TWM558908U - Probe test simulation system - Google Patents

Probe test simulation system Download PDF

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Publication number
TWM558908U
TWM558908U TW106216814U TW106216814U TWM558908U TW M558908 U TWM558908 U TW M558908U TW 106216814 U TW106216814 U TW 106216814U TW 106216814 U TW106216814 U TW 106216814U TW M558908 U TWM558908 U TW M558908U
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Taiwan
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probe
test
tested
electric cylinder
electronic
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TW106216814U
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Chinese (zh)
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Bang-Cheng Qiu
rong-shu Huang
song-mao Wu
jun-ting Guo
yu-ting Liang
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Jthink Tech Ltd
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Publication of TWM558908U publication Critical patent/TWM558908U/en

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Abstract

一種探針測試模擬系統,包含一測試主機、一配電箱、一電源供應器及一電子負載,該測試主機具有一電子電動缸,其可搭配一待測探針,該配電箱用以將該電源供應器所提供之電力分配至該電子負載及該測試主機,其更包含一電動缸控制介面,藉以驅動該電子電動缸,使該電子電動缸來回移動而帶動該待測探針反覆與待測品接觸,且進一步對該待測探針通以電流,配合該電子負載將通過該待測探針的電流固定在設定值。本創作係在該待測探針上增加了電流,模擬出該待測探針實際工作環境,以檢測出該待測探針的實際使用壽命。A probe test simulation system includes a test host, a power distribution box, a power supply, and an electronic load. The test host has an electronic electric cylinder that can be coupled with a probe to be tested. The power provided by the power supply is distributed to the electronic load and the test host, and further includes an electric cylinder control interface for driving the electronic electric cylinder to move the electronic electric cylinder back and forth to drive the probe to be tested and to be repeated The test article is in contact with, and further, a current is applied to the probe to be tested, and the current passing through the probe to be tested is fixed at a set value in conjunction with the electronic load. The author adds a current to the probe to be tested, and simulates the actual working environment of the probe to be tested to detect the actual service life of the probe to be tested.

Description

探針測試模擬系統Probe test simulation system

一種探針測試系統,尤其是指一種探針測試模擬系統。 A probe test system, especially a probe test simulation system.

積體電路在製作完成後,需要利用探針對積體電路的接腳進行訊號測試,確保積體電路的接腳可正常發揮功能,能正常的輸入/輸出訊號。一般常用之探針的內部具有彈簧,用以緩衝探針與接腳接觸時之衝擊力。在接觸的過程中,探針內的彈簧會不斷地伸長及壓縮,使彈簧本身有所損耗,當彈簧型變次數達到一定程度時,會因超過其自身之彈性限度造成彈性疲乏,使彈簧老舊或損毀,導致探針無法使用而必須更換,進而讓使用成本增加,由於半導體封裝為一種高度專業化的工業,為達到產品的高良率,任一環節的流程皆需要相當精確的管控,其中對於探針本身的壽命檢測也是一項不可忽視的程序。 After the integrated circuit is completed, it is necessary to use the probe to perform signal test on the pin of the integrated circuit to ensure that the pin of the integrated circuit can function normally and can input/output signals normally. The commonly used probe has a spring inside to buffer the impact force when the probe is in contact with the pin. During the contact process, the spring inside the probe will continuously elongate and compress, causing the spring itself to be worn out. When the number of spring type changes reaches a certain level, it will cause elastic fatigue due to exceeding its own elastic limit, making the spring old. Old or damaged, the probe can not be used and must be replaced, which increases the cost of use. Since the semiconductor package is a highly specialized industry, in order to achieve high yield of the product, the process of any link needs to be quite precisely controlled. Life testing of the probe itself is also a procedure that cannot be ignored.

習知技術對探針本身的壽命檢測方式為將一待測探針安裝在一電子電動缸上,藉由電子電動缸帶動該待測探針重複往返移動,使待測探針反覆不斷地與測試錫球接觸,讓該待測探針中的彈簧連續伸長及壓縮,以測得該待測探針在彈性限度內所能負荷的最大伸縮次數。 The method for detecting the life of the probe itself by the prior art is to mount a probe to be tested on an electronic electric cylinder, and the probe to be tested is repeatedly moved back and forth by the electronic electric cylinder, so that the probe to be tested repeatedly and repeatedly The solder ball is tested for contact, and the spring in the probe to be tested is continuously elongated and compressed to measure the maximum number of expansions of the probe to be tested within the elastic limit.

