TWM514176U - Pre-drilling wet plating metal substrate - Google Patents

Pre-drilling wet plating metal substrate Download PDF

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Publication number
TWM514176U
TWM514176U TW104205267U TW104205267U TWM514176U TW M514176 U TWM514176 U TW M514176U TW 104205267 U TW104205267 U TW 104205267U TW 104205267 U TW104205267 U TW 104205267U TW M514176 U TWM514176 U TW M514176U
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TW
Taiwan
Prior art keywords
metal layer
layer
copper
polyimide film
drilled
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TW104205267U
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Chinese (zh)
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Chung-Yi Chen
Akihisa Hamazawa
Wen-Chin Chen
Chien-Feng Chiu
Shih-Cheng Fan
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Pomiran Metalization Res Co Ltd
Taimide Technology Inc
Arakawa Chem Ind
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Application filed by Pomiran Metalization Res Co Ltd, Taimide Technology Inc, Arakawa Chem Ind filed Critical Pomiran Metalization Res Co Ltd
Priority to TW104205267U priority Critical patent/TWM514176U/en
Publication of TWM514176U publication Critical patent/TWM514176U/en

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Description

預鑽孔之濕式電鍍金屬基板 Pre-drilled wet-plated metal substrate

本創作係有關於一種預鑽孔之濕式電鍍金屬基板,特別係指一種FCCL在金屬化作業前先在預定位置鑽孔,再進行金屬化作業,可有效達到降低生產成本及達到細線、微孔及高密度的需求。 The present invention relates to a pre-drilled wet-plated metal substrate, in particular to a FCCL which is drilled at a predetermined position before metallization work, and then metallized, which can effectively reduce production cost and reach fine lines and micro Holes and high density requirements.

可撓性銅箔積層板(Flexible copper clad laminate,FCCL)係廣泛應用於電子產業中作為電路基板(PCB),FCCL除了具有輕、薄及可撓的優點外,用聚醯亞胺膜還具有電性能、熱性能及耐熱性優良的特點外,其較低的介電常數(Dk)性,使得電信號得到快速的傳遞,良好的熱性能,可使組件易於降溫,較高的玻璃化溫度(Tg),可使組件在較高的溫度下良好運行。 Flexible copper clad laminate (FCCL) is widely used in the electronics industry as a circuit board (PCB). In addition to its advantages of lightness, thinness and flexibility, FCCL also has a polyimide film. In addition to the excellent electrical properties, thermal properties and heat resistance, its low dielectric constant (Dk) makes the electrical signal transfer quickly, good thermal performance, easy to cool components, high glass transition temperature (Tg) allows the assembly to operate well at higher temperatures.

撓性銅箔基材要分為二大類,一為傳統接著劑型三層軟板基材(3FCCL),另一種為新型無接著劑二層軟板基材(2FCCL)兩大類,此兩類基材材料,其製造方法不同,其應用產品項目也不同,三層軟板基材一般應用於大宗軟板產品上,二層軟板基材具有輕薄短小之優勢,可應用於較高階軟板製造上。就現有二層軟板基材的製造方法而言,可分為塗佈型 (Casting Type)、壓合型(Lamination)、濺鍍型及溼式鍍法型四種,其係皆在一介電材料上形成金屬層,以完成可撓性金屬基板的製作,該等製造方法皆為習知技術,於此不加贅述。 Flexible copper foil substrates are divided into two categories, one is the traditional adhesive type three-layer soft board substrate (3FCCL), and the other is the new type of non-adhesive two-layer soft board substrate (2FCCL). Material materials, their manufacturing methods are different, their application products are also different, three-layer soft board substrate is generally applied to bulk soft board products, and the second-layer soft board substrate has the advantages of lightness, thinness and shortness, and can be applied to higher-order soft board manufacturing. on. As for the manufacturing method of the existing two-layer soft board substrate, it can be divided into a coating type. (Casting Type), Lamination, Sputtering, and Wet-plating, all of which form a metal layer on a dielectric material to complete the fabrication of a flexible metal substrate. The methods are all known techniques and will not be described here.

