TWM509684U - Indoor low concentration organic waste gas purification device - Google Patents

Description

Indoor low concentration organic waste gas purification device

The present invention relates to an indoor low-concentration organic exhaust gas purifying device, and more particularly to a designer of an indoor low-concentration organic exhaust gas purifying device that reduces operating energy consumption.

According to TFT, LCD and semiconductor development, cleaning, etching and evaporation, etc., a large number of organic compounds are often used for coating or cleaning. Most of these organic compounds (such as IPA/PGMEA/PGME...) will be used. It is sent to the back end for treatment and discharge through the exhaust device, and will be discharged under the regulations. However, some organic compounds will escape in the clean room environment, and the concentration is about tens to hundreds of ppb. Left and right, if the operator is exposed to this low concentration of organic waste gas for a long time, it may cause discomfort, especially with low threshold odor organic compounds (such as acetic acid); in addition, the clean room air conditioning design and filter The arrangement is mainly divided into two parts, one part is external gas supplement gas and the other part is circulating gas; in the external gas part, it mainly controls humidity, granular pollutants and gas pollutants, and the circulating gas part focuses on Removal of process fugitive chemicals.

As shown in FIG. 1 , the conventional clean room low-concentration organic waste gas purification device includes a rotary suction and desorber 10, which may be a rotary wheel or a figure not shown. The rotary ring type has an adsorption zone 11, a desorption zone 12 and an isolation cooling zone 13, and is provided with an adsorption inlet passage 111 and an adsorption exhaust passage 112 relative to the adsorption zone 11, and opposite to the desorption zone 12 A desorption inlet passage 121 and a desorption exhaust passage 122 are provided, and an isolation cooling inlet passage 131 and an isolated cooling exhaust passage 132 are disposed opposite to the isolation cooling zone 13, and the head end of the adsorption intake passage 111 is The tail end of the adsorption exhaust passage 112 and the head end of the isolated cooling air inlet passage 131 are coupled to the clean room 50, and the trailing end of the isolated cooling exhaust passage 132 is coupled to the head end of the desorption inlet passage 121. The tail end of the desorption exhaust passage 122 is connected to an external final processing device (not shown); an adsorption differential pressure generator 20 is disposed on the adsorption intake passage 111 or the adsorption exhaust passage 112; a desorption heat source 30, disposed in the desorption inlet passage 121; and a desorption differential pressure generator 40, set The desorption inlet passage 121 or the desorption exhaust passage 122 is detached.

Thereby, the adsorption differential pressure generator 20 passes the indoor gas through the adsorption inlet passage 111 and the adsorption zone 11, and the organic waste gas (such as IPA and PGMEA) contained in the adsorption zone 11 is adsorbed and purified, and purified. The gas is returned to the chamber through the adsorption exhaust passage 112; the isolated cooling inlet passage 131 and the isolated cooling exhaust passage 132 allow the indoor gas to pass through the isolated cooling zone 13 to recover heat (both isolated and cooled) The isolated gas stream after heat recovery is a gas source for desorbing the gas stream; the desorption pressure difference generator 40 is passed through the desorption inlet channel 121 and heated by the desorption heat source 30 (about heating to 180 to 200 ° C) The desorbed gas stream passes through the desorption zone 12, thereby desorbing the adsorbed organic compound, and then passing through the desorption exhaust passage 122 to the external finishing apparatus 100 for purification.

Press again to process the organic exhaust gas in the clean room of the TFT-LCD yellow light area. Generally, the clean room of each yellow light area needs to process about 740,000 SCMH of circulating air volume to reduce the concentration accumulation of organic exhaust gas in the clean room, and every 400SCMH The dust-free outdoor air is regulated by the external air-conditioning box to constant temperature and humidity (25°C/50% RH), and the required refrigeration capacity in summer requires about 1.5 refrigeration capacity (USRT) energy consumption, resulting in energy consumption of dust-free outdoor air conditioning. In addition, if the rotary suction and desorber 10 is a zeolite runner, it is assumed that the concentration ratio of the adsorption gas stream to the upper desorbed gas stream is 15 times (treatment efficiency > 90%), and the desorption temperature is 180-200 ° C. The required desorption heat is also large; however, in the conventional clean room low-concentration organic exhaust gas purifying device, the clean room 50 must at least be isolated from the external air through the isolated cooling air inlet 131. The airflow outflows the air, so that the required external air conditioning energy in the clean room 50 is very high, and the high temperature desorbed airflow is directly guided to the external finishing equipment, and a large amount of desorption heat is lost invisibly.

The main purpose of the present invention is to solve the problem of high energy consumption of the prior art operation, and to greatly reduce the operating energy consumption and reduce the exhaust effect.