然而,探針實際應用於測試積體電路的接腳時,會在探針上通以訊號電流以測試積體電路接腳的訊號傳輸能力,該訊號電流會因電流大小或訊號強弱等因素影響探針內部彈簧的性質,或是因為電流通過使本身溫度上升,導致彈力係數有所變化,使彈簧難以再伸縮。但現有對探針本身的壽命檢測時,僅藉由機械能的方式,讓待測探針反覆接觸測試錫球,使彈簧在壓縮跟 伸展之間來回多次,以此測試方法得到的探針預估使用次數與探針實際使用次數有所落差,且實際使用次數比測試得出的預估使用次數還要少,使用者若僅依探針本身的壽命檢測所得之數據更換探針,該些探針往往已經超過其彈性限度,使得經該些探針所測試之接腳存在誤差,進而降低產品的良率。 However, when the probe is actually used to test the pin of the integrated circuit, a signal current is applied to the probe to test the signal transmission capability of the integrated circuit pin. The signal current may be affected by factors such as the magnitude of the current or the strength of the signal. The nature of the internal spring of the probe, or because the current passes through the temperature, causing the elastic coefficient to change, making it difficult for the spring to re-stretch. However, when the life of the probe itself is detected, the probe to be tested is repeatedly contacted with the test solder ball by means of mechanical energy, so that the spring is in compression. Stretching back and forth multiple times, the estimated number of probes used in this test method is different from the actual number of probes used, and the actual number of uses is less than the estimated number of uses obtained by the test. The probes are replaced by data obtained from the lifetime detection of the probes, which often exceed their elastic limits, causing errors in the pins tested by the probes, thereby reducing the yield of the product.

有鑑於現有的探針測試系統僅用機械能方式對探針進行測試,與探針實際工作環境有所落差,並無法有效評估探針實際可用壽命,本創作之主要目的係提出一種探針測試模擬系統,將電流施加於待測探針,模擬出探針實際工作時的環境,藉以得知探針真正的損耗情形以及真實使用次數。 In view of the fact that the existing probe test system only uses mechanical energy to test the probe, and the actual working environment of the probe is different, and the actual usable life of the probe cannot be effectively evaluated, the main purpose of the present invention is to provide a probe test. The analog system applies current to the probe to be tested, simulating the environment in which the probe actually works, so as to know the true loss of the probe and the actual number of uses.

為達成前述目的,本創作探針測試模擬系統包含有:一測試主機,其具有一電子電動缸,該電子電動缸之一端裝設一上模塊,該上模塊再與一待測探針相接,藉由該電子電動缸驅動該上模塊反覆移動,使該待測探針可移動接觸至一測試基板;一配電箱,與該測試主機相連接,其具有:一計數器,用以設定該電子電動缸的運動次數;一行程控制單元,用以控制該上模塊的停止時間;一電壓控制單元,用以控制該上模塊的通電時間;一電源供應器,與該配電箱連接,提供直流電流至該配電箱運作;一電子負載,其與該測試主機及該配電箱連接,該電子負載具有一定電流模式,用以測試該待測探針於測試過程中的電壓及電阻的變化。 In order to achieve the foregoing objective, the creation probe test simulation system comprises: a test main body having an electronic electric cylinder, one end of the electronic electric cylinder is provided with an upper module, and the upper module is further connected with a probe to be tested. The electronic module is driven to move the upper module to move, so that the probe to be tested can be moved into contact with a test substrate; a power distribution box is connected to the test host, and has a counter for setting the electronic The number of movements of the electric cylinder; a stroke control unit for controlling the stop time of the upper module; a voltage control unit for controlling the energization time of the upper module; and a power supply connected to the distribution box to provide a direct current To the distribution box, an electronic load is connected to the test host and the distribution box, and the electronic load has a current mode for testing the voltage and resistance change of the probe to be tested during the test.

本創作係利用該電源供應器提供電源,搭配該電子負載模擬出電流,使得該待測探針能在與其檢測封裝端接腳時相近的環境下對該待測探針進行測試,進而測試出更接近該待測探針能負荷工作量的使用次數。 The author uses the power supply to provide power, and simulates the current with the electronic load, so that the probe to be tested can test the probe to be tested in an environment similar to the case where the package terminal is detected, and then test It is closer to the number of times the probe to be tested can load the workload.