而現有可撓性電路板的製造方式,係先將前述撓性銅箔基板進行鑽孔,如第一圖及第二圖所示,係在一具有銅層10的基板12上先進行鑽孔作業,使基板12上形成複數個貫孔14,再於貫孔14內形成導電介質16(如傳統化銅、電鍍銅及傳統導電石墨等金屬化微孔,以形成導電介質16),最後再將撓性金屬基板12上進行電鍍二次銅18,使銅層10上方及貫孔14內形成二次銅18,而得以使基板12上、下電路導通,此種習知可撓性電路板之製造上較為繁瑣,且成本較高,且於基板12之銅10上再形成二次銅18,將造成電路板的厚度增加,不利於細線及高密度之需求,而貫孔14內之傳統導電介層16製作方式(如傳統化銅、電鍍銅及傳統導電石墨等金屬化微孔),其厚度較大,亦不利於微孔化之需求。 In the conventional flexible circuit board, the flexible copper foil substrate is drilled first, and as shown in the first and second figures, the substrate 12 having the copper layer 10 is first drilled. The operation is such that a plurality of through holes 14 are formed on the substrate 12, and a conductive medium 16 (such as a metallized micro hole such as a conventional copper, an electroplated copper or a conventional conductive graphite to form a conductive medium 16) is formed in the through hole 14, and finally, The secondary copper 18 is plated on the flexible metal substrate 12 to form a secondary copper 18 above the copper layer 10 and in the through hole 14, so that the upper and lower circuits of the substrate 12 are turned on. Such a conventional flexible circuit board The manufacturing is cumbersome and costly, and the secondary copper 18 is formed on the copper 10 of the substrate 12, which will increase the thickness of the circuit board, which is not conducive to the demand for thin wires and high density, and the tradition in the through hole 14 The way in which the conductive via 16 is fabricated (such as conventionalized copper, electroplated copper, and metallized micropores such as conventional conductive graphite) has a large thickness and is also disadvantageous for microporation.

為解決上述習知可撓性電路板及製作之缺點,創作人遂創作出本創作。 In order to solve the above-mentioned shortcomings of the flexible circuit board and the fabrication, the creator created the creation.

本創作為一種預鑽孔之濕式電鍍金屬積基板,其包括有一聚醯亞胺膜;該聚醯亞胺膜上形成複數個貫孔;一第一金屬層形成於聚醯亞胺膜表面及貫孔壁上,一第二金屬層形成於該第一金屬層上,其中,該第一金屬層係以化學電鍍沉積一鎳層,於該鎳層上以電鍍沉積一銅層。 The present invention is a pre-drilled wet-plated metallized substrate comprising a polyimine film; a plurality of through holes are formed on the polyimide film; a first metal layer is formed on the surface of the polyimide film And a second metal layer is formed on the first metal layer, wherein the first metal layer is deposited by electroless plating a nickel layer, and a copper layer is electroplated on the nickel layer.

10‧‧‧銅層 10‧‧‧ copper layer

12‧‧‧基板 12‧‧‧Substrate

14‧‧‧貫孔 14‧‧‧through holes

16‧‧‧導電介質 16‧‧‧Electrical medium

18‧‧‧二次銅 18‧‧‧Second copper

20‧‧‧聚醯亞胺膜 20‧‧‧ Polyimine film

22‧‧‧貫孔 22‧‧‧through holes

24‧‧‧第一金屬層 24‧‧‧First metal layer

26‧‧‧第二金屬層 26‧‧‧Second metal layer

第1圖為習知撓性電路基板之剖視圖。 Fig. 1 is a cross-sectional view showing a conventional flexible circuit board.

第2圖為第一圖鑽孔之剖視圖。 Figure 2 is a cross-sectional view of the first figure drilled.

第3圖本創作之製造流程圖。 Figure 3 is a manufacturing flow chart of the creation.

第4圖為本創作聚醯亞胺膜之剖視圖。 Figure 4 is a cross-sectional view of the present polyimine film.

第5圖為本本創作聚醯亞胺膜預鑽孔之剖視圖。 Figure 5 is a cross-sectional view of the pre-drilled polyimine film.

第6圖為第5圖形成第一金屬層之剖視圖。 Fig. 6 is a cross-sectional view showing the first metal layer in Fig. 5.

第7圖為第6圖形成第二金屬層之剖視圖。 Fig. 7 is a cross-sectional view showing the second metal layer in Fig. 6.

