TWM513988U - Structure of temperature equilibration plate - Google Patents

Structure of temperature equilibration plate Download PDF

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Publication number
TWM513988U
TWM513988U TW104215320U TW104215320U TWM513988U TW M513988 U TWM513988 U TW M513988U TW 104215320 U TW104215320 U TW 104215320U TW 104215320 U TW104215320 U TW 104215320U TW M513988 U TWM513988 U TW M513988U
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Taiwan
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wall surface
metal shell
uniform temperature
capillary structure
cover plate
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TW104215320U
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Chinese (zh)
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Chun-Hung Lin
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Taiwan Microloops Corp
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Application filed by Taiwan Microloops Corp filed Critical Taiwan Microloops Corp
Priority to TW104215320U priority Critical patent/TWM513988U/en
Publication of TWM513988U publication Critical patent/TWM513988U/en
Priority to CN201620175505.6U priority patent/CN205825776U/en

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Description

均溫板結構Temperature uniform plate structure

本創作係有關一種均溫板,尤指一種用於電子發熱元件的均溫板結構。The present invention relates to a temperature equalizing plate, and more particularly to a temperature equalizing plate structure for an electronic heating element.

隨著電子元件的運算速度不斷提昇,其所產生的熱量亦越來越高,為了有效地解決此高發熱量的問題,業界已將具有良好導熱特性的均溫板(Vapor Chamber)進行廣泛性的使用,但是此等均溫板不論是其導熱效能、製作成本和製作容易度等皆存在有尚待加以改善的空間。As the computing speed of electronic components continues to increase, the heat generated by them is becoming higher and higher. In order to effectively solve this problem of high heat generation, the Vapor Chamber with good thermal conductivity has been widely used in the industry. Use, but these homogenizing plates have room for improvement, such as their thermal conductivity, production cost and ease of fabrication.

習知的均溫板的製作方法,首先將一上毛細組織貼合於一上殼體送入一加熱爐中進行熱結合,次將一下毛細組織貼合於一下殼體送入一加熱爐中進行熱結合,繼之將一支撐結構佈設在下殼體內,最後再將上殼體對應於下殼體罩合後並以起送入一加熱爐中進行熱結合。The conventional method for manufacturing a uniform temperature plate firstly attaches an upper capillary structure to an upper casing and feeds it into a heating furnace for thermal bonding, and then attaches the capillary structure to the lower casing and feeds it into a heating furnace. The thermal bonding is performed, and then a supporting structure is disposed in the lower casing, and finally the upper casing is covered corresponding to the lower casing and then fed into a heating furnace for thermal bonding.

然而,習知均溫板的製作方法及其製成品,雖然具有導熱效能,但卻存在有以下的問題點,由於其製作過程中必須多次的使用加熱爐來進行熱結合,其不僅過程繁複而耗費大量的製作時間和成本,且各毛細組織和各殼體在進行多次的全面性加熱和冷卻後,將使其結構產生不規則變形和令內部毛細組織造成剝離等不良情況,進而導致其導熱效能不彰,亟待加以改善者。However, the conventional method for producing a uniform temperature plate and its finished product, although having thermal conductivity, have the following problems. Since the heating furnace must be used for heat bonding multiple times during the manufacturing process, it is not only complicated. However, it takes a lot of production time and cost, and after each capillary structure and each shell is subjected to multiple comprehensive heating and cooling, the structure is deformed irregularly and the internal capillary structure is peeled off, which leads to Its thermal conductivity is not good and needs to be improved.

本創作之一目的,在於提供一種均溫板結構,其不僅可簡化製程和縮短製作時間,並且能夠確保均溫板的質量穩定性。One of the aims of the present invention is to provide a temperature equalizing plate structure which not only simplifies the process and shortens the production time, but also ensures the quality stability of the temperature equalizing plate.