10‧‧‧測試主機 10‧‧‧Test host

11‧‧‧基座 11‧‧‧Base

12‧‧‧電子電動缸 12‧‧‧Electric electric cylinder

121‧‧‧活塞桿 121‧‧‧ piston rod

13‧‧‧上模塊 13‧‧‧Upper module

131‧‧‧導桿孔 131‧‧‧Guide hole

132‧‧‧導桿 132‧‧‧guides

14‧‧‧下模塊 14‧‧‧Next module

16‧‧‧測試基板 16‧‧‧Test substrate

161‧‧‧測試錫球 161‧‧‧Testing the solder ball

18‧‧‧待測探針 18‧‧‧ Probes to be tested

181‧‧‧彈簧 181‧‧ ‧ spring

182‧‧‧針頭 182‧‧‧ needle

20‧‧‧配電箱 20‧‧‧ distribution box

21‧‧‧計數器 21‧‧‧ counter

23‧‧‧行程控制單元 23‧‧‧Travel Control Unit

231‧‧‧起點旋鈕 231‧‧‧ starting point knob

233‧‧‧終點旋鈕 233‧‧‧End knob

25‧‧‧電壓控制單元 25‧‧‧Voltage Control Unit

251‧‧‧截止旋鈕 251‧‧‧cutoff knob

253‧‧‧供電旋鈕 253‧‧‧Power supply knob

27‧‧‧電動缸控制介面 27‧‧‧Electric cylinder control interface

30‧‧‧電源供應器 30‧‧‧Power supply

40‧‧‧電子負載 40‧‧‧Electronic load

P1‧‧‧起點位置 P1‧‧‧ starting position

P2‧‧‧終點位置 P2‧‧‧ end position

T1‧‧‧起點暫停時段 T1‧‧‧ starting time

T2‧‧‧終點暫停時段 T2‧‧‧ stoppage

T3‧‧‧截止時間 T3‧‧‧ deadline

T4‧‧‧供電時間 T4‧‧‧Power supply time

圖1:本創作探針測試模擬系統之電路方塊圖。 Figure 1: Circuit block diagram of the authoring probe test simulation system.

圖2:本創作之測試主機示意圖。 Figure 2: Schematic diagram of the test host for this creation.

圖3:本創作之探針測試動作示意圖。 Figure 3: Schematic diagram of the probe test action of this creation.

圖4:本創作之探針測試動作時序圖。 Figure 4: Timing diagram of the probe test action of this creation.

請參見圖1至圖2,本創作一種探針測試模擬系統包含一測試主機10、一配電箱20、一電源供應器30及一電子負載40。 Referring to FIG. 1 to FIG. 2 , a probe test simulation system includes a test host 10 , a power distribution box 20 , a power supply 30 , and an electronic load 40 .

該測試主機10包含一基座11、一電子電動缸12、一上模塊13及一下模塊14。該電子電動缸12、該上模塊13及該下模塊14皆裝設於該基座11上,本實施例中,該電子電動缸12具有一活塞桿121,該活塞桿121可來回移動;該上模塊13之一面連接於該電子電動缸12之活塞桿121一端而由該活塞桿121帶動,該上模塊13上具有複數個導桿孔131,該些導桿孔131供對應的複數個導桿132穿設,使該上模塊13能在該些導桿132的長度範圍內上下來回移動;該下模塊14設於該上模塊13的相對下方,用以架設該些導桿132及一測試基板16,其中該測試基板16與該下模塊14電性連接。 The test host 10 includes a base 11, an electronic electric cylinder 12, an upper module 13, and a lower module 14. The electronic electric cylinder 12, the upper module 13 and the lower module 14 are all mounted on the base 11. In the embodiment, the electronic electric cylinder 12 has a piston rod 121, and the piston rod 121 can move back and forth; One end of the upper module 13 is connected to one end of the piston rod 121 of the electronic electric cylinder 12 and is driven by the piston rod 121. The upper module 13 has a plurality of guide rod holes 131, and the guide rod holes 131 are provided for corresponding plurality of guides. The rod 132 is disposed to enable the upper module 13 to move up and down within the length of the guide rods 132. The lower module 14 is disposed below the upper module 13 for erecting the guide rods 132 and a test. The substrate 16 is electrically connected to the lower module 14 .