第8圖為膜面未清洗而直接鍍化之情形。 Figure 8 shows the case where the film surface is directly cleaned without being cleaned.

第9圖為膜面未清洗而直接鍍化,預鑽孔有漏鍍之情形。 Figure 9 shows the case where the film surface is directly cleaned without being cleaned, and the pre-drilled hole is leak-plated.

第10圖膜面清洗後鍍化之情形。 Figure 10 shows the situation of plating after film surface cleaning.

本創作預鑽孔之濕式電鍍金屬基板之製造方法,請參閱第3圖及第4圖所示,其包括有提供一聚醯亞胺膜20(Polyimide film)(S1),本實施例中其單體成份及備製方法並未特別限制,可藉由本技術領域之通常技術進行,其厚度可為7-50微米(μm)。 The manufacturing method of the wet-plated metal substrate of the pre-drilled hole of the present invention, as shown in FIG. 3 and FIG. 4, includes providing a polyimide film 20 (S1), in this embodiment The monomer composition and preparation method thereof are not particularly limited, and may be carried out by a usual technique in the art, and may have a thickness of 7 to 50 μm.

請配合參閱第3圖示,提供一聚醯亞膜20(S1),在聚醯亞胺膜(Polyimide film)20上先行預鑽孔作業(S2),使聚醯亞胺膜20表面形成複數個貫孔22。 Referring to FIG. 3, a polythene film 20 (S1) is provided, and a pre-drilling operation (S2) is performed on a Polyimide film 20 to form a plurality of surfaces of the polyimide film 20 Through holes 22.

將完成預鑽孔的聚醯亞胺膜20進行一黏層作業(S3),再進行一表面清潔處理,以去除聚醯亞胺膜20上之雜質/污垢,其中,該表面清潔處理包括先進行一乾式處理(S4),再進行一濕式處理(S5),該乾式處理可為電暈(corona)、或電漿(plasma)或紫外光照射(UV irradiation)等物理性高能量處理方式,此不但可清潔膜面,亦可具有不同程度表改質,以增加膜面之 附著力,而電暈方式更可活化膜面之親水性,有利於後續濕式處理。該濕式處理為化學藥液清洗,其更包括有一超因波震盪,可促進化學藥液對膜面污垢的處理效率。 The pre-drilled polyimide film 20 is subjected to a bonding operation (S3), and a surface cleaning treatment is performed to remove impurities/dirt on the polyimide film 20, wherein the surface cleaning treatment includes Performing a dry treatment (S4), followed by a wet treatment (S5), which may be a physical high energy treatment such as corona, plasma or UV irradiation. This not only cleans the membrane surface, but also has different degrees of table modification to increase the membrane surface. Adhesion, and corona mode can activate the hydrophilicity of the membrane surface, which is beneficial to subsequent wet treatment. The wet treatment is a chemical liquid cleaning, which further includes a super-wave shock, which can promote the treatment efficiency of the chemical liquid on the membrane surface.

將完成清潔處理的聚醯亞胺膜20以化學電鍍法製程,使其表面及貫孔22壁面形成一第一金屬層24(S6),本實施例中第一金屬層24為鎳金屬,其厚度可為0.05-0.2微米。 The polyimine film 20 which has been subjected to the cleaning treatment is subjected to an electroless plating process to form a first metal layer 24 (S6) on the surface and the wall surface of the through hole 22. In this embodiment, the first metal layer 24 is made of nickel metal. The thickness can be from 0.05 to 0.2 microns.

將完成第一金屬層24之聚醯亞胺膜20進行一熱處理(S7),藉由該熱處理,可改善習知金屬層與聚醯亞胺膜間的接著力問題(即兩者間的剝離強度之高溫信賴性不足)。經由該熱處理,可於維持金屬層與聚醯亞胺膜之剝離強度的同時,提高銅層電鍍之良率,並改善銅層電鍍之操作性。 The polyimine film 20 of the first metal layer 24 is subjected to a heat treatment (S7), and the heat treatment can improve the adhesion force between the conventional metal layer and the polyimide film (ie, peeling between the two) The high temperature reliability of the strength is insufficient). Through the heat treatment, the peeling strength of the metal layer and the polyimide film can be maintained, the yield of the copper layer plating can be improved, and the handleability of the copper layer plating can be improved.

