TWM590143U - Substrate transfer apparatus - Google Patents

Abstract

A substrate transfer apparatus is for continuously upright transferring a plurality of substrates. The apparatus includes an air pressure control unit, a conveyor belt, and at least one first screw member and at least one second screw member. The conveyor belt has a plurality of clamps for holding the substrates, and the conveyor belt move in the direction of the transfer path. A position of each of the first screw members is relative to a position of each of the second screw members, so that a transfer path of the substrates is between the first and the second screw members. A plurality of gas holes are disposed in the first screw members and the second screw members. The air pressure control unit performs pumping or air jetting on both sides of the substrates through the air holes in the first screw members and the second screw members to stabilize the upright-transferred substrates.

Description

Substrate conveying device

This novel creation relates to a substrate conveying device, and particularly to a conveying device that stably transmits a substrate upright.

In various industries, there are many ways to transport substrates, and the less space-consuming method is the technology of transporting substrates in an upright manner.

The technique of conveying the substrate in an upright manner is usually to use a conveying track and a jig to clamp and convey the substrate. However, since the lower half of the substrate is suspended, if the external force (such as air flow) affects the transfer process, the substrate may shake and fall off or collide with adjacent substrates.

The novel creation provides a substrate conveying device, which can maintain the position of the substrate during the process of vertically conveying the substrate, so as to avoid the substrate from being shifted due to the influence of external forces and causing the substrates to collide and be damaged.

The substrate conveying device created by the present invention continuously conveys in a manner of standing multiple substrates. The device includes an air pressure control unit, a conveying track, and at least one first screw and at least one second screw. The transport rail is provided with a plurality of clamps for clamping the substrate, and the transport rail moves in the direction of the transport path. The position of each first screw is relative to the position of each second screw so that the transport path of the substrate is bounded between the first and second screws. A plurality of air holes are provided in the first screw and the second screw. The air pressure control unit evacuates or jets air from both sides of the plurality of substrates through the plurality of air holes in the first screw and the second screw, so as to stabilize the plurality of substrates being transported upright.

In an embodiment of the present invention, the first screw and the second screw are a plurality of first screws and a plurality of second screws arranged upright.

In an embodiment of the invention, the positions of the plurality of air holes in the first screw and the second screw correspond to each other.

In an embodiment of the invention, the distance between adjacent two of the plurality of first screws is the same as the distance between adjacent two of the plurality of second screws.

In an embodiment of the invention, the first screw and the second screw are a first screw and a second screw extending along the direction of the conveying path.

In an embodiment of the invention, the plurality of air holes are arranged along the thread of the first screw and the thread of the second screw, respectively.

In an embodiment of the creation of the present invention, the plurality of air holes are provided on a convex portion or a concave portion of the screw thread.

In an embodiment of the invention, the air pressure control unit includes a vacuum pumping device.

In an embodiment of the invention, the air pressure control unit only evacuates or jets the two sides of the plurality of substrates through a plurality of air holes in the first screw and the second screw.

In an embodiment of the invention, the size of the plurality of air holes is substantially the same.

Based on the above, the novel creation uses an air pressure control unit to evacuate or jet air on both sides of a plurality of substrates to generate air pressure suction or air pressure thrust on both sides of the plurality of substrates, so that the position of the substrate can be maintained during the process of vertically transporting the substrate. In order to prevent the substrates from being shifted due to external forces, the substrates may collide and be damaged.

The following disclosure provides many different implementations or examples for implementing different features of the novel creation. Of course, these embodiments are only examples, and are not intended to limit the scope and application of the novel creation. Furthermore, for the sake of clarity, the relative thicknesses and positions of various components, films, or regions may be reduced or enlarged. In addition, similar or identical element symbols are used in each drawing to indicate similar or identical elements or features, and if the same element symbol in the drawings is the same as the previous figure, its redundant description will be omitted.

FIG. 1A is a schematic perspective view of a substrate conveying device according to the first embodiment of the present invention. FIG. 1B is a schematic diagram of the air pressure direction of a substrate conveying device according to the first embodiment of the present invention. FIG. 1C is a schematic diagram of the air pressure direction of another substrate conveying device according to the first embodiment of the present invention.

Referring to FIG. 1A, the substrate conveying apparatus 100 of this embodiment at least includes an air pressure control unit 102, a conveying track 104, and at least one first screw 110 and at least one second screw 112 (FIG. 1A schematically shows seven first Screw 110 and seven second screws 112), wherein the position of each first screw 110 is relative to the position of each second screw 112. The transport rail 104 can transport a plurality of substrates 114 by a driving device (not shown). For example, if the substrate 114 is continuously transported in an upright manner, the transport path 116 of the substrate 114 will be bounded between each first screw 110 and each second screw 112. Moreover, the distance d1 between the two first screws 110 is preferably substantially the same as the distance d2 between the two second screws 112. In an embodiment, the above-mentioned substrate 114 is, for example, a printed circuit board, but the creation of the present invention is not limited to this.