該配電箱20與該測試主機10相連接,其中該配電箱20之正端與該上模塊13電性連接,且包含一計數器21、一行程控制單元23及一電壓控制單元25。 The power distribution box 20 is connected to the test host 10. The positive end of the power distribution box 20 is electrically connected to the upper module 13 and includes a counter 21, a stroke control unit 23 and a voltage control unit 25.

該計數器21可設定該電子電動缸12的重複往返移動及顯示當前已往返的次數。 The counter 21 can set the repeated round trip movement of the electronic electric cylinder 12 and display the number of times the current round trip has been performed.

該配電箱20另與該電子電動缸12相連接,且該配電箱20更具有一電動缸控制介面27,用以控制及設定該電子電動缸12的移動情形。 The power distribution box 20 is further connected to the electronic electric cylinder 12, and the power distribution box 20 further has an electric cylinder control interface 27 for controlling and setting the movement condition of the electronic electric cylinder 12.

一電源供應器30,其與該配電箱20相連接,用以供應直流電壓源至該配電箱20,使該配電箱20得以運作。 A power supply 30 is coupled to the distribution box 20 for supplying a DC voltage source to the distribution box 20 to operate the distribution box 20.

一電子負載40,其與該測試主機10及該配電箱20連接,其中該電子負載40之正極與該下模塊14電性連接,該電子負載40之負極與該配電箱20之負端電性連接;該電子負載40提供一阻抗值而決定一固定電流值,可使流經該待測探針18的電流為該電子負載40所設定之固定值。 An electronic load 40 is connected to the test host 10 and the power distribution box 20, wherein a positive pole of the electronic load 40 is electrically connected to the lower module 14, and a negative pole of the electronic load 40 and a negative terminal of the power distribution box 20 are electrically connected. The electronic load 40 provides an impedance value to determine a fixed current value such that the current flowing through the probe 18 to be tested is a fixed value set by the electronic load 40.

在進行測試前,該待測探針18安裝至該上模塊13,該測試基板16安裝至下模塊14,該待測探針18未與該測試基板16接觸,且該配電箱20尚未供電至該上模塊13,首先該電源供應器30提供一組電壓電流至該配電箱20供為工作電力,該配電箱20即會將工作電力分配至該測試主機10、該電子電動缸12及該電子負載40使該些元件能正常運作;接著於該配電箱20上之該計數器21設定欲測試之次數。 Before the test, the probe 18 to be tested is mounted to the upper module 13, the test substrate 16 is mounted to the lower module 14, the probe 18 to be tested is not in contact with the test substrate 16, and the distribution box 20 is not yet powered. The upper module 13, firstly, the power supply 30 supplies a set of voltage currents to the distribution box 20 for working power, and the distribution box 20 distributes the working power to the test host 10, the electronic electric cylinder 12 and the electronic The load 40 enables the components to function properly; then the counter 21 on the distribution box 20 sets the number of times to be tested.

請進一步參考圖3,該測試基板16進一步具有複數種測試錫球161,該些測試錫球161可以是圓球狀、片狀或是其他形狀。本實施例中,該待測探針18呈長形筆狀,且具有一彈簧181及一針頭182,該彈簧181在該針頭182接觸該些測試錫球時用以緩衝該待測探針18,該針頭182的形狀可以是半球狀、針頭狀、筆筒狀或其他形狀,可依據不同類型的該針頭182選擇對應的該測試錫球161。 With further reference to FIG. 3, the test substrate 16 further has a plurality of test solder balls 161, which may be in the form of spheres, sheets or other shapes. In this embodiment, the probe 18 to be tested has an elongated pen shape and has a spring 181 and a needle 182. The spring 181 is used to buffer the probe 18 to be tested when the needle 182 contacts the test solder balls. The shape of the needle 182 may be hemispherical, needle-shaped, pen-shaped or other shape, and the corresponding test solder ball 161 may be selected according to different types of the needle 182.