In order to achieve the above effects, the structural features of the present invention include: a rotary suction and desorber, which has an adsorption zone, a desorption zone and an isolation cooling zone, and is provided with an adsorption inlet channel and the adsorption zone. Adsorbing the exhaust passage, and providing a desorption inlet passage and a desorption exhaust passage relative to the desorption region, and providing an isolation cooling inlet passage and an isolation cooling exhaust passage relative to the isolation cooling region, the adsorption intake passage a head end, a tail end of the adsorption exhaust passage and a head end of the isolated cooling air inlet passage are connected to the chamber, and a tail end of the isolated cooling exhaust passage is coupled to a head end of the desorption inlet passage, the desorption The tail end of the exhaust passage is connected to the outside; an adsorption differential pressure generator is disposed on the adsorption inlet passage or the adsorption exhaust passage; a desorption heat source is disposed on the desorption inlet passage; a desorption pressure difference a generator disposed on the desorption inlet passage or the desorption exhaust passage; an oxidation catalyst unit disposed on the desorption inlet passage; and a desorption exhaust recirculation passage, the head end being forked to the off An exhaust passage is attached and the tail end is connected to the Attached to the intake air passage of the head end.

In addition, a desorption exhaust gas flow control valve, a desorption exhaust gas recirculation air flow control valve and an isolated intake air flow control valve are further disposed, and the desorption exhaust gas flow control valve is disposed at the desorption exhaust passage. a detaching exhaust passage and a downstream portion of the detaching exhaust gas return passage, the detaching exhaust gas recirculation control valve is disposed at the detaching exhaust gas return passage, and the isolated intake air flow control valve is disposed at the isolation Cool the intake passage. Further, an ozone supply unit is further disposed at the upstream of the oxidation catalyst unit in the desorption inlet passage. The tail end of the desorption exhaust passage is connected to the external finishing equipment for re-purification treatment, and the final treatment equipment is a continuous suction desorption zeolite runner concentrator, activated carbon fluidized floating bed, incinerator, washing tower Any one or combination of condensers. The rotary suction and desorber further defines a re-isolation zone, and the re-isolation zone is provided with a re-isolation air inlet channel and a re-isolation exhaust channel, and the head end of the re-isolation air inlet channel is forked to the adsorption exhaust channel The tail end of the re-isolated exhaust passage is forked to the isolated cooling intake passage. Furthermore, the rotary suction and desorber is of a rotary or rotary ring type. Further, the oxidizing catalyst unit carries manganese or/and iron with alumina, and the manganese/iron ratio is 1/3.

First, please refer to [FIG. 2], the first embodiment of the present invention includes: a rotary suction and desorber 10, which can be a rotating wheel or a rotating ring, not shown. There is an adsorption zone 11, a desorption zone 12 and an isolation cooling zone 13, and the adsorption zone 11 is provided with an adsorption inlet passage 111 and an adsorption exhaust passage 112, and the desorption zone 12 is provided with desorption intake air. The channel 121 and the desorption exhaust channel 122 are disposed opposite to the isolation cooling zone 13 with an isolated cooling air inlet 131 and an isolated cooling exhaust channel 132. The head end of the adsorption air inlet channel 111 and the adsorption exhaust channel 112 The tail end and the head end of the isolated cooling air inlet passage 131 are coupled to the clean room 50, and the trailing end of the isolated cooling exhaust passage 132 is coupled to the head end of the desorption inlet passage 121, and the desorption exhaust passage 122 The tail end is coupled to an external finishing apparatus 100, which may be a continuous suction desorption zeolite wheel concentrator, an activated carbon fluidized floating bed, an incinerator, a scrubber, a condenser, or any combination thereof. An adsorption differential pressure generator 20 (for example, a windmill or a blower) The adsorption air intake channel 111 or the adsorption exhaust channel 112; a desorption heat source 30 disposed in the desorption inlet channel 121; a desorption differential pressure generator 40 disposed in the desorption inlet channel 121 Or the desorption exhaust passage 122; an oxidation catalyst unit 60 disposed in the desorption inlet passage 121, and the oxidation catalyst unit 60 is supported by alumina to carry manganese or/and iron (manganese/iron ratio can be 1/3); a desorption exhaust gas recirculation passage 70, the head end is forked to the desorption exhaust passage 122 and the tail end is coupled to the tip end of the desorption inlet passage 121; a desorption exhaust gas flow control valve 81, disposed in the desorption exhaust passage 122 at a downstream portion of the decoupling exhaust passage 122 and the desorption exhaust gas recirculation passage 70 fork; a desorption exhaust recirculation airflow control valve 82, disposed at the The exhaust gas recirculation passage 70 is desorbed; and an isolated intake air flow control valve 83 is disposed at the isolated cooling intake passage 131.

