CN116430209A - Switching probe striking power-on simulation method - Google Patents
Switching probe striking power-on simulation method Download PDFInfo
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- CN116430209A CN116430209A CN202310476104.9A CN202310476104A CN116430209A CN 116430209 A CN116430209 A CN 116430209A CN 202310476104 A CN202310476104 A CN 202310476104A CN 116430209 A CN116430209 A CN 116430209A
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- 239000000523 sample Substances 0.000 title claims abstract description 107
- 238000004088 simulation Methods 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims abstract description 33
- 238000012360 testing method Methods 0.000 claims abstract description 46
- 238000012546 transfer Methods 0.000 claims abstract description 40
- 230000008569 process Effects 0.000 claims abstract description 15
- 230000009471 action Effects 0.000 claims description 12
- 238000003825 pressing Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000013461 design Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- VUACHFWYFDCGJF-UNTBIKODSA-N (1r)-7-methoxy-1-[(4-methoxyphenyl)methyl]-2,2-dimethyl-3,4-dihydro-1h-isoquinolin-2-ium-8-ol;chloride Chemical compound [Cl-].C1=CC(OC)=CC=C1C[C@H]1[N+](C)(C)CCC2=CC=C(OC)C(O)=C21 VUACHFWYFDCGJF-UNTBIKODSA-N 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
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Abstract
The invention belongs to the technical field of semiconductor testing, and particularly relates to a striking and electrifying simulation method for an adapter probe; the method comprises the steps of starting a motor under the condition that an upper contact and a lower contact are separated, enabling an upper conductive layer to be in contact with a transfer probe to realize strike simulation of the transfer probe, enabling the upper contact to be in contact with the lower contact, powering on the transfer probe, conducting power on simulation of the transfer probe, separating the upper contact from the lower contact to complete power on simulation process, and finally separating the upper conductive layer from the transfer probe to realize system reset; the invention not only can simulate the real working scene of the transfer probe in the probe test socket, but also saves a part of parts compared with the prior art, further reduces the cost of the device, further reduces the volume and the complexity, and provides test guarantee for the transfer probe to effectively contact the chip to be tested and the tester.
Description
Technical Field
The invention belongs to the technical field of semiconductor testing, and particularly relates to a striking power-on simulation method for an adapter probe.
Background
The transfer probe is a key part on the probe test socket, as shown in fig. 1, one side is to be connected with a chip to be tested, the other side is to be connected with a tester, the tester is to write a test program into the chip to be tested through the transfer probe, and the test result is to be read from the chip to be tested through the transfer probe, so that the electrical connection reliability of the transfer probe is important in the chip test process.
The factor that influences switching probe electrical connection reliability has two, and one is that the high-temperature damage of switching probe can be aroused to the heavy current, and another is that beating the in-process repeatedly with the chip that awaits measuring can arouse switching probe physical damage, in order to ensure switching probe normal operating, the reply switching probe carries out reliability test, including tolerance current and contact life two aspects content.
At present, a test technical means for connecting the switching probe to an adjustable current source to conduct current flow has appeared, and by changing the current, the maximum current which can be tolerated by the switching probe can be tested, and the service life of the switching probe under a certain current can be tested; however, the rule of influencing the service life of the transfer probe by repeatedly striking with the chip to be tested is not yet consulted in the related prior art.
More importantly, in the practical application process, the chip to be tested is found to repeatedly contact with the transfer probe, so that the physical form of the transfer probe is changed, and especially for the petaline needle point, such as the upper part in fig. 1, the physical form is changed to be obvious, which also influences the parameters such as withstand current and the like, and further influences the service life of the transfer probe together.
Therefore, two factors affecting the electrical connection reliability of the switching probe are not independent of each other, but interact, so that to obtain a more accurate test result, the service life of the switching probe under different currents cannot be simply tested, or the service life of the switching probe under repeated impact of a chip to be tested is simply tested, but the actual situation is simulated, and the process of powering on and physically disconnecting after impact is performed, however, such test equipment does not exist in the market yet.