請參閱第6圖所示,將完成熱處理後之聚醯亞胺膜20進行電鍍第二金屬層26製程,使第一金屬層24上方形成一第二金屬層26(S8)。 Referring to FIG. 6, the polyimide film 20 after the heat treatment is subjected to a process of plating the second metal layer 26 to form a second metal layer 26 over the first metal layer 24 (S8).

再者,本創作將聚醯亞胺膜20在金屬化前先行預鑽孔,再於清潔處理後,以濕式電鍍形成金屬層,可改善第一圖所示習知撓性電路板之製程複雜度,且可達到細線、微孔及高密度之產品需求。 Furthermore, in the present invention, the polyimide film 20 is pre-drilled prior to metallization, and after the cleaning process, the metal layer is formed by wet plating, which can improve the process of the conventional flexible circuit board shown in the first figure. Complexity, and can meet the needs of fine lines, micropores and high density products.

本創作預鑽孔之濕式電鍍金屬基板,請參閱第7圖所示,其包括有一聚醯亞胺膜20,其上形成有複數個貫孔22;於聚醯亞胺膜20上設有一第一金屬層24位於其表面及貫孔22壁面上,其可為鎳金屬,厚度可為0.05-0.2微米及一第二金屬層26設於第一金屬層24上,第二金屬層26為銅,其厚度為0.2-12微米。 The pre-drilled wet-plated metal substrate of the present invention, as shown in FIG. 7, includes a polyimine film 20 having a plurality of through holes 22 formed therein; and a polyimine film 20 is provided with a The first metal layer 24 is located on the surface thereof and the wall surface of the through hole 22, which may be nickel metal, may have a thickness of 0.05-0.2 micrometers, and a second metal layer 26 is disposed on the first metal layer 24, and the second metal layer 26 is Copper has a thickness of 0.2 to 12 microns.

如下表格顯示,經電暈處理可提昇化鎳作業之品質。 The table below shows that corona treatment improves the quality of nickel work.

請參閱第8圖為膜面未清洗而直接鍍化之情形。 Please refer to Figure 8 for the direct plating of the film surface without cleaning.

請參閱第9圖為膜面未清洗而直接鍍化,預鑽孔有漏鍍之情形。 Please refer to Fig. 9 for the direct plating of the film surface without cleaning, and the pre-drilling is leak plating.

請參閱第10圖膜面清洗後鍍化之情形。 Please refer to Figure 10 for the plating after film surface cleaning.

20‧‧‧聚醯亞胺膜 20‧‧‧ Polyimine film

22‧‧‧貫孔 22‧‧‧through holes

24‧‧‧第一金屬層 24‧‧‧First metal layer

26‧‧‧第二金屬層 26‧‧‧Second metal layer

Claims (2)

一種預鑽孔之濕式電鍍金屬基板,其包括有一聚醯亞胺膜;該聚醯亞胺膜上形成複數個貫孔;以化學鍍法沉積一鎳層於該聚醯亞胺膜表面及貫孔壁上;及以電鍍法沉積一銅層於該鎳層上,使該聚醯亞胺膜之表面及貫孔壁形成一鎳層及一銅層。 A pre-drilled wet-plated metal substrate comprising a polyimide film; forming a plurality of through holes on the polyimide film; depositing a nickel layer on the surface of the polyimide film by electroless plating; And a copper layer is deposited on the nickel layer by electroplating to form a nickel layer and a copper layer on the surface of the polyimide film and the through-hole wall. 如申請專利範圍第1項所述之預鑽孔之濕式電鍍金屬基板,其中,該鎳層厚度為0.05-0.2微米,該銅層厚度為0.2-12微米。 The pre-drilled wet-plated metal substrate according to claim 1, wherein the nickel layer has a thickness of 0.05 to 0.2 μm and the copper layer has a thickness of 0.2 to 12 μm.
TW104205267U 2015-04-09 2015-04-09 Pre-drilling wet plating metal substrate TWM514176U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109862691A (en) * 2019-03-13 2019-06-07 四会富仕电子科技股份有限公司 A kind of production method of metal core ceramic circuit board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109862691A (en) * 2019-03-13 2019-06-07 四会富仕电子科技股份有限公司 A kind of production method of metal core ceramic circuit board

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