL2 and the flat layer PL. In detail, the pixel electrode PE is electrically connected to the drain D of the active device T, for example.
反射電極RE例如設置於畫素電極PE上。反射電極RE的形成方法例如是利用物理氣相沉積法或金屬化學氣相沉積法後再進行微影蝕刻製程而形成。舉例來說,可先利用物理氣相沉積法或金屬化學氣相沉積法於畫素電極PE上形成反射電極材料層(未繪示)。接著,於反射電極材料層上形成圖案化光阻層(未繪示)。之後,以圖案化光阻層為罩幕,對反射電極材料層進行蝕刻製程,以形成反射電極RE。The reflective electrode RE is provided on the pixel electrode PE, for example. The method for forming the reflective electrode RE is, for example, a physical vapor deposition method or a metal chemical vapor deposition method followed by a photolithographic etching process. For example, a physical vapor deposition method or a metal chemical vapor deposition method may be used to form a reflective electrode material layer (not shown) on the pixel electrode PE. Then, a patterned photoresist layer (not shown) is formed on the reflective electrode material layer. After that, using the patterned photoresist layer as a mask, an etching process is performed on the reflective electrode material layer to form the reflective electrode RE.
反射電極RE可例如選用反射率≥90%的金屬材料來形成。在本實施例中,反射電極RE的材料為鋁、銀或其合金,但本新型創作不限於此。反射電極RE例如用以反射外界的環境光或背光源發出的光。The reflective electrode RE can be formed of, for example, a metal material with a reflectivity of ≥90%. In this embodiment, the material of the reflective electrode RE is aluminum, silver or an alloy thereof, but the invention is not limited to this. The reflective electrode RE is used, for example, to reflect external ambient light or light emitted by a backlight.
在本實施例中,反射電極RE包括多個第三圖案化部份P3,其中多個第三圖案化部份P3由未設置有任何金屬層(至少包括第一金屬層M1與第二金屬層M2)的區域定義出,即,其是由多個第一圖案化區域P1和多個第二圖案化區域P2重疊的區域P12所定義出。換句話說,反射電極RE具有的多個第三圖案化部份P3在基板SB的法線方向n上與多個第一圖案化區域P1和多個第二圖案化區域P2重疊的區域P12實質對應,以定義出穿透區TR。舉例而言,反射電極RE具有的多個第三圖案化部份P3在基板SB的法線方向n上僅與第一絕緣層IL1、第二絕緣層IL2以及平坦層PL對應。因此,反射電極RE的多個第三圖案化部份P3可作為穿透區TR,而反射電極RE自身則作為反射區RR。從另一個角度來看,於穿透區TR中例如僅設置有絕緣層(至少包括第一絕緣層IL1、第二絕緣層IL2以及平坦層PL)或透明電極(至少包括畫素電極PE)因此可允許外界的環境光或背光源通過。總的來說,反射電極RE的設置位置可定義出反射區RR以及穿透區TR。In this embodiment, the reflective electrode RE includes a plurality of third patterned portions P3, wherein the plurality of third patterned portions P3 are not provided with any metal layer (including at least the first metal layer M1 and the second metal layer). The area of M2) is defined, that is, it is defined by the area P12 where the plurality of first patterned areas P1 and the plurality of second patterned areas P2 overlap. In other words, the area P12 where the plurality of third patterned portions P3 of the reflective electrode RE overlaps the plurality of first patterned areas P1 and the plurality of second patterned areas P2 in the normal direction n of the substrate SB is substantially Correspondingly, to define the penetration area TR. For example, the plurality of third patterned portions P3 of the reflective electrode RE only correspond to the first insulating layer IL1, the second insulating layer IL2, and the flat layer PL in the normal direction n of the substrate SB. Therefore, the plurality of third patterned portions P3 of the reflective electrode RE can be used as the penetration area TR, and the reflective electrode RE itself can be used as the reflective area RR. From another perspective, for example, only an insulating layer (including at least the first insulating layer IL1, the second insulating layer IL2, and the flat layer PL) or a transparent electrode (including at least the pixel electrode PE) is provided in the penetration region TR. Allows ambient light or backlight from outside to pass through. In general, the placement position of the reflective electrode RE can define the reflective area RR and the penetrating area TR.