Next, referring to FIG. 3, the second embodiment of the present invention further provides an ozone supply unit 90 at the upstream of the oxidation catalyst unit 60 at the desorption inlet passage 121; The suction and desorber 10 may further be provided with a further isolation region 14 , and a re-isolation air inlet channel 141 and a re-isolation exhaust channel 142 are provided opposite to the re-isolation region 14 , and the head end of the re-isolation air inlet channel 141 is forked. In the adsorption exhaust passage 112, the rear end of the re-isolated exhaust passage 142 is forked to the isolated cooling intake passage 131 for sufficient flushing (avoiding high and low concentration cross contamination).

Thereby, the adsorption differential pressure generator 20 passes the indoor gas through the adsorption inlet passage 111 and the adsorption zone 11, and the organic waste gas (such as IPA and PGMEA) contained in the adsorption zone 11 is adsorbed and purified, and purified. The gas is returned to the chamber through the adsorption exhaust passage 112; the isolated cooling inlet passage 131 and the isolated cooling exhaust passage 132 allow the indoor gas to pass through the isolated cooling zone 13 to recover heat (both isolated and cooled) The isolated gas stream after heat recovery is a gas source for desorbing the gas stream; the desorption pressure difference generator 40 is passed through the desorption inlet channel 121 and heated by the desorption heat source 30 (about heating to 180 to 200 ° C) The desorbed gas stream passes through the desorption zone 12, thereby desorbing the adsorbed organic compound, and then passing through the desorption exhaust passage 122 to the external finishing equipment for purification; the desorption exhaust gas recirculation The channel 70 recirculates the partially desorbed organic exhaust gas, and merges with the heat-recovered isolation gas stream to become a gas source for the desorbed gas stream; the oxidation catalyst unit 60 desorbs the organic compound contained in the gas stream at a temperature (about 180 ~200 ° C) and spatial flow The decomposition GHSV>10,000 hr-1 is decomposed and purified (efficiency >95%), and the desorbed degassed gas stream is desorbed through the desorption zone 12. Furthermore, if the ozone supply unit 90 disposed upstream of the desorption inlet channel 121 and located upstream of the oxidation catalyst unit 60 is further opened, the oxidation catalyst unit 60 will desorb the organic compound contained in the gas stream. Temperature (about 80 ~ 140 ° C) and space flow rate GHSV > 10,000 hr-1, can be decomposed and purified (efficiency > 95%), can achieve the effect of purification at lower desorption oxidative decomposition temperature, and energy saving needs.

Based on the configuration, the present invention recirculates the partially desorbed organic exhaust gas by the desorption exhaust gas recirculation passage 70, and merges with the heat recovery and separated airflow to become a gas source for desorbing the gas flow; this design can be caused by reflux The temperature of the organic exhaust gas is higher than the temperature of the isolated gas stream, so that the temperature of the desorbed gas stream after the confluence is increased a lot, so that the desorption heat source 30 can reduce the load for heating the desorbed gas stream, and the desorbed gas stream is mixed and refluxed. The organic exhaust gas and the isolated airflow (for example, half of the air volume) can reduce the amount of isolated airflow flowing out of the clean room 50 (half the air volume), and can also reduce the external air supply in the clean room 50. The utility model reduces the energy consumption of the external air conditioning in the clean room 50; therefore, the novel can reduce the load of the desorption heat source 30 and reduce the energy consumption of the external air in the clean room 50, thereby greatly reducing the running energy consumption and reducing The effect of exhaust. The oxidizing catalyst unit carries manganese or/and iron as alumina.

In summary, the structure disclosed in the present invention is unprecedented, and can indeed achieve the improvement of efficacy, and has industrial availability, fully conforms to the new patent requirements, and prays for the patent to encourage innovation. There is no sense of morality.

However, the drawings and descriptions disclosed above are only preferred embodiments of the present invention, and those skilled in the art, which are subject to the spirit of the present invention, should be included in the scope of the patent application.

10‧‧‧Rotary suction and desorber
11‧‧‧Adsorption zone
111‧‧‧Adsorption air intake channel
112‧‧‧Adsorption exhaust passage
12‧‧‧Decoupling area
121‧‧‧Withdraw air intake
122‧‧‧Disconnected exhaust passage
13‧‧‧Isolated cooling zone
131‧‧‧Isolated cooling inlet
132‧‧‧Isolated cooling exhaust passage
14‧‧‧Re-isolated area
141‧‧‧Separate the intake passage
142‧‧‧Separate the exhaust passage
20‧‧‧Adsorption pressure difference generator
30‧‧‧Desorption heat source
40‧‧‧Desorption differential pressure generator
50‧‧‧Clean indoor
60‧‧‧Oxidation catalyst unit
70‧‧‧Desorbed exhaust gas return channel
81‧‧‧Desorbed exhaust air flow control valve
82‧‧‧Without exhaust gas recirculation control valve
83‧‧‧Isolated intake air flow control valve
90‧‧‧Ozone supply unit
100‧‧‧ final processing equipment

[Fig. 1] is a schematic structural view of a conventional indoor low-concentration organic exhaust gas purifying device. Fig. 2 is a schematic view showing the structure of the first embodiment of the present invention. [Fig. 3] is a schematic structural view of a second embodiment of the present invention.