請進一步參考圖4,本實施例中,該行程控制單元23具有一起點旋鈕231及一終點旋鈕233,該起點旋鈕231藉由旋轉調整的方式設定一起點暫停時段T1,該起點暫停時段T1為該待測探針18尚未與該測試基板16接觸的時間,該終點旋鈕233藉由旋轉調整的方式設定一終點暫停時段T2,該終點暫停時段T2為該待測探針18與該測試基板16接觸的時間。 Referring to FIG. 4, in the embodiment, the stroke control unit 23 has a point knob 231 and an end knob 233. The start knob 231 sets a pause period T1 together by a rotation adjustment manner. The start pause period T1 is When the probe 18 to be tested has not been in contact with the test substrate 16, the end knob 233 sets an end pause period T2 by means of rotation adjustment, and the end pause period T2 is the probe 18 to be tested and the test substrate 16 The time of contact.

測試過程中,倘若先對該待測探針18通以電流,再讓該待測探針與該測試基板16接觸,會使該待測探針18之尖端產生極大電壓,進而影響測試的準確性,因此本實施例中,該電壓控制單元25具有一截止旋鈕251及一供電旋鈕253,該截止旋鈕251可藉由旋轉調整的方式設定一截止時間T3,該截止時間T3為該待測探針18尚未通電之時間,該供電旋鈕253可藉由旋轉調整的方式設定一供電時間T4,該供電時間T4為將該待測探針18通以電流的時間。 During the test, if the probe 18 is first subjected to a current, and then the probe to be tested is brought into contact with the test substrate 16, the tip of the probe 18 to be tested generates a maximum voltage, thereby affecting the accuracy of the test. Therefore, in the embodiment, the voltage control unit 25 has a cutoff knob 251 and a power supply knob 253. The cutoff knob 251 can set a cutoff time T3 by means of rotation adjustment, and the cutoff time T3 is the test to be tested. When the needle 18 is not energized, the power supply knob 253 can set a power supply time T4 by rotating adjustment, and the power supply time T4 is a time when the probe 18 to be tested is connected to the current.

進行測試時,該上模塊13會先在一起點位置P1停留一段時間,即所設定之該起點暫停時段T1,接著該電子電動缸12之活塞桿121在一段移動時間內移動,使該上模塊13從該起點位置P1移動至一終點位置P2。當該上模塊13移動至該終點位置P2時,將停留一段所設定之該終點暫停時段T2,此時該待測探針18即與該測試基板16上的其中一測試錫球161接觸,在終點暫停時段T2內,首先經過所設定之該截止時間T3後,該配電箱20隨即提供電壓至該上模塊13,使該上模塊13、該待測探針18、該測試基板16及該下模塊14同時導通,產生一測試電流且流經該電子負載40中;經過該供電時間T4後,該配電箱20停止供應電壓至該上模塊13,當該終點暫停時段T2一過,該電子電動缸12會再次移動,使該上模塊13從該終點位置P2移動回該起點位置P1,經過一段所設定之該起點暫停時段T1後,該上模塊13再次移動至該終點位置P2,如此依照以上所述之步驟,使該探針不斷地與該些測試錫球161接觸,反覆來回達到該計數器21所設定之測試次數。 When the test is performed, the upper module 13 first stays at the point position P1 for a period of time, that is, the set start period pause period T1, and then the piston rod 121 of the electronic electric cylinder 12 moves for a moving time, so that the upper module 13 moves from the starting position P1 to an ending position P2. When the upper module 13 moves to the end position P2, it will stay for a set period of the end point pause period T2, at which time the probe 18 to be tested is in contact with one of the test solder balls 161 on the test substrate 16, In the end point suspension period T2, after the set end time T3 is first passed, the distribution box 20 then supplies a voltage to the upper module 13, so that the upper module 13, the probe to be tested 18, the test substrate 16 and the lower portion The module 14 is simultaneously turned on to generate a test current and flows through the electronic load 40; after the power supply time T4, the distribution box 20 stops supplying the voltage to the upper module 13, and when the end time pause period T2 is over, the electronic electric The cylinder 12 will move again to move the upper module 13 from the end position P2 back to the starting position P1. After a set period of the starting time pause period T1, the upper module 13 moves to the end position P2 again, thus following the above. In the step, the probe is continuously contacted with the test solder balls 161, and the number of tests set by the counter 21 is repeated back and forth.