基於此,本實施例的畫素結構10藉由將反射電極RE具有的多個圖案化部份P在基板SB的法線方向n上與未設置有任何金屬層的區域實質對應地設置,因此可不縮減用於形成第一儲存電極SE1的第一金屬層M1以及用於形成第二儲存電極SE2的第二金屬層M2的面積以作為穿透區TR。在此情況下,本新型創作的顯示面板的一個畫素結構中具有的儲存電容可提升而可儲存具有較大的電壓,藉此具有良好的電性。Based on this, the
圖2A為本新型創作的第二實施例的畫素結構的俯視示意圖。圖2B為本新型創作的第二實施例的畫素結構的穿透區與反射區的示意圖。在此必須說明的是,圖2A以及圖2B繪示的實施例各自沿用圖1A以及圖1C的實施例的元件標號與部分內容,其中採用相同或近似的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例描述與效果,下述實施例不再重複贅述,而圖2A以及圖2B繪示的實施例中至少一部份未省略的描述可參閱後續內容。2A is a schematic top view of the pixel structure of the second embodiment of the new creation. 2B is a schematic diagram of the penetration area and the reflection area of the pixel structure of the second embodiment of the new creation. It must be noted here that the embodiments shown in FIGS. 2A and 2B respectively use the element numbers and part of the content of the embodiments in FIGS. 1A and 1C, wherein the same or similar numbers are used to represent the same or similar elements, and The description of the same technical content is omitted. For the description of the omitted parts, please refer to the descriptions and effects of the foregoing embodiments. The following embodiments will not be repeated, and at least part of the descriptions not omitted in the embodiments shown in FIG. 2A and FIG. 2B can be referred to the subsequent content.
請同時參照圖2A以及圖2B,在圖2A以及圖2B所繪示的實施例中,畫素結構20具有第一灰階顯示區GS1以及第二灰階顯示區GS2。對第一灰階顯示區GS1或第二灰階顯示區GS2施加電壓可驅動位於第一灰階顯示區GS1或第二灰階顯示區GS2上的液晶分子(未繪示)轉動。詳細地說,可例如藉由對第一灰階顯示區GS1或第二灰階顯示區GS2施加電壓與否,來決定與第一灰階顯示區GS1及第二灰階顯示區GS2對應的液晶分子呈現亮態(即,允許光通過)或呈現暗態(即,阻擋光通過)。由於本實施例的畫素結構20具有第一灰階顯示區GS1以及第二灰階顯示區GS2,因此,畫素結構20包括第一主動元件T1以及第二主動元件T2。在一些實施例中,第一主動元件T1位於基板SB上且包括第一閘極G1、第一源極S1、第一汲極D1以及第一半導體層SE1,第二主動元件T2亦位於基板SB上且包括第二閘極G2、第二源極S2、第二汲極D2以及第二半導體層SE2。在一些實施例中,第一主動元件T1的尺寸可大於第二主動元件T2的尺寸,但本新型創作不以此為限。Please refer to FIGS. 2A and 2B at the same time. In the embodiment shown in FIGS. 2A and 2B, the
圖3A為本新型創作的第三實施例的畫素結構的俯視示意圖。圖3B為本新型創作的第三實施例的畫素結構的穿透區與反射區的示意圖。在此必須說明的是,圖3A以及圖3B繪示的實施例各自沿用圖2A以及圖2B的實施例的元件標號與部分內容,其中採用相同或近似的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例描述與效果,下述實施例不再重複贅述,而圖3A以及圖3B繪示的實施例中至少一部份未省略的描述可參閱後續內容。3A is a schematic top view of the pixel structure of the third embodiment of the new creation. FIG. 3B is a schematic diagram of the penetration area and the reflection area of the pixel structure of the third embodiment of the new creation. It must be noted here that the embodiments shown in FIGS. 3A and 3B respectively use the element numbers and part of the content of the embodiments in FIGS. 2A and 2B, wherein the same or similar numbers are used to represent the same or similar elements, and The description of the same technical content is omitted. For the description of the omitted parts, please refer to the descriptions and effects of the foregoing embodiments. The following embodiments will not be repeated. For at least part of the descriptions not omitted in the embodiments shown in FIG. 3A and FIG. 3B, please refer to the subsequent content.