Please continue to refer to FIG. 1A, the first screw 110 and the second screw 112 are a plurality of first screws 110 and a plurality of second screws 112 which are arranged upright (FIG. 1A schematically shows seven first screws 110 and seven second screws The screw 112), the transport rail 104 is provided with a plurality of clamps 118 for holding the substrate 114, and the transport rail 104 moves in the direction of the transport path 116. Although only four fixtures 118 are shown in FIG. 1A, it should be understood that the length of the conveying track 104 on the actual production line can reach tens of meters, and the fixtures 118 are usually distributed at equal intervals on the entire conveying track 104 to achieve continuous conveyance of the substrate 114 Function.

Please refer to FIGS. 1A to 1C at the same time. In this embodiment, a plurality of air holes 106 are respectively disposed in the first screw 110 and the second screw 112, wherein the air pressure control unit 108 passes through the first screw 110 and the second screw The plurality of air holes 106 in 112 pumps or jets air on both sides of the plurality of substrates 114 to stabilize the plurality of substrates 114 that are transported upright.

The positions and sizes of the air holes 106 can be changed according to requirements. For example, the air holes 106 provided in the first screw 110 respectively correspond to the air holes 106 provided in the second screw 112, and the distance between the first screw 110 and the substrate 114 d3 and the distance d4 between the second screw 112 and the substrate 114 may be substantially the same, so that the distance between the closest screw holes 106 in the two screws (the first screw 110 and the second screw 112) is fixed, so that the two sides of the substrate 114 The airflow is evenly distributed, but this new creation is not limited to this. In other embodiments, depending on actual design requirements, the distance d3 between the first screw 110 and the substrate 114 may be different from the distance d4 between the second screw 112 and the substrate 114.

In this embodiment, as shown in FIG. 1B, the air pressure control unit 108 can be used to evacuate both sides of the plurality of substrates 114 to generate air pressure suction on both sides of the plurality of substrates 114 (as shown by the arrow 117a in FIG. 1B) ), so that the position of the substrate 114 can be maintained during the process of vertically transporting the substrate 114, so as to avoid the substrate 114 from being shifted by the external force and causing the substrates 114 to collide with each other and be damaged, but the creation of the present invention is not limited to this. In an embodiment, the air pressure control unit 108 may include a vacuum exhaust device.

In this embodiment, as shown in FIG. 1C, the air pressure control unit 108 may also be used to blow air on both sides of the plurality of substrates 114 to generate air pressure thrust on both sides of the plurality of substrates 114 (as shown by the arrow 117b in FIG. 1C) ), so that the position of the substrate 114 can be maintained during the process of vertically transporting the substrate 114, so as to avoid the substrate 114 being deflected by the external force and causing the substrates 114 to collide with each other and be damaged.

In one embodiment, the size of the plurality of air holes 106 is substantially the same, but the creation of the present invention is not limited thereto. In other embodiments, according to the shape and weight of the substrate 114, the air pressure control unit 108 of the present invention may only pass through a part of the plurality of air holes 106 in the first screw 110 and the second screw 112 to the plurality of substrates 114. Pumping or air jetting is performed on the side, or the plurality of air holes 106 may have different sizes to adjust the amount of air pressure that the substrate 114 is subjected to at different positions, so as to improve the stability when the substrate 114 is transported.

FIG. 2A is a schematic perspective view of a substrate conveying device according to a second embodiment of the present invention, in which the same or similar reference numerals as those in the first embodiment are used to denote the same or similar components, and the materials, sizes, and functions thereof are the same as those in the previous embodiment. It is described in detail, so it will not be repeated here.

2A, the difference between the substrate transport apparatus 100a of the second embodiment and the substrate transport apparatus 100 of the first embodiment is that the first and second screws are changed to a first screw 122 extending in the direction of the transport path 116 and A second screw 124, the position of the first screw 122 relative to the position of the second screw 124, so that the conveying path 116 of the substrate 114 is bounded between the first screw 122 and the second screw 124, and the first and The positions of the second screws 122 and 124 may be slightly downward and close to the lower portion of the substrate 114, so as to stabilize the lower portion of the substrate 114 being transported upright. The position and size of the air hole 106 in the first and second screws 122 and 124 will be described in detail below.

2B is a partially enlarged view of a first screw (second screw) in a second embodiment created in accordance with the present invention. 2C is a partially enlarged view of another first screw (second screw) in the second embodiment created in accordance with the present invention.