為了達成上述之目的,本創作係提供一種均溫板結構,包括一下金屬殼、一上金屬殼、多數支撐柱及一工作流體,該上金屬殼對應該下金屬殼密接封合,而在該上金屬殼和該下金屬殼之間形成有一容腔;各該支撐柱容置在該容腔內並且介於該上金屬殼和該下金屬殼之間,每一該支撐柱包含一中空金屬體和形成在該中空金屬體內部的一毛細結構,該中空金屬體的一端固著在該上金屬殼;該工作流體填注在該容腔內。In order to achieve the above purpose, the present invention provides a temperature equalizing plate structure, comprising a lower metal shell, an upper metal shell, a plurality of support columns and a working fluid, the upper metal shell being closely sealed to the lower metal shell, and Forming a cavity between the upper metal shell and the lower metal shell; each of the support pillars is received in the cavity and between the upper metal shell and the lower metal shell, and each of the support pillars comprises a hollow metal And a capillary structure formed inside the hollow metal body, one end of the hollow metal body being fixed to the upper metal shell; the working fluid is filled in the cavity.

本創作還具有以下功效,利用各毛細結構與基板的內壁面貼附接觸進而提昇工作流體的回流速度。藉由中空金屬體為圓錐形管體利於將金屬粉末填入且結構密實。The creation also has the following effects: the capillary structure is attached to the inner wall surface of the substrate to increase the reflow speed of the working fluid. The hollow metal body is a conical tube body to facilitate the filling of the metal powder and the structure is dense.

有關本創作之詳細說明及技術內容,配合圖式說明如下,然而所附圖式僅提供參考與說明用,並非用來對本創作加以限制者。The detailed description and technical content of the present invention are described below with reference to the drawings, but the drawings are only for reference and explanation, and are not intended to limit the creation.

請參閱圖1及圖4所示,其中均溫板的製作方法,步驟包括:Please refer to FIG. 1 and FIG. 4 , wherein the method for manufacturing the temperature equalizing plate includes the following steps:

a)備有一上金屬殼10和多數中空金屬體21,上金屬殼10具有一內壁面112;在此步驟中的上金屬殼10可為銅、鋁或其合金等導電材料所製成,其主要包括一矩形基板11及多數散熱鰭片12,基板11具有一外表面111和形成在外表面111背側的一內壁面112,各散熱鰭片12自外表面111延伸且一體成型,各散熱鰭片12可以擠製或剷削等加工方式來間隔成型。中空金屬體21亦為銅、鋁或其合金等導電材料所製成,本實施例的中空金屬體21包含一圓形管211及封罩在圓形管211一端的一蓋板212。a) having an upper metal shell 10 and a plurality of hollow metal bodies 21, the upper metal shell 10 having an inner wall surface 112; the upper metal shell 10 in this step may be made of a conductive material such as copper, aluminum or alloy thereof, The utility model mainly comprises a rectangular substrate 11 and a plurality of heat dissipation fins 12. The substrate 11 has an outer surface 111 and an inner wall surface 112 formed on the back side of the outer surface 111. The heat dissipation fins 12 extend from the outer surface 111 and are integrally formed. The sheet 12 can be formed by a process such as extrusion or shovel. The hollow metal body 21 is also made of a conductive material such as copper, aluminum or an alloy thereof. The hollow metal body 21 of the present embodiment comprises a circular tube 211 and a cover 212 enclosing one end of the circular tube 211.

b)將各中空金屬體21透過一焊接手段固著於內壁面112;在此步驟中的焊接手段可為點焊或電漿焊接等加工方式,製作時將各中空金屬體21套接在焊接機的電極上並通以電流後,利用在中空金屬體21的蓋板212和上金屬殼10的內壁面112之間具有最大的電阻而予以焊接固著在上金屬殼10的內壁面112。b) The hollow metal bodies 21 are fixed to the inner wall surface 112 by means of a welding means; the welding means in this step may be a spot welding or a plasma welding process, and the hollow metal bodies 21 are sleeved in the welding during the production. After the current is applied to the electrodes of the machine, the inner wall surface 112 of the upper metal shell 10 is welded and fixed by the maximum resistance between the cover plate 212 of the hollow metal body 21 and the inner wall surface 112 of the upper metal shell 10.

c)將一毛細結構22分別填入各中空金屬體21內而形成有多數支撐柱20;在此步驟中的毛細結構22可為金屬編織網、纖維束或金屬粉末等材料,其是分別裝填於各中空金屬體21內部而形成多數支撐柱20,每一支撐柱20包含一中空金屬體21和形成在中空金屬體21內部的一毛細結構22。c) a capillary structure 22 is filled into each of the hollow metal bodies 21 to form a plurality of support columns 20; the capillary structure 22 in this step may be a metal woven mesh, a fiber bundle or a metal powder, etc., which are separately filled. A plurality of support columns 20 are formed inside each of the hollow metal bodies 21, and each of the support columns 20 includes a hollow metal body 21 and a capillary structure 22 formed inside the hollow metal body 21.