請同時參照圖3A以及圖3B,本新型創作的畫素結構30具有的第一灰階顯示區GS1包括一個第一顯示區塊GS11而第二灰階顯示區GS2包括兩個第二顯示區塊GS21、GS22,使得畫素結構30具有三個顯示區塊。本實施例的畫素結構30的操作方式如下,當同時開啟第一主動元件T1以及第二主動元件T2時,可使三個顯示區塊(一個第一顯示區塊GS11以及兩個第二顯示區塊GS21、GS22)呈亮態,當關閉第一主動元件T1且開啟第二主動元件T2時,可使兩個顯示區塊(兩個第二顯示區塊GS21、GS22)呈亮態,當開啟第一主動元件T1且關閉第二主動元件T2時,可使一個顯示區塊(一個第一顯示區塊GS11)呈亮態,而當關閉第一主動元件T1 以及第二主動元件T2時,可使上述的三個顯示區塊呈暗態。Referring to FIGS. 3A and 3B at the same time, the
圖4A為圖3B中的剖線B-B’的第一實施例的剖面示意圖。圖4B為圖3B中的剖線B-B’的第二實施例的剖面示意圖。圖4C為圖3B中的剖線B-B’的第三實施例的剖面示意圖。圖4D為圖3B中的剖線B-B’的第四實施例的剖面示意圖。Fig. 4A is a schematic cross-sectional view of the first embodiment taken along the line B-B' in Fig. 3B. Fig. 4B is a schematic cross-sectional view of the second embodiment taken along the line B-B' in Fig. 3B. Fig. 4C is a schematic cross-sectional view of the third embodiment taken along the line B-B' in Fig. 3B. Fig. 4D is a schematic cross-sectional view of the fourth embodiment taken along the line B-B' in Fig. 3B.
在本新型創作的實施例中,畫素結構10、20、30藉由將反射電極RE具有的多個圖案化部份P3在基板SB的法線方向n上與未設置有任何金屬層的區域實質對應地設置,以在不縮減第一儲存電極SE1與第二儲存電極SE2的面積的情況下定義出穿透區TR。然而,反射電極RE具有的多個圖案化部份P與未設置有任何金屬層的區域實質對應地設置並非確切地表示反射電極RE具有的多個圖案化部份P3與未設置有任何金屬層的區域完整地對應。即,在一些實施例中,穿透區TR可因畫素結構10、20、30的設計來藉由特定金屬層定義出,其中圖4A至圖4D更詳細地繪示出穿透區TR由哪一金屬層定義出。在圖4A中,穿透區TR是由反射電極RE所定義出。在圖4B中,穿透區TR是由第一金屬層M1所定義出。在圖4C中,穿透區TR是由第二金屬層M2所定義出。在圖4D中,穿透區TR是由第三金屬層M3所定義出。In the embodiment of the present invention, the
圖5A為圖3B中的區域X的第一實施例的放大示意圖。圖5B為圖3B中的區域X的第二實施例的放大示意圖。圖5C為圖3B中的區域X的第三實施例的放大示意圖。圖5D為圖3B中的區域X的第四實施例的放大示意圖。FIG. 5A is an enlarged schematic diagram of the first embodiment of the area X in FIG. 3B. FIG. 5B is an enlarged schematic diagram of the second embodiment of the area X in FIG. 3B. FIG. 5C is an enlarged schematic diagram of the third embodiment of the area X in FIG. 3B. FIG. 5D is an enlarged schematic diagram of the fourth embodiment of the area X in FIG. 3B.