In FIG. 2B, the air holes 106 are arranged along the thread of each first screw 122 and along the thread of each second screw 124, respectively. Moreover, the air hole 106 is a convex portion 200 a provided on the thread of the first screw 122 and a convex portion 200 b provided on the thread of the second screw 124. In FIG. 2C, the air holes 106 are also arranged along the thread of each first screw 122 and along the thread of each second screw 124, respectively. However, the air hole 106 is provided in the recessed portion 202 a of the thread of the first screw 122 and the recessed portion 202 b of the thread of the second screw 124. The different distribution patterns of the air holes 106 on the first screw 122 and the second screw 124 can improve the operation flexibility of the substrate conveying device 100a and further improve the stability when conveying the substrate 114.

In summary, the novel creation uses the air pressure control unit to evacuate or jet the two sides of multiple substrates to generate air pressure suction or air pressure thrust on both sides of the multiple substrates, so that the substrate can be maintained in the process of vertically transporting the substrate Position to prevent the substrates from being shifted by external forces and causing the substrates to collide with each other and be damaged. In addition, the design between the air pressure control unit and the plurality of air holes can improve the operation flexibility of the substrate conveying device and further improve the stability when conveying the substrate.

100、100a‧‧‧Substrate conveying device 102‧‧‧Air pressure control unit 104‧‧‧Conveying track 106‧‧‧Blowhole 110、122‧‧‧The first screw 112、124‧‧‧Second screw 114‧‧‧ substrate 116‧‧‧Conveying path 117a, 117b ‧‧‧ direction 118‧‧‧ Fixture 200a‧‧‧Convex 202a‧‧‧recess d1, d2, d3, d4‧‧‧ distance

FIG. 1A is a schematic perspective view of a substrate conveying device according to the first embodiment of the present invention. FIG. 1B is a schematic diagram of the air pressure direction of a substrate conveying device according to the first embodiment of the present invention. FIG. 1C is a schematic diagram of the air pressure direction of another substrate conveying device according to the first embodiment of the present invention. 2A is a schematic perspective view of a substrate conveying device according to a second embodiment of the present invention. 2B is a partially enlarged view of a first screw (second screw) in a second embodiment created in accordance with the present invention. 2C is a partially enlarged view of another first screw (second screw) in the second embodiment created in accordance with the present invention.

100‧‧‧Substrate conveying device

102‧‧‧Air pressure control unit

104‧‧‧Conveying track

106‧‧‧Blowhole

110‧‧‧The first screw

112‧‧‧Second screw

114‧‧‧ substrate

116‧‧‧Conveying path

118‧‧‧ Fixture

d1, d2, d3, d4‧‧‧ distance

Claims (10)

A substrate conveying device for continuous conveying in the manner of standing multiple substrates, the device includes: One air pressure control unit; A transport track provided with a plurality of clamps for clamping the plurality of substrates, and the transport track moves in the direction of a transport path; and At least one first screw and at least one second screw, wherein: The position of the first screw is relative to the position of the second screw, so that the conveying path of the plurality of substrates is bounded between the first screw and the second screw; A plurality of air holes are provided in the first screw and the second screw; and The air pressure control unit evacuates or jets air on both sides of the plurality of substrates through the plurality of air holes in the first screw and the second screw to stabilize the plurality of substrates being transported upright . The substrate conveying device according to item 1 of the patent application scope, wherein the first screw and the second screw are a plurality of the first screws and a plurality of the second screws that are arranged upright. The substrate conveying device according to item 2 of the patent application scope, wherein the positions of the plurality of air holes in the first screw and the second screw correspond to each other. The substrate conveying device as described in item 2 of the patent application range, wherein the distance between adjacent two of the plurality of first screws and the distance between adjacent two of the plurality of second screws are substantially same. The substrate conveying device according to item 1 of the patent application scope, wherein the first screw and the second screw are one of the first screw and one of the second screw extending in the direction of the conveying path . The substrate conveying device according to item 5 of the patent application range, wherein the plurality of air holes are arranged along the thread of the first screw and the thread of the second screw, respectively. The substrate conveying device as described in item 6 of the patent application range, wherein the plurality of air holes are convex portions or concave portions provided in the screw thread. The substrate conveying device as described in item 1 of the patent application range, wherein the air pressure control unit includes a vacuum suction device. The substrate conveying device according to item 1 of the patent application range, wherein the air pressure control unit only penetrates the plurality of substrates through the plurality of air holes in the first screw and the second screw Pump or jet on both sides. The substrate conveying device as described in item 1 of the patent application scope, wherein the size of each of the plurality of air holes is substantially the same.

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