d)將一下金屬殼30對應上金屬殼10密接封合,而在上金屬殼10和下金屬殼30之間形成有供各支撐柱20容置的一容腔A;在此步驟中的下金屬殼30亦為銅、鋁或其合金等導電材料所製成,將上金屬殼10和下金屬殼30上下對應疊接並且對其各周邊進行焊接而封合,前述各支撐柱20是形成在上金屬殼10和下金屬殼30所形成的容腔A中。d) the lower metal shell 30 is closely sealed to the upper metal shell 10, and a cavity A for accommodating the support columns 20 is formed between the upper metal shell 10 and the lower metal shell 30; The metal shell 30 is also made of a conductive material such as copper, aluminum or an alloy thereof, and the upper metal shell 10 and the lower metal shell 30 are vertically overlapped and welded to each periphery thereof, and the respective support pillars 20 are formed. In the cavity A formed by the upper metal shell 10 and the lower metal shell 30.

e)將一工作流體40填入容腔A內並施以除氣和封口。在此步驟中的工作流體可為水,將其填入上金屬殼10和下金屬殼30所形成的容腔A中,並施以除氣和封口作業,而完成本創作的均溫板製作。e) A working fluid 40 is filled into the cavity A and degassed and sealed. The working fluid in this step may be water, filled into the cavity A formed by the upper metal shell 10 and the lower metal shell 30, and subjected to degassing and sealing operations, thereby completing the creation of the uniform temperature plate. .

進一步,均溫板的製作方法,在步驟a)之後更包括一步驟a1),此步驟a1)將一上毛細組織50透過一焊接手段固著於內壁面112;在此步驟中的上毛細組織50可為金屬編織網,可在上毛細組織50間隔設置有多數穿孔51,以提供給中空金屬體21穿設容置;其中的焊接手段可為點焊或電漿焊接等加工方式。此外,步驟a1)亦可在步驟b)之後施行,在各中空金屬體21焊接固著於內壁面112後,以上毛細組織50的各穿孔51分別套設於各中空金屬體21後再予以內壁面112焊接固著。Further, the method for manufacturing the temperature equalizing plate further comprises a step a1) after the step a), the step a1) fixing the upper capillary structure 50 to the inner wall surface 112 by a welding means; the upper capillary structure in this step 50 may be a metal woven mesh, and a plurality of perforations 51 may be disposed at intervals of the upper capillary structure 50 to provide a space for the hollow metal body 21; the welding means may be a spot welding or a plasma welding process. In addition, the step a1) may be performed after the step b). After the hollow metal bodies 21 are welded and fixed to the inner wall surface 112, the respective through holes 51 of the above capillary structure 50 are respectively sleeved on the hollow metal bodies 21 and then placed therein. The wall 112 is welded and fixed.

請再參閱圖4所示,前述製作方法可製得一種均溫板,其包括一上金屬殼10、多數支撐柱20、一下金屬殼30及工作流體40,上金屬殼10對應下金屬殼30密接封合,而在上金屬殼10和下金屬殼30之間形成有一容腔A;各支撐柱20容置在容腔A內並且介於上金屬殼10和下金屬殼30之間,每一支撐柱20包含一中空金屬體21和形成在中空金屬體21內部的一毛細結構22,中空金屬體21的一端焊接固著在上金屬殼10的內壁面112;工作流體40填注在容腔A內。Referring to FIG. 4 again, the foregoing manufacturing method can produce a temperature equalizing plate, which comprises an upper metal shell 10, a plurality of support columns 20, a lower metal shell 30 and a working fluid 40, and the upper metal shell 10 corresponds to the lower metal shell 30. a tight seal is formed, and a cavity A is formed between the upper metal shell 10 and the lower metal shell 30; each support post 20 is received in the cavity A and interposed between the upper metal shell 10 and the lower metal shell 30, each A support column 20 includes a hollow metal body 21 and a capillary structure 22 formed inside the hollow metal body 21. One end of the hollow metal body 21 is welded and fixed to the inner wall surface 112 of the upper metal shell 10; the working fluid 40 is filled in the volume Inside cavity A.