Disclosure of Invention
The invention aims to improve the prior art, designs the switching probe striking power-on simulation device, not only can simulate the real working scene of the switching probe in the probe test socket and provide a technical basis for realizing the service life test of the switching probe under the combined action of different test currents and repeated striking of a chip to be tested, but also saves a part of parts compared with the prior art, further reduces the cost of the device, further reduces the volume and further reduces the complexity, and provides test guarantee for the switching probe to effectively contact the chip to be tested and a tester.
The purpose of the invention is realized in the following way:
a switching probe striking power-on simulation method comprises the following steps:
a, enabling a cam non-circular arc part to contact an upper movable plate, limiting the distance between the upper movable plate and a lower movable plate by a second bolt, separating an upper contact from a lower contact under the action of the elastic force of a second spring, and separating an upper conductive layer from a transfer probe;
step b, starting a motor, wherein in the rotation process of a cam, the arc part is more and more close to the upper movable plate, at the moment, the cam drives the upper movable plate and the lower movable plate to synchronously move downwards until the upper conductive layer is contacted with the transfer probe, and the striking simulation of the transfer probe is realized at the moment that the upper conductive layer is contacted with the transfer probe;
c, the cam continues to rotate to drive the upper movable plate to move downwards, and as the lower movable plate is contacted with the switching probe, the distance between the upper movable plate and the lower movable plate is gradually reduced, and when the arc part of the cam is contacted with the upper movable plate, the upper contact is contacted with the lower contact, and the switching probe is electrified;
d, the cam continues to rotate, the arc part is always contacted with the upper movable plate, and the upper contact and the lower contact are always contacted, so that the switching probe is electrified and simulated;
step e, the cam continues to rotate, the arc part of the cam is separated from the upper movable plate, the upper contact and the lower contact start to be separated under the action of the elastic force of the second spring, the switching probe is electrified, and the electrifying simulation process is completed;
f, the cam continues to rotate, the arc part is more and more far away from the upper movable plate, and the upper movable plate continues to move upwards under the action of the elastic force of the second spring until contacting the second bolt, so that the distance between the upper movable plate and the lower movable plate is reset;
and g, continuously rotating the cam, and synchronously moving the upper movable plate and the lower movable plate upwards under the action of the elastic force of the first spring to realize system resetting.
The switching probe striking power-on simulation method is applied to a switching probe striking power-on simulation device, and the switching probe striking power-on simulation device comprises a test base, a lower conductive layer, a motor, a cam, a pressing plate and an upper conductive layer.
Advantageous effects
The invention designs a switching probe striking power-on simulation device, which utilizes a cam to drive a pressing plate to move up and down, so that an upper conducting layer strikes the switching probe, thereby not only playing a role in simulating the process of loading a chip to be tested into a test socket, but also energizing the test probe, simulating the test process of the chip, being closer to a real working scene compared with a pure power-on test and a striking test, further being capable of taking into consideration the test of the service life of the switching probe under the combined action of power-on and striking, and improving the accuracy of a test result.
The second, the invention designs the clamp plate, the said clamp plate includes the fixed plate, upper movable plate and lower movable plate sequentially from top to bottom, the design of this three-layer clamp plate, make the power supply roller rotate under the condition of uniform speed, can realize the power on and cut off alternately, simulate the chip to be measured and put into the test socket and write the procedure to read out the test result, and change the intermittent process of the chip to be measured.
The third, the invention designs the cam, and part of the outer boundary of the cam is arc, and part is non-arc, the arc part can make the upper conducting layer keep motionless after striking the transfer probe, simulate the scene that the chip to be tested is placed in the test socket.
The invention can save the power supply roller, the power supply roller bracket, the front electric brush, the rear electric brush and the transmission structure by only adding five parts of the lower movable plate, the second bolt, the second spring, the lower contact and the upper contact, wherein the added lower movable plate is of a flat plate structure, the lower contact and the upper contact are of a cylindrical structure, the cost is low, the saved power supply roller is a non-standard part which needs special processing and manufacturing, the transmission structure is a series of parts with higher cost, and meanwhile, the power supply roller bracket, the front electric brush and the rear electric brush are also saved, so the cost of the device is further reduced.