10‧‧‧Rotary suction and desorber

11‧‧‧Adsorption zone

111‧‧‧Adsorption air intake channel

112‧‧‧Adsorption exhaust passage

12‧‧‧Decoupling area

121‧‧‧Withdraw air intake

122‧‧‧Disconnected exhaust passage

13‧‧‧Isolated cooling zone

131‧‧‧Isolated cooling inlet

132‧‧‧Isolated cooling exhaust passage

14‧‧‧Re-isolated area

141‧‧‧Separate the intake passage

142‧‧‧Separate the exhaust passage

20‧‧‧Adsorption pressure difference generator

30‧‧‧Desorption heat source

40‧‧‧Desorption differential pressure generator

50‧‧‧Clean indoor

60‧‧‧Oxidation catalyst unit

70‧‧‧Desorbed exhaust gas return channel

81‧‧‧Desorbed exhaust air flow control valve

82‧‧‧Without exhaust gas recirculation control valve

83‧‧‧Isolated intake air flow control valve

90‧‧‧Ozone supply unit

100‧‧‧ final processing equipment

Claims (9)

An indoor low-concentration organic waste gas purification device comprises: a rotary suction and desorber, which has an adsorption zone, a desorption zone and an isolation cooling zone, and is provided with an adsorption inlet channel and an adsorption row relative to the adsorption zone; a gas passage, and a desorption inlet passage and a desorption exhaust passage are disposed opposite to the desorption region, and an isolation cooling inlet passage and an isolated cooling exhaust passage are provided opposite to the isolation cooling region, the head of the adsorption intake passage The end of the adsorption exhaust passage and the head end of the isolated cooling intake passage are connected to the chamber, and the tail end of the isolated cooling exhaust passage is coupled to the head end of the desorption inlet passage, the desorption exhaust The tail end of the channel is connected to the outside; an adsorption differential pressure generator is disposed on the adsorption inlet passage or the adsorption exhaust passage; a desorption heat source is disposed on the desorption inlet passage; and a desorption differential pressure generator Provided in the desorption inlet passage or the desorption exhaust passage; an oxidation catalyst unit disposed on the desorption inlet passage; and a desorption exhaust recirculation passage, the head end being forked to the desorption row Gas passage and end connection The head end of the intake passage desorption. The indoor low-concentration organic waste gas purification device according to claim 1, wherein a desorption exhaust gas flow control valve, a desorption exhaust gas flow control valve and an isolated intake air flow control valve are further disposed. a desorption exhaust gas flow control valve is disposed at the desorption exhaust passage at a downstream portion of the desorption exhaust passage and the desorption exhaust gas recirculation passage fork, and the desorption exhaust recirculation airflow control valve is disposed at the The exhaust gas return passage is detached, and the isolated intake air flow control valve is disposed in the isolated cooling intake passage. The indoor low-concentration organic exhaust gas purifying apparatus according to claim 1 or 2, wherein an ozone supply unit is further disposed at the upstream of the oxidation catalyst unit in the desorption inlet passage. The indoor low-concentration organic waste gas purification device according to the third aspect of the invention, wherein the tail end of the desorption exhaust passage is connected to an external final treatment device and then discharged after being purified. The indoor low-concentration organic exhaust gas purifying device according to claim 4, wherein the rotary suction and desorber further comprises a re-isolation zone, and the re-isolation zone is provided with a re-isolated air inlet channel and a re-isolation row The gas passage, the head end of the re-isolated intake passage is forked to the adsorption exhaust passage, and the rear end of the re-isolated exhaust passage is forked to the isolated cooling intake passage. The indoor low-concentration organic exhaust gas purifying device according to claim 5, wherein the rotary suction and desorber is a rotary or rotary ring type. The indoor low-concentration organic waste gas purification device according to claim 6, wherein the oxidation catalyst unit carries manganese or/and iron with alumina. The indoor low-concentration organic waste gas purification device according to claim 7, wherein the manganese/iron ratio is 1/3. The indoor low-concentration organic waste gas purification device according to claim 8, wherein the final treatment equipment is a continuous adsorption and desorption zeolite converter concentrator, an activated carbon fluidization floating bed, an incinerator, a scrubber, and condensation. Any or combination of the devices.