進一步,本創作的均溫板更包括一上毛細組織50,此上毛細組織50可為一金屬編織網,其是佈設且焊接固著在上金屬殼10的內壁面112,在上毛細組織50間隔設置有多數穿孔51,以提供給中空金屬體21穿設容置。Further, the temperature equalizing plate of the present invention further includes an upper capillary structure 50. The upper capillary structure 50 may be a metal woven mesh which is laid and welded to the inner wall surface 112 of the upper metal shell 10, and the upper capillary structure 50 A plurality of perforations 51 are provided at intervals to provide a space for the hollow metal body 21 to be placed.

進一步,本創作的均溫板更包括一下毛細組織60,此下毛細組織60亦可為一金屬編織網,其是佈設且焊接固著在下金屬殼30的內壁面,此下毛細組織60被夾掣在各支撐柱20的底端和下金屬殼30的內壁面之間。Further, the temperature equalizing plate of the present invention further includes a capillary structure 60. The lower capillary structure 60 may also be a metal woven mesh which is laid and welded to the inner wall surface of the lower metal shell 30, and the lower capillary structure 60 is clamped. The crucible is between the bottom end of each support post 20 and the inner wall surface of the lower metal shell 30.

請參閱圖5至圖8所示,本創作均溫板中的支撐柱20除了可為上述實施例外,其中圖5的中空金屬體21a僅為一圓形管,其中毛細結構22的頂端與基板11的內壁面112貼附接觸。另圖6的中空金屬體21b包含一圓形管211、連接在圓形管211一端的一蓋板212及開設在蓋板212的一通孔213,其中毛細結構22的頂端穿出通孔213與基板11的內壁面112貼附接觸。又,圖7的中空金屬體21c為一圓錐管211c,其中毛細結構22的頂端與基板11的內壁面112貼附接觸。再者,圖8的中空金屬體21d包含一圓錐管211c、連接在圓錐管211c一端的一蓋板212及開設在蓋板212的一通孔213,其中毛細結構22的頂端穿入通孔213與基板11的內壁面112貼附接觸。Referring to FIG. 5 to FIG. 8 , the support column 20 in the present temperature equalizing plate may be the exception of the above embodiment, wherein the hollow metal body 21 a of FIG. 5 is only a circular tube, wherein the top end of the capillary structure 22 and the substrate The inner wall surface 112 of the 11 is attached to the contact. The hollow metal body 21b of FIG. 6 includes a circular tube 211, a cover 212 connected to one end of the circular tube 211, and a through hole 213 formed in the cover 212, wherein the top end of the capillary structure 22 passes through the through hole 213 and The inner wall surface 112 of the substrate 11 is attached to the contact. Further, the hollow metal body 21c of FIG. 7 is a conical tube 211c in which the tip end of the capillary structure 22 is in contact with the inner wall surface 112 of the substrate 11. Furthermore, the hollow metal body 21d of FIG. 8 includes a conical tube 211c, a cover 212 connected to one end of the conical tube 211c, and a through hole 213 formed in the cover 212, wherein the top end of the capillary structure 22 penetrates the through hole 213 and The inner wall surface 112 of the substrate 11 is attached to the contact.

綜上所述,本創作之均溫板結構,確可達到預期之使用目的,而解決習知之缺失,又因極具新穎性及進步性,完全符合新型專利申請要件,爰依專利法提出申請,敬請詳查並賜准本案專利,以保障創作人之權利。In summary, the average temperature board structure of this creation can achieve the intended purpose of use, and solve the lack of conventional knowledge. Because of its novelty and progress, it fully meets the requirements of new patent applications and applies for patent law. Please carefully check and grant the patent in this case to protect the rights of the creator.