Fifth, the invention saves the power supply roller, so that the relative position of the adjusting cam and the power supply roller is not required to be adjusted, and the complexity of the device is further reduced.
The fifth component of the lower movable plate, the second bolt, the second spring, the lower contact and the upper contact is increased in the space where the original pressing plate is located, so that the volume increase is negligible, the power supply roller bracket, the front electric brush, the rear electric brush and the transmission structure are saved, the volume of the device can be obviously reduced, the volume is further reduced, and the miniaturized design of the device is facilitated.
Seventh, the invention only needs a driving mechanism of the motor, can realize the power-on test and strike simulation at the same time, simple in construction, design ingenious, and have the same time sequence relation as in the test socket application process between two kinds of tests, simulate the reality of the scene and can be guaranteed.
Eighth, the platen structure of the invention utilizes the structural design of the relative positions and connection relations of the fixed plate, the upper movable plate, the first bolt, the first spring, the lower movable plate, the second bolt, the second spring, the lower contact and the upper contact, and realizes the simulation of a plurality of links of striking, energizing, de-energizing and resetting by utilizing the constant-speed rotation of the cam, thereby having ingenious design.
Ninth, the invention adopts the adjustable current source, can simulate the working condition of the switching probe in the test process of the test socket of the chip to be tested with different powers.
Drawings
FIG. 1 is a schematic diagram of a transfer probe product.
Fig. 2 is a schematic structural diagram of the switching probe striking power-on simulation device of the present invention.
FIG. 3 is a schematic diagram of the combination structure between a lower conductive layer with a plurality of stepped holes and a test base.
Fig. 4 is an assembly schematic between the test base and the cam.
FIG. 5 is a schematic view of the relative positions and assembly of the test base, platen and cam.
Fig. 6 is a schematic view of cam central angle parameter adjustment.
FIG. 7 is a flow chart of a method for simulating the striking and energization of a transfer probe.
In the figure: the testing device comprises a testing base, a 1-2 motor support, a 1-5 cam support, a 1-6 pressing plate support, a 2 lower conducting layer, a 4 motor, a 6 cam, a 6-1 rotating shaft, a 6-2 bearing, a 7 pressing plate, a 7-1 fixing plate, a 7-2 upper movable plate, a 7-3 first bolt, a 7-4 first spring, a 7-5 lower movable plate, a 7-6 second bolt, a 7-7 second spring, a 7-8 lower contact, a 7-9 upper contact, an 8 upper conducting layer, a 9 switching probe and a 10 adjustable current source.
Detailed Description
The following describes the embodiments of the present invention in further detail with reference to the accompanying drawings.
Mode one
The following is a specific embodiment of the present invention of the transfer probe striking power simulation device.
The structure schematic diagram of the switching probe striking power-on simulation device in the specific embodiment is shown in fig. 2, and the switching probe striking power-on simulation device comprises a test base 1, a lower conductive layer 2, a motor 4, a cam 6, a pressing plate 7 and an upper conductive layer 8;
the test base 1 top is provided with down conducting layer 2, be provided with the shoulder hole on the conducting layer 2 down, the shoulder hole is used for placing switching probe 9, cam 6 outer boundary part is the circular arc, and part is non-circular arc, and cam 6 pivot is less than the distance to the circular arc to the distance of non-circular arc, and cam 6 and motor 4 coaxial setting, at the uniform velocity rotation under the effect of motor 4, cam 6 top in clamp plate 7 top, control clamp plate 7 up-and-down motion, clamp plate 7 below is provided with conducting layer 8, under the cam 6 effect, go up conducting layer 8 and hit switching probe 9, go up conducting layer 8 and the two poles of adjustable electric source 10 of conducting layer 2 connection.
Mode two
The following is a specific embodiment of the present invention of the transfer probe striking power simulation device.
The switching probe striking power-on simulation device in this embodiment is further defined on the basis of the first embodiment: the lower conductive layer 2 is provided with a plurality of stepped holes which are distributed in an array and correspond to the switching probes of different types.