當該測試電流流經上模塊13、該待測探針18、該測試基板16及該下模塊14而進入該電子負載40時,該電子負載40會依據設定,將該測試電流固定於設定之定值,使流經該待測探針18的該測試電流與該電子負載40所設定的電流值相同。該測試主機10會對該待測探針18進行多個檢測週期的測試,一般而言,在一次的檢測週期中對該待測探針18進行10000次的通電測試,其 中,每進行100次的通電測試,會更換新的該測試基板16,所以每個檢測週期中將重複多次更換該測試基板16,以保持該待測探針18所接觸的皆為較新的該些測試錫球161。 When the test current flows through the upper module 13, the probe 18 to be tested, the test substrate 16 and the lower module 14 to enter the electronic load 40, the electronic load 40 is fixed to the set current according to the setting. The set value is such that the test current flowing through the probe 18 to be tested is the same as the current value set by the electronic load 40. The test host 10 performs a plurality of test cycles on the probe 18 to be tested. Generally, the probe 18 to be tested is subjected to a power-on test 10,000 times in one detection cycle. In the power-on test performed 100 times, the new test substrate 16 is replaced, so that the test substrate 16 is repeatedly replaced in each detection cycle to keep the probe 18 to be tested in contact with each other. The test balls 161.

測試結束後,再藉由一探針測試儀對該待測探針18本身進行其阻抗及彈力測試,以及利用電子掃描顯微鏡(Scanning Electron Microscope,SEM)分析該待測探針18之尖端磨損及沾黏的情形。當該待測探針18有磨損或沾黏時,即利用雷射清潔機清潔整理該待測探針18,使其在外觀上恢復原貌,並再利用探針測試儀檢測該待測探針18之阻抗及彈力狀況。當該待測探針18之阻抗及彈性能力符合該待測探針18之製造商所提供之數據時,則再將該待測探針18重新置回該測試主機10,並將檢測週期減少至5000次,如此反覆測試該待測探針18,並依序遞減檢測週期,直到該待測探針18經清潔整理後仍無法回復原有的阻抗值及彈性能力,即可得知該待測探針18可使用的次數,以及了解供應商所提供的數據及實際可使用次數之差異。 After the test, the impedance and elasticity test of the probe 18 itself is performed by a probe tester, and the tip wear of the probe 18 to be tested is analyzed by using a scanning electron microscope (SEM). Sticky situation. When the probe 18 to be tested is worn or stained, the probe 18 to be tested is cleaned and cleaned by a laser cleaner to restore its appearance to the original appearance, and the probe to be tested is detected by a probe tester. 18 impedance and elastic condition. When the impedance and the elastic capability of the probe 18 to be tested meet the data provided by the manufacturer of the probe 18 to be tested, the probe 18 to be tested is reset back to the test host 10, and the detection period is reduced. Up to 5000 times, the probe 18 to be tested is repeatedly tested, and the detection period is sequentially decreased until the probe 18 to be tested cannot be restored to the original impedance value and elastic ability after being cleaned and cleaned. The number of times the probe 18 can be used, as well as the difference between the data provided by the supplier and the actual number of uses.

本創作利用電氣方式將欲測量之探針增加了電壓電流,以模擬探針在實際應用於檢測封裝端子時之工作環境,再搭配現有的探針測試儀及電子掃描顯微鏡檢測,可得知該探針實際上經過多少次壓合測試後老舊甚至損毀,比起傳統僅用壓合來測試的方式,本創作更能得到較精確的探針使用壽命。 This creation uses an electrical method to increase the voltage and current of the probe to be measured, so as to simulate the working environment of the probe when it is actually applied to the detection of the package terminal, and then cooperate with the existing probe tester and electronic scanning microscope to detect the The number of times the probe actually passes through the compression test is old and even damaged. Compared with the traditional method of pressing only the test, the creation can obtain a more accurate probe service life.

Claims (4)