請參照前述的實施例,穿透區TR可因畫素結構10、20、30的設計來藉由特定金屬層定義出,其中圖5A至圖5D更詳細地繪示出穿透區TR由哪一或哪些金屬層定義出。在圖5A中,穿透區TR是由反射電極RE所定義出。在圖5B中,穿透區TR是由反射電極RE以及第一金屬層M1所定義出。在圖5C中,穿透區TR是由反射電極RE以及第二金屬層M2所定義出。在圖5D中,穿透區TR是由反射電極RE、第一金屬層M1、第二金屬層M2以及第三金屬層M3所定義出。Please refer to the foregoing embodiment, the penetration area TR can be defined by a specific metal layer due to the design of the
綜上所述,本新型創作的畫素結構藉由將反射電極具有的多個第三圖案化部份由未設置有任何金屬層(至少包括第一金屬層與第二金屬層)的區域定義出,即,其是由多個第一圖案化區域和多個第二圖案化區域重疊的區域所定義出。換句話說,反射電極具有的多個第三圖案化部份在基板的法線方向上與多個第一圖案化區域和多個第二圖案化區域重疊的區域實質對應,以定義出穿透區。基於此,本新型創作的畫素結構可不縮減用於形成第一儲存電極的第一金屬層以及用於形成第二儲存電極的第二金屬層的面積以作為穿透區。在此情況下,本新型創作的顯示面板的一個畫素結構中具有的儲存電容可提升而可儲存具有較大的電壓,藉此具有良好的電性。To sum up, the pixel structure created by the present invention defines the third patterned portion of the reflective electrode by the area that is not provided with any metal layer (including at least the first metal layer and the second metal layer). That is, it is defined by the overlapping area of the plurality of first patterned areas and the plurality of second patterned areas. In other words, the multiple third patterned portions of the reflective electrode substantially correspond to the overlapping areas of the multiple first patterned areas and the multiple second patterned areas in the normal direction of the substrate, so as to define the penetration Area. Based on this, the pixel structure of the present invention does not reduce the area of the first metal layer for forming the first storage electrode and the area of the second metal layer for forming the second storage electrode as the penetration area. In this case, the storage capacitor in one pixel structure of the display panel created by the present invention can be increased to store a larger voltage, thereby having good electrical properties.
10、20、30:畫素結構 A-A’、B-B’:剖線 CH:半導體層 Cst1:儲存電容 CVL:共用電極線 D:汲極 e1:第一方向 e2:第二方向 DL:資料線 G:閘極 GS1:第一灰階顯示區 GS11:第一顯示區塊 GS2:第二灰階顯示區 GS21、GS22:第二顯示區塊 H:接觸窗 IL1:第一絕緣層 IL2:第二絕緣層 M1:第一金屬層 M2:第二金屬層 M3:第三金屬層 n:法線方向 P1:第一圖案化部份 P12:重疊的區域 P2:第二圖案化部份 P3:第三圖案化部份 PE:畫素電極 PL:平坦層 RE:反射電極 RR:反射區 S:源極 SB:基板 SE1:第一儲存電極 SE2:第二儲存電極 SL:掃描線 T:主動元件 T1:第一主動元件 T2:第二主動元件 TR:穿透區 X:區域 10, 20, 30: pixel structure A-A’, B-B’: Sectional line CH: semiconductor layer Cst1: storage capacitor CVL: Common electrode line D: Dip pole e1: first direction e2: second direction DL: Data line G: Gate GS1: The first grayscale display area GS11: The first display block GS2: The second grayscale display area GS21, GS22: the second display block H: Contact window IL1: first insulating layer IL2: second insulating layer M1: The first metal layer M2: second metal layer M3: third metal layer n: normal direction P1: The first patterning part P12: overlapping area P2: The second patterning part P3: The third patterning part PE: pixel electrode PL: Flat layer RE: reflective electrode RR: reflection zone S: source SB: Substrate SE1: first storage electrode SE2: second storage electrode SL: scan line T: Active component T1: The first active component T2: second active component TR: penetration zone X: area