In this embodiment, a schematic diagram of the combined structure of the lower conductive layer 2 and the test base 1 is shown in fig. 3, wherein the stepped holes on the lower conductive layer 2 are designed to have different section diameters and different step depths according to the types of the transfer probes, so that the test base can adapt to the tests of the transfer probes of different types.
Mode three
The following is a specific embodiment of the present invention of the transfer probe striking power simulation device.
As shown in fig. 4, the switching probe striking power-on simulation device according to the first embodiment is further defined as follows: the testing base 1 is provided with two cam supports 1-5 and a motor support 1-2, a rotating shaft 6-1 is arranged in the middle of the cam 6, a bearing 6-2 is arranged at the outer end part of the rotating shaft 6-1, and the bearing 6-2 is arranged on the two cam supports 1-5 to realize the rotation installation of the cam 6 on the cam supports 1-5; the motor 4 is fixedly arranged on the motor bracket 1-2 and is coaxially arranged with the cam 6, and the motor 4 is fixedly connected with the rotating shaft 6-1 of the cam 6 through a coupler so as to realize uniform rotation of the cam 6 under the control of the motor 4.
Mode four
The following is a specific embodiment of the present invention of the transfer probe striking power simulation device.
As shown in fig. 5, the switching probe striking power-on simulation device according to the first embodiment is further defined as follows: the test base 1 is further provided with a pressing plate bracket 1-6, the pressing plate 7 sequentially comprises a fixed plate 7-1, an upper movable plate 7-2 and a lower movable plate 7-5 from top to bottom, the fixed plate 7-1 is installed on the pressing plate bracket 1-6, the upper surface of the upper movable plate 7-2 is contacted with the cam 6, a first bolt 7-3 passes through the upper movable plate 7-2 from bottom to top and is installed on the fixed plate 7-1, and a first spring 7-4 is further arranged between the first bolt 7-3 and the upper movable plate 7-2 and provides upward elastic force for the upper movable plate 7-2; the second bolt 7-6 is installed on the lower movable plate 7-5 by penetrating through the upper movable plate 7-2 from top to bottom, and the second bolt 7-6 is further provided with a second spring 7-7 at the middle part of the upper movable plate 7-2 and the lower movable plate 7-5 to provide downward elastic force for the lower movable plate 7-5 relative to the upper movable plate 7-2.
The upper conductive layer 8 is arranged below the lower movable plate 7-5, the lower movable plate 7-5 is also provided with a lower contact 7-8 which is connected with the upper conductive layer 8, penetrates through the lower movable plate 7-5 and extends upwards from the lower movable plate 7-5, the upper movable plate 7-2 is provided with an upper contact 7-9 which penetrates through the upper movable plate 7-2 and extends downwards from the upper movable plate 7-2, and the upper contact 7-9 is connected with an adjustable current source 10.
Mode five
The following is a specific embodiment of the adjusting method of the switching probe striking power-on simulation device.
The adjusting method of the switching probe striking and electrifying simulation device in the embodiment is realized on the switching probe striking and electrifying simulation device in the embodiment I, the embodiment II, the embodiment III or the embodiment IV, and comprises parameter adjustment and system adjustment;
the parameter adjustment steps are as follows:
step a, determining the rotation angular velocity of the motor 4 according to the test period TωThe method comprises the following steps:ω=2π/T；
step b, determining a central angle alpha 1 corresponding to the arc part of the cam 6 according to the contact time t1 of the chip to be tested and the transfer probe, wherein the central angle alpha 1 is as follows: α1=2ρt1/T; as shown in fig. 6;
the system adjustment steps are as follows: the switching probe 9 is placed on the test base 1, the distance between the upper movable plate 7-2 and the lower movable plate 7-5 is changed by adjusting the second bolt 7-6, so that the switching probe striking and electrifying simulation device can adapt to the height of the switching probe 9, the relative positions of the upper contact 7-9 and the lower contact 7-8 adapt to the distance between the upper movable plate 7-2 and the lower movable plate 7-5 by adjusting the downward extending length of the upper contact 7-9 from the upper movable plate 7-2, the upper contact 7-9 and the lower conductive layer 2 are connected with two poles of the adjustable current source 10, the motor 4 is started, and the striking and electrifying of the switching probe 9 are simulated.