一種探針測試模擬系統,其包含: 一測試主機,其具有一電子電動缸,該電子電動缸之一端裝設一上模塊,該上模塊再與一待測探針相接,藉由該電子電動缸驅動該上模塊反覆移動,使該待測探針可移動接觸至一測試基板; 一配電箱,與該測試主機相連接,其具有: 一計數器,用以設定該電子電動缸的運動次數; 一行程控制單元,用以控制該上模塊的停止時間; 一電壓控制單元,用以控制該上模塊的通電時間; 一電源供應器,與該配電箱連接,提供直流電流至該配電箱運作; 一電子負載,其與該測試主機及該配電箱連接,該電子負載具有一定電流模式,用以固定該待測探針於測試過程中所通過的電流值。A probe test simulation system includes: a test main body having an electronic electric cylinder, one end of the electronic electric cylinder is provided with an upper module, and the upper module is further connected with a probe to be tested, by the electronic The electric cylinder drives the upper module to move repeatedly, so that the probe to be tested can be moved into contact with a test substrate; a distribution box is connected to the test host, and has: a counter for setting the number of movements of the electronic electric cylinder a stroke control unit for controlling the stop time of the upper module; a voltage control unit for controlling the energization time of the upper module; a power supply connected to the distribution box to provide a direct current to the distribution box An electronic load connected to the test host and the power distribution box, the electronic load having a current mode for fixing a current value of the probe to be tested during the test. 如請求項1所述之探針測試模擬系統,該配電箱更包含了一電動缸控制介面,該電動缸控制介面用以設定該電子電動缸的移動。The probe test simulation system of claim 1, further comprising an electric cylinder control interface for setting the movement of the electronic electric cylinder. 如請求項2所述之探針測試模擬系統,該行程控制單元包含: 一起點旋鈕,用以設定一起點暫停時段,該起點暫停時段為該待測探針停留於一起點位置的時間,該待測探針停留於起點位置時未與該測試基板相接觸; 一終點旋鈕,用以設定一終點暫停時段,該終點暫停時段為該上模塊位於一終點位置所停留的時間。The probe test simulation system of claim 2, the stroke control unit comprises: a point knob together for setting a point pause period, wherein the start pause period is a time at which the probe to be tested stays at a point position together, The test probe is not in contact with the test substrate when it stays at the starting position; a stop knob is used to set an end pause period, which is the time at which the upper module is at an end position. 如請求項3所述之探針測試模擬系統,該電壓控制單元包含: 一截止旋鈕,用以設定在該終點暫停時段內的一截止時間,該截止時間為該待測探針尚未通以電流的時間; 一供電旋鈕,用以設定在該終點暫停時段內的一供電時間,該供電時間為該探針通以電流的時間。The probe test simulation system of claim 3, wherein the voltage control unit comprises: a cutoff knob for setting a cutoff time in the pause period of the end point, the cutoff time is that the probe to be tested is not yet energized A power supply knob for setting a power supply time during the pause period of the end point, the power supply time being a time when the probe is energized.
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Cited By (6)

* Cited by examiner, † Cited by third party
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CN111766544A (en) * 2020-05-28 2020-10-13 苏州华兴源创科技股份有限公司 Testing device and method for POGO Pin connector
CN112903022A (en) * 2021-02-04 2021-06-04 上海泽丰半导体科技有限公司 Probe test system, operation method and detection method thereof
CN114252838A (en) * 2021-12-23 2022-03-29 西安交通大学 MEMS vertical probe comprehensive test platform and test method
CN116203401A (en) * 2023-04-28 2023-06-02 法特迪精密科技(苏州)有限公司 Switching probe striking power-on simulation device and adjusting method thereof
CN116430209A (en) * 2023-04-28 2023-07-14 法特迪精密科技(苏州)有限公司 Switching probe striking power-on simulation method
CN116466221A (en) * 2023-05-06 2023-07-21 法特迪精密科技(苏州)有限公司 Switching probe testing device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111766544A (en) * 2020-05-28 2020-10-13 苏州华兴源创科技股份有限公司 Testing device and method for POGO Pin connector
CN112903022A (en) * 2021-02-04 2021-06-04 上海泽丰半导体科技有限公司 Probe test system, operation method and detection method thereof
CN114252838A (en) * 2021-12-23 2022-03-29 西安交通大学 MEMS vertical probe comprehensive test platform and test method
CN116203401A (en) * 2023-04-28 2023-06-02 法特迪精密科技(苏州)有限公司 Switching probe striking power-on simulation device and adjusting method thereof
CN116430209A (en) * 2023-04-28 2023-07-14 法特迪精密科技(苏州)有限公司 Switching probe striking power-on simulation method
CN116466221A (en) * 2023-05-06 2023-07-21 法特迪精密科技(苏州)有限公司 Switching probe testing device
CN116466221B (en) * 2023-05-06 2024-03-19 苏州法特迪科技股份有限公司 Switching probe testing device

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