10‧‧‧上金屬殼10‧‧‧Upper metal shell

11‧‧‧基板11‧‧‧Substrate

111‧‧‧外表面111‧‧‧ outer surface

112‧‧‧內壁面112‧‧‧ inner wall

12‧‧‧散熱鰭片12‧‧‧ Heat sink fins

20‧‧‧支撐柱20‧‧‧Support column

21、21a、21b、21c、21d‧‧‧中空金屬體21, 21a, 21b, 21c, 21d‧‧‧ hollow metal bodies

211‧‧‧圓形管211‧‧‧round tube

211c‧‧‧圓錐管211c‧‧‧Conical tube

212‧‧‧蓋板212‧‧‧ cover

213‧‧‧通孔213‧‧‧through hole

22‧‧‧毛細結構22‧‧‧Capillary structure

30‧‧‧下金屬殼30‧‧‧Under metal shell

40‧‧‧工作流體40‧‧‧Working fluid

50‧‧‧上毛細組織50‧‧‧Upper capillary tissue

51‧‧‧穿孔51‧‧‧Perforation

60‧‧‧下毛細組織60‧‧‧ Lower capillary tissue

A‧‧‧容腔A‧‧‧ cavity

圖1 係本創作第一實施例的上金屬殼和各中空金屬體組合圖。Fig. 1 is a combination view of an upper metal shell and each hollow metal body of the first embodiment of the present invention.

圖2 係本創作第一實施例的上金屬殼和各支撐柱組合圖。Fig. 2 is a combination view of the upper metal shell and the respective support columns of the first embodiment of the present invention.

圖3 係本創作第一實施例立體分解圖。Figure 3 is a perspective exploded view of the first embodiment of the present creation.

圖4 係本創作第一實施例組合剖視圖。Figure 4 is a cross-sectional view showing the first embodiment of the present invention.

圖5 係本創作第二實施例的組合剖視圖。Figure 5 is a combined cross-sectional view of a second embodiment of the present creation.

圖6 係本創作第三實施例的組合剖視圖。Figure 6 is a combined cross-sectional view of a third embodiment of the present creation.

圖7 係本創作第四實施例的組合剖視圖。Figure 7 is a combined cross-sectional view of a fourth embodiment of the present invention.

圖8 係本創作第五實施例的組合剖視圖。Figure 8 is a sectional view showing the combination of the fifth embodiment of the present creation.

10‧‧‧上金屬殼 10‧‧‧Upper metal shell

11‧‧‧基板 11‧‧‧Substrate

111‧‧‧外表面 111‧‧‧ outer surface

112‧‧‧內壁面 112‧‧‧ inner wall

12‧‧‧散熱鰭片 12‧‧‧ Heat sink fins

20‧‧‧支撐柱 20‧‧‧Support column

21‧‧‧中空金屬體 21‧‧‧ hollow metal body

211‧‧‧圓形管 211‧‧‧round tube

212‧‧‧蓋板 212‧‧‧ cover

22‧‧‧毛細結構 22‧‧‧Capillary structure

30‧‧‧下金屬殼 30‧‧‧Under metal shell

40‧‧‧工作流體 40‧‧‧Working fluid

50‧‧‧上毛細組織 50‧‧‧Upper capillary tissue

51‧‧‧穿孔 51‧‧‧Perforation

60‧‧‧下毛細組織 60‧‧‧ Lower capillary tissue

A‧‧‧容腔 A‧‧‧ cavity

Claims (10)