It should be noted that, since the switching probe 9 is an elastic probe capable of extending and retracting along the direction in which it is located, an error of 0.1mm level is allowed for the adjustment of the distance between the upper movable plate 7-2 and the lower movable plate 7-5 and the adjustment of the distance between the upper contact 7-9 and the lower contact 7-8, thereby reducing the adjustment difficulty.
Mode six
The following is a specific embodiment of the method for simulating striking and energizing of the transfer probe.
The method for simulating the striking and energization of the transfer probe according to the embodiment is implemented on the apparatus for simulating the striking and energization of the transfer probe according to the first embodiment, the second embodiment, the third embodiment or the fourth embodiment, and the flowchart is shown in fig. 7, and includes the following steps:
step a, the cam 6 is in non-circular arc part contact with the upper movable plate 7-2, the distance between the upper movable plate 7-2 and the lower movable plate 7-5 is limited by the second bolt 7-6, the upper contact 7-9 and the lower contact 7-8 are separated under the elastic force of the second spring 7-7, and the upper conductive layer 8 is separated from the transfer probe 9;
step b, starting the motor 4, wherein in the rotating process of the cam 6, the arc part is more and more close to the upper movable plate 7-2, and at the moment, the cam 6 drives the upper movable plate 7-2 and the lower movable plate 7-5 to synchronously move downwards until the upper conductive layer 8 is contacted with the transfer probe 9, and the striking simulation of the transfer probe 9 is realized at the moment that the upper conductive layer 8 is contacted with the transfer probe 9;
step c, the cam 6 continues to rotate to drive the upper movable plate 7-2 to move downwards, because the lower movable plate 7-5 is contacted with the switching probe 9, the distance between the upper movable plate 7-2 and the lower movable plate 7-5 is gradually reduced, when the arc part of the cam 6 is contacted with the upper movable plate 7-2, the upper contact 7-9 is contacted with the lower contact 7-8, and the switching probe 9 is electrified;
d, the cam 6 continues to rotate, the arc part always contacts the upper movable plate 7-2, and the upper contact 7-9 and the lower contact 7-8 always contact, so that the switching probe 9 is electrified and simulated;
step e, the cam 6 continues to rotate, the arc part of the cam 6 is separated from the upper movable plate 7-2, the upper contact 7-9 and the lower contact 7-8 start to be separated under the action of the elastic force of the second spring 7-7, the switching probe 9 is electrified, and the electrifying simulation process is completed;
f, continuing to rotate the cam 6, enabling the arc part to be more and more far away from the upper movable plate 7-2, and enabling the upper movable plate 7-2 to continuously move upwards under the action of the elastic force of the second spring 7-7 until the upper movable plate 7-2 contacts the second bolt 7-6, so that the distance between the upper movable plate 7-2 and the lower movable plate 7-5 is reset;
and g, continuing to rotate the cam 6, and synchronously moving the upper movable plate 7-2 and the lower movable plate 7-5 upwards under the action of the elasticity of the first spring 7-4 to realize system resetting.
It should be noted that the above is only a specific embodiment of the present application, and is not intended to limit the present application, and various modifications and changes may be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.
It should be noted that, the technical features listed in the foregoing embodiments can be arranged and combined as long as they are not contradictory, and those skilled in the art can exhaust the results after each arrangement and combination according to the mathematical knowledge of the arrangement and combination learned by the senior citizen, and all the results after the arrangement and combination should be understood as being disclosed in the present application.