圖1A為本新型創作的第一實施例的畫素結構的俯視示意圖。 圖1B為圖1A中的剖線A-A’的剖面示意圖。 圖1C為本新型創作的第一實施例的畫素結構的穿透區與反射區的示意圖。 圖2A為本新型創作的第二實施例的畫素結構的俯視示意圖。 圖2B為本新型創作的第二實施例的畫素結構的穿透區與反射區的示意圖。 圖3A為本新型創作的第三實施例的畫素結構的俯視示意圖。 圖3B為本新型創作的第三實施例的畫素結構的穿透區與反射區的示意圖。 圖4A為圖3B中的剖線B-B’的第一實施例的剖面示意圖。 圖4B為圖3B中的剖線B-B’的第二實施例的剖面示意圖。 圖4C為圖3B中的剖線B-B’的第三實施例的剖面示意圖。 圖4D為圖3B中的剖線B-B’的第四實施例的剖面示意圖。 圖5A為圖3B中的區域X的第一實施例的放大示意圖。 圖5B為圖3B中的區域X的第二實施例的放大示意圖。 圖5C為圖3B中的區域X的第三實施例的放大示意圖。 圖5D為圖3B中的區域X的第四實施例的放大示意圖。 FIG. 1A is a schematic top view of the pixel structure of the first embodiment of the new creation. Fig. 1B is a schematic cross-sectional view of the section line A-A' in Fig. 1A. FIG. 1C is a schematic diagram of the penetration area and the reflection area of the pixel structure of the first embodiment of the new creation. 2A is a schematic top view of the pixel structure of the second embodiment of the new creation. 2B is a schematic diagram of the penetration area and the reflection area of the pixel structure of the second embodiment of the new creation. 3A is a schematic top view of the pixel structure of the third embodiment of the new creation. FIG. 3B is a schematic diagram of the penetration area and the reflection area of the pixel structure of the third embodiment of the new creation. Fig. 4A is a schematic cross-sectional view of the first embodiment taken along the line B-B' in Fig. 3B. Fig. 4B is a schematic cross-sectional view of the second embodiment taken along the line B-B' in Fig. 3B. Fig. 4C is a schematic cross-sectional view of the third embodiment taken along the line B-B' in Fig. 3B. Fig. 4D is a schematic cross-sectional view of the fourth embodiment taken along the line B-B' in Fig. 3B. FIG. 5A is an enlarged schematic diagram of the first embodiment of the area X in FIG. 3B. FIG. 5B is an enlarged schematic diagram of the second embodiment of the area X in FIG. 3B. FIG. 5C is an enlarged schematic diagram of the third embodiment of the area X in FIG. 3B. FIG. 5D is an enlarged schematic diagram of the fourth embodiment of the area X in FIG. 3B.
A-A’:剖線 A-A’: Sectional line
CH:半導體層 CH: semiconductor layer
CVL:共用電極線 CVL: Common electrode line
D:汲極 D: Dip pole
e1:第一方向 e1: first direction
e2:第二方向 e2: second direction
DL:資料線 DL: Data line
G:閘極 G: Gate
H:接觸窗 H: Contact window
M1:第一金屬層 M1: The first metal layer
M2:第二金屬層 M2: second metal layer
n:法線方向 n: normal direction
P1:第一圖案化部份 P1: The first patterning part
P12:重疊的區域 P12: overlapping area
P2:第二圖案化部份 P2: The second patterning part
P3:第三圖案化部份 P3: The third patterning part
PE:畫素電極 PE: pixel electrode
RE:反射電極 RE: reflective electrode
S:源極 S: source
SE1:第一儲存電極 SE1: first storage electrode
SE2:第二儲存電極 SE2: second storage electrode
SL:掃描線 SL: scan line
T:主動元件 T: Active component
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