一種均溫板結構,包括: 一下金屬殼; 一上金屬殼,對應該下金屬殼密接封合,而在該上金屬殼和該下金屬殼之間形成有一容腔; 多數支撐柱,容置在該容腔內並且介於該上金屬殼和該下金屬殼之間,每一該支撐柱包含一中空金屬體和形成在該中空金屬體內部的一毛細結構,該中空金屬體的一端固著在該上金屬殼;以及 一工作流體,填注在該容腔內。A uniform temperature plate structure, comprising: a metal shell; an upper metal shell, the lower metal shell is closely sealed, and a cavity is formed between the upper metal shell and the lower metal shell; In the cavity and between the upper metal shell and the lower metal shell, each of the support columns comprises a hollow metal body and a capillary structure formed inside the hollow metal body, one end of the hollow metal body being solid On the upper metal shell; and a working fluid, filled in the cavity. 如請求項1所述之均溫板結構,其中該上金屬殼包括一基板及多數散熱鰭片,該基板具有一內壁面和形成在該內壁面背側的一外表面,各該散熱鰭片自該外表面延伸且一體成型。The uniform temperature plate structure of claim 1, wherein the upper metal case comprises a substrate and a plurality of heat dissipation fins, the substrate has an inner wall surface and an outer surface formed on a back side of the inner wall surface, each of the heat dissipation fins Extending from the outer surface and integrally forming. 如請求項2所述之均溫板結構,其中該中空金屬體包含一圓形管及封罩在該圓形管一端的一蓋板,該蓋板固著在該內壁面。The uniform temperature plate structure according to claim 2, wherein the hollow metal body comprises a circular tube and a cover plate covering one end of the circular tube, the cover plate being fixed to the inner wall surface. 如請求項2所述之均溫板結構,其中該中空金屬體包含一圓形管,該圓形管的一端固著在該內壁面,該毛細結構穿出該圓形管與該內壁面貼附接觸。The uniform temperature plate structure according to claim 2, wherein the hollow metal body comprises a circular tube, one end of the circular tube is fixed to the inner wall surface, and the capillary structure passes through the circular tube and is attached to the inner wall surface. Attached to the contact. 如請求項2所述之均溫板結構,其中該中空金屬體包含一圓形管、連接在該圓形管一端的一蓋板及開設在該蓋板的一通孔,該蓋板固著在該基板的該內壁面,該毛細結構穿出該通孔與該內壁面貼附接觸。The uniform temperature plate structure according to claim 2, wherein the hollow metal body comprises a circular tube, a cover plate connected to one end of the circular tube, and a through hole formed in the cover plate, the cover plate being fixed The inner wall surface of the substrate, the capillary structure passes through the through hole and is in contact with the inner wall surface. 如請求項2所述之均溫板結構,其中該中空金屬體包含一圓錐管,該圓錐管一端固著在該內壁面,該毛細結構穿出該圓錐管與該內壁面貼附接觸。The uniform temperature plate structure according to claim 2, wherein the hollow metal body comprises a conical tube, one end of the conical tube is fixed to the inner wall surface, and the capillary structure passes through the conical tube to be in contact with the inner wall surface. 如請求項2所述之均溫板結構,其中該中空金屬體包含一圓錐管、連接在該圓錐管一端的一蓋板及開設在該蓋板的一通孔,該蓋板固著在該基板的該內壁面,該毛細結構穿出該通孔與該內壁面貼附接觸。The uniform temperature plate structure according to claim 2, wherein the hollow metal body comprises a conical tube, a cover plate connected to one end of the conical tube, and a through hole formed in the cover plate, the cover plate being fixed on the substrate The inner wall surface of the capillary structure passes through the through hole and is in contact with the inner wall surface. 如請求項2所述之均溫板結構,其更包括一上毛細組織,該上毛細組織為一金屬編織網,該金屬編織網間隔設置有多數穿孔,各該穿孔分別提供各該支撐柱穿設容置。The uniform temperature plate structure according to claim 2, further comprising an upper capillary structure, wherein the upper capillary structure is a metal woven mesh, the metal woven mesh is provided with a plurality of perforations spaced apart, and each of the perforations respectively provides the support column Set up. 如請求項8所述之均溫板結構,其更包括一下毛細組織,該下毛細組織佈設在該下金屬殼的內部並被夾掣在各該支撐柱和該下金屬殼之間。The uniform temperature plate structure according to claim 8, further comprising a capillary structure disposed inside the lower metal shell and sandwiched between each of the support columns and the lower metal shell. 如請求項2所述之均溫板結構,其中該毛細結構為金屬編織網、纖維束或金屬粉末。The uniform temperature plate structure according to claim 2, wherein the capillary structure is a metal woven mesh, a fiber bundle or a metal powder.
TW104215320U 2015-09-23 2015-09-23 Structure of temperature equilibration plate TWM513988U (en)

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TWI570541B (en) * 2015-12-28 2017-02-11 奇鋐科技股份有限公司 A vapor chamber structure and a manufacturing method same
US10112272B2 (en) 2016-02-25 2018-10-30 Asia Vital Components Co., Ltd. Manufacturing method of vapor chamber

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CN109219306B (en) * 2017-06-30 2020-07-14 鹏鼎控股(深圳)股份有限公司 Heat sink and method for manufacturing the same
JP6923091B2 (en) * 2019-06-21 2021-08-18 株式会社村田製作所 Vapor chamber
CN111590073A (en) * 2020-05-20 2020-08-28 北京遥感设备研究所 Integrated flat plate micro-heat pipe structure and 3D printing manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI570541B (en) * 2015-12-28 2017-02-11 奇鋐科技股份有限公司 A vapor chamber structure and a manufacturing method same
US10112272B2 (en) 2016-02-25 2018-10-30 Asia Vital Components Co., Ltd. Manufacturing method of vapor chamber

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