Claims (2)
1. The method for simulating striking and electrifying of the switching probe is characterized by comprising the following steps of:
a, enabling a non-circular arc part of a cam (6) to contact an upper movable plate (7-2), limiting the distance between the upper movable plate (7-2) and a lower movable plate (7-5) by a second bolt (7-6), separating an upper contact (7-9) from a lower contact (7-8) under the action of the elasticity of a second spring (7-7), and separating an upper conductive layer (8) from a transfer probe (9);
step b, starting the motor (4), wherein in the rotation process of the cam (6), the arc part is more and more close to the upper movable plate (7-2), at the moment, the cam (6) drives the upper movable plate (7-2) and the lower movable plate (7-5) to synchronously move downwards until the upper conductive layer (8) is contacted with the transfer probe (9), and the striking simulation of the transfer probe (9) is realized at the moment when the upper conductive layer (8) is contacted with the transfer probe (9);
c, the cam (6) continues to rotate to drive the upper movable plate (7-2) to move downwards, and as the lower movable plate (7-5) is contacted with the switching probe (9), the distance between the upper movable plate (7-2) and the lower movable plate (7-5) is gradually reduced, when the arc part of the cam (6) is contacted with the upper movable plate (7-2), the upper contact (7-9) is contacted with the lower contact (7-8), and the switching probe (9) is electrified;
d, the cam (6) continues to rotate, the arc part always contacts the upper movable plate (7-2), and the upper contact (7-9) and the lower contact (7-8) always contact, so that the switching probe (9) is electrified and simulated;
step e, the cam (6) continues to rotate, the arc part of the cam (6) is separated from the upper movable plate (7-2), the upper contact (7-9) and the lower contact (7-8) start to be separated under the elastic force of the second spring (7-7), the switching probe (9) is electrified to be ended, and the electrifying simulation process is completed;
f, the cam (6) continues to rotate, the arc part is more and more far away from the upper movable plate (7-2), and under the action of the elastic force of the second spring (7-7), the upper movable plate (7-2) continues to move upwards until contacting with the second bolt (7-6), so that the distance between the upper movable plate (7-2) and the lower movable plate (7-5) is reset;
and g, continuously rotating the cam (6), and synchronously moving the upper movable plate (7-2) and the lower movable plate (7-5) upwards under the action of the elastic force of the first spring (7-4) to realize system resetting.
2. The switching probe striking energization simulation method according to claim 1, wherein the switching probe striking energization simulation method is applied to a switching probe striking energization simulation device, and the switching probe striking energization simulation device comprises a test base (1), a lower conductive layer (2), a motor (4), a cam (6), a pressing plate (7) and an upper conductive layer (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310476104.9A CN116430209A (en) | 2023-04-28 | 2023-04-28 | Switching probe striking power-on simulation method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310476104.9A CN116430209A (en) | 2023-04-28 | 2023-04-28 | Switching probe striking power-on simulation method |
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| Publication Number | Publication Date |
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| CN116430209A true CN116430209A (en) | 2023-07-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202310476104.9A Withdrawn CN116430209A (en) | 2023-04-28 | 2023-04-28 | Switching probe striking power-on simulation method |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN205561892U (en) * | 2016-04-06 | 2016-09-07 | 深圳市美锐精密电子有限公司 | Testing arrangement is pressed to probe |
| CN206389060U (en) * | 2016-12-23 | 2017-08-08 | 亚洲电力设备(深圳)股份有限公司 | Environmentally friendly gas-insulated cabinet |
| TWM558908U (en) * | 2017-11-10 | 2018-04-21 | Jthink Tech Ltd | Probe test simulation system |
| CN211528039U (en) * | 2020-02-11 | 2020-09-18 | 张福建 | Building engineering quality detection device |
| CN114252838A (en) * | 2021-12-23 | 2022-03-29 | 西安交通大学 | MEMS vertical probe comprehensive test platform and test method |
-
2023
- 2023-04-28 CN CN202310476104.9A patent/CN116430209A/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN205561892U (en) * | 2016-04-06 | 2016-09-07 | 深圳市美锐精密电子有限公司 | Testing arrangement is pressed to probe |
| CN206389060U (en) * | 2016-12-23 | 2017-08-08 | 亚洲电力设备(深圳)股份有限公司 | Environmentally friendly gas-insulated cabinet |
| TWM558908U (en) * | 2017-11-10 | 2018-04-21 | Jthink Tech Ltd | Probe test simulation system |
| CN211528039U (en) * | 2020-02-11 | 2020-09-18 | 张福建 | Building engineering quality detection device |
| CN114252838A (en) * | 2021-12-23 | 2022-03-29 | 西安交通大学 | MEMS vertical probe comprehensive test platform and test method |
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Application publication date: 20230714 |
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